TW200534975A - Carrying robot for glass substrate - Google Patents

Abstract

To provide a carrying robot which is provided with a sucking mechanism capable of securely sucking the upper face of a glass substrate and is capable of performing stable carrying. In a carrying robot 1 for a glass substrate 3 which is provided with a sucking mechanism for sucking the glass substrate 3, an upper face sucking mechanism 13 for sucking the upper face of the glass substrate 3 is provided on the under face side of a hand fork 4 as a sucking mechanism. The upper face sucking mechanism 13 includes an upper face sucking pad 18 and a floating mechanism part 19 for enabling the upper face sucking pad 18 to move up and down. The floating mechanism part 19 is provided with a piston member 20 with which the upper face sucking pad 18 is connected, a cylinder member 21 which holds the piston member 20 and guides the piston member 20 in an up-and-down direction, and an urging member 22 for urging the piston member 20 to a downward direction with respect to the cylinder member 21. Therefore, the carrying of the glass substrate 3 can be stably performed in the up-and-down direction and in the radial direction.

Description

200534975 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a robot for transporting glass substrates used in liquid crystal displays and the like. More specifically, it relates to the improvement of the glass substrate adsorption mechanism provided in a robot hand fork (h a n d f ○ r k) for holding a glass substrate. [Prior art]

In a manufacturing process of a liquid crystal display or the like, a robot for transferring a glass substrate is used. The robot includes a hand holding a glass substrate, and a transfer mechanism provided on a hand fork constituting a hand that holds the glass substrate. With robot. Particularly, a transfer robot that transfers a large glass substrate is known as a transfer robot that mounts a suction mechanism that sucks a lower surface of a glass substrate on the upper side of a hand fork (for example, refer to Patent Document 1). The suction mechanism of the transfer robot disclosed in this patent document 1 is provided with a tilt adjustment mechanism for adjusting the tilt of the suction surface of the suction pad (suction section), and has a structure capable of reliably holding the glass substrate even if the glass substrate is bent. It is also known that there is also a transfer robot that attaches the same suction mechanism that holds the lower surface of the glass substrate to the upper side of the hand fork. The transfer robot includes a floating mechanism that uses a bellows to connect the suction pad to the hand. Fork (claw member) suction mechanism, even if the glass substrate is warped, the suction pad can reliably hold the glass substrate transfer robot (for example, refer to Patent Literature (Patent Literature 1) International Patent Publication No. 0 1/0 1 0 6 0 8 6 312XP / Invention Specification (Supplement) / 94-06 / 94104199 200534975 (Patent Document 2) Japanese Patent Laid-Open No. 2 0 0 1-1 7 9 6 7 2 [Inventive Content] (Invention Problems to be solved)

In recent years, with the diversification of manufacturing processes such as liquid crystal displays, the market has demanded that the glass substrates be transported while holding the upper surfaces of large glass substrates, and that the glass substrates be transferred to the robots for transportation of the predetermined manufacturing equipment. In other words, the market has demanded a robot for transporting a suction mechanism that holds the upper surface of the glass substrate to the lower side of the hand fork. Here, the suction mechanism disclosed in the above-mentioned patent document can be directly installed on the lower side of the hand fork, which can also meet the market demand. However, the transfer robot disclosed in the aforementioned Patent Document 1 has the following problems. With the enlargement of the glass substrate, the hand fork itself will also become larger. In addition to warping the glass substrate, the bending condition of the hand fork itself will also become larger. It is difficult to use a suction pad to reliably adsorb the glass substrate only by the tilt adjustment mechanism. In response to this, there is a transport robot that has an adsorption mechanism installed on the upper side of the hand fork and sucks the glass substrate underneath. Since the load on the glass substrate during the transport can be supported by the hand fork, the warpage of the glass substrate can be reduced and adsorption The mat cannot adsorb the glass substrate, which may prevent the glass substrate from being transported. However, in the case of a transfer robot that sucks the suction mechanism on the lower side of the hand fork and suctions the upper surface of the glass substrate, the suction pad must bear the load of the glass substrate during the transfer. Therefore, if there is a suction pad that cannot suck the glass substrate, it cannot be performed The possibility of transporting glass substrates will increase. On the other hand, as disclosed in Patent Document 2, if an adsorption machine 7 312XP / Invention Specification (Supplementary) / 94-06 is used that connects an adsorption pad to a hand fork (claw member) through a floating mechanism section using a bellows tube. / 94104199

200534975 structure, you can use the suction pad to reliably suck the glass substrate. However, with the floating mechanism of the abdominal tube, because the bellows tube itself is not rigid, the glass substrate will sway considerably during the transportation, which will cause the unstable state of the glass substrate during transportation. In addition, depending on the sway of the glass substrate during transportation, the transportation of the glass substrate may be hindered. These issues will become more apparent especially in large glass substrate transfer. Therefore, an object of the present invention is to provide a transfer robot (an approach to solve the problem) including a suction mechanism capable of stably transferring the upper surface of the glass substrate, and capable of stably transferring. In order to solve the above problems, the present invention includes: A hand; and an adsorption mechanism provided on a hand fork constituting the hand to adsorb the glass substrate; a robot for transporting a glass substrate; wherein the adsorption mechanism is provided on a lower side of the hand fork; An upper surface adsorption mechanism that adsorbs the upper surface of the glass substrate; and the upper surface adsorption mechanism has: an upper surface adsorption pad that adsorbs the glass substrate; and a floating mechanism unit that can move the upper surface pad to the hand fork up and down; the floating machine unit The system includes a piston member connected to the upper suction pad, a cylinder member for holding the piston member and fixed to the hand fork to guide the piston member in an up-and-down direction, and a movable member for the cylinder member. A biasing member that biases the member in a downward direction. In the present invention, the upper surface adsorption mechanism on the upper surface of the adsorption glass substrate is provided on the lower side of the hand fork. The upper surface adsorption mechanism is provided with a upper surface adsorption pad so that the upper surface adsorption pad can move up and down with the fork. Therefore, even if the glass substrate is warped, or the hand fork is bent: ¾ 312XP / Invention Specification (Supplement) / 94-06 / 94104199 Yu Jisuo

200534975 With the floating function of the floating mechanism section, the suction pad can still reliably suck on the glass substrate. In addition, the floating mechanism unit includes a piston member connected to the suction mechanism, a cylinder member that holds the piston member and guides the piston member upward and downward to be fixed to the hand fork, and is biased downward with respect to the cylinder structure piston member Biasing member. Therefore, the piston member is held in the cylinder member in a state in which the piston member is biased downward with respect to the cylinder member while the pressure member is pressed, and the piston member is in a stable state in the moving direction (up and down direction) of the piston member. In addition, in the orthogonal direction (radial direction) of this moving direction, it is held stably in the guided state on the inner peripheral side of the steam part. Therefore, the suction pad connected to the upper surface of the member assumes the vertical and radial states during transportation. As a result, the glass substrate can be prevented from swinging during transportation to the limit. In the present invention, it is preferable that the upper surface suction mechanism is provided with a tilt adjustment mechanism for adjusting the tilt of the suction surface of the suction pad. When the top suction machine is equipped with a tilt adjustment mechanism, the suction surface of the top suction pad can track the tilted state of the top surface of the glass substrate. Therefore, it is possible to further improve the adsorption property of the adsorption pad to the glass substrate. In the present invention, it is preferable that a plurality of the above-mentioned upper suction mechanisms are provided on the length of the hand fork. As a result, a state in which the glass substrate is loaded by a plurality of upper suction mechanisms is formed. In other words, since the supporting points of the glass substrate will increase, the glass substrate can be transported stably even if the glass substrate is enlarged. In the present invention, it is preferable that the adsorption mechanism is further provided with a lower adsorption mechanism capable of adsorbing the glass substrate. According to this, even if the upper surface of the glass substrate is adsorbed 3] 2XP / Invention Manual (Supplement) / 94-06 / 94104199 The direction of the living glass attachment pad uses a cylinder piston that is biased toward the steam-set cylinder, and the minimum upper structure is formed in the upper direction. Under the condition that the plate is under heavy support 9 200534975 The process of transporting the glass substrate in the state and the process of transporting the glass substrate in a state where the lower surface of the glass substrate is adsorbed are mixed, and the transport of the present invention can still be used. Robot implementation. As a result, it is possible to provide a transfer robot capable of supporting various manufacturing steps. (Inventive effect)

In the present invention, a floating mechanism portion capable of moving the upper suction pad up and down can be provided to reliably suck the upper surface of the glass substrate. In the floating mechanism section, the piston member connected to the upper suction pad is stabilized in the vertical direction and the radial direction by the cylinder member and the biasing member. Therefore, the glass substrate can be prevented from swinging during transportation to a minimum limit, and stable glass substrate transportation can be performed. [Embodiment] A preferred embodiment for carrying out the present invention will be described below with reference to the drawings. Fig. 1 is a plan view of a glass substrate transfer robot according to an embodiment of the present invention. FIG. 2 is a front view of the transfer robot shown in FIG. 1. FIG. 3 is a plan view of a hand of the transfer robot shown in FIG. 1. Fig. 4 is a side view of a hand of the transport robot shown in Fig. 1. FIG. 5 is a cross-sectional view of the upper suction mechanism in the X-X cross section in FIG. 3. FIG. 6 is a cross-sectional view of the lower suction mechanism in the Y_Y cross section in FIG. 3. (Structure of a Transfer Robot) The transfer robot of this embodiment is a transfer robot 1 that adsorbs on the glass substrate 3 and transfers it in the manufacturing steps of a liquid crystal display or the like. The transfer robot 1 includes two groups on a base 5: The first arm 7 that can be rotated around the joint ㊂ 卩 6 as a center; the front arm 7 of the first arm 7 is rotatably connected to the front arm 8 8 312XP / Invention Specification (Supplement) / 94-06 / 94104199 200534975 2 arm portions 9; and a hand portion 2 rotatably connected to the front end joint portion 10 of the second arm portion 9. A pulley is built in each of the joints 6, 8, and 10, and the joints 6 and 8 and the joints 8 and 10 are connected by a timing belt, respectively, so that the hand 2 always faces a certain direction. A structure that moves in a straight line.

The transport robot 1 includes a lifting mechanism (see FIG. 2). In other words, the arms 7 and 9 and the hand 2 can be performed between the lowest height of the lifting mechanism (shown by a solid line in FIG. 2) and the highest height of the lifting mechanism (shown by a two-dot chain line in FIG. 2) Lifting structure. In addition, the transport robot 1 can be moved in parallel along the rail 11. In addition, the transfer robot 1 of this embodiment is suitable for transferring large glass substrates having a size of 1 1 0 X 1 250 mm or more. The hand 2 is provided to hold the glass substrate 3 ', and five hand forks 4 are provided in parallel at an equal interval in the left and right directions in FIG. The hand fork 4 is provided with an upper surface suction mechanism 1 3 for suctioning the glass substrate 3 (see Figs. 3 and 4). In addition, in this embodiment, a lower surface adsorption mechanism 14 is also provided, so that the lower surface of the glass substrate 3 can be adsorbed. In addition, as will be described later, a suction pipe 4 2 for forming a negative pressure of the air pressure in the upper suction mechanism 13 and the lower suction mechanism 14 is provided in the hand fork 4 (see FIG. 6). The hand fork 4 is hollow using a composite material such as carbon fiber and resin. In addition, in this embodiment, in order to carry large glass substrates, the length from the base end portion to the front end portion of the hand fork 4 is set to about 2.2 m. In addition, the left and right side surfaces of the hand fork 4 are in a parallel state, and the thickness is gradually reduced toward the front end. In this form, the upper surface of the hand fork 4 is capable of forming 11 312XP / Invention Specification (Supplement) / 94-06 / 94104199

200534975 The receiving surface of the glass substrate 3 is set to a horizontal plane, and the lower surface thereof forms an inclined surface with the front end of the fork 4 inclined. In other words, the hand fork 4 will form a rigid structure at the base end portion where the moment can be maximized. In addition, since the front end side is closer to the base end side, the center of gravity of the hand fork 4 will be located on the base end side, and the structure will be reduced in weight. By forming the hand fork 4 in such a structure, the resonance frequency of the conveying machine can be increased, and the operating speed can be increased. The upper surface suction mechanisms 13 which hold the glass substrate 3 are provided on the lower surfaces of the five hand forks 4, respectively. In this form, there are a plurality of hand forks 4 in the length direction, and specifically, they are provided at six places at equal intervals. In addition, the lower side of the hand fork 4 is a dispenser 15 for connecting the upper suction mechanism 13 and the above-mentioned suctioning 4 2 through a hose 16 to three ground dispensers 15 and 2 respectively. One hose 16 is connected to the upper suction mechanism 1 3 at one end. In addition, an opening 4a is provided on the lower side of the hollow-shaped hand at a position corresponding to the upper suction mechanism 13 (see FIG. 5). On the other hand, among the five hand forks 4, the upper and lower hand forks 4 are counted from the left side in FIG. At this time, the state under the absorbent glass 3 is formed. In this form, the hand fork 4 is provided at three places at large intervals in the longitudinal direction. In addition, an opening portion 4 b is provided at a position on the upper side of the hollow hand fork 4 corresponding to the lower suction mechanism 1 4 (refer to (Structure of the upper suction mechanism) The upper suction mechanism 1 3 is provided with a negative pressure inside for adsorption. 312XP / Invention Manual (Supplement) / 94-06 / 94104199 Raise the hand to lighter than the light person 1 Set it on the top of the pipe, the other fork 4 mouth 3, make the glass substrate, etc., as shown in Figure 12 200534975 The upper suction pad 18 on the substrate 3; and a floating mechanism 19 (see FIG. 5) that can move the upper suction pad 18 to the fork 4 up and down. In addition, the upper suction mechanism 1 3 is provided with an adjustment of the upper suction pad 1 的 attracting surface 1 8 a inclined tilt adjustment mechanism 2 5.

The floating mechanism 19 is provided with a piston member 20 that connects the upper suction pad 18 through a ventilation member 26, which will be described later, and the like; the piston member 20 is held in the vertical and horizontal directions in the figure, and the piston The cylinder member 21, which is fixed to the hand fork 4, and which is guided in the up-and-down direction by the member 20, and the compression coil spring 22, which is a biasing member that biases the piston member 20 in the downward direction with respect to the cylinder member 21. The cylinder member 21 is formed by a small-diameter portion 2 1 a and a large-diameter portion 2 1 b having a larger diameter than the small-diameter portion 2 1 a in this order from the lower side of the figure to form a substantially cylindrical shape. A flange portion 2 1 c is formed at the upper end portion of the large-diameter portion 2 1 b in the figure. The diameter of the large-diameter inner peripheral surface 2 1 e of the large-diameter portion 2 1 b is larger than the diameter of the small-diameter inner peripheral surface 21 d of the small-diameter portion 2 1 a, and a step portion 2 1 is formed between the two inner peripheral surfaces 21d and 21e. f. The cylinder member 21 is a rigid resin molded article. In particular, it is made of a resin material that is excellent in lubricity without oil supply and excellent in wear resistance. It suppresses dust generation and guides the piston member 20 smoothly up and down. In addition, since a resin material is used, the cylinder member 21 can be reduced in weight. The cylinder member 2 1 is a disk-shaped stopper plate 2 3 and a flange portion 2 1 c which are opposite to each other in a state where the lower side of the hand fork 4 is clamped, and is fixed to the hand with screws 2 4 and 2 4. Fork 4 on. In a state where the cylinder member 21 is fixed to the hand fork 4, the opening portion 4a of the hand fork 4 and the opening shape inside the cylinder member 21 13 312XP / Invention Manual (Supplement) / 94-06 / 94104199 200534975 The lower part of the ring is held by 20, and the gas is poured into 31 and connected to the structure 14. In addition, in order to reduce the weight of the stop plates 23, a tree-shaped product is formed. The piston member 20 is formed of a metal member such as stainless steel, and is formed into a cylindrical shape having an outer diameter smaller than that of the inner peripheral surface 21 of the small diameter of the cylinder member 21. Therefore, the piston member 20 has a structure in which the outer peripheral surface is guided by the small-diameter inner peripheral surface 2 1 d and moves up and down, and the small-diameter inner peripheral surface 2 1 d is used to form an orthogonal direction guided in its moving direction. (Radial) state.

A holding hole 20 a holding an end side of the compression coil spring 2 2 is recessed in the upper end surface of the piston member 20. Further, a flange portion 2 0 c provided on the large-diameter inner peripheral surface 2 1 e of the cylinder member 21 is provided on the upper end side of the piston member 21. Therefore, the piston member 20 is conveniently regulated by the stopper plate 23 and the compression wire spring 22 at the other end side is biased downward to form a state where the flange portion 2 c abuts against the ladder 2 1 f. The cylinder member 21 is on. On the square side of the holding hole 20a, in order to reduce the weight of the piston member 20, a drawing hole 20d having a smaller diameter than the holding hole 20a is communicated from the holding hole 20a. In addition, in the lower end surface of the piston member, a retaining hole 20b holding an end side of a compression coil spring 30 to be described later is recessed. In addition, the suction pad 18 connected to the upper surface of the piston member 20 is pressed to form a state set by the elastic force of the compression coil spring 22. On the other hand, the tilt adjustment mechanism 25 for adjusting the tilt of the suction surface 1 8 a of the upper suction pad 18 is provided with: a ventilation member 26 provided with a through hole 2 6 a for suctioning the glass substrate 3; The first closed member 28 and the second closed member 2 9 in the air chamber of the vent hole 2 6 a; the compression coil spring 3 0 biasing the vent member 2 6 in the downward direction; and the swing member supporting the vent member 2 6 Support member 2 7. 312XP / Invention Manual (Supplement) / 94-06 / 94104199 200534975 Suction pad on top 1 8 Suction surface 1 8 a Suction cup holding glass substrate 3 on top and holding glass substrate 3 is formed by elastic members such as rubber. In addition, a through hole 1 8 b in which a ventilation member 26 is arranged is formed in a central portion thereof. The ventilation member 2 6 is a metal member composed of a cylindrical base portion 2 6 b having a small diameter flange portion 2 6 d on the lower end side and a large diameter flange portion 2 6 c fixed to the upper end side of the base portion 2 6 b. . The upper end surface of the base portion 2 6 b is formed concentrically with the vent hole 2 6 a to form a holding portion that holds the compression coil spring 3 0 -end side. Support member

The 27 series is a disc-shaped member having a center hole fitted into the vent member 2 6 base 2 6 b, and is formed of an elastic member such as rubber. The upper suction pad 18, the ventilation member 26, and the support member 27 are integrated structures that form an air-tight connection. In other words, it has a structure in which the upper suction pad 1 8 is disposed in the through hole 2 9 a provided in the second sealing member 29 which will be described later, and then the ventilation member 2 6 base 2 6 b is removed from The lower side is sequentially inserted into the through hole 18 b of the upper adsorption pad 18 and the center hole of the support member 27, and the upper pad 18 and the support member 27 are formed by the large-diameter flange portion 2 6 c on the upper side. In a state of being sandwiched with the small-diameter flange portion 26 d, the elastic force of the support member 27 is exerted, and the large-diameter flange portion 2 6 c is fixed to the upper end side of the base portion 2 6b while maintaining airtightness. The first sealing member 28 is formed in a cylindrical shape with a flange portion 2 8 c at the lower end, and includes a hole portion forming an air chamber 31, an opening portion connected to the hole portion, and a hose 16 connected thereto. Suction holes 2 8 a; and holding holes 2 8 b of the compression coil spring 30 extending upward from the hole portion. In addition, in order to reduce the weight, the first sealing member 28 is formed by molding a resin material. The second airtight member 2 9 is a disc 15 having a through hole 2 9 a in which a suction pad 1 8 is arranged at the center portion 15 312XP / Invention Manual (Supplement) / 94-06 / 94104199

200534975 shape. Like the first sealing member 28, the second sealing member 29 is also light-weight and formed from a resin material. The through-holes 2 9 a are formed in a bowl shape that gradually enlarges downward, and forms a state sufficiently larger than the outer periphery of the upper adsorption pad 18. Specifically, even if the adsorption surface 18 a of the upper adsorption pad 18 is changed in an inclined shape, the peripheral surface of the upper adsorption pad 18 and the through-hole 29 a does not come into contact with each other. In addition, the opening on the upper side of the through-hole 2 a is formed in a state smaller than the outer diameter of the through member 26 and the outer diameter of the support member 27. The air chamber 3 1 is formed on the upper surface of the ventilation member 26 and the support member 2 7. The suction pad 18 is arranged on the through hole 2 9 a, and the flange portion 2 of the sealing member 28 is arranged. 8 c and the second sealing member 29 are formed by fixing with screws not shown. In this state, the large-diameter flange portion 2 6 c of the ventilation member 26 is arranged in the air chamber. In addition, the elastic force of the support member 27 will be brought into play, and the peripheral edge of the support member 27 will be sandwiched between the first closed member 28 and the second closed member 29, and the air chamber 31 will be kept airless. Secret state. In addition, in this state, the attached surface 1 8 a projects slightly from the lower side of the second closed member 2 9 to the lower side, and the tilt adjustment mechanism 2 5 passes through the inner diameter larger than the small diameter portion 2 1 a of the cylinder member. The bottom surface of the thin-walled bottomed cylindrical member 32 is connected to the lower end surface of the first sealing member 28 and the piston member 20, and the piston member 20 is connected to form a body that moves up and down with the piston member 20. Made. When the first sealing member 28 and the lower end face of the piston member 20 are fixed, the compression coil spring 30 is inserted into the retaining hole 2 8 b of the first sealing member 28 and held at one end side. The holding member of the ventilation member 26 is fixed in the state. At this time, the other end of the compression coil spring 3 0 will keep the gas in the side state 312XP / Invention Manual (Supplement) / 94-06 / 94104199 1 Figure 3 1 In addition to solid suction 2 1 200534975 is held in the holding hole 20b of the piston member 20, and the upper surface of the suction pad 18 is provided with a downward elastic force through the ventilation member 26. In addition, the bottomed cylindrical member 32 is designed to prevent the glass substrate 3 from being contaminated in the event of dust generation between the piston member 20 and the cylinder member 21, and is formed by molding a resin material. .

As described above, because the suction pad 18 and the large-diameter flange portion 2 6 c of the ventilation member 26 are sandwiched, and the outer periphery is sandwiched between the first and second sealing members 28 and 29, and The fixed support member 27 has elasticity, so that the suction surface 1 8 a formed in a predetermined range can change the tilt state in any direction of front, back, left, and right. In this form, the suction surface 1 8 a is set to be able to change to a tilted state of 5 degrees. In addition, the upper surface of the suction pad 18 exerts an elastic force in a downward direction, so that the suction surface 18 a surely contacts the upper surface of the glass substrate 3. (Simplified structure of the lower suction mechanism) The lower suction mechanism 14 has a lower suction pad 3 5 capable of holding the lower surface of the glass substrate 3, and has an adsorption surface 3 that can adjust the lower suction pad 3 5 as the upper suction mechanism 1 3 5 a tilted tilt adjustment mechanism. Below the tilt adjustment mechanism of the adsorption mechanism 14 is provided with: a ventilation member 36 provided with a ventilation hole 36a that can suck the glass substrate 3 below; a closed member 3 8 forming an air chamber 4 1 communicating with the ventilation hole 3 6 a; A compression coil spring 40 that biases the ventilation member 36 downward; and a support member 37 that supports the ventilation member 36 in a swingable manner; because the outline of this structure is similar to the tilt adjustment mechanism 2 of the adsorption mechanism 13 above 5. Therefore, detailed description is omitted. In other words, the ventilation member 36, the supporting member 37, the sealing member 38, the upper face of the hand fork 4, the compression coil spring 17 312XP / Invention Manual (Supplement) / 94-06 / 94104199

200534975 4 0, air chamber 4 1 and snap-in member 4 3, which are equivalent to the ventilation member 2 5 of the tilt adjustment mechanism 2 5 of the upper adsorber 1 3, support member 2 7,% airtight member 2 8 and second airtight member 29. Compression coil spring 30, hollow chamber 31, and small diameter flange portion 26 of the ventilation member 26. In addition, the opening portion corresponds to the through hole 2 9 a. Further, as shown in Fig. 6, a compression coil spring 40 and a suction pipe 42 are arranged in the holding holes 3 8b of the sealing member 38. The suction pipe 4 2 is connected to the air chamber 41 and can suck the lower suction pad 3 5 glass substrate 3. (Operation of the transport robot) After the transport robot 1 having the above structure is moved along the track 11, the arms 7, 9 and the hand 2 are rotated while adjusting the height of the arms 7 and the like using the lifting mechanism. At a predetermined position, for example, the upper surface of the glass substrate 3 accommodated in the storage device is sucked, and the glass substrate 3 is conveyed in the same operation. The adsorption operation of the glass substrate 3 will be described below. FIG. 7 is an explanatory diagram showing an example of the adsorption operation of the glass substrate by the hand. (A) and (B) are a diagram illustrating the state of the hand fork before the glass substrate is adsorbed, and the state of the hand fork when the glass substrate is adsorbed, respectively. Illustration. In addition, in FIG. 7, for convenience of explanation, the surface adsorption mechanism 13 is provided at two places of the hand fork 4. FIG. 7 illustrates the case where the glass substrate 3 is not warped. Because the length of the hand fork 4 in this form is 2.2 m from the base end portion to the front end portion, the hand fork 4 will bend. Therefore, a difference in height occurs between the upper suction mechanism 13 on the proximal end side 1 3 a suction surface 1 8 a and the upper suction mechanism 13 on the front end side 1 3 a attachment surface 1 8 a (see FIG. 7 (A)). Therefore, when one side 312XP / Invention Specification (Supplement) / 94-06 / 94104199 structure 1 qi 4b guarantees the pumping of the part of the middle plate, the figure says about the suction 18

200534975 When the hand 2 is lowered by the lifting mechanism of the transfer robot 1 and the glass substrate 3 is on the top, firstly, the top surface 1 3 suction surface 1 8 a of the front side is brought into contact with the glass substrate 3. Here, because the upper suction mechanism 13 has a floating mechanism 19, if the portion 2 is lowered further, the upper suction mechanism 13 on the front side will reduce the elastic force of the coil spring 22, so that the piston member 20 is inside the cylinder 21. The upper suction pad 18 will also rise. Finally, the upper structure 1 3 adsorption surface 1 8 a on the base end side will also contact the upper surface of the glass substrate 3 (7 (B)). In this state, or in the same manner as the lowering operation of the hand 2, the suction hole 2 8 a, the air chamber 3 1 and the vent hole 2 6 a are formed into a negative pressure through the hose 16 to make the base end side and the front end side The upper suction pad 18 is on the suction glass substrate 3. In addition, although FIG. 7 illustrates that the glass substrate 3 is not warped, even if the glass substrate 3 is warped and the height difference occurs on the glass, the floating mechanism 19 is still operated in the same manner. The upper surface adsorption pads 18 on the base end side and the front end side adsorb the upper surface of the glass 3. In this case, the suction surface 1 8 a on the base end side may be connected to the upper surface of the glass substrate 3 first. In addition, especially when the upper surface of the glass substrate 3 is bent or tilted due to the glass substrate 3, the tilt adjustment mechanism 25 is operated to bring the base end side and the front end side 18a into contact with the upper surface of the glass substrate 3. (Effect of this form) As described above, the conveying robot 1 of this form sets the upper surface suction mechanism 13 on the glass substrate 3 under the hand fork 4 312XP / Invention Manual (Supplement) / 94-06 / 94104] 99 If the suction machine is adsorbed and the hand resists the pressure to rise, when the suction machine refers to the figure, the air is attached to the glass and the substrate 3 is generated. When the moving glass substrate touches the glass, the adsorption surface is attached to the glass surface side. . 19 200534975 In addition, the upper suction mechanism 1 3 is provided with a piston member 20 that can move up and down within the cylinder member 21, so that the upper suction pad 1 8 can be held by a fork. 4 A floating mechanism 1 that moves up and down 1 9 . Therefore, even when the glass substrate 3 is warped or the hand fork 4 is bent, the suction pad 18 can surely adsorb the upper surface of the glass substrate 3. In addition, the floating mechanism portion 19 includes a piston member 20 connected to the upper suction pad 18, a cylinder member 2 1 fixed to the hand fork 4, and a piston member 2 0 to the cylinder member 21. Compression coil spring 22 biasing the biasing member ® downward. In addition, the cylinder member 21 holds the piston member 20 in the radial direction by its small-diameter inner peripheral surface 2 1 d, and the ladder member 2 1 f holds the piston member in the downward direction by the elastic force of the compression coil spring 22. 2 0. In other words, the piston member 20 is biased downward by the compression coil spring 22, and is held by the cylinder member 21 in the up-down direction in a stable state, and the inner diameter of the cylinder member 21 is used. The part 2 1 d is guided and held by the cylinder member 21 in the radial direction in a stable state. In addition, the cylinder member 21 ^ and the piston member 20 are both rigid. Therefore, the suction pad 18 connected to the upper surface of the piston member 20 is stable in the vertical direction and the radial direction during transportation. Therefore, the glass substrate 3 at the time of conveyance can be suppressed to the minimum limit. In addition, among the parts constituting the upper suction mechanism 13, all parts other than the piston member 20 and the ventilation member 26 are made of resin. Therefore, reducing the weight of the reachable suction mechanism 1 3 can reduce the bending and curvature of the hand fork 4 as a result. In addition, by setting parts other than the piston member 20 and the ventilation member 26 as resin molded products molded by a mold, each part can be miniaturized even with a complicated shape, and as a result, the upper suction mechanism can be achieved. 13 20 312XP / Invention Specification (Supplement) / 94-06 / 94104199 200534975 Miniaturization. Furthermore, the pressure of the suction pad 18 connected to the upper surface of the piston member 20 is set by using the elastic force of the compression coil spring 22, so the adjustment of the pressure of the suction pad 18 above will be more than the floating mechanism using a bellows tube. easily.

In this embodiment, the upper surface suction mechanism 1 3 is provided with a tilt adjustment mechanism 25 that adjusts the inclination of the suction surface 1 8 a of the upper surface suction pad 18. Therefore, the suction surface 1 8 a is in a state in which the upper surface of the glass substrate 3 can be tracked to be inclined or bent. Therefore, even if the glass substrate 3 is warped or curved, the adsorption of the upper substrate 18 to the glass substrate 3 can be improved. In this embodiment, a plurality of upper suction mechanisms 13 are provided in the longitudinal direction of the hand fork 4. Therefore, the load of the glass substrate 3 can be received by the plural upper suction mechanisms 13. In other words, the load supporting point of the glass substrate 3 will increase. Therefore, even if the glass substrate 3 is enlarged, it can be transported stably. In addition, by setting the elastic force of the compression coil spring 22 according to each of the upper suction mechanisms 13, the upper suction pad 18 at each position in the longitudinal direction of the hand fork 4 can be set. The transport robot 1 of this embodiment is provided with a lower surface suction mechanism 14 that can hold the lower surface of the glass substrate 3 in the hand fork 4. Therefore, not only the step of transporting the glass substrate 3 with the upper surface of the glass substrate 3 being adsorbed, but also the process of transporting the glass substrate 3 with the bottom surface of the glass substrate 3 being adsorbed, the transport robot 1 of this embodiment can be adopted. . Therefore, it is possible to provide the transfer robot 1 capable of supporting various manufacturing steps. (Other Embodiments) The above embodiment is an example of a preferred embodiment of the present invention, but it is not limited to this, and various changes can be made without changing the scope of the present invention. For example, 21 312XP / Invention Specification (Supplement) / 94-06 / 94104] 99 200534975 In the above-mentioned form, although the floating mechanism 19 is provided with a compression coil spring 22 having a biasing means, the biasing means is not limited to compression The coil spring can also be used as a biasing means using oil pressure or air pressure. ^ In addition, although the above-mentioned embodiment has the lower surface suction mechanism 14, when only the manufacturing process of the upper surface of the glass substrate 3 is suctioned, the transport robot 1 need not be provided with the lower surface suction mechanism 14. [Brief description of the drawings] FIG. 1 is a plane of a robot for transporting glass substrates according to an embodiment of the present invention.

FIG. 2 is a front view of the transfer robot shown in FIG. 1. FIG. Fig. 3 is a plan view of a hand of the transfer robot shown in Fig. 1. FIG. 4 is a side view of a hand of the transfer robot shown in FIG. 1. Fig. 5 is a cross-sectional view of the upper suction mechanism in the X-X section of Fig. 3. FIG. 6 is a cross-sectional view of the lower adsorption mechanism in the section Υ-Υ in FIG. 3. FIG.

Fig. 7 is an operation explanatory diagram of an example of the adsorption operation of the glass substrate by the hand; (A) and (B) are respectively explanatory diagrams of the state of the hand fork before the adsorption of the glass substrate and the state of the hand fork when the glass substrate is adsorbed. [Description of main component symbols] 1 Robot for transportation 2 Hand 3 Glass substrate 4 Hand fork 4 a, 4 b Opening 5 Abutment 22 312XP / Invention Manual (Supplement) / 94-06 / 94104] 99 200534975

6 '8, 10 joint 7 7 1 9 2 11 track 13 top 14 bottom 15 distribution 16 hose 18 top 18a suction 18b through 19 floating 20 piston 20a, 20b, 28b, 20c, 21c, 28c 20d extraction 21 cylinder 21a Small diameter 21b Large diameter 2 1 d Small diameter 21e Large diameter 21 f Ladder section 11, 30, 40 23 Support 312XP / Invention manual (Supplement) / 94-06 / 94104199 Arm arm Arm adsorption mechanism Adsorption mechanism Suction pad face mechanism member 38b Holding hole flange portion hole member portion inner peripheral surface inner peripheral surface compression coil spring plate 23 200534975

24 Screws 25 Tilt adjustment mechanism 26 ^ 36 Ventilation members 26a, 36a Ventilation holes 26b Base 26c Large diameter flange portion 26d Small diameter flange portion 21, 37 Support member 28 First sealing member 28a Suction hole 29 Second sealing member 29a Hole 31 Air chamber 32 Bottom cylindrical member 35 Lower suction pad 35a Suction surface 38 Airtight member 41 Air chamber 42 Pipe for suction 43 Locking member 312XP / Invention manual (Supplement) / 94-06 / 94104199 24

Claims (1)

200534975 10. Scope of patent application: 1. A transport robot for transporting a glass substrate, which includes a hand holding the glass substrate; and an adsorption mechanism provided on a hand fork constituting the hand to adsorb the glass substrate It is characterized in that: the adsorption mechanism is provided with an upper surface adsorption mechanism for adsorbing the upper surface of the glass substrate on the lower side of the hand fork; The upper surface adsorption mechanism is provided with an upper surface adsorption pad that adsorbs the glass substrate; and a floating mechanism unit that allows the upper surface adsorption pad to move the hand fork up and down; the floating mechanism unit includes: a piston that connects the upper surface adsorption pad A cylinder member that is fixed to the hand fork to guide the piston member in an up-down direction while holding the piston member; and a biasing member that biases the piston member in a downward direction with respect to the cylinder member. 2. The transfer robot according to item 1 of the patent application scope, wherein the upper surface suction mechanism is provided with a tilt adjustment mechanism for adjusting the tilt of the suction surface of the upper surface suction pad. 3. For the transfer robot according to item 1 or 2 of the scope of patent application, wherein the above-mentioned upper suction mechanism is provided with a plurality of in the longitudinal direction of the hand fork. 4. For the robot for transportation according to any one of claims 1 to 3, wherein the adsorption mechanism is further provided with a lower adsorption mechanism capable of adsorbing the lower surface of the glass substrate. 25 312XP / Invention Specification (Supplement) / 94-06 / 94104199