TW201537258A - Manufacturing apparatus of liquid crystal panel and method of manufacturing liquid crystal panel - Google Patents

Abstract

A manufacturing apparatus of a liquid crystal panel and a method of manufacturing the liquid crystal panel, which improves productivity of a panel to be treated, are provided. The manufacturing apparatus of the liquid crystal panel of an embodiment includes a light irradiation part, an irradiation box, a stage, a chamber, a circulation-type air conditioner, and a heat preservation chamber. The light irradiation part emits light. The irradiation box has a window material which is penetrated by the light from the light irradiation part. The stage is equipped with a placement surface opposite to the window material, and the panel to be treated is placed on the placement surface. In the stage circulates liquid which performs temperature control to the placement surface. The chamber covers the irradiation box and the stage. The circulation-type air conditioner discharges gas, which is introduced from an introduction port, from an exhaust port. The heat preservation chamber is maintained at a temperature equivalent to the inside of the chamber, and the panel to be treated between the heat preservation chamber and the chamber is movable.

Description

Manufacturing device of liquid crystal panel and method of manufacturing liquid crystal panel

Embodiments of the present invention relate to a manufacturing apparatus of a liquid crystal panel and a method of manufacturing the liquid crystal panel.

In the production of a liquid crystal panel, there is a method of performing a photo-alignment step in which a light-receiving panel including a photoreactive polymer is irradiated with light of a predetermined wavelength by a light source such as an ultraviolet lamp to form a polymer. A chemical reaction occurs to have an alignment function (for example, refer to Patent Document 1).

The temperature of the liquid crystal panel at the time of ultraviolet irradiation is desirably uniform on the panel surface. In particular, in a state in which a blue layer of a liquid crystal is stabilized by a polymer, that is, in a configuration using a Polymer Stabilized Blue Phase (PSBP), temperature unevenness on a panel surface during light irradiation and The change in the duration of the temperature has a large influence on the unevenness of the display characteristics, and therefore it is highly desirable to achieve temperature uniformity.

[Prior Art Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-215463

However, in the ultraviolet irradiation device disclosed in Patent Document 1, it is desirable to increase the uniformity of temperature and improve the productivity of the panel to be processed.

An object of the present invention is to provide a manufacturing apparatus of a liquid crystal panel and a method of manufacturing the liquid crystal panel, which can improve the productivity of the panel to be processed.

The manufacturing apparatus of the liquid crystal panel of the embodiment includes a light irradiation unit, an irradiation box, a stage, a chamber, a circulation type air conditioning apparatus, and a heat retention chamber. The light irradiation portion emits light. The irradiation box includes a window material that transmits light from the light irradiation portion. The platform includes a mounting surface that is disposed opposite the window material and that places the panel to be processed. The platform circulates the liquid that controls the temperature of the region on the surface on which the light is irradiated. The chamber is covered with an irradiation box and a platform. The circulation type air conditioning apparatus includes an introduction port and a discharge port provided in the chamber, and the gas introduced from the introduction port is discharged from the discharge port to control the temperature in the chamber. The holding chamber is maintained at a temperature equal to the chamber and the panel being treated is movable between the holding chamber and the chamber.

A method of manufacturing a liquid crystal panel according to an embodiment includes: placing a panel to be processed on a mounting surface of a stage, wherein the platform is fixed for temperature control a temperature liquid is circulated inside; accommodating the processed panel in an irradiation box, wherein the irradiation box includes a window material opposite to the mounting surface and being irradiated with light from the light illuminating portion; to cover the platform Configuring a chamber in a manner of illuminating the chamber, wherein the chamber is provided with an introduction port and a discharge port; and circulating a fixed temperature liquid in the platform, and fixing the temperature medium from the introduction port Introduced into the chamber, discharged from the discharge port, and circulated, and irradiates the processed panel disposed on the mounting surface from the light irradiation unit via the window material; wherein Before the placement surface of the platform is placed on the processed panel, the processed panel is positioned in the thermal insulation chamber.

According to the present invention, it is possible to provide a manufacturing apparatus of a liquid crystal panel and a method of manufacturing a liquid crystal panel which can improve productivity.

1. 1-1‧‧‧ manufacturing device for liquid crystal panel

2‧‧‧Processed panels

3‧‧‧Color filter substrate

4‧‧‧ opposite substrate

5‧‧‧Liquid layer

10‧‧‧Lighting Department

11‧‧‧ rod light (light source)

12‧‧‧Mirror

13‧‧‧ gate

20‧‧‧Irrigation box

21‧‧‧ Window materials

22‧‧‧1st filter

23‧‧‧2nd filter

30‧‧‧ platform

31‧‧‧Loading surface

32‧‧‧Liquid insulation cycle components

33‧‧‧Pipe

40‧‧‧ chamber

43, 63, 66‧‧ ‧ gate

44, 64‧‧‧ Move out of the entrance

45, 65‧‧‧Transportation path

50, 70‧‧‧Circulating air conditioning unit

51, 71‧‧‧ import port

52, 72‧‧‧Export

53, 73‧‧‧Air duct

60‧‧‧Insulation chamber

80‧‧‧Control elements

FIG. 1 is a cross-sectional view showing a schematic configuration of a manufacturing apparatus of a liquid crystal panel according to an embodiment.

FIG. 2 is a cross-sectional view showing a configuration of a panel to be processed in which light is produced by the manufacturing apparatus of the liquid crystal panel of the embodiment.

3 is a view for explaining light transmitted through a window material of a manufacturing apparatus of a liquid crystal panel according to an embodiment.

4 is a view showing the structure of a window material of a manufacturing apparatus of a liquid crystal panel according to an embodiment; A sectional view.

FIG. 5 is a cross-sectional view showing a schematic configuration of a manufacturing apparatus of a liquid crystal panel according to a modification of the embodiment.

Fig. 6 is a view showing changes in temperature of a panel to be processed according to a comparative example and an example of the present invention.

The manufacturing apparatus 1 of the liquid crystal panel of the embodiment described below includes the light irradiation unit 10, the irradiation box 20, the stage 30, the chamber 40, the circulation type air conditioning apparatus 50, and the heat retention chamber 60. The light irradiation unit 10 emits light. The irradiation box 20 includes a window material 21 that transmits light from the light irradiation unit 10. The stage 30 includes a mounting surface 31 that is disposed to face the window material 21 and that mounts the panel 2 to be processed. The platform 30 circulates a liquid that controls the temperature of the region on which the light to be irradiated on the mounting surface 31 is irradiated. The chamber 40 encloses the irradiation box 20 and the platform 30. The circulation type air-conditioning apparatus 50 includes an introduction port 51 and a discharge port 52 provided in the chamber 40, and the gas introduced from the introduction port 51 is discharged from the discharge port 52, and the temperature in the chamber 40 is controlled. The holding chamber 60 is maintained at a temperature equal to that within the chamber 40, and the treated panel 2 is movable between the holding chamber 60 and the chamber 40.

Further, in the manufacturing apparatus 1 for a liquid crystal panel according to the embodiment described below, the window material 21 has a function of suppressing transmission of ultraviolet rays or infrared rays of a predetermined wavelength or transmission of both ultraviolet rays and infrared rays of a predetermined wavelength. Inhibition.

Further, in the manufacturing apparatus 1 for a liquid crystal panel according to the embodiment described below, the processed panel 2 includes a color filter substrate 3, a counter substrate 4, and a liquid crystal layer 5. The counter substrate 4 faces the color filter substrate 3. The liquid crystal layer 5 is disposed between the color filter substrate 3 and the counter substrate 4. The processed panel 2 is placed on the stage 30 such that the color filter substrate 3 side is in contact with the mounting surface 31, and the light irradiation unit 10 irradiates the processed panel 2 with light from the opposite substrate 4 side.

Further, in the liquid crystal panel manufacturing apparatus 1 of the embodiment described below, the liquid crystal layer 5 includes at least a nematic liquid crystal composition, a liquid crystal composition exhibiting a blue phase, and a polymerizable monomer. The liquid crystal layer 5 exhibits a polymer-stabilized blue phase by irradiation of light.

Further, in the apparatus 1 for manufacturing a liquid crystal panel according to the embodiment described below, the light irradiation unit 10 includes a main wavelength of 300 nm to 400 nm, and the illuminance of light having a wavelength of 365 nm on the mounting surface is 15 mW/cm 2 or less. Light source 11.

Further, the manufacturing apparatus 1 for a liquid crystal panel according to the embodiment described below controls the stage 30 and the circulation type air conditioning apparatus 50 such that the temperature on the panel 2 to be processed when irradiated with light is relative to 10 ° C to 70 ° C. The set temperature between them is within ±0.5 °C.

Further, in the method of manufacturing a liquid crystal panel according to the embodiment described below, the processed panel 2 is placed on the mounting surface 31 of the stage 30, and the stage 30 allows the liquid of a fixed temperature to flow inside for temperature control. The processed panel 2 is housed in an irradiation box 20 that includes an opposite surface to the mounting surface 31 and The window material 21 that is irradiated with light from the light irradiation unit 10. The chamber 40 is disposed so as to cover the stage 30 and the irradiation box 20, and the chamber 40 is provided with an introduction port 51 and a discharge port 52. The liquid of a fixed temperature is circulated in the stage 30, and the medium of a fixed temperature is introduced into the chamber from the introduction port 51, and is discharged from the discharge port 52 to be circulated, and is disposed on the load from the light irradiation unit 10 via the window material 21. The processed panel 2 on the surface 31 irradiates light. Before the panel 2 to be processed is placed on the mounting surface 31 of the stage 30, the panel 2 to be processed is positioned in the holding chamber 60 which is maintained at a temperature equal to the temperature inside the chamber 40.

Implementation

Next, a manufacturing apparatus 1 for a liquid crystal panel according to an embodiment of the present invention will be described with reference to the drawings. 1 is a cross-sectional view showing a schematic configuration of a manufacturing apparatus of a liquid crystal panel according to an embodiment, and FIG. 2 is a cross-sectional view showing a configuration of a panel to be processed by which a liquid crystal panel manufacturing apparatus of the embodiment emits light, and FIG. 3 is a view illustrating an embodiment. FIG. 4 is a cross-sectional view showing a configuration of a window material of a manufacturing apparatus of a liquid crystal panel according to an embodiment of the present invention.

The apparatus for manufacturing a liquid crystal panel (hereinafter referred to simply as a manufacturing apparatus) 1 of the embodiment shown in FIG. 1 irradiates light to the panel 2 to be processed while maintaining a constant temperature, and causes the panel to be processed 2 to appear, for example, as a liquid crystal display. The molecularly stabilized blue is equal. As shown in FIG. 2, the processed panel 2 irradiated with light by the manufacturing apparatus 1 includes a color filter substrate 3, an opposite substrate 4 opposed to the color filter substrate 3, and a color filter substrate 3 and The liquid crystal layer 5 between the opposite substrates 4.

The color filter substrate 3 is, for example, to make red light, green light, or blue light The transmitted color filter is disposed on the substrate and covered with a protective film. The counter substrate 4 is a substrate in which electrodes are arranged in an array. The liquid crystal layer 5 contains at least a nematic liquid crystal composition, a liquid crystal composition exhibiting a blue phase, and a polymerizable monomer. The liquid crystal layer 5 is irradiated with light by the manufacturing apparatus 1 to exhibit a polymer-stabilized blue phase.

The so-called nematic liquid crystal composition constituting the liquid crystal layer 5 is composed of a material having dielectric anisotropy.

The liquid crystal composition which exhibits a blue phase is a material which can be made responsive by expanding the temperature range which is stably present, for example, to room temperature, specifically to 0 ° C or more, by being irradiated with light. Higher than the nematic liquid crystal composition. In the liquid crystal composition which exhibits a blue phase, for example, in a state of being kept within ±0.5° C. with respect to a predetermined set temperature of between 10° C. and 70° C., when the light is irradiated, the polymer stabilized blue is uniformly displayed. Phase material. For example, when the liquid crystal composition exhibiting a blue phase at a set temperature of 55 ° C is maintained in a temperature range of 54.5 ° C to 55.5 ° C, the polymer stabilized blue phase is uniformly exhibited when the light is irradiated. The material is a liquid crystal composition which exhibits a blue phase when the temperature is set to 60 ° C, and the polymer stabilized blue is uniformly exhibited when the light is irradiated while maintaining the temperature in the range of 59.5 ° C to 60.5 ° C. Phase material.

The polymerizable monomer is a material for stabilizing the composition of the nematic liquid crystal composition or the liquid crystal composition exhibiting the polymer-stabilized blue phase.

As shown in FIGS. 1 and 2, the manufacturing apparatus 1 includes a light irradiation unit 10 that emits light, an irradiation box 20, a stage 30, a chamber 40, a circulation type air conditioning unit 50, a heat retention chamber 60, a control element 80, and the like.

The light-irradiating portion 10 is a member that emits light, and can be disposed in the irradiation box 20, specifically, the processed panel placed on the mounting surface 31 of the stage 30 facing the window material 21 in the irradiation box 20. 2 The light is irradiated through the window material 21, and the window material 21 transmits the light from the light irradiation unit 10. The light-irradiating portion 10 includes a plurality of rod-shaped lamps 11 as light sources, and a mirror surface 12 that reflects the light emitted from the rod-shaped lamps 11 toward the mounting surface 31 of the stage 30. The rod-shaped lamp 11 is a tubular lamp in which a metal halide such as mercury, iron or iodine, or a rare gas such as argon gas, and a metal halide lamp that mainly emits ultraviolet rays are linearly extended. The rod lamp 11 has a main wavelength of 300 nm to 400 nm, and the illuminance of light (ultraviolet light) having a wavelength of 365 nm is 15 mW/cm 2 or less. Further, UV-M02 (manufactured by ORC Manufacturing Co., Ltd.) can be used as an illuminometer, and UV-SN35 (manufactured by ORC Manufacturing Co., Ltd.) can be used as the light receiver.

In the present embodiment, four rod-shaped lamps 11 are provided, and are disposed on the irradiation box 20 and the stage 30, and placed above the processed panel 2 placed on the placement surface 31. Further, the rod lamp 11 is covered by a water-cooling jacket (not shown), and the water-cooling jacket passes the light irradiated by the rod-shaped lamp 11. The water-cooled jacket is filled with water, and the rod-shaped lamp 11 is maintained at a desired operating temperature by circulating the filled water.

The light irradiation unit 10 includes a shutter 13 that causes the light emitted from the rod lamp 11 to be irradiated onto the processed panel 2 placed on the mounting surface 31 of the stage 30 by opening and closing, or The light emitted from the rod-shaped lamp 11 is blocked to restrict the irradiation of the panel 2 to be processed. The shutter 13 is disposed between the rod lamp 11 and the irradiation box 20.

The irradiation box 20 is formed in a box shape to place the mounting surface 31 placed on the stage 30. The upper processed panel 2 is placed on the platform 30 so as to be housed inside. Further, the irradiation box 20 includes a window material 21 which is provided between the light irradiation unit 10 and the placement surface 31 and is irradiated with light from the light irradiation unit 10.

The window material 21 has a function of suppressing transmission of both ultraviolet rays and infrared rays of a predetermined wavelength. The window material 21 is a member that transmits light having a wavelength suitable for causing the liquid crystal layer 5 to exhibit a polymer-stabilized blue phase, and suppresses (limits) transmission of other light. In the present embodiment, as shown in FIG. 4, the window material 21 is formed by overlapping the first filter 22 and the second filter 23. As shown by the solid line in FIG. 3, the first filter 22 transmits ultraviolet rays having wavelengths (nm) of A to B, and other light (wavelengths (nm) shorter than A, and wavelengths (nm) longer than B. The transmission of ultraviolet rays, visible rays, and infrared rays is suppressed (restricted). As shown in FIG. 3, the second filter 23 transmits ultraviolet rays, visible rays, and infrared rays having a wavelength (nm) of C to D, and transmits light to other light (especially, the wavelength (nm) is shorter than C. The transmission of ultraviolet rays and wavelengths (nm) longer than D (infrared) is suppressed (restricted). Furthermore, C is longer than A and shorter than B, and B is shorter than D. Therefore, in the present embodiment, as shown by the parallel oblique lines in FIG. 3, the window material 21 is a member that transmits ultraviolet rays having a wavelength (nm) of C to B and suppresses (limits) the transmission of other light. Further, in the present invention, a filter that transmits ultraviolet rays having wavelengths (nm) of A to B and suppresses (restricts) transmission of other light may be vapor-deposited to the second color filter 23. On top, the window material 21 is formed.

Further, in the present invention, the window material 21 may be made of a predetermined wave as long as it can transmit light of a wavelength suitable for causing the liquid crystal layer 5 to exhibit a polymer-stabilized blue phase. A filter that suppresses (limits) the transmission of long ultraviolet rays, and may be composed of a filter that suppresses (limits) the transmission of infrared rays of a predetermined wavelength. As described above, in the present invention, the window material 21 may have a function of suppressing the transmission of ultraviolet rays or infrared rays of a predetermined wavelength by a wavelength suitable for causing the liquid crystal layer 5 to exhibit a blue phase of the polymer stabilization ( limit).

The stage 30 includes a mounting surface 31 on which the panel 2 to be processed is placed, and the temperature of the liquid to be processed placed on the mounting surface 31 is controlled by circulating water as a liquid of a fixed temperature. The platform 30 is configured to circulate the water as a fixed temperature liquid in order to control the temperature of the region on which the light is applied to the mounting surface 31. The placement surface 31 is disposed to face the window material 21 and face the light irradiation portion 10. Further, in the present invention, it is preferable that the temperature held by the panel 2 to be placed placed on the mounting surface 31 is as fixed as possible as long as the panel 2 to be processed placed on the mounting surface 31 is placed. When the temperature is kept constant, the temperature of the liquid as the fluid circulating in the platform 30 may be slightly lower than the temperature of the panel 2 to be placed placed on the mounting surface 31, or may be slightly higher than the mounting surface. The temperature of the panel 2 being processed on 31. Further, in the present invention, in the platform 30, in addition to water, various liquids can be circulated.

On the stage 30, the panel to be processed 2 is placed such that the color filter substrate 3 side is in contact with the mounting surface 31. In other words, the processed panel 2 is placed on the mounting surface 31 of the stage 30 such that the color filter substrate 3 is in contact with the mounting surface 31. Therefore, the light-irradiating portion 10 irradiates the processed panel 2 with light from the opposite substrate 4 side.

The stage 30 is formed in a thick flat plate shape made of an aluminum alloy or the like, and is provided with a circulation path (not shown) that circulates a liquid inside, which is provided There is a temperature at which the panel 2 to be treated reaches the desired temperature. Connected to the platform 30 is a liquid heat retention cycle element 32 that maintains the temperature of the panel being treated 2 fixed and circulates the liquid within the circulation path of the platform 30. The liquid heat retention cycle element 32 includes, for example, a pipe (partially shown in FIG. 2) 33 that is connected to a circulation path for circulating a liquid, a well-known heater, a cooling device, and a pump for discharging the liquid in the pipe 33.

The chamber 40 is formed in a box shape, covers the entire irradiation box 20 and the stage 30, and is provided with a light irradiation portion 10 at the upper portion. That is, the chamber 40 is disposed to cover the irradiation box 20 and the stage 30.

As shown in FIG. 1, the circulation type air-conditioning apparatus 50 includes an introduction port 51 and a discharge port 52 provided in the chamber 40, and the gas as a medium introduced from the introduction port 51 is discharged from the discharge port 52, and is in the chamber 40. Temperature is controlled. The circulating air-conditioning apparatus 50 discharges the gas introduced from the introduction port 51 from the discharge port 52, and controls the temperature in the chamber 40, so that the temperature in the chamber 40 is the processed panel 2 in the irradiation tank 20. The temperature is maintained at a fixed temperature.

In the present embodiment, the introduction port 51 and the discharge port 52 form an opening in the outer wall of the chamber 40, and the opening is disposed above the irradiation box 20. The circulation type air conditioning apparatus 50 causes the gas introduced from the introduction port 51 to flow into the chamber 40 and is discharged from the discharge port 52. In the circulation type air conditioning apparatus 50, for example, in addition to the introduction port 51 and the discharge port 52, a supply duct 53 for circulating the gas in the order of the introduction port 51, the chamber 40, and the discharge port 52 is provided to keep the gas maintained. A well-known heater that fixes the temperature, a cooling device, and a blower that sends out the gas in the air supply duct 53.

Further, in the present invention, it is preferable that the temperature of the gas circulated in the order of the introduction port 51, the inside of the chamber 40, and the discharge port 52 is maintained by the panel 2 to be placed placed on the mounting surface 31. The temperature is as equal as possible, and as long as the treated panel 2 placed on the mounting surface 31 is maintained at a fixed temperature, the temperature of the gas to be circulated can be slightly lower than that of the processed surface 31. The temperature of the panel 2 may also be slightly higher than the temperature of the panel 2 to be placed placed on the mounting surface 31. Further, the temperature of the gas is always the target temperature, and there is a case where the temperature is different from the actual temperature.

With regard to the thermal insulation chamber 60, the treated panel 2 is movable between the thermal insulation chamber 60 and the chamber 40. The heat retention chamber 60 is formed in a box shape, and the platform 30 is housed in the same manner as the inside of the chamber 40, and the temperature of the internal gas is kept equal to the gas in the chamber 40 by the circulation type air conditioning device 70. temperature. The platform 30 that is housed in the heat retention chamber 60 has the same configuration as the above-described platform 30. Therefore, the same portions are denoted by the same reference numerals, and the description thereof is omitted. The platform 30 circulates the liquid in the circulation path by the liquid heat retention circulation element 32, so that the temperature of the processed panel 2 placed on the mounting surface 31 in the thermal insulation chamber 60 and the chamber 40 are placed on the platform. The temperature of the panel 2 to be processed on the mounting surface 31 of 30 is equal.

Similarly to the above-described circulation type air conditioning apparatus 50, the circulation type air conditioning apparatus 70 includes an introduction port 71 and a discharge port 72 provided in the heat retention chamber 60, and the gas as a medium introduced from the introduction port 71 is discharged from the discharge port 72. The temperature within the holding chamber 60 is controlled. Further, the circulation type air-conditioning apparatus 70 includes, for example, an air supply pipe 73 for circulating the gas in the order of the introduction port 71, the inside of the chamber 60, and the discharge port 72, in addition to the introduction port 71 and the discharge port 72, and the gas is made. Keep solid A well-known heater of a constant temperature, a cooling device, and a blower that sends out the gas in the air supply duct 53. In the present embodiment, the introduction port 71 and the discharge port 72 form an opening in the outer wall of the heat retention chamber 60, and the opening portion is disposed above the placement surface 31 of the stage 30.

Further, the manufacturing apparatus 1 is provided with, for example, a temperature sensor (not shown) at a suitable portion such as the discharge port 52 and the discharge port 72, and the temperature sensor is circulated inside the platform 30 and the stage 30. The temperature of the liquid circulating in the path, the water circulating in the water-cooling jacket, and the temperature of the gas circulating in the chamber 40 and the inside and outside of the heat-insulating chamber 60 are detected. In the manufacturing apparatus 1, for example, a flow rate sensor is provided at an appropriate portion such as the inlet port 51 and the inlet port 71, and the flow rate sensor is introduced into the chamber 40 and the heat insulating chamber 60 from the inlet port 51 and the inlet port 71. The flow rate of the gas is detected.

Further, in the chamber 40 and the heat retention chamber 60, a carry-in/out port 44 and a carry-in/out port 64 are provided, and the carry-in/out port 44 and the carry-in/out port 64 are carried by the shutter 43 when the panel 2 is to be carried out or carried in. The shutter 63 is opened, and is closed by the shutter 43 and the shutter 63 when the panel 2 to be processed is stored. The chamber 40 and the heat retention chamber 60 carry out or carry in the processed panel 2 by a robot arm (not shown) via the carry-in/out port 44 and the carry-in/out port 64.

Further, on the platform 30 of the chamber 40 and the platform 30 of the heat retention chamber 60, a platform 30 from the stage 30 of the heat retention chamber 60 to the chamber 40 of the chamber 40, that is, the irradiation box 20 is provided, and the unprocessed panel 2 is conveyed. The conveying roller shown. Further, the chamber 40 and the heat retention chamber 60 are provided with a transport path 45 and a transport path 65 for the transport. The passage 45 and the conveyance path 65 are opened by the shutter 66 when the panel 2 is conveyed from the heat retention chamber 60 to the irradiation chamber 20 of the chamber 40, and are closed by the shutter 66 when the panel 2 to be processed is stored. . As described above, the manufacturing apparatus 1 of the embodiment causes the processed panel 2 in the heat insulating chamber 60 to be in contact with the outside gas as much as possible, and directly transports the processed panel 2 from the heat insulating chamber 60 to the chamber 40. The inside of the tank 20 is irradiated.

The control element 80 is a member that controls the light irradiation operation of the manufacturing apparatus 1. The control element 80 is connected to the liquid heat retention cycle element 32, the circulation type air conditioning device 50, the circulation type air conditioning device 70, the light irradiation portion 10, and the like. The control element 80 is mainly constituted by a micro processor (not shown), and is connected to a display element used to display a processing operation state, an operation element used when an operator registers processing content information, and the like. The microprocessor includes an arithmetic processing unit composed of a central processing unit (CPU), a read only memory (ROM), a random access memory (RAM), and the like. .

When the light-irradiating portion 10 irradiates the processed panel 2 placed on the mounting surface 31 of the stage 30 with light, the control element 80 opens the shutter 13 and coats it according to the detection result of the temperature sensor or the like. The temperature of the water filled in the water-cooled jacket of the rod lamp 11 is controlled to maintain the rod lamp 11 at the desired operating temperature. Further, when the light-irradiating portion 10 irradiates the processed panel 2 placed on the mounting surface 31 of the stage 30 with light, the control element 80 opens the shutter 13, and the liquid is applied to the liquid according to the detection result of the temperature sensor or the like. The heat retention cycle element 32 performs control to follow the platform 30 The temperature of the liquid of the ring is kept constant, and the circulation type air conditioning device 50 is controlled so that the temperature of the gas circulating inside and outside the chamber 40 is kept constant, so that the load placed on the mounting surface 31 of the stage 30 is fixed. The temperature of the processing panel 2 is kept constant.

For example, when the light to be processed is applied to the panel 2 to be processed from the light irradiation unit 10 by the control unit 80, the stage 30 and the circulation type air conditioning unit 50 are controlled such that the temperature of the panel 2 to be processed when the light is irradiated is relatively The specified set temperature between 10 ° C and 70 ° C is within ± 0.5 ° C. In other words, in the present invention, the temperature of the panel to be processed 2 placed on the mounting surface 31 of the stage 30 is kept constant, and is maintained at a predetermined set temperature of between 10 ° C and 70 ° C. Temperature within 0.5 °C. For example, when the set temperature is 55 ° C, the temperature of the liquid circulating in the liquid holding cycle element 32 and the temperature in the irradiation tank 20 are controlled by the control member 80 so that the temperature of the panel 2 to be processed is maintained. It is a temperature in the range of 54.5 ° C to 55.5 ° C. When the set temperature is 60 ° C, the temperature of the liquid circulating in the liquid heat retention cycle element 32 and the flow rate, temperature, and the like of the gas introduced into the irradiation tank 20 are controlled by the control element 80 so that the panel to be processed The temperature of 2 is maintained at a temperature in the range of 59.5 ° C to 60.5 ° C.

Moreover, the temperature of the inside of the heat insulating chamber 60 which is equal to the inside of the chamber 40 desirably represents a temperature which is used for light when the panel 2 to be processed is moved from the inside of the heat insulating chamber 60 into the chamber 40. The temperature of the panel 2 to be processed in the period in which the irradiation unit 10 is irradiated with light is within ±0.5 ° C with respect to the set temperature. Further, in the present invention, the temperature inside the holding chamber 60 equal to the inside of the chamber 40 may be as long as the temperature of the panel 2 to be processed is moved from the heat insulating chamber 60. The time until the temperature of the processed panel 2 reaches the temperature within ±0.5 ° C with respect to the set temperature in the chamber 40 is shorter than the temperature of the processed panel 2 when the panel 2 to be processed is directly moved into the chamber 40 Set the time until the temperature reaches a temperature within ±0.5 °C.

Next, a method of manufacturing the liquid crystal panel of the manufacturing apparatus 1 according to the embodiment of the above configuration, that is, a method of irradiating the processed panel 2 with light will be described. First, the operator registers the processing content information in the control element 80, and when the start command of the processing action occurs, the processing operation is started. Next, in the processing operation, first, the shutter 63 of the heat insulating chamber 60 is opened, and the processing panel 2 is placed on the mounting surface 31 of the stage 30 of the heat insulating chamber 60 by the robot arm or the like via the carry-out port 64. on. Then, the control member 80 closes the shutter 63 to circulate the liquid in the stage 30, and introduces the gas into the holding chamber 60 via the introduction port 71 and discharges it from the discharge port 72. Further, at the same time, the control member 80 causes the liquid to circulate in the stage 30, and introduces the gas into the chamber 40 via the introduction port 51 and discharges it from the discharge port 52, and circulates the water in the water-cooling jacket.

When the temperature of the panel 2 to be processed reaches the set temperature or substantially reaches the set temperature for a predetermined period of time, the control unit 80 opens the shutter 66 and transports the panel 2 to be processed from the holding chamber 60 via the transport passage 45 and the transport passage 65. It is into the irradiation box 20 of the chamber 40. Next, the control element 80 mounts the processed panel 2 on the mounting surface 31 of the stage 30, and is housed in the irradiation box 20, and closes the shutter 66. The control element 80 lights the rod lamp 11 and opens the shutter 13. The control element 80 circulates water of a fixed temperature in the platform 30 and takes the gas from the inlet 51. The inside of the chamber 40 is introduced, discharged from the discharge port 52, and circulated, and the processed panel 2 placed on the mounting surface 31 is irradiated with light for a fixed period of time from the light irradiation unit 10 via the window material 21. At this time, for example, the panel to be processed 2 is irradiated with light having a wavelength of 365 nm and an illuminance of 2 mW/cm 2 .

After the fixed time light is irradiated, the control element 80 closes the shutter 13, opens the shutter 43 of the chamber 40, and mounts the platform 30 in the irradiation tank 20 from the chamber 40 via the carry-out port 44 via the carry-out port 44 or the like. The processed panel 2 is removed from the surface 31 and transported to the next step. Then, after the processed panel 2 is transported from the heat insulating chamber 60 to the irradiation tank 20 of the chamber 40, the control element 80 mounts the processed panel 2 before the light irradiation on the mounting surface of the stage 30 of the heat insulating chamber 60. 31. Light is irradiated in the same manner as the above steps. As described above, in the method of manufacturing the liquid crystal panel using the manufacturing apparatus 1 of the embodiment, the panel to be processed 2 is placed before the panel 2 to be processed is placed on the mounting surface 31 of the stage 30 in the chamber 40. Positioned within the holding chamber 60 that is maintained at a temperature equal to the temperature within the chamber 40.

According to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel of the embodiment, the heat insulating chamber 60 is maintained at a temperature equal to that in the chamber 40, and in the heat insulating chamber 60 The treated panel 2 between the chambers 40 is movable. Further, according to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel, the panel 2 to be processed is placed on the mounting surface 31 of the stage 30 in the chamber 40 and is irradiated with light of a fixed time from the light irradiation unit 10, and is processed. The panel 2 is placed on the mounting surface 31 of the stage 30 of the heat retention chamber 60 for a predetermined period of time. Therefore, according to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel, the mounting surface 31 of the stage 30 placed in the chamber 40 is placed. The temperature of the processed panel 2 immediately becomes the set temperature, so that the time from when the processed panel 2 is placed on the mounting surface 31 of the stage 30 in the chamber 40 to when the irradiation of light is started can be shortened. Therefore, according to the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel, the time for placing the to-be-processed panel 2 on the mounting surface 31 of the stage 30 in the chamber 40 can be shortened, and the productivity of the to-be-processed panel 2 can be improved.

Further, according to the manufacturing apparatus 1 and the method of manufacturing a liquid crystal panel according to the above-described configuration, the liquid is circulated in the stage 30, and the temperature of the panel 2 to be processed is controlled to maintain a constant temperature, and the package is made. The gas in the chamber 40 covering the irradiation tank 20 that houses the processed panel 2 is kept fixed. Further, according to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel, the inside of the irradiation box 20 that houses the panel 2 to be processed can be kept substantially the same as the temperature of the inside of the chamber 20, that is, the inside of the chamber 40, and Since it is substantially fixed, heat dissipation from the irradiation tank 20 to the temperature of the chamber 40 can be suppressed, so that the change in temperature in the irradiation tank 20 can be suppressed. Therefore, according to the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel, the change of the temperature of the to-be-processed panel 2 in the irradiation tank 20 can be suppressed. Further, according to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel, the temperature of the panel 2 to be placed placed on the mounting surface 31 can be kept constant by the liquid in the stage 30. Therefore, according to the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel, the change of the temperature of the to-be-processed panel 2 in the irradiation tank 20 can be suppressed.

Further, according to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel, the window material 21 transmits light having a wavelength suitable for causing the liquid crystal layer 5 to exhibit a polymer-stabilized blue phase, and restricts transmission of other light, so that the panel to be processed is treated. 2 irradiation The polymer stabilized blue phase exhibits the minimum amount of light required. Therefore, according to the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel, even if the light-irradiation part 10 irradiates the to-be-processed panel 2 mounted on the mounting surface 31 with light, it can suppress that the process panel 2 is irradiated with unnecessary light. Happening. In particular, it is possible to suppress unnecessary light such as infrared rays that are irradiated to the panel 2 to be subjected to temperature changes. Thereby, the temperature rise of the to-be-processed panel 2 mounted on the mounting surface 31 can be suppressed. Therefore, according to the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel, the change of the temperature of the to-be-processed panel 2 in the irradiation tank 20 can be suppressed more reliably.

Further, according to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel, the gas is introduced into the chamber 40 that covers the irradiation tank 20. Therefore, the temperature of the gas in the chamber 40 can be kept substantially the same as the temperature in the irradiation tank 20. Therefore, according to the manufacturing apparatus 1 and the manufacturing method of a liquid crystal panel, temperature unevenness of the to-be-processed panel 2 can be suppressed.

Further, according to the manufacturing apparatus 1 and the method of manufacturing the liquid crystal panel, a gas having a fixed temperature is introduced into the chamber 40 covering the irradiation tank 20. Therefore, according to the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel, even if the temperature on the to-be-processed panel 2 at the time of the irradiation of light is large, for example, the difference of the temperature of the external gas of the manufacturing apparatus 1, such as 50 degreeC or 60 degreeC, it can suppress setting. The temperature of the panel to be processed 2 caused by the heat dissipation of the panel 2 to be processed in the irradiation tank 20 due to the temperature difference from the outside of the manufacturing apparatus 1 is changed.

Therefore, according to the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel, it is possible to suppress temperature unevenness of the panel 2 to be placed placed on the mounting surface 31, and it is possible to suppress a change in temperature of the panel 2 to be processed.

Further, according to the manufacturing apparatus 1, the color filter substrate 3 and the mounting surface are used. In the manner of 31-phase contact, the processed panel 2 is placed on the stage 30, and the light-irradiating portion 10 irradiates the opposite substrate 4 with light. Further, according to the manufacturing apparatus 1, the liquid crystal layer 5 contains a liquid crystal composition which exhibits a polymer-stabilized blue phase. Further, the light-irradiating portion 10 includes a rod-shaped lamp 11 having a main wavelength of 300 nm to 400 nm and an illuminance of light having a wavelength of 365 nm of 15 mW/cm 2 or less. Further, the liquid of the stage 30 and the gas introduced into the irradiation tank 20 are controlled such that the temperature on the panel 2 to be treated when the panel 2 is irradiated with light is set at a temperature of between 10 ° C and 70 ° C. Within ±0.5 °C. Therefore, according to the manufacturing apparatus 1, light is applied to the liquid crystal layer 5, and the polymer-stabilized blue phase can be surely exhibited.

Further, according to the manufacturing apparatus 1, the openings of the inlet port 51 and the discharge port 52 are disposed above the irradiation tank 20, so that it is difficult for the gas to directly contact the irradiation tank 20, and the temperature change of the gas in the irradiation tank 20 can be suppressed. Therefore, according to the manufacturing apparatus 1, the change in the temperature of the gas in the irradiation tank 20 can be further suppressed.

Further, when the temperature of the illuminated panel 2 placed on the mounting surface 31 of the stage 30 of the chamber 40 is maintained at a desired temperature, when the temperature of the chamber 40 is to be set to, for example, 60 ° C, The holding chamber 60 can also be set, for example, at 40 °C. Further, in consideration of a case where the temperature is lowered during the conveyance of the panel 2 to be processed from the heat retention chamber 60 to the chamber 40, the heat retention chamber 60 may be set to, for example, 80 °C.

Further, the circulation type air conditioning apparatus 50 provided on the chamber 40 and the circulation type air conditioning apparatus 70 provided on the heat retention chamber 60 may be constituted by only one of them. For example, the circulating chamber air cooling device 50 disposed on the chamber 40 may be used to maintain the chamber 40 and the heat insulating chamber 60 at equal temperatures, or may be used only. The circulating air conditioning unit 70 placed on the holding chamber 60 maintains the chamber 40 and the holding chamber 60 at equal temperatures. When only the circulation type air conditioning apparatus 50 is provided, for example, the circulation type air conditioning apparatus 50 provided on the chamber 40 is set to reach a desired temperature, and the temperature of the heat retention chamber 60 may be slightly lower than the chamber 40. temperature. Moreover, when only the circulation type air conditioning apparatus 70 is provided, for example, the circulating air conditioning apparatus 70 provided on the chamber 40 is set to reach a desired temperature, the temperature of the heat retention chamber 60 may be slightly higher than the cavity. The temperature of chamber 40.

Further, the circulation type air conditioning apparatus 50 provided on the chamber 40 and the circulation type air conditioning apparatus 70 provided on the heat retention chamber 60 may be the same apparatus. In this case, the gas fed from the circulation type air conditioning apparatus 50 can be made into, for example, the introduction port 51 of the chamber 40, the chamber 40, the discharge port 52, the introduction port 71 of the heat retention chamber 60, and the heat retention chamber 60. The order of the discharge ports 72 is cycled. Further, the gas sent from the circulation type air-conditioning apparatus 50 can be introduced, for example, into the introduction port 51 of the chamber 40 and the introduction port 71 of the heat retention chamber 60, via the chamber 40 and the heat retention chamber 60, in the chamber. The discharge port 52 of 40 and the discharge port 72 of the heat retention chamber 60 are merged and circulated in order.

Modification

Next, a manufacturing apparatus (hereinafter simply referred to as a manufacturing apparatus) 1-1 of a liquid crystal panel according to a modification of the embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a cross-sectional view showing a schematic configuration of a manufacturing apparatus of a liquid crystal panel according to a modification of the embodiment. In FIG. 5, the same reference numerals as in the above embodiment are denoted.

The manufacturing apparatus 1-1 of the modified example is as shown in FIG. 5, and does not include the heat insulating chamber. 60, and includes two chambers 40 and a chamber 40. Further, the rod-shaped lamp 11 and the mirror surface 12 of the light-irradiating portion 10 are disposed to be movable between a position indicated by a solid line in FIG. 5 and a position indicated by a broken line, that is, in the two chambers 40 and 40 The rod-shaped lamp 11 is movable to any one of the chamber 40, the platform 30 of the chamber 40, the mounting surface 31 of the platform 30, the processed panel 2 on the mounting surface 31, and the processed panel. 2 illuminate the light. Further, in each of the chambers 40 and the chambers 40, the loading/unloading port 44 for carrying out the loading and unloading of the to-be-processed panel 2, the to-be-processed panel 2 by the robot arm, and opening and closing by the shutter 43 and the gate 43 is provided, and the carrying out is carried out. The transfer port 44 is not provided, and the transfer path 45 and the transfer path 65 for transporting the processed panel 2 and the processed panel 2 are not provided between the chamber 40 and the chamber 40.

In the method of manufacturing a liquid crystal panel using the manufacturing apparatus 1-1 of the modification, the control element 80 alternately moves the rod lamp 11 and the mirror surface 12 of the light irradiation unit 10 to the two chambers 40 and 40, and the load is carried. The substrate 30 placed in the two chambers 40, the chamber 40, the mounting surface 31 of the stage 30, and the processed panel 2 on the mounting surface 31 are alternately irradiated with light. Further, in the method of manufacturing a liquid crystal panel using the manufacturing apparatus 1-1 of the modification, the control element 80 transports the processed panel 2 in one chamber 40 to which the light has been irradiated to the next step by using a robot arm or the like, and will The processed panel 2 before light irradiation is placed on the mounting surface 31 of the stage 30 in one of the chambers 40. Further, at the same time, the control element 80 positions the rod-shaped lamp 11 and the mirror surface 12 in the other chamber 40, and irradiates the processed panel 2 on the mounting surface 31 of the stage 30 of the other chamber 40 with light.

Furthermore, in the modified example, light is irradiated in the two chambers 40 and 40 The portion 10 that is not located on the upper side, that is, one chamber 40 on which the processed panel 2 is carried out or carried on the mounting surface 31 of the stage 30 corresponds to the heat retention chamber described in the claims. Further, in the modified example, among the two chambers 40 and 40, the light irradiation portion 10 is located on the upper side, that is, the side on which the processed panel 2 on the mounting surface 31 of the stage 30 is irradiated with light. The other chamber 40 is equivalent to the chamber described in the claim. In summary, in the variant, the two chambers 40, 40 are alternately equivalent to the chamber and the holding chamber described in the claims. In the modification, by alternately moving the rod lamp 11 and the mirror surface 12 of the light irradiation portion 10 to the two chambers 40 and the chamber 40, the chamber and the heat retention chamber can be as described in the claims. The processed panel 2 is movable.

Next, the effects of the manufacturing apparatus 1 and the manufacturing method of the liquid crystal panel of the said embodiment are confirmed. The results are shown in Fig. 6. Fig. 6 is a view showing changes in temperature of a panel to be processed according to a comparative example and an example of the present invention.

In the case shown in FIG. 6, the elapsed time from the processing of the panel 2 on the mounting surface 31 of the stage 30 of the chamber 40 is indicated by the horizontal axis, and the temperature of the panel 2 to be processed is indicated by the vertical axis. Further, in the case shown in Fig. 6, the set temperature was set to 50 °C. The example of the present invention shown by the solid line in Fig. 6 is the use of the manufacturing apparatus 1 disclosed in the embodiment, and the comparative example shown by the broken line in Fig. 6 is a case where only the chamber 40 is shown without using the heat insulating chamber 60. Manufacturing equipment.

According to the temperature change shown in FIG. 6, the comparative example took 60 seconds before the temperature of the panel 2 to be processed reached the temperature within the range of ±0.5 ° C of 50 ° C which is the set temperature. With respect to the comparative example as described above, it is understood that the temperature of the panel 2 is processed shortly after the panel 2 to be processed is placed on the mounting surface 31 of the stage 30. The degree reaches a temperature within a range of a set temperature of 50 ° C ± 0.5 ° C. Therefore, according to the results shown in FIG. 6, the present invention can irradiate the processed panel 2 with light after the panel 2 to be processed is placed on the mounting surface 31 of the stage 30 of the chamber 40, thereby improving the The productivity of the panel 2 is processed.

The embodiments of the present invention have been described, but the embodiments are intended to be illustrative, and are not intended to limit the scope of the invention. The above-described embodiments can be implemented in various other forms, and various omissions, substitutions and changes can be made without departing from the scope of the invention. The embodiments are intended to be included within the scope and spirit of the inventions

1‧‧‧Liquid panel manufacturing equipment

2‧‧‧Processed panels

10‧‧‧Lighting Department

11‧‧‧ rod light (light source)

12‧‧‧Mirror

13‧‧‧ gate

20‧‧‧Irrigation box

21‧‧‧ Window materials

30‧‧‧ platform

31‧‧‧Loading surface

32‧‧‧Liquid insulation cycle components

33‧‧‧Pipe

40‧‧‧ chamber

43, 63, 66‧‧ ‧ gate

44, 64‧‧‧ Move out of the entrance

45, 65‧‧‧Transportation path

50, 70‧‧‧Circulating air conditioning unit

51, 71‧‧‧ import port

52, 72‧‧‧Export

53, 73‧‧‧Air duct

60‧‧‧Insulation chamber

80‧‧‧Control elements

Claims (7)

A manufacturing apparatus for a liquid crystal panel, comprising: a light irradiation portion that emits light; and an irradiation box that includes a window material, wherein the window material transmits light from the light irradiation portion; the platform includes a mounting surface, and the opposite is a liquid that is temperature-controlled in a region where the light is irradiated is placed inside, wherein the mounting surface is disposed opposite to the window material and the processed panel is placed; the chamber, the package Covering the irradiation box and the platform; the circulation type air conditioning device includes an introduction port and a discharge port provided in the chamber, and the gas introduced from the introduction port is discharged from the discharge port, The temperature within the chamber is controlled; and the chamber is insulated, and the panel being treated is movable between the chamber and the chamber. The apparatus for manufacturing a liquid crystal panel according to claim 1, wherein the window material has a function of suppressing transmission of ultraviolet rays or infrared rays of a predetermined wavelength, or providing the ultraviolet rays to the predetermined wavelength and the The function of suppressing the transmission of both infrared rays. The apparatus for manufacturing a liquid crystal panel according to claim 1 or 2, wherein the processed panel comprises: a color filter substrate; and the opposite substrate is opposed to the color filter substrate; And a liquid crystal layer disposed on the color filter base Between the plate and the opposite substrate; and the processed panel is disposed on the platform such that the color filter substrate side is in contact with the mounting surface, and the light irradiation portion is The light to be processed is applied to the processed panel on the opposite substrate side. The apparatus for manufacturing a liquid crystal panel according to claim 3, wherein the liquid crystal layer contains at least a nematic liquid crystal composition, a liquid crystal composition exhibiting a blue phase, and a polymerizable monomer, and the liquid crystal layer is used The light is irradiated to reveal a polymer-stabilized blue phase. The apparatus for manufacturing a liquid crystal panel according to claim 1, wherein the light irradiation portion includes a main wavelength of 300 nm to 400 nm, and an illuminance of light having a wavelength of 365 nm on the mounting surface is less than or equal to 15mW/cm2 light source. The apparatus for manufacturing a liquid crystal panel according to claim 1, wherein the stage and the circulation type air conditioning apparatus are controlled such that the processed light is irradiated to the processed panel The temperature on the panel is within ±0.5 °C with respect to a set temperature between 10 °C and 70 °C. A method of manufacturing a liquid crystal panel, comprising: placing a panel to be processed on a mounting surface of a platform, wherein the platform allows a fixed temperature liquid to flow inside for temperature control; and accommodating the processed panel in the irradiation box Wherein the irradiation box includes a window material that is opposite to the mounting surface and that is irradiated with light from the light-irradiating portion; the chamber is configured to cover the platform and the irradiation box, wherein the chamber Provided with an inlet and a discharge port; While circulating the liquid at a fixed temperature in the platform, and introducing a medium having a fixed temperature from the introduction port into the chamber and discharging from the discharge port to circulate, while passing through the window material The light-irradiating portion irradiates light to the processed panel disposed on the mounting surface; wherein the processed panel is placed before the processed panel is placed on the mounting surface of the platform Positioning in the holding chamber.