JP6488950B2 - LCD panel manufacturing equipment - Google Patents

Description

  Embodiments described herein relate generally to a liquid crystal panel manufacturing apparatus.

  As a liquid crystal material used in a liquid crystal panel, a polymer stabilized blue phase (PSBP) which is an optically isotropic liquid crystal layer is compared with a liquid crystal material called a nematic phase when a voltage is applied. It is known that high-speed responsiveness can be realized. Such a polymer-stabilized blue phase appropriately controls the temperature of the panel to be processed and the irradiation time of the ultraviolet rays when the panel to be processed having a liquid crystal layer is irradiated with ultraviolet rays. Generated.

JP 2007-277531 A JP 2008-303381 A

FIG. 8 is a phase diagram for explaining the expression of the polymer-stabilized blue phase. In FIG. 8, the vertical axis indicates the phase change temperature (K), and the horizontal axis indicates the ultraviolet irradiation time (seconds). In FIG. 8, the curve L1 shows the boundary line between the isotropic liquid (Iso) and the blue phase (BP), and the curve L2 shows the boundary line between the chiral nematic phase (N ^* ) and the blue phase. . As shown in FIG. 8, the polymer-stabilized blue phase can be produced without generating an isotropic liquid and a chiral nematic phase by irradiating ultraviolet rays for a predetermined irradiation time while maintaining the panel to be processed at a predetermined temperature. Is generated.

  In the manufacturing process of a liquid crystal panel having a polymer-stabilized blue phase, the temperature unevenness in the in-plane direction of the irradiation surface of the panel to be processed, or the temperature of the panel to be processed, which occurs in the irradiation process of irradiating the panel with ultraviolet rays It is desirable to make the temperature uniform because the change over time has a great influence on the display characteristics of the liquid crystal panel.

  On the other hand, in the irradiation step, it is desirable to shorten the irradiation time for irradiating the panel to be treated with ultraviolet rays in order to increase the productivity of a liquid crystal panel having a polymer-stabilized blue phase.

  Therefore, an object of the present invention is to provide an apparatus for manufacturing a liquid crystal panel that suppresses an increase in the irradiation time of ultraviolet rays on a panel to be processed.

  An apparatus for manufacturing a liquid crystal panel according to an embodiment includes an irradiation unit that irradiates a panel to be processed with ultraviolet rays, and a mounting surface on which the panel to be processed is mounted, and a temperature control medium that adjusts the temperature of the mounting surface. And the irradiation unit so as to irradiate the panel to be processed with a second illuminance greater than the first illuminance after irradiating the panel to be processed with the first illuminance. And a control unit for controlling.

  ADVANTAGE OF THE INVENTION According to this invention, the lengthening of the irradiation time of the ultraviolet-ray with respect to a to-be-processed panel can be suppressed.

FIG. 1 is a schematic diagram showing an apparatus for manufacturing a liquid crystal panel according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a liquid crystal panel irradiated with ultraviolet rays using the liquid crystal panel manufacturing apparatus according to the first embodiment. FIG. 3 is a diagram for explaining the relationship between illuminance and irradiation time in the liquid crystal panel manufacturing apparatus according to the first embodiment. FIG. 4 is a diagram for explaining the measurement result of the temperature change of the panel to be processed with respect to the illuminance of ultraviolet rays in the first embodiment. FIG. 5 is a schematic diagram showing an apparatus for manufacturing a liquid crystal panel according to the second embodiment. FIG. 6 is a schematic diagram showing an apparatus for manufacturing a liquid crystal panel according to the third embodiment. FIG. 7 is a schematic view showing an apparatus for manufacturing a liquid crystal panel according to the fourth embodiment. FIG. 8 is a phase diagram for explaining the expression of the polymer-stabilized blue phase.

  A liquid crystal panel manufacturing apparatus 1 according to an embodiment described below includes an irradiation unit 10, a stage 30, and a control unit 60. The irradiation unit 10 irradiates the processing target panel 6 with ultraviolet rays. The stage 30 has a placement surface 31 on which the processed panel 6 is placed. In the stage 30, a temperature control medium that adjusts the temperature of the placement surface 31 flows inside. The control unit 60 controls the irradiating unit 10 to irradiate the panel 6 to be processed with a second illuminance greater than the first illuminance after irradiating the panel 6 with the first illuminance. .

  In the liquid crystal panel manufacturing apparatus 1 according to the embodiment described below, the irradiation time of the second illuminance is longer than the irradiation time of the first illuminance.

  In the liquid crystal panel manufacturing apparatus 1 according to the embodiment described below, the panel to be processed 6 includes a color filter substrate 7 as a first substrate, a counter substrate 8 as a second substrate, and a liquid crystal layer 9. And having. The color filter substrate 7 has a color filter. The counter substrate 8 faces the color filter substrate 7. The liquid crystal layer 9 is provided between the color filter substrate 7 and the counter substrate 8. In the panel 6 to be processed, one side of the color filter substrate 7 and the counter substrate 8 is placed on the stage 30. The irradiation unit 10 irradiates the liquid crystal layer 9 with ultraviolet rays from the other side of the color filter substrate 7 and the counter substrate 8.

  Moreover, the liquid crystal layer 9 of the panel 6 to be processed in the liquid crystal panel manufacturing apparatus 1 according to the embodiment described below includes a nematic liquid crystal composition, a liquid crystal composition expressing a blue phase, and a polymerizable monomer. The liquid crystal layer 9 develops a polymer-stabilized blue phase when irradiated with ultraviolet rays.

  In addition, the control unit 60 in the liquid crystal panel manufacturing apparatus according to the embodiment described below turns on only a part of the irradiation region of the irradiation unit 10 to irradiate with the first illuminance, and turns on the whole irradiation region. And control to irradiate with the second illuminance.

  Moreover, the irradiation part 82 in the manufacturing apparatus 2 of the liquid crystal panel which concerns on embodiment described below is the 1st light emitting element 87a as a 1st light source, The 2nd light emitting element 87b as a 2nd light source, Have The first light emitting element 87a emits ultraviolet rays with a first illuminance. The second light emitting element 87b irradiates ultraviolet rays with the second illuminance.

  Moreover, the liquid crystal panel manufacturing apparatus 4 according to the embodiment described below includes the first LED module 89a as the first light source and the second LED module 89b as the second light source, or the panel 6 to be processed. It further includes a moving mechanism 90 that moves. The control unit 60 controls the moving mechanism 90 to switch the relative position between the panel 6 to be processed and the first LED module 89a and the second LED module 89b.

  The irradiation unit 83 in the liquid crystal panel manufacturing apparatus 3 according to the embodiment described below includes an LED module 88. The LED module 88 includes a first irradiation area 88a and a second irradiation area 88b. The first irradiation region 88a irradiates ultraviolet rays with a first illuminance. The second irradiation region 88b irradiates ultraviolet rays with a second illuminance. The liquid crystal panel manufacturing apparatus 3 further includes a moving mechanism 90 that moves the LED module 88 or the panel 6 to be processed. The control unit 60 switches the relative positions of the panel 6 to be processed and the first irradiation area 88a and the second irradiation area 88b by controlling the moving mechanism 90.

(First embodiment)
A liquid crystal panel manufacturing apparatus according to an embodiment will be described below with reference to the drawings. FIG. 1 is a schematic diagram showing an apparatus for manufacturing a liquid crystal panel according to the first embodiment. FIG. 2 is a cross-sectional view schematically showing a liquid crystal panel irradiated with ultraviolet rays using the liquid crystal panel manufacturing apparatus according to the first embodiment.

(Configuration of LCD panel manufacturing equipment)
As shown in FIG. 1, the liquid crystal panel manufacturing apparatus 1 according to the first embodiment irradiates the liquid crystal layer of the liquid crystal panel by irradiating the panel 6 with ultraviolet rays while keeping the panel 6 to be processed at a constant temperature. A polymer-stabilized blue phase is developed. As shown in FIG. 2, a panel 6 to be processed irradiated with ultraviolet rays using the liquid crystal panel manufacturing apparatus 1 includes a color filter substrate 7 as a first substrate and a second substrate facing the color filter substrate 7. And a liquid crystal layer 9 provided between the color filter substrate 7 and the counter substrate 8.

  The color filter substrate 7 is formed by, for example, arranging color filters that transmit red, green, and blue light on the substrate and covering the color filters with a protective film. The counter substrate 8 is a substrate on which a plurality of electrodes are arranged in an array. The liquid crystal layer 9 includes at least a nematic liquid crystal composition, a liquid crystal composition expressing a blue phase, and a polymerizable monomer. The liquid crystal layer 9 develops a polymer-stabilized blue phase when irradiated with ultraviolet rays by the liquid crystal panel manufacturing apparatus 1.

  The nematic liquid crystal composition constituting the liquid crystal layer 9 is formed of a material having dielectric anisotropy.

  A liquid crystal composition exhibiting a blue phase is a temperature range that can stably exist, for example, at room temperature, specifically, 0 ° C. or higher, and is irradiated with ultraviolet rays, so that it is more than a nematic liquid crystal composition. It is a material that can realize high-speed response. For example, a liquid crystal composition exhibiting a blue phase is irradiated with ultraviolet rays in a state where the temperature is kept within ± 0.5 ° C. with respect to a predetermined set temperature between 10 ° C. and 70 ° C. Thus, the polymer-stabilized blue phase is evenly expressed. For example, when the set temperature is 55 ° C., the liquid crystal composition exhibiting a blue phase is irradiated with ultraviolet rays while the temperature is maintained within a range of 54.5 ° C. to 55.5 ° C. Thus, the polymer-stabilized blue phase is evenly expressed. When the set temperature is 60 ° C., the liquid crystal composition exhibiting a blue phase is irradiated with ultraviolet rays while the temperature is maintained within the range of 59.5 ° C. to 60.5 ° C. Thus, the polymer-stabilized blue phase is evenly expressed.

  The polymerizable monomer is a material for stabilizing the composition of a nematic liquid crystal composition or a liquid crystal composition that exhibits a polymer-stabilized blue phase.

  As shown in FIG. 1, the liquid crystal panel manufacturing apparatus 1 includes an irradiation unit 10 that irradiates ultraviolet rays, an irradiation box 20, a stage 30, a chamber 40, a circulation type air conditioner 50, and a control unit 60. Prepare.

  The irradiation unit 10 irradiates ultraviolet rays into the irradiation box 20. The irradiation box 20 is provided with a window material 21 that transmits ultraviolet rays irradiated from the irradiation unit 10. The irradiation unit 10 is configured to be able to irradiate ultraviolet rays through the window material 21 with respect to the processing panel 6 placed on the placement surface 31 of the stage 30 facing the window material 21. The irradiation unit 10 includes a plurality of ultraviolet lamps 11 serving as light sources, and a reflector 12 that reflects the ultraviolet rays irradiated by the ultraviolet lamps 11 toward the placement surface 31 of the stage 30.

The ultraviolet lamp 11 is a tube-type discharge lamp that extends in a straight line, such as a metal halide lamp that mainly irradiates ultraviolet rays, in which a metal halide such as mercury, iron or iodine, or a rare gas such as argon is enclosed. For example, the ultraviolet lamp 11 has a main wavelength of about 300 nm to 400 nm and an illuminance of ultraviolet light having a peak wavelength of 365 nm is 15 mW / cm ² or less. The “illuminance of ultraviolet rays” is a measurement value using UV-M02 (manufactured by Oak Manufacturing Co., Ltd.) as an illuminance meter and UV-SN35 (manufactured by Oak Manufacturing Co., Ltd.) as a light receiver.

  In addition, “ultraviolet rays” as used in the embodiments refers to light having a wavelength of 450 nm or less, specifically, light having a wavelength of 254 nm or 365 nm, which is an emission line of mercury sealed in the arc tube, but light having other wavelengths. Is also acceptable. The ultraviolet lamp 11 is not limited to an ultraviolet lamp that emits light of 450 nm or less. For example, the ultraviolet lamp 11 emits light having a wavelength longer than 450 nm as well as emitting light of 450 nm or less. There may be. In short, the light emission mode is not limited as long as it is an ultraviolet lamp that emits light of 450 nm or less.

  In the present embodiment, four ultraviolet lamps 11 are arranged above the panel 6 to be processed placed on the irradiation box 20, the stage 30, and the placement surface 31. Further, the ultraviolet lamp 11 is covered with a water-cooling jacket (not shown) through which ultraviolet rays radiated from the ultraviolet lamp 11 pass. The water cooling jacket is filled with cooling water, and the ultraviolet lamp 11 is maintained at a desired operating temperature by circulating the cooling water.

  In the irradiation unit 10, a shutter 13 that blocks ultraviolet rays is provided between the ultraviolet lamp 11 and the irradiation box 20 so as to be openable and closable. The shutter 13 is opened and closed to block the state in which the ultraviolet rays radiated from the ultraviolet lamp 11 are radiated to the processing panel 6 placed on the placement surface 31 of the stage 30 and the ultraviolet rays radiated from the ultraviolet lamp 11. Thus, the panel 6 is switched to a state in which the panel 6 is not irradiated with ultraviolet rays.

  The irradiation box 20 is formed in a box shape, and is disposed on the stage 30 so as to accommodate the panel 6 to be processed placed on the placement surface 31 of the stage 30 therein.

  The window material 21 has a function of limiting transmission of ultraviolet rays having a predetermined wavelength. The window material 21 transmits ultraviolet light having a wavelength suitable for the liquid crystal layer 9 to exhibit a polymer-stabilized blue phase, and restricts transmission of ultraviolet light having other wavelengths.

  The stage 30 has a placement surface 31 on which the processing panel 6 is placed. The stage 30 is placed on the placement surface 31 by circulating water as a temperature control medium having a constant temperature. The temperature of the processed panel 6 is controlled. The stage 30 is supplied with a liquid having a constant temperature in order to control the temperature of the area on the placement surface 31 where the ultraviolet rays are irradiated. The stage 30 is provided with a placement surface 31 so as to face the window material 21, and the placement surface 31 faces the irradiation unit 10. Note that the temperature at which the processing panel 6 placed on the placement surface 31 is kept warm is desirably as constant as possible, and the temperature of the processing panel 6 placed on the placement surface 31 is kept constant. As long as it is a thing, the temperature of the temperature control medium circulating through the stage 30 may be slightly lower or slightly higher than the temperature of the panel 6 to be processed placed on the placement surface 31. The temperature control medium is not limited to liquids such as water, and fluids containing various gases may be circulated.

  On the stage 30, the panel 6 is placed so that the color filter substrate 7 side is in contact with the placement surface 31. For this purpose, the irradiation unit 10 irradiates the panel 6 to be processed with ultraviolet rays from the counter substrate 8 side. In addition, the direction which irradiates the to-be-processed panel 6 with an ultraviolet-ray is not limited, An ultraviolet-ray may be irradiated from the color filter substrate 7 side as needed.

  The stage 30 is formed in a flat plate shape, for example, by an aluminum alloy or the like, and a circulation path (not shown) for circulating a liquid for adjusting the processing target panel 6 to a predetermined temperature is provided therein. The circulation path of the stage 30 is connected to a liquid thermal circulator 32 that circulates liquid in the circulation path. The liquid thermal circulator 32 keeps the temperature of the panel 6 to be processed through the stage 30 constant. It is. The liquid thermal circulation device 32 includes, for example, a pipe 33 (see FIG. 1) connected to the circulation path, a heater and a cooling device for keeping the liquid at a constant temperature, a pump for sending the liquid in the pipe 33, and the like. Configured.

  The chamber 40 is formed in a box shape that covers the whole of the irradiation box 20 and the stage 30, and the irradiation unit 10 is arranged on the upper part.

  As shown in FIG. 1, the circulation type air conditioner 50 is provided on the side wall of the chamber 40, and introduces the temperature adjustment gas into the chamber 40 and the introduction port 51 for introducing the temperature adjustment gas into the chamber 40. And a discharge port 52. The introduction port 51 and the discharge port 52 are open on the side wall of the chamber 40 and are disposed above the irradiation box 20. The circulation type air conditioner 50 controls the inside of the chamber 40 to a predetermined temperature by circulating a temperature adjusting gas to the inside of the chamber 40 through the introduction port 51 and the discharge port 52. By controlling the temperature in the chamber 40 in this manner, the circulation type air conditioner 50 keeps the temperature of the panel 6 to be processed in the irradiation box 20 at a constant temperature.

  The circulation type air conditioner 50 includes a blower pipe 53 connected to the introduction port 51 and the discharge port 52, a heater and a cooling device for keeping the gas at a constant temperature, and a blower that sends out the gas in the blower tube 53. Etc., and the gas is circulated in the order of the inlet 51, the chamber 40, and the outlet 52.

  It is desirable that the temperature of the gas circulated in the order of the introduction port 51, the chamber 40, and the discharge port 52 be as equal as possible to the temperature at which the panel 6 to be processed placed on the placement surface 31 is maintained. Moreover, if the to-be-processed panel 6 mounted on the mounting surface 31 is maintained at a constant temperature, the temperature of the circulating gas is higher than the temperature of the to-be-processed panel 6 mounted on the mounting surface 31. May be a slightly lower temperature or a slightly higher temperature. The gas temperature is only a target temperature and may be different from the actual temperature.

  Further, for example, in the vicinity of the discharge port 52, the temperature of the liquid flowing along the circulation path provided in the stage 30, the cooling water circulating through the water cooling jacket, the gas circulating through the chamber 40, or the like is detected. A temperature sensor (not shown) is provided. For example, a flow rate sensor that detects the flow rate of the gas introduced from the introduction port 51 into the chamber 40 is provided near the introduction port 51.

  Further, the chamber 40 is provided with a carry-in / out port 44 through which the panel 6 to be processed is taken in and out of the irradiation box 20 in the chamber 40. A shutter 43 is provided at the carry-in / out entrance 44 so as to be openable and closable. In the carry-in / out port 44, the shutter 43 is opened when the processed panel 6 is taken in and out of the irradiation box 20 of the chamber 40, and the shutter 43 is closed when the processed panel 6 is accommodated in the irradiation box 20. In addition, the panel 6 to be processed is put into and out of the chamber 40 using a robot arm (not shown) through the carry-in / out port 44.

  The controller 60 controls the irradiation operation of the ultraviolet rays by the liquid crystal panel manufacturing apparatus 1. The control unit 60 is connected to the liquid thermal insulation circulation device 32, the circulation type air conditioner 50, the irradiation unit 10, and the like. The control unit 60 includes, for example, a control circuit provided with an arithmetic processing unit configured with a CPU and the like, and a microprocessor (not shown) having a semiconductor memory such as a ROM and a RAM. The control unit 60 is connected to a display unit that displays the status of the processing operation and an operation unit that is used by an operator to register processing content information and the like.

  The control unit 60 opens the shutter 13 when irradiating the processing panel 6 placed on the placement surface 31 of the stage 30 with ultraviolet rays from the irradiating unit 10, and opens the shutter 13 based on the detection result of the temperature sensor or the like. By controlling the temperature of the cooling water filled in the water-cooling jacket covering the lamp 11, the ultraviolet lamp 11 is maintained at a desired operating temperature. Further, the control unit 60 opens the shutter 13 and irradiates the panel 6 to be processed placed on the placement surface 31 of the stage 30 from the irradiation unit 10 based on the detection result of the temperature sensor or the like. Then, the temperature of the liquid circulating through the stage 30 is kept constant by controlling the liquid heat-retaining / circulating device 32. At the same time, the control unit 60 controls the circulation type air conditioner 50 based on the detection result of the temperature sensor or the like to keep the temperature of the gas circulating in the chamber 40 constant. Thereby, the control unit 60 keeps the temperature of the panel 6 to be processed placed on the placement surface 31 of the stage 30 constant.

  For example, when irradiating the processing panel 6 with ultraviolet rays from the irradiation unit 10, the control unit 60 sets the temperature of the processing panel 6 when the ultraviolet rays are irradiated to a predetermined set temperature between 10 ° C. and 70 ° C. On the other hand, the stage 30 and the circulation type air conditioner 50 are controlled so as to be within ± 0.5 ° C. That is, keeping the temperature of the panel 6 to be processed placed on the placement surface 31 of the stage 30 constant means that the temperature is within ± 0.5 ° C. with respect to a predetermined set temperature between 10 ° C. and 70 ° C. Pointing to keep in. For example, when the set temperature is 55 ° C., the control unit 60 controls the liquid heat-retaining / circulating device 32 so that the temperature of the panel 6 to be processed is maintained within the range of 54.5 ° C. to 55.5 ° C. The temperature of the liquid to be circulated and the temperature in the irradiation box 20 are controlled. Further, when the set temperature is 60 ° C., the control unit 60 uses the liquid heat and circulation device 32 so that the temperature of the panel 6 to be processed is maintained within the range of 59.5 ° C. to 60.5 ° C. The temperature of the liquid to be circulated and the flow rate and temperature of the gas introduced into the irradiation box 20 are controlled.

(Operation to irradiate the liquid crystal panel with ultraviolet rays in the liquid crystal panel manufacturing equipment)
Next, the process of irradiating the panel 6 to be treated with ultraviolet rays using the liquid crystal panel manufacturing apparatus 1 of the first embodiment will be described. First, when the processing content information is registered in the control unit 60 by the operator and a processing operation start instruction is given, the processing operation is started. When the processing operation starts, the shutter 43 of the chamber 40 is opened, and the processed panel 6 is mounted on the mounting surface 31 of the stage 30 of the chamber 40 using a robot arm or the like through the carry-in / out port 44. Then, the control unit 60 closes the shutter 43 and circulates the liquid in the stage 30 through the pipe 33, and introduces gas into the chamber 40 through the inlet 51 and discharges it from the outlet 52.

  Subsequently, the control unit 60 turns on the ultraviolet lamp 11 and opens the shutter 13. The control unit 60 circulates the gas by circulating a liquid at a constant temperature in the stage 30 and introducing a constant gas into the chamber 40 from the introduction port 51 and discharging it from the discharge port 52. And the control part 60 irradiates the to-be-processed panel 6 mounted in the mounting surface 31 with the ultraviolet-ray which the irradiation part 10 radiates | emits for a predetermined time through the window material 21 with fixed 1st illumination intensity. After irradiating ultraviolet rays for a predetermined time at a constant first illuminance, the controller 60 irradiates the panel 6 to be processed with a constant second illuminance for a predetermined time.

FIG. 3 is a diagram for explaining the relationship between illuminance and irradiation time in the liquid crystal panel manufacturing apparatus according to the first embodiment. In FIG. 3, the vertical axis represents the illuminance (mW / cm ² ) of ultraviolet rays, and the horizontal axis represents the irradiation time (seconds) of ultraviolet rays.

As an example, the ratio of the polymer-stabilized blue phase to the entire liquid crystal layer 9 is increased by irradiating ultraviolet rays having a peak wavelength of 365 nm at a first illuminance of ² mW / cm ^{2 for} 20 seconds as shown in FIG. Irradiation is performed for a predetermined irradiation time at a first illuminance that generates a polymer-stabilized blue phase with a relatively small illuminance until it reaches about 70% to about 80%, and then the second illuminance is 10 mW / cm. ^By irradiating at ^{2 for} 40 seconds, the remainder of the liquid phase layer is reacted to form a polymer-stabilized blue phase and the remaining polymerizable monomer is removed. In the present embodiment, the irradiation is performed with the second illuminance that is five times the first illuminance and for the irradiation time that is twice the irradiation time with the first illuminance.

  In this way, in the irradiation step, irradiation is performed with a relatively small first illuminance for the first several tens of seconds, and then irradiation is performed with a relatively large second illuminance. The irradiation time, which took nearly several hundred seconds, was reduced to 60 seconds. In addition, after irradiation with the first illuminance until the ratio of the polymer-stabilized blue phase to the entire liquid crystal layer 9 is about 70% or more, the second illuminance is longer than the irradiation time of the first irradiation. By performing irradiation for the irradiation time, the irradiation time of the ultraviolet rays with respect to the panel 6 to be processed is effectively shortened.

As described above, by appropriately switching between the first illuminance and the second illuminance, the polymer-stabilized blue phase was properly generated, but without irradiation with the first illuminance of ² mW / cm ² . When the irradiation is performed at the second illuminance of 10 mW / cm ² from the beginning, the temperature of the panel 6 to be processed increases significantly due to the irradiation of ultraviolet rays. As a result, an isotropic liquid other than the blue phase is expressed, and there is a disadvantage in that the display characteristics of the liquid crystal panel are deteriorated and the display characteristics are uneven.

  In addition, it is not limited to each irradiation time in the magnitude | size of the 1st and 2nd illumination intensity mentioned above and the 1st and 2nd illumination intensity, You may set suitably according to the to-be-processed panel 6, respectively. In addition, after irradiating with the first illuminance for a predetermined time, the control unit 60 may perform control so that the illuminance gradually increases from the first illuminance to the second illuminance. Moreover, after irradiating with 2nd illumination intensity only for the predetermined time as needed, you may irradiate with 3rd illumination intensity larger than 2nd illumination intensity.

  After irradiating the panel 6 to be processed with the second illuminance for a predetermined time, the control unit 60 closes the shutter 13 and opens the shutter 43 of the chamber 40. Then, the processed panel 6 is removed from the placement surface 31 of the stage 30 in the irradiation box 20 of the chamber 40 using a robot arm or the like, and the processed panel 6 is moved through the carry-in / out port 44 to the next step in the liquid crystal panel manufacturing process. Transport to.

  FIG. 4 is a diagram for explaining the measurement result of the temperature change of the panel 6 to be processed with respect to the illuminance of ultraviolet rays in the first embodiment.

As shown in FIG. 4, when the temperature of the panel 6 to be processed is set to 45 ° C., there is a fluctuation range that is a difference between the maximum temperature and the minimum temperature when the panel is irradiated with the first illuminance of ² mW / cm ^2. It was 0.6 ° C. Moreover, the fluctuation range which is a difference between the maximum temperature and the minimum temperature when irradiated at 10 mW / cm ² which is the second illuminance was 2.0 ° C. Next, when the temperature of the panel 6 to be processed is set to 55 ° C., the fluctuation range that is the difference between the maximum temperature and the minimum temperature when irradiated with the first illuminance of ² mW / cm ² is 0.7 ° C. Met. In addition, the fluctuation range, which is the difference between the maximum temperature and the minimum temperature, was 2.1 ° C. when irradiated with the second illuminance of 10 mW / cm ² .

  Therefore, when irradiation was performed with the first illuminance, the temperature of the panel 6 to be processed was suppressed within a range of ± 0.5 ° C. with respect to the set temperature. Further, when the irradiation was performed with the second illuminance, the temperature of the panel 6 to be processed was suppressed within a range of about ± 1.0 ° C. with respect to the set temperature.

  As described above, in the first embodiment, after the panel 6 is irradiated with ultraviolet rays with the first illuminance, the panel 6 is irradiated with ultraviolet rays with a second illuminance greater than the first illuminance. The control unit 60 for controlling the irradiation unit 10 is provided. Thereby, lengthening of the irradiation time which irradiates the to-be-processed panel 6 with an ultraviolet-ray can be suppressed.

  Moreover, in 1st Embodiment, the lengthening of the irradiation time of the ultraviolet-ray with respect to the to-be-processed panel 6 can be suppressed by making irradiation time of 2nd illumination intensity longer than irradiation time of 1st illumination intensity. .

  In addition, the liquid crystal panel manufacturing apparatus 1 according to the first embodiment includes a stage 30 through which a temperature control medium that adjusts the temperature of the mounting surface 31 on which the panel 6 is mounted flows. Thereby, it becomes possible to irradiate the to-be-processed panel 6 with ultraviolet rays while adjusting the temperature of the to-be-processed panel 6. As a result, it is possible to keep the temperature of the panel 6 to be treated at the time of irradiation with ultraviolet rays, and it is possible to improve the quality of the liquid crystal panel.

  Moreover, the to-be-processed panel 6 in 1st Embodiment has the liquid crystal layer 9 containing the nematic liquid crystal composition, the liquid crystal composition which expresses a blue phase, and a polymerizable monomer. Thereby, the to-be-processed panel 6 can express a polymer stabilization blue phase by irradiating with ultraviolet rays.

  In addition, although the irradiation part 10 in 1st Embodiment was comprised using the some ultraviolet lamp 11, instead of the ultraviolet lamp 11, the some light emitting element which is LED was arranged on the plane as a light source. An LED module (not shown) may be used. By switching the illuminance using the LED module as the light source in this way, when dimming from the first illuminance to the second illuminance, the stabilization time until the second illuminance stabilizes is within a few seconds. The stability of the irradiation process can be increased.

  Moreover, when the irradiation part 10 is a structure using an LED module, you may be comprised so that a 1st illumination intensity and a 2nd illumination intensity may be switched by changing the lighting state of a several light emitting element. In this case, the control unit 60 performs irradiation with the first illuminance by lighting only some of the plurality of light emitting elements included in the LED module. Subsequently, the controller 60 performs irradiation with the second illuminance by lighting all of the plurality of light emitting elements included in the LED module. According to the configuration for changing the lighting state in this way, the first illuminance and the second illuminance can be obtained only by controlling the lighting state of the light emitting element with a simple configuration without dimming the illuminance of each light emitting element. Can be switched. Similarly to this configuration, the control unit 60 performs irradiation with the first illuminance by turning on only a part of the plurality of ultraviolet lamps 11, and turns on the second by turning on all of the plurality of ultraviolet lamps 11. It may be configured to perform irradiation with an illuminance of.

  Hereinafter, a liquid crystal panel manufacturing apparatus according to another embodiment will be described with reference to the drawings. In other embodiments, the same components as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and the description thereof is omitted.

(Second Embodiment)
FIG. 5 is a schematic diagram showing an apparatus for manufacturing a liquid crystal panel according to the second embodiment. In the modification of the first embodiment, the LED module is used to perform irradiation with the first illuminance and the second illuminance by switching the lighting state of a plurality of light emitting elements having the same illuminance. The second embodiment is different from the first embodiment in that an LED module having a plurality of light emitting elements having different illuminances is used.

  As shown in FIG. 5, the irradiation part 82 which the manufacturing apparatus 2 of the liquid crystal panel of 2nd Embodiment has has the LED module 87 which each irradiates the to-be-processed panel 6 with a 1st illumination intensity and a 2nd illumination intensity. Have.

  The LED module 87 according to the second embodiment includes a plurality of first light emitting elements 87a serving as a first light source that irradiates ultraviolet rays with a first illuminance, and ultraviolet rays with a second illuminance greater than the first illuminance. A plurality of second light emitting elements 87b as second light sources to be irradiated. In the LED module 87, the plurality of first light emitting elements 87a and the plurality of second light emitting elements 87b arranged on a plane are, for example, arranged in a lattice pattern or alternately in a predetermined direction. As the first and second light emitting elements 87a and 87b, ultraviolet LEDs are used.

  The LED module 87 includes a substrate on which a base material is formed of, for example, ceramics. As the base material of the substrate, when ensuring reflection characteristics on the substrate, white alumina having high reflectance is desirable, and when ensuring higher heat dissipation performance, aluminum nitride having high thermal conductivity is desirable. Further, although not shown, a conductive pattern made of Ag or the like for energizing the first and second light emitting elements 87a and 87b is formed on the ceramic substrate. The conductive pattern is covered with an inorganic material mainly composed of glass or the like in order to ensure insulation and prevent corrosion, except for the mounting portion and the power feeding portion. The substrate is provided with a heat radiating member made of aluminum, and is cooled using a water cooling structure so that the heat radiating member is maintained at a constant temperature.

(Switching of illuminance in the second embodiment)
The controller 60 irradiates the panel 6 with ultraviolet rays with the first illuminance by turning on only the first light emitting element 87 a of the LED module 87. Subsequently, the control unit 60 turns on only the second light emitting element 87b of the LED module 87, thereby irradiating the panel 6 with ultraviolet rays with the second illuminance.

  In addition, the second embodiment is not limited to the configuration in which only the second light emitting element 87b is turned on when irradiation is performed with the second illuminance. In addition to lighting the second light emitting element 87b, a part or all of the first light emitting element 87a may be turned on.

  According to the second embodiment, the first illuminance can be obtained by switching the lighting state of the first light emitting element 87a and the second light emitting element 87b without dimming the individual light emitting elements 87a, 87b. The second illuminance can be switched.

  Also in the second embodiment, as in the first embodiment, it is possible to suppress an increase in the irradiation time for irradiating the panel 6 to be treated with ultraviolet rays.

(Third embodiment)
FIG. 6 is a schematic diagram showing an apparatus for manufacturing a liquid crystal panel according to the third embodiment. The third embodiment is different from the first embodiment in that an LED module having a plurality of irradiation areas with different illuminances is used.

  As shown in FIG. 6, the irradiation part 83 which the manufacturing apparatus 3 of the liquid crystal panel of 3rd Embodiment has is the LED module 88 which irradiates the to-be-processed panel 6 with a 1st illumination intensity and a 2nd illumination intensity, respectively. And a moving mechanism 90 that moves the LED module 88 relative to the panel 6 to be processed.

  The LED module 88 includes a first irradiation region 88a that irradiates the panel 6 with ultraviolet rays with a first illuminance, and a second irradiation region 88b that irradiates the panel 6 with ultraviolet rays with a second illuminance. Have. The first irradiation region 88a and the second irradiation region 88b are provided adjacent to each other in the direction A in FIG. In addition, a plurality of light emitting elements are arranged in the first and second irradiation regions 88a and 88b, respectively. The light emitting element disposed in the second irradiation region 88b has higher illuminance than the light emitting element disposed in the first irradiation region 88a, and the second irradiation region 88b may irradiate ultraviolet rays with the second illuminance. It is possible.

  Further, the LED module 88 is provided so as to be movable along the A direction by the moving mechanism 90. Although not shown, the moving mechanism 90 includes, for example, a guide rail provided along the A direction and a drive mechanism that drives the LED module 88 in the A direction along the guide rail. The control unit 60 controls the moving mechanism 90 to move the first and second irradiation regions 88a and 88b with respect to the processing target panel 6, and the processing target panel 6 and the first and second irradiations. The relative position with the regions 88a and 88b is switched. In addition, the control unit 60 interlocks with the operation of moving the first and second irradiation regions 88a and 88b to the position facing the panel 6 to be processed, and the first and second irradiations facing the panel 6 to be processed. Control may be performed so that only one of the regions 88a and 88b is lit.

(Switching of illuminance in the third embodiment)
In the third embodiment, the control unit 60 controls the moving mechanism 90 so that the first irradiation region 88a of the LED module 88 is moved to a position on the stage 30 facing the panel 6 to be processed. Irradiation is performed at a first illuminance by one irradiation region 88a. Subsequently, the control unit 60 controls the moving mechanism 90 to move the second irradiation region 88b to a position facing the panel 6 to be processed, and the second irradiation region 88b performs irradiation with the second illuminance. Do.

  According to the third embodiment, by adjusting the positions of the first irradiation region 88a and the second irradiation region 88b so as to face the processing panel 6 without dimming each light emitting element, It is possible to switch between the first illuminance and the second illuminance.

  Also in the third embodiment, as in the first and second embodiments, it is possible to suppress an increase in the irradiation time during which the panel 6 is irradiated with ultraviolet rays.

(Fourth embodiment)
FIG. 7 is a schematic view showing an apparatus for manufacturing a liquid crystal panel according to the fourth embodiment. The fourth embodiment is different from the first embodiment in that a plurality of LED modules having different illuminances are used and that the panel 6 to be processed placed on a plurality of stages is irradiated.

  As shown in FIG. 7, the irradiation part 84 which the manufacturing apparatus 4 of the liquid crystal panel of 4th Embodiment has is the 1st LED module 89 as a 1st light source, and 2nd LED as a 2nd light source. A module 89b, and a moving mechanism 90 that moves the first LED module 89a and the second LED module 89b relative to the panel 6 to be processed.

  Further, as shown in FIG. 7, the liquid crystal panel manufacturing apparatus 4 of the fourth embodiment includes two chambers 40 and 40. In addition, the irradiation unit 84 is provided so as to be movable over the two chambers 40, 40, and the light irradiation unit 84 is on the placement surfaces 31, 31 of the stages 30, 30 of one of the chambers 40, 40. The panels 6 and 6 are irradiated with light. Further, the chambers 40 and 40 are respectively provided with loading / unloading ports 44 and 44 through which the processed panels 6 and 6 are put in and out by the robot arm and opened and closed by the shutters 43 and 43.

  In the first LED module 89a, a plurality of light emitting elements that irradiate the panel 6 with ultraviolet rays with a first illuminance are arranged on a plane. In the second LED module 89b, a plurality of light emitting elements that irradiate the processing panel 6 with ultraviolet rays with a second illuminance are arranged on a plane. The first LED module 89a and the second LED module 89b are provided adjacent to each other in the direction A in FIG.

  The first and second LED modules 89a and 89b are provided so as to be movable along the A direction by the moving mechanism 90. The control unit 60 controls the moving mechanism 90 to move the first and second LED modules 89a and 89b relative to the panel 6 to be processed, and the panel 6 and the first and second LEDs. The relative position with the modules 89a and 89b is switched.

(Switching of illuminance in the fourth embodiment)
In the fourth embodiment, the control unit 60 controls the moving mechanism 90 to move the first LED module 89a to a position facing the processing target panel 6 on the stage 30, and thereby the first LED module. Irradiation is performed with a first illuminance by 89a. Subsequently, the control unit 60 controls the moving mechanism 90 to move the second LED module 89b to a position facing the panel 6 to be processed, and the second LED module 89b performs irradiation with the second illuminance. Do.

  According to the fourth embodiment, by adjusting the positions of the first LED module 89a and the second LED module 89b so as to face the processing target panel 6 without dimming individual light emitting elements, It is possible to switch between the first illuminance and the second illuminance.

  Also in the fourth embodiment, as in the first to third embodiments, it is possible to suppress an increase in the irradiation time for irradiating the panel 6 to be treated with ultraviolet rays.

  Moreover, in 4th Embodiment, it can irradiate with respect to the to-be-processed panel 6. As shown in FIG. Furthermore, in 4th Embodiment, when the irradiation part 84 is irradiating with respect to one to-be-processed panel 6, for example, the other to-be-processed panel 6 uses a robot arm (not shown). The chamber 40 is taken in and out. At this time, the other panel 6 to be processed may be mounted on the mounting surface 31 of the stage 30, or after the other panel 6 to be processed is mounted on the mounting surface 31 of the stage 30, the other panel is processed. The stage 30 and the circulation type air conditioner 50 may be controlled so that the temperature of the panel 6 is within ± 0.5 ° C. with respect to a predetermined set temperature in the range of 10 ° C. to 70 ° C. That is, when the irradiation part 84 is irradiating with respect to one to-be-processed panel 6, the other to-be-processed panel 6 can irradiate immediately immediately after irradiating with respect to one to-be-processed panel 6. FIG. Therefore, it is possible to further suppress an increase in the irradiation time for irradiating the panel 6 to be treated with ultraviolet rays. In addition, when the first LED module 89a irradiates one panel to be treated 6 with ultraviolet rays at the first illuminance, the second LED module 89b emits ultraviolet rays to the other panel to be treated 6 with the second illuminance. May be irradiated. By doing in this way, lengthening of the irradiation time which irradiates the to-be-processed panel 6 with an ultraviolet-ray can further be suppressed.

  Further, as a modification of the third and fourth embodiments, the panel 6 to be processed may be moved with respect to the irradiation units 83 and 84. In this case, for example, the chamber 40 in which the processing target panel 6 is disposed may be configured to be moved with respect to the irradiation units 83 and 84 by a moving mechanism.

  Although the embodiments of the present invention have been described, the embodiments are presented as examples and are not intended to limit the scope of the present invention. The embodiment can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. The embodiments and modifications thereof are included in the scope of the present invention and the gist thereof, and are also included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus of liquid crystal panel 6 Panel to be processed 7 Color filter substrate 8 Counter substrate 9 Liquid crystal layer 10 Irradiation part 11 Ultraviolet lamp 30 Stage 31 Mounting surface 60 Control part 87 LED module 90 Moving mechanism

Claims (8)

An apparatus for manufacturing a liquid crystal panel that expresses a polymer-stabilized blue phase by irradiating ultraviolet rays,
An irradiation section for irradiating the panel to be treated with ultraviolet rays;
A stage having a mounting surface on which the panel to be processed is mounted, and a temperature control medium for adjusting the temperature of the mounting surface flowing in the interior;
A controller that controls the irradiating unit to irradiate the panel to be processed with a second illuminance greater than the first illuminance after irradiating the panel with the first illuminance;
An apparatus for manufacturing a liquid crystal panel comprising:   2. The liquid crystal panel manufacturing apparatus according to claim 1, wherein an irradiation time of the second illuminance is longer than an irradiation time of the first illuminance. The panel to be processed includes a first substrate having a color filter, a second substrate facing the first substrate, and a liquid crystal layer provided between the first substrate and the second substrate. And having
In the panel to be processed, one side of the first substrate and the second substrate is placed on the stage,
The liquid crystal panel manufacturing apparatus according to claim 1, wherein the irradiation unit irradiates the liquid crystal layer with ultraviolet rays from the other side of the first substrate and the second substrate. The liquid crystal layer includes a nematic liquid crystal composition, a liquid crystal composition exhibiting a blue phase, including a polymerizable monomer, the manufacturing apparatus of the liquid crystal panel according to claim 3.   The control unit controls to turn on only a part of the irradiation region of the irradiation unit and irradiate with the first illuminance, and to turn on the entire irradiation region and irradiate with the second illuminance. The manufacturing apparatus of the liquid crystal panel of any one of Claim 1 thru | or 4.   The said irradiation part has a 1st light source which irradiates an ultraviolet-ray with the said 1st illumination intensity, and a 2nd light source which irradiates an ultraviolet-ray with the said 2nd illumination intensity, The any one of Claim 1 thru | or 4 An apparatus for manufacturing a liquid crystal panel according to 1. A moving mechanism for moving the first light source and the second light source, or the panel to be processed;
The said control part is a manufacturing apparatus of the liquid crystal panel of Claim 6 which switches the relative position of the said to-be-processed panel and a said 1st light source and a said 2nd light source by controlling the said moving mechanism. The irradiation unit includes a light source having a first irradiation region that irradiates ultraviolet rays with the first illuminance and a second irradiation region that irradiates ultraviolet rays with the second illuminance,
A moving mechanism for moving the light source or the panel to be processed;
5. The control unit according to claim 1, wherein the control unit switches a relative position between the panel to be processed and the first irradiation region and the second irradiation region by controlling the moving mechanism. An apparatus for manufacturing a liquid crystal panel according to 1.

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