CN214520190U

CN214520190U - Seven-axis mechanical arm and degumming machine

Info

Publication number: CN214520190U
Application number: CN202120648378.8U
Authority: CN
Inventors: 王冲; 沈云清
Original assignee: Ningbo All Semi Micro Electronics Equipment Co ltd
Current assignee: Ningbo All Semi Micro Electronics Equipment Co ltd
Priority date: 2021-03-31
Filing date: 2021-03-31
Publication date: 2021-10-29
Anticipated expiration: 2031-03-31

Abstract

The utility model discloses a seven robotic arm and degumming machine, seven robotic arm include: five-axis clamping device, comprising: the clamping device comprises a rotating mechanism and four clamping mechanisms which are rotationally connected with the rotating mechanism; the horizontal movement mechanism is connected with the rotating mechanism in a sliding manner; and the vertical motion mechanism is connected with the horizontal motion mechanism in a sliding manner. The utility model provides a press from both sides of wafer get the mechanism degree of freedom low, the less problem of horizontal migration scope.

Description

Seven-axis mechanical arm and degumming machine

Technical Field

The utility model relates to a semiconductor trade wafer field especially relates to a seven robotic arm and resist stripper.

Background

At present, in the photoresist stripping and cleaning process of the wafer, the wafer needs to be transferred. Specifically, after photoresist is removed from the wafer, photoresist removing liquid and other impurities are adhered to the wafer, the wafer is sequentially placed into a wafer box through a wafer clamping device, and then the wafer box is placed into a soaking device to clean the wafer.

The existing wafer clamping device realizes the movement of the clamping mechanism in the horizontal direction through the rotating mechanism and the linear motion mechanisms on the rotating mechanism, but the size of the linear motion mechanism on the rotating mechanism is limited by the size of the rotating mechanism, the motion range of the linear motion mechanism is small, and the linear motion mechanism cannot horizontally move for a long distance, so that the device cannot be used for a large-scale photoresist remover or a combined photoresist remover.

SUMMERY OF THE UTILITY MODEL

Therefore, the embodiment of the utility model provides a seven robotic arms, the clamp that has solved the wafer gets the mechanism degree of freedom low, the less problem of horizontal migration scope.

On the one hand, the embodiment of the utility model provides a seven robotic arm, include: five-axis clamping device, comprising: the clamping device comprises a rotating mechanism and four clamping mechanisms which are rotationally connected with the rotating mechanism; the horizontal movement mechanism is connected with the rotating mechanism in a sliding manner; and the vertical motion mechanism is connected with the horizontal motion mechanism in a sliding manner.

The technical effect achieved after the technical scheme is adopted is as follows: the horizontal movement mechanism can drive the five-axis clamping device to perform linear movement on a horizontal plane, so that the clamping range of the seven-axis mechanical arm is expanded, and the problem that the linear movement range of the clamping mechanism is limited on the rotating mechanism is solved.

In a first embodiment of the present invention, the horizontal movement mechanism includes: a support plate; a sliding plate located at one side of the supporting plate; and the horizontal movement bracket is positioned on the other side of the support plate relative to the sliding plate and is connected with the sliding plate.

The technical effect achieved after the technical scheme is adopted is as follows: the horizontal moving support is clamped on the supporting plate, so that the five-shaft clamping device is fixed; the sliding plate is used for transmitting power and driving the horizontal movement support to move.

In a first embodiment of the present invention, the horizontal movement mechanism further includes: at least one horizontal driven assembly, which is connected with the horizontal motion bracket in a sliding way; and the horizontal driving assembly is connected with the horizontal movement support and can drive the horizontal movement support to slide on the horizontal driven assembly.

The technical effect achieved after the technical scheme is adopted is as follows: the horizontal driven assembly is used for fixing the five-axis clamping device, and the horizontal driving assembly is used for providing power for horizontal movement for the horizontal movement support and/or the five-axis clamping device.

In a first embodiment of the invention, the horizontally driven assembly comprises a drag chain assembly and/or at least one slider rail assembly.

The technical effect achieved after the technical scheme is adopted is as follows: the drag chain is used for protecting the line, so that the line can move along with the five-axis clamping device; the slider rail assembly is capable of supporting the sliding plate.

In a first embodiment of the present invention, the horizontal driving assembly includes: a timing belt assembly, comprising: the synchronous belt, a synchronous belt wheel and a rack are matched with the synchronous belt; wherein the rack is connected to the sliding plate.

The technical effect achieved after the technical scheme is adopted is as follows: the synchronous belt wheel is used for receiving the power of the motor and driving the synchronous belt to move, and the rack moves along with the synchronous belt and drives the sliding plate to move.

In a first embodiment of the present invention, the rotating mechanism further includes: the motor drives the rotating shaft; the motor is positioned in the horizontal movement support, and the rotating shaft is connected with and extends out of the horizontal movement support.

The technical effect achieved after the technical scheme is adopted is as follows: the rotating shaft is used for driving the four clamping mechanisms to rotate; the motor is arranged in the horizontal movement support, so that the installation space can be fully utilized.

In the first embodiment of the present invention, the five-axis clamping device further comprises: the bottom plate is fixed with one end, extending out of the horizontal movement bracket, of the rotating shaft; wherein the clamping mechanism is connected with the top surface and/or the bottom surface of the bottom plate.

The technical effect achieved after the technical scheme is adopted is as follows: the bottom plate is used for fixing the rotating shaft, supporting the four clamping mechanisms and transmitting power of the rotating shaft.

In a first embodiment of the present invention, each of the gripping mechanisms includes: a second slider rail assembly connected to the top or bottom surface of the base plate; and the clamping arm is connected with the second sliding block guide rail assembly.

The technical effect achieved after the technical scheme is adopted is as follows: the top surface or the bottom surface of the bottom plate can be used for mounting a second slider guide rail assembly; wherein, the top surface or the bottom surface of bottom plate respectively set up 1-2 second slider guide rail set spare can make full use of the installation space of bottom plate compares with all second slider guide rail set spare is located same one side, the size of bottom plate is littleer.

In a first embodiment of the present invention, the vertical movement mechanism includes: a lead screw assembly and at least one third slider rail assembly.

The technical effect achieved after the technical scheme is adopted is as follows: the vertical movement mechanism drives the horizontal movement mechanism through a motor and the screw rod assembly, and supports the horizontal movement mechanism through the third slide block guide rail assembly.

On the other hand, the embodiment of the utility model provides a degumming machine, including above-mentioned arbitrary one embodiment seven robotic arms.

The technical effect achieved after the technical scheme is adopted is as follows: the degumming machine has a larger movement range and degree of freedom when carrying wafers.

In summary, the above embodiments of the present application may have one or more of the following advantages or benefits:

i) the seven-axis mechanical arm can realize linear motion in the horizontal direction through the horizontal motion mechanism, and the motion freedom degree and the motion range of the clamping device are increased.

ii) the horizontal motion bracket can support the five-axis clamping device, transmit the power of the horizontal driving assembly and provide an installation space for the rotating mechanism.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a seven-axis robot arm 100 according to a first embodiment of the present invention.

Fig. 2 is a schematic view of the connection between the horizontal movement bracket 123 and the rotation mechanism 111 in fig. 1.

Fig. 3 is a schematic structural view of the horizontal movement mechanism 120 in fig. 1.

Fig. 4 is a schematic structural diagram of another view angle of the horizontal movement mechanism 120 in fig. 3.

Fig. 5 is a sectional view taken along the line a-a in fig. 4.

Fig. 6 is a schematic view of the connection between the sliding plate 122 and the horizontal driven assembly 124 and the horizontal driving assembly 125 in fig. 1.

Fig. 7 is an enlarged view of the region I in fig. 6.

Fig. 8 is a schematic view of the connection between the horizontal driving assembly 125 and the horizontal moving bracket 123 of fig. 6.

Fig. 9 is a schematic structural diagram of the five-axis gripping device 110 in fig. 1.

Fig. 10 is a schematic view showing the connection between the gripping mechanism 112 and the base plate 113 in fig. 9.

Fig. 11 is a schematic structural view of the vertical movement mechanism 130 in fig. 1.

Fig. 12 is a schematic structural diagram of a glue remover 200 according to a second embodiment of the present invention.

Description of the main element symbols:

100 is a seven-axis mechanical arm; 110 is a five-axis clamping device; 111 is a rotating mechanism; 1111 is a rotating shaft; 1112 is a limit kit; 112 is a clamping mechanism; 1121 is a second slider rail assembly; 1122 is a grasping arm; 113 is a bottom plate; 120 is a horizontal motion mechanism; 121 is a support plate; 122 is a sliding plate; 1221 is a rack mounting groove; 123 is a horizontal moving bracket; 1231 is a side plate; 1232 is a connecting plate; 1233 is a top plate; 124 is a horizontal follower assembly; 125 is a horizontal driving component; 1251 is a synchronous belt; 1252 is a synchronous pulley; 1253 is rack; 130 is a vertical movement mechanism; 131 is a screw rod component; 132 is a third slider rail assembly;

and 200 is a degumming machine.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

[ first embodiment ] A method for manufacturing a semiconductor device

Referring to fig. 1-2, a seven-axis robot arm 100 according to a first embodiment of the present invention includes: a five-axis gripping device 110, a horizontal movement mechanism 120, and a vertical movement mechanism 130. Wherein, five are got device 110 and are included: a rotating mechanism 111 and four gripping mechanisms 112 rotatably connected to the rotating mechanism 111; the horizontal movement mechanism 120 is slidably connected with the rotation mechanism 111; the vertical movement mechanism 130 is slidably connected to the horizontal movement mechanism 120.

In this embodiment, the five-axis clamping device 110 drives the four clamping mechanisms 112 to rotate through the rotating mechanism 111, and each clamping mechanism 112 can also slide on the rotating mechanism 111, so as to realize the transportation of the wafer on one horizontal plane; the vertical movement mechanism 130 realizes the handling action of the wafer in the vertical direction. The horizontal movement mechanism 120 is additionally arranged between the five-axis clamping device 110 and the vertical movement mechanism 130, so that the conveying range and the degree of freedom of the wafer in the horizontal direction can be enlarged, and the conveying requirements of a large-scale degumming machine or a combined degumming machine can be met.

Preferably, referring to fig. 3 to 5, the horizontal movement mechanism 120 includes, for example: a support plate 121, a slide plate 122, and a horizontal movement bracket 123. Wherein, the sliding plate 122 is located at one side of the supporting plate 121; and a horizontal movement bracket 123 which is positioned at the other side of the support plate 121 opposite to the sliding plate 122 and is connected to the sliding plate 122.

Specifically, the horizontal moving frame 123 includes, for example, opposite side plates 1231 and an attachment plate 1232 that attaches the two side plates 1231, and the side plates 1231 and the attachment plate 1232 form a mounting area therebetween for mounting the rotating mechanism 111 and the electric components. The side plate 1231 is provided with at least one more vertically arranged support rod for improving the strength of the side plate 1231, so that the five-axis clamping device 110 installed above the horizontal moving support 123 is more stable.

Further, the two ends of the connecting plate 1232 are fixed parts, the fixed parts protrude towards the horizontal movement mechanism 120 and are respectively located at the upper side and the lower side of the supporting plate 121, and when the horizontal movement mechanism 120 drives the horizontal movement bracket 123 to slide, the connecting plate 1232 slides relative to the supporting plate 121.

Still further, the sliding plate 122 is disposed in parallel with the supporting plate 121 with a gap therebetween; the upper and lower ends of the sliding plate 122 are connected to the two fixing members, respectively, so that the sliding plate 122 and the connecting plate 1232 cooperate to form a mounting gap for receiving the supporting plate 121. The left and right ends of the supporting plate 121 are connected to the housing of the horizontal movement mechanism 120, which can play a role of dust prevention.

Preferably, referring to fig. 5-7, the horizontal movement mechanism 120 further includes, for example: and at least one horizontal follower assembly 124 slidably coupled to the horizontal motion bracket 123. For example, one side of the sliding plate 122 away from the supporting plate 121 is connected to two horizontal driven assemblies 124, which are respectively connected to the upper and lower sides of the sliding plate 122; two horizontal follower assemblies 124 are coupled to the housing of the horizontal movement mechanism 120 on the other side of the slide plate 122.

Further, the horizontal follower assembly 124 includes, for example, a slider rail assembly. The housing of the horizontal movement mechanism 120 is provided with two guide rails, and each guide rail corresponds to at least one sliding block. For example, two sliding blocks are connected to each of the upper and lower sides of the sliding plate 122, so that the sliding plate 122 can stably slide on the horizontal movement mechanism 120.

Of course, the horizontal follower assembly 124 may also include a drag chain assembly (not shown) connected at one end to the housing of the horizontal motion mechanism 120 and at the other end to the horizontal motion bracket 123 or the five-axis gripper apparatus 110. Wherein the drag chain assembly is used for accommodating the electric circuit of the five-axis clamping device 110, and the electric circuit is not wound or damaged when the horizontal moving mechanism 120 moves.

Preferably, in conjunction with fig. 8, the horizontal movement mechanism 120 further includes, for example: and the horizontal driving assembly 125 is connected with the horizontal moving bracket 123 and can drive the horizontal moving bracket 123 to slide on the horizontal driven assembly 124. For example, in the case that the horizontal movement mechanism 120 has two horizontal follower assemblies 124, the horizontal driving assembly 125 is located between the two horizontal follower assemblies 124.

Further, the horizontal driving assembly 125 includes, for example, a timing belt assembly including a timing belt 1251, a timing pulley 1252 engaged with the timing belt 1251 and rotating at both ends of the horizontal movement mechanism 120, and a rack bar 1253 engaged with the timing belt 1251 to move horizontally. Any one of the synchronous pulleys 1252 can be used as a driving wheel, and the driving motor is connected to the driving wheel and is installed on the other side of the housing of the horizontal movement mechanism 120 opposite to the driving wheel, or is installed on the other side of the supporting plate 121 opposite to the driving wheel; the rack 1253 is interposed between the upper and lower timing belts 1251 and is engaged with the upper timing belt 1251 or the lower timing belt 1251.

Still further, the sliding plate 122 is provided with, for example, a rack installation groove 1221, and the rack installation groove 1221 communicates with both sides of the sliding plate 122 and is located between the two horizontal driven assemblies 124. The rack 1253 is arranged in the rack mounting groove 1221, and the rack 1253 extends out of one side of the rack mounting groove 1221 facing the synchronous belt 1251 and is matched with the synchronous belt 1251; the other side of the slide plate 122 from the timing belt 1251 engages the rack 1253. For example, the rack 1253 is connected to the rack mounting groove 1221 by an L-shaped mounting member, one end of which is connected to the bottom surface of the rack 1253, and the other end of which is connected to a surface of the sliding plate 122 away from the timing belt 1251.

Preferably, referring to fig. 2 and 9, the rotating mechanism 111 further includes: a rotation shaft 1111 and a motor driving the rotation shaft 1111. For example, the motor is located in the horizontal moving bracket 123, and the rotating shaft 1111 is connected to and extends out of the horizontal moving bracket 123, and outputs the rotating power to the four gripping mechanisms 112.

Specifically, the horizontal moving bracket 123 further includes a top plate 1233 connecting the two side plates 1231, for example, and the top plate 1233 is provided with an output hole matching with the rotating shaft 1111; the motor is installed on the inner side of the top plate 1233 and is connected with the rotating shaft 1111 through a speed reducer.

Further, the rotation mechanism 111 includes, for example: a stop sleeve 1112. For example, the limiting kit 1112 includes a first limiting ring and a second limiting ring, wherein the first limiting ring is sleeved on the top of the speed reducer and provided with at least one vertical upward protrusion, the second limiting ring is sleeved on the rotating shaft 1111 and provided with a vertical downward protrusion, and the protrusions of the first limiting ring and the second limiting ring are matched with each other, so that the rotating shaft 1111 can only rotate within a certain range, that is, the rotating motion of the four clamping mechanisms 112 within a certain range is realized.

Preferably, in conjunction with fig. 10, the five-axis grasping apparatus 110 further includes, for example: the bottom plate 113 is fixed to one end of the rotating shaft 1111 extending out of the horizontal movement bracket 123. For example, the top end of the rotating shaft 1111 is circumferentially provided with a plurality of fixing holes, the bottom plate 113 is provided with corresponding connecting holes, and the rotating shaft 1111 can drive the bottom plate 113 to rotate through the matching of the fixing holes and the connecting holes.

Further, the gripping mechanism 112 is connected to the top and/or bottom surface of the base plate 113. For example, two sides of the top surface of the bottom plate 113 are respectively connected with one clamping mechanism 112, and two sides of the bottom surface of the bottom plate 113 are respectively connected with one clamping mechanism 112, so that the installation space of the bottom plate 113 is fully utilized, and compared with the case that four clamping mechanisms 112 are arranged on the same surface of the bottom plate 113, the embodiment can reduce the width of the five-axis clamping device 110, save the space of the photoresist remover 200, and facilitate the movement of the five-axis clamping device 110 in the photoresist remover 200.

Of course, the gripping mechanism 112 can also be fixed on the side of the bottom plate 113, and will not be described herein.

Preferably, each of the gripping mechanisms 112 comprises: a second slider rail assembly 1121 connected to the top or bottom surface of base plate 113; a gripper arm 1122 is connected to second slider rail assembly 1121. Wherein each gripper arm 1122 slides relative to base plate 113 via a corresponding second slider rail assembly 1121.

Further, four gripper arms 1122 are positioned above second slider rail assembly 1121, and are in turn positioned in an overlapping relationship. Each gripper arm 1122 includes, for example: a horizontal connecting member for connecting the slider, a clamping member located above the second slider guide rail assembly 1121, and a vertical connecting member located at one side of the base plate 113 for connecting the horizontal connecting member and the clamping member.

The vertical connecting members on the same side of the bottom plate 113 may be arranged in parallel along a direction away from the bottom plate 113, so that the gripping arms 1122 do not interfere with each other when moving linearly.

Preferably, referring to fig. 11, the vertical movement mechanism 130 includes, for example: a lead screw assembly 131 and at least one third slider rail assembly 132. For example, the lead screw assembly 131 has a third slider rail assembly 132 on each side. The screw assembly 131 is used to drive the horizontal movement mechanism 120 to move in the vertical direction, and the third slider rail assembly 132 is used to support the horizontal movement mechanism 120, so that the movement thereof is more stable.

[ second embodiment ]

Referring to fig. 12, a second embodiment of the present invention provides a glue remover 200, including: the utility model discloses seven robotic arms 100 that the first embodiment provided. The seven-axis mechanical arm 100 automatically clamps the wafer in the photoresist remover 100, and places the wafer into a wafer box or takes the wafer out of the wafer box.

Preferably, the photoresist remover 200 is, for example, a combined photoresist remover, and a plurality of photoresist removing devices in the combined photoresist remover share the seven-axis robot arm 100 to clamp the wafer. The horizontal movement mechanism 120 in the seven-axis robot 100 has a sufficient movement range, which can meet the requirement of the clamping range of the combined type degumming machine.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. A seven-axis robot arm, comprising:

five-axis clamping device, comprising: the clamping device comprises a rotating mechanism and four clamping mechanisms which are rotationally connected with the rotating mechanism;

the horizontal movement mechanism is connected with the rotating mechanism in a sliding manner;

and the vertical motion mechanism is connected with the horizontal motion mechanism in a sliding manner.

2. The seven-axis robot arm of claim 1, wherein the horizontal motion mechanism comprises:

a support plate;

a sliding plate located at one side of the supporting plate;

and the horizontal movement bracket is positioned on the other side of the support plate relative to the sliding plate and is connected with the sliding plate.

3. The seven-axis robot arm of claim 2, wherein the horizontal motion mechanism further comprises:

at least one horizontal driven assembly, which is connected with the horizontal motion bracket in a sliding way;

and the horizontal driving assembly is connected with the horizontal movement support and can drive the horizontal movement support to slide on the horizontal driven assembly.

4. The seven-axis robot arm of claim 3, wherein the horizontal follower assembly comprises a drag chain assembly and/or at least one slider rail assembly.

5. The seven-axis robot of claim 3, wherein the horizontal drive assembly comprises:

a timing belt assembly, comprising: the synchronous belt, a synchronous belt wheel and a rack are matched with the synchronous belt;

wherein the rack is connected to the sliding plate.

6. The seven-axis robot of claim 2, wherein the rotation mechanism further comprises: the motor drives the rotating shaft;

the motor is positioned in the horizontal movement support, and the rotating shaft is connected with and extends out of the horizontal movement support.

7. The seven-axis robot arm of claim 6, wherein the five-axis gripper further comprises:

the bottom plate is fixed with one end, extending out of the horizontal movement bracket, of the rotating shaft;

wherein the clamping mechanism is connected with the top surface and/or the bottom surface of the bottom plate.

8. The seven-axis robot of claim 7, wherein each of the gripping mechanisms comprises:

a second slider rail assembly connected to the top or bottom surface of the base plate;

and the clamping arm is connected with the second sliding block guide rail assembly.

9. The seven-axis robot arm of claim 1, wherein the vertical motion mechanism comprises: a lead screw assembly and at least one third slider rail assembly.

10. A stripper comprising a seven-axis robot as claimed in any one of claims 1 to 9.