CN104176466A - Workpiece transmitting device with cleaning function - Google Patents

Workpiece transmitting device with cleaning function Download PDF

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Publication number
CN104176466A
CN104176466A CN201310207280.9A CN201310207280A CN104176466A CN 104176466 A CN104176466 A CN 104176466A CN 201310207280 A CN201310207280 A CN 201310207280A CN 104176466 A CN104176466 A CN 104176466A
Authority
CN
China
Prior art keywords
workpiece
guide rail
transfer device
component
workpiece transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201310207280.9A
Other languages
Chinese (zh)
Other versions
CN104176466B (en
Inventor
周启舟
郝术壮
郎平
唐亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CETC Beijing Electronic Equipment Co
Original Assignee
CETC Beijing Electronic Equipment Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC Beijing Electronic Equipment Co filed Critical CETC Beijing Electronic Equipment Co
Priority to CN201310207280.9A priority Critical patent/CN104176466B/en
Publication of CN104176466A publication Critical patent/CN104176466A/en
Application granted granted Critical
Publication of CN104176466B publication Critical patent/CN104176466B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention provides a workpiece transmitting device with a cleaning function and relates to the technical field of semiconductor processing manufacturing. The workpiece transmitting device is used for connecting a workpiece supplying device and a workpiece processing device and comprises a supporting component, a driving component, a power component and a cleaning component, wherein the supporting component is arranged between the workpiece supplying device and the workpiece processing device; the driving component is arranged on the supporting component and is used for receiving the workpiece supplied by the workpiece supplying device and sending the workpiece to the workpiece processing device; the power component is arranged on the supporting component and is used for supplying a conveying force to the driving component; the cleaning component is arranged aside the driving component and is used for cleaning the workpiece. According to the technical scheme provided by the invention, a conveying mode is adopted, the workpiece is cleaned during a conveying process, the time consumption of workpiece conveying and cleaning can be reduced and the workpiece processing efficiency is increased.

Description

The workpiece transfer device with cleaning function
Technical field
The present invention relates to semiconductor processing and manufacturing technical field, refer to especially a kind of workpiece transfer device with cleaning function.
Background technology
In semiconductor devices (as integrated circuit, LED etc.) processing process, at a processing stations, workpiece is completed after respective handling, often need to transfer to another one processing stations from current processing stations is for further processing, in prior art, be generally by Workpiece processing apparatus, between processing stations, to be carried workpiece, owing to there being certain distance between processing stations, and the kinematic velocity of Workpiece processing apparatus is limited, therefore transmission and the treatment effeciency of workpiece are lower, and then cause the productive costs of workpiece higher.
In addition, before workpiece enters Workpiece processing apparatus, also need workpiece to carry out various pretreatments, further increased time loss.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of workpiece transfer device with cleaning function, workpiece is adopted to the mode transmitting, and in transport process, workpiece is carried out to clean, and can reduce workpiece transmission and pretreated time loss, improve workpiece treatment effeciency.
For solving the problems of the technologies described above, embodiments of the invention provide technical scheme as follows:
On the one hand, provide a kind of workpiece transfer device, for connecting workpiece generator and Workpiece processing apparatus, described workpiece transfer device comprises:
Be arranged on the supporting component between described workpiece generator and Workpiece processing apparatus;
Be arranged on described supporting component, the workpiece providing for accepting workpiece generator, and by described work piece delivery to the transmission component of described Workpiece processing apparatus;
Be arranged on described supporting component, be used to described transmission component that the Power Component that transmits power is provided;
Be arranged on described transmission component side, for described workpiece being carried out to the cleaning assembly of clean.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component;
The slide block that be arranged on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Thereby be arranged on described guide rail inner side, the Timing Belt for driving described workpiece brace rotation to drive described slide block to slide along described guide rail.
Further, described guide rail is circular guideway, oval guide rail or straight bent guide rail.
Further, described transmission component is driven by Power Component, realizes automatically and workpiece transfer accurately.
Further, described Power Component comprises:
Motor;
The first wheel shaft and first belt wheel that be connected corresponding to described the first wheel shaft that connect with described motor;
The second wheel shaft being oppositely arranged with described the first wheel shaft and second belt wheel that be connected corresponding to described the second wheel shaft;
Wherein, described the first belt wheel and the second belt wheel and the engagement of described Timing Belt, described the first belt wheel can rotate under the effect of described motor, by the engagement with described Timing Belt, drives described Timing Belt to rotate, and then the second belt wheel rotation described in transmission.
Further, described the first wheel shaft is connected with described motor by coupler.
Further, described supporting component comprises:
Supporting substrate;
Be arranged on the upper supporting plate column on described supporting substrate;
Be arranged on the upper supporting plate on described upper supporting plate column;
Wherein, described motor is fixed on described upper supporting plate, and described the first wheel shaft and the second wheel shaft are arranged between described upper supporting plate and supporting substrate.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component, described guide rail is circular guideway, oval guide rail or straight bent guide rail;
The slide block that be positioned on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Described Power Component comprises:
Be arranged on described supporting component, take described guide rail as stator, the motor that the described slide block of take is mover.Further, described slide block can drive workpiece brace to realize automatically and workpiece transfer accurately as electric mover.
Further, described supporting component comprises:
Supporting substrate;
Wherein, described motor is fixed on described supporting substrate.
Wherein, described cleaning assembly includes but not limited to be arranged on dust collecting fan and the blowing engine of guide rail top.
Embodiments of the invention have following beneficial effect:
In such scheme, workpiece is adopted to the mode transmitting, can reduce the passing time of workpiece, improve workpiece treatment effeciency.In transport process, can also carry out clean to workpiece in addition, further save the production time of workpiece, improve the production efficiency of workpiece, thereby finally can reduce the productive costs of workpiece.
Accompanying drawing explanation
Fig. 1 is the structural representation of the workpiece transfer device of the embodiment of the present invention one;
Fig. 2 is the exploded perspective view of workpiece transfer device shown in Fig. 1;
Fig. 3 is another structural representation of the workpiece transfer device of the embodiment of the present invention one;
Fig. 4 is another structural representation of the workpiece transfer device of the embodiment of the present invention one;
Fig. 5 is the structural representation of the workpiece transfer device of the embodiment of the present invention two.
The specific embodiment
For technical matters, technical scheme and advantage that embodiments of the invention will be solved are clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
Embodiments of the invention cause for the type of transmission of workpiece in prior art the problem that workpiece treatment effeciency is lower, a kind of workpiece transfer device with cleaning function is provided, workpiece is adopted to the mode transmitting, and in transport process, workpiece is carried out to clean, can reduce workpiece transmission and pretreated time loss, improve workpiece treatment effeciency.
The workpiece transfer device of the embodiment of the present invention, for connecting workpiece generator and Workpiece processing apparatus, described workpiece transfer device comprises:
Be arranged on the supporting component between described workpiece generator and Workpiece processing apparatus;
Be arranged on described supporting component, the workpiece providing for accepting workpiece generator, and by described work piece delivery to the transmission component of described Workpiece processing apparatus;
Be arranged on described supporting component, be used to described transmission component that the Power Component that transmits power is provided;
Be arranged on described transmission component side, for described workpiece being carried out to the cleaning assembly of clean.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component;
The slide block that be arranged on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Thereby be arranged on described guide rail inner side, the Timing Belt for driving described workpiece brace rotation to drive described slide block to slide along described guide rail.
Further, described guide rail is circular guideway, oval guide rail or straight bent guide rail.
Further, described Power Component comprises:
Motor;
The first wheel shaft and first belt wheel that be connected corresponding to described the first wheel shaft that connect with described motor;
The second wheel shaft being oppositely arranged with described the first wheel shaft and second belt wheel that be connected corresponding to described the second wheel shaft;
Wherein, described the first belt wheel and the second belt wheel and the engagement of described Timing Belt, described the first belt wheel can rotate under the effect of described motor, by the engagement with described Timing Belt, drives described Timing Belt to rotate, and then the second belt wheel rotation described in transmission.
Further, described the first wheel shaft is connected with described motor by coupler.
Further, described supporting component comprises:
Supporting substrate;
Be arranged on the upper supporting plate column on described supporting substrate;
Be arranged on the upper supporting plate on described upper supporting plate column;
Wherein, described motor is fixed on described upper supporting plate, and described the first wheel shaft and the second wheel shaft are arranged between described upper supporting plate and supporting substrate.
Particularly, described transmission component comprises:
Be arranged on the guide rail on described supporting component, described guide rail is circular guideway, oval guide rail or straight bent guide rail;
The slide block that be positioned on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Described Power Component comprises:
Be arranged on described supporting component, take described guide rail as stator, the motor that the described slide block of take is mover.
Further, described slide block can drive workpiece brace to realize automatically and workpiece transfer accurately as electric mover.
Further, described supporting component comprises:
Supporting substrate;
Wherein, described motor is fixed on described supporting substrate.
Particularly, described cleaning assembly includes but not limited to be arranged on dust collecting fan and the blowing engine of guide rail top.
The workpiece transfer device with cleaning function of the present invention, adopts the mode transmitting to workpiece, can reduce the passing time of workpiece, improves workpiece treatment effeciency.In transport process, can also carry out clean to workpiece in addition, further save the production time of workpiece, improve the production efficiency of workpiece, thereby finally can reduce the productive costs of workpiece.
Below in conjunction with specific embodiment and accompanying drawing, the workpiece transfer device with cleaning function of the present invention is described further:
Embodiment mono-
As shown in Figure 1 to 4, in workpiece transfer device of the present invention, include supporting component, transmission component, Power Component and for described workpiece being carried out to the cleaning assembly 3 of clean.
Wherein, supporting component comprises: be arranged on the supporting substrate 16 on complete machine platen 14; Be fixedly installed on the upper supporting plate column 7 on supporting substrate 16; Be fixed by screws in the upper supporting plate 5 on upper supporting plate column 7.
Transmission component comprises: the guide rail 10 that is arranged on supporting substrate 16 tops; The slide block 11 that be arranged on guide rail 10, can slide along guide rail 10; Be fixed on the workpiece brace 2 on slide block 11; Be arranged on the Timing Belt 17 of guide rail 10 inner sides, workpiece brace 2 by screws clamp on Timing Belt 17, thereby Timing Belt 17 can drive workpiece brace 2 rotation band movable sliders 11 to slide along guide rail 10 like this.Its middle guide 10 can be circular guideway, oval guide rail or straight bent guide rail, and in the present embodiment, particularly, guide rail 10 can be the straight bent guide rail of ellipse.
Power Component comprises: be fixed on the motor 13 on upper supporting plate 5; The first wheel shaft 15 being connected with motor 13 by coupler 9, the first belt wheel 8 of connection corresponding to the first wheel shaft 15; The second wheel shaft 4 being oppositely arranged with the first wheel shaft 15; The second belt wheel 6 of connection corresponding to the second wheel shaft 4.Wherein, the first wheel shaft 15 and the second wheel shaft 4 are between upper supporting plate 5 and supporting substrate 16, and the first belt wheel 8 and the second belt wheel 6 mesh with Timing Belt 17.Certainly, should be understood that, can also adopt other mounting structures that those skilled in the art easily expect that the first belt wheel 8 and the second belt wheel 6 are installed, all do not affect the enforcement of the present embodiment technical scheme.
Cleaning assembly 3 can be arranged on dust collecting fan or the blowing engine of guide rail 10 tops, but is not limited to dust collecting fan and blowing engine.
When the workpiece transfer device work of the present embodiment, during motor 13 rotation, by the first wheel shaft 15, drive the first belt wheel 8 rotations, the first belt wheel 8 drives Timing Belt 17 to rotate by the engagement with Timing Belt 17, and then transmission the second belt wheel 6 rotations, workpiece brace 2 by screws clamp on Timing Belt 17, Timing Belt 17 drives 2 rotations of workpiece brace while rotating, workpiece brace 2 band movable sliders 11 slide along guide rail 10, at workpiece brace 2, rotate to below cleaning assembly 3 time, cleaning assembly 3 can be removed workpiece brace 2 and residual dust and other residue of surface of the work, the clean of realization to workpiece, and can realize the cleaning of workpiece brace 2 is that its place work piece is prepared.Afterwards, next workpiece brace 2 is rotated to again cleaning assembly 3 belows, then completes cleaning action.So repeatedly carry out, realize after the clean of workpiece, by work piece delivery to Workpiece processing apparatus.
Wherein, one end of guide rail 10 is near workpiece generator, and the other end is near Workpiece processing apparatus.At workpiece generator end, workpiece generator is placed on pending workpiece on workpiece brace 2, by workpiece transfer device, work piece delivery is arrived to Workpiece processing apparatus end; At Workpiece processing apparatus end, Workpiece processing apparatus takes off workpiece from workpiece brace 2, and workpiece is processed.
Workpiece described in the present embodiment includes but not limited to wafer, chip etc.
The workpiece transfer device of the present embodiment is when installing, each several part structure can connect with screw, for example: with screw, supporting substrate 16 is fixed on complete machine platen 14, leveling guide rail 10 and slide block 11, make the upper reference plane of slide block 11 in the error limit requiring; With screw, connect upper supporting plate column 7 and supporting substrate 16, with screw, connect upper supporting plate column 7 and upper supporting plate 5; By bearing and bearing gland, the first belt wheel 8, the second belt wheel 6, the first wheel shaft 15 and the second wheel shaft 4 are installed to upper supporting plate 5 and supporting substrate 16, with screw, connect motor 13 to upper supporting plate 5, by coupler 9, connect motor shaft and the first wheel shaft 15, Timing Belt 17 and the first belt wheel 8, the second belt wheel 6 are installed, with screw, connect workpiece brace 2 to slide block 11, with screws clamp Timing Belt 17 and workpiece brace 2, the driving by Timing Belt 17 can drive workpiece brace 2 and slide block 11 to move along guide rail 10.
In the present embodiment, workpiece is loaded onto on workpiece brace at workpiece generator end, and accepts clean through being configured in the cleaning assembly in guide rail outside, then at Workpiece processing apparatus end, by Workpiece processing apparatus, is obtained and carries out next step operation.Such mode guarantees that Workpiece processing apparatus can obtain workpiece in shorter distance on the one hand; On the other hand because a plurality of workpiece can walk abreast and accept clean on workpiece transfer device, can further save the overhours of workpiece, make Workpiece processing apparatus can obtain continuously the workpiece that completes clean, improve the production efficiency of workpiece, finally can reduce the productive costs of workpiece.
Embodiment bis-
In workpiece transfer device of the present invention, include supporting component, transmission component, Power Component and for described workpiece being carried out to the cleaning assembly of clean.
Wherein, supporting component comprises the supporting substrate being arranged on complete machine platen.
As shown in Figure 5, transmission component comprises: be fixedly installed on the guide rail 21 on supporting substrate; Be arranged on guide rail 21 slide block 22 that can slide along guide rail 21; Be fixed on the workpiece brace 23 on slide block 22.
Power Component comprises: be fixedly installed on supporting substrate the motor that the guide rail 21 of take is mover as stator, the slide block 22 of take.Motor can drive all mover slide blocks 22 to move along stator guiding track 21, thereby drives workpiece brace 23 to move.Its middle guide 21 can be circular guideway, oval guide rail or straight bent guide rail.In the present embodiment, particularly, as shown in Figure 4, guide rail 21 can be the straight bent guide rail of ellipse.
Cleaning assembly can be arranged on dust collecting fan or the blowing engine of guide rail 21 tops, but is not limited to dust collecting fan and blowing engine.
When the workpiece transfer device work of the present embodiment, thereby electric mover slide block 22 drives workpiece brace 23 to drive workpiece to move to Workpiece processing apparatus end by workpiece generator end.At workpiece generator end, workpiece generator 24 is placed on pending workpiece in the workpiece brace 23 on mover slide block 22, workpiece brace 23 moves along guide rail 21 under the drive of motor, at workpiece brace 23, rotate to below cleaning assembly time, cleaning assembly can be removed workpiece brace 23 and residual dust and other residue of surface of the work, the clean of realization to workpiece, and can to realize the cleaning of workpiece brace 23 be that its place work piece is prepared.Afterwards, next workpiece brace 23 is rotated to again cleaning assembly below, then completes cleaning action.So repeatedly carry out, realize after the clean of workpiece, by work piece delivery to Workpiece processing apparatus 25.At Workpiece processing apparatus end, Workpiece processing apparatus 25 takes off workpiece from workpiece brace, and workpiece is processed.
Workpiece described in the present embodiment includes but not limited to wafer, chip etc.
The workpiece transfer device of the present embodiment is when installing, and straight bent stator guiding track 21 can be fixed on supporting substrate or directly be connected on complete machine platen with screw, so that whole transmitting device is fixed.The workpiece brace 23 that carrying workpiece is used, can connect or other connection modes with screw with being connected of mover slide block 22, and for example magnetic force connects.Workpiece generator 24, Workpiece processing apparatus 25 and cleaning assembly are screwed on complete machine platen.
In the present embodiment, workpiece is loaded onto on workpiece brace at workpiece generator end, and accepts clean through being configured in the cleaning assembly in guide rail outside, then at Workpiece processing apparatus end, by Workpiece processing apparatus, is obtained and carries out next step operation.Such mode guarantees that Workpiece processing apparatus can obtain workpiece in shorter distance on the one hand; On the other hand because a plurality of workpiece can walk abreast and accept clean on workpiece transfer device, can further save the overhours of workpiece, make Workpiece processing apparatus can obtain continuously the workpiece that completes clean, improve the production efficiency of workpiece, finally can reduce the productive costs of workpiece.
The above is the preferred embodiment of the present invention; should be understood that; for those skilled in the art; do not departing under the prerequisite of principle of the present invention; can also make some distortion, improvements and modifications, these distortion, improvements and modifications also should be considered as protection scope of the present invention.

Claims (11)

1. a workpiece transfer device with cleaning function, for connecting workpiece generator and Workpiece processing apparatus, is characterized in that, described workpiece transfer device comprises:
Be arranged on the supporting component between described workpiece generator and Workpiece processing apparatus;
Be arranged on described supporting component, the workpiece providing for accepting workpiece generator, and by described work piece delivery to the transmission component of described Workpiece processing apparatus;
Be arranged on described supporting component, be used to described transmission component that the Power Component that transmits power is provided;
Be arranged on described transmission component side, for described workpiece being carried out to the cleaning assembly of clean.
2. workpiece transfer device according to claim 1, is characterized in that, described transmission component comprises:
Be arranged on the guide rail on described supporting component;
The slide block that be arranged on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Thereby be arranged on described guide rail inner side, the Timing Belt for driving described workpiece brace rotation to drive described slide block to slide along described guide rail.
3. workpiece transfer device according to claim 2, is characterized in that, described guide rail is circular guideway, oval guide rail or straight bent guide rail.
4. workpiece transfer device according to claim 2, is characterized in that, described transmission component is driven by Power Component, realizes automatically and workpiece transfer accurately.
5. workpiece transfer device according to claim 2, is characterized in that, described Power Component comprises:
Motor;
The first wheel shaft and first belt wheel that be connected corresponding to described the first wheel shaft that connect with described motor;
The second wheel shaft being oppositely arranged with described the first wheel shaft and second belt wheel that be connected corresponding to described the second wheel shaft;
Wherein, described the first belt wheel and the second belt wheel and the engagement of described Timing Belt, described the first belt wheel can rotate under the effect of described motor, by the engagement with described Timing Belt, drives described Timing Belt to rotate, and then the second belt wheel rotation described in transmission.
6. workpiece transfer device according to claim 5, is characterized in that, described the first wheel shaft is connected with described motor by coupler.
7. workpiece transfer device according to claim 5, is characterized in that, described supporting component comprises:
Supporting substrate;
Be arranged on the upper supporting plate column on described supporting substrate;
Be arranged on the upper supporting plate on described upper supporting plate column;
Wherein, described motor is fixed on described upper supporting plate, and described the first wheel shaft and the second wheel shaft are arranged between described upper supporting plate and supporting substrate.
8. workpiece transfer device according to claim 1, is characterized in that, described transmission component comprises:
Be arranged on the guide rail on described supporting component, described guide rail is circular guideway, oval guide rail or straight bent guide rail;
The slide block that be positioned on described guide rail, can slide along described guide rail;
Be fixed on described slide block, for carrying the workpiece brace of described workpiece;
Described Power Component comprises:
Be arranged on described supporting component, take described guide rail as stator, the motor that the described slide block of take is mover.
9. workpiece transfer device according to claim 8, is characterized in that, described slide block can drive workpiece brace to realize automatically and workpiece transfer accurately as electric mover.
10. workpiece transfer device according to claim 8, is characterized in that, described supporting component comprises:
Supporting substrate;
Wherein, described motor is fixed on described supporting substrate.
11. according to the workpiece transfer device described in claim 2 or 8, it is characterized in that, described cleaning assembly includes but not limited to be arranged on dust collecting fan and the blowing engine of guide rail top.
CN201310207280.9A 2013-05-28 2013-05-28 Workpiece transmitting device with cleaning function Expired - Fee Related CN104176466B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310207280.9A CN104176466B (en) 2013-05-28 2013-05-28 Workpiece transmitting device with cleaning function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310207280.9A CN104176466B (en) 2013-05-28 2013-05-28 Workpiece transmitting device with cleaning function

Publications (2)

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CN104176466A true CN104176466A (en) 2014-12-03
CN104176466B CN104176466B (en) 2017-06-09

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107413767A (en) * 2017-05-24 2017-12-01 大连智云自动化装备股份有限公司 Cleaning plant
CN109822666A (en) * 2019-04-03 2019-05-31 山东益客智能机械设备有限公司 A kind of automatic cut-flower equipment
CN112678455A (en) * 2021-03-22 2021-04-20 湖南工业职业技术学院 Automatic change conveyer

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CN1118934A (en) * 1994-06-30 1996-03-20 精工爱普生株式会社 Method and apparatus for processing wafers and substrates, and apparatus for transferring the wafers and substrates
US20050150744A1 (en) * 2001-03-28 2005-07-14 Fuji Photo Film Co., Ltd. Automatic developing device, roller washing method, photosensitive material processing device, and preparation method for processing liquid
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CN201109628Y (en) * 2007-12-17 2008-09-03 重庆江增机械有限公司 Main gearing of multi-position cleaning machine
CN102361806A (en) * 2009-01-22 2012-02-22 马雷尔·斯托克家禽加工处理有限公司 Overhead conveyor system for conveying packaging trays
CN1978356B (en) * 2005-12-05 2012-03-21 东京毅力科创株式会社 Substrate conveying system, substrate conveying device and substrate treatment device
CN102470994A (en) * 2010-04-22 2012-05-23 克朗斯股份公司 Transporting apparatus and transporting method for container-handling installation, and container-handling installation with such a transporting apparatus

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1118934A (en) * 1994-06-30 1996-03-20 精工爱普生株式会社 Method and apparatus for processing wafers and substrates, and apparatus for transferring the wafers and substrates
US20050150744A1 (en) * 2001-03-28 2005-07-14 Fuji Photo Film Co., Ltd. Automatic developing device, roller washing method, photosensitive material processing device, and preparation method for processing liquid
CN1978356B (en) * 2005-12-05 2012-03-21 东京毅力科创株式会社 Substrate conveying system, substrate conveying device and substrate treatment device
CN201095526Y (en) * 2007-10-10 2008-08-06 张家港市港威超声电子有限公司 Cleaning and conveying device for bearing finished products
CN201109628Y (en) * 2007-12-17 2008-09-03 重庆江增机械有限公司 Main gearing of multi-position cleaning machine
CN102361806A (en) * 2009-01-22 2012-02-22 马雷尔·斯托克家禽加工处理有限公司 Overhead conveyor system for conveying packaging trays
CN102470994A (en) * 2010-04-22 2012-05-23 克朗斯股份公司 Transporting apparatus and transporting method for container-handling installation, and container-handling installation with such a transporting apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107413767A (en) * 2017-05-24 2017-12-01 大连智云自动化装备股份有限公司 Cleaning plant
CN109822666A (en) * 2019-04-03 2019-05-31 山东益客智能机械设备有限公司 A kind of automatic cut-flower equipment
CN112678455A (en) * 2021-03-22 2021-04-20 湖南工业职业技术学院 Automatic change conveyer

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Granted publication date: 20170609

Termination date: 20190528