CN220131283U - Silicon wafer manipulator feeding mechanism - Google Patents
Silicon wafer manipulator feeding mechanism Download PDFInfo
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- CN220131283U CN220131283U CN202320672626.1U CN202320672626U CN220131283U CN 220131283 U CN220131283 U CN 220131283U CN 202320672626 U CN202320672626 U CN 202320672626U CN 220131283 U CN220131283 U CN 220131283U
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 34
- 239000010703 silicon Substances 0.000 title claims abstract description 34
- 235000012431 wafers Nutrition 0.000 claims description 37
- 230000001360 synchronised effect Effects 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 7
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005488 sandblasting Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model provides a silicon wafer mechanical arm feeding mechanism, which comprises: the clamping jaw assembly is arranged on one side of the Z-direction servo moving module, and the Z-direction servo moving module controls the clamping jaw assembly to move up and down; one side of the Z-direction servo moving module, which is away from the clamping jaw assembly, is vertically connected with the Y-direction servo moving module, and the Z-direction servo moving module moves along a track on the Y-direction servo moving module; the two ends of the Y-direction servo moving module are respectively arranged on one X-direction servo moving module, and the Y-direction servo moving module moves along a pair of tracks on the X-direction servo moving module. The automatic positioning and grabbing device has the beneficial effects that through the arrangement and the matching of the X-direction servo moving module, the Y-direction servo moving module and the Z-direction servo moving module, the accurate positioning and grabbing of the empty basket and the full basket are realized, and the automatic efficiency is improved.
Description
Technical Field
The utility model belongs to the field of silicon wafer feeding in the semiconductor industry, and particularly relates to a silicon wafer manipulator feeding mechanism.
Background
In the photovoltaic or semiconductor field, when a silicon wafer is subjected to sand blasting operation, the silicon wafer is required to be fed. At present, most enterprises producing silicon wafers carry by adopting a manual mode, the silicon wafers are inserted into the silicon wafer baskets one by one, then the silicon wafer baskets are manually carried to cleaning equipment, and as the silicon wafers are very thin, personnel are easily scratched in the carrying process, and the silicon wafers are easily damaged and polluted; in addition, the mode of taking and placing silicon wafers one by one through the four-axis mechanical arm cannot adapt to clamping and carrying of silicon wafers with different sizes and silicon wafer baskets, is unfavorable for realizing the operation of automatic production and automatic conveying, greatly increases the time of clamping and carrying, and greatly reduces the production efficiency.
Disclosure of Invention
The utility model aims to solve the problem of providing a silicon wafer manipulator feeding mechanism which is particularly suitable for clamping and carrying wafer baskets with various sizes in sand blasting machine equipment.
In order to solve the technical problems, the utility model adopts the following technical scheme: a silicon chip manipulator feed mechanism includes: the clamping jaw assembly is arranged on one side of the Z-direction servo moving module, and the Z-direction servo moving module controls the clamping jaw assembly to move up and down;
one side of the Z-direction servo moving module, which is away from the clamping jaw assembly, is vertically connected with the Y-direction servo moving module, and the Z-direction servo moving module moves along a track on the Y-direction servo moving module;
the two ends of the Y-direction servo moving module are respectively arranged on one X-direction servo moving module, and the Y-direction servo moving module moves along a pair of tracks on the X-direction servo moving module.
Further, the X-direction servo moving module includes: the X-direction control motor is used for driving an X-direction conveyor belt in the X-direction moving module to run;
further, the X-direction moving module further includes: the X-direction conveyor belt is arranged in the X-direction module frame, is connected with the X-direction connection platform through an X-direction follow-up connecting piece arranged on the X-direction conveyor belt, and drives the X-direction connection platform to move through the X-direction conveyor belt;
and two ends of the X-direction follow-up connecting piece extend out of the X-direction module frame.
Further, the X-direction connecting platform is arranged at the outer side of the X-direction module frame and is connected with two extended ends of the X-direction follow-up connecting piece;
the X-direction control motor is arranged at one side of any X-direction module frame and is used for driving the X-direction conveyor belt in the X-direction module frame to run;
and one side of the X-direction connecting platform, which is away from the X-direction module frame, is provided with a frame structure for connecting the Y-direction servo moving module.
Further, one side of the pair of X-direction servo moving modules, which is provided with the X-direction control motor, is connected through a connecting rod, and the pair of X-direction servo moving modules synchronously move.
Further, the Y-direction servo moving module includes: the Y-direction control motor is used for driving a Y-direction conveyor belt in the Y-direction moving module to run;
further, the Y-direction moving module further includes: the Y-direction conveyor belt is arranged in the Y-direction module frame, is connected with the Y-direction connection platform through a Y-direction follow-up connecting piece arranged on the Y-direction conveyor belt, and drives the Y-direction connection platform to move through the Y-direction conveyor belt;
and two ends of the Y-direction follow-up connecting piece extend out of the Y-direction module frame.
Further, the Y-direction connecting platform is arranged at the outer side of the Y-direction module frame and connected with two extended ends of the Y-direction follow-up connecting piece;
two sides of the Y-direction module frame are respectively provided with a Y-direction control motor, two Y-direction conveyor belts are arranged in the Y-direction module frame in parallel, each Y-direction conveyor belt is provided with a Y-direction follow-up connecting piece, and each Y-direction control motor is used for independently driving the Y-direction conveyor belt in the Y-direction module frame to operate;
one side of the Y-direction connecting platform, which is away from the Y-direction module frame, is connected with the Z-direction servo moving module.
Further, the Z-direction servo moving module includes: z is to control motor and Z to remove the module, Z is to control motor is used for driving Z to remove the interior Z of module to the conveyer belt operation.
Further, the Z-direction moving module further includes: the Z-direction conveyor belt is arranged in the Z-direction module frame, is connected with the Z-direction connection platform through a Z-direction follow-up connecting piece arranged on the Z-direction conveyor belt, and drives the Z-direction connection platform to move through the Z-direction conveyor belt;
and two ends of the Z-direction follow-up connecting piece extend out of the Z-direction module frame.
Further, the Z-direction connecting platform is arranged at the outer side of the Z-direction module frame and is connected with two extended ends of the Z-direction follow-up connecting piece;
the Z-direction control motor is arranged on one side of the Z-direction module frame and is used for driving the Z-direction conveyor belt in the X-direction module frame to operate;
and one side of the Z-direction connecting platform, which is away from the Z-direction module frame, is provided with the clamping jaw assembly for connection.
Further, the jaw assembly includes: the device comprises a power unit, a grabbing clamping jaw and a clamping jaw connecting plate, wherein the power unit is arranged at the bottom of the clamping jaw connecting plate, and one end, deviating from the power unit, of the clamping jaw connecting plate is connected with the Z-direction servo moving module;
two sides of the power unit are respectively provided with one grabbing clamping jaw for driving the grabbing clamping jaws;
the grabbing clamping jaw is provided with a plurality of basket clamping blocks matched with silicon wafers of various sizes.
Due to the adoption of the technical scheme, the method has the following beneficial effects:
through the arrangement and the matching of the X-direction servo moving module, the Y-direction servo moving module and the Z-direction servo moving module, the accurate positioning and grabbing of the empty basket and the full basket are realized, and in the grabbing process, the two groups of Z-direction servo moving modules act simultaneously, so that the action beats are saved, and the efficiency of automatic action is improved; meanwhile, the mobile modules are controlled by servo, so that the control is more accurate; the Y-direction servo moving module uses double servo control to respectively control the two Z-direction servo moving modules so as to drive and control the two groups of clamping components to move, and the two groups of Z-direction modules can respectively move through the double servo control to decompose the original group of actions into two independent groups of actions, so that the working flow is simplified, the beat is shortened, the working production efficiency is improved, and the automatic and intelligent processes of the equipment are realized.
Drawings
FIG. 1 is a schematic overall construction of an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a Y-direction servo moving module according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram of a Y-direction mobile module according to an embodiment of the present utility model;
FIG. 4 is a schematic diagram of an X-direction servo moving module according to an embodiment of the present utility model;
FIG. 5 is a schematic view of a Z-directed servo movement module and jaw assembly according to one embodiment of the present utility model;
FIG. 6 is a schematic view of the position of a Y-connection platform according to one embodiment of the utility model.
In the figure:
10. x-direction servo moving module 20, Y-direction servo moving module 30, Z-direction servo moving
40. Clamping jaw assembly 11 and X-direction control motor module
12. X-direction moving module 13, connecting rod 14 and frame structure
121. X-direction connection platform 122, X-direction module frame 21 and Y-direction control motor
22. Y-direction moving module 221, Y-direction conveying belt 222 and Y-direction module frame
223. Y-direction connecting platform 224, Y-direction follow-up connecting piece 31 and Z-direction control motor
32. Z-direction moving module 321, Z-direction module frame 322 and Z-direction connecting platform
41. Power unit 42, gripping jaw 43, jaw connection plate
44. Clamping block for slice basket
Detailed Description
The utility model is further illustrated by the following examples and figures:
in one embodiment of the present utility model, as shown in fig. 1, a silicon wafer manipulator feeding mechanism includes: the clamping jaw assembly 40 is arranged on one side of the Z-direction servo moving module 30, and the clamping jaw assembly 40 is controlled to move up and down by the Z-direction servo moving module 30; one side of the Z-direction servo moving module 30, which is away from the clamping jaw assembly 40, is vertically connected with the Y-direction servo moving module 20, and the Z-direction servo moving module 30 moves along a track on the Y-direction servo moving module 20; the Y-direction servo moving module 20 is disposed at a side of the pair of X-direction servo moving modules 10 opposite to each other, and the Y-direction servo moving module 20 moves along the tracks on the pair of X-direction servo moving modules 10.
In the working process, the X-direction servo moving module 10 and the Y-direction servo moving module 20 move to the position of the slice basket, and the Z-direction servo moving module 30 drives the clamping jaw assembly 40 to ascend or descend to grab and move the slice basket.
Specifically, as shown in fig. 2, 3 and 6, the Y-direction servo moving module 20 includes: a Y-direction control motor 21 and a Y-direction moving module 22, wherein the Y-direction control motor 21 is used for driving a Y-direction conveyor belt 221 in the Y-direction moving module 22 to run; in this embodiment, the Y-direction servo moving module 20 is disposed between a pair of X-direction servo moving modules 10, and a Y-direction control motor 21 is disposed on each side of the Y-direction servo moving module 20, and the Y-direction control motor 21 drives the Y-direction conveyor 221 to operate through a small belt transmission.
Specifically, the Y-direction moving module 22 further includes: the Y-direction module frame 222 and the Y-direction connecting platform 223, the Y-direction conveyor belt 221 is arranged in the Y-direction module frame 222, the Y-direction conveyor belt 221 is connected with the Y-direction connecting platform 223 through a Y-direction follow-up connecting piece 224 arranged on the Y-direction conveyor belt 221, and the Y-direction connecting platform 223 is driven to move through the Y-direction conveyor belt 221; the two ends of the Y-direction follow-up connecting piece 224 extend out of the Y-direction module frame 222, and are connected with the Y-direction connecting platform 223 through the extending two ends.
In this embodiment, two Y-direction conveyor belts 221 are disposed in parallel inside the Y-direction module frame 222, each Y-direction conveyor belt 221 is connected to a Y-direction follow-up connector 224, and each Y-direction control motor 21 is used to independently drive the Y-direction conveyor belt 221 inside the Y-direction module frame 222 to operate; the Y-direction connecting platform 223 is arranged outside the Y-direction module frame 222 and connected with two extending ends of the Y-direction follow-up connecting piece 224; and a Z-direction servo moving module 30 is disposed at a side of the Y-direction connection platform 223 facing away from the Y-direction module frame 222.
In this embodiment, as shown in fig. 2, 3 and 6, the upper and lower sides of the Y-direction follow-up connecting member 224 are provided with protruding portions protruding from the Y-direction module frame 222, and meanwhile, the main body of the Y-direction follow-up connecting member 224 is provided with two pairs of Y-direction conveyor belts 221 therebetween without affecting the operation of the conveyor belts; one of the Y-direction follow-up connecting pieces 224 follows up with one of the Y-direction conveying belts 221, and meanwhile, a guide rail rod matched with the Y-direction follow-up connecting pieces 224 to move is arranged in the Y-direction module frame 222 so as to facilitate the Y-direction follow-up connecting pieces 224 to move along with the Y-direction conveying belts 221; in this embodiment, two guide rail bars are provided in parallel with the direction of the Y-direction conveyor belt 221, so that the non-protruding portions on the upper and lower sides of the Y-direction follow-up link 224 move along the guide rail bars.
In the working process, through one Y-direction control motor 21 respectively arranged at two sides of the Y-direction moving module 22, the Y-direction conveyor belt 221 is driven to run through the transmission of the small transmission belt by the Y-direction control motor 21, and the Y-direction follow-up connecting piece 224 and one Y-direction conveyor belt 221 move in a follow-up manner, so that the Y-direction connecting platform 223 arranged at the outer side of the Y-direction module frame 222 and connected with the two extending ends of the Y-direction follow-up connecting piece 224 is driven to follow, and the Z-direction servo moving module 30 connected to one side, deviating from the Y-direction module frame 222, of the Y-direction connecting platform 223 is driven to move. Through connecting and setting up two Z to servo removal module 30, can realize snatching respectively empty basket and full basket, further improve holistic work efficiency.
Specifically, as shown in fig. 4, the X-direction servo moving module 10 includes: an X-direction control motor 11 and an X-direction moving module 12, wherein the X-direction control motor 11 is used for driving an X-direction conveyor belt in the X-direction moving module 12 to run; in the present embodiment, the internal structure of the X-direction moving module 12 and the Y-direction moving module 22 are identical except for the number of the disposed members, and therefore are omitted from the drawings. In this embodiment, a pair of X-direction servo moving modules 10 are provided together, an X-direction control motor 11 is disposed at one side of any X-direction moving module 12, and is driven by the X-direction control motor 11 through a small transmission belt to drive the X-direction transmission belt to operate; meanwhile, the rotating shaft of the belt wheel is also connected with a connecting rod 13, and the connecting rod 13 drives the other X-direction servo moving module 10 to synchronously move. Therefore, in the present embodiment, only one X-direction control motor 11 is provided to satisfy the demand. It is conceivable that, as an alternative, one X-direction control motor 11 is provided on one side of each X-direction moving module 12, and that two X-direction control motors 11 are provided to operate synchronously.
Specifically, as shown in fig. 4, the X-direction moving module 12 further includes: the X-direction module frame 122 and the X-direction connecting platform 121, wherein an X-direction conveyor belt is arranged in the X-direction module frame 122, the X-direction conveyor belt is connected with the X-direction connecting platform 121 through an X-direction follow-up connecting piece arranged on the X-direction conveyor belt, and the X-direction conveyor belt 121 drives the X-direction connecting platform 121 to move; the two ends of the X-direction follow-up connecting piece extend out of the X-direction module frame 122, and are connected with the X-direction connecting platform 121 through the extending two ends.
In the present embodiment, the X-direction connection platform 121 is disposed outside the X-direction module frame 122 and connected to two ends of the X-direction follower link that extend out; and a Y-direction servo moving module 20 is disposed at a side of the X-direction connecting platform 121 facing away from the X-direction module frame 122. Wherein, one side of the X-direction connecting platform 121, which is away from the X-direction module frame 122, is provided with a frame structure 14, two sides of the bottom of the frame structure 14 are connected to the X-direction connecting platform 121, and any side of the length direction of the frame structure 14 is provided with a Y-direction servo moving module 20.
In this embodiment, the structure of the X-direction follow-up connector is the same as that of the Y-direction follow-up connector 224, and will not be described herein.
In the working process, an X-direction control motor 11 arranged at one side of any X-direction moving module 12 is driven by a small transmission belt to drive an X-direction transmission belt to operate; meanwhile, the rotating shaft of the belt wheel is also connected with a connecting rod 13, and the connecting rod 13 drives the other X-direction servo moving module 10 to synchronously move; the X-direction follow-up connecting pieces and the X-direction conveyor belt in each X-direction servo moving module 10 move in a follow-up manner, so that the X-direction connecting platforms 121 arranged on the outer side of the X-direction module frame 122 and connected to the two extending ends of the X-direction follow-up connecting pieces are driven to follow-up, and the Y-direction servo moving module 20 connected to one side, away from the X-direction module frame 122, of the X-direction connecting platforms 121 is driven to move to a film basket position.
Specifically, as shown in fig. 5, the Z-direction servo moving module 30 includes: the Z-direction control motor 31 and the Z-direction moving module 32, wherein the Z-direction control motor 31 is used for driving the Z-direction conveyor belt in the Z-direction moving module 32 to run; in this embodiment, the internal structure of the Z-direction moving module 32 is the same as that of the Y-direction moving module 22 except for the number of the components, and therefore not shown in the drawings. In this embodiment, the Z-direction servo moving module 30 is disposed on one side of the Y-direction servo moving module 20 deviating from the frame structure, and a pair of Z-direction servo moving modules 30 are disposed together for driving the clamping jaw assemblies to grab the empty basket or the full basket respectively, so that the two groups of Z-direction servo moving modules 30 can act respectively, the original group of actions are decomposed into two independent groups of actions, the beat is shortened, and the overall working efficiency is further improved.
Specifically, the Z-direction moving module 32 further includes: the Z-direction module frame 321 and the Z-direction connecting platform 322, wherein a Z-direction conveying belt is arranged in the Z-direction module frame 322, the Z-direction conveying belt is connected with the Z-direction connecting platform 322 through a Z-direction follow-up connecting piece arranged on the Z-direction conveying belt, and the Z-direction connecting platform 322 is driven to move through the Z-direction conveying belt; the two ends of the Z-direction follow-up connecting piece extend out of the Z-direction module frame 321 and are connected with the Z-direction connecting platform 322 through the extending two ends.
In this embodiment, the Z-direction control motor 31 is disposed at one side of the Z-direction module frame 322, and drives the Z-direction conveyor belt to operate through the Z-direction control motor 31; the Z-direction connecting platform 322 is arranged on the outer side of the Z-direction module frame 321 and is connected with the two extended ends of the Z-direction follow-up connecting piece; and a clamping jaw assembly 40 is arranged at a position close to the bottom on one side of the Z-direction connecting platform 322, which is away from the Z-direction module frame 322.
In this embodiment, the structure of the Z-direction follow-up connector is the same as that of the Y-direction follow-up connector 224, and will not be described in detail herein.
In the working process, a Z-direction control motor 31 arranged on one side of the Z-direction moving module 32 drives a Z-direction conveying belt to operate through the Z-direction control motor 31, and the Z-direction follow-up connecting piece moves along with the Y-direction Z-direction conveying belt, so that the Z-direction connecting platform 322 arranged on the outer side of the Z-direction module frame 321 and connected to the two extending ends of the Z-direction follow-up connecting piece is driven to follow, and then the clamping jaw assembly 40 connected on one side, deviating from the Z-direction module frame 321, of the Z-direction connecting platform 322 is driven to move the position of a slice basket to be grabbed. Through connecting and setting up two Z to servo removal module 30, can realize snatching respectively empty basket and full basket, further improve holistic work efficiency.
Specifically, the jaw assembly 40 includes: the device comprises a power unit 41, a grabbing clamping jaw 42 and a clamping jaw connecting plate 43, wherein the power unit 41 is arranged at the bottom of the clamping jaw connecting plate 43, and one end, away from the power unit 41, of the clamping jaw connecting plate 43 is connected with a Z-direction servo moving module 30; two sides of the power unit 41 are respectively provided with a grabbing clamping jaw 42, and the grabbing clamping jaws 42 are driven by the power unit 41; the gripping jaw 42 is provided with a plurality of basket clamping blocks 44 which are matched with silicon wafers of various sizes.
Specifically, the wafer basket clamping block 44 is a connection block with a convex edge structure, wherein in order to adapt to wafer baskets with various sizes, the length dimension of the connection block is set according to the size of the wafer basket, and the size of the convex edge is not changed. The silicon wafer is usually 5 inches, 6 inches or 8 inches in size, so that a plurality of groups of basket clamping blocks 44 with various sizes are arranged at the opposite sides of a pair of grabbing clamping jaws 42 in parallel at intervals, and the basket clamping blocks 44 with the same size are correspondingly arranged. As shown in fig. 5, in this embodiment, two sizes of basket clamping blocks 44 are provided, 6 inches and 8 inches, respectively; it is contemplated that as an alternative, the dimensions of the gripping jaw 42 may be adjusted for placement of the wafer basket clamp 44 for wafer baskets of other sizes, such as 5 inches.
The working process of one embodiment of the utility model comprises the following steps:
firstly, confirming that the basket is in place on the station, moving the clamping jaw assembly 40 for grabbing the basket into place through the X-direction servo moving module 10 and the Y-direction servo moving module 20, descending the Z-direction servo moving module 30 to grab the basket, reading the dimension specification of the basket in the previous procedure, moving the clamping jaw assembly 40 to the corresponding height after the basket is in place, wherein the height of the 6-inch basket is lower than that of the 8-inch basket, the width is narrower, and clamping the basket through the basket clamping blocks 44. After grabbing the slice basket, the clamping jaw assembly 40 for grabbing the full basket moves to the feeding station to place the slice basket; after placing the slice basket, the clamping jaw assembly 40 for grabbing the full basket is used for grabbing a full basket to a waiting position; after the silicon wafers are sent by the wafer baskets of the equal-loading station, the empty basket is grabbed by the clamping jaw assemblies 40 for grabbing the empty basket and moved to the empty basket placing position, meanwhile, the clamping jaw assemblies 40 for grabbing the empty basket act together to place the full basket on the loading station, and the two groups of Z-direction servo moving modules 30 act simultaneously in the time period, so that the action beats are saved, and the efficiency of automatic action is improved.
The foregoing describes the embodiments of the present utility model in detail, but the description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model are intended to be covered by the present utility model.
Claims (10)
1. Silicon chip manipulator feed mechanism, its characterized in that includes: the clamping jaw assembly is arranged on one side of the Z-direction servo moving module, and the Z-direction servo moving module controls the clamping jaw assembly to move up and down;
one side of the Z-direction servo moving module, which is away from the clamping jaw assembly, is vertically connected with the Y-direction servo moving module, and the Z-direction servo moving module moves along a track on the Y-direction servo moving module;
the two ends of the Y-direction servo moving module are respectively arranged on one X-direction servo moving module, and the Y-direction servo moving module moves along a pair of tracks on the X-direction servo moving module.
2. The silicon wafer mechanical arm feeding mechanism according to claim 1, wherein: the X-direction servo moving module comprises: the X-direction control motor is used for driving an X-direction conveyor belt in the X-direction moving module to run;
the X-direction mobile module further comprises: the X-direction conveyor belt is arranged in the X-direction module frame, is connected with the X-direction connection platform through an X-direction follow-up connecting piece arranged on the X-direction conveyor belt, and drives the X-direction connection platform to move through the X-direction conveyor belt;
and two ends of the X-direction follow-up connecting piece extend out of the X-direction module frame.
3. The silicon wafer mechanical arm feeding mechanism according to claim 2, wherein: the X-direction connecting platform is arranged at the outer side of the X-direction module frame and connected with two extending ends of the X-direction follow-up connecting piece;
the X-direction control motor is arranged at one side of any X-direction module frame and is used for driving the X-direction conveyor belt in the X-direction module frame to run;
and one side of the X-direction connecting platform, which is away from the X-direction module frame, is provided with a frame structure for connecting the Y-direction servo moving module.
4. A silicon wafer manipulator feed mechanism as set forth in claim 2 or 3 wherein: and one side of the pair of X-direction servo moving modules, which is provided with the X-direction control motor, is connected through a connecting rod and is used for realizing synchronous movement of the pair of X-direction servo moving modules.
5. The silicon wafer mechanical arm feeding mechanism according to claim 1, wherein: the Y-direction servo moving module comprises: the Y-direction control motor is used for driving a Y-direction conveyor belt in the Y-direction moving module to run;
the Y-direction mobile module further comprises: the Y-direction conveyor belt is arranged in the Y-direction module frame, is connected with the Y-direction connection platform through a Y-direction follow-up connecting piece arranged on the Y-direction conveyor belt, and drives the Y-direction connection platform to move through the Y-direction conveyor belt;
and two ends of the Y-direction follow-up connecting piece extend out of the Y-direction module frame.
6. The silicon wafer manipulator feeding mechanism as set forth in claim 5, wherein: the Y-direction connecting platform is arranged on the outer side of the Y-direction module frame and connected with two extending ends of the Y-direction follow-up connecting piece;
two sides of the Y-direction module frame are respectively provided with a Y-direction control motor, two Y-direction conveyor belts are arranged in the Y-direction module frame in parallel, each Y-direction conveyor belt is provided with a Y-direction follow-up connecting piece, and each Y-direction control motor is used for independently driving the Y-direction conveyor belt in the Y-direction module frame to operate;
one side of the Y-direction connecting platform, which is away from the Y-direction module frame, is connected with the Z-direction servo moving module.
7. The silicon wafer mechanical arm feeding mechanism according to claim 1, wherein: the Z-direction servo moving module comprises: z is to control motor and Z to remove the module, Z is to control motor is used for driving Z to remove the interior Z of module to the conveyer belt operation.
8. The silicon wafer manipulator feeding mechanism as set forth in claim 7, wherein: the Z-direction moving module further comprises: the Z-direction conveyor belt is arranged in the Z-direction module frame, is connected with the Z-direction connection platform through a Z-direction follow-up connecting piece arranged on the Z-direction conveyor belt, and drives the Z-direction connection platform to move through the Z-direction conveyor belt;
and two ends of the Z-direction follow-up connecting piece extend out of the Z-direction module frame.
9. The silicon wafer manipulator feeding mechanism as set forth in claim 7 or 8, wherein: the Z-direction connecting platform is arranged on the outer side of the Z-direction module frame and connected with two extending ends of the Z-direction follow-up connecting piece;
the Z-direction control motor is arranged on one side of the Z-direction module frame and is used for driving the Z-direction conveyor belt in the X-direction module frame to operate;
and one side of the Z-direction connecting platform, which is away from the Z-direction module frame, is provided with the clamping jaw assembly for connection.
10. The silicon wafer mechanical arm feeding mechanism according to claim 1, wherein: the jaw assembly includes: the device comprises a power unit, a grabbing clamping jaw and a clamping jaw connecting plate, wherein the power unit is arranged at the bottom of the clamping jaw connecting plate, and one end, deviating from the power unit, of the clamping jaw connecting plate is connected with the Z-direction servo moving module;
two sides of the power unit are respectively provided with one grabbing clamping jaw for driving the grabbing clamping jaws;
the grabbing clamping jaw is provided with a plurality of basket clamping blocks matched with silicon wafers of various sizes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320672626.1U CN220131283U (en) | 2023-03-30 | 2023-03-30 | Silicon wafer manipulator feeding mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320672626.1U CN220131283U (en) | 2023-03-30 | 2023-03-30 | Silicon wafer manipulator feeding mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN220131283U true CN220131283U (en) | 2023-12-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320672626.1U Active CN220131283U (en) | 2023-03-30 | 2023-03-30 | Silicon wafer manipulator feeding mechanism |
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| Country | Link |
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| CN (1) | CN220131283U (en) |
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2023
- 2023-03-30 CN CN202320672626.1U patent/CN220131283U/en active Active
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