CN110370310B - Mechanical arm - Google Patents
Mechanical arm Download PDFInfo
- Publication number
- CN110370310B CN110370310B CN201910530657.1A CN201910530657A CN110370310B CN 110370310 B CN110370310 B CN 110370310B CN 201910530657 A CN201910530657 A CN 201910530657A CN 110370310 B CN110370310 B CN 110370310B
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- China
- Prior art keywords
- belt pulley
- bottom plate
- bracket
- driving motor
- guide rail
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
- B25J15/10—Gripping heads and other end effectors having finger members with three or more finger members
Abstract
The invention provides a manipulator which comprises a Z-axis main bracket, a connecting bracket, a first bottom plate, a rotating device and a finger extending device, wherein the Z-axis main bracket is arranged on the connecting bracket; the connecting bracket is arranged on one side of the Z-axis main bracket in a vertically sliding manner through a vertical sliding device; the first bottom plate is fixedly arranged on the connecting bracket; the rotating device is rotatably arranged on the first bottom plate; the finger extending devices are arranged on the rotating device and used for clamping the wafer. The invention is provided with a plurality of fingers, can completely realize dry-wet separation, avoids cross contamination, has various functions, can realize up-and-down sliding, rotation and finger extension, and is convenient for a manipulator to realize various actions in narrow semiconductor equipment, thereby improving the working efficiency and optimizing the use space of the semiconductor equipment.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a manipulator.
Background
In the manufacturing process of semiconductor wafers, in order to reduce the influence of manual transportation in each link, wafers need to be transferred between a machine table and between units in the machine table in an automatic wafer conveying mode inside semiconductor equipment and between the equipment, and generally a mechanical arm is used for transportation.
Disclosure of Invention
Technical problem to be solved
The invention aims to provide a manipulator to overcome the defects that in the prior art, wafers are not separated in dry and wet states, cross contamination is easy to occur, and the functions are single.
Technical scheme
In order to solve the technical problem, the invention provides a manipulator which comprises a Z-axis main bracket, a connecting bracket, a first bottom plate, a rotating device and a finger extending device, wherein the Z-axis main bracket is arranged on the connecting bracket; the connecting bracket is arranged on one side of the Z-axis main bracket in a vertically sliding manner through a vertical sliding device; the first bottom plate is fixedly arranged on the connecting bracket; the rotating device is rotatably arranged on the first bottom plate; the finger extending devices are arranged on the rotating device and used for clamping the wafer.
Preferably, the rotating device comprises a first driving motor, a first belt pulley, a first synchronous belt, a second belt pulley, a harmonic reducer, a rotating shaft and a second bottom plate; the first driving motor is fixedly arranged at the lower end of the first bottom plate; the first belt pulley is arranged on an output shaft of the first driving motor; the second belt pulley is matched with the harmonic reducer and realizes synchronous rotation; one end of the first synchronous belt is matched with the first belt pulley, and the other end of the first synchronous belt is matched with the second belt pulley; the harmonic speed reducer is installed on the first bottom plate; the upper end of the rotating shaft is matched with the second bottom plate, and the lower end of the rotating shaft is matched with the harmonic reducer to realize synchronous rotation.
Preferably, the finger extension device comprises a second driving motor, a third belt pulley, a second synchronous belt, a synchronous belt clamping block, an R-axis sliding block mounting plate, a first sliding block, a first guide rail, a fourth belt pulley, a driven wheel seat, an L-shaped plate and a finger body; the second driving motor is fixedly arranged on one side of the lower end of the second bottom plate; the third belt pulley is arranged on an output shaft of the second driving motor; one end of the second synchronous belt is connected with the third belt pulley, and the other end of the second synchronous belt is connected with the fourth belt pulley; the driven wheel seat is fixedly arranged on the other side of the lower end of the second bottom plate, and the fourth belt pulley is rotatably arranged on the driven wheel seat; the synchronous belt clamping block is fixed with the R-axis sliding block mounting plate, and the second synchronous belt and the R-axis sliding block mounting plate are clamped tightly to realize synchronous movement; the lower end of the first sliding block is fixed with the R-axis sliding block mounting plate, and the upper end of the first sliding block is connected with the first guide rail in a sliding manner; the first guide rail is fixedly arranged at the lower end of the second bottom plate; the upper end of the L-shaped plate is fixedly connected with the finger body, and the lower end of the L-shaped plate is fixedly connected with the R-axis sliding block mounting plate; the finger body clamps the wafer.
Preferably, the finger stretching devices are provided with four groups and are uniformly distributed on the upper side and the lower side of the second bottom plate.
Preferably, the upper end of the second bottom plate is further provided with a leakage-proof disc, a through hole is formed in the leakage-proof disc, the lower end of the through hole is connected with a liquid discharge pipe, and the leakage-proof disc is fixed on the second bottom plate through a support frame.
Preferably, a photoelectric sensor is further disposed on the second bottom plate.
Preferably, the up-down sliding device comprises a third driving motor, a fifth belt pulley, a second sliding block, a second guide rail, a third guide rail, a first driven wheel bracket, a second driven wheel bracket, a sixth belt pulley and a third synchronous belt; the third driving motor is fixedly arranged at the lower end of the Z-axis main bracket; the fifth belt pulley is fixedly arranged on an output shaft of the third driving motor; the two second sliding blocks are in a group and are respectively arranged on the second guide rail and the third guide rail in a sliding manner; the second guide rail and the third guide rail are fixedly arranged on the Z-axis main bracket; the first driven wheel bracket and the second driven wheel bracket are fixedly arranged at the upper end of the Z-axis main bracket; the sixth belt pulley is rotatably arranged between the first driven wheel bracket and the second driven wheel bracket; the upper end of the third synchronous belt is connected with the sixth belt pulley, and the lower end of the third synchronous belt is connected with the fifth belt pulley; the connecting bracket is fixedly installed with the second sliding block.
The beneficial effects are that: compared with the prior art, the manipulator is provided with four fingers, so that dry-wet separation can be completely realized, and cross contamination is avoided; the function is various, can realize sliding from top to bottom, rotation and finger are flexible, and the manipulator of being convenient for realizes multiple action in narrow and small semiconductor equipment to improve work efficiency, optimize semiconductor equipment usage space.
Drawings
Fig. 1 is a schematic structural diagram of a manipulator according to the present invention;
figure 2 is a front view of a manipulator of the present invention;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;
FIG. 4 is a partial enlarged view of B in FIG. 3;
FIG. 5 is a schematic view of the finger extension device;
FIG. 6 is an enlarged view of a portion C of FIG. 5;
FIG. 7 is an enlarged view of a portion D of FIG. 5;
FIG. 8 is a schematic view of the structure of the up-down sliding device;
fig. 9 is a partial enlarged view of E in fig. 3.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
As shown in fig. 1, the manipulator of the present invention comprises a main Z-axis support 1, a connecting support 2, a first base plate 3, a rotating device 4 and a finger extending device 5; the connecting bracket 2 is arranged on one side of the Z-axis main bracket 1 in a manner of being capable of sliding up and down through an up-down sliding device; the first bottom plate 3 is fixedly arranged on the connecting bracket 2 by screws; the rotating device 4 is rotatably arranged on the first bottom plate 3; the plurality of finger extending devices 5 are arranged on the rotating device 4, and the finger extending devices 5 are used for clamping the wafer 6.
As shown in fig. 2 to 4, the rotating device 4 includes a first driving motor 401, a first pulley 402, a first synchronous belt 403, a second pulley 404, a harmonic reducer 405, a rotating shaft 406, and a second base plate 407; the first driving motor 401 is fixedly mounted at the lower end of the first bottom plate 3 by screws; the first belt pulley 402 is mounted on an output shaft of the first driving motor 401; the second belt pulley 404 and the harmonic reducer 405 are fixedly matched by screws and realize synchronous rotation; one end of the first synchronous belt 403 is matched with the first belt pulley 402, and the other end is matched with the second belt pulley 404; the harmonic reducer 405 is mounted on the first base plate 3 by screws; the upper end of the rotating shaft 406 is matched and mounted with the second bottom plate 407 through screws, and the lower end of the rotating shaft is fixedly matched and synchronously rotated with the harmonic reducer 405 through screws. The rotating device 4 plays a role of driving the finger-extending device 5 to rotate.
As shown in fig. 5 to 7, the finger extension device 5 includes a second driving motor 501, a third pulley 502, a second timing belt 503, a timing belt fixture block 504, an R-axis slider mounting plate 505, a first slider 506, a first guide rail 507, a fourth pulley 508, a driven wheel holder 509, an L-shaped plate 5010, and a finger body 5011; the second driving motor 501 is fixedly mounted on one side of the lower end of the second bottom plate 407 by screws; the third belt pulley 502 is mounted on the output shaft of the second driving motor 501; one end of the second synchronous belt 503 is connected to the third belt pulley 502, and the other end is connected to the fourth belt pulley 508; the driven wheel seat 509 is fixedly mounted on the other side of the lower end of the second bottom plate 407 by screws, and the fourth belt pulley 508 is rotatably arranged on the driven wheel seat 509; the synchronous belt clamping block 504 and the R-axis sliding block mounting plate 505 are fixed by screws, and the second synchronous belt 503 and the R-axis sliding block mounting plate 505 are clamped to realize synchronous movement; the lower end of the first sliding block 506 is fixed with the R-axis sliding block mounting plate 505 by screws, and the upper end is connected with the first guide rail 507 in a sliding manner; the first guide rail 507 is fixedly installed at the lower end of the second bottom plate 407 by using a screw; the upper end of the L-shaped plate 5010 is fixedly connected with the finger body 5011 through screws, and the lower end of the L-shaped plate 501is fixedly connected with the R-axis slider mounting plate 505 through screws; the finger body 5011 clamps the wafer 6.
As shown in fig. 5, the finger extension devices 5 are provided in four groups and have the same structure, and are uniformly distributed on the upper and lower sides of the second bottom plate 407. Therefore, four finger bodies can be arranged, and the wafer 6 can be clamped conveniently and rapidly. For compact layout, the driving motors of the two finger extension devices 5 are disposed at one ends of the upper and lower sides of the second bottom plate 407, and the driving motors of the other two finger extension devices 5 are disposed at the other ends of the upper and lower sides of the second bottom plate 407, and are arranged in a staggered manner.
As shown in fig. 9, a leakage-proof tray 16 is further disposed at the upper end of the second bottom plate 407, a through hole 19 is formed in the leakage-proof tray 16, a liquid discharging pipe 17 is connected to the lower end of the through hole 19, and the leakage-proof tray 16 is fixed on the second bottom plate 407 through a supporting frame 18. When the wafer 6 is gripped, the liquid on the wafer 6 drops onto the leak prevention plate 16 and is discharged through the drain pipe 17.
As shown in fig. 5, a photoelectric sensor 20 is fixedly disposed on the second bottom plate 407 through a bracket, and the photoelectric sensor 20 is used for detecting whether the wafers 6 are overlapped or not, whether the wafers are tilted, and the number of the wafers.
As shown in fig. 8, the up-down sliding device includes a third driving motor 7, a fifth belt pulley 8, a second slider 9, a second guide rail 10, a third guide rail 11, a first driven wheel bracket 12, a second driven wheel bracket 13, a sixth belt pulley 14, and a third synchronous belt 15; the third driving motor 7 is fixedly arranged at the lower end of the Z-axis main bracket 1 by screws; the fifth belt pulley 8 is fixedly arranged on an output shaft of the third driving motor 7; the two second sliding blocks 9 are a group and are respectively arranged on the second guide rail 10 and the third guide rail 11 in a sliding manner; the second guide rail 10 and the third guide rail 11 are fixedly arranged on the main Z-axis bracket 1 by screws; the first driven wheel bracket 12 and the second driven wheel bracket 13 are fixedly arranged at the upper end of the Z-axis main bracket 1 by screws; the sixth belt pulley 14 is rotatably arranged between the first driven wheel bracket 12 and the second driven wheel bracket 13; the upper end of the third synchronous belt 15 is connected with the sixth belt pulley 14, and the lower end of the third synchronous belt 15 is connected with the fifth belt pulley 8; the connecting bracket 2 and the second sliding block 9 are fixedly installed by screws.
When the device works, the up-down sliding device starts to work first, and the third driving motor 7 works to drive the connecting bracket 2 to move up and down; then, after the wafer reaches the designated position, the rotating device 4 starts to rotate, the first driving motor 401 starts to work to drive the harmonic speed reducer 405, the rotating shaft 406 and the second bottom plate 407 to rotate, the finger extending device 5 starts to work after the wafer reaches the designated position, the second driving motor 501 starts to work to drive the second synchronous belt 503, the R-axis slider mounting plate 505, the L-shaped plate 5010 and the finger body 5011 to stretch and retract, and the finger body 5011 is used for clamping and taking the wafer 6; then, the wafer 6 is transported to a predetermined position by controlling the rotating device 4, the up-down sliding device, and the finger-extending device 5. By repeating the above-described operation, the wafer 6 can be transported. When the wafer is clamped, the dry fingers clamp the dry wafer, and the wet wafer clamps the wet wafer, so that dry-wet separation is completely realized.
In summary, the above embodiments are not intended to be limiting embodiments of the present invention, and modifications and equivalent variations made by those skilled in the art based on the spirit of the present invention are within the technical scope of the present invention.
Claims (4)
1. A manipulator, its characterized in that: comprises a Z-axis main bracket (1), a connecting bracket (2), a first bottom plate (3), a rotating device (4) and a finger extending device (5); the connecting bracket (2) is arranged on one side of the Z-axis main bracket (1) in a manner of sliding up and down through an up-down sliding device; the first bottom plate (3) is fixedly arranged on the connecting bracket (2); the rotating device (4) is rotatably arranged on the first bottom plate (3); the plurality of finger extending devices (5) are arranged on the rotating device (4), and the finger extending devices (5) are used for clamping the wafer (6);
the up-down sliding device comprises a third driving motor (7), a fifth belt pulley (8), a second sliding block (9), a second guide rail (10), a third guide rail (11), a first driven wheel bracket (12), a second driven wheel bracket (13), a sixth belt pulley (14) and a third synchronous belt (15); the third driving motor (7) is fixedly arranged at the lower end of the Z-axis main bracket (1); the fifth belt pulley (8) is fixedly arranged on an output shaft of the third driving motor (7); the two second sliding blocks (9) are in a group and are respectively arranged on the second guide rail (10) and the third guide rail (11) in a sliding manner; the second guide rail (10) and the third guide rail (11) are fixedly arranged on the Z-axis main bracket (1); the first driven wheel bracket (12) and the second driven wheel bracket (13) are fixedly arranged at the upper end of the Z-axis main bracket (1); the sixth belt pulley (14) is rotatably arranged between the first driven wheel bracket (12) and the second driven wheel bracket (13); the upper end of the third synchronous belt (15) is connected with the sixth belt pulley (14), and the lower end of the third synchronous belt is connected with the fifth belt pulley (8); the connecting bracket (2) and the second sliding block (9) are fixedly arranged;
the rotating device (4) comprises a first driving motor (401), a first belt pulley (402), a first synchronous belt (403), a second belt pulley (404), a harmonic speed reducer (405), a rotating shaft (406) and a second bottom plate (407); the first driving motor (401) is fixedly arranged at the lower end of the first bottom plate (3); the first belt pulley (402) is mounted on an output shaft of the first driving motor (401); the second belt pulley (404) is matched with the harmonic speed reducer (405) and realizes synchronous rotation; one end of the first synchronous belt (403) is matched with the first belt pulley (402), and the other end of the first synchronous belt is matched with the second belt pulley (404); the harmonic reducer (405) is mounted on the first base plate (3); the upper end of the rotating shaft (406) is matched with the second bottom plate (407) and the lower end of the rotating shaft is matched with the harmonic reducer (405) to realize synchronous rotation;
the finger extending device (5) comprises a second driving motor (501), a third belt pulley (502), a second synchronous belt (503), a synchronous belt clamping block (504), an R-axis sliding block mounting plate (505), a first sliding block (506), a first guide rail (507), a fourth belt pulley (508), a driven wheel seat (509), an L-shaped plate (5010) and a finger body (5011); the second driving motor (501) is fixedly arranged on one side of the lower end of the second bottom plate (407); the third belt pulley (502) is mounted on an output shaft of the second driving motor (501); one end of the second synchronous belt (503) is connected with the third belt pulley (502), and the other end of the second synchronous belt is connected with the fourth belt pulley (508); the driven wheel seat (509) is fixedly arranged on the other side of the lower end of the second bottom plate (407), and the fourth belt pulley (508) is rotatably arranged on the driven wheel seat (509); the synchronous belt clamping block (504) is fixed with the R-axis sliding block mounting plate (505), and the second synchronous belt (503) and the R-axis sliding block mounting plate (505) are clamped to realize synchronous movement; the lower end of the first sliding block (506) is fixed with the R-axis sliding block mounting plate (505), and the upper end of the first sliding block is connected with the first guide rail (507) in a sliding manner; the first guide rail (507) is fixedly arranged at the lower end of the second bottom plate (407); the upper end of the L-shaped plate (5010) is fixedly connected with the finger body (5011), and the lower end of the L-shaped plate is fixedly connected with the R-axis sliding block mounting plate (505); the finger body (5011) clamps the wafer (6).
2. The robot hand according to claim 1, wherein: the finger stretching devices (5) are provided with four groups and are uniformly distributed on the upper side and the lower side of the second bottom plate (407).
3. The robot hand according to claim 1, wherein: the upper end of the second bottom plate (407) is further provided with a leakage-proof disc (16), a through hole (19) is formed in the leakage-proof disc (16), the lower end of the through hole (19) is connected with a liquid discharge pipe (17), and the leakage-proof disc (16) is fixed on the second bottom plate (407) through a support frame (18).
4. The robot hand according to claim 1, wherein: and a photoelectric sensor (20) is also arranged on the second bottom plate (407).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910530657.1A CN110370310B (en) | 2019-06-19 | 2019-06-19 | Mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910530657.1A CN110370310B (en) | 2019-06-19 | 2019-06-19 | Mechanical arm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110370310A CN110370310A (en) | 2019-10-25 |
| CN110370310B true CN110370310B (en) | 2020-11-06 |
Family
ID=68249557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910530657.1A Active CN110370310B (en) | 2019-06-19 | 2019-06-19 | Mechanical arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110370310B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113467199B (en) * | 2021-09-06 | 2021-11-12 | 宁波润华全芯微电子设备有限公司 | Device convenient to dismantle and capable of preventing wafer from being polluted by splashing liquid |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5102280A (en) * | 1989-03-07 | 1992-04-07 | Ade Corporation | Robot prealigner |
| JP2003527737A (en) * | 1998-07-11 | 2003-09-16 | セミトゥール・インコーポレイテッド | Robot for handling microelectronic workpieces |
| CN102019615A (en) * | 2010-10-20 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | Chip transfer device |
| CN203218245U (en) * | 2013-03-06 | 2013-09-25 | 昆山富利瑞电子科技有限公司 | Mechanical hand capable of automatically taking and placing wafer |
| KR101483082B1 (en) * | 2014-04-02 | 2015-01-19 | 주식회사 로보스타 | Transfer robot having eight robot arms |
| CN108356804A (en) * | 2018-02-08 | 2018-08-03 | 宁波润华全芯微电子设备有限公司 | A kind of wafer conveying robot |
| CN109065484A (en) * | 2018-08-24 | 2018-12-21 | 宁波润华全芯微电子设备有限公司 | A kind of hollow main shaft structure for decontamination |
| CN109383974B (en) * | 2018-09-10 | 2021-04-20 | 杭州慧盈智能科技有限公司 | Storage robot and control method thereof |
-
2019
- 2019-06-19 CN CN201910530657.1A patent/CN110370310B/en active Active
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| Publication number | Publication date |
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| CN110370310A (en) | 2019-10-25 |
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