CN108816959B - A kind of mechanical cleaning production system of semiconductor light - Google Patents
A kind of mechanical cleaning production system of semiconductor light Download PDFInfo
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- CN108816959B CN108816959B CN201810611802.4A CN201810611802A CN108816959B CN 108816959 B CN108816959 B CN 108816959B CN 201810611802 A CN201810611802 A CN 201810611802A CN 108816959 B CN108816959 B CN 108816959B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Abstract
A kind of mechanical cleaning production system of semiconductor light of the present invention, it is characterized in that, the production system includes outer cover rack components and the feed mechanism that is successively set in outer cover rack components, first rotary grasping device, first positioning jacking conveying roller device, first conveying roller device, first straight line moves grasping mechanism, first cleaning device, second conveying roller device, first dust-sticking mechanism, turnover mechanism, third conveying roller device, second cleaning device, second straight line moves grasping mechanism, 4th conveying roller device, second dust-sticking mechanism, second positioning jacking conveying roller device, second rotary grasping device and shedding mechanism；It is related to a kind of mechanical production field of semiconductor light more particularly to a kind of mechanical cleaning production system of semiconductor light.The production system carries out two-sided cleaning using automation charging and cleaning, improves the cleanliness high degree of automation of cleaning, batch processing ability is strong, can be widely applied among industrial production.
Description
Technical field
The present invention relates to a kind of mechanical production field of semiconductor light more particularly to a kind of semiconductor light mechanical cleaning production systems
System.
Background technique
Photoetching is the critical process of manufacturing semiconductor devices and integrated circuit micrographics structure.Its processing quality directly affects
The parameter indexes such as device yield, reliability, device performance and service life.Light shield is that one in photoetching process is important
Link, photolithography plate must be very clean, and the circuit element on all silicon wafers both is from domain.If photolithography plate is unholiness, exist
Particle is polluted, these particles will be copied on the photoresist of silicon chip surface, cause the decline of device performance.However, photoetching
Plate is inevitably stained with the pollutants such as dust, photoresist in use, and the presence of these pollutants directly influences
The effect of photoetching.In order to guarantee photolithography plate cleaning, it is necessary to the effect and cleaning process periodically cleaned, and cleaned to photolithography plate
And reasonable disposition of each cleaning process in equipment has close connection.
Chinese invention patent (publication number CN105590879A) discloses a kind of full-automatic photoetching board cleaning machine, by loading and unloading
Unit, cleaning unit, roll-over unit, reticle transmission unit, positioning unit, medical fluid are single for giving cycling element and temperature control
Member composition.But the patent only carries out the cleaning of single side, and requirement is also unable to satisfy on cleaning effect, in addition the patent also only
It is to disclose each unit, but how to realize that automation batch processing is not open.
Summary of the invention
In order to solve the above technical problems, the object of the present invention is to provide a kind of semiconductor light mechanical cleaning production systems
System, the production system carry out two-sided cleaning using automation charging and cleaning, improve the cleanliness of cleaning, automate journey
Degree is high, and batch processing ability is strong, can be widely applied among industrial production.
In order to achieve the above purpose, present invention employs technical solutions below:
A kind of mechanical cleaning production system of semiconductor light, which is characterized in that the production system include outer cover rack components with
And it is successively set on feed mechanism, the first rotary grasping device, the first positioning jacking conveying roller dress in outer cover rack components
It sets, is the mobile grasping mechanism of the first conveying roller device, first straight line, the first cleaning device, the second conveying roller device, first viscous
The mobile grasping mechanism of dirt mechanism, turnover mechanism, third conveying roller device, the second cleaning device, second straight line, the 4th conveying rolling
Wheel apparatus, the second dust-sticking mechanism, the second positioning jacking conveying roller device, the second rotary grasping device and shedding mechanism；It is described
Feed mechanism on photolithography plate placed by the first rotary grasping device to the first positioning jacking conveying roller device, first is fixed
Position jacking conveying roller device connects the first conveying roller device, and the photolithography plate on the first conveying roller device passes through first straight line
Mobile grasping mechanism is placed to the first cleaning device and takes out placement to the second conveying roller by the mobile grasping mechanism of first straight line
Device, the second conveying roller device connect the first dust-sticking mechanism, and the first dust-sticking mechanism connects turnover mechanism, turnover mechanism connection the
Three conveying roller devices, photolithography plate on third conveying roller device are placed by the mobile grasping mechanism of second straight line to second clear
Cleaning device simultaneously takes out placement to the 4th conveying roller device, the connection of the 4th conveying roller device by the mobile grasping mechanism of second straight line
Second dust-sticking mechanism, the second dust-sticking mechanism connection the second positioning jacking conveying roller device, the second positioning jacking conveying roller dress
The photolithography plate set is placed by the first rotary grasping device to shedding mechanism.
As a further improvement, the feed mechanism is identical with shedding mechanism structure, include blowing seat, roller-way and on
Trolley；For packaged type blowing seat for placing photolithography plate to be processed, blowing seat bottom surface is smooth, and V-type stock chest is arranged in top,
The discharging of V-type stock chest is .ed while being lower than by material；The roller-way is mounted in the roller-way side plate of two sides, and roller-way side plate is fixed
It is mounted on the rack, roller-way is mutually linked with feeding cart, and blowing seat can move on roller-way and feeding cart；The roller-way
End be provided with material seat locking device, and trolley locking device is provided on the outside of roller-way.
As a further improvement, the material seat locking device includes rotary cylinder and latch, rotary cylinder setting exists
The one end of roller-way inside equipment, one end of latch is mounted on rotary cylinder, when not rotating, latch side and roller-way
Level is also equipped with proximity sensor by rotary cylinder, and also respectively there are a proximity sensor, rotary cylinder two in roller-way side plate two sides
Side is also equipped with two limited blocks.
As a further improvement, the trolley locking device includes two cylinders, guide rod and latch, leaned in roller-way
A side-lower outside close has the baffle of a fixed installation on the rack, and installation is surveyed in baffle, and there are two cylinders, and cylinder side is also
Two guide rods, cylinder and guide rod are commonly mounted on cylinder mounting plate, and machine is fixedly mounted by two bars in cylinder mounting plate
On frame, two bars were last to be equipped with a trolley idler wheels；The other side of baffle, there are two windows for position corresponding with trolley idler wheels
Mouthful, trolley idler wheels are exposed by window；The latch is connected with the piston rod of cylinder, and cross is provided on latch
Frame is provided with the slot for putting crossbeam on crossbearer；One end of feeding cart is placed in the slot of crossbearer, and is provided on crossbearer slotting
Plate, plate can mutually be locked with the crossbeam on feeding cart when cylinder rises.
As a further improvement, the first rotary grasping device and the second rotary grasping apparatus structure is identical, wrap
Include vacuum chuck device and swinging arm device；
The vacuum chuck device includes bonding in vacuum plate, vacuum chuck adjusting bracket and vacuum chuck, bonding in vacuum plate
Several vacuum chuck adjusting brackets are fixedly connected, guide groove is provided with above each vacuum chuck adjusting bracket, multiple suckers are adjusted
Frame is fixed on guide groove by adjusting nut, and vacuum chuck mounting plate is fixedly installed with sucker connecting rod, sucker connection
The bottom end of bar is connected to vacuum chuck；
The swinging arm device includes first motor, the second motor, rotating shaft holder, rotary shaft and swing arm, first motor
It positioned at the top in whole device, is fixed in rack, for motor by belt and rotation axis connection, rotating shaft terminal is each
One rotating shaft holder is installed, rotating shaft holder is fixed on the rack the middle part of rotary shaft, is fixedly installed with swing arm, swing arm top
End is equipped with the second motor, and a rotating threaded shaft is connected with below the second motor, and rotating threaded shaft both ends pass through two lead screw shaft bearings
It is mounted in swing arm, on the same line with the second motor, the side of swing arm is fixed with track, there is sliding block on track, and sliding block is logical
Link block of overdriving is connect with rotating threaded shaft, and when rotating threaded shaft is rotated forward, inverted, energy band movable slider is moved up and down；Connect on sliding block
It is connected to oscillating arm bracket, oscillating arm bracket can be moved with moving up and down for sliding block, and the lower part of oscillating arm bracket connects bonding in vacuum plate.
As a further improvement, the first positioning jacking conveying roller device and the second positioning jacking conveying roller dress
It is identical to set structure, includes frame body, conveying roller device, crawl positioning device and promotion traverse displacement unit；
Frame body is fixed in outer cover rack components, and conveying roller device includes side plate, transmission shaft and longitudinal idler wheel, two pieces of sides
Plate is fixed on frame body, and more transmission shafts are arranged in laterally side by side between two blocks of side plates, is connected on the every transmission shaft more
A longitudinal direction idler wheel, and there are two baffle wheels between longitudinal idler wheel two-by-two, so that have certain gap between two longitudinal idler wheels, every
The end of transmission shaft is provided with belt pulley, and belt pulley is mutually sequentially connected by belt, and belt transmission connection is provided with motor；
The crawl positioning device includes positioning plate, movable plate and Shifting rack, and positioning plate and movable plate are arranged at biography
The lower section of moving axis, positioning plate are fixedly connected with frame body, and two axis, the positioning are provided between positioning plate and movable plate
Plate is fixedly connected with axis, and movable plate is connected with axis by axle sleeve, and is respectively arranged with belt fixture in the two sides of movable plate, often
A belt fixture is each attached on a belt, and the belt, which is erected on belt pulley and is sequentially connected, is provided with motor；Institute
Shifting rack is provided on the positioning plate and movable plate stated, Shifting rack includes upright bar, upper boom and poke rod, and upright bar setting is positioning
The both ends of plate and movable plate, upright bar upper end are located above longitudinal idler wheel, and upper boom is erected in two upright bars, to dividing on upper boom
More poke rods are equipped with, the lower end of more poke rods is located in the transverse groove of longitudinal idler wheel；
The promotion traverse displacement unit include air cylinder fixed plate, jacking cylinder, guide rod, connecting plate, idler wheel mounting bar and
Transverse-roller, the air cylinder fixed plate are fixedly installed on frame body, and jacking cylinder is fixed in air cylinder fixed plate, the connection
Plate is connected with the piston rod of jacking cylinder, and guide rod is set in air cylinder fixed plate by axis, the upper end of guide rod and company
Fishplate bar is fixedly connected, and more idler wheel mounting bars are arranged on connecting plate laterally side by side, and multiple idler wheel branch are arranged in idler wheel mounting bar
Frame, transverse-roller are arranged on rolling wheel support, and when jacking cylinder is stretched out, transverse-roller protrusion is located at the upper of longitudinal idler wheel
Side.
As a further improvement, the mobile grasping mechanism of the first straight line and the mobile grasping mechanism structure phase of second straight line
It together, include vacuum chuck device, linear movement transmission shaft, lifting device and longitudinal moving device；
The vacuum chuck device includes bonding in vacuum plate, vacuum chuck adjusting bracket and vacuum chuck, bonding in vacuum plate
Several vacuum chuck adjusting brackets are fixedly connected, guide groove is provided with above each vacuum chuck adjusting bracket, multiple suckers are adjusted
Frame is fixed on guide groove by adjusting nut, and vacuum chuck mounting plate is fixedly installed with sucker connecting rod, sucker connection
The bottom end of bar is connected to vacuum chuck；
Respectively there are a sliding rail in the two sides up and down of sliding rail bottom plate, respectively equipped with a sliding block on upper and lower slide rail, under both the above sliding block face
One lifting device is respectively housed, there are two transmission shaft, two transmissions for the intermediate position loading and unloading of sliding rail bottom plate on the sliding block of two, face
Bearing attachment base is equipped on axis, one end of transmission shaft is connected with motor, and bearing attachment base is connected on transmission shaft by axle sleeve,
Bearing attachment base is connected on lifting device, controls the linear movement of lifting device, has on the corresponding sliding rail bottom plate of transmission shaft logical
Slot facilitates the movement of bearing attachment base, is in addition connected to another lifting device, the position of motor and motor in a rotation axis
Staggered relatively, the connection of rotation axis, situation of movement are as transmission shaft；The base top side for moving up and down part of lifting device
Motor is fixed under plate, chassis interior is equipped with rotating threaded shaft, and the shaft portion and rotating threaded shaft of motor pass through top side plate
One through-hole, is respectively equipped with a synchronous pulley on the transmission shaft of motor and on rotating threaded shaft, two synchronous pulleys pass through belt company
Then, there is one piece of guide rail splice under the side plate of top, guide rail splice is connected on rotating threaded shaft by bearing holder (housing, cover), guide rail connection
The down either side of plate is respectively equipped with guide rail, and two sliding blocks are equipped on each guide rail；The longitudinal movement part of lifting device with two
Guide rail bottom is fixed together, and connecting plate upper part is equipped with motor, and motor is connected to the rotary shaft of connecting plate bottom surface, is revolved
Respectively there are guide rail in the two sides of shaft, and sliding block is housed on each sliding rail, and axle sleeve is housed in rotary shaft, and sliding block and axle sleeve are connected to vacuum company
On fishplate bar.
As a further improvement, first dust-sticking mechanism and the second dust-sticking mechanism structure is identical, include outer housing,
Upper mounting plate, upper top tight structure, upper dedusting drawer, middle dedusting idler wheel conveying drawer, lower dedusting drawer and lower jacking mechanism, it is described
Upper mounting plate the top of outer housing is set, drawer mouth, the upper dedusting drawer, middle dedusting rolling are provided on outer housing
Wheel conveying drawer and lower dedusting drawer be separately positioned in drawer mouth, upper dedusting drawer, middle dedusting idler wheel conveying drawer and under remove
It is connected respectively by sliding rail and sliding slot between dirt drawer and outer housing；The structure of the upper top tight structure and lower jacking mechanism
Identical, upper dedusting drawer is identical with the structure of lower dedusting drawer, and the top of upper dedusting drawer is arranged in upper top tight structure, under hold out against
The lower part of lower dedusting drawer is arranged in mechanism；
The upper top tight structure and lower jacking mechanism respectively include holding out against cylinder, cylinder mounting rod and hold out against item, and two
Cylinder mounting rod is fixed on outer housing, and two hold out against the middle part that cylinder is respectively fixedly disposed at cylinder mounting rod, is held out against
The piston rod that item holds out against cylinder with two respectively is connected, and is respectively arranged with guide rod in the both ends side for holding out against item, guiding
Bar is threaded through in the axle sleeve that cylinder mounting rod is arranged in, and the both ends other side for holding out against item is respectively arranged with mandril；
The upper dedusting drawer and lower dedusting drawer respectively include drawer framework, Roller for sticking dust and adjustable bearing base, described
The both ends of drawer framework be respectively set there are two fixing seat, be respectively arranged with two guide rods in fixing seat, described is adjustable
There are two axis holes, adjustable bearing base to be arranged on two guide rods by two axis holes for setting on bearing block, and in guide rod
Bottom is provided with compressed spring, and compressed spring one end offsets with fixing seat, and the other end offsets with adjustable bearing base, and described is adjustable
Bearing block offsets with mandril, and the Roller for sticking dust has two, and two adjustable bearing bases being arranged oppositely are arranged in Roller for sticking dust；
Middle dedusting idler wheel conveying drawer includes drawer framework, driving motor and transferring roller, in the two sides of drawer framework in
Roller shaft is respectively set in portion, and multiple idler wheels are provided on roller shaft, roller shaft interstitial spaces be arranged two pairs of transferring rollers, two pairs
Transferring roller is made of upper and lower two roll bodies, and the gap passed through for photolithography plate, upper and lower two rollers are equipped between upper and lower two roll bodies
Body fits and contacts with the upper dedusting drawer and lower dedusting drawer Roller for sticking dust respectively, the end of roller shaft and two pairs of transferring rollers
Portion is respectively arranged with belt pulley, and belt pulley is mutually sequentially connected with driving motor.
As a further improvement, the turnover mechanism includes clamping cylinder, transmission shaft, overturning rotary shaft and turnover side
Plate；It is mounted with that bilevel transmission shaft, every layer of transmission shaft have equal spacing between any two in the turning over its side on both sides,
Two pieces of clamping cylinder mounting plates are installed above one layer of transmission shaft above, are fitted under each clamping cylinder mounting plate several
Clamping cylinder, spacing is identical between each clamping cylinder, above one layer clamping cylinder downward, positioned at the middle ware of two transmission shafts
Gap；The underface of one layer of clamping cylinder that layer of clamping cylinder located above below, direction is upward；The side of turning over its side fills
There is motor, motor is connected to torsion shaft, and the other end of torsion shaft is fixed on turning over its side；The interior survey of turning over its side is equipped with electricity
Machine, motor drive the rotation of each transmission shaft by belt.
Due to the adoption of the above technical solution, which is carried out the present invention using automation charging and cleaning
Two-sided cleaning improves the cleanliness of cleaning, and high degree of automation, batch processing ability is strong, can be widely applied to industrial production
Among.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the specific embodiment of the invention.
Fig. 2 is the configuration schematic diagram of the specific embodiment of the invention.
Fig. 3 is the configuration schematic diagram of feed mechanism.
Fig. 4 is the structural schematic diagram of swinging arm device.
Fig. 5 is the structural schematic diagram of vacuum chuck device.
Fig. 6 is the structural schematic diagram of the first positioning jacking conveying roller device.
Fig. 7 is the structural schematic diagram for grabbing positioning device.
Fig. 8, Fig. 9 are the structural schematic diagram for promoting traverse displacement unit.
Figure 10 is the configuration schematic diagram of the mobile grabbing device of first straight line.
Figure 11, Figure 12 are the structural schematic diagram of lifting device.
Figure 13 is the configuration schematic diagram of turnover mechanism.
Figure 14 is the configuration schematic diagram of the first dust-sticking mechanism.
Figure 15 is the structural schematic diagram of upper top tight structure.
Figure 16 is the structural schematic diagram of upper dedusting drawer.
Figure 17 is the structural schematic diagram that middle dedusting idler wheel conveys drawer.
Specific embodiment
A specific embodiment of the invention is made a detailed explanation with reference to the accompanying drawing.
The mechanical cleaning production system of a kind of semiconductor light as shown in Figure 1 and Figure 2, the production system include outer cover rack group
Part 1 and the feed mechanism 3 being successively set in outer cover rack components 1, the positioning of the first rotary grasping device 4, first jack defeated
Send the mobile grasping mechanism 8 of roller devices 7, the first conveying roller device 15, first straight line, the conveying rolling of the first cleaning device 2, second
Wheel apparatus 11, the first dust-sticking mechanism 9, turnover mechanism 10, third conveying roller device 17, the second cleaning device 12, second straight line
Mobile grasping mechanism 18, the 4th conveying roller device 23, the second dust-sticking mechanism 19, second positioning jacking conveying roller device 24,
Second rotary grasping device 14 and shedding mechanism 13.Photolithography plate on the feed mechanism 3 passes through the first rotary grasping device 4
It places to the first positioning jacking conveying roller device 7, the first positioning jacking conveying roller device 7 connects the first conveying roller device
15, the photolithography plate on the first conveying roller device 15 is placed to the first cleaning device 2 simultaneously by the mobile grasping mechanism 8 of first straight line
It is taken out and is placed to the second conveying roller device 11 by the mobile grasping mechanism 8 of first straight line, the second conveying roller device 11 connection the
One dust-sticking mechanism 9, the first dust-sticking mechanism 9 connect turnover mechanism 10, and turnover mechanism 10 connects third conveying roller device 17, third
Photolithography plate on conveying roller device 17 is placed by the mobile grasping mechanism 8 of second straight line to the second cleaning device 2 and by second
The grasping mechanism 8 that moves linearly, which takes out, to be placed to the 4th conveying roller device 23, and the 4th conveying roller device 23 connects the second binding dust
Mechanism 19, the second dust-sticking mechanism 19 connection the second positioning jacking conveying roller device 24, the second positioning jacking conveying roller device
Photolithography plate on 24 is placed by the first rotary grasping device 4 to shedding mechanism 13.
As shown in Fig. 2, the outer cover rack components 1 includes outer cover 20, warning lamp 21, internal rack 22.Outer cover 20 will
Equipment plays the role of protection, blocks dust in being wrapped in；The both ends of the equipment are arranged in warning lamp 21, are used for emergency
Alarm；Internal rack 22 is for being fixedly mounted other devices.There are several glass windows on outer cover, can observe from the outside
Internal function situation, it is very convenient.
As shown in Figure 2 and Figure 3, the feed mechanism 3 and shedding mechanism 13 include blowing seat 130, roller-way 131 and on
Trolley 138, feed mechanism 3 is identical with 13 structure of shedding mechanism, but moves contrary.As shown in figure 3, packaged type is put
For material seat 130 for placing photolithography plate to be processed, 130 bottom surface of blowing seat is smooth, and V-type stock chest is arranged in top, V-type stock chest
Discharging is .ed while being lower than by material；The roller-way 131 is mounted in the roller-way side plate of two sides, and roller-way side plate is fixedly mounted on machine
On frame, roller-way 131 is mutually linked with feeding cart 138, and blowing seat 130 can move on roller-way 131 and feeding cart 138；Institute
The end for the roller-way 131 stated is provided with material seat locking device, and the outside of roller-way 131 is provided with trolley locking device 137.
As shown in figure 3, the material seat locking device includes rotary cylinder 134 and latch, the setting of rotary cylinder 134 exists
The one end of roller-way 131 inside equipment, one end of latch is mounted on rotary cylinder 134, when not rotating, latch side
It is horizontal with roller-way, it is also equipped with proximity sensor 132 by rotary cylinder, also respectively there are a proximity sensor in roller-way side plate two sides
132,134 both sides of rotary cylinder is also equipped with two limited blocks.When material blowing seat 130 is placed on feeding cart 138 by worker
When, limited block 1303 limits blowing seat 130 and moves on feeding cart 138, and cylinder 1301 drives feeding cart 138 up
It rises, when rising to feeding cart and roller-way 131 is horizontal, limited block 1303 is opened, and blowing seat 130 enters on roller-way 131, when
When proximity sensor 132 detects blowing seat 130 and has arrived at predetermined position, limited block resists blowing seat 130, rotary cylinder
134 rotations, are fixed blowing seat with cam.
As shown in figure 3, the trolley locking device 137 includes two cylinders 1301, guide rod 137 and latch
1304, there is the baffle of a fixed installation on the rack in a side-lower of the roller-way 131 close to outside, is surveyed there are two installations in baffle
Cylinder 1301, there are two guide rod 137, cylinder 1301 and guide rods 1301 to be commonly mounted on cylinder installation on cylinder 1301 side
On plate 1302, cylinder mounting plate 1302 is fixedly mounted in rack by two bars, and two bars were last to be equipped with a trolley idler wheels
136；The other side of baffle, there are two window, trolley idler wheels to be exposed by window for position corresponding with trolley idler wheels；Described
Latch 1304 is connected with the piston rod of cylinder 1301, and crossbearer 139 is provided on latch 1304, is provided on crossbearer 139
Put the slot of crossbeam；One end of feeding cart 138 is placed in the slot of crossbearer 139, and plate 1303 is provided on crossbearer 139,
Plate 1303 can mutually be locked with the crossbeam on feeding cart 138 when cylinder 1301 rises.When feeding cart 138 and roller-way 131
After docking, feeding cart 138 and roller-way 131 can be locked by trolley locking device 137.
As shown in Fig. 2, the first rotary grasping device 4 is identical with the second rotary grasping apparatus structure, it include vacuum chuck
Device 14 and swinging arm device.
As shown in figure 5, the vacuum chuck device 14 includes bonding in vacuum plate 140, vacuum chuck adjusting bracket 141 and true
Suction disk 142, bonding in vacuum plate 140 are fixedly connected several vacuum chuck adjusting brackets 141, each vacuum chuck adjusting bracket 141
Top is provided with guide groove, and multiple sucker adjusting brackets 141 are fixed on guide groove by adjusting nut, vacuum chuck installation
Plate 143 is fixedly installed with sucker connecting rod 144, and the bottom end of sucker connecting rod 144 is connected to vacuum chuck 142.
As shown in figure 4, the swinging arm device includes first motor 41, the second motor 42, rotating shaft holder 43, rotary shaft
44 and swing arm 48, first motor 41 is located in the top of whole device, is fixed in rack, motor 41 by belt with
Rotary shaft 44 connects, and 44 both ends of rotary shaft are respectively equipped with a rotating shaft holder 43, and rotating shaft holder 43 is fixed on the rack rotation
The middle part of shaft 43, is fixedly installed with swing arm 48, and 48 top of swing arm is equipped with the second motor 42, is connected with one below the second motor 42
Root rotating threaded shaft 402,402 both ends of rotating threaded shaft are mounted in swing arm 48 by two lead screw shaft bearings 45, with the second motor 42
On the same line, the side of swing arm 48 is fixed with track 47, has sliding block 49 on track 47, sliding block 49 is by being drivingly connected block 46
It is connect with rotating threaded shaft 402, when rotating threaded shaft 402 is rotated forward, inverted, energy band movable slider 49 is moved up and down；It is connected on sliding block 49
Have an oscillating arm bracket 401, oscillating arm bracket 401 can moving up and down and move with sliding block 49, the lower part connection of oscillating arm bracket 401 is true
Empty connecting plate 140.
As shown in Fig. 2, Fig. 6, the first positioning jacking conveying roller device 7 and the second positioning jacking conveying roller dress
It is identical to set structure, includes frame body 70, conveying roller device 71, crawl positioning device 72 and promotion traverse displacement unit 73.
As shown in fig. 6, frame body 70 is fixed in outer cover rack components 1, conveying roller device 71 includes side plate 711, transmission
Axis 712 and longitudinal idler wheel 713, two blocks of side plates 711 are fixed on frame body 70, and more transmission shafts 712 are arranged in two pieces laterally side by side
Between side plate 711, multiple longitudinal idler wheels 713 of connecting on the every transmission shaft 712, and have two between longitudinal idler wheel 713 two-by-two
A baffle wheel 714, so that having certain gap between two longitudinal idler wheels 713, the end of every transmission shaft 712 is provided with belt
Wheel, belt pulley are mutually sequentially connected by belt, and belt transmission connection is provided with motor.First conveying roller device 15, second
Structure and 71 phase of conveying roller device of conveying roller device 11, third conveying roller device 17, the 4th conveying roller device 23
Together.
As shown in fig. 7, the crawl positioning device 72 includes positioning plate 721, movable plate 722 and Shifting rack 723, positioning
Plate 721 and movable plate 722 are arranged at the lower section of transmission shaft 712, and positioning plate 721 is fixedly connected with frame body 70, and in positioning plate
Two axis 724 are provided between 721 and movable plate 722, the positioning plate 721 is fixedly connected with axis 724, movable plate 722 with
Axis 724 is connected by axle sleeve, and is respectively arranged with belt fixture 725, each belt fixture 725 in the two sides of movable plate 722
It is each attached on a belt 726, the belt 726, which sets up over pulleys carried and is sequentially connected, is provided with motor 727；It is described
Positioning plate 721 and movable plate 722 on be provided with Shifting rack 723, Shifting rack 723 includes upright bar 728, upper boom 729 and stirs
The both ends of positioning plate 721 and movable plate 722 are arranged in bar 730, upright bar 728, and 728 upper end of upright bar is located at longitudinal 713 top of idler wheel,
Upper boom 729 is erected in two upright bars 728, is vertically provided with more poke rods 730 on upper boom 729, more poke rods 730
Lower end is located in the transverse groove of longitudinal idler wheel 713.
As shown in Figure 8, Figure 9, the promotion traverse displacement unit includes air cylinder fixed plate 731, jacking cylinder 732, guide rod
733, connecting plate 734, idler wheel mounting bar 735 and transverse-roller 736, the air cylinder fixed plate 731 are fixedly installed on frame body 70,
Jacking cylinder 732 is fixed in air cylinder fixed plate 731, and the connecting plate 734 is connected with the piston rod of jacking cylinder 732,
Guide rod 733 is set in air cylinder fixed plate 731 by axis, and the upper end of guide rod 733 is fixedly connected with connecting plate 734, more
Root idler wheel mounting bar 735 is arranged in laterally side by side on connecting plate 734, and multiple rolling wheel supports 737 are arranged in idler wheel mounting bar 735,
Transverse-roller 736 is arranged on rolling wheel support 737, and when jacking cylinder 732 is stretched out, the protrusion of transverse-roller 736 is located at vertical
The top of way roller 713.
Photolithography plate grabs the first positioning by the first rotary grasping device 4 and jacks on conveying roller device 7, is promoted traversing
Device is promoted, photolithography plate can on transverse-roller 736 transverse shifting, then grab positioning device 72 photolithography plate is mobile appropriate
Position, in order to the crawl of the mobile grasping mechanism 8 of first straight line, second positioning jacking this adjustable light of conveying roller device
Mechanical position grabs on shedding mechanism 13 in order to the second rotary grasping device.
As shown in Fig. 2, Figure 10, the mobile grasping mechanism 8 of the first straight line and the mobile grasping mechanism structure of second straight line
It is identical, it include vacuum chuck device 14, linear movement transmission shaft 71285, lifting device 80 and longitudinal moving device 809.
As shown in figure 5, the vacuum chuck device 14 includes bonding in vacuum plate 140, vacuum chuck adjusting bracket 141 and true
Suction disk 142, bonding in vacuum plate 140 are fixedly connected several vacuum chuck adjusting brackets 141, each vacuum chuck adjusting bracket 141
Top is provided with guide groove, and multiple sucker adjusting brackets 141 are fixed on guide groove by adjusting nut, vacuum chuck installation
Plate 143 is fixedly installed with sucker connecting rod 144, and the bottom end of sucker connecting rod 144 is connected to vacuum chuck 142.
As shown in Figure 10, respectively there are sliding rail 82 in the two sides up and down of sliding rail bottom plate 81, and 4 sliding blocks are respectively housed on upper and lower slide rail 82
83, a lifting device is respectively housed, above and below the intermediate position of sliding rail bottom plate 81 on both the above sliding block face following two sliding block
Dress is equipped with bearing attachment base on two transmission shafts 85, one end of transmission shaft 85 is connected with motor 84, bearing there are two transmission shaft
Attachment base 86 is connected on transmission shaft 85 by axle sleeve, and bearing attachment base 86 is connected on lifting device 80, controls lifting device
80 linear movement has through slot on the corresponding sliding rail bottom plate 81 of transmission shaft 85, facilitates the movement of bearing attachment base 86, and in addition one
Another lifting device is connected in rotation axis, motor 87 and the position of motor 84 are staggered relatively, connection, the movement of rotation axis 88
Situation is as transmission shaft 85.As shown in Figure 11, Figure 12, under the 89 top side plate of pedestal for moving up and down part of lifting device 80
It is fixed with motor 801, rotating threaded shaft 805 is housed inside pedestal 89, the shaft portion and rotating threaded shaft 805 of motor 801 pass through
One through-hole of top side plate is respectively equipped with a synchronous pulley on the transmission shaft of motor 801 and on rotating threaded shaft 805, two same
Step belt wheel is connected to by belt, there is one piece of guide rail splice 812 under the side plate of top, and guide rail splice 812 is connected by bearing holder (housing, cover)
It connects on rotating threaded shaft 805, the down either side of guide rail splice 812 is respectively equipped with guide rail 803, is equipped with two on each guide rail 803
A sliding block 804；The longitudinal movement part 806 of lifting device 80 is fixed together with two guide rail bottoms, on connecting plate 806
Face packing has motor 807, and motor 807 is connected to the rotary shaft 809 of 806 bottom surface of connecting plate, and the two sides of rotary shaft 809 are respectively led
Rail 810 is equipped with sliding block 811 on each sliding rail 810, axle sleeve 808 is housed in rotary shaft 809, sliding block 811 and axle sleeve 808 are connected to
On bonding in vacuum plate 140.
First cleaning device 2 and the second cleaning device 12 are using conventional cleaning device, by the mobile gripper of first straight line
Photolithography plate crawl is put into the first cleaning device 2 to structure 8 and second straight line mobile grasping mechanism and the second cleaning device 12 cleans clearly
It washes, is again crawled out photolithography plate by the mobile grasping mechanism 8 of first straight line and the mobile grasping mechanism of second straight line after the completion of cleaning
Into later process.
As shown in Fig. 2, Figure 14, first dust-sticking mechanism 9 is identical with the second dust-sticking mechanism structure, includes shell
Body, upper mounting plate 91, upper top tight structure 92, upper dedusting drawer 93, middle dedusting idler wheel conveying drawer 94, lower dedusting drawer 95 and under
The top of outer housing is arranged in jacking mechanism 96, the upper mounting plate 91, and drawer mouth is provided on outer housing, and described is upper
Dedusting drawer 93, middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 are separately positioned in drawer mouth, upper dedusting drawer 93,
It is connected respectively by sliding rail and sliding slot 97 between middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 and outer housing；It is described
Upper top tight structure 92 it is identical as the structure of lower jacking mechanism 96, upper dedusting drawer 93 is identical with the structure of lower dedusting drawer 95,
The top of upper dedusting drawer 93 is arranged in upper top tight structure 92, and the lower part of lower dedusting drawer 95 is arranged in lower jacking mechanism 96.
As shown in figure 15, the upper top tight structure 92 and lower jacking mechanism 96 respectively include holding out against cylinder 921, cylinder peace
It fills bar 922 and holds out against item 923, two cylinder mounting rods 922 are fixed on outer housing, and two hold out against cylinder 921 respectively admittedly
The middle part of cylinder mounting rod 922 is set calmly, holds out against the piston rod that item 923 holds out against cylinder 921 with two respectively and is connected, and
The both ends side for holding out against item 923 is respectively arranged with guide rod, and guide rod is threaded through in the axle sleeve that cylinder mounting rod 922 is arranged in,
The both ends other side for holding out against item 923 is respectively arranged with mandril 924.
As shown in figure 16, the upper dedusting drawer 93 and lower dedusting drawer 95 respectively include drawer framework 931, Roller for sticking dust
932 and adjustable bearing base 933, the both ends of the drawer framework 931 are respectively set there are two fixing seat 934, in fixing seat 934
Two guide rods 733 are respectively arranged with, there are two axis holes, adjustable bearing base 933 to pass through for setting on the adjustable bearing base 933
Two axis hole settings are provided with compressed spring 936, compressed spring on two guide rods 935, and in the bottom of guide rod 935
936 one end offset with fixing seat 934, and the other end offsets with adjustable bearing base 933, the adjustable bearing base 933 and mandril 924
It offsets, the Roller for sticking dust 932 has two, and two adjustable bearing bases 933 being arranged oppositely are arranged in Roller for sticking dust 932；
As shown in figure 17, middle dedusting idler wheel conveying drawer 94 includes drawer framework 941, driving motor 942 and turns
Roller 943 is moved, roller shaft 944 is respectively set in the two sides of drawer framework 931 and middle part, multiple idler wheels are provided on roller shaft 944
945, in the interstitial spaces of roller shaft 944, two pairs of transferring rollers 943 are set, two pairs of transferring rollers 943 are made of upper and lower two roll bodies,
Be equipped with the gap that passes through for photolithography plate between upper and lower two roll bodies, upper and lower two roll bodies respectively with the upper dedusting drawer 93
It fits contact with lower 95 Roller for sticking dust 932 of dedusting drawer, the end of roller shaft 944 and two pairs of transferring rollers 943 is respectively arranged with
Belt pulley, belt pulley are sequentially connected with 942 phase of driving motor.
As shown at 13, the turnover mechanism 10 includes clamping cylinder 103, transmission shaft 101, overturning rotary shaft 105 and turns over
It changes one's position plate 106；Be mounted with bilevel transmission shaft 101 in the turning over its side 106 on both sides, every layer of transmission shaft 101 two-by-two it
Between there are equal spacing, above two pieces of clamping cylinder mounting plates 102, each clamping are installed above one layer of transmission shaft 101
Several clamping cylinders 103 are fitted under cylinder mounting plate 106,130 spacing of each clamping cylinder are identical, above one layer of folder
Tight cylinder downward, positioned at the intermediate space of two transmission shafts 101；One layer of clamping cylinder that layer located above clamps gas below
The underface of cylinder, direction is upward；The side of turning over its side 711 is equipped with motor 104, and motor is connected to torsion shaft 105, torsion shaft
105 other end is fixed on turning over its side 106；The interior survey of turning over its side 106 is equipped with motor 107, and motor 107 passes through belt band
Move the rotation of each transmission shaft 101.
Work step of the invention is: photolithography plate being placed in blowing seat 130, blowing seat 130 is transported by feeding cart 138
Defeated, feeding cart 138 is docked with roller-way 131 when feeding, and blowing seat 130 is pushed into roller-way 131 and positions, and is grabbed by the first rotation
It takes device 4 to place photolithography plate to the first positioning jacking conveying roller device 7 to position, conveying photolithography plate arrives after the completion of positioning
First conveying roller device 15, the mobile grasping mechanism 8 of first straight line grab the photolithography plate on the first conveying roller device 15 and place
It is cleaned to the first cleaning device 2, takes out to place to the second conveying by the mobile grasping mechanism 8 of first straight line after the completion of cleaning and roll
Wheel apparatus 11 delivers into the first dust-sticking mechanism 9 and is dusted cleaning, and the first dust-sticking mechanism 9 connects turnover mechanism 10, tipper
Structure 10 carries out turn-over, is then sent to third conveying roller device 17, and the photolithography plate on third conveying roller device 17 passes through the
Two linear movement grasping mechanisms 8, which are placed to the second cleaning device 2, to be cleaned, by the mobile grasping mechanism 8 of second straight line after the completion of cleaning
It takes out and places to the 4th conveying roller device 23, the second dust-sticking mechanism 19 is delivered by the 4th conveying roller device 23 and is removed
Dirt cleaning is then sent to the second positioning jacking conveying roller device 24 and is positioned, grabbed after the completion of positioning by the second rotation
It takes device 14 to place to shedding mechanism 13, blanking is carried out by feeding cart 138.
Claims (9)
1. a kind of mechanical cleaning production system of semiconductor light, which includes outer cover rack components, which is characterized in that the life
Production system further includes the feed mechanism being successively set in outer cover rack components, the first rotary grasping device, the first positioning jacking
Conveying roller device, the first conveying roller device, first straight line mobile grasping mechanism, the first cleaning device, the second conveying roller
The mobile gripper of device, the first dust-sticking mechanism, turnover mechanism, third conveying roller device, the second cleaning device, second straight line
Structure, the 4th conveying roller device, the second dust-sticking mechanism, second positioning jacking conveying roller device, the second rotary grasping device and
Shedding mechanism；Photolithography plate on the feed mechanism is placed by the first rotary grasping device to the first positioning jacking conveying rolling
Wheel apparatus, the first positioning jacking conveying roller device connect the first conveying roller device, the photoetching on the first conveying roller device
Plate is placed to the first cleaning device by the mobile grasping mechanism of first straight line and takes out placement by the mobile grasping mechanism of first straight line
To the second conveying roller device, the second conveying roller device connects the first dust-sticking mechanism, and the first dust-sticking mechanism connects turnover mechanism,
Turnover mechanism connects third conveying roller device, and the photolithography plate on third conveying roller device passes through the mobile gripper of second straight line
Structure is placed to the second cleaning device and is placed by the mobile grasping mechanism taking-up of second straight line defeated to the 4th conveying roller device, the 4th
Roller devices are sent to connect the second dust-sticking mechanism, the second dust-sticking mechanism connection the second positioning jacking conveying roller device, the second positioning
Photolithography plate on jacking conveying roller device is placed by the first rotary grasping device to shedding mechanism.
2. the mechanical cleaning production system of a kind of semiconductor light according to claim 1, which is characterized in that feed mechanism and unload
Expect that mechanism structure is identical, includes blowing seat, roller-way and feeding cart；Packaged type blowing seat is for placing photoetching to be processed
Plate, blowing seat bottom surface is smooth, and V-type stock chest is arranged in top, the discharging of V-type stock chest is .ed while being lower than by material；The roller
Road is mounted in the roller-way side plate of two sides, and roller-way side plate is fixedly mounted on the rack, and roller-way is mutually linked with feeding cart, blowing
Seat can move on roller-way and feeding cart；The end of the roller-way is provided with material seat locking device, and in the outside of roller-way
It is provided with trolley locking device.
3. the mechanical cleaning production system of a kind of semiconductor light according to claim 2, which is characterized in that material seat locking device
Including rotary cylinder and latch, the one end of roller-way inside equipment is arranged in rotary cylinder, and one end of latch is mounted on
On rotary cylinder, when not rotating, latch side and roller-way are horizontal, are also equipped with proximity sensor, roller-way side by rotary cylinder
Also respectively there are a proximity sensor in plate two sides, and rotary cylinder both sides is also equipped with two limited blocks.
4. the mechanical cleaning production system of a kind of semiconductor light according to claim 2, which is characterized in that trolley locking device
Including two cylinders, guide rod and latch, there is the gear of a fixed installation on the rack in a side-lower of the roller-way close to outside
Plate surveys installation in baffle there are two cylinder, and there are two guide rod, cylinder and guide rods to be commonly mounted on cylinder peace by cylinder
In loading board, cylinder mounting plate is fixedly mounted in rack by two bars, and two bars were last to be equipped with a trolley idler wheels；Baffle
The other side, there are two window, trolley idler wheels to be exposed by window for position corresponding with trolley idler wheels；The latch and gas
The piston rod of cylinder is connected, and crossbearer is provided on latch, the slot for putting crossbeam is provided on crossbearer；It places one end of feeding cart
In the slot of crossbearer, and plate is provided on crossbearer, plate can mutually be locked with the crossbeam on feeding cart when cylinder rises.
5. the mechanical cleaning production system of a kind of semiconductor light according to claim 1, which is characterized in that the first rotary grasping
Device and the second rotary grasping apparatus structure are identical, include vacuum chuck device and swinging arm device；
The vacuum chuck device includes bonding in vacuum plate, vacuum chuck adjusting bracket and vacuum chuck, and bonding in vacuum plate is fixed
Several vacuum chuck adjusting brackets are connected to, guide groove is provided with above each vacuum chuck adjusting bracket, multiple sucker adjusting brackets are logical
It overregulates nut to be fixed on guide groove, vacuum chuck mounting plate is fixedly installed with sucker connecting rod, sucker connecting rod
Bottom end is connected to vacuum chuck；
The swinging arm device includes that first motor, the second motor, rotating shaft holder, rotary shaft and swing arm, first motor are located at
It in the top of whole device, is fixed in rack, motor is respectively installed by belt and rotation axis connection, rotating shaft terminal
There is a rotating shaft holder, rotating shaft holder is fixed on the rack the middle part of rotary shaft, is fixedly installed with swing arm, swing arm top dress
There is the second motor, a rotating threaded shaft is connected with below the second motor, rotating threaded shaft both ends pass through two lead screw shaft bearings installations
In swing arm, on the same line with the second motor, the side of swing arm is fixed with track, there is sliding block on track, and sliding block passes through drive
Dynamic link block is connect with rotating threaded shaft, and when rotating threaded shaft is rotated forward, inverted, energy band movable slider is moved up and down；It is connected on sliding block
Oscillating arm bracket, oscillating arm bracket can be moved with moving up and down for sliding block, and the lower part of oscillating arm bracket connects bonding in vacuum plate.
6. the mechanical cleaning production system of a kind of semiconductor light according to claim 1, which is characterized in that the first positioning jacking
Conveying roller device and the second positioning jacking conveying roller device structure are identical, include frame body, conveying roller device, grab and determine
Position device and promotion traverse displacement unit；
Frame body is fixed in outer cover rack components, and conveying roller device includes side plate, transmission shaft and longitudinal idler wheel, and two blocks of side plates are solid
It is scheduled on frame body, more transmission shafts are arranged in laterally side by side between two blocks of side plates, connect on the every transmission shaft multiple vertical
Way roller, and there are two baffle wheels between longitudinal idler wheel two-by-two, so that having certain gap, every transmission between two longitudinal idler wheels
The end of axis is provided with belt pulley, and belt pulley is mutually sequentially connected by belt, and belt transmission connection is provided with motor；
The crawl positioning device includes positioning plate, movable plate and Shifting rack, and positioning plate and movable plate are arranged at transmission shaft
Lower section, positioning plate is fixedly connected with frame body, and two axis are provided between positioning plate and movable plate, the positioning plate with
Axis is fixedly connected, and movable plate is connected with axis by axle sleeve, and is respectively arranged with belt fixture, Mei Gepi in the two sides of movable plate
Carrying jig is each attached on a belt, and the belt, which is erected on belt pulley and is sequentially connected, is provided with motor；Described
Be provided with Shifting rack on positioning plate and movable plate, Shifting rack includes upright bar, upper boom and poke rod, upright bar setting in positioning plate and
The both ends of movable plate, upright bar upper end are located above longitudinal idler wheel, and upper boom is erected in two upright bars, is vertically provided on upper boom
More poke rods, the lower end of more poke rods are located in the transverse groove of longitudinal idler wheel；
The promotion traverse displacement unit includes air cylinder fixed plate, jacking cylinder, guide rod, connecting plate, idler wheel mounting bar and transverse direction
Idler wheel, on the described air cylinder fixed plate fixed setting frame body, jacking cylinder is fixed in air cylinder fixed plate, the connecting plate with
The piston rod of jacking cylinder is connected, and guide rod is set in air cylinder fixed plate by axis, the upper end of guide rod and connecting plate
It is fixedly connected, more idler wheel mounting bars are arranged on connecting plate laterally side by side, and multiple rolling wheel supports are arranged in idler wheel mounting bar, horizontal
Way roller is arranged on rolling wheel support, and when jacking cylinder is stretched out, transverse-roller protrusion is located at the top of longitudinal idler wheel.
7. the mechanical cleaning production system of a kind of semiconductor light according to claim 1, which is characterized in that described first is straight
The mobile grasping mechanism of line is identical with the mobile grasping mechanism structure of second straight line, includes vacuum chuck device, linear movement transmission
Axis, lifting device and longitudinal moving device；
The vacuum chuck device includes bonding in vacuum plate, vacuum chuck adjusting bracket and vacuum chuck, and bonding in vacuum plate is fixed
Several vacuum chuck adjusting brackets are connected to, guide groove is provided with above each vacuum chuck adjusting bracket, multiple sucker adjusting brackets are logical
It overregulates nut to be fixed on guide groove, vacuum chuck mounting plate is fixedly installed with sucker connecting rod, sucker connecting rod
Bottom end is connected to vacuum chuck；
Respectively there are a sliding rail in the two sides up and down of sliding rail bottom plate, respectively equipped with a sliding block on upper and lower slide rail, two below both the above sliding block face
One lifting device is respectively housed, there are two the intermediate position loading and unloadings of sliding rail bottom plate transmission shaft, on two transmission shafts on a sliding block
It is equipped with bearing attachment base, one end of transmission shaft is connected with motor, and bearing attachment base is connected on transmission shaft by axle sleeve, bearing
Attachment base is connected on lifting device, controls the linear movement of lifting device, has through slot on the corresponding sliding rail bottom plate of transmission shaft, side
Just in addition the movement of bearing attachment base is connected to another lifting device in a rotation axis, motor is opposite with the position of motor
It places, the connection of rotation axis, situation of movement are as transmission shaft；Under the base top side plate for moving up and down part of lifting device
It is fixed with motor, chassis interior is equipped with rotating threaded shaft, and the shaft portion and rotating threaded shaft of motor pass through one of top side plate
Through-hole is respectively equipped with a synchronous pulley on the transmission shaft of motor and on rotating threaded shaft, two synchronous pulleys are connected to by belt,
There is one piece of guide rail splice under the side plate of top, guide rail splice is connected on rotating threaded shaft by bearing holder (housing, cover), guide rail splice
Down either side is respectively equipped with guide rail, and two sliding blocks are equipped on each guide rail；The longitudinal movement part of lifting device and two guide rails
Bottom is fixed together, and connecting plate upper part is equipped with motor, and motor is connected to the rotary shaft of connecting plate bottom surface, rotary shaft
Two sides respectively have a guide rail, sliding block is housed on each sliding rail, axle sleeve is housed in rotary shaft, sliding block and axle sleeve are connected to bonding in vacuum plate
On.
8. the mechanical cleaning production system of a kind of semiconductor light according to claim 1, which is characterized in that described first is viscous
Dirt mechanism is identical with the second dust-sticking mechanism structure, include outer housing, upper mounting plate, upper top tight structure, upper dedusting drawer, in remove
Dirt idler wheel conveys drawer, lower dedusting drawer and lower jacking mechanism, and the top of outer housing is arranged in the upper mounting plate, in shell
Drawer mouth is provided on body, the upper dedusting drawer, middle dedusting idler wheel conveying drawer and lower dedusting drawer are separately positioned on pumping
In drawer mouth, pass through sliding rail and cunning respectively between upper dedusting drawer, middle dedusting idler wheel conveying drawer and lower dedusting drawer and outer housing
Slot is connected；The upper top tight structure is identical as the structure of lower jacking mechanism, the structure of upper dedusting drawer and lower dedusting drawer
Identical, the top of upper dedusting drawer is arranged in upper top tight structure, and the lower part of lower dedusting drawer is arranged in lower jacking mechanism；
The upper top tight structure and lower jacking mechanism respectively include holding out against cylinder, cylinder mounting rod and hold out against item, two cylinders
Mounting rod is fixed on outer housing, and two hold out against the middle part that cylinder is respectively fixedly disposed at cylinder mounting rod, holds out against item point
The piston rod for not holding out against cylinder with two is connected, and is respectively arranged with guide rod in the both ends side for holding out against item, and guide rod is worn
It is located in the axle sleeve that cylinder mounting rod is set, the both ends other side for holding out against item is respectively arranged with mandril；
The upper dedusting drawer and lower dedusting drawer respectively include drawer framework, Roller for sticking dust and adjustable bearing base, the pumping
The both ends of drawer framework are respectively set there are two fixing seat, are respectively arranged with two guide rods, the adjustable bearing split bearing in fixing seat
There are two axis holes, adjustable bearing base to be arranged on two guide rods by two axis holes for setting on seat, and in the bottom of guide rod
It is provided with compressed spring, compressed spring one end offsets with fixing seat, and the other end offsets with adjustable bearing base, the adjustable bearing split bearing
Seat offsets with mandril, and the Roller for sticking dust has two, and two adjustable bearing bases being arranged oppositely are arranged in Roller for sticking dust；
Middle dedusting idler wheel conveying drawer includes drawer framework, driving motor and transferring roller, in the two sides and middle part of drawer framework
Not She Zhi roller shaft, be provided with multiple idler wheels on roller shaft, two pairs of transferring rollers, two pairs of transfers be set in the interstitial spaces of roller shaft
Roller is made of upper and lower two roll bodies, and the gap passed through for photolithography plate, upper and lower two roll bodies point are equipped between upper and lower two roll bodies
Does not fit and contact with the upper dedusting drawer and lower dedusting drawer Roller for sticking dust, the end part of roller shaft and two pairs of transferring rollers
It is not provided with belt pulley, belt pulley is mutually sequentially connected with driving motor.
9. the mechanical cleaning production system of a kind of semiconductor light according to claim 1, which is characterized in that turnover mechanism includes
Clamping cylinder, transmission shaft, overturning rotary shaft and turning over its side；Bilevel transmission shaft is mounted in the turning over its side on both sides,
There is equal spacing between any two in every layer of transmission shaft, above two pieces of clamping cylinders installations are installed above one layer of transmission shaft
Plate is fitted with several clamping cylinders under each clamping cylinder mounting plate, spacing is identical between each clamping cylinder, above one layer
Clamping cylinder downward, positioned at the intermediate space of two transmission shafts；One layer of clamping cylinder that layer located above clamps gas below
The underface of cylinder, direction is upward；The side of turning over its side is equipped with motor, and motor is connected to torsion shaft, and the other end of torsion shaft is solid
It is scheduled on turning over its side；The interior survey of turning over its side is equipped with motor, and motor drives the rotation of each transmission shaft by belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810611802.4A CN108816959B (en) | 2018-06-14 | 2018-06-14 | A kind of mechanical cleaning production system of semiconductor light |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810611802.4A CN108816959B (en) | 2018-06-14 | 2018-06-14 | A kind of mechanical cleaning production system of semiconductor light |
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| Publication Number | Publication Date |
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| CN108816959A CN108816959A (en) | 2018-11-16 |
| CN108816959B true CN108816959B (en) | 2019-07-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111589796A (en) * | 2020-06-23 | 2020-08-28 | 东阳东磁自动化科技有限公司 | Aluminum plate dust removal device convenient to disassemble and assemble and implementation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201654449U (en) * | 2010-04-22 | 2010-11-24 | 上海蓝光科技有限公司 | Photolithography mask cleaning frame |
| CN105204287A (en) * | 2015-09-23 | 2015-12-30 | 中国科学院上海微系统与信息技术研究所 | Clamp for manufacturing process of photoetching mask plate |
| CN105590879A (en) * | 2014-10-31 | 2016-05-18 | 陕西盛迈石油有限公司 | Automatic photoetching plate cleaning machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140082073A (en) * | 2012-12-21 | 2014-07-02 | 삼성전자주식회사 | Cleaning device, cleaning method, and device fabricating method comprising the same cleaning method |
-
2018
- 2018-06-14 CN CN201810611802.4A patent/CN108816959B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201654449U (en) * | 2010-04-22 | 2010-11-24 | 上海蓝光科技有限公司 | Photolithography mask cleaning frame |
| CN105590879A (en) * | 2014-10-31 | 2016-05-18 | 陕西盛迈石油有限公司 | Automatic photoetching plate cleaning machine |
| CN105204287A (en) * | 2015-09-23 | 2015-12-30 | 中国科学院上海微系统与信息技术研究所 | Clamp for manufacturing process of photoetching mask plate |
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Effective date of registration: 20190617 Address after: 221300 Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province, North Huancheng Road and East Hongqi Road Applicant after: Jiangsu Calpeda Semiconductor Technology Co., Ltd. Address before: 310052 No. 88 Jiangling Road, Binjiang District, Hangzhou City, Zhejiang Province Applicant before: Wang Jiahai |
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