CN108735636A - A kind of mechanical Quick cleaning device of semiconductor light - Google Patents
A kind of mechanical Quick cleaning device of semiconductor light Download PDFInfo
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- CN108735636A CN108735636A CN201810611742.6A CN201810611742A CN108735636A CN 108735636 A CN108735636 A CN 108735636A CN 201810611742 A CN201810611742 A CN 201810611742A CN 108735636 A CN108735636 A CN 108735636A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 42
- 239000004065 semiconductor Substances 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims abstract description 71
- 230000005540 biological transmission Effects 0.000 claims abstract description 49
- 238000000206 photolithography Methods 0.000 claims description 25
- 238000007664 blowing Methods 0.000 claims description 20
- 238000009434 installation Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 240000007643 Phytolacca americana Species 0.000 claims description 8
- 238000005096 rolling process Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 238000001259 photo etching Methods 0.000 claims description 6
- 230000001360 synchronised effect Effects 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000009776 industrial production Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 15
- 239000000428 dust Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 230000001351 cycling effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to a kind of mechanical production field of semiconductor light more particularly to a kind of mechanical Quick cleaning devices of semiconductor light.A kind of mechanical Quick cleaning device of semiconductor light, the device include outer cover rack components and the feed mechanism being successively set in outer cover rack components, rotary grasping device, positioning jacking conveying roller device, conveying roller device, linear movement grasping mechanism, cleaning device and the second conveying roller device；The linear movement grasping mechanism includes vacuum chuck device, linear movement transmission shaft, lifting gear and longitudinal moving device；The device is captured and is cleaned using linear movement grasping mechanism, improves the efficiency of cleaning, high degree of automation, batch processing ability is strong, can be widely applied among industrial production.
Description
Technical field
The present invention relates to a kind of mechanical production field of semiconductor light more particularly to a kind of mechanical Rapid Cleaning dresses of semiconductor light
It sets.
Background technology
Photoetching is to manufacture the critical process of semiconductor devices and integrated circuit micrographics structure.Its processing quality directly affects
The parameter indexes such as device yield, reliability, device performance and service life.Light shield is that one in photoetching process is important
Link, photolithography plate must be very clean, and the circuit element on all silicon chips both is from domain.If photolithography plate is unholiness, exist
Particle is polluted, these particles will be copied on the photoresist of silicon chip surface, cause the decline of device performance.However, photoetching
Plate is inevitably stained with the pollutants such as dust, photoresist in use, and the presence of these pollutants directly influences
The effect of photoetching.In order to ensure photolithography plate cleaning, it is necessary to the effect and cleaning periodically cleaned, and cleaned to photolithography plate
And reasonable disposition of each cleaning in equipment has close contact.
Chinese invention patent（Publication number CN105590879A）A kind of full-automatic photoetching board cleaning machine is disclosed, by loading and unloading
Unit, cleaning unit, roll-over unit, reticle transmission unit, positioning unit, liquid are single for giving cycling element and temperature control
Member composition.
Invention content
The object of the present invention is to provide a kind of mechanical Quick cleaning device of semiconductor light, which is captured using linear movement
Mechanism is captured and is cleaned, and improves the efficiency of cleaning, high degree of automation, batch processing ability is strong, can be widely applied to
Among industrial production.
In order to achieve the above purpose, present invention employs technical solutions below：
A kind of mechanical Quick cleaning device of semiconductor light, the device include outer cover rack components and are successively set on outer cover rack
Feed mechanism, rotary grasping device, positioning jacking conveying roller device in component, conveying roller device, linear movement crawl
Mechanism, cleaning device and the second conveying roller device；Photolithography plate on the feed mechanism is placed by rotary grasping device
Conveying roller device is jacked to positioning, positioning jacking conveying roller device connects the first conveying roller device, the first conveying roller
Photolithography plate on device, which is placed to cleaning device and taken out by linear movement grasping mechanism by the grasping mechanism that moves linearly, to be placed
To the second conveying roller device；The linear movement grasping mechanism includes vacuum chuck device, linear movement transmission shaft, lifting
Device and longitudinal moving device；The vacuum chuck device includes bonding in vacuum plate, vacuum cup adjusting bracket and vacuum cup,
Bonding in vacuum plate is fixedly connected several vacuum cup adjusting brackets, and guide groove is provided with above each vacuum cup adjusting bracket, more
A sucker adjusting bracket is fixed at by adjusting nut on guide groove, and vacuum cup mounting plate is installed with sucker connection
The bottom end of bar, sucker connecting rod is connected to vacuum cup；Respectively there are sliding rail in the both sides up and down of sliding rail bottom plate, are respectively equipped on upper and lower slide rail
A sliding block, respectively dress is there are one lifting gear on both the above sliding block face following two sliding block, on the intermediate position of sliding rail bottom plate
Lower dress is equipped with bearing connecting seat there are two transmission shaft on two transmission shafts, one end of transmission shaft is connected with motor, bearing connection
Seat is connected to by axle sleeve on transmission shaft, and bearing connecting seat is connected on lifting gear, controls the linear movement of lifting gear, is passed
There is straight slot on the corresponding sliding rail bottom plate of moving axis, facilitate the movement of bearing connecting seat, is in addition connected to another in a rotation axis
The position of lifting gear, motor and motor is staggered relatively, and the connection of rotation axis, situation of movement are as transmission shaft；Lifting gear
The base top side plate for moving up and down part under be fixed with motor, chassis interior is equipped with rotating threaded shaft, the driveshaft section of motor
Point and rotating threaded shaft pass through a through-hole of top side plate, respectively there are one synchronous belts for dress on the transmission shaft of motor and on rotating threaded shaft
Wheel, two synchronous pulleys are connected to by belt, have one piece of guide rail splice, guide rail splice to pass through bearing holder (housing, cover) under the side plate of top
It is connected on rotating threaded shaft, the down either side of guide rail splice is respectively equipped with guide rail, and two sliding blocks are equipped on each guide rail；Lifting
The longitudinal movement part of device is fixed together with two guide rail bottoms, and connecting plate upper part is equipped with motor, and motor connects
Then respectively there are guide rail in the both sides of the rotary shaft of connecting plate bottom surface, rotary shaft, and sliding block is housed on each sliding rail, axis is housed in rotary shaft
Set, sliding block and axle sleeve are connected on bonding in vacuum plate.
As a further improvement, the feed mechanism is identical with shedding mechanism structure, include blowing seat, roller-way and on
Trolley；For packaged type blowing seat for placing photolithography plate to be processed, blowing seat bottom surface is smooth, and V-type stock chest is arranged in top,
The discharging of V-type stock chest is .ed while being less than by material；The roller-way is mounted in the roller-way side plate of both sides, and roller-way side plate is fixed
In rack, roller-way is mutually linked with feeding cart, and blowing seat can move on roller-way and feeding cart；The roller-way
End be provided with material seat locking device, and trolley locking device is provided on the outside of roller-way.
As a further improvement, the material seat locking device includes rotary cylinder and latch, rotary cylinder setting exists
One end of the one end of roller-way inside equipment, latch is mounted on rotary cylinder, when not rotating, latch side and roller-way
Level is also equipped with proximity sensor by rotary cylinder, and roller-way side plate both sides are also each, and there are one proximity sensor, rotary cylinders two
Side is also equipped with two limited blocks.
As a further improvement, the trolley locking device includes two cylinders, guide rod and latch, leaned in roller-way
A side-lower outside close has a baffle being fixedly mounted in rack, installation is surveyed in baffle there are two cylinder, cylinder side also has
Two guide rods, cylinder and guide rod are commonly mounted on cylinder mounting plate, and machine is fixedly mounted by two bars in cylinder mounting plate
On frame, there are one trolley idler wheels for two last installations of bar；The other side of baffle, there are two windows for position corresponding with trolley idler wheels
Mouthful, trolley idler wheels are exposed by window；The latch is connected with the piston rod of cylinder, and cross is provided on latch
Frame is provided with the slot for putting crossbeam on crossbearer；One end of feeding cart is placed in the slot of crossbearer, and is provided on crossbearer slotting
Plate, plate can mutually be locked with the crossbeam on feeding cart when cylinder rises.
As a further improvement, the rotary grasping device includes vacuum chuck device and swinging arm device；
The vacuum chuck device includes bonding in vacuum plate, vacuum cup adjusting bracket and vacuum cup, and bonding in vacuum plate is fixed
Several vacuum cup adjusting brackets are connected to, guide groove is provided with above each vacuum cup adjusting bracket, multiple sucker adjusting brackets are logical
It overregulates nut to be fixed on guide groove, vacuum cup mounting plate is installed with sucker connecting rod, sucker connecting rod
Bottom end is connected to vacuum cup；
The swinging arm device includes that first motor, the second motor, rotating shaft holder, rotary shaft and swing arm, first motor are located at
It in the top of whole device, is fixed in rack, motor is respectively installed by belt and rotation axis connection, rotating shaft terminal
There are one rotating shaft holder, rotating shaft holder is fixed on the rack the middle part of rotary shaft, is installed with swing arm, swing arm top dress
There is the second motor, is connected with a rotating threaded shaft below the second motor, rotating threaded shaft both ends are installed by two lead screw shaft bearings
In swing arm, on the same line with the second motor, the side of swing arm is fixed with track, has sliding block, sliding block to pass through drive on track
Dynamic link block is connect with rotating threaded shaft, and when rotating threaded shaft is rotated forward, inverted, energy band movable slider moves up and down；It is connected on sliding block
Oscillating arm bracket, oscillating arm bracket can be moved with moving up and down for sliding block, and the lower part of oscillating arm bracket connects bonding in vacuum plate.
As a further improvement, the positioning jacking conveying roller device includes frame body, conveying roller device, captures and determine
Position device and promotion traverse displacement unit；
Frame body is fixed in outer cover rack components, and conveying roller device includes side plate, transmission shaft and longitudinal idler wheel, and two blocks of side plates are solid
It is scheduled on frame body, more transmission shafts are arranged laterally side by side between two blocks of side plates, connect on described every transmission shaft multiple vertical
Way roller, and there are two baffle wheels between longitudinal idler wheel two-by-two so that there are certain gap, every transmission between two longitudinal idler wheels
The end set of axis has belt pulley, belt pulley to be mutually sequentially connected by belt, and belt transmission is connected with motor；
The crawl positioning device includes positioning plate, movable plate and Shifting rack, and positioning plate and movable plate are arranged at transmission shaft
Lower section, positioning plate is fixedly connected with frame body, and two axis are provided between positioning plate and movable plate, the positioning plate with
Axis is fixedly connected, and movable plate is connected with axis by axle sleeve, and is respectively arranged with belt fixture, Mei Gepi in the both sides of movable plate
Carrying jig is each attached on a belt, and the belt, which is erected on belt pulley and is sequentially connected, is provided with motor；Described
Be both provided with Shifting rack on positioning plate and movable plate, Shifting rack includes upright bar, upper boom and poke rod, upright bar setting in positioning plate and
The both ends of movable plate, upright bar upper end are located above longitudinal idler wheel, and upper boom is erected in two upright bars, is vertically provided on upper boom
The lower end of more poke rods, more poke rods is located in the transverse groove of longitudinal idler wheel；
The promotion traverse displacement unit includes air cylinder fixed plate, jacking cylinder, guide rod, connecting plate, idler wheel mounting bar and transverse direction
Idler wheel, the air cylinder fixed plate be fixedly installed frame body on, jacking cylinder is fixed in air cylinder fixed plate, the connecting plate with
The piston rod of jacking cylinder is connected, and guide rod is set on by axis in air cylinder fixed plate, the upper end of guide rod and connecting plate
It is fixedly connected, more idler wheel mounting bars are arranged on connecting plate laterally side by side, and multiple rolling wheel supports are arranged in idler wheel mounting bar, horizontal
Way roller is arranged on rolling wheel support, and when jacking cylinder is stretched out, transverse-roller protrusion is located at the top of longitudinal idler wheel.
Due to the adoption of the above technical solution, which carries out crawl and clear to the present invention using linear movement grasping mechanism
It washes, improves the efficiency of cleaning, high degree of automation, batch processing ability is strong, can be widely applied among industrial production.
Description of the drawings
Fig. 1 is the structural schematic diagram of the specific embodiment of the invention.
Fig. 2 is the configuration schematic diagram of the specific embodiment of the invention.
Fig. 3 is the configuration schematic diagram of feed mechanism.
Fig. 4 is the structural schematic diagram of swinging arm device.
Fig. 5 is the structural schematic diagram of vacuum chuck device.
Fig. 6 is the structural schematic diagram that the first positioning jacks conveying roller device.
Fig. 7 is the structural schematic diagram for capturing positioning device.
Fig. 8, Fig. 9 are the structural schematic diagram for promoting traverse displacement unit.
Figure 10 is the configuration schematic diagram that first straight line moves grabbing device.
Figure 11, Figure 12 are the structural schematic diagram of lifting gear.
Figure 13 is the configuration schematic diagram of switching mechanism.
Figure 14 is the configuration schematic diagram of the first dust-sticking mechanism.
Figure 15 is the structural schematic diagram for above holding out against structure.
Figure 16 is the structural schematic diagram of upper dedusting drawer.
Figure 17 is the structural schematic diagram that middle dedusting idler wheel conveys drawer.
Specific implementation mode
The specific implementation mode of the present invention is made a detailed explanation below in conjunction with the accompanying drawings.
A kind of mechanical cleaning production system of semiconductor light as shown in Figure 1 and Figure 2, the production system include outer cover rack group
Part 1 and the feed mechanism 3 being successively set in outer cover rack components 1, the positioning of the first rotary grasping device 4, first jack defeated
Send roller devices 7, the first conveying roller device 15, first straight line movement grasping mechanism 8, the conveying rolling of the first cleaning device 2, second
Wheel apparatus 11, the first dust-sticking mechanism 9, switching mechanism 10, third conveying roller device 17, the second cleaning device 12, second straight line
Mobile grasping mechanism 18, the 4th conveying roller device 23, the second dust-sticking mechanism 19, second positioning jacking conveying roller device 24,
Second rotary grasping device 14 and shedding mechanism 13.Photolithography plate on the feed mechanism 3 passes through the first rotary grasping device 4
It places to the first positioning jacking conveying roller device 7, the first positioning jacking conveying roller device 7 connects the first conveying roller device
15, the photolithography plate on the first conveying roller device 15 moves grasping mechanism 8 by first straight line and places to the first cleaning device 2 simultaneously
It is taken out and is placed to the second conveying roller device 11 by first straight line movement grasping mechanism 8, the second conveying roller device 11 connection the
One dust-sticking mechanism 9, the first dust-sticking mechanism 9 connect switching mechanism 10, and switching mechanism 10 connects third conveying roller device 17, third
Photolithography plate on conveying roller device 17 moves grasping mechanism 8 by second straight line and places to the second cleaning device 2 and by second
The grasping mechanism 8 that moves linearly, which takes out, to be placed to the 4th conveying roller device 23, and the 4th conveying roller device 23 connects the second binding dust
Mechanism 19, the second dust-sticking mechanism 19 connection the second positioning jacking conveying roller device 24, the second positioning jacking conveying roller device
Photolithography plate on 24 is placed by the first rotary grasping device 4 to shedding mechanism 13.
As shown in Fig. 2, the outer cover rack components 1 includes outer cover 20, warning lamp 21, internal rack 22.Outer cover 20 will
Equipment plays the role of protection, blocks dust in being wrapped in；Warning lamp 21 is arranged at the both ends of the equipment, is used for emergency
Alarm；Internal rack 22 is for being fixedly mounted other devices.There are several glass windows on outer cover, can observe from the outside
Internal function situation, it is very convenient.
As shown in Figure 2 and Figure 3, the feed mechanism 3 and shedding mechanism 13 include blowing seat 130, roller-way 131 and on
Trolley 138, feed mechanism 3 is identical with 13 structure of shedding mechanism, but the direction moved is opposite.As shown in figure 3, packaged type is put
For material seat 130 for placing photolithography plate to be processed, 130 bottom surface of blowing seat is smooth, and V-type stock chest is arranged in top, V-type stock chest
Discharging is .ed while being less than by material；The roller-way 131 is mounted in the roller-way side plate of both sides, and roller-way side plate is fixedly mounted on machine
On frame, roller-way 131 is mutually linked with feeding cart 138, and blowing seat 130 can move on roller-way 131 and feeding cart 138；Institute
The end for the roller-way 131 stated is provided with material seat locking device, and the outside of roller-way 131 is provided with trolley locking device 137.
As shown in figure 3, the material seat locking device includes rotary cylinder 134 and latch, the setting of rotary cylinder 134 exists
One end of the one end of roller-way 131 inside equipment, latch is mounted on rotary cylinder 134, when not rotating, latch side
It is horizontal with roller-way, proximity sensor 132 is also equipped with by rotary cylinder, roller-way side plate both sides are also each, and there are one proximity sensors
132,134 both sides of rotary cylinder is also equipped with two limited blocks.When material blowing seat 130 is placed on feeding cart 138 by worker
When, limited block 1303 limits blowing seat 130 and is moved on feeding cart 138, and cylinder 1301 drives feeding cart 138 up
It rises, when rising to feeding cart with 131 level of roller-way, limited block 1303 is opened, and blowing seat 130 enters on roller-way 131, when
When proximity sensor 132 detects blowing seat 130 and has arrived at precalculated position, limited block resists blowing seat 130, rotary cylinder
134 rotations, are fixed blowing seat with cam.
As shown in figure 3, the trolley locking device 137 includes two cylinders 1301, guide rod 137 and latch
1304, there is a baffle being fixedly mounted in rack in a side-lower of the roller-way 131 close to outside, is surveyed there are two installations in baffle
Cylinder 1301, there are two guide rod 137, cylinder 1301 and guide rods 1301 to be commonly mounted on cylinder installation on cylinder 1301 side
On plate 1302, cylinder mounting plate 1302 is fixedly mounted by two bars in rack, and there are one trolley idler wheels for two last installations of bar
136；The other side of baffle, there are two window, trolley idler wheels to be exposed by window for position corresponding with trolley idler wheels；Described
Latch 1304 is connected with the piston rod of cylinder 1301, and crossbearer 139 is provided on latch 1304, is provided on crossbearer 139
Put the slot of crossbeam；One end of feeding cart 138 is placed in the slot of crossbearer 139, and plate 1303 is provided on crossbearer 139,
Plate 1303 can mutually be locked with the crossbeam on feeding cart 138 when cylinder 1301 rises.When feeding cart 138 and roller-way 131
After docking, feeding cart 138 and roller-way 131 can be locked by trolley locking device 137.
As shown in Fig. 2, the first rotary grasping device 4 is identical with the second rotary grasping apparatus structure, include vacuum cup
Device 14 and swinging arm device.
As shown in figure 5, the vacuum chuck device 14 includes bonding in vacuum plate 140, vacuum cup adjusting bracket 141 and true
Suction disk 142, bonding in vacuum plate 140 are fixedly connected several vacuum cup adjusting brackets 141, each vacuum cup adjusting bracket 141
Top is provided with guide groove, and multiple sucker adjusting brackets 141 are fixed at by adjusting nut on guide groove, vacuum cup installation
Plate 143 is installed with sucker connecting rod 144, and the bottom end of sucker connecting rod 144 is connected to vacuum cup 142.
As shown in figure 4, the swinging arm device includes first motor 41, the second motor 42, rotating shaft holder 43, rotary shaft
44 and swing arm 48, first motor 41 is located in the top of whole device, is fixed in rack, motor 41 by belt with
Rotary shaft 44 connects, and respectively there are one rotating shaft holders 43, rotating shaft holder 43 to be fixed on the rack rotation for installation at rotary shaft 44 both ends
The middle part of shaft 43 is installed with swing arm 48, and 48 top of swing arm is equipped with the second motor 42, and 42 lower section of the second motor is connected with one
Root rotating threaded shaft 402,402 both ends of rotating threaded shaft are mounted on by two lead screw shaft bearings 45 in swing arm 48, with the second motor 42
On the same line, the side of swing arm 48 is fixed with track 47, has sliding block 49 on track 47, sliding block 49 is by being drivingly connected block 46
It is connect with rotating threaded shaft 402, when rotating threaded shaft 402 is rotated forward, inverted, energy band movable slider 49 moves up and down；It is connected on sliding block 49
Have an oscillating arm bracket 401, oscillating arm bracket 401 can moving up and down and move with sliding block 49, the lower part connection of oscillating arm bracket 401 is true
Empty connecting plate 140.
As shown in Fig. 2, Fig. 6, the described first positioning jacking positioning jacking conveying roller dress of conveying roller device 7 and second
It is identical to set structure, includes frame body 70, conveying roller device 71, crawl positioning device 72 and promotion traverse displacement unit 73.
As shown in fig. 6, frame body 70 is fixed in outer cover rack components 1, conveying roller device 71 includes side plate 711, transmission
Axis 712 and longitudinal idler wheel 713, two blocks of side plates 711 are fixed on frame body 70, and more transmission shafts 712 are arranged laterally side by side at two pieces
Between side plate 711, multiple longitudinal idler wheels 713 of connecting on described every transmission shaft 712, and have two between longitudinal idler wheel 713 two-by-two
A baffle wheel 714 so that there is certain gap, the end set of every transmission shaft 712 to have belt between two longitudinal idler wheels 713
Wheel, belt pulley are mutually sequentially connected by belt, and belt transmission is connected with motor.First conveying roller device 15, second
Structure and 71 phase of conveying roller device of conveying roller device 11, third conveying roller device 17, the 4th conveying roller device 23
Together.
As shown in fig. 7, the crawl positioning device 72 includes positioning plate 721, movable plate 722 and Shifting rack 723, positioning
Plate 721 and movable plate 722 are arranged at the lower section of transmission shaft 712, and positioning plate 721 is fixedly connected with frame body 70, and in positioning plate
Two axis 724 are provided between 721 and movable plate 722, the positioning plate 721 is fixedly connected with axis 724, movable plate 722 with
Axis 724 is connected by axle sleeve, and is respectively arranged with belt fixture 725, each belt fixture 725 in the both sides of movable plate 722
It is each attached on a belt 726, the belt 726, which sets up over pulleys carried and is sequentially connected, is provided with motor 727；It is described
Positioning plate 721 and movable plate 722 on be both provided with Shifting rack 723, Shifting rack 723 includes upright bar 728, upper boom 729 and stirs
Bar 730, upright bar 728 are arranged at the both ends of positioning plate 721 and movable plate 722, and 728 upper end of upright bar is located at 713 top of longitudinal idler wheel,
Upper boom 729 is erected in two upright bars 728, is vertically provided with more poke rods 730 on upper boom 729, more poke rods 730
Lower end is located in the transverse groove of longitudinal idler wheel 713.
As shown in Figure 8, Figure 9, the promotion traverse displacement unit includes air cylinder fixed plate 731, jacking cylinder 732, guide rod
733, connecting plate 734, idler wheel mounting bar 735 and transverse-roller 736, the air cylinder fixed plate 731 are fixedly installed on frame body 70,
Jacking cylinder 732 is fixed in air cylinder fixed plate 731, and the connecting plate 734 is connected with the piston rod of jacking cylinder 732,
Guide rod 733 is set on by axis in air cylinder fixed plate 731, and the upper end of guide rod 733 is fixedly connected with connecting plate 734, more
Root idler wheel mounting bar 735 is arranged laterally side by side on connecting plate 734, and multiple rolling wheel supports 737 are arranged in idler wheel mounting bar 735,
Transverse-roller 736 is arranged on rolling wheel support 737, and when jacking cylinder 732 is stretched out, the protrusion of transverse-roller 736 is located at vertical
The top of way roller 713.
Photolithography plate grabs the first positioning by the first rotary grasping device 4 and jacks on conveying roller device 7, is promoted traversing
Device is promoted, photolithography plate can on transverse-roller 736 transverse shifting, then capture positioning device 72 photolithography plate is moved it is appropriate
Position, in order to first straight line move grasping mechanism 8 crawl, second positioning jacking conveying roller device this can adjust light
Mechanical position grabs in order to the second rotary grasping device on shedding mechanism 13.
As shown in Fig. 2, Figure 10, the first straight line moves grasping mechanism 8 and second straight line moves grasping mechanism structure
It is identical, include vacuum chuck device 14, linear movement transmission shaft 71285, lifting gear 80 and longitudinal moving device 809.
As shown in figure 5, the vacuum chuck device 14 includes bonding in vacuum plate 140, vacuum cup adjusting bracket 141 and true
Suction disk 142, bonding in vacuum plate 140 are fixedly connected several vacuum cup adjusting brackets 141, each vacuum cup adjusting bracket 141
Top is provided with guide groove, and multiple sucker adjusting brackets 141 are fixed at by adjusting nut on guide groove, vacuum cup installation
Plate 143 is installed with sucker connecting rod 144, and the bottom end of sucker connecting rod 144 is connected to vacuum cup 142.
As shown in Figure 10, respectively there are sliding rail 82 in the both sides up and down of sliding rail bottom plate 81, and 4 sliding blocks are respectively housed on upper and lower slide rail 82
83, respectively dress is there are one lifting gear on both the above sliding block face following two sliding block, above and below the intermediate position of sliding rail bottom plate 81
Dress is equipped with bearing connecting seat, one end of transmission shaft 85 is connected with motor 84, bearing there are two transmission shaft on two transmission shafts 85
Connecting seat 86 is connected to by axle sleeve on transmission shaft 85, and bearing connecting seat 86 is connected on lifting gear 80, controls lifting gear
80 linear movement has straight slot on 85 corresponding sliding rail bottom plate 81 of transmission shaft, facilitates the movement of bearing connecting seat 86, in addition one
Another lifting gear is connected in rotation axis, motor 87 and the position of motor 84 are staggered relatively, and rotation axis 88 is connected, moved
Situation is as transmission shaft 85.As shown in Figure 11, Figure 12, under the 89 top side plate of pedestal for moving up and down part of lifting gear 80
It is fixed with motor 801,89 inside of pedestal is equipped with rotating threaded shaft 805, and the shaft portion and rotating threaded shaft 805 of motor 801 pass through
One through-hole of top side plate, respectively for dress there are one synchronous pulley, two same on the transmission shaft of motor 801 and on rotating threaded shaft 805
Step belt wheel is connected to by belt, has one piece of guide rail splice 812, guide rail splice 812 to connect by bearing holder (housing, cover) under the side plate of top
It is connected on rotating threaded shaft 805, the down either side of guide rail splice 812 is respectively equipped with guide rail 803, and two are equipped on each guide rail 803
A sliding block 804；The longitudinal movement part 806 of lifting gear 80 is fixed together with two guide rail bottoms, on connecting plate 806
Face packing has motor 807, motor 807 to be connected to the rotary shaft 809 of 806 bottom surface of connecting plate, and the both sides of rotary shaft 809 are respectively led
Rail 810 is equipped with sliding block 811 on each sliding rail 810, axle sleeve 808 is housed in rotary shaft 809, sliding block 811 and axle sleeve 808 are connected to
On bonding in vacuum plate 140.
First cleaning device 2 and the second cleaning device 12 move gripper using conventional cleaning device by first straight line
Photolithography plate crawl is put into the first cleaning device 2 and the second cleaning device 12 cleans clearly by structure 8 and second straight line movement grasping mechanism
It washes, grasping mechanism 8 is moved by first straight line again after the completion of cleaning and second straight line movement grasping mechanism crawls out photolithography plate
Into later process.
As shown in Fig. 2, Figure 14, first dust-sticking mechanism 9 is identical with the second dust-sticking mechanism structure, includes shell
Body, upper mounting plate 91, on hold out against structure 92, upper dedusting drawer 93, middle dedusting idler wheel conveying drawer 94, lower dedusting drawer 95 and under
Jacking mechanism 96, the upper mounting plate 91 are arranged on the top of outer housing, and drawer mouth is provided on outer housing, and described is upper
Dedusting drawer 93, middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 are separately positioned in drawer mouth, upper dedusting drawer 93,
It is connected respectively by sliding rail and sliding slot 97 between middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 and outer housing；It is described
On hold out against that structure 92 is identical as the structure of lower jacking mechanism 96, upper dedusting drawer 93 is identical with the structure of lower dedusting drawer 95,
On hold out against structure 92 and be arranged on the top of upper dedusting drawer 93, lower jacking mechanism 96 is arranged in the lower part of lower dedusting drawer 95.
As shown in figure 15, hold out against that structure 92 respectively includes holding out against cylinder 921 with lower jacking mechanism 96, cylinder is pacified on described
It fills bar 922 and holds out against item 923, two cylinder mounting rods 922 are fixed on outer housing, and two hold out against cylinder 921 respectively admittedly
It is fixed be arranged to hold out against item 923 at the middle part of cylinder mounting rod 922 and hold out against the piston rod of cylinder 921 with two respectively be connected, and
The both ends side for holding out against item 923 is respectively arranged with guide rod, and guide rod, which is threaded through, to be arranged in the axle sleeve of cylinder mounting rod 922,
The both ends other side for holding out against item 923 is respectively arranged with mandril 924.
As shown in figure 16, the upper dedusting drawer 93 and lower dedusting drawer 95 respectively include drawer framework 931, Roller for sticking dust
932 and adjustable bearing base 933, the both ends of the drawer framework 931 are respectively set there are two fixed seat 934, in fixed seat 934
Two guide rods 733 are respectively arranged with, are arranged on the adjustable bearing base 933 there are two axis hole, adjustable bearing base 933 passes through
Two axis hole settings are provided with compressed spring 936, compressed spring on two guide rods 935, and in the bottom of guide rod 935
936 one end offset with fixed seat 934, and the other end offsets with adjustable bearing base 933, the adjustable bearing base 933 and mandril 924
It offsets, the Roller for sticking dust 932 has two, and Roller for sticking dust 932 is arranged in two adjustable bearing bases 933 being arranged oppositely；
As shown in figure 17, middle dedusting idler wheel conveying drawer 94 includes drawer framework 941, driving motor 942 and transferring roller
943, roller shaft 944 is respectively set in the both sides of drawer framework 931 and middle part, multiple idler wheels 945 are provided on roller shaft 944,
Two pairs of transferring rollers 943 are set in the interstitial spaces of roller shaft 944, two pairs of transferring rollers 943 are made of upper and lower two roll bodies, above and below
Be equipped between two roll bodies for photolithography plate by gap, upper and lower two roll bodies respectively with the upper dedusting drawer 93 and under
Lower 95 Roller for sticking dust 932 of dedusting drawer fits contact, and the end of roller shaft 944 and two pairs of transferring rollers 943 is respectively arranged with belt
Wheel, belt pulley are sequentially connected with 942 phase of driving motor.
As shown at 13, the switching mechanism 10 includes clamping cylinder 103, transmission shaft 101, overturning rotary shaft 105 and turns over
It changes one's position plate 106；Be mounted with bilevel transmission shaft 101 in the turning over its side 106 on both sides, every layer of transmission shaft 101 two-by-two it
Between there are equal spacing, above one layer of 101 top of transmission shaft two pieces of clamping cylinder mounting plates 102 are installed, it is each to clamp
Several clamping cylinders 103 are fitted under cylinder mounting plate 106,130 spacing of each clamping cylinder are identical, above one layer of folder
Tight cylinder downward, is located at the intermediate space of two transmission shafts 101；One layer of clamping cylinder that layer located above clamps gas below
The underface of cylinder, direction is upward；The side of turning over its side 711 is equipped with motor 104, and motor is connected to torsion shaft 105, torsion shaft
105 other end is fixed on turning over its side 106；The interior survey of turning over its side 106 is equipped with motor 107, and motor 107 passes through belt band
Move the rotation of each transmission shaft 101.
The present invention work step be：Photolithography plate is positioned over blowing seat 130, blowing seat 130 is transported by feeding cart 138
Defeated, feeding cart 138 is docked with roller-way 131 when feeding, and blowing seat 130 is pushed into roller-way 131 and positions, and is grabbed by the first rotation
It takes device 4 to place photolithography plate to the first positioning jacking conveying roller device 7 to position, conveying photolithography plate arrives after the completion of positioning
First conveying roller device 15, first straight line move the photolithography plate that grasping mechanism 8 captures on the first conveying roller device 15 and place
It is cleaned to the first cleaning device 2, takes out to place to the second conveying by first straight line movement grasping mechanism 8 after the completion of cleaning and roll
Wheel apparatus 11 delivers into the first dust-sticking mechanism 9 and is dusted cleaning, and the first dust-sticking mechanism 9 connects switching mechanism 10, tipper
Structure 10 carries out turn-over, is then sent to third conveying roller device 17, and the photolithography plate on third conveying roller device 17 passes through the
Two linear movement grasping mechanisms 8, which are placed to the second cleaning device 2, to be cleaned, and grasping mechanism 8 is moved by second straight line after the completion of cleaning
It takes out and places to the 4th conveying roller device 23, the second dust-sticking mechanism 19 is delivered by the 4th conveying roller device 23 and is removed
Dirt is cleared up, and is then sent to the second positioning jacking conveying roller device 24 and is positioned, is grabbed by the second rotation after the completion of positioning
It takes device 14 to place to shedding mechanism 13, blanking is carried out by feeding cart 138.
Claims (6)
1. a kind of mechanical Quick cleaning device of semiconductor light, which includes outer cover rack components and is successively set on outer cover machine
Feed mechanism, rotary grasping device, positioning jacking conveying roller device in frame component, conveying roller device, linear movement are grabbed
Take mechanism, cleaning device and the second conveying roller device；Photolithography plate on the feed mechanism is put by rotary grasping device
It sets to positioning and jacks conveying roller device, positioning jacking conveying roller device connects the first conveying roller device, the first conveying rolling
Photolithography plate on wheel apparatus is placed to cleaning device by the grasping mechanism that moves linearly and is put by the taking-up of linear movement grasping mechanism
It sets to the second conveying roller device；It is characterized in that, the linear movement grasping mechanism includes vacuum chuck device, straight line shifting
Dynamic transmission shaft, lifting gear and longitudinal moving device；The vacuum chuck device includes bonding in vacuum plate, vacuum cup adjusting
Frame and vacuum cup, bonding in vacuum plate are fixedly connected several vacuum cup adjusting brackets, are set above each vacuum cup adjusting bracket
It is equipped with guide groove, multiple sucker adjusting brackets are fixed at by adjusting nut on guide groove, and vacuum cup mounting plate fixes peace
Equipped with sucker connecting rod, the bottom end of sucker connecting rod is connected to vacuum cup；Respectively there are sliding rail in the both sides up and down of sliding rail bottom plate, up and down
Sliding block is respectively housed, respectively there are one lifting gear, sliding rail bottom plates for dress on both the above sliding block face following two sliding block on sliding rail
Intermediate position loading and unloading there are two transmission shaft, be equipped with bearing connecting seat on two transmission shafts, one end of transmission shaft is connected with
Motor, bearing connecting seat are connected to by axle sleeve on transmission shaft, and bearing connecting seat is connected on lifting gear, control lifting gear
Linear movement, have straight slot on the corresponding sliding rail bottom plate of transmission shaft, facilitate the movement of bearing connecting seat, in addition in a rotation axis
It is connected to another lifting gear, the position of motor and motor is staggered relatively, connection, situation of movement and the transmission shaft one of rotation axis
Sample；Motor is fixed under the base top side plate for moving up and down part of lifting gear, chassis interior is equipped with rotating threaded shaft, motor
Shaft portion and rotating threaded shaft pass through a through-hole of top side plate, be respectively equipped on the transmission shaft of motor and on rotating threaded shaft
One synchronous pulley, two synchronous pulleys are connected to by belt, there is one piece of guide rail splice, guide rail splice under the side plate of top
It is connected on rotating threaded shaft by bearing holder (housing, cover), the down either side of guide rail splice is respectively equipped with guide rail, and two are equipped on each guide rail
A sliding block；The longitudinal movement part of lifting gear is fixed together with two guide rail bottoms, and connecting plate upper part is equipped with
Motor, motor are connected to the rotary shaft of connecting plate bottom surface, and respectively there are guide rail in the both sides of rotary shaft, sliding block, rotation are housed on each sliding rail
Axle sleeve is housed, sliding block and axle sleeve are connected on bonding in vacuum plate in shaft.
2. the mechanical Quick cleaning device of a kind of semiconductor light according to claim 1, which is characterized in that feed mechanism and unload
Expect that mechanism structure is identical, includes blowing seat, roller-way and feeding cart；Packaged type blowing seat is for placing photoetching to be processed
Plate, blowing seat bottom surface is smooth, and V-type stock chest is arranged in top, the discharging of V-type stock chest is .ed while be less than by expecting；The roller
Road is mounted in the roller-way side plate of both sides, and roller-way side plate is fixedly mounted in rack, and roller-way is mutually linked with feeding cart, blowing
Seat can move on roller-way and feeding cart；The end of the roller-way is provided with material seat locking device, and in the outside of roller-way
It is provided with trolley locking device.
3. the mechanical Quick cleaning device of a kind of semiconductor light according to claim 2, which is characterized in that material seat locking device
Including rotary cylinder and latch, one end inside equipment in roller-way is arranged in rotary cylinder, and one end of latch is mounted on
On rotary cylinder, when not rotating, latch side is horizontal with roller-way, and proximity sensor, roller-way side are also equipped with by rotary cylinder
Plate both sides are also each, and there are one proximity sensors, and rotary cylinder both sides is also equipped with two limited blocks.
4. the mechanical Quick cleaning device of a kind of semiconductor light according to claim 2, which is characterized in that trolley locking device
Including two cylinders, guide rod and latch, there is a gear being fixedly mounted in rack in a side-lower of the roller-way close to outside
Plate surveys installation in baffle there are two cylinder, and there are two guide rod, cylinder and guide rods to be commonly mounted on cylinder peace by cylinder
In loading board, cylinder mounting plate is fixedly mounted by two bars in rack, and there are one trolley idler wheels for two last installations of bar；Baffle
The other side, there are two window, trolley idler wheels to be exposed by window for position corresponding with trolley idler wheels；The latch and gas
The piston rod of cylinder is connected, and crossbearer is provided on latch, the slot for putting crossbeam is provided on crossbearer；It places one end of feeding cart
In the slot of crossbearer, and plate is provided on crossbearer, plate can mutually be locked with the crossbeam on feeding cart when cylinder rises.
5. the mechanical Quick cleaning device of a kind of semiconductor light according to claim 1, which is characterized in that rotary grasping device
Including vacuum chuck device and swinging arm device；
The vacuum chuck device includes bonding in vacuum plate, vacuum cup adjusting bracket and vacuum cup, and bonding in vacuum plate is fixed
Several vacuum cup adjusting brackets are connected to, guide groove is provided with above each vacuum cup adjusting bracket, multiple sucker adjusting brackets are logical
It overregulates nut to be fixed on guide groove, vacuum cup mounting plate is installed with sucker connecting rod, sucker connecting rod
Bottom end is connected to vacuum cup；
The swinging arm device includes that first motor, the second motor, rotating shaft holder, rotary shaft and swing arm, first motor are located at
It in the top of whole device, is fixed in rack, motor is respectively installed by belt and rotation axis connection, rotating shaft terminal
There are one rotating shaft holder, rotating shaft holder is fixed on the rack the middle part of rotary shaft, is installed with swing arm, swing arm top dress
There is the second motor, is connected with a rotating threaded shaft below the second motor, rotating threaded shaft both ends are installed by two lead screw shaft bearings
In swing arm, on the same line with the second motor, the side of swing arm is fixed with track, has sliding block, sliding block to pass through drive on track
Dynamic link block is connect with rotating threaded shaft, and when rotating threaded shaft is rotated forward, inverted, energy band movable slider moves up and down；It is connected on sliding block
Oscillating arm bracket, oscillating arm bracket can be moved with moving up and down for sliding block, and the lower part of oscillating arm bracket connects bonding in vacuum plate.
6. the mechanical Quick cleaning device of a kind of semiconductor light according to claim 1, which is characterized in that positioning jacking conveying
Roller devices include frame body, conveying roller device, crawl positioning device and promote traverse displacement unit；
Frame body is fixed in outer cover rack components, and conveying roller device includes side plate, transmission shaft and longitudinal idler wheel, and two blocks of side plates are solid
It is scheduled on frame body, more transmission shafts are arranged laterally side by side between two blocks of side plates, connect on described every transmission shaft multiple vertical
Way roller, and there are two baffle wheels between longitudinal idler wheel two-by-two so that there are certain gap, every transmission between two longitudinal idler wheels
The end set of axis has belt pulley, belt pulley to be mutually sequentially connected by belt, and belt transmission is connected with motor；
The crawl positioning device includes positioning plate, movable plate and Shifting rack, and positioning plate and movable plate are arranged at transmission shaft
Lower section, positioning plate is fixedly connected with frame body, and two axis are provided between positioning plate and movable plate, the positioning plate with
Axis is fixedly connected, and movable plate is connected with axis by axle sleeve, and is respectively arranged with belt fixture, Mei Gepi in the both sides of movable plate
Carrying jig is each attached on a belt, and the belt, which is erected on belt pulley and is sequentially connected, is provided with motor；Described
Be both provided with Shifting rack on positioning plate and movable plate, Shifting rack includes upright bar, upper boom and poke rod, upright bar setting in positioning plate and
The both ends of movable plate, upright bar upper end are located above longitudinal idler wheel, and upper boom is erected in two upright bars, is vertically provided on upper boom
The lower end of more poke rods, more poke rods is located in the transverse groove of longitudinal idler wheel；
The promotion traverse displacement unit includes air cylinder fixed plate, jacking cylinder, guide rod, connecting plate, idler wheel mounting bar and transverse direction
Idler wheel, the air cylinder fixed plate be fixedly installed frame body on, jacking cylinder is fixed in air cylinder fixed plate, the connecting plate with
The piston rod of jacking cylinder is connected, and guide rod is set on by axis in air cylinder fixed plate, the upper end of guide rod and connecting plate
It is fixedly connected, more idler wheel mounting bars are arranged on connecting plate laterally side by side, and multiple rolling wheel supports are arranged in idler wheel mounting bar, horizontal
Way roller is arranged on rolling wheel support, and when jacking cylinder is stretched out, transverse-roller protrusion is located at the top of longitudinal idler wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810611742.6A CN108735636B (en) | 2018-06-14 | 2018-06-14 | Quick belt cleaning device of semiconductor photolithography board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810611742.6A CN108735636B (en) | 2018-06-14 | 2018-06-14 | Quick belt cleaning device of semiconductor photolithography board |
Publications (2)
| Publication Number | Publication Date |
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| CN108735636A true CN108735636A (en) | 2018-11-02 |
| CN108735636B CN108735636B (en) | 2020-11-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810611742.6A Active CN108735636B (en) | 2018-06-14 | 2018-06-14 | Quick belt cleaning device of semiconductor photolithography board |
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| Country | Link |
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| CN (1) | CN108735636B (en) |
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| CN111010002A (en) * | 2019-11-15 | 2020-04-14 | 浙江赫洛金属制品有限公司 | Motor housing assembly equipment |
| CN113770131A (en) * | 2021-08-16 | 2021-12-10 | 洛阳水星天成石油设备有限公司 | Mechanical cold cleaning system for pipe rod on site at oil field wellhead |
| CN114873263A (en) * | 2022-06-09 | 2022-08-09 | 广州明珞装备股份有限公司 | Curb plate charging equipment, rubber coating and long-pending chain conveying equipment of putting |
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| Publication number | Publication date |
|---|---|
| CN108735636B (en) | 2020-11-27 |
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Inventor after: Han Ke Inventor after: Han Dandan Inventor after: Han Shishuang Inventor after: Wang Jiahai Inventor before: Wang Jiahai |
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Effective date of registration: 20201113 Address after: 518101 baoyunda logistics center Meilan business center 801, Fuhua community, Xixiang street, Bao'an District, Shenzhen City, Guangdong Province Applicant after: Shenzhen kelani Acoustic Technology Co., Ltd Address before: 310052 No. 88 Jiangling Road, Binjiang District, Hangzhou City, Zhejiang Province Applicant before: Wang Jiahai |
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Effective date of registration: 20211224 Address after: 351100 3555, Chigang Hanxin Road, Jiangkou Town, Hanjiang District, Putian City, Fujian Province Patentee after: FUJIAN ANGSTREM MICROELECTRONICS CO.,LTD. Address before: 518101 baoyunda logistics center Meilan business center 801, Fuhua community, Xixiang street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Shenzhen kelani Acoustic Technology Co., Ltd |
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