TWI316454B - Carrying robot for glass substrate - Google Patents

Description

[Technical Field] The present invention relates to a robot for transporting a glass substrate used in a liquid crystal display or the like. More specifically, it is an improvement of the glass substrate adsorption mechanism provided in the transfer robot human hand fork (h a n d f 〇 r k ) in which the glass substrate is held. [Prior Art]

In the manufacturing process of a liquid crystal display or the like, the transfer robot that transports the glass substrate is provided with a hand that holds the glass substrate, and a transfer mechanism that is provided on the hand fork that constitutes the hand that holds the glass substrate. Use a robot. In particular, a transfer robot that attaches an adsorption mechanism on the lower surface of the glass substrate to the upper surface side of the hand fork is known (for example, see Patent Document 1). In the suction mechanism of the robot for transporting the transfer of the patent document 1, the tilt adjustment mechanism for adjusting the inclination of the adsorption surface of the adsorption pad (adsorption portion) is provided, and the glass substrate can be surely adsorbed even if the glass substrate is bent. In addition, it is known that the same adsorption mechanism that adsorbs the lower surface of the glass substrate is provided on the upper side of the hand fork, and the transfer robot is provided with a floating mechanism unit that uses the bellows tube to connect the adsorption pad to the hand. In addition, the adsorption mechanism of the (claw member) is a transfer robot that can reliably hold the glass substrate even if the glass substrate is warped (see, for example, Patent Document (Patent Document 1) International Patent Publication No. 0 1 / 0 1 0 6 0 8 6 312XP / invention manual (supplement) /94-06/94104199

1316454 (Patent Document 2) Japanese Patent Laid-Open No. Hei 2 - 1 7 9 6 7 2 [Invention] [Inventors] In recent years, with the diversification of manufacturing steps of liquid crystal displays and the like, the market will be In the state in which the glass substrate is adsorbed on the upper surface of the large-sized glass substrate, the glass substrate is transferred to the transfer device of the predetermined manufacturing apparatus. In other words, the market has been required to adsorb the suction structure on the glass substrate and set it on the hand fork. The transfer robot on the lower side. Here, the adsorption mechanism disclosed in the patent document is directly disposed on the underside of the hand fork in response to market demand. However, the above-described Patent Document 1 discloses that the robot for lifting and transporting will cause the following problem. As the size of the glass substrate increases, the hand fork itself also becomes large. In addition to the warpage of the substrate, the bending condition of the hand fork itself becomes large, and it is difficult to reliably adsorb the glass substrate by the adsorption pad only by the adjustment mechanism. In some cases, the adsorption mechanism is placed on the upper side of the hand fork, and the transfer robot under the glass plate is adsorbed. Since the load on the substrate can be absorbed by the hand fork, the glass substrate can be warped and the adsorption method can be adsorbed. The glass substrate causes the possibility of hindering the conveyance of the glass substrate. When the adsorption mechanism is attached to the lower side of the hand fork and the robot for transporting the glass substrate is adsorbed, the glass load at the time of transport must be carried by the adsorption enthalpy. Therefore, if there is an adsorption pad that cannot adsorb the glass substrate, the glass substrate is not transported. The possibility will increase. On the other hand, as disclosed in Patent Document 2, if the floating mechanism portion of the pipe is used, the suction pad is coupled to the hand fork (claw member) 312 ΧΡ / invention manual (supplement) / 94-06/94104199 The board moves. Attached to the machine can also be taught that the glass is tilted. The glass-based glass mat is not. Yes, the surface of the substrate is fed into the snake belly with the 7 1316454 structure, so that the glass substrate can be reliably adsorbed by the adsorption pad. However, since the floating mechanism of the snake tube is not rigid, the glass substrate will be swayed considerably during transportation, and the glass substrate conveyance state may be unstable. Further, depending on the degree of sway of the glass substrate at the time of conveyance, the glass substrate may be prevented from being transported. Especially in the transportation of large glass substrates, these issues will become more apparent.

Therefore, an object of the present invention is to provide a transport robot including an adsorption mechanism that can reliably adsorb the glass substrate and can be stably transported. (Means for Solving the Problems) In order to solve the above problems, the present invention includes a hand holding a glass substrate, and an adsorption mechanism (J) provided on the hand fork that constitutes the hand to adsorb the glass substrate. The glass substrate transfer robot is characterized in that the adsorption mechanism is provided with an upper adsorption mechanism for adsorbing the upper surface of the glass substrate on the lower surface of the hand fork, and the upper adsorption mechanism is configured to: adsorb the upper surface of the glass substrate a pad; and a floating mechanism portion that can move the upper suction pad up and down to the hand fork; the floating mechanism portion includes: a piston member that connects the upper adsorption pad; the piston member is held, and the piston is a cylinder member that is guided to the upper and lower directions and fixed to the hand fork; and a biasing member that biases the piston member in a downward direction with respect to the cylinder member. In the present invention, the upper adsorption mechanism on the upper surface of the adsorption glass substrate is disposed on the lower side of the hand fork, and the upper adsorption mechanism is provided with an upper adsorption pad and a floating mechanism portion for allowing the upper adsorption pad to move up and down again. Therefore, even if the glass substrate is buckling or the hand is bent, 8 312XP/invention manual (supplement)/94-06/94] 04199

1316454 . By the floating function of the floating mechanism, the adsorption pad can still reliably adsorb the top of the glass substrate. Further, the floating mechanism portion is provided with: a piston member that is connected to the upper suction; a cylinder member that holds the piston member and guides the piston member to the upper and lower sides and is fixed to the hand fork; and is biased downward with respect to the cylinder member piston member Pressurized biasing member. Therefore, the piston member is held in the cylinder member and is in the moving direction (up-and-down direction) of the piston member in a state where the piston member is biased downward with respect to the cylinder member. Further, in the orthogonal direction (radial direction) of the moving direction, the inner peripheral side of the vapor member is stably held in the guided state. Therefore, the upper adsorption pad attached to the member exhibits an up-and-down direction and a radial direction when transported. As a result, the sway of the glass substrate at the time of conveyance can be suppressed to the limit. In the invention, it is preferable that the upper adsorption mechanism includes a tilt adjustment mechanism for adjusting the inclination of the adsorption surface of the adsorption pad. When the upper adsorption device is provided with a tilt adjustment mechanism, the adsorption surface of the upper adsorption pad can be traced to the state in which the glass substrate is tilted. Therefore, the adsorption of the adsorption pad to the glass substrate can be further enhanced. In the present invention, it is preferable that the upper suction mechanism is provided in plural numbers on the length of the hand fork. Accordingly, a state in which the weight of the glass substrate by the upper adsorption mechanism is increased is formed. In other words, since the load point of the glass substrate is increased, even if the glass substrate is large, it can be safely transported. In the present invention, it is preferable that the adsorption mechanism further has a lower adsorption mechanism that can adsorb the glass base. According to this, even on the glass substrate 312XP/invention manual (supplement)/94-06/94104199, the glass-bearing pad direction piece is used to bias the cylinder to form a minimum piston. In the case where the step of performing the glass substrate transfer in the state of the support plate in the state of the support plate and the step of performing the glass substrate transfer in the state of adsorbing the glass substrate under the support are mixed, the transfer robot of the present invention can be used. . As a result, a transfer robot capable of responding to various manufacturing steps can be provided. (effect of the invention)

According to the present invention, the upper surface of the glass substrate can be surely adsorbed by providing a floating mechanism portion that can move the upper adsorption pad up and down. Further, in the floating mechanism portion, the piston member to which the upper adsorption pad is coupled is stabilized in the vertical direction and the radial direction by the cylinder member and the biasing member. Therefore, the glass substrate sway during transportation can be suppressed to the minimum limit, and stable glass substrate can be transported. [Embodiment] Hereinafter, preferred embodiments for carrying out the invention will be described with reference to the drawings. Fig. 1 is a plan view showing a glass substrate transfer robot according to an embodiment of the present invention. Fig. 2 is a front elevational view showing the transport robot shown in Fig. 1. Fig. 3 is a plan view showing the hand of the transport robot shown in Fig. 1. Fig. 4 is a side view showing the hand of the transport robot shown in Fig. 1. Fig. 5 is a cross-sectional view showing the upper adsorption mechanism of the X-X section in Fig. 3. Fig. 6 is a cross-sectional view showing the lower suction mechanism of the Y-Y section in Fig. 3. (Schematic structure of the transporting robot) The transport robot of the present embodiment is a transport robot 1 that adsorbs the upper surface of the glass substrate 3 and transports it in the manufacturing process of a liquid crystal display or the like, and has two sets on the base 5: The first arm portion 7 that is rotatable about the joint portion 6 is rotatably coupled to the distal end side joint portion of the first arm portion 7 8 10 312XP / invention description _ patch) / 94-06 / 94 】 04199 1316454 The second arm portion 9 and the hand 2 rotatably coupled to the distal end joint portion 10 of the second arm portion 9 are provided. A pulley is built in each of the joint portions 6, 8, and 10, and is connected between the joint portions 6 and 8 and the joint portions 8 and 10 by a timing belt, and the hand 2 is often oriented in a certain direction. A structure that moves on a straight line.

Further, the transport robot 1 has an elevating mechanism (see FIG. 2). In other words, the arms 7, 9 and the hand 2 can be made between the lowest height of the lifting mechanism (shown by the solid line in Fig. 2) and the highest height of the lifting mechanism (shown by the dotted line in Fig. 2). The structure of the lift. Further, the transport robot 1 is formed to be movable in parallel along the track 11. Further, the transport robot 1 of the present embodiment is applied to a large-sized glass substrate having a size of 1 1 Ο Ο X 1 2 5 50 m or more. The hand 2 is provided to hold the glass substrate 3, and five hand forks 4 are provided in parallel at right intervals in the left and right directions in Fig. 1 . The hand grip 4 is provided with an upper suction mechanism 13 for sucking the glass substrate 3 (see Figs. 3 and 4). Further, in the present embodiment, the lower suction mechanism 14 is also provided, and the state in which the glass substrate 3 can be adsorbed below is formed. Further, as will be described later, the suction pipe 4 2 for forming the negative pressure by the air in the upper adsorption mechanism 13 and the lower adsorption mechanism 14 is provided in the hand fork 4 (see Fig. 6). The hand fork 4 is formed into a hollow shape by using a composite material such as carbon fiber and resin. In the present invention, the length from the base end portion of the hand fork 4 to the front end portion is set to be about 2. 2 m. Further, the left and right side faces of the hand fork 4 are formed in a parallel state, and the thickness thereof is in a state of being gradually thinned toward the front end. In this embodiment, the upper surface of the hand fork 4 is a horizontal surface which can form the 11 312XP/invention specification (supplement)/94-06/94104199 1316454 glass substrate 3, and the lower surface thereof is formed to be inclined toward the front end of the hand fork 4. Inclined surface. In other words, the hand fork 4 will form a rigid configuration of the base end portion which maximizes the moment. Further, since the front end side is lighter than the base end side, the center of gravity of the hand fork 4 will be located on the base end side, and a lightweight construction is formed. By forming such a structure with the hand fork 4, the transfer robot 1 can increase its resonance frequency and form a state in which the operation speed can be increased.

The upper adsorption mechanism 13 that adsorbs the upper surface of the glass substrate 3 is provided on the lower side of the five hands 4, respectively. In the present embodiment, a plurality of the hand forks 4 are provided in the longitudinal direction, and specifically, they are provided at six intervals at equal intervals. Further, on the lower side of the hand fork 4, a distributor 15 for connecting the upper suction mechanism 13 and the suction pipe 4 2 to the hose 16 is provided in three places. The distributor 1 5 is connected to the two hoses 16 respectively, and the other end side of the two hoses 16 is connected to the upper suction mechanism 13 . Further, on the lower surface side of the hollow hand fork 4, an opening portion 4a (see Fig. 5) is provided at a position corresponding to the upper suction mechanism 13. On the other hand, in the five hand forks 4, the upper side of the first, third, and fifth hand forks 4 from the left side of FIG. 3 are respectively provided with the lower suction mechanism 14 for placing the glass substrate 3 on the hand fork. When the upper side is 4, a state in which the underside of the glass substrate 3 can be adsorbed is formed. In the present embodiment, the hand forks 4 are arranged at three equal intervals in the longitudinal direction. Further, on the upper side of the hollow hand fork 4, an opening portion 4b is provided at a position corresponding to the lower suction mechanism 14 (see Fig. 6). (The structure of the upper suction mechanism) The upper suction mechanism 13 is provided with Absorbing glass 12 312XP/Invention Manual (Supplement)/94-06/94104199 1316454 The upper adsorption pad 18 on the substrate 3; and a floating mechanism that allows the upper adsorption pad 18 to move up and down by the hand fork 4 (Refer to Figure 5). Further, the upper adsorption mechanism 13 is provided with a tilt adjustment mechanism 25 for adjusting the inclination of the adsorption surface 18 a of the upper adsorption pad 18 .

The floating mechanism 1 9 includes a piston member 20 that connects the upper adsorption pad 18 to a ventilation member 26 or the like to be described later, and holds the piston member 20 in the vertical direction and the horizontal direction in the drawing, and the piston The cylinder member 2 1 fixed to the hand fork 4 guided in the vertical direction by the member 20; and the compression coil spring 22 as a biasing member biasing the piston member 20 downward with respect to the cylinder member 21. The cylinder member 21 is formed of a small-diameter portion 2 1 a which is arranged in order from the lower side in the drawing, and a large-diameter portion 2 1 b having a diameter larger than the small-diameter portion 2 1 a to form a substantially cylindrical shape. A flange portion 2 1 c is formed at an upper end portion of the large diameter portion 2 1 b. The diameter of the large-diameter inner peripheral surface of the large-diameter portion 2 1 b is larger than the diameter of the small-diameter inner peripheral surface 21d of the small-diameter portion 2 1 a, and a step portion 2 is formed between the two inner peripheral surfaces 21d and 21e. f. Further, the cylinder member 21 is a rigid resin material molded article. In particular, it is formed of a resin material which is excellent in lubricity without oil supply and which is excellent in abrasion resistance, and is capable of suppressing dust generation and forming a state in which the piston member 20 is smoothly guided in the vertical direction. In addition, since the resin material is used, the cylinder member 21 can be made lightweight. The cylinder member 2 1 is a disk-shaped stopper plate 2 3 and a flange portion 2 1 c which are opposed to each other in a state in which the lower side of the hand fork 4 is sandwiched, and are screwed by screws 2 4 and 24 to be fixed to the hand. On the fork 4. In the state in which the cylinder member 21 is fixed to the hand fork 4, the opening portion 4a of the hand 4 and the inside of the cylinder member 2 1 are open-shaped. 13 312XP/Invention Manual (supplement)/94-06/94104199

1316454 is connected. Further, in order to reduce the weight of the stopper plate 23, a tree molded article is formed. The piston member 20 is made of a metal member such as stainless steel, and has a cylindrical shape having an outer diameter which is only smaller than the inner peripheral surface of the small diameter of the cylinder member 2 1 by 2 1 d. Therefore, the piston member 20 has a structure in which the outer peripheral surface is guided by the small-diameter inner peripheral surface 21d and moved up and down, and the inner peripheral surface 21d of the small diameter is used to form an orthogonal direction guided by the moving side. (radial) state. A holding hole 20a that holds the end side of the compression coil spring 2 2 is recessed in the upper end surface of the piston member 20. Further, a flange portion 20c provided on the inner peripheral surface 2 1 e of the large diameter of the cylinder member 2 1 is provided on the upper end side of the piston member 2 1 . The magic piston member 20 is preferably biased downward by the compression line spring 2 2 on the other end side of the stopper plate 23, and is held in the cylinder in a state in which the flange portion 20c abuts against the ladder 2 1 f. On member 2 1. On the side of the drawing of the holding hole 20a, in order to reduce the weight of the piston member 20, the drawing hole 20d which is smaller in diameter than the holding hole 20a is connected from the holding hole 20a. Further, a retaining hole 20b that holds the end side of the compression coil spring 30, which will be described later, is recessed in the lower end surface of the piston member. Further, the upper adsorption pad 18 pad 1 coupled to the piston member 20 is formed by the elastic force setting state of the compression coil spring 22. On the other hand, the skew adjusting mechanism 25 for adjusting the inclination of the adsorption surface 18 a of the upper adsorption pad 18 is provided with a ventilation member 26 for suctioning the through hole 26a for the glass substrate 3; The first sealing member 28 and the second sealing member 29 of the air chamber of 26a; the compression coil spring 30 that biases the ventilation member 26 downward; and the support member 27 that can swing and support the ventilation member 26. 312XP/Invention Manual (supplement)/94-06/94104199 The grease is slightly moved to the distribution ring to form 20 holdings » Deflating 3 1 facing the structure 14 1316454 Upper adsorption pad 1 8 Series adsorption surface 1 8 a Adhesive glass substrate 3 The chuck that holds the glass substrate 3 on the upper surface is formed of an elastic member such as rubber. Further, a through hole 1 8 b in which the ventilation member 26 is disposed is formed at the center portion thereof. The ventilation member 26 is a metal base member formed by a cylindrical base portion 6 6 b having a small-diameter flange portion 26 d on the lower end side, and a large-diameter flange portion 2 6 c fixed to the upper end side of the base portion 26 b. . A holding portion that holds the compression coil spring 30-end side is formed concentrically with the vent hole 26a at the upper end surface of the base portion 26b. Support member

2 7 is a disk-shaped member having a center hole in which a base portion 26b of the ventilation member 26 is fitted, and is formed of an elastic member such as rubber. The upper adsorption pad 18, the venting member 26, and the support member 27 form an integrated structure that is hermetically connected. In other words, in the through hole 2 9 a provided in the second sealing member 209 to be described later, the upper adsorption pad 18 is disposed, and then the base member 2 6 b of the ventilation member 26 is removed. The lower side is sequentially inserted into the through hole 18b of the upper adsorption pad 18 and the central hole of the support member 27, and the upper adsorption pad 18 and the support member 27 are formed by the large diameter flange portion 26c and the small diameter protrusion. In the state where the edge portion is sandwiched by the 6d, the elastic force of the support member 27 is exerted, and the large-diameter flange portion 2 6 c is fixed to the upper end side of the base portion 26 6 while maintaining airtightness. The first sealing member 2 8 is formed in a cylindrical shape having a flange portion 2 8 c at the lower end, and includes a hole portion forming the air chamber 31; a hole portion and an opening to which the hose 16 is connected a suction hole 2 8 a of the portion; and a holding hole 28 8 b of the compression coil spring 30 extending upward from the hole portion. Further, in order to reduce the weight, the first sealing member 28 is formed by molding a resin material. The second sealing member 2 9 is formed into a disk 15 312XP/invention specification (supplement)/94-06/94104199 1316454 whose center portion has a through hole 2 9 a in which the upper adsorption pad 18 is disposed. Similarly to the first sealing member 28, the second sealing member 29 is formed of a resin material in order to reduce the weight. The through hole 29a is formed in a meandering shape which gradually enlarges toward the lower side, and is formed in a state sufficiently larger than the outer periphery of the upper adsorption pad 18. Specifically, even if the inclined state of the adsorption surface 18 a of the upper adsorption pad 18 is changed, a state in which the upper adsorption pad 18 and the peripheral surface of the through hole 2 9 a are not contacted is formed. Further, the opening on the upper side of the through hole 2 9 a is formed to be smaller than the outer diameter of the aeration member 26 and the outer diameter of the support member 27.

The air chamber 31 is formed in a state in which the upper adsorption pad 18 is integrally formed with the ventilation member 26 and the support member 27, and is disposed on the through hole 29a, and the first sealing member 28 is protruded. The edge portion 2 8 c and the second sealing member 29 are formed by fixing with a screw (not shown). In this state, a state in which the large-diameter flange portion 2 6 c of the ventilation member 26 is disposed in the air chamber 31 ' is formed. Further, at this time, the elastic force of the support member 27 is exerted, and the outer peripheral edge of the support member 27 is interposed between the first sealing member 28 and the second sealing member 29 and fixed, and the air chamber 31 is held. Airtight state. Further, in this state, the suction surface 18 a protrudes only slightly from the lower surface of the second sealing member 2 9 to the lower side. Further, the tilt adjusting mechanism 25 has a larger inner diameter than the outer diameter of the small diameter portion 2 1 a of the cylinder member 2 1 and forms a bottom surface of the thin-bottomed bottomed cylindrical member 32, so that the first sealing member 28 is fixed. The lower end surface of the piston member 20 is coupled to the piston member 20, and has a structure in which the piston member 20 is vertically moved. When the first sealing member 28 is fixed to the lower end surface of the piston member 20, the compression coil spring 30 is inserted into the holding hole 28b of the first sealing member 28, and is held at one end side thereof. It is solidified in the state of the holding portion of the ventilation member 26. At this time, the other end side of the compression coil spring 30 will hold 16 312XP / invention specification (supplement) /94-06/94104199 1316454 in the holding hole 20b of the piston member 20, and pass through the ventilation member 26 pair The upper adsorption pad 18 functions to elastically move downward. Further, the bottomed cylindrical member 32 is designed such that it does not cause contamination of the glass substrate 3 in the event of dusting between the piston member 20 and the cylinder member 21, and is formed by molding a resin material. .

As described above, the suction pad 18 is interposed between the large-diameter flange portion 6 6 c of the ventilation member 26 and the outer peripheral edge thereof is interposed between the first sealing member 28 and the second sealing member 29 and The fixed support member 27 has elasticity, and thus the adsorption surface 18 a formed in a predetermined range can be changed in any direction in the front, rear, left and right directions. In this embodiment, the inclined state in which the adsorption surface 18 a can be changed to 5 degrees is set. Further, the upper adsorption pad 18 is biased in the downward direction, and the crucible is formed in a state in which the adsorption surface 18 a is surely brought into contact with the upper surface of the glass substrate 3. (Schematic structure of the lower adsorption mechanism) The adsorption mechanism 14 has a lower adsorption pad 35 which can adsorb the lower surface of the glass substrate 3, and has an adsorption surface 3 which can adjust the lower adsorption pad 35 as the upper adsorption mechanism 13 5 a tilted tilt adjustment mechanism. The tilt adjusting mechanism of the lower suction mechanism 14 is provided with a ventilation member 36 for absorbing the vent hole 36a under the glass substrate 3, and a sealing member 38 for forming the air chamber 4 1 communicating with the vent hole 36a; a compression coil spring 40 that biases the venting member 36 downward; and a support member 37 that oscillates to support the venting member 36; since this configuration is similar to the tilt adjusting mechanism 2 of the upper absorbing mechanism 13 5, so the detailed description is omitted. In other words, the venting member 36 of the tilt adjusting mechanism of the lower suction mechanism 14 , the supporting member 37, the sealing member 38, the upper face of the hand fork 4, the compression coil spring 17 312XP / invention manual (supplement) / 94- 06/94104199 1 1316454 . 4 Ο, air chamber 41, engaging member 43, respectively corresponding to the venting member 26 of the tilt adjusting mechanism 25 of the upper adsorber 13 , the supporting member 27, the first sealing member 28, The second sealing member 29, the compression coil spring 30, the hollow chamber 3, and the small diameter flange portion 26d of the ventilation member 26. Further, the opening corresponds to the through hole 2 9 a. Further, as shown in Fig. 6, a compression coil spring 40 and a suction pipe 4 2 are disposed in the holding hole 38b of the sealing member 38. The suction pipe 42 is connected to the air chamber 4 1, and can suck the lower adsorption pad 35 glass substrate 3. (Operation of the transport robot) The transport robot 1 having the above-described configuration moves the arm 7 , 9 and the hand 2 while adjusting the height of the arm 7 or the like by the elevating mechanism after moving along the rail 1 1 . The glass substrate 3 is conveyed in the same position by, for example, sucking the upper surface of the glass substrate 3 accommodated in the storage device at a predetermined position. Hereinafter, the adsorption operation of the glass substrate 3 will be described. FIG. 7 is an explanatory view showing an example of the adsorption operation of the glass substrate by the hand, and (A) and (B) are a clear view of the state of the hand before the adsorption of the glass substrate, and a description of the state of the hand when the glass substrate is adsorbed. Figure. Further, in the seventh description, it is set so that the surface suction mechanism 13 is provided at two places of the hand fork 4. Fig. 7 shows the case where the glass substrate 3 does not warp. Since the hand fork 4 of this embodiment has a length of 2.2 m from the proximal end portion from the proximal end portion, the hand 4 is bent. Therefore, the height difference Η is caused by the upper adsorption mechanism 13 adsorption surface 18 a on the proximal end side and the upper adsorption mechanism 1 3 attachment surface 18 a on the distal end side (see Fig. 7(A)). Therefore, when one side 312XP / invention manual (supplement) /94-06/94104199 structure

The middle part of the gas 4b pumping is said to be about the same.

1316454. When the hand 2 is lowered by the elevating mechanism of the transport robot 1, the upper surface of the glass substrate 3 is first contacted with the upper surface of the glass substrate 3 on the front end side. Here, since the upper suction mechanism 13 is provided with the floating mechanism 19, since the portion 2 is further lowered, the upper suction mechanism 13 on the distal end side elasticizes the coil spring 2, so that the piston member 20 is in the cylinder 21. The upper adsorption pad 18 will also rise accordingly. Finally, the upper surface of the base end side 1 3 adsorption surface 18 8 will also contact the top of the glass substrate 3 ( ® 7 ( B )). In this state, or in the same manner as the lowering operation of the hand 2, the suction hole 28a, the air chamber 31, and the vent hole 26a are pressed by the hose 16 to form a negative pressure, and the upper end side and the front end side of the upper adsorption pad 18 are sucked. Above the glass substrate 3. In addition, although the case where the glass substrate 3 does not warp in FIG. 7 is described, even if the glass substrate 3 is warped and a height difference occurs on the glass surface, the floating mechanism is similarly made. The upper adsorption pad 18 on the proximal end side and the front end side adsorbs the upper surface of the glass 3. In this case, there is also a case where the adsorption surface 18 8 a on the proximal end side is placed on the upper surface of the glass substrate 3 . Further, in particular, when the glass substrate 3 is bent or tilted due to the glass substrate 使, the tilt adjusting mechanism 25 is operated to bring the base end side and the front end side 18 8 into contact with the upper surface of the glass substrate 3. (Effect of the present embodiment) As described above, the transport robot 1 of the present embodiment is provided with the upper surface suction mechanism 13 on the upper surface of the glass substrate 3, and is provided on the hand fork 4 7 312XP/invention specification (supplement)/94-06 /94104199 Adsorb the adsorption machine and if the hand resists the pressure rise, when the adsorption machine refers to the figure, the air is attached to the glass condition to cause the substrate 3 to produce the dynamic glass substrate to touch the glass, and the adsorption surface is attached to the glass surface side. 19 1316454 In addition, the cylinder member '4' is the surface of the piston that is true again. The inner circumferential surface of the piston is opposite to the pressure of the inner part of the lug. In other words, the direction is biased, and the state is in the piston.

The above is absorbing. Therefore, the ventilation can reach the upper volume. The part, the shape remains, and the upper suction mechanism 13 is provided with a floating mechanism portion 19 that can move up and down in the steam 2 by the piston member 20, so that the upper suction pad 18 can move up and down by the fork. Therefore, even if the glass substrate 3 is bent or the hand fork 4 is bent, the adsorption pad 18 can adsorb the upper surface of the glass substrate 3. The floating mechanism unit 19 is provided with a cylinder member 2 1 that is coupled to the upper adsorption pad 18, a cylinder member 2 1 fixed to the hand fork 4, and a cylinder member 2 1 that biases the piston member 20 downward. The biasing coil spring 2 2 is biased. Further, the cylinder member 21 holds the piston member 20 in the radial direction by the small diameter 2 1 d, and the piston member 20 is held downward by the elastic force of the coil spring 2 2 by the ladder portion 2 1 f. It is to say that the piston member 20 is pressed downward by the compression coil spring 22, and is guided by the cylinder member 21 in the up-and-down direction by the small-diameter inner diameter portion 21d of the cylinder member 21 in the up-and-down state. The stabilizer is held radially by the cylinder member 21. Further, the cylinder member 21 member 20 has rigidity. Therefore, the pad 18 connected to the piston member 20 is stabilized in the vertical direction and the radial direction during transportation, and the sway of the glass substrate 3 during transportation can be suppressed to the minimum limit. Among the components constituting the upper adsorption mechanism 13 , all the components except the piston member 20 member 26 are formed of a resin. Therefore, the weight of the surface adsorption mechanism 13 is reduced, and as a result, the bending of the hand fork 4 can be reduced, and the resin molded article molded by the mold can be set by the piston member 20 and the ventilation member 26, Even if the complex parts can be miniaturized, the result can reach the above adsorption mechanism 13 20 312XP / invention manual (supplement) /94-06/94104199

Miniaturization of the 1316454. Furthermore, the pad attached to the upper adsorption pad 18 of the piston member 20 is set by the elastic force of the compression coil spring 22, so that the pad pressure adjustment of the upper surface 18 is easier than that of the floating mechanism using the bellows tube. The upper adsorption mechanism 13 is provided with a tilt adjustment mechanism 25 that adjusts the inclination of the adsorption surface 18 a of the upper surface 18. Therefore, the inclination or the curvature of the upper surface of the glass substrate 3 can be traced at 18 a. Therefore, even if the glass substrate 3 is warped or bent, the adsorption property of the pad 18 to the glass substrate 3 can be adsorbed. In the present embodiment, the upper suction mechanism 13 is plural in the length of the hand fork 4. Thus, the load of the glass 3 can be absorbed by the plurality of upper adsorption mechanisms 13 . In other words, the load supporting point of the glass substrate 3 can be stably transported even if the glass substrate 3 is enlarged. By setting the compression coil spring 22 to each of the upper adsorption mechanisms 13 to set the upper adsorption pad 1 at each position in the longitudinal direction of the hand fork 4, the transfer robot 1 is provided with a glass substrate in the hand fork 4. 3 below the lower adsorption mechanism 14 . Therefore, the transfer robot 1 of the present embodiment can be employed not only in the state in which the glass substrate 3 is transported on the upper surface of the glass substrate 3 but also in the state in which the glass substrate 3 is applied under the state in which the glass substrate 3 is adsorbed. Therefore, the robot 1 can be transported in response to various manufacturing steps. (Other embodiment) The above-described embodiment is an example of a preferred embodiment of the present invention, and various modifications can be made without limiting the scope of the present invention. 3] 2XP/Invention Manual (Supplement)/94-06/ 94104199 Pressure, due to the adsorption pad 〇 adsorption pad adsorption surface state. Increase the force increase D of the upper and upper glass substrates. In addition, by the elastic force, 8 pad pressure. If it is adsorbed and adsorbed, it can be transported here. For example, 21 1316454 _ In the above embodiment, the floating mechanism 1 9 is provided with the compression coil spring 22 having the biasing means. However, the biasing means is not limited to the compression coil spring, and may be formed by using oil pressure or air pressure. Biasing means. Further, in the above-described embodiment, the lower suction mechanism 14 is provided. However, when the manufacturing step of adsorbing only the upper surface of the glass substrate 3 is required, the transport robot 1 does not need to provide the lower suction mechanism 14 as it is. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view of a glass substrate transfer robot according to an embodiment of the present invention;

Fig. 2 is a front elevational view of the transport robot shown in Fig. 1; Fig. 3 is a plan view showing the hand of the transport robot shown in Fig. 1; Fig. 4 is a side view of the hand of the transport robot shown in Fig. 1; Figure 5 is a cross-sectional view of the upper suction mechanism of the X-X cross section of Figure 3; Figure 6 is a cross-sectional view of the lower suction mechanism of the Y-Y section of Figure 3;

Fig. 7 is an operation explanatory diagram showing an example of the adsorption operation of the glass substrate by the hand; (A) and (B) are explanatory views of the state of the hand fork before the adsorption of the glass substrate, and the state of the hand fork when the glass substrate is adsorbed. [Description of main component symbols] 1 Transfer robot 2 Hand 3 Glass substrate 4 Hand fork 4a' 4b Opening 5 Base 22 312XP / Invention manual (supplement) /94-06/94 ] 04 ] 99 1316454 6 ' 8 '10 OFF section 7 1st arm 9 2nd arm 11 Track 13 Upper suction mechanism 14 Lower suction mechanism 15 Dispenser 16 Hose 18 Upper adsorption pad 18a Adsorption surface 18b Through hole 19 Floating mechanism 20 Piston member

20a, 20b' 28b, 38b holding 孑L 20c, 21c, 28c flange portion 20d drawing hole 2 1 cylinder member 2 1 a small diameter portion 2 1 b large diameter portion 2 1 d small diameter inner peripheral surface 2 1 e large Inner circumference of the diameter 2 1 f Ladder 22, 30, 40 Compression coil spring 2 3 Impact plate 23 312XP / Invention manual (supplement) / 94-06/94104199 1316454 24 Screw 2 5 Tilt adjustment mechanism 26, 36 Venting member 26a, 36a vent hole 2 6b base portion 26c large diameter flange portion 26d small diameter flange portion 27' 37 support member 28 first sealing member 2 8a suction hole 29 second sealing member 29a through hole 3 1 air chamber 32 bottom circle Tube member 35 Lower adsorption pad 35a Adsorption surface 38 Sealing member 4 1 Air chamber 42 Suction piping 43 Engagement member

312XP / invention manual (supplement) /94-06/94104199

Claims (1)

Clear 1 1 2 clear replacement 1316454 X. Patent application scope: 1. A transfer robot for transporting a glass substrate, comprising a hand holding a glass substrate; and an adsorption mechanism provided on the hand fork constituting the hand for adsorbing the glass substrate The adsorption mechanism is provided with an upper adsorption mechanism for adsorbing the upper surface of the glass substrate on the lower side of the hand fork; the upper adsorption mechanism is provided with an upper attachment pad for adsorbing the glass substrate; a floating mechanism portion for moving the hand fork up and down by the suction pad; the floating mechanism portion is provided with a piston member that connects the upper adsorption pad; and the piston member is fixed to the vertical direction while holding the piston member a cylinder member on the hand fork; and a biasing member biasing the piston member downward with respect to the cylinder member. 2. The transfer robot according to the first aspect of the invention, wherein the upper and lower adsorption mechanisms are provided with a tilt adjustment mechanism for adjusting the inclination of the adsorption surface of the upper adsorption pad. 3. The transfer robot according to the first aspect of the invention, wherein the upper upper suction mechanism is provided in plural in the longitudinal direction of the hand fork. 4. The transfer robot according to the first aspect of the patent application, wherein the upper adsorption mechanism is further provided with a lower suction mechanism that can adsorb the underside of the glass substrate. 5. The transport for any one of claims 1 to 4 In the above-described plurality of hand forks, the upper suction mechanism is provided on at least a front end side and a base end side of the length of the hand fork. 326\;main file\94\94104199\94104199 (replacement)-2 keep the glass suction structure guide structure