TW201538290A - Transfer robot having eight robot arms - Google Patents

Abstract

The present invention relates to a transfer robot having eight robot arms. According to the present invention, the eight robot arms can individually be operated and it is possible to simultaneously load or extract transfer objects (substrates or wafers) which are vertically loaded on a predetermined unit pitch. The present invention includes: a post where an arm unit is coupled to be capable of a vertical linear motion; the arm unit having first to fourth robot arm pairs which are vertically coupled on both side surfaces of the post; and the first to fourth robot arm pairs being configured to have two robot arms horizontally coupled to form a pair to provide first to eighth robot arms. Extraction, transfer, or loading for the same position is realized; thus a plurality of transfer objects can be transferred at the same time, and tact time can be shortened.

Description

Eight-arm handling robot

The present invention relates to an eight-arm handling robot, and more particularly to an eight-arm handling robot in which eight robot arms can be separately driven to simultaneously load and unload a carrier (substrate, wafer, etc.) up and down in a certain pitch unit.

In a manufacturing process of a semiconductor device or a liquid crystal display or the like, a process of introducing or taking out a substrate such as a glass substrate for a semiconductor wafer or a liquid crystal display is required.

A substrate processing apparatus (transporting robot) currently being developed and used includes a dual-arm robot, a transport robot including a plurality of robot arms, and the like, and generally includes: a carrier holding portion that holds a plurality of carriers; and a substrate processing unit that processes the substrates; a reversing unit for attaching and detaching the stack between the carrier holding portion and the substrate processing portion; an indexer robot for transporting the substrate between each of the reversing unit and the carrier holding portion; and a main carrier for transporting the substrate between each of the reversing unit and the substrate processing portion Handling robots.

Such a transfer robot is basically for carrying out the transfer of wafers, substrates, or articles more efficiently, thereby shortening the production time (Tack Time) of the process single product and improving the process efficiency.

In the one-armed transport robot for transporting one substrate, a transport robot having two robot arms has been developed, and the two-arm structure has been modified to achieve a more efficient process. The Korean Patent Publication No. 10-2008-0047205 is disclosed. No. (transport substrate robot) and Korean Laid-Open Patent Publication No. 10-2012-0007449 (substrate processing apparatus and substrate transport method).

Japanese Laid-Open Patent Publication No. 10-2008-0047205 discloses a transport substrate robot capable of efficiently transporting a substrate by a plurality of robot arms that perform independent rotational movement and simultaneous vertical movement.

Korean Laid-Open Patent Publication No. 10-2008-0047205 has a structural advantage in that it can carry articles arranged in four directions from east to west and north and south in all directions, but has the following disadvantages: it cannot be used because it operates independently from the east, west, south, and north directions. In a linear process or a process carried out in one direction.

Japanese Laid-Open Patent Publication No. 10-2012-0007449 provides a transfer robot that can increase the throughput of the substrate processing apparatus (the number of processing substrates per unit time), thereby shortening the waiting time of the indexer robot and the main transport robot.

Korean Laid-Open Patent Publication No. 10-2012-0007449 has the advantage of shortening the process time, but has the following disadvantages: it is a structure in which a plurality of robots are attached to one robot arm, and therefore, it is required to drive at the same time, and according to a plurality of machines The structure of the hand is arranged at a certain interval to be able to carry a plurality of articles. [Patent Document] [Patent Document 1] Korean Laid-Open Patent Publication No. 10-2008-0047205 (Patent Document 1) Korean Laid-Open Patent Publication No. 10-2012-0007449

In order to solve the above problems, the present invention provides an eight-arm transfer robot that can transport a conveyed object simultaneously or individually via a linear motion in the same horizontal direction.

Moreover, it is an object of the present invention to provide an eight-arm handling robot that guides a rapid process flow by simultaneously transporting one to eight loads in a straight-line (In-Line) process and a process that is continuously performed in one direction. Thereby, the process time can be shortened and the process efficiency can be improved.

In order to solve the above problems, an eight-arm handling robot according to the present invention includes: a mast coupled with a robot arm unit that performs up-and-down linear motion; a pair of first to fourth robot arms, the robot arm unit being in the column The two sides of the rod are joined by upper and lower sides, wherein the pair of first to fourth mechanical arms are horizontally combined by the two mechanical arms to form a pair, thereby constituting the first to eighth mechanical arms.

Here, in the first to eighth robot arms, a slider is slidably attached to an outer surface of the outer arm disposed on the outer side, and a slider is slidably attached to an inner side surface of the inner arm.

Here, a bridge is connected to the slider in a right angle direction.

Here, a robot is attached to the bridge in a direction perpendicular to the bridge.

Here, the pair of first and second robot arms are disposed on the lower side, the pair of third and fourth robot arms are disposed on the upper side, and the pair of first and second portions disposed on the lower side The second robot arm has the first and second robot arms arranged on the inner side, the third and fourth robot arms arranged on the outer side, and the pair of third and fourth robot arms disposed on the upper side, and the seventh and fourth inner sides are arranged on the inner side. Eight mechanical arms, the fifth and sixth robot arms are arranged on the outside.

Here, the lower end portion of the pole is connected to one side end of a rotatable base that is rotatable by 360 degrees, and the first to eighth robot arms are respectively mounted with first to eighth robots, the first to the first The center of the eight robot, the rotating shaft of the rotating base, and the center of the pole are disposed on the same straight line of one reference line.

Here, the first to eighth robot arms can be driven simultaneously, individually, or selectively.

Here, the first to eighth robot arms are mounted with first to eighth robots with a slider that can perform front and rear operation, and the first to eighth robots are arranged up and down, and the upper and lower intervals are the same. The motion track is the same.

According to the configuration of the present invention described above, the articles are conveyed at the same time or individually by the linear motion in the same horizontal direction, and simultaneously in the in-line process and the process continuously performed in one direction, simultaneously Ten to eight pieces of goods guide the rapid process flow, thereby reducing process time and increasing process efficiency.

The structure and operational effects of the eight-arm handling robot according to the present invention will be described below with reference to the drawings.

1 is a perspective view of an eight-arm handling robot according to the present invention; FIG. 2 is a structural view of a mechanical arm unit of an eight-arm handling robot according to the present invention; and FIG. 3 is an optimal mechanical arm arrangement for an eight-arm handling robot according to the present invention; Figure 4 is a plan view of an eight-arm handling robot in accordance with the present invention; and Figure 5 is a side elevational view of the eight-arm handling robot in accordance with the present invention.

As shown in FIGS. 1 to 5, an eight-arm handling robot (100) according to the present invention includes: a running base (110), an operating slider (120), a rotating base (130), upper and lower poles (140), and machinery. Arm unit (200).

The running base (110) may be formed in a square frame shape, and the casters may be mounted as needed to facilitate movement, and in order to prevent the robot from moving during operation, a plurality of fixing devices may be installed.

Moreover, the inner side of the running base (110) is mounted with a running slider (120), and the inner sides of the running base (110) are formed with guide rails for horizontal movement of the running slider (120).

The running slider (120) is connected to the rails on both sides to be horizontally movable to the left and right, and is connected to the rotating base (130) at the center upper end, and the upper and lower poles (140) are formed at the front end portion of the rotating base (130).

The rotating base (130) is rotatable 360° with respect to the rotating shaft (130a), and the upper and lower masts (140) are also rotated 360 degrees in the same manner according to the 360° rotation of the rotating base (130).

The rotating base (130) rotates the first to eighth robot arms (211 to 218) 360 degrees with respect to the rotating shaft (130a), and the upper and lower masts (140) make the first to eighth robot arms (211 to 218) ) Perform straight up and down movements.

A guide rail may be formed on both sides of the upper and lower poles (140), and a mechanical arm unit (200) is mounted on both sides of the rail to perform linear motion up and down.

The configuration of the robot arm unit (200) will be described in detail with reference to Figs. 2 and 3 .

The robot arm unit (200) includes: first to eighth robot arms (211 to 218), first to eighth sliders (251 to 258), first to eighth bridges (261 to 268), and first to first Eight robots (271 to 278).

The first to eighth mechanical arms (211 to 218) are formed in a four-separated arrangement of up, down, left, and right, and the two mechanical arms are horizontally contacted to form a pair of first to fourth mechanical arms (210 to 240), respectively, and The pair of first and second robot arms (210, 220) on the lower side constitute an upper side mechanical arm (320), and the pair of third and fourth mechanical arms (230, 240) on the upper side constitute a lower side mechanism Arm (310).

The pair of first and third robot arms (210, 230) are slidably coupled to the left side of the upper and lower masts (140), and the second and fourth robot arm pairs (220, 240) are attached to the upper and lower posts ( The right side of the 140) is slidably coupled.

Based on the lower mast (140), the pair of first and third robot arms (210, 230) and the pair of second and fourth robot arms (220, 240) are disposed on both sides to form a robot therebetween The mobile space.

The first to eighth robot arms (211 to 218) may be arranged as shown in FIG. 3, and the first robot arm (211) and the second robot arm (212) are disposed on the inner side of the lower portion, and the third robot arm (213) is disposed on the outer side of the lower portion. And the fourth robot arm (214), the fifth robot arm (215) and the sixth robot arm (216) are disposed on the outer side of the upper portion, and the seventh robot arm (217) and the eighth robot arm (218) are disposed on the inner side of the upper portion. ).

The first to eighth robot arms (211 to 218) are in and out of the same trajectory, and have the same separation distance from above and below and are arranged up and down to form a vertical arrangement.

Therefore, in order to form the upper and lower rows in a limited space, as shown in FIG. 3, the upper and lower sides and the left and right sides are arranged in a row, and the inner and outer order positions are selected so that the mutual interference does not occur during the entry and exit operation, and the same interval and the same trajectory are performed. Exercise while carrying the work panel.

The first, second, seventh, and eighth mechanical arms (211, 212, 217, 218) located on the inner side are slidably mounted with first, second, seventh, and eighth sliders (251, 252, 257, 258), the third, fourth, fifth, and sixth robot arms (213, 214, 215, 216) located on the outer side are slidably mounted with the third, fourth, fifth, and sixth sliders from the inner side. (253, 254, 255, 256).

The first to eighth sliders (251 to 258) are linearly moved forward and backward by a direction at right angles to the running base (110).

The first to eighth bridges (261 to 268) are vertically mounted at the front end portions of the first to eighth sliders (251 to 258), and the front ends of the first to eighth bridges (261 to 268) are respectively mounted at right angles. First to eighth robots (271 to 278).

The first to eighth robots (271 to 278) are arranged up and down at the same interval, and the functions of the end actuators for respectively transporting and carrying in the work panel (150) are achieved.

The working panel (150) can be horizontally reciprocated to the left and right by means of the running base (110), and is rotated 360 degrees by means of the rotating base (130), and moved up and down by means of the upper and lower poles (140), by means of the first Move to the front and rear positions to the eighth robot arm (211 to 218).

In order to operate the eight robot arms efficiently in a minimum space, the present invention provides the following conditions.

First, as shown in FIG. 3, in order to form the first to eighth mechanical arms (211 to 218) in a left-right, upper-lower, four-separated arrangement, two robot arms are formed into a pair, and the coupled pair of mechanical arms are inward and outward. In order to arrange the first to eighth robots (271 to 278) at the same interval, the first and second robot arms (211, 212) are disposed on the lower inner side, and the first and second robot arms (211, 212) are disposed on the lower inner side. 3. The fourth robot arm (213, 214) is provided with seventh and eighth robot arms (217, 218) on the upper inner side, and fifth and sixth mechanical arms (215, 216) on the upper outer side. This is to make the eight robot arms run by the same trajectory and occupy the minimum volume, and prevent the first to eighth robots (271 to 278) arranged above and below from interfering with each other during operation.

Moreover, the position of the work panel, the robot, the rotating base, and the upper and lower poles is minimized and the work efficiency is realized.

Referring to Fig. 4, the center of the work panel (150), the center of the robot (271 to 278), the center of the rotation axis (132) of the rotary base (130), and the center of the upper and lower masts (140) are located at the reference line (401). On the straight line.

Figure 6 is a view showing a state in which an eight-arm of an eight-arm handling robot according to the present invention is folded; Figure 7 is a horizontally advanced state view of a first arm of an eight-arm handling robot according to the present invention; FIG. 9 is a horizontal advance state diagram of a fifth robot arm of the eight-arm transport robot according to the present invention; FIG. 10 is a plan view of a eight-arm transport robot according to the present invention; FIG. 11 is a state diagram of the horizontal advancement of the eight-arm of the eight-arm handling robot according to the present invention.

The mechanical arm unit (200) of the present invention is composed of eight mechanical arms, and the lower column (140) is divided into four on the two sides to form a structure in which four columns are arranged in the upper and lower sides, and each of the robot arms can be independently driven and simultaneously Drive and selective drive for optional handling of one work panel, eight work panels or two to seven work panels.

Referring to Fig. 6, the first to eighth robots (271 to 278) each have a shape that is folded into a space formed by the pair of first to fourth robot arms (210 to 240) on both sides and upper and lower sides.

Referring to Fig. 7, the operating state of the first robot arm (211) is shown. With the first robot arm (211) as a base, the first slider (251) slides forward and is coupled with the first slider (251) at a right angle. The first bridge (261) slides in linkage, and the first robot (271) combined with the first bridge (261) in a right angle direction moves forward, and the work panel (150a) is carried or taken out.

Referring to Figure 8, there is shown an operational state of the fourth robot arm (214), a fourth slider (254) slidably coupled to the outer side of the fourth robot arm (214) with the fourth robot arm (214) as a base. Sliding forward, the fourth bridge (264) combined with the fourth slider (254) at a right angle is slidably moved, and the fourth robot (274) combined with the fourth bridge (264) at a right angle is moved forward. Move or remove the work panel (150d).

Referring to Fig. 9, the operating state of the fifth robot arm (215) is shown. The fifth robot arm (215) is a base, the fifth slider (255) slides forward, and the fifth slider (255) is coupled at right angles. The five bridges (265) slide in linkage, and the fifth robot (275) combined with the fifth bridge (265) in a right angle direction moves forward, and the work panel (150e) is carried or taken out. Here, the fifth slider (255) and the fifth bridge (265) may be integrally formed, and the remaining first to eighth sliders (251 to 258) and the first to eighth bridges (261 to 268) may also be Formed as one.

Referring to Figure 10, the operational state of the eighth robot arm (218) is shown, with the inner side of the eighth robot arm (218) as the base, and the eighth slider (258) sliding forward so that the eighth slider (258) The eighth bridge (268) combined at right angles is slidably moved, and the eighth robot (278) combined with the eighth bridge (268) in the right angle direction is moved forward, and the work panel (150h) is carried or taken out.

Fig. 11 shows a state in which all of the first to eighth robot arms (211 to 218) are extended, and is used in order to simultaneously take out or carry out eight work panels.

In order to simultaneously take out or carry eight work panels, as shown in FIGS. 6 and 11, the first to eighth robot arms (211 to 218) can be simultaneously extended or folded, and the first to eighth robots (271 to 278) are The same trajectory is maintained while maintaining the same interval up and down.

The preferred embodiments of the present invention have been described above with reference to the drawings, but those skilled in the art can implement the above-described techniques of the present invention in other detailed forms without departing from the technical spirit or essential features of the present invention. Composition. Therefore, the above-described embodiments are to be considered in all respects as illustrative and not restrictive, and the scope of the invention is defined by the scope of the claims. All changes or modifications of the scope and the equivalents thereof are within the scope of the invention.

100‧‧‧8-arm handling robot
110‧‧‧Running base
120‧‧‧Run slider
130‧‧‧Rotating base
130a‧‧‧Rotary axis
140‧‧‧Up and down pole
150, 150a, 150d, 150e, 150h‧‧‧ work panels
200‧‧‧Mechanical arm unit
211, 212, 213, 214, 215, 216, 217, 218‧‧ mechanical arm
210, 220, 230, 240‧‧‧ pairs of robotic arms
251, 252, 253, 254, 255, 256, 257, 258‧‧ ‧ sliders
261, 262, 263, 264, 265, 266, 267, 268‧ ‧ bridge
271, 272, 273, 274, 275, 276, 277, 278‧ ‧ robots
310‧‧‧lower side manipulator
320‧‧‧Upper side arm
401‧‧‧ baseline

1 is a perspective view of an eight-arm handling robot according to the present invention; FIG. 2 is a structural view of a mechanical arm unit of an eight-arm handling robot according to the present invention; and FIG. 3 is an optimal mechanical arm arrangement for an eight-arm handling robot according to the present invention. Figure 4 is a plan view of an eight-arm handling robot according to the present invention; Figure 5 is a side view of the eight-arm handling robot according to the present invention; Figure 6 is a state in which the eight-arm of the eight-arm handling robot is folded according to the present invention; Figure 7 is a state diagram of the horizontal advancement of the first robot arm of the eight-arm handling robot according to the present invention; Figure 8 is a horizontal advance state diagram of the fourth robot arm of the eight-arm handling robot according to the present invention; FIG. 10 is a horizontal advance state diagram of an eighth robot arm of an eight-arm handling robot according to the present invention; FIG. 11 is an eight-arm handling state according to the present invention. State diagram of the overall horizontal advancement of the robot's eight-arm.

100‧‧‧8-arm handling robot

110‧‧‧Running base

120‧‧‧Run slider

130‧‧‧Rotating base

130a‧‧‧Rotary axis

140‧‧‧Up and down pole

Claims (8)

An eight-arm handling robot comprising: a pole coupled to a robotic arm unit for linear movement up and down; and a pair of first to fourth robot arms, the robot arm unit being coupled up and down on both sides of the mast, wherein The pair of first to fourth robot arms are horizontally combined by two robot arms to form a pair, thereby constituting the first to eighth robot arms. The eight-arm carrying robot according to claim 1, wherein the outer side of the mechanical arm disposed on the outer side of the first to eighth mechanical arms is slidably mounted with a slider, and the inner side of the mechanical arm disposed on the inner side is A slider is slidably mounted. The eight-arm handling robot according to claim 2, wherein the bridge is connected to the slider at a right angle. The eight-arm handling robot according to claim 2, wherein a robot is mounted at a right angle to the bridge. The eight-arm carrying robot according to claim 1, wherein the pair of first and second robot arms are disposed on a lower side, and the pair of third and fourth robot arms are disposed on an upper side and disposed on a lower side The pair of first and second robot arms are arranged on the inner side of the first and second robot arms, the third and fourth robot arms are arranged on the outer side, and the third and fourth pairs are arranged on the upper side. The robot arm has the seventh and eighth robot arms arranged on the inner side and the fifth and sixth robot arms on the outer side. The eight-arm handling robot according to claim 1, wherein a lower end portion of the mast is connected to one side end of a rotatable base that is rotatable by 360 degrees, and the first to eighth robot arms are respectively mounted with first to first The eight robots, the centers of the first to eighth robots, the rotating shaft of the rotating base, and the center of the pole are disposed on the same straight line of one reference line. The eight-arm handling robot of claim 1, wherein the first to eighth robot arms are simultaneously driven, individually driven, or selectively driven by two or more. The eight-arm handling robot according to claim 1, wherein the first to eighth robot arms are mounted with first to eighth robots in a medium that can perform front-rear operation, the first to eighth robots The manipulators are arranged from top to bottom with the same spacing up and down and the same trajectory.