WO2020100328A1

WO2020100328A1 - Saw wire

Info

Publication number: WO2020100328A1
Application number: PCT/JP2019/019933
Authority: WO
Inventors: 伸彦藤原; 政志飛田
Original assignee: トクセン工業株式会社
Priority date: 2018-11-15
Filing date: 2019-05-20
Publication date: 2020-05-22
Also published as: CN112839771A; KR20210042397A; JP6514821B1; JP2020082201A; TWI691378B; CN112839771B; KR102531328B1; TW202019616A

Abstract

A saw wire 2 according to the present invention comprises a first kinked section 4, a second kinked section 6, a third kinked section 8, and a straight section 10. The first kinked section 4 has the shape of a wave oscillating in a plane. The second kinked section 6 has kinks including a first wave component that oscillates in a plane, and a second wave component that oscillates in a plane different from the plane of the first wave component. The third kinked section 6 has the shape of a wave that oscillates in a plane different from the plane the first kinked section 4. The straight section 10 does not have a wave shape. The oscillation direction of the first wave component substantially matches the oscillation direction of the wave in the first kinked section. The oscillation direction of the second wave component substantially matches the oscillation direction of the wave in the third kinked section.

Description

Saw wire

The present invention relates to saw wire. In particular, the present invention relates to improving the squirting of saw wires.

Saw wire is used for slicing semiconductor ingots. A wafer is obtained by slicing. Fixed-abrasive saw wires and loose-abrasive saw wires have been used. The fixed-abrasive saw wire has excellent cutting efficiency. However, the cutting surface obtained by the fixed-abrasive saw wire has poor dimensional accuracy. From the viewpoint of wafer performance, a free-abrasive saw wire is advantageous.

With a loose-abrasive saw wire, slurry is sprayed onto this saw wire prior to slicing. This slurry contains abrasive grains. The traveling of the saw wire causes the abrasive grains to be drawn between the ingot and the saw wire. The movement of the abrasive grains cuts the ingot to achieve slicing. A saw wire that can draw in many abrasive grains has excellent cutting efficiency. The saw wire that can draw in many abrasive grains can also contribute to the dimensional accuracy of the cutting surface.

Japanese Unexamined Patent Application Publication No. 2004-276207 discloses a stiff saw wire. This habit has a wavy shape. The wave has peaks and valleys. Abrasive grains are trapped in the valleys and travel inside the ingot. This saw wire can pull in many abrasive grains.

A similar sewn wire is disclosed in Japanese Patent Publication No. 2008-519698. This saw wire has two waves. The vibration direction of one wave is different from the vibration direction of the other wave.

Japanese Patent Laid-Open No. 2004-276207 Special table 2008-519698

Improvement of cutting efficiency of saw wire is desired. Further improvement in the accuracy of the cutting surface is also desired. An object of the present invention is to provide a saw wire that can meet these demands.

The saw wire according to the present invention has a first squeezing portion and a second squeezing portion. The first baffle portion has a wave shape that oscillates in a plane. The second peculiar portion has a peculiarity that includes a first wave component that vibrates in a plane and a second wave component that vibrates in a plane different from the plane of the first wave component.

Preferably, the vibration direction of the second wave component is substantially perpendicular to the vibration direction of the first wave component.

In the first habituation section, mountains and valleys can alternate. Preferably, the number of peaks in one first squeezing portion is 5 or more and 300 or less.

In the first wave component of the second habitual part, peaks and valleys can be arranged alternately. Preferably, the number of peaks of the first wave component in one second squeezing portion is 5 or more and 300 or less.

In the second wave component of the second habitual part, peaks and valleys can be arranged alternately. Preferably, the number of peaks of the second wave component in one second squeezing portion is 5 or more and 300 or less.

Preferably, the saw wire further includes a third baffle portion. The third peculiar portion has a wave shape that oscillates in a plane different from the plane of the first peculiar portion.

Preferably, the vibration direction of the waves in the third peculiar portion is substantially perpendicular to the vibration direction of the waves in the first peculiar portion.

Preferably, the vibration direction of the first wave component is substantially the same as the vibration direction of the wave in the first squeezing portion, and the vibration direction of the second wave component is substantially the same as the vibration direction of the wave in the third squeezing portion. Match.

In the third setting section, mountains and valleys can be arranged alternately. The number of peaks in one third quirky portion is 5 or more and 300 or less.

Preferably, the saw wire further includes a straight portion.

Since the saw wire according to the present invention has two or more squeezing portions, it has excellent abrasive grain drawing performance. With this saw wire, efficient cutting can be performed. With this saw wire, a cutting surface with good dimensional accuracy can be obtained.

1A is a front view showing a part of a saw wire according to an embodiment of the present invention, and FIG. 1B is a plan view showing the saw wire of FIG. 1A. FIG. 2 is an enlarged right side view showing the first gusset portion of the saw wire of FIG. 1. FIG. 3 is an enlarged front view showing a part of the first baffle portion of FIG. 2. FIG. 4 is an enlarged right side view showing a part of the second squeezing portion of the saw wire of FIG. 1. FIG. 5 is a schematic diagram showing the first wave component of the second squeezing portion of FIG. FIG. 6 is a schematic diagram showing the second wave component of the second squeezing portion of FIG. FIG. 4 is an enlarged right side view showing the third brace portion of the saw wire of FIG. 1. FIG. 8 is an enlarged front view showing a part of the third baffle portion of FIG. 7. FIG. 9 is a schematic view showing a part of the brace device for the saw wire of FIG. 1.

Hereinafter, the present invention will be described in detail based on preferred embodiments with reference to the drawings as appropriate.

The saw wire 2 is shown in FIGS. 1 (a) and (b) and FIG. 2. In FIG. 1A, the vertical direction (Y direction) is the vertical direction, and the horizontal direction (X direction) is the horizontal direction. In FIG. 1B, the vertical direction (Z direction) is the horizontal direction, and the horizontal direction (X direction) is also the horizontal direction. The X direction is also the length direction of the saw wire 2. The saw wire 2 is attached to a saw machine and runs leftward in FIG.

The saw wire 2 has a first squeezing portion 4, a second squeezing portion 6, a third squeezing portion 8 and a straight portion 10. The second peculiar portion 6 is located downstream of the first peculiar portion 4. The third peculiar portion 8 is located downstream of the second peculiar portion 6. The straight portion 10 is located downstream of the third straightening portion 8. The first squeezing portion 4, the second squeezing portion 6, the third squeezing portion 8 and the straight portion 10 form one cycle. In the saw wire 2, a plurality of cycles are regularly arranged along the length direction. The plurality of first squeezing portions 4, the plurality of second squeezing portions 6, the plurality of third squeezing portions 8, and the plurality of straight portions 10 may be arranged irregularly.

FIG. 2 shows the first baffle unit 4. The first squeezing portion 4 has a wave shape. As is clear from referring to FIGS. 1A and 1B and FIG. 2 together, the wave of the first squeezing portion 4 vibrates in the XY plane. This wave is not oscillating in other planes. This wave is a two-dimensional wave. This wave oscillates at a constant wavelength. The vibration direction of this wave is the Y direction.

3 is an enlarged front view showing a part of the first squeezing portion 4 of the saw wire 2 of FIG. 1 (a). As described above, the shape of the first baffle portion 4 is a wave that vibrates in the Y direction. The first peculiar portion 4 has a mountain 12 and a valley 14. A large number of peaks 12 and a large number of valleys 14 are alternately arranged (see also FIG. 1A). The first peculiarizing portion 4 supplements the ridges 12 or the valleys 14 with abrasive grains and draws them into the cutting surface. The number of peaks 12 in one first squeezing portion 4 is preferably 5 or more and 300 or less, and more preferably 10 or more and 200 or less. The number of valleys 14 is approximately the same as the number of peaks 12.

In FIG. 3, the arrow WL1 indicates the wavelength, and the arrow WH1 indicates the wave height. The wavelength WL1 is preferably 0.2 mm or more and 50 mm or less, and particularly preferably 0.3 mm or more and 40 mm or less. The wave height WH1 is preferably 0.10 mm or more and 0.25 mm or less, and particularly preferably 0.11 mm or more and 0.20 mm or less.

Preferably, the wavelength WL1 satisfies the following formula.
1.1 * Di ≤ WL1 ≤ 50 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 2). In other words, the wavelength WL1 is 1.1 times or more and 50 times or less the wire diameter Di. Preferably, the wavelength WL1 is 3 times or more and 40 times or less of the wire diameter Di.

Preferably, the wave height WH1 satisfies the following mathematical formula.
1.05 * Di ≤ WH1 ≤ 5 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 2). In other words, the wave height WH1 is 1.05 times or more and 5 times or less the wire diameter Di. Preferably, the wave height WH1 is 1.10 times or more and 3 times or less of the wire diameter Di.

FIG. 4 is an enlarged right side view showing a part of the second squeezing portion 6 of the saw wire 2 of FIG. The second peculiar portion 6 has a wavy peculiarity. This habit has a shape in which the first wave component 16 and the second wave component 18 are compounded, which is schematically shown in FIG. In other words, in the second brace 6, the vibration of the first wave component 16 and the vibration of the second wave component 18 simultaneously proceed along the length direction of the saw wire 2. The habit may have a shape in which three or more wave components are combined.

The first wave component 16 is schematically shown in FIG. As is clear from FIGS. 4 and 5, the first wave component 16 is oscillating in the XY plane. The first wave component 16 does not vibrate on other planes. The first wave component 16 is a two-dimensional wave. The first wave component 16 vibrates at a constant wavelength. The vibration direction of the wave of the first wave component 16 is the Y direction. The vibration direction of the wave of the first wave component 16 coincides with the wave vibration direction of the first squeezing portion 4. The vibration direction of the wave of the first wave component 16 may be different from the vibration direction of the wave of the first inclining portion 4.

As shown in FIG. 5, the first wave component 16 has many peaks 20 and many valleys 22. These peaks 20 and valleys 22 are alternately arranged along the X direction. The saw wire 2 captures the abrasive grains at the peaks 20 or the valleys 22 of the first wave component 16 and draws them into the cutting surface. The number of peaks 20 of the first wave component 16 in one second squeezing portion 6 is preferably 5 or more and 300 or less, and more preferably 10 or more and 200 or less. The number of valleys 22 is almost the same as the number of peaks 20. In FIG. 5, arrow WL21 represents the wavelength of the first wave component 16, and arrow WH21 represents the wave height of the first wave component 16.

Preferably, the wavelength WL21 of the first wave component 16 satisfies the following formula.
1.1 * Di ≤ WL21 ≤ 50 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 4). In other words, the wavelength WL21 of the first wave component 16 is 1.1 times or more and 50 times or less the wire diameter Di. Preferably, the wavelength WL21 is 3 times or more and 40 times or less of the wire diameter Di.

Preferably, the wave height WH21 of the first wave component 16 satisfies the following formula.
1.05 * Di ≦ WH21 ≦ 5 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 4). In other words, the wave height WH21 of the first wave component 16 is 1.05 times or more and 5 times or less the wire diameter Di. Preferably, the wave height WH21 is 1.10 times or more and 3 times or less of the wire diameter Di.

The second wave component 18 is schematically shown in FIG. As is clear from FIGS. 4 and 6, the second wave component 18 is oscillating in the XZ plane. The second wave component 18 does not vibrate on other planes. The second wave component 18 is a two-dimensional wave. The second wave component 18 vibrates at a constant wavelength. The vibration direction of the wave of the second wave component 18 is the Z direction. The vibration direction of the second wave component 18 is different from the vibration direction of the first wave component 16. In the present embodiment, the vibration direction of the first wave component 16 is substantially perpendicular to the vibration direction of the second wave component 18. In other words, the angle θ _21-22 of the vibration direction of the second wave component 18 with respect to the vibration direction of the first wave component 16 is 90 ° (see FIG. 4). The angle θ _21-22 may be a value other than 90 °. The angle θ _21-22 is preferably 20 ° or more and 160 ° or less, and particularly preferably 30 ° or more and 150 ° or less.

As shown in FIG. 6, the second wave component 18 has many peaks 24 and many valleys 26. These peaks 24 and valleys 26 are alternately arranged along the X direction. The saw wire 2 captures the abrasive grains at the peaks 24 or the valleys 26 of the second wave component 18 and draws them into the cutting surface. The number of peaks 24 of the second wave component 18 in one second squeezing portion 6 is preferably 5 or more and 300 or less, and preferably 10 or more and 200 or less. The number of valleys 26 is approximately the same as the number of peaks 24. In FIG. 6, the arrow WL22 represents the wavelength of the second wave component 18, and the arrow WH22 represents the wave height of the second wave component 18.

Preferably, the wavelength WL22 of the second wave component 18 satisfies the following formula.
1.1 * Di ≤ WL22 ≤ 50 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 4). In other words, the wavelength WL22 of the second wave component 18 is 1.1 times or more and 50 times or less of the wire diameter Di. Preferably, the wavelength WL22 is 3 times or more and 40 times or less of the wire diameter Di.

Preferably, the wave height WH22 of the second wave component 18 satisfies the following mathematical formula.
1.05 * Di ≤ WH22 ≤ 5 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 4). In other words, the wave height WH22 of the second wave component 18 is 1.05 times or more and 5 times or less the wire diameter Di. Preferably, the wave height WH22 is 1.10 times or more and 3 times or less of the wire diameter Di.

The wavelength WL22 of the second wave component 18 may be the same as the wavelength WL21 of the first wave component 16. The wavelength WL22 may be different from the wavelength WL21. The wave height WH22 of the second wave component 18 may be the same as the wave height WH21 of the first wave component 16. The wave height WH22 may be different from the wave height WH21.

The first wave component 16 and the second wave component 18 are two-dimensional waves as described above. A three-dimensional wave is formed by combining the first wave component 16 and the second wave component 18. The habit of the second compliant portion 6 of the saw wire 22 has a three-dimensional shape.

FIG. 7 shows the third baffle portion 8. The third peculiar portion 8 has a wave shape. As will be apparent with reference to FIGS. 1A and 1B and FIG. 7 together, the wave of the third inclining portion 8 vibrates in the XZ plane. This wave is not oscillating in other planes. This wave is a two-dimensional wave. This wave oscillates at a constant wavelength. The vibration direction of this wave is the Z direction. This vibrating direction is different from the vibrating direction of the wave of the first baffle portion 4. This vibrating direction is substantially perpendicular to the vibrating direction of the waves of the first baffle portion 4. In other words, the angle θ _1-3 formed by the vibration direction of the wave of the third peculiar portion 8 with respect to the vibration direction of the wave of the first peculiar portion 4 is 90 °. The angle θ _1-3 may be a value other than 90 °. The angle θ _1-3 is preferably 20 ° or more and 160 ° or less, and particularly preferably 30 ° or more and 150 ° or less.

The vibration direction of the wave of the third squeezing unit 8 matches the vibration direction of the wave of the second wave component. The vibration direction of the wave of the third baffle portion 8 may be different from the vibration direction of the wave of the second wave component.

FIG. 8 is an enlarged front view showing a part of the third gusseted portion 8 of FIG. 7. As described above, the shape of the third baffle portion 8 is a wave vibrating in the Z direction. The third peculiar portion 8 has a mountain 28 and a valley 30. A large number of peaks 28 and a large number of valleys 30 are alternately arranged (see also FIG. 1B). The third peculiar portion 8 supplements the ridges 28 or the valleys 30 with the abrasive grains and draws them into the cutting surface. The number of peaks 28 in one third squeezing portion 8 is preferably 5 or more and 300 or less, and more preferably 10 or more and 200 or less. The number of valleys 30 is approximately the same as the number of peaks 28.

In FIG. 8, the arrow WL3 indicates the wavelength, and the arrow WH3 indicates the wave height. The wavelength WL3 is preferably 0.2 mm or more and 50 mm or less, and particularly preferably 0.3 mm or more and 40 mm or less. The wave height WH3 is preferably 0.10 mm or more and 0.25 mm or less, and particularly preferably 0.11 mm or more and 0.20 mm or less.

Preferably, the wavelength WL3 satisfies the following formula.
1.1 * Di ≤ WL3 ≤ 50 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 7). In other words, the wavelength WL3 is 1.1 times or more and 50 times or less of the wire diameter Di. Preferably, the wavelength WL3 is 3 times or more and 40 times or less of the wire diameter Di.

Preferably, the wave height WH3 satisfies the following formula.
1.05 * Di ≤ WH3 ≤ 5 * Di
In this mathematical formula, Di represents the wire diameter (see FIG. 7). In other words, the wave height WH3 is 1.05 times or more and 5 times or less the wire diameter Di. Preferably, the wave height WH3 is 1.10 times or more and 3 times or less of the wire diameter Di.

The wavelength WL3 of the third squeezing unit 8 may be the same as the wavelength WL1 of the first squeezing unit 4. The wavelength WL3 may be different from the wavelength WL1. The wave height WH3 of the third peculiarizing portion 8 may be the same as the wave height WH1 of the first peculiarizing portion 4. The wave height WH3 may be different from the wave height WH1. The saw wire 2 may not have the third baffle portion 8. The saw wire 2 that does not have the third peculiar part 8 has two kinds of peculiar parts, that is, the first peculiar part 4 and the second peculiar part 6. The saw wire 2 may have four or more types of compliant parts.

In this saw wire 2, plural kinds of squeezing parts draw in the abrasive grains. Since these knuckles have different habits, many abrasive grains are drawn in. Moreover, these abrasive grains can be evenly drawn. With this saw wire 2, excellent cutting efficiency can be achieved. The saw wire 2 can also contribute to the dimensional accuracy of the cut surface.

The straight part 10 does not have a wave shape. The form of the saw wire 2 having the straight portion 10 is varied as a whole. This straight portion 10 can also contribute to the drawing of the abrasive grains. The saw wire 2 may not have the straight portion 10. What is indicated by an arrow Lm in FIG. 1B is the length of the straight portion 10. The length is preferably 5 mm or more and 50 mm or less, and preferably 10 mm or more and 40 mm or less.

In the present embodiment, the straight portion 10 is sandwiched between the first squeezing portion 4 and the third squeezing portion 8. The straight portion 10 may be sandwiched between the first squeezing portion 4 and the second squeezing portion 6. The straight portion 10 may be sandwiched between the second squeezing portion 6 and the third squeezing portion 8. The straight portion 10 may be sandwiched between the two first brace portions 4. The straight portion 10 may be sandwiched between the two second gusset portions 6. The straight portion 10 may be sandwiched between the two third straightening portions 8. The saw wire 2 may not have the straight portion 10.

The wire diameter Di of the saw wire 2 is preferably 0.05 mm or more and 1.00 mm or less, and particularly preferably 0.10 mm or more and 0.20 mm or less. The material of the saw wire 2 is metal. A typical metal is carbon steel. The saw wire 2 in which the surface of the main part made of carbon steel is plated with brass is preferable.

FIG. 9 is a schematic diagram showing a part of the habituating device 32 for the saw wire 2 of FIG. 1. The busbar 34 for the saw wire 2 is also shown in FIG. The bus bar 34 travels in the direction of arrow A in FIG. The squeezing device has a first gear pair 36 and a second gear pair 38. The second gear pair 38 is located downstream of the first gear pair 36. The axial direction of the second gear pair 38 is different from the axial direction of the first gear pair 36. The angle of the axial direction of the second gear pair 38 with respect to the axial direction of the first gear pair 36 is preferably 20 ° or more and 160 ° or less, and particularly preferably 30 ° or more and 150 ° or less. In this embodiment, this angle is 90 °.

The first gear pair 36 includes an upper gear 40 and a lower gear 42. The upper gear 40 includes a tooth portion 44 and an empty portion 46. A large number of teeth 48 are carved on the tooth portion 44. The hollow portion 46 does not have the tooth 48. The lower gear 42 also includes a tooth portion 44 and an empty portion 46. A large number of teeth 48 are carved on the tooth portion 44. The hollow portion 46 does not have the tooth 48. The tooth portion 44 of the lower gear 42 is located at a position corresponding to the tooth portion 44 of the upper gear 40. Therefore, the tooth portion 44 of the lower gear 42 meshes with the tooth portion 44 of the lower gear 42. The empty part 46 of the lower gear 42 is at a position corresponding to the empty part 46 of the upper gear 40. When the first gear pair 36 rotates, tooth portions 44 and empty portions 46 alternate in the nip between the upper gear 40 and the lower gear 42.

The second gear pair 38 includes a left gear 50 and a right gear. In FIG. 9, the right gear is not shown. The right gear is hidden by the left gear 50. The left gear 50 includes a tooth portion 44 and an empty portion 46. A large number of teeth 48 are carved on the tooth portion 44. The hollow portion 46 does not have the tooth 48. Although not shown, the right gear, like the left gear 50, also includes a tooth portion 44 and an empty portion 46. A large number of teeth 48 are carved on the tooth portion 44. The hollow portion 46 does not have the tooth 48. The tooth portion 44 of the right gear is located at a position corresponding to the tooth portion 44 of the left gear 50. Therefore, the tooth portion 44 of the right gear meshes with the tooth portion 44 of the left gear 50. The empty part 46 of the right gear is located at a position corresponding to the empty part 46 of the left gear 50. When the second gear pair 38 rotates, the tooth portions 44 and the empty portions 46 alternate in the nip between the left gear 50 and the right gear.

The bus 34 passes through the first gear pair 36. Plastic deformation occurs in the portion of the busbar 34 that has passed through the first gear pair 36 when the nip is the tooth portion 44. This plastic deformation gives the busbar 34 a component of a wave vibrating in the Y direction. No plastic deformation occurs in the portion of the busbar 34 that has passed through the first gear pair 36 when the nip is the vacant portion 46.

After the first gear pair 36, the busbar 34 passes through the second gear pair 38. Plastic deformation occurs in a portion of the busbar 34 that passes through the second gear pair 38 when the nip is the tooth portion 44. This plastic deformation gives the busbar 34 a component of a wave vibrating in the Z direction. No plastic deformation occurs in the portion of the busbar 34 that passes through the second gear pair 38 when the nip is the vacant portion 46.

A portion of the busbar 34 that is plastically deformed by the first gear pair 36 and is not plastically deformed by the second gear pair 38 has a wave shape that vibrates in the Y direction. This portion is the first baffle portion 4.

The portion of the busbar 34 that is plastically deformed by the first gear pair 36 and also plastically deformed by the second gear pair 38 has a characteristic that it includes a wave component that vibrates in the Y direction and a wave component that vibrates in the Z direction. Have. This portion is the second peculiar portion 6.

A portion of the busbar 34 that is not plastically deformed by the first gear pair 36 but plastically deformed by the second gear pair 38 has a wave shape that vibrates in the Z direction. This portion is the third baffle portion 8.

The portion of the busbar 34 that is not plastically deformed by the first gear pair 36 and is not plastically deformed by the second gear pair 38 does not have a wave shape. This portion is the straight portion 10.

Hereinafter, the effects of the present invention will be clarified by examples, but the present invention should not be construed in a limited way based on the description of the examples.

[Example 1]
The saw wire shown in FIGS. 1-8 was manufactured. The specifications of this saw wire are shown in Table 1 below. This saw wire is made of brass plated carbon steel.

[Example 2]
A saw wire of Example 2 was obtained in the same manner as in Example 1 except that the straight portion was not provided.

[Example 3]
A saw wire of Example 3 was obtained in the same manner as in Example 1 except that the third brace was not provided.

[Example 4]
A saw wire of Example 4 was obtained in the same manner as in Example 1 except that the straight portion and the third squeezing portion were not provided.

[Comparative Example 1]
A saw wire of Comparative Example 1 was obtained in the same manner as in Example 1 except that only the second gusset portion was provided.

[Comparative example 2]
A conventional saw wire was prepared. This saw wire has no wave shape.

[Test 1]
Each saw wire was attached to the saw machine. A slurry containing abrasive grains was applied to the surface of the saw wire. This saw wire was run at a speed of 0.6 mm / min to slice a glass plate. The roughness and waviness of the obtained cut surface were observed and evaluated. The results are shown in Tables 1 and 2 below as indexes. The larger the value, the better the evaluation.

[Test 2]
The roughness and waviness of the cut surface were evaluated in the same manner as in Experiment 1 except that the traveling speed of the saw wire was 0.8 mm / min. The results are shown in Tables 1 and 2 below as indexes. The larger the value, the better the evaluation.

As shown in Tables 1 and 2, the saw wire of the example is evaluated better than the saw wire of the comparative example. From this evaluation result, the superiority of the present invention is clear.

The saw wire according to the present invention can be used for cutting various articles.

2 ... Saw wire 4 ... 1st peculiar part 6 ... 2nd peculiar part 8 ... 3rd peculiar part 10 ...

Straight part

12, 20, 24, 28 ...

Mountain

14 , 22, 26, 30 ... Valley 16 ... First wave component 18 ... Second wave component 32 ... Fake device 34 ... Busbar 36 ... First gear pair 38 ... Second gear pair 40 ... Upper gear 42 ... Lower gear 44 ... Tooth portion 46 ... Empty portion 48 ... Tooth 50 ... Left gear

Claims

It has a first peculiar portion and a second peculiar portion,
The first baffle portion has a wave shape that oscillates in a plane,
The saw wire, wherein the second squeezing portion has a habit that includes a first wave component that oscillates in a plane and a second wave component that oscillates in a plane different from the plane of the first wave component.
The saw wire according to claim 1, wherein the vibration direction of the second wave component is substantially perpendicular to the vibration direction of the first wave component.
The saw wire according to claim 1 or 2, wherein peaks and valleys are alternately arranged in the first gusset portion, and the number of ridges in one first gusset portion is 5 or more and 300 or less.
In the first wave component of the second peculiar portion, peaks and valleys are alternately arranged, and the number of peaks of the first wave component in one second peculiar portion is 5 or more and 300 or less,
In the second wave component of the second peculiar portion, peaks and valleys are alternately arranged, and the number of peaks of the second wave component in one second peculiar portion is 5 or more and 300 or less. The saw wire according to any one of 1 to 3.
5. The method according to claim 1, further comprising a third squeezing portion, the third squeezing portion having a wave shape that oscillates in a plane different from the plane of the first squeezing portion. Saw wire.
The saw wire according to claim 5, wherein the vibration direction of the wave in the third squeezing portion is substantially perpendicular to the vibration direction of the wave in the first squeezing portion.
The vibration direction of the first wave component is substantially the same as the vibration direction of the wave in the first baffle portion, and the vibration direction of the second wave component is the vibration direction of the wave in the third baffle portion. A saw wire according to claim 5 or 6 which is substantially coincident.
The saw wire according to any one of claims 5 to 7, wherein peaks and valleys are alternately arranged in the third peculiar portion, and the number of peaks in one third peculiar portion is 5 or more and 300 or less.
The saw wire according to any one of claims 1 to 8, further comprising a straight portion.