CN108831846A - A kind of dust-extraction unit of the mechanical cleaning of semiconductor light - Google Patents
A kind of dust-extraction unit of the mechanical cleaning of semiconductor light Download PDFInfo
- Publication number
- CN108831846A CN108831846A CN201810611806.2A CN201810611806A CN108831846A CN 108831846 A CN108831846 A CN 108831846A CN 201810611806 A CN201810611806 A CN 201810611806A CN 108831846 A CN108831846 A CN 108831846A
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- drawer
- dedusting
- roller
- dust
- cylinder
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to a kind of mechanical production field of semiconductor light more particularly to a kind of dust-extraction units of the mechanical cleaning of semiconductor light.The device includes outer housing, upper mounting plate, upper top tight structure, upper dedusting drawer, middle dedusting idler wheel conveying drawer, lower dedusting drawer and lower jacking mechanism, the top of outer housing is arranged in the upper mounting plate, drawer mouth is provided on outer housing, upper dedusting drawer, middle dedusting idler wheel conveying drawer and the lower dedusting drawer is separately positioned in drawer mouth, is connected respectively by sliding rail and sliding slot between upper dedusting drawer, middle dedusting idler wheel conveying drawer and lower dedusting drawer and outer housing；The upper top tight structure is identical as the structure of lower jacking mechanism, and upper dedusting drawer is identical with the structure of lower dedusting drawer, and the top of upper dedusting drawer is arranged in upper top tight structure, and the lower part of lower dedusting drawer is arranged in lower jacking mechanism；The device uses transferring roller and Roller for sticking dust dedusting, high dust collection efficiency, and uses the structure of drawer type, can be conveniently replaceable transferring roller and Roller for sticking dust, can be widely applied among industrial production.
Description
Technical field
The present invention relates to a kind of mechanical production field of semiconductor light more particularly to a kind of dedustings of the mechanical cleaning of semiconductor light
Device.
Background technique
Photoetching is the critical process of manufacturing semiconductor devices and integrated circuit micrographics structure.Its processing quality directly affects
The parameter indexes such as device yield, reliability, device performance and service life.Light shield is that one in photoetching process is important
Link, photolithography plate must be very clean, and the circuit element on all silicon wafers both is from domain.If photolithography plate is unholiness, exist
Particle is polluted, these particles will be copied on the photoresist of silicon chip surface, cause the decline of device performance.However, photoetching
Plate is inevitably stained with the pollutants such as dust, photoresist in use, and the presence of these pollutants directly influences
The effect of photoetching.In order to guarantee photolithography plate cleaning, it is necessary to the effect and cleaning process periodically cleaned, and cleaned to photolithography plate
And reasonable disposition of each cleaning process in equipment has close connection.
Chinese invention patent（Publication number CN105590879A）A kind of full-automatic photoetching board cleaning machine is disclosed, by loading and unloading
Unit, cleaning unit, roll-over unit, reticle transmission unit, positioning unit, medical fluid are single for giving cycling element and temperature control
Member composition.Photolithography plate has clast and dust after cleaning, if can not clean up without dedusting.
Summary of the invention
In order to solve the above technical problems, the object of the present invention is to provide a kind of dedusting of the mechanical cleaning of semiconductor light dresses
It sets, which uses transferring roller and Roller for sticking dust dedusting, high dust collection efficiency, and uses the structure of drawer type, can be conveniently replaceable and turn
Roller and Roller for sticking dust are moved, can be widely applied among industrial production.
In order to achieve the above purpose, present invention employs technical solutions below：
A kind of dust-extraction unit of the mechanical cleaning of semiconductor light, the device include outer housing, upper mounting plate, upper top tight structure, above remove
Outer housing is arranged in dirt drawer, middle dedusting idler wheel conveying drawer, lower dedusting drawer and lower jacking mechanism, the upper mounting plate
Top is provided with drawer mouth, the upper dedusting drawer, middle dedusting idler wheel conveying drawer and lower dedusting drawer point on outer housing
It She Zhi not lead to respectively between upper dedusting drawer, middle dedusting idler wheel conveying drawer and lower dedusting drawer and outer housing in drawer mouth
Sliding rail is crossed to be connected with sliding slot；The upper top tight structure is identical as the structure of lower jacking mechanism, upper dedusting drawer and lower dedusting
The structure of drawer is identical, and the top of upper dedusting drawer is arranged in upper top tight structure, and lower dedusting drawer is arranged in lower jacking mechanism
Lower part；
The upper top tight structure and lower jacking mechanism respectively include holding out against cylinder, cylinder mounting rod and hold out against item, two cylinders
Mounting rod is fixed on outer housing, and two hold out against the middle part that cylinder is respectively fixedly disposed at cylinder mounting rod, holds out against item point
The piston rod for not holding out against cylinder with two is connected, and is respectively arranged with guide rod in the both ends side for holding out against item, and guide rod is worn
It is located in the axle sleeve that cylinder mounting rod is set, the both ends other side for holding out against item is respectively arranged with mandril；
The upper dedusting drawer and lower dedusting drawer respectively include drawer framework, Roller for sticking dust and adjustable bearing base, the pumping
The both ends of drawer framework are respectively set there are two fixing seat, are respectively arranged with two guide rods, the adjustable bearing split bearing in fixing seat
There are two axis holes, adjustable bearing base to be arranged on two guide rods by two axis holes for setting on seat, and in the bottom of guide rod
It is provided with compressed spring, compressed spring one end offsets with fixing seat, and the other end offsets with adjustable bearing base, the adjustable bearing split bearing
Seat offsets with mandril, and the Roller for sticking dust has two, and two adjustable bearing bases being arranged oppositely are arranged in Roller for sticking dust；
Middle dedusting idler wheel conveying drawer includes drawer framework, driving motor and transferring roller, in the two sides and middle part of drawer framework
Not She Zhi roller shaft, be provided with multiple idler wheels on roller shaft, two pairs of transferring rollers, two pairs of transfers be set in the interstitial spaces of roller shaft
Roller is made of upper and lower two roll bodies, and the gap passed through for photolithography plate, upper and lower two roll bodies point are equipped between upper and lower two roll bodies
Does not fit and contact with the upper dedusting drawer and lower dedusting drawer Roller for sticking dust, the end part of roller shaft and two pairs of transferring rollers
It is not provided with belt pulley, belt pulley is mutually sequentially connected with driving motor.
Due to the adoption of the above technical solution, which uses transferring roller and Roller for sticking dust dedusting, efficiency of dust collection to the present invention
Height, and using the structure of drawer type, it can be conveniently replaceable transferring roller and Roller for sticking dust, can be widely applied among industrial production.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the specific embodiment of the invention.
Fig. 2 is the configuration schematic diagram of the specific embodiment of the invention.
Fig. 3 is the configuration schematic diagram of feed mechanism.
Fig. 4 is the structural schematic diagram of swinging arm device.
Fig. 5 is the structural schematic diagram of vacuum chuck device.
Fig. 6 is the structural schematic diagram of the first positioning jacking conveying roller device.
Fig. 7 is the structural schematic diagram for grabbing positioning device.
Fig. 8, Fig. 9 are the structural schematic diagram for promoting traverse displacement unit.
Figure 10 is the configuration schematic diagram of the mobile grabbing device of first straight line.
Figure 11, Figure 12 are the structural schematic diagram of lifting device.
Figure 13 is the configuration schematic diagram of turnover mechanism.
Figure 14 is the configuration schematic diagram of the first dust-sticking mechanism.
Figure 15 is the structural schematic diagram of upper top tight structure.
Figure 16 is the structural schematic diagram of upper dedusting drawer.
Figure 17 is the structural schematic diagram that middle dedusting idler wheel conveys drawer.
Specific embodiment
A specific embodiment of the invention is made a detailed explanation with reference to the accompanying drawing.
The mechanical cleaning production system of a kind of semiconductor light as shown in Figure 1 and Figure 2, the production system include outer cover rack group
Part 1 and the feed mechanism 3 being successively set in outer cover rack components 1, the positioning of the first rotary grasping device 4, first jack defeated
Send the mobile grasping mechanism 8 of roller devices 7, the first conveying roller device 15, first straight line, the conveying rolling of the first cleaning device 2, second
Wheel apparatus 11, the first dust-sticking mechanism 9, turnover mechanism 10, third conveying roller device 17, the second cleaning device 12, second straight line
Mobile grasping mechanism 18, the 4th conveying roller device 23, the second dust-sticking mechanism 19, second positioning jacking conveying roller device 24,
Second rotary grasping device 14 and shedding mechanism 13.Photolithography plate on the feed mechanism 3 passes through the first rotary grasping device 4
It places to the first positioning jacking conveying roller device 7, the first positioning jacking conveying roller device 7 connects the first conveying roller device
15, the photolithography plate on the first conveying roller device 15 is placed to the first cleaning device 2 simultaneously by the mobile grasping mechanism 8 of first straight line
It is taken out and is placed to the second conveying roller device 11 by the mobile grasping mechanism 8 of first straight line, the second conveying roller device 11 connection the
One dust-sticking mechanism 9, the first dust-sticking mechanism 9 connect turnover mechanism 10, and turnover mechanism 10 connects third conveying roller device 17, third
Photolithography plate on conveying roller device 17 is placed by the mobile grasping mechanism 8 of second straight line to the second cleaning device 2 and by second
The grasping mechanism 8 that moves linearly, which takes out, to be placed to the 4th conveying roller device 23, and the 4th conveying roller device 23 connects the second binding dust
Mechanism 19, the second dust-sticking mechanism 19 connection the second positioning jacking conveying roller device 24, the second positioning jacking conveying roller device
Photolithography plate on 24 is placed by the first rotary grasping device 4 to shedding mechanism 13.
As shown in Fig. 2, the outer cover rack components 1 includes outer cover 20, warning lamp 21, internal rack 22.Outer cover 20 will
Equipment plays the role of protection, blocks dust in being wrapped in；The both ends of the equipment are arranged in warning lamp 21, are used for emergency
Alarm；Internal rack 22 is for being fixedly mounted other devices.There are several glass windows on outer cover, can observe from the outside
Internal function situation, it is very convenient.
As shown in Figure 2 and Figure 3, the feed mechanism 3 and shedding mechanism 13 include blowing seat 130, roller-way 131 and on
Trolley 138, feed mechanism 3 is identical with 13 structure of shedding mechanism, but moves contrary.As shown in figure 3, packaged type is put
For material seat 130 for placing photolithography plate to be processed, 130 bottom surface of blowing seat is smooth, and V-type stock chest is arranged in top, V-type stock chest
Discharging is .ed while being lower than by material；The roller-way 131 is mounted in the roller-way side plate of two sides, and roller-way side plate is fixedly mounted on machine
On frame, roller-way 131 is mutually linked with feeding cart 138, and blowing seat 130 can move on roller-way 131 and feeding cart 138；Institute
The end for the roller-way 131 stated is provided with material seat locking device, and the outside of roller-way 131 is provided with trolley locking device 137.
As shown in figure 3, the material seat locking device includes rotary cylinder 134 and latch, the setting of rotary cylinder 134 exists
The one end of roller-way 131 inside equipment, one end of latch is mounted on rotary cylinder 134, when not rotating, latch side
It is horizontal with roller-way, it is also equipped with proximity sensor 132 by rotary cylinder, also respectively there are a proximity sensor in roller-way side plate two sides
132,134 both sides of rotary cylinder is also equipped with two limited blocks.When material blowing seat 130 is placed on feeding cart 138 by worker
When, limited block 1303 limits blowing seat 130 and moves on feeding cart 138, and cylinder 1301 drives feeding cart 138 up
It rises, when rising to feeding cart and roller-way 131 is horizontal, limited block 1303 is opened, and blowing seat 130 enters on roller-way 131, when
When proximity sensor 132 detects blowing seat 130 and has arrived at predetermined position, limited block resists blowing seat 130, rotary cylinder
134 rotations, are fixed blowing seat with cam.
As shown in figure 3, the trolley locking device 137 includes two cylinders 1301, guide rod 137 and latch
1304, there is the baffle of a fixed installation on the rack in a side-lower of the roller-way 131 close to outside, is surveyed there are two installations in baffle
Cylinder 1301, there are two guide rod 137, cylinder 1301 and guide rods 1301 to be commonly mounted on cylinder installation on cylinder 1301 side
On plate 1302, cylinder mounting plate 1302 is fixedly mounted in rack by two bars, and two bars were last to be equipped with a trolley idler wheels
136；The other side of baffle, there are two window, trolley idler wheels to be exposed by window for position corresponding with trolley idler wheels；Described
Latch 1304 is connected with the piston rod of cylinder 1301, and crossbearer 139 is provided on latch 1304, is provided on crossbearer 139
Put the slot of crossbeam；One end of feeding cart 138 is placed in the slot of crossbearer 139, and plate 1303 is provided on crossbearer 139,
Plate 1303 can mutually be locked with the crossbeam on feeding cart 138 when cylinder 1301 rises.When feeding cart 138 and roller-way 131
After docking, feeding cart 138 and roller-way 131 can be locked by trolley locking device 137.
As shown in Fig. 2, the first rotary grasping device 4 is identical with the second rotary grasping apparatus structure, it include vacuum chuck
Device 14 and swinging arm device.
As shown in figure 5, the vacuum chuck device 14 includes bonding in vacuum plate 140, vacuum chuck adjusting bracket 141 and true
Suction disk 142, bonding in vacuum plate 140 are fixedly connected several vacuum chuck adjusting brackets 141, each vacuum chuck adjusting bracket 141
Top is provided with guide groove, and multiple sucker adjusting brackets 141 are fixed on guide groove by adjusting nut, vacuum chuck installation
Plate 143 is fixedly installed with sucker connecting rod 144, and the bottom end of sucker connecting rod 144 is connected to vacuum chuck 142.
As shown in figure 4, the swinging arm device includes first motor 41, the second motor 42, rotating shaft holder 43, rotary shaft
44 and swing arm 48, first motor 41 is located in the top of whole device, is fixed in rack, motor 41 by belt with
Rotary shaft 44 connects, and 44 both ends of rotary shaft are respectively equipped with a rotating shaft holder 43, and rotating shaft holder 43 is fixed on the rack rotation
The middle part of shaft 43, is fixedly installed with swing arm 48, and 48 top of swing arm is equipped with the second motor 42, is connected with one below the second motor 42
Root rotating threaded shaft 402,402 both ends of rotating threaded shaft are mounted in swing arm 48 by two lead screw shaft bearings 45, with the second motor 42
On the same line, the side of swing arm 48 is fixed with track 47, has sliding block 49 on track 47, sliding block 49 is by being drivingly connected block 46
It is connect with rotating threaded shaft 402, when rotating threaded shaft 402 is rotated forward, inverted, energy band movable slider 49 is moved up and down；It is connected on sliding block 49
Have an oscillating arm bracket 401, oscillating arm bracket 401 can moving up and down and move with sliding block 49, the lower part connection of oscillating arm bracket 401 is true
Empty connecting plate 140.
As shown in Fig. 2, Fig. 6, the first positioning jacking conveying roller device 7 and the second positioning jacking conveying roller dress
It is identical to set structure, includes frame body 70, conveying roller device 71, crawl positioning device 72 and promotion traverse displacement unit 73.
As shown in fig. 6, frame body 70 is fixed in outer cover rack components 1, conveying roller device 71 includes side plate 711, transmission
Axis 712 and longitudinal idler wheel 713, two blocks of side plates 711 are fixed on frame body 70, and more transmission shafts 712 are arranged in two pieces laterally side by side
Between side plate 711, multiple longitudinal idler wheels 713 of connecting on the every transmission shaft 712, and have two between longitudinal idler wheel 713 two-by-two
A baffle wheel 714, so that having certain gap between two longitudinal idler wheels 713, the end of every transmission shaft 712 is provided with belt
Wheel, belt pulley are mutually sequentially connected by belt, and belt transmission connection is provided with motor.First conveying roller device 15, second
Structure and 71 phase of conveying roller device of conveying roller device 11, third conveying roller device 17, the 4th conveying roller device 23
Together.
As shown in fig. 7, the crawl positioning device 72 includes positioning plate 721, movable plate 722 and Shifting rack 723, positioning
Plate 721 and movable plate 722 are arranged at the lower section of transmission shaft 712, and positioning plate 721 is fixedly connected with frame body 70, and in positioning plate
Two axis 724 are provided between 721 and movable plate 722, the positioning plate 721 is fixedly connected with axis 724, movable plate 722 with
Axis 724 is connected by axle sleeve, and is respectively arranged with belt fixture 725, each belt fixture 725 in the two sides of movable plate 722
It is each attached on a belt 726, the belt 726, which sets up over pulleys carried and is sequentially connected, is provided with motor 727；It is described
Positioning plate 721 and movable plate 722 on be provided with Shifting rack 723, Shifting rack 723 includes upright bar 728, upper boom 729 and stirs
The both ends of positioning plate 721 and movable plate 722 are arranged in bar 730, upright bar 728, and 728 upper end of upright bar is located at longitudinal 713 top of idler wheel,
Upper boom 729 is erected in two upright bars 728, is vertically provided with more poke rods 730 on upper boom 729, more poke rods 730
Lower end is located in the transverse groove of longitudinal idler wheel 713.
As shown in Figure 8, Figure 9, the promotion traverse displacement unit includes air cylinder fixed plate 731, jacking cylinder 732, guide rod
733, connecting plate 734, idler wheel mounting bar 735 and transverse-roller 736, the air cylinder fixed plate 731 are fixedly installed on frame body 70,
Jacking cylinder 732 is fixed in air cylinder fixed plate 731, and the connecting plate 734 is connected with the piston rod of jacking cylinder 732,
Guide rod 733 is set in air cylinder fixed plate 731 by axis, and the upper end of guide rod 733 is fixedly connected with connecting plate 734, more
Root idler wheel mounting bar 735 is arranged in laterally side by side on connecting plate 734, and multiple rolling wheel supports 737 are arranged in idler wheel mounting bar 735,
Transverse-roller 736 is arranged on rolling wheel support 737, and when jacking cylinder 732 is stretched out, the protrusion of transverse-roller 736 is located at vertical
The top of way roller 713.
Photolithography plate grabs the first positioning by the first rotary grasping device 4 and jacks on conveying roller device 7, is promoted traversing
Device is promoted, photolithography plate can on transverse-roller 736 transverse shifting, then grab positioning device 72 photolithography plate is mobile appropriate
Position, in order to the crawl of the mobile grasping mechanism 8 of first straight line, second positioning jacking this adjustable light of conveying roller device
Mechanical position grabs on shedding mechanism 13 in order to the second rotary grasping device.
As shown in Fig. 2, Figure 10, the mobile grasping mechanism 8 of the first straight line and the mobile grasping mechanism structure of second straight line
It is identical, it include vacuum chuck device 14, linear movement transmission shaft 71285, lifting device 80 and longitudinal moving device 809.
As shown in figure 5, the vacuum chuck device 14 includes bonding in vacuum plate 140, vacuum chuck adjusting bracket 141 and true
Suction disk 142, bonding in vacuum plate 140 are fixedly connected several vacuum chuck adjusting brackets 141, each vacuum chuck adjusting bracket 141
Top is provided with guide groove, and multiple sucker adjusting brackets 141 are fixed on guide groove by adjusting nut, vacuum chuck installation
Plate 143 is fixedly installed with sucker connecting rod 144, and the bottom end of sucker connecting rod 144 is connected to vacuum chuck 142.
As shown in Figure 10, respectively there are sliding rail 82 in the two sides up and down of sliding rail bottom plate 81, and 4 sliding blocks are respectively housed on upper and lower slide rail 82
83, a lifting device is respectively housed, above and below the intermediate position of sliding rail bottom plate 81 on both the above sliding block face following two sliding block
Dress is equipped with bearing attachment base on two transmission shafts 85, one end of transmission shaft 85 is connected with motor 84, bearing there are two transmission shaft
Attachment base 86 is connected on transmission shaft 85 by axle sleeve, and bearing attachment base 86 is connected on lifting device 80, controls lifting device
80 linear movement has through slot on the corresponding sliding rail bottom plate 81 of transmission shaft 85, facilitates the movement of bearing attachment base 86, and in addition one
Another lifting device is connected in rotation axis, motor 87 and the position of motor 84 are staggered relatively, connection, the movement of rotation axis 88
Situation is as transmission shaft 85.As shown in Figure 11, Figure 12, under the 89 top side plate of pedestal for moving up and down part of lifting device 80
It is fixed with motor 801, rotating threaded shaft 805 is housed inside pedestal 89, the shaft portion and rotating threaded shaft 805 of motor 801 pass through
One through-hole of top side plate is respectively equipped with a synchronous pulley on the transmission shaft of motor 801 and on rotating threaded shaft 805, two same
Step belt wheel is connected to by belt, there is one piece of guide rail splice 812 under the side plate of top, and guide rail splice 812 is connected by bearing holder (housing, cover)
It connects on rotating threaded shaft 805, the down either side of guide rail splice 812 is respectively equipped with guide rail 803, is equipped with two on each guide rail 803
A sliding block 804；The longitudinal movement part 806 of lifting device 80 is fixed together with two guide rail bottoms, on connecting plate 806
Face packing has motor 807, and motor 807 is connected to the rotary shaft 809 of 806 bottom surface of connecting plate, and the two sides of rotary shaft 809 are respectively led
Rail 810 is equipped with sliding block 811 on each sliding rail 810, axle sleeve 808 is housed in rotary shaft 809, sliding block 811 and axle sleeve 808 are connected to
On bonding in vacuum plate 140.
First cleaning device 2 and the second cleaning device 12 are using conventional cleaning device, by the mobile gripper of first straight line
Photolithography plate crawl is put into the first cleaning device 2 to structure 8 and second straight line mobile grasping mechanism and the second cleaning device 12 cleans clearly
It washes, is again crawled out photolithography plate by the mobile grasping mechanism 8 of first straight line and the mobile grasping mechanism of second straight line after the completion of cleaning
Into later process.
As shown in Fig. 2, Figure 14, first dust-sticking mechanism 9 is identical with the second dust-sticking mechanism structure, includes shell
Body, upper mounting plate 91, upper top tight structure 92, upper dedusting drawer 93, middle dedusting idler wheel conveying drawer 94, lower dedusting drawer 95 and under
The top of outer housing is arranged in jacking mechanism 96, the upper mounting plate 91, and drawer mouth is provided on outer housing, and described is upper
Dedusting drawer 93, middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 are separately positioned in drawer mouth, upper dedusting drawer 93,
It is connected respectively by sliding rail and sliding slot 97 between middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 and outer housing；It is described
Upper top tight structure 92 it is identical as the structure of lower jacking mechanism 96, upper dedusting drawer 93 is identical with the structure of lower dedusting drawer 95,
The top of upper dedusting drawer 93 is arranged in upper top tight structure 92, and the lower part of lower dedusting drawer 95 is arranged in lower jacking mechanism 96.
As shown in figure 15, the upper top tight structure 92 and lower jacking mechanism 96 respectively include holding out against cylinder 921, cylinder peace
It fills bar 922 and holds out against item 923, two cylinder mounting rods 922 are fixed on outer housing, and two hold out against cylinder 921 respectively admittedly
The middle part of cylinder mounting rod 922 is set calmly, holds out against the piston rod that item 923 holds out against cylinder 921 with two respectively and is connected, and
The both ends side for holding out against item 923 is respectively arranged with guide rod, and guide rod is threaded through in the axle sleeve that cylinder mounting rod 922 is arranged in,
The both ends other side for holding out against item 923 is respectively arranged with mandril 924.
As shown in figure 16, the upper dedusting drawer 93 and lower dedusting drawer 95 respectively include drawer framework 931, Roller for sticking dust
932 and adjustable bearing base 933, the both ends of the drawer framework 931 are respectively set there are two fixing seat 934, in fixing seat 934
Two guide rods 733 are respectively arranged with, there are two axis holes, adjustable bearing base 933 to pass through for setting on the adjustable bearing base 933
Two axis hole settings are provided with compressed spring 936, compressed spring on two guide rods 935, and in the bottom of guide rod 935
936 one end offset with fixing seat 934, and the other end offsets with adjustable bearing base 933, the adjustable bearing base 933 and mandril 924
It offsets, the Roller for sticking dust 932 has two, and two adjustable bearing bases 933 being arranged oppositely are arranged in Roller for sticking dust 932；
As shown in figure 17, middle dedusting idler wheel conveying drawer 94 includes drawer framework 941, driving motor 942 and transferring roller
943, roller shaft 944 is respectively set in the two sides of drawer framework 931 and middle part, multiple idler wheels 945 are provided on roller shaft 944,
Two pairs of transferring rollers 943 are set in the interstitial spaces of roller shaft 944, two pairs of transferring rollers 943 are made of upper and lower two roll bodies, above and below
Be equipped with the gap that passes through for photolithography plate between two roll bodies, upper and lower two roll bodies respectively with the upper dedusting drawer 93 and under
Lower 95 Roller for sticking dust 932 of dedusting drawer fits contact, and the end of roller shaft 944 and two pairs of transferring rollers 943 is respectively arranged with belt
Wheel, belt pulley are sequentially connected with 942 phase of driving motor.
As shown at 13, the turnover mechanism 10 includes clamping cylinder 103, transmission shaft 101, overturning rotary shaft 105 and turns over
It changes one's position plate 106；Be mounted with bilevel transmission shaft 101 in the turning over its side 106 on both sides, every layer of transmission shaft 101 two-by-two it
Between there are equal spacing, above two pieces of clamping cylinder mounting plates 102, each clamping are installed above one layer of transmission shaft 101
Several clamping cylinders 103 are fitted under cylinder mounting plate 106,130 spacing of each clamping cylinder are identical, above one layer of folder
Tight cylinder downward, positioned at the intermediate space of two transmission shafts 101；One layer of clamping cylinder that layer located above clamps gas below
The underface of cylinder, direction is upward；The side of turning over its side 711 is equipped with motor 104, and motor is connected to torsion shaft 105, torsion shaft
105 other end is fixed on turning over its side 106；The interior survey of turning over its side 106 is equipped with motor 107, and motor 107 passes through belt band
Move the rotation of each transmission shaft 101.
Work step of the invention is：Photolithography plate is placed in blowing seat 130, blowing seat 130 is transported by feeding cart 138
Defeated, feeding cart 138 is docked with roller-way 131 when feeding, and blowing seat 130 is pushed into roller-way 131 and positions, and is grabbed by the first rotation
It takes device 4 to place photolithography plate to the first positioning jacking conveying roller device 7 to position, conveying photolithography plate arrives after the completion of positioning
First conveying roller device 15, the mobile grasping mechanism 8 of first straight line grab the photolithography plate on the first conveying roller device 15 and place
It is cleaned to the first cleaning device 2, takes out to place to the second conveying by the mobile grasping mechanism 8 of first straight line after the completion of cleaning and roll
Wheel apparatus 11 delivers into the first dust-sticking mechanism 9 and is dusted cleaning, and the first dust-sticking mechanism 9 connects turnover mechanism 10, tipper
Structure 10 carries out turn-over, is then sent to third conveying roller device 17, and the photolithography plate on third conveying roller device 17 passes through the
Two linear movement grasping mechanisms 8, which are placed to the second cleaning device 2, to be cleaned, by the mobile grasping mechanism 8 of second straight line after the completion of cleaning
It takes out and places to the 4th conveying roller device 23, the second dust-sticking mechanism 19 is delivered by the 4th conveying roller device 23 and is removed
Dirt cleaning is then sent to the second positioning jacking conveying roller device 24 and is positioned, grabbed after the completion of positioning by the second rotation
It takes device 14 to place to shedding mechanism 13, blanking is carried out by feeding cart 138.
Claims (1)
1. a kind of dust-extraction unit of the mechanical cleaning of semiconductor light, which is characterized in that the device include outer housing, upper mounting plate, on
Top tight structure, upper dedusting drawer, middle dedusting idler wheel conveying drawer, lower dedusting drawer and lower jacking mechanism, the upper mounting plate
The top of outer housing is set, drawer mouth is provided on outer housing, the upper dedusting drawer, middle dedusting idler wheel convey drawer
It is separately positioned in drawer mouth with lower dedusting drawer, upper dedusting drawer, middle dedusting idler wheel conveying drawer and lower dedusting drawer and outer
It is connected respectively by sliding rail with sliding slot between shell；The upper top tight structure is identical as the structure of lower jacking mechanism, above removes
Dirt drawer is identical with the structure of lower dedusting drawer, and the top of upper dedusting drawer, lower jacking mechanism setting is arranged in upper top tight structure
In the lower part of lower dedusting drawer；
The upper top tight structure and lower jacking mechanism respectively include holding out against cylinder, cylinder mounting rod and hold out against item, two cylinders
Mounting rod is fixed on outer housing, and two hold out against the middle part that cylinder is respectively fixedly disposed at cylinder mounting rod, holds out against item point
The piston rod for not holding out against cylinder with two is connected, and is respectively arranged with guide rod in the both ends side for holding out against item, and guide rod is worn
It is located in the axle sleeve that cylinder mounting rod is set, the both ends other side for holding out against item is respectively arranged with mandril；
The upper dedusting drawer and lower dedusting drawer respectively include drawer framework, Roller for sticking dust and adjustable bearing base, the pumping
The both ends of drawer framework are respectively set there are two fixing seat, are respectively arranged with two guide rods, the adjustable bearing split bearing in fixing seat
There are two axis holes, adjustable bearing base to be arranged on two guide rods by two axis holes for setting on seat, and in the bottom of guide rod
It is provided with compressed spring, compressed spring one end offsets with fixing seat, and the other end offsets with adjustable bearing base, the adjustable bearing split bearing
Seat offsets with mandril, and the Roller for sticking dust has two, and two adjustable bearing bases being arranged oppositely are arranged in Roller for sticking dust；
Middle dedusting idler wheel conveying drawer includes drawer framework, driving motor and transferring roller, in the two sides and middle part of drawer framework
Not She Zhi roller shaft, be provided with multiple idler wheels on roller shaft, two pairs of transferring rollers, two pairs of transfers be set in the interstitial spaces of roller shaft
Roller is made of upper and lower two roll bodies, and the gap passed through for photolithography plate, upper and lower two roll bodies point are equipped between upper and lower two roll bodies
Does not fit and contact with the upper dedusting drawer and lower dedusting drawer Roller for sticking dust, the end part of roller shaft and two pairs of transferring rollers
It is not provided with belt pulley, belt pulley is mutually sequentially connected with driving motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810611806.2A CN108831846A (en) | 2018-06-14 | 2018-06-14 | A kind of dust-extraction unit of the mechanical cleaning of semiconductor light |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810611806.2A CN108831846A (en) | 2018-06-14 | 2018-06-14 | A kind of dust-extraction unit of the mechanical cleaning of semiconductor light |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108831846A true CN108831846A (en) | 2018-11-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810611806.2A Withdrawn CN108831846A (en) | 2018-06-14 | 2018-06-14 | A kind of dust-extraction unit of the mechanical cleaning of semiconductor light |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108831846A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI813073B (en) * | 2021-11-18 | 2023-08-21 | 家碩科技股份有限公司 | Drawer Replacement Cleaning Equipment |
-
2018
- 2018-06-14 CN CN201810611806.2A patent/CN108831846A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI813073B (en) * | 2021-11-18 | 2023-08-21 | 家碩科技股份有限公司 | Drawer Replacement Cleaning Equipment |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20181116 |
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| WW01 | Invention patent application withdrawn after publication |