TW201444752A - 真空吸盤及裝設有真空吸盤之支架型真空吸附設備 - Google Patents

真空吸盤及裝設有真空吸盤之支架型真空吸附設備 Download PDF

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Publication number
TW201444752A
TW201444752A TW102117513A TW102117513A TW201444752A TW 201444752 A TW201444752 A TW 201444752A TW 102117513 A TW102117513 A TW 102117513A TW 102117513 A TW102117513 A TW 102117513A TW 201444752 A TW201444752 A TW 201444752A
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TW
Taiwan
Prior art keywords
ring portion
workpiece
friction pad
vacuum
outer ring
Prior art date
Application number
TW102117513A
Other languages
English (en)
Chinese (zh)
Other versions
TWI561451B (enExample
Inventor
Jen-Chieh Wang
Original Assignee
Utechzone Co Ltd
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Publication date
Application filed by Utechzone Co Ltd filed Critical Utechzone Co Ltd
Priority to TW102117513A priority Critical patent/TW201444752A/zh
Publication of TW201444752A publication Critical patent/TW201444752A/zh
Application granted granted Critical
Publication of TWI561451B publication Critical patent/TWI561451B/zh

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW102117513A 2013-05-17 2013-05-17 真空吸盤及裝設有真空吸盤之支架型真空吸附設備 TW201444752A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102117513A TW201444752A (zh) 2013-05-17 2013-05-17 真空吸盤及裝設有真空吸盤之支架型真空吸附設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102117513A TW201444752A (zh) 2013-05-17 2013-05-17 真空吸盤及裝設有真空吸盤之支架型真空吸附設備

Publications (2)

Publication Number Publication Date
TW201444752A true TW201444752A (zh) 2014-12-01
TWI561451B TWI561451B (enExample) 2016-12-11

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ID=52706878

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Application Number Title Priority Date Filing Date
TW102117513A TW201444752A (zh) 2013-05-17 2013-05-17 真空吸盤及裝設有真空吸盤之支架型真空吸附設備

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TW (1) TW201444752A (enExample)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3171343B2 (ja) * 1991-09-11 2001-05-28 エスエムシー株式会社 真空吸着パッド及びその製造方法
JP4724562B2 (ja) * 2003-11-21 2011-07-13 三星ダイヤモンド工業株式会社 真空吸着ヘッド、その真空吸着ヘッドを用いた真空吸着装置及びテーブル
TWM266374U (en) * 2004-10-14 2005-06-01 Utechzone Co Ltd Improved vacuum suction device
TWM355236U (en) * 2008-11-28 2009-04-21 Syn Mate Co Ltd Carrier platform structure for vacuum suction apparatus
DE102011106347B4 (de) * 2011-07-01 2014-07-10 Festo Ag & Co. Kg Vakuum-Spannvorrichtung mit integriertem Werkstück-Abstützkörper
CN202429854U (zh) * 2011-12-31 2012-09-12 王会 双唇体真空吸盘
TWM468508U (zh) * 2013-05-17 2013-12-21 Utechzone Co Ltd 吸附裝置及可吸附軟性物件之真空吸附設備

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Publication number Publication date
TWI561451B (enExample) 2016-12-11

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