CN108723052A

CN108723052A - A kind of mechanical cleaning device of semiconductor light of rotary grasping conveying

Info

Publication number: CN108723052A
Application number: CN201810611756.8A
Authority: CN
Inventors: 王加骇
Original assignee: Individual
Current assignee: Individual
Priority date: 2018-06-14
Filing date: 2018-06-14
Publication date: 2018-11-02

Abstract

The invention relates to the field of semiconductor photoresist production, in particular to a semiconductor photoresist cleaning production system. A semiconductor photoresist plate cleaning device that rotates, grabs and transports, the device includes a housing frame assembly, a feeding mechanism sequentially arranged in the housing frame assembly, a first rotating grabbing device, a first positioning jacking and conveying roller device, The first conveying roller device, the first linear movement grabbing mechanism, the first cleaning device and the second conveying roller device; the first rotating grabbing device includes a vacuum sucker device and a swing arm device; the vacuum sucker device includes a vacuum connection plate, vacuum suction cup adjustment frame and vacuum suction cup; the swing arm device includes a first motor, a second motor, a rotating bearing seat, a rotating shaft and a swing arm. Grasping the photoresist plate quickly improves the degree of automation and the ability of batch processing, and can be widely used in industrial production.

Description

A kind of mechanical cleaning device of semiconductor light of rotary grasping conveying

Technical field

The present invention relates to a kind of mechanical production field of semiconductor light more particularly to a kind of semiconductor light mechanical cleaning production systems System.

Background technology

Photoetching is to manufacture the critical process of semiconductor devices and integrated circuit micrographics structure.Its processing quality directly affects The parameter indexes such as device yield, reliability, device performance and service life.Light shield is that one in photoetching process is important Link, photolithography plate must be very clean, and the circuit element on all silicon chips both is from domain.If photolithography plate is unholiness, exist Particle is polluted, these particles will be copied on the photoresist of silicon chip surface, cause the decline of device performance.However, photoetching Plate is inevitably stained with the pollutants such as dust, photoresist in use, and the presence of these pollutants directly influences The effect of photoetching.In order to ensure photolithography plate cleaning, it is necessary to the effect and cleaning periodically cleaned, and cleaned to photolithography plate And reasonable disposition of each cleaning in equipment has close contact.

Chinese invention patent（Publication number CN105590879A）A kind of full-automatic photoetching board cleaning machine is disclosed, by loading and unloading Unit, cleaning unit, roll-over unit, photolithography plate transmission unit, positioning unit, liquid are single for giving cycling element and temperature control Member composition.But the patent does not disclose the conveying device of photolithography plate.

Invention content

The object of the present invention is to provide a kind of mechanical cleaning device of semiconductor light of rotary grasping conveying, which uses Rotary grasping conveys, and photolithography plate can be quickly captured from feed mechanism, improves high degree of automation, batch processing ability By force, it can be widely applied among industrial production.

In order to achieve the above purpose, present invention employs technical solutions below：

A kind of mechanical cleaning device of semiconductor light of rotary grasping conveying, the device include outer cover rack components and set gradually Feed mechanism, the first rotary grasping device, the first positioning jacking conveying roller device in outer cover rack components, the first conveying Roller devices, first straight line movement grasping mechanism, the first cleaning device and the second conveying roller device；On the feed mechanism Photolithography plate by the first rotary grasping device place to first positioning jacking conveying roller device, first positioning jacking conveying rolling Wheel apparatus connects the first conveying roller device, and the photolithography plate on the first conveying roller device moves grasping mechanism by first straight line It places to the first cleaning device and is taken out by first straight line movement grasping mechanism and placed to the second conveying roller device；First rotation Grabbing device includes vacuum chuck device and swinging arm device；The vacuum chuck device includes bonding in vacuum plate, vacuum cup Adjusting bracket and vacuum cup, bonding in vacuum plate are fixedly connected several vacuum cup adjusting brackets, on each vacuum cup adjusting bracket Side is provided with guide groove, and multiple sucker adjusting brackets are fixed at by adjusting nut on guide groove, and vacuum cup mounting plate is solid Dingan County is equipped with sucker connecting rod, and the bottom end of sucker connecting rod is connected to vacuum cup；The swinging arm device include first motor, Second motor, rotating shaft holder, rotary shaft and swing arm, first motor are located in the top of whole device, are fixed on machine On frame, first motor is by belt and rotation axis connection, and respectively there are one rotating shaft holder, rotating shaft holders for installation for rotating shaft terminal It is fixed on the rack the middle part of rotary shaft, is installed with swing arm, swing arm top is equipped with the second motor, is connected below the second motor There are a rotating threaded shaft, rotating threaded shaft both ends to be mounted in swing arm by two lead screw shaft bearings, with the second motor with always On line, the side of swing arm is fixed with track, has sliding block, sliding block to be connect with rotating threaded shaft by being drivingly connected block on track, works as rotation When turning leading screw rotating forward, reversion, energy band movable slider moves up and down；Oscillating arm bracket is connected on sliding block, oscillating arm bracket can be with sliding block Move up and down and move, the lower part of oscillating arm bracket connects bonding in vacuum plate.

As a further improvement, the feed mechanism includes blowing seat, roller-way and feeding cart；Packaged type blowing seat For placing photolithography plate to be processed, blowing seat bottom surface is smooth, and V-type stock chest is arranged in top, and the discharging of V-type stock chest is low on one side In by material one side；The roller-way be mounted on both sides roller-way side plate in, roller-way side plate is fixedly mounted in rack, roller-way with it is upper Trolley is mutually linked, and blowing seat can move on roller-way and feeding cart；The end of the roller-way is provided with material seat locking Device, and trolley locking device is provided on the outside of roller-way.

As a further improvement, the material seat locking device includes rotary cylinder and latch, rotary cylinder setting exists One end of the one end of roller-way inside equipment, latch is mounted on rotary cylinder, when not rotating, latch side and roller-way Level is also equipped with proximity sensor by rotary cylinder, and roller-way side plate both sides are also each, and there are one proximity sensor, rotary cylinders two Side is also equipped with two limited blocks.

As a further improvement, the trolley locking device includes two cylinders, guide rod and latch, leaned in roller-way A side-lower outside close has a baffle being fixedly mounted in rack, installation is surveyed in baffle there are two cylinder, cylinder side also has Two guide rods, cylinder and guide rod are commonly mounted on cylinder mounting plate, and machine is fixedly mounted by two bars in cylinder mounting plate On frame, there are one trolley idler wheels for two last installations of bar；The other side of baffle, there are two windows for position corresponding with trolley idler wheels Mouthful, trolley idler wheels are exposed by window；The latch is connected with the piston rod of cylinder, and cross is provided on latch Frame is provided with the slot for putting crossbeam on crossbearer；One end of feeding cart is placed in the slot of crossbearer, and is provided on crossbearer slotting Plate, plate can mutually be locked with the crossbeam on feeding cart when cylinder rises.

As a further improvement, the first positioning jacking conveying roller device includes frame body, conveying roller device, grabs It takes positioning device and promotes traverse displacement unit；

Frame body is fixed in outer cover rack components, and conveying roller device includes side plate, transmission shaft and longitudinal idler wheel, and two blocks of side plates are solid It is scheduled on frame body, more transmission shafts are arranged laterally side by side between two blocks of side plates, connect on described every transmission shaft multiple vertical Way roller, and there are two baffle wheels between longitudinal idler wheel two-by-two so that there are certain gap, every transmission between two longitudinal idler wheels The end set of axis has belt pulley, belt pulley to be mutually sequentially connected by belt, and belt transmission is connected with motor；

The crawl positioning device includes positioning plate, movable plate and Shifting rack, and positioning plate and movable plate are arranged at transmission shaft Lower section, positioning plate is fixedly connected with frame body, and two axis are provided between positioning plate and movable plate, the positioning plate with Axis is fixedly connected, and movable plate is connected with axis by axle sleeve, and is respectively arranged with belt fixture, Mei Gepi in the both sides of movable plate Carrying jig is each attached on a belt, and the belt, which is erected on belt pulley and is sequentially connected, is provided with motor；Described Be both provided with Shifting rack on positioning plate and movable plate, Shifting rack includes upright bar, upper boom and poke rod, upright bar setting in positioning plate and The both ends of movable plate, upright bar upper end are located above longitudinal idler wheel, and upper boom is erected in two upright bars, is vertically provided on upper boom The lower end of more poke rods, more poke rods is located in the transverse groove of longitudinal idler wheel；

The promotion traverse displacement unit includes air cylinder fixed plate, jacking cylinder, guide rod, connecting plate, idler wheel mounting bar and transverse direction Idler wheel, the air cylinder fixed plate be fixedly installed frame body on, jacking cylinder is fixed in air cylinder fixed plate, the connecting plate with The piston rod of jacking cylinder is connected, and guide rod is set on by axis in air cylinder fixed plate, the upper end of guide rod and connecting plate It is fixedly connected, more idler wheel mounting bars are arranged on connecting plate laterally side by side, and multiple rolling wheel supports are arranged in idler wheel mounting bar, horizontal Way roller is arranged on rolling wheel support, and when jacking cylinder is stretched out, transverse-roller protrusion is located at the top of longitudinal idler wheel.

As a further improvement, the first straight line movement grasping mechanism includes vacuum chuck device, linear movement biography Moving axis, lifting gear and longitudinal moving device；

The vacuum chuck device includes bonding in vacuum plate, vacuum cup adjusting bracket and vacuum cup, and bonding in vacuum plate is fixed Several vacuum cup adjusting brackets are connected to, guide groove is provided with above each vacuum cup adjusting bracket, multiple sucker adjusting brackets are logical It overregulates nut to be fixed on guide groove, vacuum cup mounting plate is installed with sucker connecting rod, sucker connecting rod Bottom end is connected to vacuum cup；

Respectively there are a sliding rail in the both sides up and down of sliding rail bottom plate, and a sliding block is respectively housed on upper and lower slide rail, two below both the above sliding block face Respectively dress is there are one lifting gear on a sliding block, there are two the intermediate position loading and unloadings of sliding rail bottom plate transmission shaft, on two transmission shafts It is equipped with bearing connecting seat, one end of transmission shaft is connected with motor, and bearing connecting seat is connected to by axle sleeve on transmission shaft, bearing Connecting seat is connected on lifting gear, controls the linear movement of lifting gear, has straight slot on the corresponding sliding rail bottom plate of transmission shaft, side Just in addition the movement of bearing connecting seat is connected to another lifting gear in a rotation axis, motor is opposite with the position of motor It places, the connection of rotation axis, situation of movement are as transmission shaft；Under the base top side plate for moving up and down part of lifting gear It is fixed with motor, chassis interior is equipped with rotating threaded shaft, and the shaft portion and rotating threaded shaft of motor pass through one of top side plate Through-hole, respectively there are one synchronous pulleys, two synchronous pulleys to be connected to by belt for dress on the transmission shaft of motor and on rotating threaded shaft, There are one piece of guide rail splice, guide rail splice to be connected on rotating threaded shaft by bearing holder (housing, cover) under the side plate of top, guide rail splice Down either side is respectively equipped with guide rail, and two sliding blocks are equipped on each guide rail；The longitudinal movement part of lifting gear and two guide rails Bottom is fixed together, and connecting plate upper part is equipped with motor, and motor is connected to the rotary shaft of connecting plate bottom surface, rotary shaft Both sides respectively have a guide rail, sliding block is housed on each sliding rail, axle sleeve is housed in rotary shaft, sliding block and axle sleeve are connected to bonding in vacuum plate On.

Due to the adoption of the above technical solution, which uses rotary grasping conveying to the present invention, can be from feeder Quickly capture photolithography plate in structure, improve high degree of automation, batch processing ability is strong, can be widely applied to industrial production it In.

Description of the drawings

Fig. 1 is the structural schematic diagram of the specific embodiment of the invention.

Fig. 2 is the configuration schematic diagram of the specific embodiment of the invention.

Fig. 3 is the configuration schematic diagram of feed mechanism.

Fig. 4 is the structural schematic diagram of swinging arm device.

Fig. 5 is the structural schematic diagram of vacuum chuck device.

Fig. 6 is the structural schematic diagram that the first positioning jacks conveying roller device.

Fig. 7 is the structural schematic diagram for capturing positioning device.

Fig. 8, Fig. 9 are the structural schematic diagram for promoting traverse displacement unit.

Figure 10 is the configuration schematic diagram that first straight line moves grabbing device.

Figure 11, Figure 12 are the structural schematic diagram of lifting gear.

Figure 13 is the configuration schematic diagram of switching mechanism.

Figure 14 is the configuration schematic diagram of the first dust-sticking mechanism.

Figure 15 is the structural schematic diagram for above holding out against structure.

Figure 16 is the structural schematic diagram of upper dedusting drawer.

Figure 17 is the structural schematic diagram that middle dedusting idler wheel conveys drawer.

Specific implementation mode

The specific implementation mode of the present invention is made a detailed explanation below in conjunction with the accompanying drawings.

A kind of mechanical cleaning production system of semiconductor light as shown in Figure 1 and Figure 2, the production system include outer cover rack group Part 1 and the feed mechanism 3 being successively set in outer cover rack components 1, the positioning of the first rotary grasping device 4, first jack defeated Send roller devices 7, the first conveying roller device 15, first straight line movement grasping mechanism 8, the conveying rolling of the first cleaning device 2, second Wheel apparatus 11, the first dust-sticking mechanism 9, switching mechanism 10, third conveying roller device 17, the second cleaning device 12, second straight line Mobile grasping mechanism 18, the 4th conveying roller device 23, the second dust-sticking mechanism 19, second positioning jacking conveying roller device 24, Second rotary grasping device 14 and shedding mechanism 13.Photolithography plate on the feed mechanism 3 passes through the first rotary grasping device 4 It places to the first positioning jacking conveying roller device 7, the first positioning jacking conveying roller device 7 connects the first conveying roller device 15, the photolithography plate on the first conveying roller device 15 moves grasping mechanism 8 by first straight line and places to the first cleaning device 2 simultaneously It is taken out and is placed to the second conveying roller device 11 by first straight line movement grasping mechanism 8, the second conveying roller device 11 connection the One dust-sticking mechanism 9, the first dust-sticking mechanism 9 connect switching mechanism 10, and switching mechanism 10 connects third conveying roller device 17, third Photolithography plate on conveying roller device 17 moves grasping mechanism 8 by second straight line and places to the second cleaning device 2 and by second The grasping mechanism 8 that moves linearly, which takes out, to be placed to the 4th conveying roller device 23, and the 4th conveying roller device 23 connects the second binding dust Mechanism 19, the second dust-sticking mechanism 19 connection the second positioning jacking conveying roller device 24, the second positioning jacking conveying roller device Photolithography plate on 24 is placed by the first rotary grasping device 4 to shedding mechanism 13.

As shown in Fig. 2, the outer cover rack components 1 includes outer cover 20, warning lamp 21, internal rack 22.Outer cover 20 will Equipment plays the role of protection, blocks dust in being wrapped in；Warning lamp 21 is arranged at the both ends of the equipment, is used for emergency Alarm；Internal rack 22 is for being fixedly mounted other devices.There are several glass windows on outer cover, can observe from the outside Internal function situation, it is very convenient.

As shown in Figure 2 and Figure 3, the feed mechanism 3 and shedding mechanism 13 include blowing seat 130, roller-way 131 and on Trolley 138, feed mechanism 3 is identical with 13 structure of shedding mechanism, but the direction moved is opposite.As shown in figure 3, packaged type is put For material seat 130 for placing photolithography plate to be processed, 130 bottom surface of blowing seat is smooth, and V-type stock chest is arranged in top, V-type stock chest Discharging is .ed while being less than by material；The roller-way 131 is mounted in the roller-way side plate of both sides, and roller-way side plate is fixedly mounted on machine On frame, roller-way 131 is mutually linked with feeding cart 138, and blowing seat 130 can move on roller-way 131 and feeding cart 138；Institute The end for the roller-way 131 stated is provided with material seat locking device, and the outside of roller-way 131 is provided with trolley locking device 137.

As shown in figure 3, the material seat locking device includes rotary cylinder 134 and latch, the setting of rotary cylinder 134 exists One end of the one end of roller-way 131 inside equipment, latch is mounted on rotary cylinder 134, when not rotating, latch side It is horizontal with roller-way, proximity sensor 132 is also equipped with by rotary cylinder, roller-way side plate both sides are also each, and there are one proximity sensors 132,134 both sides of rotary cylinder is also equipped with two limited blocks.When material blowing seat 130 is placed on feeding cart 138 by worker When, limited block 1303 limits blowing seat 130 and is moved on feeding cart 138, and cylinder 1301 drives feeding cart 138 up It rises, when rising to feeding cart with 131 level of roller-way, limited block 1303 is opened, and blowing seat 130 enters on roller-way 131, when When proximity sensor 132 detects blowing seat 130 and has arrived at precalculated position, limited block resists blowing seat 130, rotary cylinder 134 rotations, are fixed blowing seat with cam.

As shown in figure 3, the trolley locking device 137 includes two cylinders 1301, guide rod 137 and latch 1304, there is a baffle being fixedly mounted in rack in a side-lower of the roller-way 131 close to outside, is surveyed there are two installations in baffle Cylinder 1301, there are two guide rod 137, cylinder 1301 and guide rods 1301 to be commonly mounted on cylinder installation on cylinder 1301 side On plate 1302, cylinder mounting plate 1302 is fixedly mounted by two bars in rack, and there are one trolley idler wheels for two last installations of bar 136；The other side of baffle, there are two window, trolley idler wheels to be exposed by window for position corresponding with trolley idler wheels；Described Latch 1304 is connected with the piston rod of cylinder 1301, and crossbearer 139 is provided on latch 1304, is provided on crossbearer 139 Put the slot of crossbeam；One end of feeding cart 138 is placed in the slot of crossbearer 139, and plate 1303 is provided on crossbearer 139, Plate 1303 can mutually be locked with the crossbeam on feeding cart 138 when cylinder 1301 rises.When feeding cart 138 and roller-way 131 After docking, feeding cart 138 and roller-way 131 can be locked by trolley locking device 137.

As shown in Fig. 2, the first rotary grasping device 4 is identical with the second rotary grasping apparatus structure, include vacuum cup Device 14 and swinging arm device.

As shown in figure 5, the vacuum chuck device 14 includes bonding in vacuum plate 140, vacuum cup adjusting bracket 141 and true Suction disk 142, bonding in vacuum plate 140 are fixedly connected several vacuum cup adjusting brackets 141, each vacuum cup adjusting bracket 141 Top is provided with guide groove, and multiple sucker adjusting brackets 141 are fixed at by adjusting nut on guide groove, vacuum cup installation Plate 143 is installed with sucker connecting rod 144, and the bottom end of sucker connecting rod 144 is connected to vacuum cup 142.

As shown in figure 4, the swinging arm device includes first motor 41, the second motor 42, rotating shaft holder 43, rotary shaft 44 and swing arm 48, first motor 41 is located in the top of whole device, is fixed in rack, motor 41 by belt with Rotary shaft 44 connects, and respectively there are one rotating shaft holders 43, rotating shaft holder 43 to be fixed on the rack rotation for installation at rotary shaft 44 both ends The middle part of shaft 43 is installed with swing arm 48, and 48 top of swing arm is equipped with the second motor 42, and 42 lower section of the second motor is connected with one Root rotating threaded shaft 402,402 both ends of rotating threaded shaft are mounted on by two lead screw shaft bearings 45 in swing arm 48, with the second motor 42 On the same line, the side of swing arm 48 is fixed with track 47, has sliding block 49 on track 47, sliding block 49 is by being drivingly connected block 46 It is connect with rotating threaded shaft 402, when rotating threaded shaft 402 is rotated forward, inverted, energy band movable slider 49 moves up and down；It is connected on sliding block 49 Have an oscillating arm bracket 401, oscillating arm bracket 401 can moving up and down and move with sliding block 49, the lower part connection of oscillating arm bracket 401 is true Empty connecting plate 140.

As shown in Fig. 2, Fig. 6, the described first positioning jacking positioning jacking conveying roller dress of conveying roller device 7 and second It is identical to set structure, includes frame body 70, conveying roller device 71, crawl positioning device 72 and promotion traverse displacement unit 73.

As shown in fig. 6, frame body 70 is fixed in outer cover rack components 1, conveying roller device 71 includes side plate 711, transmission Axis 712 and longitudinal idler wheel 713, two blocks of side plates 711 are fixed on frame body 70, and more transmission shafts 712 are arranged laterally side by side at two pieces Between side plate 711, multiple longitudinal idler wheels 713 of connecting on described every transmission shaft 712, and have two between longitudinal idler wheel 713 two-by-two A baffle wheel 714 so that there is certain gap, the end set of every transmission shaft 712 to have belt between two longitudinal idler wheels 713 Wheel, belt pulley are mutually sequentially connected by belt, and belt transmission is connected with motor.First conveying roller device 15, second Structure and 71 phase of conveying roller device of conveying roller device 11, third conveying roller device 17, the 4th conveying roller device 23 Together.

As shown in fig. 7, the crawl positioning device 72 includes positioning plate 721, movable plate 722 and Shifting rack 723, positioning Plate 721 and movable plate 722 are arranged at the lower section of transmission shaft 712, and positioning plate 721 is fixedly connected with frame body 70, and in positioning plate Two axis 724 are provided between 721 and movable plate 722, the positioning plate 721 is fixedly connected with axis 724, movable plate 722 with Axis 724 is connected by axle sleeve, and is respectively arranged with belt fixture 725, each belt fixture 725 in the both sides of movable plate 722 It is each attached on a belt 726, the belt 726, which sets up over pulleys carried and is sequentially connected, is provided with motor 727；It is described Positioning plate 721 and movable plate 722 on be both provided with Shifting rack 723, Shifting rack 723 includes upright bar 728, upper boom 729 and stirs Bar 730, upright bar 728 are arranged at the both ends of positioning plate 721 and movable plate 722, and 728 upper end of upright bar is located at 713 top of longitudinal idler wheel, Upper boom 729 is erected in two upright bars 728, is vertically provided with more poke rods 730 on upper boom 729, more poke rods 730 Lower end is located in the transverse groove of longitudinal idler wheel 713.

As shown in Figure 8, Figure 9, the promotion traverse displacement unit includes air cylinder fixed plate 731, jacking cylinder 732, guide rod 733, connecting plate 734, idler wheel mounting bar 735 and transverse-roller 736, the air cylinder fixed plate 731 are fixedly installed on frame body 70, Jacking cylinder 732 is fixed in air cylinder fixed plate 731, and the connecting plate 734 is connected with the piston rod of jacking cylinder 732, Guide rod 733 is set on by axis in air cylinder fixed plate 731, and the upper end of guide rod 733 is fixedly connected with connecting plate 734, more Root idler wheel mounting bar 735 is arranged laterally side by side on connecting plate 734, and multiple rolling wheel supports 737 are arranged in idler wheel mounting bar 735, Transverse-roller 736 is arranged on rolling wheel support 737, and when jacking cylinder 732 is stretched out, the protrusion of transverse-roller 736 is located at vertical The top of way roller 713.

Photolithography plate grabs the first positioning by the first rotary grasping device 4 and jacks on conveying roller device 7, is promoted traversing Device is promoted, photolithography plate can on transverse-roller 736 transverse shifting, then capture positioning device 72 photolithography plate is moved it is appropriate Position, in order to first straight line move grasping mechanism 8 crawl, second positioning jacking conveying roller device this can adjust light Mechanical position grabs in order to the second rotary grasping device on shedding mechanism 13.

As shown in Fig. 2, Figure 10, the first straight line moves grasping mechanism 8 and second straight line moves grasping mechanism structure It is identical, include vacuum chuck device 14, linear movement transmission shaft 71285, lifting gear 80 and longitudinal moving device 809.

As shown in Figure 10, respectively there are sliding rail 82 in the both sides up and down of sliding rail bottom plate 81, and 4 sliding blocks are respectively housed on upper and lower slide rail 82 83, respectively dress is there are one lifting gear on both the above sliding block face following two sliding block, above and below the intermediate position of sliding rail bottom plate 81 Dress is equipped with bearing connecting seat, one end of transmission shaft 85 is connected with motor 84, bearing there are two transmission shaft on two transmission shafts 85 Connecting seat 86 is connected to by axle sleeve on transmission shaft 85, and bearing connecting seat 86 is connected on lifting gear 80, controls lifting gear 80 linear movement has straight slot on 85 corresponding sliding rail bottom plate 81 of transmission shaft, facilitates the movement of bearing connecting seat 86, in addition one Another lifting gear is connected in rotation axis, motor 87 and the position of motor 84 are staggered relatively, and rotation axis 88 is connected, moved Situation is as transmission shaft 85.As shown in Figure 11, Figure 12, under the 89 top side plate of pedestal for moving up and down part of lifting gear 80 It is fixed with motor 801,89 inside of pedestal is equipped with rotating threaded shaft 805, and the shaft portion and rotating threaded shaft 805 of motor 801 pass through One through-hole of top side plate, respectively for dress there are one synchronous pulley, two same on the transmission shaft of motor 801 and on rotating threaded shaft 805 Step belt wheel is connected to by belt, has one piece of guide rail splice 812, guide rail splice 812 to connect by bearing holder (housing, cover) under the side plate of top It is connected on rotating threaded shaft 805, the down either side of guide rail splice 812 is respectively equipped with guide rail 803, and two are equipped on each guide rail 803 A sliding block 804；The longitudinal movement part 806 of lifting gear 80 is fixed together with two guide rail bottoms, on connecting plate 806 Face packing has motor 807, motor 807 to be connected to the rotary shaft 809 of 806 bottom surface of connecting plate, and the both sides of rotary shaft 809 are respectively led Rail 810 is equipped with sliding block 811 on each sliding rail 810, axle sleeve 808 is housed in rotary shaft 809, sliding block 811 and axle sleeve 808 are connected to On bonding in vacuum plate 140.

First cleaning device 2 and the second cleaning device 12 move gripper using conventional cleaning device by first straight line Photolithography plate crawl is put into the first cleaning device 2 and the second cleaning device 12 cleans clearly by structure 8 and second straight line movement grasping mechanism It washes, grasping mechanism 8 is moved by first straight line again after the completion of cleaning and second straight line movement grasping mechanism crawls out photolithography plate Into later process.

As shown in Fig. 2, Figure 14, first dust-sticking mechanism 9 is identical with the second dust-sticking mechanism structure, includes shell Body, upper mounting plate 91, on hold out against structure 92, upper dedusting drawer 93, middle dedusting idler wheel conveying drawer 94, lower dedusting drawer 95 and under Jacking mechanism 96, the upper mounting plate 91 are arranged on the top of outer housing, and drawer mouth is provided on outer housing, and described is upper Dedusting drawer 93, middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 are separately positioned in drawer mouth, upper dedusting drawer 93, It is connected respectively by sliding rail and sliding slot 97 between middle dedusting idler wheel conveying drawer 94 and lower dedusting drawer 95 and outer housing；It is described On hold out against that structure 92 is identical as the structure of lower jacking mechanism 96, upper dedusting drawer 93 is identical with the structure of lower dedusting drawer 95, On hold out against structure 92 and be arranged on the top of upper dedusting drawer 93, lower jacking mechanism 96 is arranged in the lower part of lower dedusting drawer 95.

As shown in figure 15, hold out against that structure 92 respectively includes holding out against cylinder 921 with lower jacking mechanism 96, cylinder is pacified on described It fills bar 922 and holds out against item 923, two cylinder mounting rods 922 are fixed on outer housing, and two hold out against cylinder 921 respectively admittedly It is fixed be arranged to hold out against item 923 at the middle part of cylinder mounting rod 922 and hold out against the piston rod of cylinder 921 with two respectively be connected, and The both ends side for holding out against item 923 is respectively arranged with guide rod, and guide rod, which is threaded through, to be arranged in the axle sleeve of cylinder mounting rod 922, The both ends other side for holding out against item 923 is respectively arranged with mandril 924.

As shown in figure 16, the upper dedusting drawer 93 and lower dedusting drawer 95 respectively include drawer framework 931, Roller for sticking dust 932 and adjustable bearing base 933, the both ends of the drawer framework 931 are respectively set there are two fixed seat 934, in fixed seat 934 Two guide rods 733 are respectively arranged with, are arranged on the adjustable bearing base 933 there are two axis hole, adjustable bearing base 933 passes through Two axis hole settings are provided with compressed spring 936, compressed spring on two guide rods 935, and in the bottom of guide rod 935 936 one end offset with fixed seat 934, and the other end offsets with adjustable bearing base 933, the adjustable bearing base 933 and mandril 924 It offsets, the Roller for sticking dust 932 has two, and Roller for sticking dust 932 is arranged in two adjustable bearing bases 933 being arranged oppositely；

As shown in figure 17, middle dedusting idler wheel conveying drawer 94 includes drawer framework 941, driving motor 942 and transferring roller 943, roller shaft 944 is respectively set in the both sides of drawer framework 931 and middle part, multiple idler wheels 945 are provided on roller shaft 944, Two pairs of transferring rollers 943 are set in the interstitial spaces of roller shaft 944, two pairs of transferring rollers 943 are made of upper and lower two roll bodies, above and below Be equipped between two roll bodies for photolithography plate by gap, upper and lower two roll bodies respectively with the upper dedusting drawer 93 and under Lower 95 Roller for sticking dust 932 of dedusting drawer fits contact, and the end of roller shaft 944 and two pairs of transferring rollers 943 is respectively arranged with belt Wheel, belt pulley are sequentially connected with 942 phase of driving motor.

As shown at 13, the switching mechanism 10 includes clamping cylinder 103, transmission shaft 101, overturning rotary shaft 105 and turns over It changes one's position plate 106；Be mounted with bilevel transmission shaft 101 in the turning over its side 106 on both sides, every layer of transmission shaft 101 two-by-two it Between there are equal spacing, above one layer of 101 top of transmission shaft two pieces of clamping cylinder mounting plates 102 are installed, it is each to clamp Several clamping cylinders 103 are fitted under cylinder mounting plate 106,130 spacing of each clamping cylinder are identical, above one layer of folder Tight cylinder downward, is located at the intermediate space of two transmission shafts 101；One layer of clamping cylinder that layer located above clamps gas below The underface of cylinder, direction is upward；The side of turning over its side 711 is equipped with motor 104, and motor is connected to torsion shaft 105, torsion shaft 105 other end is fixed on turning over its side 106；The interior survey of turning over its side 106 is equipped with motor 107, and motor 107 passes through belt band Move the rotation of each transmission shaft 101.

The present invention work step be：Photolithography plate is positioned over blowing seat 130, blowing seat 130 is transported by feeding cart 138 Defeated, feeding cart 138 is docked with roller-way 131 when feeding, and blowing seat 130 is pushed into roller-way 131 and positions, and is grabbed by the first rotation It takes device 4 to place photolithography plate to the first positioning jacking conveying roller device 7 to position, conveying photolithography plate arrives after the completion of positioning First conveying roller device 15, first straight line move the photolithography plate that grasping mechanism 8 captures on the first conveying roller device 15 and place It is cleaned to the first cleaning device 2, takes out to place to the second conveying by first straight line movement grasping mechanism 8 after the completion of cleaning and roll Wheel apparatus 11 delivers into the first dust-sticking mechanism 9 and is dusted cleaning, and the first dust-sticking mechanism 9 connects switching mechanism 10, tipper Structure 10 carries out turn-over, is then sent to third conveying roller device 17, and the photolithography plate on third conveying roller device 17 passes through the Two linear movement grasping mechanisms 8, which are placed to the second cleaning device 2, to be cleaned, and grasping mechanism 8 is moved by second straight line after the completion of cleaning It takes out and places to the 4th conveying roller device 23, the second dust-sticking mechanism 19 is delivered by the 4th conveying roller device 23 and is removed Dirt is cleared up, and is then sent to the second positioning jacking conveying roller device 24 and is positioned, is grabbed by the second rotation after the completion of positioning It takes device 14 to place to shedding mechanism 13, blanking is carried out by feeding cart 138.

Claims

1. A semiconductor photoresist plate cleaning device that rotates and grabs and transports, the device includes a housing frame assembly and a feeding mechanism that is sequentially arranged in the housing frame assembly, a first rotating grabbing device, and a first positioning jacking conveying roller device, the first conveying roller device, the first linear movement grabbing mechanism, the first cleaning device and the second conveying roller device; the photoresist plate on the feeding mechanism is placed to the first position by the first rotating grabbing device Lifting the conveying roller device, the first positioning jacking conveying roller device is connected to the first conveying roller device, the photolithography plate on the first conveying roller device is placed into the first cleaning device through the first linear movement and grabbing mechanism, and is moved by the first straight line The wire moving grabbing mechanism is taken out and placed on the second conveying roller device; it is characterized in that the first rotating grabbing device includes a vacuum suction cup device and a swing arm device; the vacuum suction cup device includes a vacuum connecting plate, a vacuum suction cup adjustment frame and a vacuum The suction cup and the vacuum connecting plate are fixedly connected to several vacuum suction cup adjustment frames. There is a guide groove above each vacuum suction cup adjustment frame. Multiple suction cup adjustment frames are fixed on the guide groove through adjusting nuts. The vacuum suction cup mounting plate is fixedly installed with suction cups. Connecting rod, the bottom end of the suction cup connecting rod is connected to the vacuum suction cup; the swing arm device includes a first motor, a second motor, a rotating bearing seat, a rotating shaft and a swing arm, and the first motor is located at the top of the whole device, Installed and fixed on the frame, the first motor is connected to the rotating shaft through a belt, and a rotating bearing seat is installed at both ends of the rotating shaft, and the rotating bearing seat is fixed on the middle part of the rotating shaft on the frame, and a swing arm is fixedly installed on the swing arm. The top is equipped with a second motor, and a rotating screw is connected to the bottom of the second motor. The two ends of the rotating screw are installed on the swing arm through two screw bearing seats. The track is fixed, and there is a slider on the track. The slider is connected to the rotating screw through the driving connection block. When the rotating screw rotates forward and reverse, it can drive the slider to move up and down; The arm support can move along with the up and down movement of the slide block, and the lower part of the swing arm support is connected with the vacuum connecting plate.

2. A semiconductor photoresist plate cleaning device that rotates and grabs and transports according to claim 1, wherein the feeding mechanism includes a feeding seat, a roller table and a feeding trolley; the movable feeding seat is used for placing For the photolithographic plate to be processed, the bottom surface of the discharge seat is flat, and a V-shaped storage tank is arranged on the upper part. The discharge side of the V-shaped storage tank is lower than the side of the material; the roller table is installed in the roller table side plates on both sides. , the side plate of the roller table is fixedly installed on the frame, the roller table and the feeding trolley are connected with each other, and the discharge seat can move on the roller table and the feeding trolley; the end of the roller table is provided with a material seat locking device, and There is a trolley locking device on the outside of the roller table.

3. A semiconductor photoresist plate cleaning device for rotary grabbing and transporting according to claim 2, characterized in that, the material seat locking device includes a rotary cylinder and a locking plate, and the rotary cylinder is arranged at the end of the roller table close to the inside of the equipment , one end of the locking plate is installed on the rotating cylinder. When not rotating, one side of the locking plate is level with the roller table, and a proximity sensor is installed next to the rotating cylinder. There is also a proximity sensor on both sides of the side plate of the roller table. The rotating cylinder Two limit blocks are also installed on both sides.

4. A cleaning device for semiconductor photoresist plates that is rotated, grabbed, and transported according to claim 2, wherein the trolley locking device includes two cylinders, guide rods, and locking plates, and is located on the side of the roller table near the outside. There is a baffle fixedly installed on the frame below. Two cylinders are installed on the inside of the baffle, and there are two guide rods beside the cylinder. The cylinder and the guide rods are installed on the cylinder mounting plate together. On the fixed installation frame, a trolley roller is installed on each of the two rods; on the other side of the baffle, there are two windows at the position corresponding to the trolley roller, and the trolley roller is exposed through the window; the locking plate and the cylinder The piston rod is connected with each other, the locking plate is provided with a horizontal frame, and the horizontal frame is provided with a groove for placing the beam; one end of the feeding trolley is placed in the groove of the horizontal frame, and a plugboard is arranged on the horizontal frame, and the cylinder rises The timing plate can be locked with the beam on the feeding trolley.

5. A semiconductor photoresist plate cleaning device that rotates, grabs, and transports according to claim 1, wherein the first positioning jacking transport roller device includes a frame body, a transport roller device, a grabbing positioning device, and a lifting and traversing device. device;

The frame body is fixed on the outer cover frame assembly, and the conveying roller device includes side plates, transmission shafts and longitudinal rollers, two side plates are fixed on the frame body, and multiple drive shafts are arranged side by side horizontally between the two side plates. A plurality of longitudinal rollers are connected in series on each transmission shaft, and there are two rib wheels between two longitudinal rollers, so that there is a certain gap between the two longitudinal rollers, and a pulley is arranged at the end of each transmission shaft, and the pulley passes through The belts are connected to each other by transmission, and the belt transmission connection is provided with a motor;

The grasping and positioning device includes a positioning plate, a moving plate and a toggle frame, the positioning plate and the moving plate are arranged below the transmission shaft, the positioning plate is fixedly connected with the frame body, and a Two shafts, the positioning plate is fixedly connected to the shaft, the moving plate is connected to the shaft through a shaft sleeve, and belt clamps are respectively arranged on both sides of the moving plate, and each belt clamp is fixed on a belt. The belt is erected on the pulley and the transmission connection is provided with a motor; the positioning plate and the moving plate are provided with a toggle frame, and the toggle frame includes a vertical rod, an upper rod and a toggle rod, and the vertical rod is arranged on the positioning plate and the moving plate. The two ends of the mobile plate, the upper end of the vertical rod is located above the longitudinal roller, the upper rod is erected on two vertical rods, and a plurality of toggle rods are arranged downward on the upper rod, and the lower ends of the plurality of toggle rods are located in the transverse groove of the longitudinal roller Inside;

The lifting and traversing device includes a cylinder fixing plate, a jacking cylinder, a guide rod, a connecting plate, a roller mounting bar and a horizontal roller, the cylinder fixing plate is fixed on the frame body, and the jacking cylinder is fixed on the cylinder fixing plate , the connecting plate is connected with the piston rod of the jacking cylinder, the guide rod is arranged on the cylinder fixing plate through the bushing, the upper end of the guiding rod is fixedly connected with the connecting plate, and a plurality of roller mounting strips are horizontally arranged side by side on the connecting plate A plurality of roller brackets are arranged on the roller mounting bar, and the horizontal rollers are arranged on the roller brackets. When the jacking cylinder stretches out, the horizontal rollers protrude above the longitudinal rollers.

6. A semiconductor photoresist plate cleaning device that rotates and grabs and transports according to claim 1, wherein the first linearly moving grabbing mechanism includes a vacuum chuck device, a linearly moving transmission shaft, a lifting device and longitudinal movement device;

The vacuum suction cup device includes a vacuum connection plate, a vacuum suction cup adjustment frame and a vacuum suction cup, the vacuum connection plate is fixedly connected with several vacuum suction cup adjustment frames, a guide groove is arranged above each vacuum suction cup adjustment frame, and a plurality of suction cup adjustment frames pass through The adjusting nut is fixedly arranged on the guide groove, the vacuum suction cup mounting plate is fixedly installed with a suction cup connecting rod, and the bottom end of the suction cup connecting rod is connected with the vacuum suction cup;

There are slide rails on the upper and lower sides of the bottom plate of the slide rail, and a slider is installed on each of the upper and lower rails. The upper two sliders are directly opposite to the lower two sliders. There are two transmission shafts, and the two transmission shafts are equipped with bearing connection seats. One end of the transmission shaft is connected to the motor, and the bearing connection seats are connected to the transmission shaft through the bushing. For the linear movement of the device, there is a through groove on the bottom plate of the slide rail corresponding to the transmission shaft, which is convenient for the movement of the bearing connection seat. Another lifting device is connected to the other rotating shaft. The position of the motor and the motor is relatively placed. The connection of the rotating shaft, The movement is the same as that of the drive shaft; a motor is fixed under the top side plate of the base of the up and down moving part of the lifting device, and a rotating screw is installed inside the base. The drive shaft part of the motor and the rotating screw pass through a through hole in the top side plate. There is a synchronous pulley on the transmission shaft of the motor and on the rotating lead screw respectively. The two synchronous pulleys are connected by a belt. There is a guide rail connecting plate under the top side plate. The guide rail connecting plate is connected to the rotating lead screw through a bearing sleeve. , guide rails are installed under both sides of the guide rail connecting plate, and each guide rail is equipped with two sliders; the longitudinal moving part of the lifting device is fixedly connected with the bottom of the two guide rails, and the upper part of the connecting plate is equipped with a motor. The rotating shaft connected to the bottom surface of the connecting plate has guide rails on both sides of the rotating shaft, a slide block is arranged on each slide rail, and a shaft sleeve is arranged on the rotating shaft, and the sliding block and the shaft sleeve are connected on the vacuum connecting plate.