JP3730651B2 - Semiconductor manufacturing apparatus and method - Google Patents

Description

  The present invention relates to a semiconductor manufacturing apparatus and method such as a vertical CVD diffusion apparatus.

  One of the processes for manufacturing semiconductor devices is a CVD process. In this method, a required number of silicon wafers are heated in a CVD apparatus and subjected to chemical vapor deposition (CVD), but in order to homogenize the CVD process, both end portions of the row are sandwiched between product wafers. A plurality of dummy wafers are arranged in each, and one monitor wafer for inspection is arranged at a predetermined interval in the middle of the product wafers. This is outlined by FIG.

  The wafer 1 is supported by the boat 2 in the diffusion furnace. When the wafer 1 is CVD-processed in the diffusion furnace, first, the wafer 1 is inserted into the boat 2 so as to have a required arrangement. Then, the boat 2 in which the wafer 1 is inserted is loaded into the diffusion furnace. In general, the temperature distribution in the diffusion furnace is not uniform over the entire area. Therefore, the boat 2 has a sufficient number of wafers to be processed (for example, 1.5 times the number of wafers to be processed). A plurality of wafer storage spaces, and when processing the wafer 1, it corresponds to a portion having a uniform temperature distribution, or the wafer storage position of the boat 2 is selected according to the number of wafers. It has become.

  Dummy wafer groups 3 and 4 each including an appropriate number of dummy wafers 1b are accommodated in the upper end portion and the lower end portion of the wafer array of the boat 2, and for a product including a predetermined number of product wafers 1a sandwiching the monitor wafer 1c. The wafer group 5 is accommodated, and the product wafer group 5 is accommodated sequentially with the monitor wafer 1c interposed therebetween. The monitor wafer 1c is inserted between the lowermost product wafer group 5 and the dummy wafer group 4. The wafer transfer apparatus transfers a wafer loaded in a cassette to the boat and performs a series of operations for loading a processed wafer into an empty cassette. A conventional wafer transfer apparatus will be described with reference to FIG.

  FIG. 4 shows a wafer transfer apparatus of a single wafer type (a method of transferring one sheet at a time), and a cassette 7 loaded with the wafer 1 is placed on the same circumference around the handling unit 6. The transfer elevator 8 and the load / unload elevator 9 are provided adjacent to the handling unit 6, and the boat pedestal 10 of the transfer elevator 8 is a cylindrical surface including the circumference. The vertical diffusion furnace 12 is provided above the boat cradle 11 of the load / unload elevator 9. A transfer unit 13 for transferring the boat 2 is provided between the transfer elevator 8 and the load / unload elevator 9.

  The handling unit 6 includes a rotating arm 14 that rotates around the center of the circumference and moves up and down, and a wafer suction chuck 15 that advances and retreats in the radial direction along the rotating arm 14, and the wafer 1 loaded in the cassette 7. Are picked up and taken out one by one, and are sequentially transferred from above to the boat 2 mounted on the transfer elevator 8. The transfer elevator 8 descends step by step following the transfer of the wafer 1.

  The boat 2 on which the transfer of the wafer 1 is completed is transferred from the transfer elevator 8 to the load / unload elevator 9 by the transfer unit 13, and the load / unload elevator 9 transfers the boat 2 to the load / unload elevator 9. Charge into the diffusion furnace 12.

  When the CVD process is completed, the boat 2 is taken out from the diffusion furnace 12, and further transferred to the transfer elevator 8 by the transfer unit 13, and transferred to the cassette 7 by the handling unit 6 in the reverse procedure. Loaded.

  Although the above-described conventional transfer apparatus is a single wafer type, there is a batch type as shown in FIG.

  In this case, the wafer suction chuck 15 includes 25 pairs of suction plates 16, and all the 25 wafers 1 loaded in the cassette 7 are chucked together and transferred to the boat 2.

  However, the above-described conventional single-wafer transfer device and batch transfer device have the following problems.

  The number of wafers to be inserted into the boat 2, the number of dummy wafers in the upper and lower stages, and the number of monitor wafers and how many monitor wafers are provided are processed. It depends on conditions or customer's processing specifications. In the former single wafer system, wafers are transferred one by one, so that any arrangement of wafers can be accommodated. However, the number of operations is remarkably large, so that the transfer time becomes long and the efficiency is poor. In addition, if the number of operations is large, the possibility of dust generation is probabilistically increased, which adversely affects product quality.

  On the other hand, the latter batch method has the advantage that the transfer time is short and extremely efficient, but since the 25 sheets are processed in batch, the wafer arrangement cannot be arranged at the time of wafer transfer. Therefore, dummy wafers, monitor wafers, and product wafers are mixed so that a predetermined arrangement is obtained when wafers are loaded into the cassette. Loading wafers into the cassette is a manual operation, and loading the wafers of different types into a predetermined arrangement is very complicated, inefficient, and erroneous insertion is unavoidable. It was.

  In view of such circumstances, the present invention intends to provide a semiconductor manufacturing apparatus and method capable of fully exhibiting the advantages of the single wafer transfer system and the batch transfer system in the semiconductor manufacturing apparatus.

The present invention includes a wafer processing chamber,
A wafer transfer machine for transferring wafers between the cassette and the boat;
The first boat position where the boat is placed when the wafer is transferred from the cassette to the boat and from the boat to the cassette by the wafer transfer machine, and the wafer processing chamber where the boat waits when the boat is inserted into and removed from the wafer processing chamber. A transfer mechanism for transferring the boat in relation to the second boat position located below;
A semiconductor manufacturing apparatus including:
Wafer transfer machine
A turntable that can be rotated and raised,
Each plate has a plurality of wafer transfer plates each having a wafer mounting portion and a single wafer transfer plate having a wafer mounting portion, and is attached to be movable in the radial direction of the rotating table. A wafer gripping part;
A first mechanism for maintaining the front end surfaces of the plurality of plates at a first position determined with respect to the gripping portion;
The front end surface of the plate for the single wafer is selected and set to the first position and the second position protruding forward from the first position by at least the wafer mounting portion. Mechanism,
With
When transferring a plurality of wafers together with a single wafer plate and a plurality of plates, the second mechanism is used to transfer a plurality of wafers while maintaining the leading end surfaces of the plurality of plates at the first position by the first mechanism. The front end surface of the leaf transfer plate is set at the first position, and when transferring a single wafer, the front end surfaces of the plurality of plates are maintained at the first position by the first mechanism. A semiconductor manufacturing apparatus is disclosed in which the wafer is transferred from the cassette to the boat and from the boat to the cassette after the setting.

The present invention further includes a wafer processing chamber,
A wafer transfer machine for transferring wafers between the cassette and the boat;
The first boat position where the boat is placed when the wafer is transferred from the cassette to the boat and from the boat to the cassette by the wafer transfer machine, and the wafer processing chamber where the boat waits when the boat is inserted into and removed from the wafer processing chamber. A transfer mechanism for transferring the boat in relation to the second boat position located below;
A semiconductor manufacturing method using a semiconductor manufacturing apparatus including:
Wafer transfer machine
A turntable that can be rotated and raised,
Each plate has a plurality of wafer transfer plates each having a wafer mounting portion and a single wafer transfer plate having a wafer mounting portion, and is attached to be movable in the radial direction of the rotating table. A wafer gripping part;
A first mechanism for maintaining the front end surfaces of the plurality of plates at a first position determined with respect to the gripping portion;
The front end surface of the plate for the single wafer is selected and set to the first position and the second position protruding forward from the first position by at least the wafer mounting portion. Mechanism,
With
When transferring a plurality of wafers together with a single wafer plate and a plurality of plates, the second mechanism is used to transfer a plurality of wafers while maintaining the leading end surfaces of the plurality of plates at the first position by the first mechanism. The front end surface of the leaf transfer plate is set at the first position, and when transferring a single wafer, the front end surfaces of the plurality of plates are maintained at the first position by the first mechanism. A semiconductor manufacturing method using a semiconductor manufacturing apparatus is disclosed in which the wafer is transferred from the cassette to the boat and from the boat to the cassette after the setting.

  As described above, according to the present invention, it is possible to selectively transfer a plurality of wafers at a time and to transfer one wafer at a time, efficiently transfer the wafer, and cope with an arbitrary arrangement of the wafers. In addition, it has an excellent effect that it can easily cope with a change in the wafer storage pitch.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 and 2 show a wafer holding unit 18 of the wafer transfer apparatus according to the present embodiment, and the wafer holding unit 18 is a turntable, for example, a rotary arm 14 shown in FIGS. Are provided so as to be movable back and forth in the radial direction.

  Hereinafter, the grip portion 18 will be described.

  The vertical substrate 20 is fixed to the base plate 19 and the upper substrate 21 is fixed via a post (not shown).

  A guide block 22 is fixed to the upper substrate 21, and a pair of left and right sliders 23, 24, 25, and 26 are slidably attached to the guide block 22. The sliders 23, 24, 25, and 26 are screwed into screw rods 27 and 28 that are rotatably provided on the upper substrate 21, and driven gears 29 and 30 are fitted to the upper ends of the screw rods 27 and 28. .

  A pitch change motor 31 is attached between the driven gears 29 and 30, and a drive gear 32 fitted to the output shaft of the pitch change motor 31 is engaged with the driven gears 29 and 30.

  Inverted L-shaped plate holders 34, 35, 36, and 37 are fixed to the sliders 23, 24, 25, and 26, respectively, and wafer support plates 39, 40, and 37 are attached to the tips of the plate holders 34, 35, 36, and 37, respectively. 41 and 42 are installed. A concave portion 43 in which a wafer can be placed is formed on the upper surface of each wafer support plate 38, 39, 40, 41, 42. The plate holders 34, 35, 36, and 37 have a shape that can support the wafer support plates 39, 40, 41, and 42 with an appropriate interval in the vertical direction, and the plate holders 34, 35, With respect to the screwed relationship between the sliders 23, 24, 25, and 26 to which the screws 36 and 37 are fixed and the screw rods 27 and 28, a plate holder 34 that supports the second-stage support plate 39 is fixed. The screw pitch of the portion in which the slider 24 to which the plate holder 35 supporting the third-stage support plate 40 is fixed is screwed is double the screw pitch in which the slider 23 is screwed, Similarly, the screw pitch of the fourth stage slider 25 is three times, and the screw pitch of the fifth stage slider 26 is four times, and the pitch changing motor 31 is driven. In this case, the sliders 23, 24, 25, and 26 through the screw rods 27 and 28 maintain the relationship that the pitches between the wafer support plates 38, 39, 40, 41, and 42 are equal, and the pitch is increased. , And can be reduced.

  The first-stage support plate (single-wafer support plate) 38 is fixed to a plate holder 33 attached to the advance / retreat mechanism 44, and is moved forward and backward without any vertical displacement.

  Hereinafter, the advance / retreat mechanism 44 will be described.

  Parallel swing links 45 and 46 are pivotally attached to the vertical substrate 20, and intermediate portions of the floating parallel links 47 and 48 are pivotally attached to the parallel swing links 45 and 46, respectively. The upper ends of the floating parallel links 47 and 48 are pivotally attached to the first stage plate holder 33, and the lower ends of the floating parallel links 47 and 48 are pivotally attached to the slider 49. The slider 49 is slidably provided on the vertical substrate 20 through a guide 50.

  Thus, the rotational radius of the parallel rocking links 45 and 46 and the rotational radius of the floating parallel links 47 and 48 about the pivot point of the plate holder 33 are made equal to each other. The displacement in the vertical direction is offset by the rotational movement.

  The lowermost single wafer support plate 38 is attached to the plate holder 33.

  A pivot 51 fixed to one 46 of the parallel swing links protrudes through the vertical substrate 20, and a pulley 52 is fixed to the protruding end. An advance / retreat motor 54 is fixed to the anti-parallel swing link side of the vertical substrate 20 via a motor support bracket 53, and a drive pulley 55 is fitted to the output shaft of the advance / retreat motor 54. The drive pulley 55 and the pulley 52 is connected by a timing belt 56.

  Thus, the single wafer support plate 38 can be moved forward and backward by forward / reverse rotation of the advance / retreat motor 54, and the advance amount of the single wafer support plate 38 depends on the upper wafer support plates 39, 40. , 41, and 42 are projected completely.

  In the figure, 57 and 58 are sensors for detecting the stroke end of the floating parallel links 47 and 48, and 59 and 60 are detection pieces for operating the sensors 47 and 48.

  The operation will be described below.

  In the case where all the wafer support plates 38, 39, 40, 41, and 42 support and transfer the wafer at a time, the wafer support plates 38, 39, 40, 41, and 42 are indicated by the solid line positions in FIG. To do.

  Next, when performing fraction processing for transferring five or less wafers 1, the advance / retreat motor 54 is driven, and the parallel swing links 45, 46 are illustrated via the drive pulley 55, the timing belt 56, and the pulley 52. 2 Swing clockwise. As the parallel swing links 45 and 46 swing, the idle parallel links 47 and 48 rotate counterclockwise while being lowered, and feed the plate holder 33. When the sensor 57 detects the stroke end of the floating parallel links 47 and 48, the advance / retreat motor 54 is stopped.

  Thus, only the lowermost single wafer support plate 38 can transfer the wafer (indicated by a two-dot chain line in FIG. 2), and the wafers can be transferred one by one.

  When the fraction processing is completed and five wafers 1 are again transferred simultaneously, the advance / retreat motor 54 is driven in reverse to retract the lowermost wafer support plate 38 and return it to the position indicated by the solid line in FIG.

  Next, the pitch between the wafers when the wafers are stored differs depending on the size of the wafer. In this case, the pitch of the wafer support plates 38, 39, 40, 41, and 42 is adjusted.

  The pitch change motor 31 is driven, and the screw rods 27 and 28 are rotated via the drive gear 32 and the driven gears 29 and 30. The sliders 23, 24, 25, 26 to which the plate holder is fixed are moved by the rotation of the screw rods 27, 28. As described above, the screw pitch of the portions where the sliders 23, 24, 25, and 26 are screwed are changed at the same magnification, so that the upper wafer support plate 38 is supported with reference to the lowermost single wafer support plate 38. The plates 39, 40, 41, and 42 are moved while maintaining an equidistant relationship, and the pitch is adjusted.

  In the above embodiment, considering that the number of wafers stored in the wafer cassette is 25, the number of support plates is set to “5” which is a divisor of “25”. It is good also as 25 sheets.

  Further, it goes without saying that various changes can be made without departing from the gist of the present invention, such as using a vacuum support method as the wafer support plate.

It is the perspective view which looked far at the wafer transfer apparatus which implements this invention. It is the perspective view which looked far at the front wafer transfer apparatus. It is explanatory drawing which shows the arrangement | sequence of the wafer in a boat. It is explanatory drawing which shows the conventional wafer transfer apparatus. It is explanatory drawing which shows the conventional wafer transfer apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Wafer 18 Wafer holding part 27 Screw rod 28 Screw rod 31 Pitch change motor 38 Single wafer support plate 39 Wafer support plate 40 Wafer support plate 41 Wafer support plate 42 Wafer support plate 44 Advance / retreat mechanism 54 Advance / retreat motor

Claims (2)

A wafer processing chamber;
A wafer transfer machine for transferring wafers between the cassette and the boat;
The first boat position where the boat is placed when the wafer is transferred from the cassette to the boat and from the boat to the cassette by the wafer transfer machine, and the wafer processing chamber where the boat waits when the boat is inserted into and removed from the wafer processing chamber. A transfer mechanism for transferring the boat in relation to the second boat position located below;
A semiconductor manufacturing apparatus including:
Wafer transfer machine
A turntable that can be rotated and raised,
Each plate has a plurality of wafer transfer plates each having a wafer mounting portion and a single wafer transfer plate having a wafer mounting portion, and is attached to be movable in the radial direction of the rotating table. A wafer gripping part;
A first mechanism for maintaining the front end surfaces of the plurality of plates at a first position determined with respect to the gripping portion;
The front end surface of the plate for the single wafer is selected and set to the first position and the second position protruding forward from the first position by at least the wafer mounting portion. Mechanism,
With
When transferring a plurality of wafers together with a single wafer plate and a plurality of plates, the second mechanism is used to transfer a plurality of wafers while maintaining the leading end surfaces of the plurality of plates at the first position by the first mechanism. The front end surface of the leaf transfer plate is set at the first position, and when transferring a single wafer, the front end surfaces of the plurality of plates are maintained at the first position by the first mechanism. A semiconductor manufacturing apparatus which is set to the second position and performs wafer transfer operation from the cassette to the boat and from the boat to the cassette after the setting. A wafer processing chamber;
A wafer transfer machine for transferring wafers between the cassette and the boat;
The first boat position where the boat is placed when the wafer is transferred from the cassette to the boat and from the boat to the cassette by the wafer transfer machine, and the wafer processing chamber where the boat waits when the boat is inserted into and removed from the wafer processing chamber. A transfer mechanism for transferring the boat in relation to the second boat position located below;
A semiconductor manufacturing method using a semiconductor manufacturing apparatus including:
Wafer transfer machine
A turntable that can be rotated and raised,
Each plate has a plurality of wafer transfer plates each having a wafer mounting portion and a single wafer transfer plate having a wafer mounting portion, and is attached to be movable in the radial direction of the rotating table. A wafer gripping part;
A first mechanism for maintaining the front end surfaces of the plurality of plates at a first position determined with respect to the gripping portion;
The front end surface of the plate for the single wafer is selected and set to the first position and the second position protruding forward from the first position by at least the wafer mounting portion. Mechanism,
With
When transferring a plurality of wafers together with a single wafer plate and a plurality of plates, the second mechanism is used to transfer a plurality of wafers while maintaining the leading end surfaces of the plurality of plates at the first position by the first mechanism. The front end surface of the leaf transfer plate is set at the first position, and when transferring a single wafer, the front end surfaces of the plurality of plates are maintained at the first position by the first mechanism. A semiconductor manufacturing method by a semiconductor manufacturing apparatus in which the wafer transfer operation is performed from the cassette to the boat and from the boat to the cassette after the setting is set at the second position.

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