JP2012121101A - Fixed abrasive grain wire - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fixed abrasive grain wire for effectively preventing reduction in lifetime.SOLUTION: This fixed abrasive grain wire is formed by fixing abrasive grains on the surface of a wavelike wire 11. The wavelike wire 11 is formed by arranging a plurality of wavelike curved parts 12 continuously in the longitudinal direction at a pitch P based on the wire diameter d. As a desired range of the pitch P of the wavelike curved parts 12, the range of 20 to 200 times the wire diameter d of the wavelike wire 11 can be used, for example.

Description

  The present invention relates to a fixed abrasive wire in which abrasive grains are fixed to the outer periphery of the wire, and particularly for cutting hard materials such as silicon, quartz, and ceramic, slicing, internal polishing, dicing, or cutting or cutting an ingot. The present invention relates to a fixed abrasive wire used.

  Conventionally for cutting, slicing, inner surface polishing, dicing, ingot cutting, etc. of high-hardness brittle materials such as single crystal silicon, polycrystalline silicon, sapphire, zirconia, quartz, and magnetic materials (collectively called cutting processing for convenience) Wire saws are widely used. In general, as a wire saw method, a loose abrasive method is exemplified. This method is a method of cutting a material (workpiece) while causing a wire to travel back and forth or in one direction and continuously supplying slurry containing loose abrasive grains to the wire.

  More recently, a fixed abrasive method has been proposed and put into practical use as another method of a wire saw. This method is a method in which abrasive grains such as diamond are fixed to the wire surface in advance by a resin binder or a plating layer, and it is not necessary to use slurry. Therefore, as compared with the loose abrasive method, there are advantages that the cutting speed is high, the loose abrasive particles are not scattered, the work environment is excellent, and the amount of waste liquid and the cleaning of the processed surface can be reduced.

  On the other hand, in the abrasive grain fixing method, diamond or other abrasive grains are fixed to the wire, so that the manufacturing cost is high, and improvement in cutting performance such as improvement in cutting speed and improvement in wire life is required to meet this increase in cost. .

  For example, Patent Document 1 discloses an electrodeposition wire tool that uses a core whose cross-sectional shape is not a perfect circle (polygonal shape or the like) as a core wire and uses a wire whose cross-sectional shape is different for each predetermined length in the longitudinal direction. Has been. According to the technique disclosed in this document, it is said that cutting performance can be improved by promoting discharge of cutting powder generated during cutting. Further, Patent Document 2 discloses a saw wire with a short-pitch wavy habit called “small wave habit”. According to the technique disclosed in this document, it is possible to satisfactorily introduce free abrasive grains into a part to be cut (processed part) or promote discharge of cutting powder from the processed part by adding a habit to the wire. It is supposed to be possible.

JP 2007-021677 A JP 2004-276207 A

  However, the techniques disclosed in the above-described patent documents have a problem that the cutting performance cannot be sufficiently improved.

  In the technique disclosed in Patent Document 1, the core wire used is a “non-conformal wire” that is not a wire having a perfect circular cross section (a perfect circular wire). As a result, the strength per unit area decreases. Therefore, the fixed-abrasive wire using such a modified wire has a tendency that sufficient durability cannot be secured, so that there has been a problem that the cutting performance cannot be sufficiently improved.

  Further, unlike the free abrasive grain system, the abrasive grain fixing system does not require the introduction of abrasive grains at the processing site, and therefore the use of corrugated wires has not been substantially studied. For example, in Patent Document 2 that discloses a loose abrasive system, there is a description that it can be used for fixed abrasive grains, but only a configuration that is practically used only for a loose abrasive system is disclosed. Absent. That is, in Patent Document 2, since nothing is disclosed about the fixed abrasive wire, cutting performance can be sufficiently improved in the fixed abrasive wire in which the “small wave” is attached to the wire. Whether or not it was not clear.

  The present invention has been made to solve such a problem, and an object thereof is to provide a fixed abrasive wire capable of improving cutting performance.

  In order to solve the above problems, the fixed abrasive wire according to the present invention is a fixed abrasive wire formed by fixing abrasive particles on the surface of the wire, and the wire is based on the wire diameter of the wire. A wavy wire in which a plurality of wavy curved portions are continuously arranged in the longitudinal direction at the pitch, and the wavy curved portion has a three-dimensional wavy shape that is spirally curved.

  In the above configuration, the pitch of the wavy curved portion in the wavy wire is preferably 20 times or more and 200 times or less the wire diameter of the wavy wire, and the wave height of the wavy curved portion in the wavy wire is the wavy shape. The wire diameter is preferably in the range of 1.05 to 3.00 times the wire diameter, and the wire diameter of the corrugated wire is preferably in the range of 0.05 mm to 0.32 mm.

  In the above configuration, the corrugated wire is made of metal, and the abrasive grains are fixed to the corrugated wire by a metal plating layer formed on the surface of the corrugated wire or a resin binder. I just need it.

  As described above, in the present invention, by making the fixed abrasive wire into a predetermined corrugated wire, it becomes easy to introduce coolant into the processing site, the fixed abrasive can be cooled, and the discharge of cutting powder can be promoted. As a result, the cutting performance can be improved.

(A) is a side view which shows typically the external appearance shape of the fixed abrasive wire which concerns on embodiment of this invention, (b) is the corrugated wire which is a core wire of the fixed abrasive wire shown to (a). FIG. 2 is a schematic diagram for explaining the pitch and wave height of a wave-like curved portion. (A) is a schematic diagram which shows schematic structure of the fixed abrasive wire which concerns on embodiment of this invention, (b) is II sectional view taken on the line of (a). (A), (b) is a schematic diagram which shows an example of the processing method of the corrugated wire which is a core wire of the fixed abrasive wire shown to Fig.1 (a). (A) is a typical perspective view which shows the structural example of the multi-wire saw using the fixed abrasive wire shown to Fig.1 (a), (b) is the arrow II of the multiwire saw shown to Fig.4 (a). It is a top view in the arrow view direction.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the following description, the same or corresponding elements are denoted by the same reference symbols throughout the drawings, and redundant description thereof is omitted.

[Wavy wire]
The fixed abrasive wire according to the present invention has a configuration in which abrasive grains are fixed to the surface of the wire, and a helical wavy wire is used as the wire. More specifically, as shown in FIG. 2A, the fixed abrasive wire 10 includes a corrugated wire 11, a fixing material 15 provided on the surface thereof, and abrasive grains 14 fixed by the fixing material 15. , Is composed of. Of course, it goes without saying that other components may be provided.

  In the fixed abrasive wire 10 shown in FIG. 1A, a portion 10a surrounded by a broken line in the drawing is a portion curved toward the front side of the drawing, and a portion 10b surrounded by a one-dot chain line in the drawing is on the back side of the drawing. It is a curved part, and one wavy curved part 12 is constituted by these parts 10a and 10b. The wavy curved portion 12 is a three-dimensional wavy shape that is helically curved, and the wavy wire 11 has a configuration in which a plurality of wavy curved portions 12 are continuously arranged in the longitudinal direction.

  Specifically, the wavy wire 11 is a standard wire in which a plurality of wavy curved portions 12 are continuously arranged in the longitudinal direction at a pitch based on the wire diameter of the wavy wire 11. It has been subjected to corrugated processing. In the following description, the wire before the abrasive grains are fixed is referred to as a “core wire” for the convenience of distinguishing from the fixed abrasive wire 10.

  The material of the corrugated wire 11 that is a core wire is not particularly limited, and various known materials can be used as long as the abrasive grains can be fixed to the surface thereof and can withstand the load applied when the workpiece is cut. A wire made of a material can be preferably used. Specifically, metal wires, such as a hard steel wire, a stainless steel wire, a tungsten wire, and a molybdenum wire, are mentioned, for example. Of these, from the viewpoint of strength and cost, a hard steel wire can be preferably used.

  The wire diameter (diameter) of the corrugated wire 11 is not particularly limited, and the shape and physical properties of the workpiece, the tension of the wire during cutting, the traveling speed of the wire (linear speed), and the pressing speed of the workpiece on the wire In the present invention, it is preferably within a range of 0.05 mm or more and 0.32 mm or less. Of course, even if the wire diameter is less than 0.05 mm or more than 0.32 mm, the operational effects of the present invention are not impaired, and the above-mentioned range is not limited to slicing or cutting the workpiece. This is an example of a particularly preferable range in the application to be performed.

  The wavy curved portion 12 in the wavy wire 11 indicates a portion where the core wire is bent in a wavy shape, and a plurality of the wavy curved portions 12 are continuously arranged in the longitudinal direction of the wavy wire. As schematically shown in FIG. 1B, the wavy wire 11 has a configuration in which a peak 11a (upper side in the figure) and a peak 11b (lower side in the figure) protruding in opposite directions are alternately repeated. Between the two continuous peaks 11a in the same direction (upper side in the figure), one wavy curved portion 12 is formed. The interval between the peaks 11a is the pitch (interval) P of the wavy curved portion 12. Further, in the adjacent peaks 11a and 11b, the distance between the surfaces in the same direction (the upper surface in the figure) becomes the wave height H of the wave-like curved portion 12. That is, in the configuration shown in FIG. 1B, the upper surface (outer surface) of the peak 11a protruding upward in the drawing and the lower surface (outer surface) of the peak 11b protruding downward in the drawing. ) Is the wave height H of the wavy curved portion 12.

  In FIG. 1B, for convenience of explanation, the wavy curved portion 12 is shown in a plan view, but actually, it is a spiral three-dimensional wave as shown in FIG. ing. Further, in FIG. 1B, the portion between the left peak 11a and the central peak 11b in the drawing corresponds to the portion 10a curved toward the front side shown in FIG. A portion between the central peak 11b and the right peak 11a in the drawing corresponds to a portion 10b curved to the back side shown in FIG.

  Here, in the present invention, the pitch P of the waved curved portion 12 is set based on the wire diameter d of the waved wire 11. A specific range of the pitch P is not particularly limited and can be appropriately selected according to the cutting conditions. In the present invention, the pitch P is 20 times or more and 200 times or less of the wire diameter d (20d ≦ P ≦ 200 d), preferably 30 times or more and 180 times or less (30 d ≦ P ≦ 180 d).

  Although depending on the cutting conditions, in the present embodiment, when the pitch P exceeds 200d, the radius of curvature of the wavy curved portion 12 becomes too large, and tension is applied to the fixed abrasive wire (the wavy wire 11) during processing such as cutting. There is a possibility that the curvature of the wavy curved portion 12 cannot be sufficiently maintained in a state where is added. On the other hand, when the pitch P is less than 20d, the radius of curvature of the wavy curved portion 12 becomes too small, and the strength of the fixed abrasive wire (the wavy wire 11) tends to decrease. Moreover, since the number of the wavy curved part 12 per unit length of the wavy wire 11 increases, processing cost rises.

  Specifically, for example, as described above, Patent Document 2 discloses a free abrasive grain type saw wire with a “small wave habit”, and describes that the saw wire is also applicable to a fixed abrasive grain type. ing. Here, in the configuration disclosed in Patent Document 1, even if the saw wire is a fixed abrasive method, the pitch P of “small wave habit” is set to 1.0 to 2.0 mm regardless of the wire diameter d of the core wire. ing. In this case, since the pitch P is too short, as described above, the strength of the core wire is reduced or the processing cost is increased.

  On the other hand, the fixed abrasive wire 10 according to the present invention sets the pitch P on the basis of the wire diameter d of the corrugated wire 11, so that it is possible to effectively suppress a decrease in strength of the corrugated wire 11 and an increase in processing cost, and a tension. It is possible to sufficiently maintain the curvature of the wavy curved portion 12 in a state where is added. Thereby, the lifetime reduction of a fixed abrasive wire can be suppressed effectively, and cutting performance can be maintained favorable.

  Here, in the present invention, the wave height H of the corrugated wire 11 is also set within a predetermined range based on the wire diameter d of the corrugated wire 11. Specifically, it can be appropriately selected according to the cutting conditions, but in the present invention, the wire diameter d is 1.05 times or more and 3.00 times or less (1.05 ≦ H ≦ 3.00). It is preferably 1.80 times or more and 2.50 times or less (1.80 ≦ H ≦ 2.50).

  When the wave height H is less than 1.05 times the wire diameter d, the radius of curvature of the wave-like curved portion 12 becomes too large, and tension is applied to the fixed abrasive wire (the wave-like wire 11) during processing such as cutting. There is a possibility that the curvature of the wavy curved portion 12 cannot be sufficiently maintained. On the other hand, when the wave height H exceeds 3.00 times the wire diameter d, the radius of curvature of the wave-like curved portion 12 becomes too small, and the strength of the fixed abrasive wire (the wave-like wire 11) tends to decrease, and the cutting process is performed. Sometimes kerf grows too big.

  Here, as described above, even if the pitch P is set based on the wire diameter d, an increase in kerf loss can be suppressed. Therefore, it is preferable that each of the wave height H and the pitch P is set so as to be within a suitable range in accordance with the cutting conditions so that neither the wave height H nor the pitch P becomes too large or too small. In the present embodiment, as described above, the pitch P is preferably in the range of 20d to 200d, and the wave height H is preferably in the range of 1.05d to 3.00d independently of the pitch P. Furthermore, it is more preferable that the pitch P is in the range of 20d to 200d and the wave height H is in the range of 1.05d to 3.00d.

  As described above, the shape of the wavy wire 11 may be a shape (wave shape) in which a plurality of wavy curved portions 12 are continuously arranged in the longitudinal direction, but each wavy curved portion 12 has the same pitch P or the same wave height. It may not be H. That is, the wavy wire 11 may have a configuration in which wavy curved portions 12 having the same pitch P and wave height H are continuously arranged. For example, there are two types according to the type of workpiece or the processing conditions. The wavy curved portions 12 (for example, the wavy curved portions 12 having a short pitch P and the wavy curved portions 12 having a long pitch P) may be alternately arranged, or three or more types of wavy curved portions 12 may be alternately arranged. The arrangement may be an arrangement, a regular arrangement other than an alternating arrangement, or a random arrangement.

  In any case, in the present invention, if the pitch P is set at least based on the wire diameter d of the wavy wire 11, various configurations can be adopted as the wavy wire 11 depending on cutting conditions. it can. In general cutting, it is more preferable that the wavy curved portions 12 are arranged in a substantially identical shape and uniformly in order to avoid stress concentration and improve the strength of the fixed abrasive wire.

  Further, as described above, the “wave shape” of the wavy wire 11 may be a three-dimensional wavy shape in which the wavy curved portion 12 is spirally curved, but the wavy curved portion 12 is within a single plane. Further, it may be a two-dimensional wave shape that is curved (in a planar shape), or may be a wave shape that combines these. The three-dimensional wave shape here includes not only a spiral shape by a general curve, but also a shape that is spiral when viewed as a whole by bending the core wire in a polygonal shape. Similarly, the two-dimensional wave shape includes a shape in which the core wire is bent in a substantially wave shape.

[Abrasive grains and their fixation]
As shown in FIG. 2 (a), the fixed abrasive wire 10 according to the present invention has a configuration in which abrasive grains 14 are fixed to a surface of the corrugated wire 11 having the above-described configuration by a fixing material 15. The specific kind of the grain 14 is not particularly limited, and known ones such as diamond abrasive grains, alumina abrasive grains, and silicon carbide abrasive grains can be suitably used. Further, the particle diameter of the abrasive grains 14 is not particularly limited, and those having a preferable particle diameter can be used depending on the type of the abrasive grains 14 or cutting conditions. In the present embodiment, for example, diamond abrasive grains having a particle diameter in the range of 5 to 30 μm can be suitably used.

  Further, the method for fixing the abrasive grains 14 to the surface of the corrugated wire 11 is not particularly limited. As shown in FIG. 2B, a known fixing method using a fixing material 15 such as a resin binder or a plating layer is suitably used. Can be used.

  Of these, the fixing method using a resin binder typically involves preparing a solution containing the resin used as the fixing material 15 and the abrasive grains 14, applying the resin solution to the surface of the corrugated wire 11, and then heating or It is a method of baking. As the resin used, a known resin such as a phenol resin, a formalin resin, a polyurethane resin, a polyester resin, a polyimide resin, an epoxy resin, a melamine resin, or a urea resin can be suitably used. Further, the method for preparing the resin solution, the method for applying the resin solution, and the heating or baking method after the application are not particularly limited, and various known methods can be suitably used. The resin binder may contain various known additives.

  Next, the fixing method using the plating layer is a method of fixing the abrasive grains 14 to the corrugated wire 11 using electroplating. For example, an “abrasive electrodeposition wire” disclosed in Japanese Patent No. 4538049 has been developed by the applicant of the present application. In this publication, a preferred example of a method for fixing the abrasive grains 14 with a plating layer is described. The contents of this publication are made a part of the description of the present specification by referring to the present specification.

  In addition, in this invention, it cannot be overemphasized that well-known methods other than what was mentioned above can be used suitably also in any of the fixing method by a resin binder or a plating layer. Furthermore, in this invention, fixing methods other than a resin binder or a plating layer can be used.

  Here, in the present invention, it is preferable to manufacture the fixed abrasive wire 10 by fixing the abrasive grains 14 to the surface of the corrugated wire 11 after the corrugated wire 11 is manufactured first. In other words, it is preferable to fix the abrasive grains 14 after performing the process of corrugating the core wire, rather than performing the corrugating process after fixing the abrasive grains 14 to the core wire. In the process of corrugating the core wire, an external force is applied to the core wire. Therefore, if the abrasive grains 14 are fixed first, the abrasive grains 14 may be detached by the external force. On the other hand, if the abrasive grains 14 are fixed to the surface of the wavy wire 11 on which the wavy curved portion 12 has been formed in advance, the abrasive grains 14 may be detached from the surface of the wavy wire 11 when the wavy curved portion 12 is formed. Can be avoided. As a result, the lifetime reduction of the fixed abrasive wire 10 can be more effectively suppressed.

[Wave wire processing method]
In the present invention, the processing method of the corrugated wire 11 (corrugation method to the core wire) is not particularly limited, and the corrugated curved portion 12 is continuously connected in the longitudinal direction with the pitch P with reference to the wire diameter d. Any known method can be used as long as it can be processed so as to be arranged.

  For example, in the processing method shown in FIG. 3A, the core wire 13 is alternately passed between the three pins 21, and the core wire 13 is rotated in the direction of the arrow C <b> 1 to form the spiral wavy wire 11. is doing. Further, in the processing method shown in FIG. 3B, the pin gears 24 having the pins 24 a provided on the entire outer periphery are meshed with each other, and the core wire 13 is supported by the pair of guide tips 25. The pin gear 24 is rotated in the direction of the arrow C4 by passing through the meshing portions, thereby forming the two-dimensional corrugated wire 11. For convenience of explanation, the pin gear 24 shows the pin 24a only at the meshing portion, but the pin 24a is provided on the entire outer peripheral portion as described above. Moreover, it is also possible to use a general gear instead of the pin gear 24a. In this case, not a curved wave shape but a bent substantially wave shape can be formed.

  In addition, when manufacturing the fixed abrasive wire 10 according to the present invention, in addition to the above-described fixing method of the abrasive grains 14 or the processing method of the corrugated wire 11, the fixed abrasive grains can be used by using various known processes. The wire 10 can be modified.

[How to use fixed abrasive wire]
The fixed abrasive wire 10 according to the present invention can be suitably used for a known wire saw. Typical wire saws include single wire saws and multi-wire saws. The single wire saw has a configuration in which a loop-shaped saw wire (fixed abrasive wire 10) is stretched between a plurality of rollers, and the saw wire is circulated between the rollers so that the workpiece is pressed against the wire. Cutting. As shown in FIG. 4A, the multi-wire saw unwinds a saw wire (fixed abrasive wire 10) wound around a bobbin (not shown) and coiles it on a plurality of rollers 16 (two in FIG. 4A). The wire row 17 is formed by being stretched so as to be wound at a predetermined interval. In this state, the fixed abrasive wire 17 is caused to travel by rotating the bobbins alternately in the forward direction or the reverse direction. Accordingly, the fixed abrasive wire 10 forming the wire row 17 also travels in the forward direction or the reverse direction, so that the workpiece 20 is pressed against this to perform cutting. In any of the wire saws, the wire or the wire row travels with a predetermined tension applied, and the workpiece is brought into contact with the traveling wire or wire row for cutting. .

  The wire saw is generally configured to be in contact with a traveling wire or wire row while a workpiece is supported by a table, but the specific configuration is not particularly limited. For example, the workpiece may be pressed and brought into contact with the wire or the wire row by moving the table, or the wire or wire row may be moved and pressed and brought into contact with the workpiece. Also good. Moreover, the structure which abuts the lower surface of a workpiece on the upper side of a wire or a wire row may be sufficient, and the structure which presses the upper surface of a workpiece on the lower side of a wire or a wire row may be sufficient. In FIG. 4A, for convenience of describing the wire row 17, a table is not shown.

  The fixed abrasive wire 10 according to the present invention can be suitably used not only in a wire saw having any of the above-described configurations but also in a wire saw having a known configuration other than the above or a cutting device similar thereto. Can do.

  Here, since the wire saw performs cutting while pressing the workpiece against the traveling wire, the wire is bent in the pressing direction of the workpiece. For example, FIG. 4 (b) is a plan view from the direction of the arrow II of the two-dot chain line in FIG. 4 (a). As shown in FIG. When the object 20 is pressed, the fixed abrasive wire 10 bends with a deflection amount f.

  Although the wire deflection amount f varies depending on the cutting conditions, generally, when the pressing speed of the workpiece 20 is high, the wire deflection amount f increases and the cutting accuracy tends to decrease. In particular, if the amount of deflection f becomes too large, the wire may be broken. On the other hand, if the pressing speed of the workpiece 20 is slow, the deflection amount f of the wire can be reduced, but the time required for the cutting process becomes long, the efficiency of the cutting process is lowered, and the consumption of the wire is increased. That is, when the “sharpness” of the wire is good, the amount of deflection becomes small, but when the “cutness” is bad, the amount of deflection becomes large.

  On the other hand, in the fixed abrasive wire 10 according to the present invention, as described above, the pitch P of the wavy curved portion 12 is set based on the wire diameter d of the wavy wire 11 (core wire). Sometimes, an increase in the amount of deflection f of the wire can be suppressed, and the “sharpness” can be improved to realize quick and efficient cutting.

  Note that the strength of the corrugated wire 11 tends to be relatively lower than that of the wire before corrugation. This is because the corrugated wire 11 is obtained by plastically deforming the wire as in the processing method (corrugation method) described above. Here, in the fixed abrasive wire 10 according to the present invention, the pitch P of the wavy curved portion 12 formed by corrugation is set to a length based on the wire diameter d (preferably within a range of 20d to 200d). Therefore, it is possible to corrugate so as to further reduce the strength reduction.

  Furthermore, in the fixed abrasive wire 10 according to the present invention, the pitch P of the wavy curved portion 12 is set so that the above-described curved shape remains effectively even when a tension is applied during cutting. Therefore, as described above, the strength of the corrugated wire 11 and the increase in processing cost can be effectively suppressed, and the curvature of the corrugated curved portion 12 can be sufficiently maintained in a state where tension is applied. It becomes easy to hold | maintain the cutting powder of a workpiece in the recessed part of the curved part 12, and to discharge | release outside. That is, the “sharpness” of the fixed abrasive wire 10 can be improved.

  As described above, the fixed abrasive wire 10 according to the present invention has an improved “sharpness” in the first place and can apply a relatively strong tension as compared with the conventional wavy wire. The amount of deflection can be further reduced, and cutting can be performed more quickly and efficiently. Moreover, since it is possible to apply a stronger tension than before, the strength of the corrugated wire 11 that is the core wire is also relatively improved, so the durability of the core wire can be improved. The lifetime reduction of the fixed abrasive wire 10 can be effectively suppressed.

  In a typical wire saw, coolant is supplied to a contact portion between a wire or a wire row and a workpiece. The coolant may be an oil-based coolant mainly composed of mineral oil, or a water-soluble coolant containing a water-soluble low molecular weight resin or the like. In particular, a water-soluble coolant is preferable because it has an advantage that an organic solvent is not required for cleaning a workpiece after processing, compared to an oil-based coolant. Specific examples of the water-soluble coolant include, but are not particularly limited to, a structure containing low molecular weight polyglycols, a structure containing amines and a water-soluble polyether, and a known one can be suitably used. .

  In particular, in the present invention, since the fixed abrasive wire 10 has the wavy curved portion 12, it becomes easy to hold the coolant in the concave portion of the wavy curved portion 12 during cutting. Therefore, it is possible to easily introduce the coolant between the fixed abrasive wire 10 and the workpiece. Moreover, as described above, the pitch P of the wavy curved portion 12 is set with reference to the wire diameter d of the wavy wire 11 (core wire), so that even when a tensile load is applied to the fixed abrasive wire 10, As long as it does not become excessively large, the wavy curved portion 12 can be appropriately held. As a result, the fixed abrasive wire 10 can be cooled satisfactorily, so that deterioration of the abrasive grains 14 due to heat can be effectively reduced, and the reduction in the life of the fixed abrasive wire 10 is more effectively suppressed. be able to.

  The present invention will be described more specifically based on examples, comparative examples, and reference examples, but the present invention is not limited thereto. Those skilled in the art can make various changes, modifications, and alterations without departing from the scope of the present invention.

[Example 1]
First, as the fixed abrasive wire 10 according to the present invention, the wavy curved portion 12 is spiral, the wire diameter d = 0.12 mm, the pitch P = 4 mm (about 33 d), and the wave height H = 0.23 mm (about 1.3 mm). A product obtained by fixing diamond abrasive grains having a particle diameter of 5 to 20 μm to the corrugated wire 11d of 92d) by an electroplating method was manufactured.

  Next, the fixed abrasive wire 10 according to the present invention is wound around a bobbin, wound around the outer periphery of the pair of main rollers 16 and 16 in a coil shape, and stretched with a tension of 25.0 N, so that FIG. The wire row 17 was formed as shown in FIG. Then, the fixed abrasive wire 10 was run at a linear speed (running speed) of 1000.0 m / min.

  As the workpiece 20, a single crystal Si ingot (height 125 mm, width 125 mm, length 200 mm) was used and supported by a table not shown in FIG. Then, while supplying the water-soluble coolant at an amount of 100.0 kg / min, the table is moved at a speed of 1000 μm / min (cutting speed) and the workpiece 20 is gradually approached to the wire row 17 that travels. The workpiece 20 was cut by bringing them into contact with each other.

  Under the above conditions, the amount of deflection f (see FIG. 4B) in the fixed abrasive wire 10 during the cutting process is measured, and the remaining state of the abrasive grains 14 in the fixed abrasive wire 10 after the cutting process is visually evaluated. did. When the abrasive grains 14 remained almost unchanged from that before cutting, the residual state was evaluated as ◯, and when the abrasive grains 14 could be clearly confirmed, the residual state was evaluated as x. . These results are shown in Table 1.

[Example 2]
As the fixed abrasive wire 10, the wave-like curved portion 12 is spiral, and the wave-like wire 11 has a wire diameter d = 0.12 mm, a pitch P = 20 mm (about 167 d), and a wave height H = 0.39 mm (about 3.25 d). The workpiece 20 was cut in the same manner as in Example 1 except that diamond abrasive grains having a particle diameter of 5 to 20 μm were fixed by electroplating. Table 1 shows the results of the deflection amount f and the afterimage state of the abrasive grains 14 at that time.

[Example 3]
As the fixed abrasive wire 10, the wavy curved portion 12 has a planar shape, and has a wire diameter d = 0.12 mm, a pitch P = 4 mm (about 33 d), and a wave height H = 0.29 mm (about 2.41 d). The workpiece 20 was cut in the same manner as in Example 1 except that diamond abrasive grains having a particle diameter of 5 to 20 μm were fixed by electroplating. Table 1 shows the results of the deflection amount f and the afterimage state of the abrasive grains 14 at that time.

[Comparative Example 1]
The workpiece 20 was cut in the same manner as in Example 1 except that a comparative saw wire in which diamond abrasive grains having a particle diameter of 5 to 20 μm were fixed to the core wire by electroplating was used. Table 1 shows the results of the deflection amount f and the afterimage state of the abrasive grains 14 at that time.

表１の結果から明らかなように、本発明に係る固定砥粒ワイヤ１０は、波付け加工していない比較ソーワイヤに比べて、たわみ量ｆを有意に小さくでき、その「切れ味」を向上させて、迅速かつ効率的な切削加工が可能になることがわかる。また、砥粒１４の残存状態は、比較例１の結果を砥粒脱離のポジティブコントロールとして実施例１〜３の結果を評価したものであるが、本発明に係る固定砥粒ワイヤ１０であれば、切削加工後も砥粒１４が十分に残存していることから、寿命の低下を有効に抑制できることがわかる。さらに、波状屈曲部位１２が平面状であっても、螺旋状の場合と同様のたわみ量ｆの抑制と砥粒１４の脱離の抑制の効果を得ることが可能となる。

As is clear from the results in Table 1, the fixed abrasive wire 10 according to the present invention can significantly reduce the amount of deflection f and improve its “sharpness” compared to a comparative saw wire that is not corrugated. It can be seen that quick and efficient cutting can be performed. Further, the remaining state of the abrasive grains 14 is obtained by evaluating the results of Examples 1 to 3 using the result of Comparative Example 1 as a positive control of abrasive grain detachment. In this case, it can be seen that since the abrasive grains 14 remain sufficiently even after the cutting process, it is possible to effectively suppress a decrease in the service life. Furthermore, even if the wave-like bent portion 12 is planar, it is possible to obtain the same effects of suppressing the deflection amount f and suppressing the detachment of the abrasive grains 14 as in the spiral case.

  It should be noted that the present invention is not limited to the description of the above-described embodiment, and various modifications are possible within the scope shown in the scope of claims, and each disclosed in different embodiments and a plurality of modifications. Embodiments obtained by appropriately combining technical means are also included in the technical scope of the present invention.

  The present invention can be widely used in the field of cutting work such as cutting, slicing, internal polishing, dicing, and ingot cutting of hard materials such as silicon, quartz, and ceramics.

DESCRIPTION OF SYMBOLS 10 Fixed abrasive wire 11 Corrugated wire 12 Corrugated curved part 14 Abrasive grain d Wire diameter P Pitch H Wave height

Claims (5)

A fixed abrasive wire formed by fixing abrasive grains on the surface of the wire,
The wire is a wavy wire in which a plurality of wavy curved portions are continuously arranged in the longitudinal direction at a pitch based on the wire diameter of the wire, and the wavy curved portions are three-dimensionally curved in a spiral shape A fixed-abrasive wire, characterized in that it is wavy.   2. The fixed abrasive wire according to claim 1, wherein a pitch of the wavy curved portion in the wavy wire is 20 to 200 times a wire diameter of the wavy wire.   2. The fixed abrasive according to claim 1, wherein a wave height of the wavy curved portion of the wavy wire is in a range of 1.05 times to 3.00 times the diameter of the wavy wire. Wire.   The fixed abrasive wire according to claim 2 or 3, wherein a wire diameter of the corrugated wire is in a range of 0.05 mm or more and 0.32 mm or less. The wavy wire is made of metal;
The fixed abrasive wire according to claim 1, wherein the abrasive grains are fixed to the corrugated wire by a metal plating layer formed on the surface of the corrugated wire or a resin binder.

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