TW201401951A - Circuit formation method of printed circuit board, thermalsetting resin composition and printed circuit board - Google Patents

Circuit formation method of printed circuit board, thermalsetting resin composition and printed circuit board Download PDF

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Publication number
TW201401951A
TW201401951A TW102121557A TW102121557A TW201401951A TW 201401951 A TW201401951 A TW 201401951A TW 102121557 A TW102121557 A TW 102121557A TW 102121557 A TW102121557 A TW 102121557A TW 201401951 A TW201401951 A TW 201401951A
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Taiwan
Prior art keywords
resin layer
circuit
printed wiring
wiring board
resin composition
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TW102121557A
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Chinese (zh)
Inventor
Ayumu Shimamiya
Takenori Kakutani
Katsuto Murata
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Taiyo Holdings Co Ltd
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Publication of TW201401951A publication Critical patent/TW201401951A/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/115Via connections; Lands around holes or via connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0026Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H05K3/0038Etching of the substrate by chemical or physical means by laser ablation of organic insulating material combined with laser drilling through a metal layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1275Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by other printing techniques, e.g. letterpress printing, intaglio printing, lithographic printing, offset printing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating

Abstract

The subject of the present invention is to provide a circuit formation method of printed circuit board, a thermalsetting resin composition, and a printed circuit board, which may form the fine circuit without a pre-coating process and a polishing process for excessively formed metal on a coating film or a conductive coating, and achieve excellent processability of laser irradiation for insulation resin layer and bonding characteristic between the insulation resin layer and the circuit film. The solution of the present invention is to provide a circuit formation method of printed circuit board, which is characterized in including a concave structure formation process for irradiating ultraviolet laser have the pulse width in nano second level on the insulation resin layer on the metal foil laminated plate with ultraviolet absorbability to remove the insulation resin layer for forming the concave structure; and, a dispersion liquid coating process for coating the dispersion liquid containing metal nanometer particles using ink-jet method inside the concave structure formed by the aforementioned concave structure formation process.

Description

印刷配線板之電路形成方法,熱硬化性樹脂組成物,及印刷配線板 Circuit forming method of printed wiring board, thermosetting resin composition, and printed wiring board

本發明係有關印刷配線板之電路形成方法,使用其之熱硬化性樹脂組成物,及印刷配線板,其不需要對環境造成大幅負擔之鍍覆前處理工程,及對於多餘形成的鍍覆膜或導電性塗膜等金屬膜之研磨工程,即可形成微細電路,且雷射照射對於絕緣樹脂層的加工性、以及絕緣樹脂層與連接電路膜或配線膜的密合性良好。 The present invention relates to a circuit forming method for a printed wiring board, a thermosetting resin composition using the same, and a printed wiring board, which does not require a pre-plating pretreatment process which imposes a large burden on the environment, and a plating film which is formed excessively. In the polishing process of a metal film such as a conductive coating film, a fine circuit can be formed, and the processability of the laser irradiation with respect to the insulating resin layer and the adhesion between the insulating resin layer and the connection circuit film or the wiring film are good.

一般而言,印刷配線板之電路形成方法,有減除法(Subtractive)、完全加成法(Full-additive)或半加成法(Semi-additive)。 In general, a circuit forming method of a printed wiring board has a subtractive method, a full-additive method, or a semi-additive method.

減除法係為穿透阻劑而蝕刻金屬箔,以形成電路之製法。然而,由於是以蝕刻液來控制電路形成,故不適合形成微細電路。另一方面,完全加成法或半加成法,係為以無電解鍍覆形成電路之製法,但這些電路形成方法中,會受到施以粗糙化處理之絕緣樹脂層的凹凸所影響,而引發電路部連接不良或斷線等問題,不適合形成微細電路。 The subtractive method is a method of forming a circuit by etching a metal foil by penetrating a resist. However, since the circuit is formed by the etching liquid, it is not suitable to form a fine circuit. On the other hand, the full addition method or the semi-addition method is a method of forming a circuit by electroless plating, but in these circuit formation methods, it is affected by the unevenness of the insulating resin layer subjected to the roughening treatment, and Problems such as poor connection or disconnection of the circuit are caused, and it is not suitable to form a fine circuit.

除此之外,近年來,能夠因應印刷配線板的高密度化、微細化需求之微細電路形成方法,係提議有如專利文獻1及2所記載之方法,其使用雷射等在基材表面形成溝槽(trench)或通孔(via hole)後,再利用無電解鍍覆及電解鍍覆於溝槽或通孔內部形成微細電路。 In addition, in recent years, in the method of forming a fine circuit which is required to increase the density and the miniaturization of the printed wiring board, there is proposed a method as disclosed in Patent Documents 1 and 2, which is formed on the surface of the substrate by using a laser or the like. After a trench or a via hole, electroless plating and electrolytic plating are applied to the inside of the trench or the via hole to form a fine circuit.

此外,於溝槽或通孔內部形成微細電路之方法,係提議有如專利文獻3~5所記載之方法,其在經鍍覆前處理工程後,利用噴墨法於溝槽或通孔內部形成觸媒層或者稱為鍍覆核之金屬層,其後再利用無電解鍍覆形成微細電路。 Further, a method of forming a fine circuit inside a trench or a via hole is proposed as disclosed in Patent Documents 3 to 5, which is formed in a trench or a via hole by an inkjet method after a pre-plating treatment process. The catalyst layer, or a metal layer called a plated core, is then formed into a fine circuit by electroless plating.

又,專利文獻6中揭示一種方法,係利用噴墨法於溝槽或通孔內部填充導電性膠,以形成微細電路。 Further, Patent Document 6 discloses a method of filling a trench or a via hole with a conductive paste by an ink jet method to form a fine circuit.

另,圖2及圖3為習知電路形成方法之示意模型圖。圖2為,在雷射照射後,藉由前處理劑或撥水劑9施以無電解鍍覆之前處理(圖2(c)),再藉由噴墨法塗布觸媒核10以進行無電解鍍覆之方法。此外,圖3記載之方法中,在連接電路膜或配線膜形成後,藉由研磨機8進行研磨以平坦化。 2 and 3 are schematic model diagrams of a conventional circuit forming method. 2 is a process of applying electroless plating by a pretreatment agent or a water repellent 9 after laser irradiation (FIG. 2(c)), and then coating the catalyst core 10 by an inkjet method to perform no treatment. The method of electrolytic plating. Further, in the method described in FIG. 3, after the connection circuit film or the wiring film is formed, polishing is performed by the polishing machine 8 to planarize.

此處所謂習知之無電解鍍覆之前處理,係指用來選擇性地使鍍覆附著之工程,或用來做出適合鍍覆附著的狀態之工程。另,無電解鍍覆前處理工程中,不包含除膠渣(desmear)處理工程。 The term "pre-electroless plating treatment" as used herein refers to a process for selectively attaching a plating or a process for making a state suitable for plating adhesion. In addition, in the electroless plating pretreatment process, the desmear treatment project is not included.

[先前技術文獻] [Previous Technical Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本特開2009-117415號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-117415

[專利文獻2]美國專利第7312103號 [Patent Document 2] U.S. Patent No. 7312103

[專利文獻3]日本特開2011-151172號公報 [Patent Document 3] Japanese Laid-Open Patent Publication No. 2011-151172

[專利文獻4]日本特開2009-81212號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2009-81212

[專利文獻5]日本特開2010-21301號公報 [Patent Document 5] Japanese Patent Laid-Open Publication No. 2010-21301

[專利文獻6]日本特開2004-152934號公報 [Patent Document 6] Japanese Patent Laid-Open Publication No. 2004-152934

然而,上述專利文獻1及2揭示之方法,皆是在鍍覆工程後除去多餘形成的金屬膜,故必須另行設置CMP(Chemical Mechanical Polishing)法等之研磨工程(平坦化工程)。 However, in the methods disclosed in the above Patent Documents 1 and 2, since the excess formed metal film is removed after the plating process, it is necessary to separately provide a polishing process (flattening process) such as CMP (Chemical Mechanical Polishing).

此外,上述專利文獻3~5揭示之方法,在施以無電解鍍覆處理之前,需經過習知之鍍覆前處理工程,或是必須在不需要鍍覆層的部分設置撥水性樹脂層等所謂犠牲層。 Further, in the methods disclosed in the above Patent Documents 3 to 5, it is necessary to pass a conventional pre-plating treatment process before applying the electroless plating treatment, or to provide a water-repellent resin layer in a portion where the plating layer is not required.犠 层 layer.

又,上述專利文獻6揭示之方法,於溝槽或通孔內部填充導電性膠之後,為了除去多餘形成的導電性塗膜,必須另行設置使用拋光研磨機或帶式砂磨機之研磨工程(平坦化工程)。像這樣,上述專利文獻所提議之方法,皆會經過繁雜的工程,故會有製造成本升高的問題。 Further, in the method disclosed in the above Patent Document 6, after the conductive paste is filled in the inside of the groove or the through hole, in order to remove the conductive coating film which is formed excessively, it is necessary to additionally provide a polishing process using a buffing machine or a belt sander ( Flattening engineering). As such, the methods proposed in the above patent documents are subject to complicated engineering, and thus there is a problem that the manufacturing cost is increased.

再者,近年來一直尋求一種印刷配線板之電 路形成方法,熱硬化性樹脂組成物,及印刷配線板,能將形成微細溝槽或通孔時之雷射加工性、及導電膠填充後的連接電路膜或配線膜與絕緣樹脂層之密合性也納入考量。 Furthermore, in recent years, there has been a search for a printed wiring board. The road forming method, the thermosetting resin composition, and the printed wiring board can provide laser processing properties when forming fine grooves or through holes, and the connection circuit film or wiring film filled with the conductive paste and the insulating resin layer. Synergy is also taken into account.

鑑此,本發明之目的即在於提供一種印刷配線板之電路形成方法,使用其之熱硬化性樹脂組成物,及印刷配線板,其不需要鍍覆前處理工程,及對於多餘形成的鍍覆膜或導電性塗膜等金屬膜之研磨工程,即可形成微細電路,且雷射照射對於絕緣樹脂層的加工性、以及絕緣樹脂層與連接電路膜或配線膜的密合性良好。 Accordingly, an object of the present invention is to provide a circuit forming method for a printed wiring board, a thermosetting resin composition using the same, and a printed wiring board which does not require a plating pretreatment process and a plating for excess formation. A polishing process of a metal film such as a film or a conductive coating film can form a fine circuit, and the processability of the laser irradiation with respect to the insulating resin layer and the adhesion between the insulating resin layer and the connection circuit film or the wiring film are good.

本發明團隊為解決上述課題而專注鑽研之結果,發現藉由設計一種方法,其利用特定的雷射於絕緣樹脂層形成凹部構造,且具備以噴墨法於凹部內部塗布含有金屬奈米粒子的分散液之工程,便能夠解決上述課題,進而完成本發明。此外,還發現特定的熱硬化性樹脂組成物係適用於上述方法。 In order to solve the above problems, the inventors of the present invention have focused on the results of the research and found that by designing a method, a specific laser is used to form a concave portion structure in an insulating resin layer, and an ink jet method is applied to the inside of the concave portion to coat the metal nanoparticle. The above problems can be solved by the construction of the dispersion, and the present invention is completed. Further, it has been found that a specific thermosetting resin composition is suitable for the above method.

亦即,本發明之印刷配線板之電路形成方法,其特徵為,具備:凹部構造形成工程,係針對金屬箔層積板上具有紫外線吸收性之絕緣樹脂層,以脈衝寛度為奈秒級之紫外線雷射予以照射,藉此除去絕緣樹脂層以形成凹部構造;及分散液塗布工程,在以前述凹部構造形成工程形成之凹部構造內部,藉由噴墨法塗布含有金屬奈米粒子之分散液。 In other words, the method for forming a circuit of a printed wiring board according to the present invention includes a structure for forming a recessed portion, and is an insulating resin layer having ultraviolet absorbing properties on a metal foil laminated board, and has a pulse twist of nanoseconds. The ultraviolet laser is irradiated, whereby the insulating resin layer is removed to form a concave portion structure; and the dispersion coating process is performed, and the dispersion containing the metal nanoparticles is coated by an inkjet method inside the concave portion structure formed by the recess structure formation process. liquid.

本發明之印刷配線板之電路形成方法中,前述凹部構造,係為溝槽及通孔的其中一種以上較佳。 In the circuit forming method of the printed wiring board of the present invention, the recess structure is preferably one or more of a groove and a through hole.

此外,本發明之印刷配線板之電路形成方法中,前述分散液塗布工程中,將前述分散液填充於前述凹部構造內部全體較佳。 Further, in the circuit forming method of the printed wiring board of the present invention, in the dispersion coating process, it is preferable that the dispersion liquid is filled in the entire inside of the concave portion structure.

此外,本發明之印刷配線板之電路形成方法中,於前述分散液塗布工程之後,具有無電解鍍覆工程較佳。 Further, in the circuit forming method of the printed wiring board of the present invention, it is preferable to have an electroless plating process after the dispersion coating process.

本發明之印刷配線板,其特徵為:具備由上述任一種印刷配線板之電路形成方法所得到之電路。 A printed wiring board according to the present invention is characterized by comprising a circuit obtained by a circuit forming method of any of the above printed wiring boards.

本發明之熱硬化性樹脂組成物,屬於用來形成上述任一種印刷配線板之電路形成方法中的絕緣樹脂層之熱硬化性樹脂組成物,其特徵為,含有下述的其中一種以上:(A)具有線狀構造之聚醯亞胺樹脂、(B)具有多環芳香族烴環之環氧樹脂、及(C)紫外線吸收劑。 The thermosetting resin composition of the present invention is a thermosetting resin composition for forming an insulating resin layer in the circuit forming method of any of the above-described printed wiring boards, and is characterized in that it contains one or more of the following: A) a polyimine resin having a linear structure, (B) an epoxy resin having a polycyclic aromatic hydrocarbon ring, and (C) an ultraviolet absorber.

此外,本發明之熱硬化性樹脂組成物中,前述(B)具有多環芳香族烴環之環氧樹脂,係為萘系(Naphthalene)環氧樹脂及蒽系(Anthracene)環氧樹脂的其中一種以上較佳。 Further, in the thermosetting resin composition of the present invention, the epoxy resin having a polycyclic aromatic hydrocarbon ring (B) is a naphthalene epoxy resin and an anthracene epoxy resin. More than one is preferred.

藉由本發明,可提供一種印刷配線板之電路形成方法,使用其之熱硬化性樹脂組成物,及印刷配線板,其不需要鍍覆前處理工程,及在鍍覆膜或導電性塗膜 上多餘形成的金屬之研磨工程,即可形成微細電路,且雷射照射對於絕緣樹脂層的加工性、以及絕緣樹脂層與連接電路膜或配線膜的密合性良好。 According to the present invention, it is possible to provide a circuit forming method for a printed wiring board, a thermosetting resin composition using the same, and a printed wiring board which does not require a plating pretreatment process, and a plating film or a conductive coating film. In the polishing process of the excessively formed metal, a fine circuit can be formed, and the processability of the laser irradiation to the insulating resin layer and the adhesion of the insulating resin layer to the connection circuit film or the wiring film are good.

1‧‧‧金屬箔層積板 1‧‧‧metal foil laminate

1A‧‧‧絕緣樹脂層 1A‧‧‧Insulating resin layer

1B‧‧‧金屬層 1B‧‧‧ metal layer

2A‧‧‧溝槽 2A‧‧‧ trench

2B‧‧‧通孔 2B‧‧‧through hole

3‧‧‧含有金屬奈米粒子之分散液 3‧‧‧Dispersion containing metal nanoparticles

4A‧‧‧配線膜 4A‧‧‧ wiring film

4B‧‧‧連接電路膜 4B‧‧‧Connected circuit film

5‧‧‧吐出噴頭 5‧‧‧ spout nozzle

6‧‧‧紫外線雷射 6‧‧‧UV laser

7‧‧‧剖面線 7‧‧‧ hatching

8‧‧‧研磨機 8‧‧‧ Grinder

9‧‧‧前處理劑或撥水劑 9‧‧‧Pretreatment agent or water repellent

10‧‧‧觸媒液(鍍覆核) 10‧‧‧catalyst (plating core)

11‧‧‧無電解鍍覆 11‧‧‧ Electroless plating

[圖1]本發明印刷配線板之電路形成方法的合適例示意模型圖。 Fig. 1 is a schematic view showing a schematic example of a method of forming a circuit of a printed wiring board of the present invention.

[圖2]習知印刷配線板之電路形成方法的一例示意模型圖。 Fig. 2 is a schematic view showing an example of a circuit forming method of a conventional printed wiring board.

[圖3]習知印刷配線板之電路形成方法的一例示意模型圖。 Fig. 3 is a schematic view showing an example of a circuit forming method of a conventional printed wiring board.

本發明之印刷配線板之電路形成方法,其特徵為,具備凹部構造形成工程、及分散液塗布工程。利用圖1,說明本發明印刷配線板之電路形成方法的一個合適態樣。亦即,藉由雷射照射(圖1(a)),形成溝槽2A或通孔2B等凹部構造(圖1(b)),再以噴墨法塗布含有金屬奈米粒子的分散液((c11)或(c21))。欲在凹部構造的一部分塗布上述分散液時,較佳是以無電解鍍覆來層積金屬,以充填或被覆凹部構造內部(圖1(c22))。 A circuit forming method of a printed wiring board according to the present invention is characterized in that it has a recess structure forming process and a dispersion liquid coating process. A suitable aspect of the circuit forming method of the printed wiring board of the present invention will be described using FIG. That is, by the laser irradiation (Fig. 1 (a)), a concave structure such as the groove 2A or the through hole 2B is formed (Fig. 1 (b)), and the dispersion containing the metal nanoparticles is applied by an inkjet method ( (c11) or (c21)). When the dispersion liquid is to be applied to a part of the concave portion structure, it is preferable to laminate the metal by electroless plating to fill or coat the inside of the concave portion structure (Fig. 1 (c22)).

合適的方式是,在分散液充填後或無電解鍍覆後,藉 由施以燒成處理,使金屬奈米粒子結合,以形成連接電路膜或配線膜(圖1(d))。 A suitable way is to borrow after the dispersion is filled or after electroless plating. The metal nanoparticles are bonded by a firing treatment to form a connection circuit film or a wiring film (Fig. 1 (d)).

其後,亦可以絕緣層被覆上述連接電路膜或配線膜(圖1(e))、或亦可以金凸塊或銲料凸塊接合。此外,亦可反覆上述同樣工程,來形成層積構造。 Thereafter, the connection circuit film or the wiring film may be coated on the insulating layer (Fig. 1(e)), or gold bumps or solder bumps may be bonded. In addition, the same structure can be repeated to form a laminated structure.

圖1(f)為從上部觀察以本發明方法形成電路之印刷配線板模型圖。以下,針對各工程詳細說明。 Fig. 1(f) is a model diagram of a printed wiring board in which a circuit is formed by the method of the present invention as viewed from above. The details of each project are described below.

〔凹部構造形成工程〕 [Concave structure formation project]

凹部構造形成工程,係為針對金屬箔層積板(metal-clad laminate)上具有紫外線吸收性之絕緣樹脂層,以脈衝寛度為奈秒級之紫外線雷射予以照射,藉此除去絕緣樹脂層以形成凹部構造之工程。亦即,如圖1(a)所示,針對具有絕緣樹脂層1A與金屬層1B之金屬箔層積板,從絕緣樹脂層1A的上方照射脈衝寛度為奈秒級之紫外線雷射。如此一來,便形成如圖1(b)所示之凹部構造。凹部較佳是有溝槽2A及通孔2B的其中一種以上。溝槽2A之形成,係藉由除去上述紫外線雷射的照射部當中的一部分絕緣樹脂層1A而進行,金屬層1B不會露出。通孔2B係藉由除去上述紫外線雷射的照射部當中的所有絕緣樹脂層1A,使金屬層1B露出而形成。 The recess structure forming process is an ultraviolet resin having an ultraviolet absorbing property on a metal-clad laminate, and is irradiated with an ultraviolet laser having a pulse width of nanoseconds, thereby removing the insulating resin layer. To form the construction of the recess structure. In other words, as shown in Fig. 1(a), for the metal foil laminated board having the insulating resin layer 1A and the metal layer 1B, an ultraviolet laser having a pulse width of nanoseconds is irradiated from above the insulating resin layer 1A. As a result, a concave structure as shown in Fig. 1(b) is formed. The recessed portion preferably has one or more of the groove 2A and the through hole 2B. The formation of the groove 2A is performed by removing a part of the insulating resin layer 1A among the irradiation portions of the ultraviolet laser, and the metal layer 1B is not exposed. The through hole 2B is formed by exposing all the insulating resin layers 1A in the irradiation portion of the ultraviolet laser and exposing the metal layer 1B.

(紫外線雷射) (ultraviolet laser)

上述紫外線雷射,係為以紫外線區域(指波長200nm 至400nm者)作為振盪波長之雷射,本發明中,以YLF結晶為媒介之第三諧波雷射(351nm)、YAG或YVO4結晶為媒介之第三諧波雷射(355nm)尤其合適。 The ultraviolet laser is a laser having an ultraviolet ray (referred to as a wavelength of 200 nm to 400 nm) as an oscillation wavelength. In the present invention, a third harmonic laser (351 nm), YAG or YVO 4 crystal mediated by YLF crystal is used. A third harmonic laser (355 nm) for the medium is particularly suitable.

上述紫外線雷射之照射方法,有脈衝(Pulse)照射與連續照射,但脈衝照射較不會使凹部構造周緣的絕緣樹脂層有熱膨脹及裂痕等損傷,故本發明中採用脈衝照射。此外,脈衝照射的反覆頻率以1kHz~500kHz為止較佳,更佳為10kHz~100kHz。 The ultraviolet laser irradiation method includes pulse irradiation and continuous irradiation. However, pulse irradiation does not cause thermal expansion or cracking of the insulating resin layer on the periphery of the concave portion structure. Therefore, pulse irradiation is employed in the present invention. Further, the repetition frequency of the pulse irradiation is preferably from 1 kHz to 500 kHz, more preferably from 10 kHz to 100 kHz.

若未滿1kHz,則雷射加工需花費長時間,可能導致生產性降低。另一方面,若超過500kHz,以奈秒雷射而言,每一脈衝的照射時間會變短,故容易引起絕緣樹脂層的分解、氣化及蓄熱,故除去絕緣樹脂層後可能會在基材引發裂痕等損傷。此外,紫外線雷射的焦點位置位於絕緣樹脂層表面較佳。 If it is less than 1 kHz, laser processing takes a long time, which may result in reduced productivity. On the other hand, if it exceeds 500 kHz, the irradiation time per pulse is shortened by the nanosecond laser, so decomposition, vaporization, and heat storage of the insulating resin layer are liable to occur, so that the insulating resin layer may be removed after the removal of the insulating resin layer. The material causes damage such as cracks. Further, the focus position of the ultraviolet laser is preferably on the surface of the insulating resin layer.

本發明中,紫外線雷射的脈衝寛度為奈秒級。藉由使用奈秒級脈衝寛度之紫外線雷射,所形成的凹部之內表面,會具有適當的表面粗糙度,藉由固著效應(anchor effect),絕緣樹脂層與凹部構造內形成之配線膜及連接電路膜之間,可獲得高密合性。較佳之脈衝寛度為1~100ns、更佳為1~50ns。 In the present invention, the pulse intensity of the ultraviolet laser is in the order of nanoseconds. By using a nanosecond pulsed ultraviolet laser, the inner surface of the formed recess has an appropriate surface roughness, and the wiring formed in the insulating resin layer and the recess structure by an anchor effect High adhesion can be obtained between the film and the connection circuit film. Preferably, the pulse width is from 1 to 100 ns, more preferably from 1 to 50 ns.

上述紫外線雷射的照射能量,以每一脈衝之照射能量〔μJ/pulse〕來表示,本發明中,從0.5μJ/pulse至50μJ/pulse為止較佳,更佳為1μJ/pulse至10μJ/pulse。照射時,使其以同一照射能量來進行。若未 滿0.5μJ/pulse,則幾乎無法除去絕緣樹脂層,故難以形成通孔及溝槽,並不合適。另一方面,若超過50μJ/pulse,則除去絕緣樹脂層後可能會在基材引起裂痕等損傷。 The irradiation energy of the ultraviolet laser is expressed by the irradiation energy [μJ/pulse] per pulse. In the present invention, it is preferably from 0.5 μJ/pulse to 50 μJ/pulse, more preferably from 1 μJ/pulse to 10 μJ/pulse. . At the time of irradiation, it is carried out with the same irradiation energy. If not When the thickness is 0.5 μJ/pulse, the insulating resin layer can hardly be removed, so that it is difficult to form through holes and grooves, which is not suitable. On the other hand, when it exceeds 50 μJ/pulse, the insulating resin layer may be removed, and the substrate may be damaged by cracks or the like.

上述紫外線雷射的照射次數,必須持續進行 至形成所需凹部構造為止,照射次數與絕緣樹脂層的膜厚成比例。具體來說,欲形成通孔時,要除去膜厚10~20μm的絕緣樹脂層而到達金屬層所必要之雷射照射次數,以1次~50次較佳。此外,要除去膜厚20~30μm的絕緣樹脂層而形成到達金屬層之通孔所必要的雷射照射次數,以1次~100次較佳,更佳為10次~80次。若照射次數過多,則可能會對除去絕緣樹脂層後的金屬層引起裂痕或除去等損傷。同樣地,欲形成溝槽時,以任意的加工行進速度及照射點數,一面移動一面照射雷射。另,欲形成溝槽時,係進行除去一部分的絕緣樹脂層,故除去之厚度會低於形成通孔時之膜厚10~20μm、或20~30μm。 The number of exposures of the above ultraviolet laser must be continued The number of times of irradiation is proportional to the film thickness of the insulating resin layer until the desired recess structure is formed. Specifically, when a through hole is to be formed, the number of times of laser irradiation necessary to remove the insulating resin layer having a film thickness of 10 to 20 μm and reaching the metal layer is preferably from 1 to 50 times. Further, the number of times of laser irradiation necessary for removing the insulating resin layer having a film thickness of 20 to 30 μm to form a through hole reaching the metal layer is preferably from 1 to 100 times, more preferably from 10 times to 80 times. If the number of times of irradiation is too large, damage may occur due to cracks or removal of the metal layer after removing the insulating resin layer. Similarly, when a groove is to be formed, the laser beam is irradiated while moving at an arbitrary processing speed and number of irradiation points. Further, when a trench is to be formed, a part of the insulating resin layer is removed, so that the thickness of the removed layer is lower than the film thickness of 10 to 20 μm or 20 to 30 μm when the via hole is formed.

以上述紫外線雷射形成之凹部構造形狀,以 通孔而言,係表示成絕緣樹脂層表面的直徑D與金屬層表面(通孔底面)的直徑d之比率,亦即以式子(d/D)×100〔%〕來表示。此外,以溝槽而言,係同樣地表示成絕緣樹脂層表面的寬度d’及絕緣樹脂層底面(溝槽底面)的寬度D’之比率。本發明中,通孔及溝槽均以50%以上較佳,更佳為70%以上。若未滿50%,則通孔底面或溝槽底面會過窄,可能引發銲料或金屬鍍覆的密合不良問 題。此外,若超過100%,則通孔、溝槽會成為逆推拔狀,並不合適。 a concave structure shape formed by the above ultraviolet laser, The through hole is expressed as a ratio of the diameter D of the surface of the insulating resin layer to the diameter d of the surface of the metal layer (the bottom surface of the through hole), that is, expressed by the formula (d/D) × 100 [%]. Further, the groove is similarly expressed as the ratio of the width d' of the surface of the insulating resin layer and the width D' of the bottom surface (the bottom surface of the groove) of the insulating resin layer. In the present invention, the through holes and the grooves are preferably 50% or more, more preferably 70% or more. If it is less than 50%, the bottom surface of the through hole or the bottom surface of the groove may be too narrow, which may cause adhesion of solder or metal plating. question. Further, if it exceeds 100%, the through holes and the grooves may be reversely pushed out, which is not suitable.

此外,以上述紫外線雷射形成之通孔直徑及 溝槽寬度,其在絕緣樹脂層表面的直徑D,以10μm~70μm較佳,更佳為10μm~45μm。藉由使用紫外線雷射,例如能夠提供可對應窄節距電路配線之印刷配線板,這是廣泛使用之碳酸氣體雷射及使用其之組成物所無法對應的。 In addition, the diameter of the through hole formed by the above ultraviolet laser and The groove width, which is the diameter D of the surface of the insulating resin layer, is preferably from 10 μm to 70 μm, more preferably from 10 μm to 45 μm. By using an ultraviolet laser, for example, it is possible to provide a printed wiring board which can correspond to a narrow pitch circuit wiring, which is a widely used carbon dioxide gas laser and a composition which cannot be used.

上述紫外線雷射照射後,亦可進行除膠渣(Desmear)處理,其目的在於分解除去紫外線雷射加工後的加工殘渣等殘留成分。除膠渣處理可採用任一周知方法,例如有在真空下使用電漿發生裝置的乾式除膠渣法,或使用過錳酸塩溶液等除膠渣處理藥液的濕式除膠渣法。 After the ultraviolet laser irradiation, desmear treatment may be performed to decompose and remove residual components such as processing residues after ultraviolet laser processing. The desmear treatment may be carried out by any known method, for example, a dry degumming method using a plasma generating apparatus under vacuum, or a wet degumming method using a desmear treatment liquid such as a permanganate solution.

(金屬箔層積板) (metal foil laminate)

上述金屬箔層積板,例如如圖1(a)中符號1所示,具有在金屬層上形成絕緣樹脂層之構造。金屬層是在基材表面上藉由銅、銀等導體來形成配線圖樣者,較佳為銅箔層積板。 The metal foil laminated board has a structure in which an insulating resin layer is formed on a metal layer, as shown by reference numeral 1 in Fig. 1(a). The metal layer is a wiring pattern formed on a surface of a substrate by a conductor such as copper or silver, and is preferably a copper foil laminate.

上述金屬層之基材,凡是用於印刷配線板之基材則並未特別限定,例如,作為材料,有使用紙酚、紙環氧、環氧玻璃布、聚醯亞胺玻璃、環氧玻璃布/不織布、環氧玻璃布/紙、環氧合成纖維、環氧醯胺、聚醯亞胺樹脂、聚苯醚樹脂(Polyphenylene Ether Resin)、雙 馬來醯亞胺-三嗪樹脂(Bismaleimide-Triazine Resin)、聚醚醯亞胺樹脂(Polyetherimide Resin)、氟.聚乙烯.PPO.氰酸酯等者,或玻璃基材、陶瓷基材、晶圓板。 The substrate of the above metal layer is not particularly limited as long as it is used for a printed wiring board. For example, as a material, paper phenol, paper epoxy, epoxy glass cloth, polyimide glass, and epoxy glass are used. Cloth/non-woven fabric, epoxy glass cloth/paper, epoxy synthetic fiber, epoxy amide, polyimine resin, polyphenylene Ether Resin, double Bismaleimide-Triazine Resin, Polyetherimide Resin, Fluorine. Polyethylene. PPO. Cyanate ester or the like, or a glass substrate, a ceramic substrate, or a wafer plate.

(絕緣樹脂層) (insulating resin layer)

上述絕緣樹脂層,係由具有紫外線吸收性之絕緣性樹脂組成物所構成。藉由具有紫外線吸收性,適合被紫外線雷射除去,而能形成凹部構造。用來形成絕緣樹脂層之樹脂組成物,凡是具有紫外線吸收性及絕緣性者均可,但下述本發明之熱硬化性樹脂組成物尤佳。 The insulating resin layer is composed of an insulating resin composition having ultraviolet absorbing properties. By having ultraviolet absorbing properties, it is suitable to be removed by ultraviolet laser light, and a concave structure can be formed. The resin composition for forming the insulating resin layer may be any one having ultraviolet absorbing property and insulating property, but the thermosetting resin composition of the present invention described below is particularly preferable.

〔分散液塗布工程〕 [Dispersion Coating Engineering]

分散液塗布工程,係為將含有金屬奈米粒子的分散液,藉由噴墨法塗布於上述凹部構造內部之工程。可如圖1(c11)所示,在凹部構造內全體填充分散液,亦可如圖1(c21)所示,在凹部構造內的一部分,較佳為底部,塗布分散液。噴墨法可為壓電式、熱泡式的任一種,使用具備圖1中符號5所示的吐出噴頭之液滴吐出裝置來進行。噴墨式之液滴吐出裝置,係使具備吐出液滴(分散液)的吐出噴嘴之吐出噴頭5,與上述金屬箔層積板相對移動,藉此使吐出噴頭5高精度地定位於所需之凹部構造上,並吐出一定量的液滴(含有金屬奈米粒子之分散液3),落至凹部構造內。如此一來,便能在任意位置塗布所需量之分散液。所謂所需量,係指因應照射雷射而成之凹部構 造,針對除去絕緣樹脂層之全體所填充的量,或填充於其一部分的量。另,此時含有金屬奈米粒子的金屬層(連接電路膜或配線膜)之體積電阻值為2~100μΩ.cm。 The dispersion coating process is a process in which a dispersion containing metal nanoparticles is applied to the inside of the concave structure by an inkjet method. As shown in Fig. 1 (c11), the dispersion liquid may be entirely filled in the concave portion structure, or as shown in Fig. 1 (c21), a part of the concave portion structure, preferably the bottom portion, may be coated with a dispersion liquid. The inkjet method can be either a piezoelectric type or a thermal bubble type, and can be carried out using a droplet discharge device having a discharge head shown by reference numeral 5 in Fig. 1 . In the inkjet type liquid droplet discharging device, the discharge head 5 having the discharge nozzle for discharging the liquid droplets (dispersion liquid) is moved relative to the metal foil laminated plate, whereby the discharge head 5 is accurately positioned. In the concave portion structure, a certain amount of liquid droplets (dispersion liquid 3 containing metal nanoparticles) is discharged, and falls into the concave structure. In this way, the desired amount of dispersion can be applied at any position. The so-called required amount refers to the concave structure formed by the irradiation of the laser. The amount to be filled with the entire insulating resin layer or the amount of a part of the insulating resin layer. In addition, the metal layer (connecting circuit film or wiring film) containing metal nanoparticles at this time has a volume resistance value of 2 to 100 μΩ. Cm.

此外,分散液塗布後,亦可設置乾燥工程,並反覆塗布與乾燥以填充分散液。此類噴墨式之液滴吐出裝置可使用任一周知者,此外,亦可使用市售之裝置。 Further, after the dispersion is applied, a drying process may be provided, and coating and drying are repeated to fill the dispersion. Any such known one can be used for such an ink jet type droplet discharge device, and a commercially available device can also be used.

由於藉由噴墨法來塗布含有金屬奈米粒子的分散液,故無需蝕刻除去無電解鍍覆或觸媒,可省略不用鍍覆阻絕層。 Since the dispersion containing the metal nanoparticles is applied by the inkjet method, it is not necessary to remove the electroless plating or the catalyst by etching, and the plating barrier layer can be omitted.

(分散液) (Dispersions)

上述分散液,係為使金屬奈米粒子散布於溶劑中者。作為溶劑,例如有水、酮類、芳香族烴類、二醇醚類(glycol ether)、二醇醚醋酸類(glycol ether acetate)、酯類(ester)、醇類(alcohol)、聚醇類(polyol)、脂肪族烴、石油系溶劑等。更具體而言,例如有丁酮(Methyl Ethyl Ketone)、環己酮(Cyclohexanone)等酮類(Ketone);甲苯、二甲苯(Xylene)、四甲苯(Tetramethylbenzene)等芳香族烴類;賽璐素(Cellosolve)、乙二醇單甲醚(Methyl Cellosolve)、乙二醇單丁醚(Butyl cellosolve)、卡必醇(Carbitol)、二乙二醇單甲醚(Methyl Carbitol)、二乙二醇丁醚(Butyl Carbitol)、丙二醇單甲醚(Propylene Glycol Monomethyl Ether)、二丙二醇單甲醚 (Dipropylene Glycol Monomethyl Ether)、二丙二醇二甲醚(Dipropylene Glycol Dimethyl Ether)、三乙二醇單乙醚(Triethylene Glycol Monoethyl Ether)等二醇醚類;醋酸乙酯(Ethyl Acetate)、醋酸丁酯(Butyl Acetate)、二丙二醇甲醚醋酸酯(Dipropylene Glycol Methyl Ether Acetate)、丙二醇甲醚醋酸酯(Propylene Glycol Methyl Ether Acetate)、丙二醇乙醚醋酸酯(Propylene Glycol Ethyl Ether Acetate)、丙二醇丁醚醋酸酯(Propylene Glycol Butyl Ether Acetate)等酯類;乙醇(Ethanol)、丙醇(Propanol)、乙二醇(Ethylene Glycol)、丙二醇(Propylene Glycol)、丁二醇(Butylene Glycol)、1,3-丁二醇(1,3-Butylene Glycol)1,4-丁二醇(1,4-Butylene Glycol)、2,3-丁二醇(2,3-Butylene Glycol)、戊二醇(Pentanediol)、己二醇(Hexanediol)、辛二醇異莰基己醇(Octanediol Isobornyl Hexanol)、松油醇(Terpineol)等單環式單帖烯醇(Monoterpene Alcohol)等醇類;辛烷(Octane)、癸烷(Decane)等脂肪族烴;石油醚(Petroleum Ether)、石油腦(Petroleum Naphtha)、氫化石油腦(Hydrogenated Petroleum Naphtha)、石油腦溶劑(Solvent Naphtha)等石油系溶劑、等。該類溶劑可單獨使用1種,亦可使用2種以上的混合物。 The dispersion liquid is one in which metal nanoparticles are dispersed in a solvent. Examples of the solvent include water, ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, and polyalcohols. (polyol), aliphatic hydrocarbon, petroleum solvent, and the like. More specifically, for example, ketones such as methyl ethyl ketone (Kethyl Ethyl Ketone) and cyclohexanone (Ketone); aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; (Cellosolve), Methyl Cellosolve, Butyl cellosolve, Carbitol, Methyl Carbitol, Diethylene Glycol Butyl Carbitol, Propylene Glycol Monomethyl Ether, Dipropylene Glycol Monomethyl Ether (Dipropylene Glycol Monomethyl Ether), Dipropylene Glycol Dimethyl Ether, Triethylene Glycol Monoethyl Ether and other glycol ethers; Ethyl Acetate, Butyl Acetate (Butyl) Acetate), Dipropylene Glycol Methyl Ether Acetate, Propylene Glycol Methyl Ether Acetate, Propylene Glycol Ethyl Ether Acetate, Propylene Glycol Butyl Ether Acetate and other esters; Ethanol, Propanol, Ethylene Glycol, Propylene Glycol, Butylene Glycol, 1,3-Butanediol (1) , 3-Butylene Glycol) 1,4-Butylene Glycol, 2,3-Butylene Glycol, Pentanediol, Hexanediol ), an alcohol such as Octanediol Isobornyl Hexanol or terpineol, such as Mononotepene Alcohol; Octane, Decane, etc. Aliphatic hydrocarbon; petroleum ether (Petroleum Ether ), petroleum naphtha, hydrogenated petroleum naphtha, petroleum solvent such as Solvent Naphtha, and the like. These solvents may be used alone or in combination of two or more.

分散液中所含之金屬奈米粒子的金屬,例如可使用金、銀、銅、鈀、鎢、鎳、鉭、鉍、鉛、銦、錫、 鈦、鋁等,及其合金、其氧化物、還可使用ITO(Indium Tin Oxide)、氧化銦等。其中,使用銅、銀較佳。此外,亦可為將金屬奈米粒子表面藉由檸檬酸鈉或檸檬酸銨等檸檬酸鹽、銨離子、四級銨化合物、胺等氮化合物加以處理之物。 The metal of the metal nanoparticle contained in the dispersion may be, for example, gold, silver, copper, palladium, tungsten, nickel, rhenium, ruthenium, lead, indium, tin, or the like. Titanium, aluminum, etc., and alloys thereof, oxides thereof, and ITO (Indium Tin Oxide), indium oxide, or the like can also be used. Among them, copper and silver are preferably used. Further, the surface of the metal nanoparticles may be treated with a nitrous acid such as sodium citrate or ammonium citrate, an ammonium ion, a quaternary ammonium compound or a nitrogen compound such as an amine.

上述金屬奈米粒子(平均粒徑為nm等級之金屬粒子),其原始粒子(primary particle)的平均粒徑以5~300nm為佳,10~200nm較佳,更佳為10~100nm。平均粒徑可以藉由TEM或SEM等電子顯微鏡來觀測金屬粒子,隨機抽出100個金屬粒子加以平均而求得。金屬粒子的平均粒徑落在上述範圍,亦即奈米尺寸,藉此,能夠使塗布分散液並印刷並燒結而成之電極或配線的表面粗糙度變低,且能明顯降低燒成溫度等,會與一般粒徑(μm等級)的金屬粒子呈現完全不同的性狀。 The above metal nanoparticles (metal particles having an average particle diameter of nm) preferably have an average particle diameter of 5 to 300 nm, preferably 10 to 200 nm, more preferably 10 to 100 nm. The average particle diameter can be obtained by observing metal particles by an electron microscope such as TEM or SEM, and randomly extracting 100 metal particles and averaging them. The average particle diameter of the metal particles falls within the above range, that is, the nanometer size, whereby the surface roughness of the electrode or the wiring which is formed by printing and sintering the dispersion liquid can be lowered, and the firing temperature can be remarkably lowered. It will exhibit completely different properties from metal particles of a general particle size (μm grade).

金屬奈米粒子之製造方法並未特別限定,例如可為氣相合成法或液相還原法等任一種製造方法。市售品中具有上述平均粒徑之銀粒子者,例如有DOWA ELECTRONICS公司製之銀奈米粒子乾粉-1、-2、-3、-4等。銅奈米粒子之市售品,例如有IOX公司製之銅奈米粒子Cu-001等。 The method for producing the metal nanoparticles is not particularly limited, and for example, it may be any one of a gas phase synthesis method or a liquid phase reduction method. Among the commercially available silver particles having the above average particle diameter, for example, silver nanoparticle dry powder-1, -2, -3, -4, etc., manufactured by DOWA ELECTRONICS. Commercially available products of copper nanoparticles include, for example, copper nanoparticles Cu-001 manufactured by IOX Corporation.

此外,上述分散液,亦可含有銅、鎳、鈀等金屬的氫化物微粒子來作為金屬奈米粒子。氫化物微粒子,係以金屬原子與氫原子鍵結之狀態而存在,故在空氣環境下,比金屬本身的微粒子還不易被氧化。金屬的氫化物微粒子,例如可藉由日本專利第4747839號記載之方法 而製造。亦即,可藉由如下之方法製造:將上述金屬的水溶性化合物溶解於水中,將pH調整成3以下之後,添加具有從胺基(Amino)、醯胺基(Amide)、對胺苯磺醯基(Sulfanilyl)、磺醯基(Sulfanyl)、羥基(Hydroxyl)、羧基(Carboxy)、羰基(Carbonyl)及醚型之氧基(Oxy)所構成之群組中所選擇1種以上之官能基的有機化合物,與有機性液體,一面攪拌一面加入還原劑,將水溶液中的金屬離子還原。 Further, the dispersion may contain hydride fine particles of a metal such as copper, nickel or palladium as metal nanoparticles. Since the hydride fine particles are present in a state in which a metal atom is bonded to a hydrogen atom, it is less likely to be oxidized than the fine particles of the metal itself in an air environment. Metal hydride microparticles, for example, by the method described in Japanese Patent No. 4747839 And manufacturing. That is, it can be produced by dissolving a water-soluble compound of the above metal in water, adjusting the pH to 3 or less, and then adding an amino group (Amino), an amine group (Amide), and a sulfonamide. One or more functional groups selected from the group consisting of Sulfanilyl, Sulfanyl, Hydroxyl, Carboxy, Carbonyl, and Ether (Oxy) The organic compound, with an organic liquid, is added to the reducing agent while stirring to reduce the metal ions in the aqueous solution.

上述分散液中的金屬奈米粒子濃度,以1~85 質量%較佳,10~50質量%更佳。此外,分散液的黏度(25℃)以0.5~10000mPa.s較佳,1~100mPa.s更佳。黏度例如可藉由錐板式(Cone-Plate)黏度計來測定。 The concentration of metal nanoparticles in the above dispersion is from 1 to 85 The mass % is better, and 10 to 50% by mass is more preferable. In addition, the viscosity of the dispersion (25 ° C) is 0.5 ~ 10000 mPa. s is better, 1~100mPa. s is better. Viscosity can be determined, for example, by a Cone-Plate viscometer.

(無電解鍍覆工程) (electroless plating project)

本發明之方法中,當於上述分散液塗布工程,在凹部構造的一部分塗布分散液時,如圖1中(c21)、(c22)所示,藉由無電解鍍覆,以金屬被覆或填充凹部構造內部較佳。如上所述,藉由噴墨法將含有金屬奈米粒子之分散液塗布於凹部構造內部,將其乾燥,除去溶劑後而成之金屬膜,會發揮無電解鍍覆的觸媒核或開始點之作用,金屬會逐漸層積。作為無電解鍍覆,例如有無電解銅鍍覆、無電解鎳鍍覆、無電解鎳-鎢合金鍍覆、無電解錫鍍覆、無電解金鍍覆等,以無電解銅鍍覆較佳。無電解鍍覆可採用 任一種周知之方法、溶液,並未特別限定。舉例來說,作為無電解銅鍍覆液,可使用含有硫酸銅、EDTA、乙醛酸(Glyoxylic Acid)、氫氧化鈉,且pH調整成12.5之物。此外,作為無電解鎳鍍覆液,例如可使用含有硫酸鎳、次磷酸鈉(Sodium Hypophosphite)、檸檬酸鹽,且pH調整成8至9之物。作為無電解鍍覆方法,只要在加熱條件下將基材浸漬於鍍覆液即可,較佳為在60~80℃的溫度條件下,將基材浸漬於鍍覆液中30~600分鐘。此外,浸漬時,攪拌鍍覆液較佳。 In the method of the present invention, when the dispersion liquid is applied to a part of the concave structure in the dispersion coating process, as shown in (c21) and (c22) of FIG. 1, the metal is coated or filled by electroless plating. The interior of the recess is preferably internal. As described above, the dispersion containing the metal nanoparticles is applied to the inside of the concave structure by an inkjet method, and the metal film is dried by removing the solvent, thereby exhibiting a catalyst core or starting point of electroless plating. As a result, the metal will gradually build up. Examples of electroless plating include electroless copper plating, electroless nickel plating, electroless nickel-tungsten alloy plating, electroless tin plating, electroless gold plating, and the like, and electroless copper plating is preferred. Electroless plating can be used Any of the well-known methods and solutions are not particularly limited. For example, as the electroless copper plating solution, a material containing copper sulfate, EDTA, Glyoxylic Acid, sodium hydroxide, and having a pH adjusted to 12.5 can be used. Further, as the electroless nickel plating solution, for example, a material containing nickel sulfate, sodium hypophosphite, citrate, and pH adjusted to 8 to 9 can be used. As the electroless plating method, the substrate may be immersed in the plating solution under heating, and it is preferred to immerse the substrate in the plating solution at a temperature of 60 to 80 ° C for 30 to 600 minutes. Further, in the case of immersion, it is preferred to stir the plating solution.

(燒成處理工程) (burning treatment project)

本發明之印刷配線板之電路形成方法中,較佳是,在分散液塗布工程或無電解鍍覆之後,將基材進行燒成處理,藉此使金屬奈米粒子燒結,形成配線膜或連接電路膜。燒成係在大氣中或氮氣環境下,於50~200℃的溫度條件下,進行5~60分鐘為佳。此外,燒成處理前,先進行乾燥工程,除去分散液中的溶劑較佳。 In the circuit forming method of the printed wiring board of the present invention, preferably, after the dispersion coating process or the electroless plating, the substrate is subjected to a baking treatment to thereby sinter the metal nanoparticles to form a wiring film or a connection. Circuit film. The firing is preferably carried out in the atmosphere or in a nitrogen atmosphere at a temperature of 50 to 200 ° C for 5 to 60 minutes. Further, it is preferred to carry out a drying process before the baking treatment to remove the solvent in the dispersion.

〔熱硬化性樹脂組成物〕 [thermosetting resin composition]

本發明之熱硬化性樹脂組成物,係為適合在上述本發明之電路形成方法所用之金屬箔層積板上,形成具有紫外線吸收性的絕緣樹脂層之熱硬化性樹脂組成物,其特徵為,含有下述的其中一種以上:(A)具有線狀構造之聚醯亞胺樹脂、(B)具有多環芳香族烴環之環氧樹脂、及 (C)紫外線吸收劑。另,僅含有(C)紫外線吸收劑來作為具有紫外線吸收性之成分時,熱硬化性樹脂組成物中必須含有熱硬化性樹脂成分。 The thermosetting resin composition of the present invention is a thermosetting resin composition which is suitable for forming an ultraviolet absorbing insulating resin layer on the metal foil laminated board used in the circuit forming method of the present invention. And containing one or more of the following: (A) a polyimine resin having a linear structure, (B) an epoxy resin having a polycyclic aromatic hydrocarbon ring, and (C) UV absorber. When the (C) ultraviolet absorber is contained as a component having ultraviolet absorbing property, the thermosetting resin composition must contain a thermosetting resin component.

具有紫外線吸收性之成分中,上述(A)具有線狀構造之聚醯亞胺樹脂,較佳為直鏈狀構造,且在樹脂骨架中含有環醯亞胺(Cyclic Imide)鍵。此外,(A)具有線狀構造之聚醯亞胺樹脂,以芳香族聚醯亞胺樹脂較佳,可溶於有機溶劑者較佳。此處所謂芳香族聚醯亞胺樹脂,較佳係為具有以下述一般式表示之構造單位的樹脂,此外,分子中具有反應性官能基較佳。反應性官能基的位置並未特別限定,可在末端,亦可在中央。 Among the components having ultraviolet absorbing properties, the (A) polyimine resin having a linear structure preferably has a linear structure and contains a Cyclic Imide bond in the resin skeleton. Further, (A) a polyimine resin having a linear structure is preferably an aromatic polyimide resin, and is preferably soluble in an organic solvent. The aromatic polyimine resin herein is preferably a resin having a structural unit represented by the following general formula, and preferably has a reactive functional group in the molecule. The position of the reactive functional group is not particularly limited and may be at the end or at the center.

(式中、R3表示具有芳香族環之4價有機基,R4表示具有芳香族環之2價有機基。但,R3具有反應性官能基時為5價有機基,R4具有反應性官能基時為3價有機基。) (Wherein, R 3 represents a tetravalent organic group of the aromatic ring, R 4 represents a divalent organic group of the aromatic ring. However, R 3 having a reactive functional group is 5 monovalent organic group, R 4 reactive The functional group is a trivalent organic group.)

(A)具有線狀構造之聚醯亞胺樹脂的具體例子,例如有V-8005(DIC公司製);GPI-NT、-HT(群榮化學工業公司製);RIKACOAT SN-20、-PN-20、-CN-20(新日本理化公司製)等。它們可單獨使用一種,亦可組合兩種類以上使用。 (A) Specific examples of the polyimine resin having a linear structure, for example, V-8005 (manufactured by DIC Corporation); GPI-NT, -HT (manufactured by Kyoei Chemical Industry Co., Ltd.); RIKACOAT SN-20, -PN -20, -CN-20 (manufactured by Nippon Chemical and Chemical Co., Ltd.), etc. They may be used alone or in combination of two or more.

另,上述(A)具有線狀構造之聚醯亞胺樹脂,凡是具有紫外線吸收性者,則除具體例記載以外之聚醯亞胺樹脂亦可使用。 Further, the above (A) has a linear structure of a polyimide resin, and any of the polyimides having ultraviolet absorbing properties may be used in addition to the specific examples.

此類(A)具有線狀構造之聚醯亞胺樹脂,在組成物中的含有率,以本發明之熱硬化性樹脂組成物的所有固態成分為基準,較佳為10~90質量%,更佳為20~60質量%。上述(A)具有線狀構造之聚醯亞胺樹脂若未滿10質量%則耐熱性會降低,故可能無法發揮本發明之效果;若超過90質量%,則硬化性會變得不充分,可能無法發揮硬化塗膜的功能。 The content of the (A) polyimine resin having a linear structure in the composition is preferably from 10 to 90% by mass based on the total solid content of the thermosetting resin composition of the present invention. More preferably, it is 20 to 60% by mass. When the polyimine resin having a linear structure (A) is less than 10% by mass, the heat resistance is lowered, so that the effect of the present invention may not be exhibited, and if it exceeds 90% by mass, the hardenability may be insufficient. The function of the hard coating film may not be exhibited.

具有紫外線吸收性之成分中,上述(B)具有多環芳香族烴環之環氧樹脂,係為含有在樹脂骨架中縮合(condensation)有2個以上芳香環之多環芳香族烴環的環氧樹脂。這些具有多環芳香族烴環之環氧樹脂當中,從可獲得良好之紫外線雷射加工性的觀點看來,特別是以在紫外線區域具有高吸收性之萘系(naphthalene)環氧樹脂或蒽系(anthracene)環氧樹脂為佳。 Among the components having ultraviolet absorbing property, the epoxy resin having a polycyclic aromatic hydrocarbon ring (B) is a ring containing a polycyclic aromatic hydrocarbon ring having two or more aromatic rings condensed in a resin skeleton. Oxygen resin. Among these epoxy resins having a polycyclic aromatic hydrocarbon ring, from the viewpoint of obtaining good ultraviolet laser processability, in particular, naphthalene epoxy resin or ruthenium having high absorbability in an ultraviolet region. Anthracene epoxy resin is preferred.

上述(B)具有多環芳香族烴環之環氧樹脂的具體例子,作為萘系環氧樹脂,例如有HP-4032、HP-4032D、HP-4700、HP-4710、HP-4770、EXA-4700、EXA-4710、EXA-7311、EXA-9900(均為DIC公司製);ESN-175、ESN-355、ESN-375(均為新日鐵化學公司製);作為蒽系環氧樹脂,例如有YX-8800(三菱化學公司製)等。它們可單獨使用一種,亦可組合兩種類以上使用。 Specific examples of the above (B) epoxy resin having a polycyclic aromatic hydrocarbon ring, as a naphthalene epoxy resin, for example, HP-4032, HP-4032D, HP-4700, HP-4710, HP-4770, EXA- 4700, EXA-4710, EXA-7311, EXA-9900 (all manufactured by DIC); ESN-175, ESN-355, ESN-375 (all manufactured by Nippon Steel Chemical Co., Ltd.); For example, there is YX-8800 (manufactured by Mitsubishi Chemical Corporation). They may be used alone or in combination of two or more.

(此類(B)具有多環芳香族烴環之環氧樹 脂,在組成物中的含有率,以本發明之熱硬化性樹脂組成物的所有固態成分為基準,較佳為10~90質量%,更佳為20~60質量%。 (This type of (B) epoxy tree with polycyclic aromatic hydrocarbon ring The content of the fat in the composition is preferably from 10 to 90% by mass, and more preferably from 20 to 60% by mass based on the total solid content of the thermosetting resin composition of the present invention.

具有紫外線吸收性之成分中,上述(C)紫外 線吸收劑,例如有二苯甲酮(Benzophenone)衍生物、苯甲酸(Benzoate)衍生物、苯并三唑(Benzotriazole)衍生物、三嗪(Triazine)衍生物、苯并噻唑(Benzothiazole)衍生物、桂皮酸鹽(Cinnamate)衍生物、鄰胺苯甲酸(Anthranilate)衍生物、二苯甲醯甲烷(Dibenzoylmethane)衍生物等。例如有,2-羥基-4-甲氧基二苯甲酮(2-Hydroxy-4-methoxybenzophenone)、2-羥基-4-n-辛氧基二苯甲酮(2-Hydroxy-4-n-octoxybenzophenone)、2,2'-二羥基-4-甲氧基二苯甲酮(2,2'-Dihydroxy-4-methoxybenzophenone)、2,4-二羥基二苯甲酮(2,4-Dihydroxy methoxybenzophenone)、水楊酸辛酯(2-Ethylhexyl Salicylate)、水楊酸苯酯(Phenyl Salicylate)、水楊酸-P-叔丁基苯酯(p-t-Butylphenyl Salicylate)、3,5-二叔丁基-4-羥基苯甲酸-2,4-二叔丁基丙酯(2,4-Di-tert-butylphenyl-3,5-Di-tert-butyl 4-Hydroxybenzoate)、3,5-二叔丁基-4-羥基苯甲酸正十六酯(Hexadecyl 3,5-di-tert-butyl-4-hydroxybenzoate)、2-(5-叔丁基-2-羥基)苯并三唑(2(2'-Hydroxy-5'-tert-butylphenyl)benzotriazole)、2-(5-甲基苯基-2-羥基) 苯并三唑(2(2'-Hydroxy-5'-methylphenyl)benzotriazole)、2-(2'-羥基-3'-叔丁基-5'-甲基苯基)-5-氯苯并三唑(2(2'-Hydroxy-3-tert-butyl-5'-methylphenyl)-5-chlorobenzotriazole)、2-(2'-羥基-3',5'-二叔丁基)-5-氯苯并三唑(2(2'-Hydroxy-3',5'-di-tert-butylphenyl)-5-chlorobenzotriazole)、2-(5-甲基苯基-2-羥基)苯并三唑(2(2'-Hydroxy-5'-methylphenyl)benzotriazole)、2-(2'-羥基-3',5'-二戊基苯基)-5-氯苯并三唑(2(2'-Hydroxy-3',5'-di-tert-amylphenyl)-5-chlorobenzotriazole)、羥苯基三嗪(Hydroxyphenyl Triazine)、雙-乙基己氧苯酚甲氧苯基三嗪(Bis-ethylhexyloxyphenol methoxylphenyl triazine)等,具體例子有CHIMASSORB81、TINUVIN120、-NP、-234、-320、-326、-327、-328、-329、-1577ED(BASF JAPAN公司製);SUMISORB 200、-250、-300、-340、-350(住友化學公司製);ADEKASTAB LA-31、-32、-36(ADEKA公司製)等。 Among the components having ultraviolet absorption, the above (C) ultraviolet Line absorbers, for example, Benzophenone derivatives, Benzoate derivatives, Benzotriazole derivatives, Triazine derivatives, Benzothiazole derivatives , Cinnamate derivatives, anthranilate derivatives, Dibenzoylmethane derivatives, and the like. For example, 2-Hydroxy-4-methoxybenzophenone, 2-hydroxy-4-n-octyloxybenzophenone (2-Hydroxy-4-n-) Octoxybenzophenone), 2,2'-Dihydroxy-4-methoxybenzophenone, 2,4-Dihydroxy methoxybenzophenone ), 2-Ethylhexyl Salicylate, Phenyl Salicylate, Pt-Butylphenyl Salicylate, 3,5-di-tert-butyl- 2,4-Di-tert-butylphenyl-3,5-Di-tert-butyl 4-Hydroxybenzoate, 3,5-di-tert-butyl- Hexadecyl 3,5-di-tert-butyl-4-hydroxybenzoate, 2-(5-tert-butyl-2-hydroxy)benzotriazole (2'2'-Hydroxy -5'-tert-butylphenyl)benzotriazole), 2-(5-methylphenyl-2-hydroxy) Benzotriazole (2'-Hydroxy-5'-methylphenyl)benzotriazole, 2-(2'-hydroxy-3'-tert-butyl-5'-methylphenyl)-5-chlorobenzotriene 2(2'-Hydroxy-3-tert-butyl-5'-methylphenyl)-5-chlorobenzotriazole, 2-(2'-hydroxy-3',5'-di-tert-butyl)-5-chlorobenzene And 2 (2'-Hydroxy-3', 5'-di-tert-butylphenyl)-5-chlorobenzotriazole, 2-(5-methylphenyl-2-hydroxy)benzotriazole (2 2'-Hydroxy-5'-methylphenyl)benzotriazole), 2-(2'-hydroxy-3',5'-dipentylphenyl)-5-chlorobenzotriazole (2'2'-Hydroxy-3 ',5'-di-tert-amylphenyl)-5-chlorobenzotriazole), Hydroxyphenyl Triazine, Bis-ethylhexyloxyphenol methoxylphenyl triazine, etc. Examples are CHIMASSORB81, TINUVIN120, -NP, -234, -320, -326, -327, -328, -329, -1577ED (manufactured by BASF JAPAN); SUMISORB 200, -250, -300, -340, -350 (made by Sumitomo Chemical Co., Ltd.); ADEKASTAB LA-31, -32, -36 (made by ADEKA).

此外,作為上述(C)紫外線吸收劑,亦可使 用一般用作為光阻絕層用之光聚合起始劑。該類光聚合起始劑,例如有胺烷基苯酮化合物(α-Aminoalkyl Phenone)、醯基膦氧化物化合物(Acylphosphine Qxide)、肟酯化合物(Oxime Ester)、二苯甲酮化合物等。光聚合起始劑的具體例子,例如有2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)丁酮-1(2-Benzyl-2- dimethylamino-1-(4-morpholinophenyl)-butanone-1)、2-(4-甲基苄基)-2-(二甲胺基)-1-(4-嗎啉苯基)-1-丁酮(2-Dimethylamino-2-(4-methyl-benzyl)-1-(4-morpholin-4-yl-phenyl)-butan-1-one)、2-甲基-1-(4-甲硫基苯基)-2-嗎啉-1-丙酮(2-Methyl-1-〔4-(methylthio)phenyl〕-2-morpholino-propane-1-one)、2-(乙醯氧基亞氨基甲基)噻噸-9-酮(2-(Acetyloxyiminomethyl)thioxanthene-9-one)、1-〔4-(苯硫基)〕-1,2-辛烷二酮2-(O-苯甲酰肟)(1,2-octanedione,1-〔4-(phenylthio)-,2-(O-benzoyloxime)〕)、1-(9-乙基-6-(2-甲基苯甲醯)-9H-咔唑-3基)(1-(9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl))、乙酮,1-〔9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基〕-,1-(O-乙醯基肟)(Ethanone,1-〔9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl〕-,1-(O-acetyl oxime))、4,4'-雙(二甲胺基)二苯甲酮(4,4'-Bis(Dimethylamino)Benzophenone)、4,4'-雙(二乙胺基)二苯甲酮(4,4'-Bis(Diethylamino)Benzophenone)等。此外,市售品的具體例子,有IRGACURE-369、-379、-907、-OXE01、-OXE02、CGI-242(BASF JAPAN公司製);N-1919(ADEKA公司製);EAB(保土谷化學公司製)等。 Further, as the above (C) ultraviolet absorber, it is also possible to It is generally used as a photopolymerization initiator for photoresist layers. Examples of such a photopolymerization initiator include an α-Aminoalkyl Phenone, an Acylphosphine Qxide, an Oxime Ester, a benzophenone compound, and the like. Specific examples of the photopolymerization initiator include, for example, 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)butanone-1 (2-Benzyl-2- Dimethylamino-1-(4-morpholinophenyl)-butanone-1), 2-(4-methylbenzyl)-2-(dimethylamino)-1-(4-morpholinyl)-1-butanone (2-Dimethylamino-2-(4-methyl-benzyl)-1-(4-morpholin-4-yl-phenyl)-butan-1-one), 2-methyl-1-(4-methylthiobenzene) 2-Methyl-1-[4-(methylthio)phenyl]-2-morpholino-propane-1-one), 2-(ethyloxyiminomethyl) 2-(Acetyloxyiminomethyl)thioxanthene-9-one, 1-[4-(phenylthio)]-1,2-octanedione 2-(O-benzohydrazide) 1,2-octanedione, 1-[4-(phenylthio)-,2-(O-benzoyloxime)], 1-(9-ethyl-6-(2-methylbenzhydrazide)-9H-carbazole -3 -(6-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl)), ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl Ethyl, 1-(9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl, Ethylene, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole-3-yl 】-, 1-(O-acetyl oxime)), 4,4'-Bis(Dimethylamino)Benzophenone, 4,4'-double (two Ethyl benzophenone (4,4'-Bis (Diethylamino) Benzophenone) and the like. Further, specific examples of commercially available products include IRGACURE-369, -379, -907, -OXE01, -OXE02, and CGI-242 (manufactured by BASF JAPAN Co., Ltd.); N-1919 (manufactured by Adeka Co., Ltd.); and EAB (Zhongtu Valley Chemical Co., Ltd.) Company system) and so on.

上述(C)紫外線吸收劑可單獨使用一種,亦可組合兩種類以上使用。 The above (C) ultraviolet absorber may be used singly or in combination of two or more.

(C)紫外線吸收劑的含有率,以本發明之熱 硬化性樹脂組成物的所有固態成分為基準,較佳為0.5~10質量%,更佳為3~7質量%。若紫外線吸收劑未滿0.5質量%,則雷射加工性可能無法充分提升,若超過10質量%,則作為絕緣樹脂層時的物性可能會降低。 (C) the content of the ultraviolet absorber, with the heat of the present invention The solid content of the curable resin composition is preferably from 0.5 to 10% by mass, more preferably from 3 to 7% by mass based on the total solid content. When the ultraviolet absorber is less than 0.5% by mass, the laser processability may not be sufficiently improved. When it exceeds 10% by mass, the physical properties when it is used as the insulating resin layer may be lowered.

另,作為具有紫外線吸收性之成分,當併用(A)具有線狀構造之聚醯亞胺樹脂與(B)具有多環芳香族烴環之環氧樹脂時,在本發明之熱硬化性樹脂組成物全體中的調配量,係為(A)具有線狀構造之聚醯亞胺樹脂與(B)具有多環芳香族烴環之環氧樹脂的合計量,其相對於本發明之熱硬化性樹脂組成物100質量比,以40質量比~99.5質量比為佳。若調配量未滿40質量比,則組成物全體中的樹脂量較低,故會難以控制組成物的流動性,印刷性可能會變差。另一方面,若調配比例超過99.5質量比,則無機填充劑等調配量會相對降低,絕緣樹脂層的機械性強度可能會降低。 Further, as a component having ultraviolet absorbing property, when (A) a polyimine resin having a linear structure and (B) an epoxy resin having a polycyclic aromatic hydrocarbon ring are used in combination, the thermosetting resin of the present invention is used. The blending amount in the entire composition is a combination of (A) a polyimine resin having a linear structure and (B) an epoxy resin having a polycyclic aromatic hydrocarbon ring, which is thermally hardened with respect to the present invention. The resin composition has a mass ratio of 100 to 40 mass% to 99.5 mass ratio. When the blending amount is less than 40 by mass, the amount of the resin in the entire composition is low, so that it is difficult to control the fluidity of the composition, and the printability may be deteriorated. On the other hand, when the blending ratio exceeds 99.5 by mass, the amount of the inorganic filler or the like is relatively lowered, and the mechanical strength of the insulating resin layer may be lowered.

此外,具有紫外線吸收性之成分中,僅含有(C)紫外線吸收劑時,作為熱硬化性樹脂成分,可使用環氧系樹脂、酚樹脂、胺基樹脂、不飽和聚酯樹脂、聚胺甲酸乙酯樹脂、矽氧樹脂、或熱硬化性聚醯亞胺樹脂等周知慣用之熱硬化性樹脂。 In addition, when only the (C) ultraviolet absorber is contained in the ultraviolet absorbing component, an epoxy resin, a phenol resin, an amine resin, an unsaturated polyester resin, or a polycarbamic acid can be used as the thermosetting resin component. A thermosetting resin which is conventionally used, such as an ethyl ester resin, a silicone resin, or a thermosetting polyimide resin.

使用上述熱硬化性樹脂組成物之絕緣樹脂層,其膜厚以10~30μm為佳。若膜厚未滿10μm,則容易因雷射照射而受到裂痕等損傷,故並不合適。此外,若 膜厚超過30μm,則作為基材時的厚度會增加,無法因應基材的薄型化。 The insulating resin layer using the above thermosetting resin composition preferably has a film thickness of 10 to 30 μm. When the film thickness is less than 10 μm, it is likely to be damaged by cracks or the like due to laser irradiation, which is not suitable. In addition, if When the film thickness exceeds 30 μm, the thickness as a substrate increases, and the thickness of the substrate cannot be reduced.

本發明之熱硬化性樹脂組成物,更可添加熱硬化觸媒、無機填充劑、著色劑、增黏劑、消泡劑、整平劑、密合性賦予劑等周知慣用之添加劑類。 Further, a thermosetting resin composition of the present invention may further contain a conventionally used additive such as a thermosetting catalyst, an inorganic filler, a colorant, a thickener, an antifoaming agent, a leveling agent, and an adhesion imparting agent.

上述熱硬化觸媒,係用來進一步提升熱硬化性樹脂組成物的熱硬化特性,例如可使用二氰二胺(Dicyandiamide)、芳香族胺等胺化合物,咪唑類、磷化合物、酸酐(Acid Anhydride)、雙環脒化合物(Bicyclic amidine)等。具體而言,可使用咪唑(Imidazole)、1-苄基-2-苯基咪唑(1-benzyl-2-phenylimidazole)、2-甲基咪唑(2-Methylimidazole)、2-乙基咪唑、2-乙基-4-甲基咪唑(2-Ethyl-4-Methylimidazole)、2-苯基咪唑(2-Phenylimidazole)、4-苯基咪唑(4-Phenylimidazole)、1-氰乙基-2-苯基咪唑(1-Cyanoethyl-2-Phenylimidazole)、1-(2-氰乙基)-2-乙基-4-甲基咪唑(1-(2-Cyanoethyl)-2-Ethyl-4-Methylimidazole)等咪唑類;二氰二胺(Dicyandiamide)、苄基二甲胺(Benzyldimethylamine)、4-(二甲胺基)-N,N-二甲基苯胺(4-(Dimethylamino)-N,N-Dimethylbenzylamine)、4-甲氧基-N,N-二甲基苯胺(4-Methoxy-N,N-Dimethylbenzylamine)、4-甲基-N,N-二甲基苯胺(4-Methyl-N,N-Dimethylbenzylamine)等胺化合物、三苯膦(Triphenylphosphine)等磷化合物、等。更 具體而言,作為咪唑類化合物,例如有1B2PZ、2E4MZ、2MZ-A、2MZ-OK、2PHZ、2P4MHZ(四國化成工業公司製);作為二甲胺基的封閉型異氰酸酯化合物(Blocked isocyanates),有U-CAT3503N、-3502T(SAN-APRO公司製);作為雙環脒化合物及其鹽,有DBU、DBN、U-CAT SA102、U-CAT5002(SAN-APRO公司製)等。它們可單獨使用一種,或亦可組合兩種類以上使用。 The above-mentioned thermosetting catalyst is used to further improve the thermosetting property of the thermosetting resin composition, and for example, an amine compound such as dicyandiamide or an aromatic amine, an imidazole, a phosphorus compound or an acid anhydride (Acid Anhydride) can be used. ), bicyclic amidine, and the like. Specifically, imidazole, 1-benzyl-2-phenylimidazole, 2-methylimidazole, 2-ethylimidazole, 2- 2-Ethyl-4-Methylimidazole, 2-Phenylimidazole, 4-Phenylimidazole, 1-cyanoethyl-2-phenyl Imidazoles such as 1-(Cyanoethyl-2-Phenylimidazole) and 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole (1-(2-Cyanoethyl)-2-Ethyl-4-Methylimidazole) Class; dicyandiamide, Benzyldimethylamine, 4-(Dimethylamino)-N,N-Dimethylbenzylamine, 4-Methoxy-N,N-Dimethylbenzylamine, 4-Methyl-N,N-Dimethylbenzylamine An amine compound, a phosphorus compound such as triphenylphosphine, or the like. more Specifically, examples of the imidazole compound include 1B2PZ, 2E4MZ, 2MZ-A, 2MZ-OK, 2PHZ, and 2P4MHZ (manufactured by Shikoku Kasei Kogyo Co., Ltd.); and a blocked isocyanate compound as a dimethylamino group. There are U-CAT3503N and -3502T (manufactured by SAN-APRO Co., Ltd.), and DBU, DBN, U-CAT SA102, U-CAT5002 (manufactured by SAN-APRO Co., Ltd.), and the like. They may be used alone or in combination of two or more.

上述熱硬化觸媒的含有率,依一般的調配比 例即足夠,例如相對於熱硬化成分之環氧樹脂成分100質量比,以0.1質量比~10質量比為佳。 The content of the above-mentioned thermosetting catalyst is based on the general blending ratio For example, the mass ratio of the epoxy resin component to the thermosetting component is preferably from 0.1 to 10 mass%.

上述無機填充劑,係用來抑制絕緣樹脂層的 硬化收縮,提升密合性、硬度等特性。作為無機填充劑,例如有硫酸鋇、鈦酸鋇、非晶質二氧化矽(Amorphous Silica)、結晶型二氧化矽(Crystalline Silica)、溶融二氧化矽、球狀二氧化矽、滑石(Talc)、黏土(Clay)、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、氮化矽、氮化鋁、等。它們可單獨使用一種,或亦可組合兩種類以上使用。 The above inorganic filler is used for suppressing the insulating resin layer Hardening shrinkage, improving adhesion, hardness and other characteristics. Examples of the inorganic filler include barium sulfate, barium titanate, amorphous austenite (Amorphous Silica), crystalline ceria (Crystalline Silica), molten ceria, spheroidal ceria, talc (Talc). , clay (Clay), magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, tantalum nitride, aluminum nitride, and the like. They may be used alone or in combination of two or more.

上述熱硬化性樹脂組成物,以有機溶劑調整 成適於印刷塗布方法之黏度後,全面印刷以使乾燥膜厚呈10μm~30μm為佳。接著,在40℃~100℃溫度下,使組成物中含有之有機溶劑揮發、乾燥。再來,在170℃~230℃溫度下使其加熱硬化30分鐘~120分鐘,便能形成絕緣樹脂層。 The above thermosetting resin composition is adjusted with an organic solvent After being suitable for the viscosity of the printing coating method, the printing is performed in a comprehensive manner so that the dried film thickness is preferably 10 μm to 30 μm. Next, the organic solvent contained in the composition is volatilized and dried at a temperature of 40 ° C to 100 ° C. Further, the insulating resin layer can be formed by heat-hardening at a temperature of 170 ° C to 230 ° C for 30 minutes to 120 minutes.

〔實施例〕 [Examples]

以下揭示實施例及比較例以具體說明本發明,但本發明不受它們所限定。另,各成分的調配量表示值,除特地註明外,皆為質量基準。 The invention is specifically illustrated by the following examples and comparative examples, but the invention is not limited thereto. In addition, the amount of each component is expressed as a quality standard, unless otherwise specified.

<實施例1> <Example 1> (熱硬化性樹脂組成物之調製) (Modulation of thermosetting resin composition)

分別調配:清漆333質量比,其中將線狀聚醯亞胺樹脂(V-8005.DIC公司製)溶於二甲基乙醯胺以使不揮發成分成為15%;及清漆167質量比,其中將蒽系環氧樹脂(YX-8800.三菱化學公司製)溶於二甲基乙醯胺以使不揮發成分成為30%;及1-苄基-2-苯基咪唑(1B2PZ.四國化成工業公司製)1質量比;及矽氧系表面張力調整劑(BYK-310.BYK公司製)0.05質量比;於攪拌機預備混合後,使用三滾筒混練機(three roll mill)混練,調製成熱硬化性樹脂組成物A。 Disposed separately: varnish 333 mass ratio, in which linear polyimide resin (V-8005.DIC company) is dissolved in dimethylacetamide to make the non-volatile component 15%; and varnish 167 mass ratio, wherein A lanthanide epoxy resin (YX-8800. manufactured by Mitsubishi Chemical Corporation) is dissolved in dimethylacetamide to make a nonvolatile component 30%; and 1-benzyl-2-phenylimidazole (1B2PZ. Industrial company system) 1 mass ratio; and 矽 oxygen-based surface tension adjuster (BYK-310.BYK company) 0.05 mass ratio; after mixing in the mixer, using a three roll mill to mix and heat Curable resin composition A.

藉由上述熱硬化性樹脂組成物之調製,由於線狀聚醯亞胺樹脂及蒽系環氧樹脂本身即對紫外線雷射的照射波長具有高吸收性,故即使不添加紫外線吸收劑等,也能調製出具有高吸收性之熱硬化性樹脂組成物。 According to the preparation of the thermosetting resin composition, the linear polyimide resin and the fluorene-based epoxy resin have high absorbability to the ultraviolet irradiation wavelength, and therefore, even if no ultraviolet absorber or the like is added, A thermosetting resin composition having high absorbency can be prepared.

(絕緣樹脂層之形成) (formation of insulating resin layer)

將上述熱硬化性樹脂組成物,塗布在以拋光輪研磨成0.8mm厚之銅箔層積板上,於熱風循環式乾燥爐中以80℃ 乾燥30分鐘後,於230℃下藉由1小時加熱使其硬化而形成絕緣樹脂層。此時,基材上的絕緣樹脂層會被整平,於做成後,在紫外線雷射照射前,絕緣樹脂層的凹凸將不復見。 The thermosetting resin composition was applied to a copper foil laminated plate polished to a thickness of 0.8 mm by a polishing wheel, and 80 ° C in a hot air circulating drying oven. After drying for 30 minutes, it was hardened by heating at 230 ° C for 1 hour to form an insulating resin layer. At this time, the insulating resin layer on the substrate is leveled, and after the formation, the unevenness of the insulating resin layer will not be seen before the ultraviolet laser irradiation.

(溝槽形成工程) (groove forming engineering)

對於上述絕緣樹脂層上呈垂直般地照射紫外線雷射(YVO4雷射的第三諧波,波長:355nm、脈衝寛度:30奈秒),除去照射處的絕緣樹脂層的一部分,以形成配線用溝槽(溝)。 The ultraviolet ray laser (the third harmonic of the YVO 4 laser, wavelength: 355 nm, pulse twist: 30 nanoseconds) is vertically irradiated on the insulating resin layer, and a part of the insulating resin layer at the irradiation portion is removed to form Wiring (ditch) for wiring.

(通孔形成工程) (through hole forming engineering)

對於上述絕緣樹脂層上呈垂直般地照射紫外線雷射(YVO4雷射的第三諧波,波長:355nm、脈衝寛度:30奈秒),除去照射處的絕緣樹脂層的全部,使銅箔層積板的金屬層露出,以形成連接電路用之導通孔。 The ultraviolet ray laser (the third harmonic of the YVO 4 laser, wavelength: 355 nm, pulse twist: 30 nanoseconds) is vertically irradiated on the insulating resin layer, and all of the insulating resin layer at the irradiation site is removed to make copper The metal layer of the foil laminate is exposed to form via holes for connecting the circuits.

〔分散液塗布工程〕 [Dispersion Coating Engineering]

在依上述溝槽形成工程形成之溝槽內部、及依上述通孔形成工程形成之通孔內部,使用含有銅奈米粒子(平均粒徑100nm)50wt%之分散液(黏度15mPa.s),藉由噴墨印刷機(ORBOTECH公司製Sprint-8(商標名)),填充至上述形成之溝槽及通孔的全區域。 A dispersion containing a copper nanoparticle (average particle diameter of 100 nm) of 50% by weight (viscosity: 15 mPa.s) is used inside the trench formed by the above-described trench forming process and inside the via hole formed by the above-described through hole forming process. The entire area of the above-described trenches and via holes was filled by an ink jet printer (Sprint-8 (trade name) manufactured by ORBOTECH Co., Ltd.).

(燒成處理工程) (burning treatment project)

於氮氣環境下以60℃乾燥30分鐘後,於200℃下加熱燒成1小時,藉此在溝槽內部形成銅配線膜直到與上述絕緣樹脂層同一高度,而於通孔內部形成銅連接電路膜。 After drying at 60 ° C for 30 minutes in a nitrogen atmosphere, the film was heated and baked at 200 ° C for 1 hour, thereby forming a copper wiring film inside the trench until the same height as the above-mentioned insulating resin layer, and forming a copper connection circuit inside the via hole. membrane.

<實施例2> <Example 2>

除了熱硬化性樹脂組成物之調製如下述般變更以外,與上述實施例1遵照同樣方法,製作出形成電路圖樣的試驗片。 A test piece for forming a circuit pattern was produced in the same manner as in Example 1 except that the preparation of the thermosetting resin composition was changed as described below.

分別調配:清漆333質量比,其中將線狀聚醯亞胺樹脂(V-8005.DIC公司製)溶於二甲基乙醯胺以使不揮發成分成為15%;及雙酚A型環氧樹脂(E828.三菱化學公司製)50質量比;及1-苄基-2-苯基咪唑(1B2PZ.四國化成工業公司製)1質量比;及矽氧系表面張力調整劑(BYK-310.BYK公司製)0.05質量比;於攪拌機預備混合後,使用三滾筒混練機混練,調製成熱硬化性樹脂組成物B。 Dissolved separately: varnish 333 mass ratio, in which linear polyimide resin (V-8005.DIC company) is dissolved in dimethylacetamide to make non-volatile components 15%; and bisphenol A epoxy Resin (E828. manufactured by Mitsubishi Chemical Corporation) 50 mass ratio; and 1-benzyl-2-phenylimidazole (1B2PZ. manufactured by Shikoku Chemical Co., Ltd.) 1 mass ratio; and oxime surface tension adjuster (BYK-310) .BYK company) 0.05 mass ratio; after mixing in a mixer, it is kneaded by a three-cylinder kneader to prepare a thermosetting resin composition B.

藉由上述熱硬化性樹脂組成物B之調製,由於含有線狀聚醯亞胺樹脂,故即使環氧樹脂對紫外線雷射的照射波長不具有吸收性,也能調製出具有高吸收性之熱硬化性樹脂組成物。 By the preparation of the thermosetting resin composition B, since the linear polyimine resin is contained, even if the epoxy resin does not absorb light at the irradiation wavelength of the ultraviolet laser, heat having high absorption can be prepared. A curable resin composition.

<實施例3> <Example 3>

除了熱硬化性樹脂組成物之調製如下述般變更以外, 與上述實施例1遵照同樣方法,製作出形成電路圖樣的試驗片。 The preparation of the thermosetting resin composition is changed as follows, A test piece for forming a circuit pattern was produced in the same manner as in the above Example 1.

分別調配:清漆100質量比,其中將萘系環氧樹脂(EXA-4710.DIC公司製)溶於二甲基乙醯胺以使不揮發成分成為50%;及雙酚A型環氧樹脂(E828.三菱化學公司製)50質量比;及1-苄基-2-苯基咪唑(1B2PZ.四國化成工業公司製)1質量比;及矽氧系表面張力調整劑(BYK-310.BYK公司製)0.05質量比;於攪拌機預備混合後,使用三滾筒混練機混練,調製成熱硬化性樹脂組成物C。 Each of the varnishes has a mass ratio of 100%, wherein a naphthalene epoxy resin (manufactured by EXA-4710.DIC) is dissolved in dimethylacetamide to make the nonvolatile content 50%; and a bisphenol A type epoxy resin ( E828.Mitsubishi Chemical Co., Ltd.) 50 mass ratio; and 1-benzyl-2-phenylimidazole (1B2PZ. Shikoku Chemical Co., Ltd.) 1 mass ratio; and oxime surface tension adjuster (BYK-310.BYK The company made a 0.05 mass ratio; after mixing with the mixer, it was mixed with a three-roller kneader to prepare a thermosetting resin composition C.

藉由上述熱硬化性樹脂組成物C之調製,由於萘系環氧樹脂本身即對紫外線雷射的照射波長具有高吸收性,故即使不添加紫外線吸收劑等,也能調製出具有高吸收性之熱硬化性樹脂組成物。 According to the preparation of the thermosetting resin composition C, since the naphthalene-based epoxy resin itself has high absorbability to the irradiation wavelength of the ultraviolet laser, it is possible to prepare a highly absorptive property without adding an ultraviolet absorber or the like. A thermosetting resin composition.

<實施例4> <Example 4>

除了熱硬化性樹脂組成物之調製如下述般變更以外,與上述實施例1遵照同樣方法,製作出形成電路圖樣的試驗片。 A test piece for forming a circuit pattern was produced in the same manner as in Example 1 except that the preparation of the thermosetting resin composition was changed as described below.

分別調配:雙酚A型環氧樹脂(E828.三菱化學公司製)50質量比;及清漆63質量比,其中將三羥苯甲烷型(tris-hydroxymethyl-methane)環氧樹脂(EPPH-501H.日本化藥公司製)溶於丙二醇一甲基醚乙酸酯(Propylene glycol monomethyl ether acetate)以使不揮發 成分成為80%;及苯氧樹脂(YX8100H30.三菱化學公司製)67質量比;及1-苄基-2-苯基咪唑(1B2PZ.四國化成工業公司製)1質量比;及清漆62質量比,其中將苯酚酚醛樹脂(HF-1M.明和化成公司製)溶於二乙二醇一乙基醚(Diethylene glycol monoethyl ether)以使不揮發成分成為65%;及丙二醇一甲基醚乙酸酯(PGMAc.大伸化學公司製)30質量比;及二苯甲酮系紫外線吸收劑(EAB.保土谷化學工業公司製)15質量比;及矽氧系表面張力調整劑(BYK-310.BYK公司製)0.05質量比;於攪拌機預備混合後,使用三滾筒混練機混練,調製成熱硬化性樹脂組成物D。 Dispense separately: bisphenol A epoxy resin (E828. Mitsubishi Chemical Corporation) 50 mass ratio; and varnish 63 mass ratio, which will be tris-hydroxymethyl-methane epoxy resin (EPPH-501H. Made by Nippon Chemical Co., Ltd.) is dissolved in Propylene glycol monomethyl ether acetate to make it non-volatile 80% by mass; phenoxy resin (YX8100H30. manufactured by Mitsubishi Chemical Corporation) 67 mass ratio; and 1-benzyl-2-phenylimidazole (1B2PZ. Shikoku Chemical Co., Ltd.) 1 mass ratio; and varnish 62 mass a phenol phenol resin (HF-1M., manufactured by Minghe Chemical Co., Ltd.) dissolved in Diethylene glycol monoethyl ether to make the nonvolatile content 65%; and propylene glycol monomethyl ether acetate 30 mass ratio of ester (PGMAc. manufactured by Daisei Chemical Co., Ltd.); 15 mass ratio of benzophenone-based ultraviolet absorber (EAB. manufactured by Hodogaya Chemical Industry Co., Ltd.); and surface tension adjuster of 矽-based system (BYK-310. BYK company) 0.05 mass ratio; after mixing in a mixer, it was kneaded using a three-roller kneader to prepare a thermosetting resin composition D.

藉由上述熱硬化性樹脂組成物D之調製,即使環氧樹脂對紫外線雷射的照射波長不具有吸收性,由於含有二苯甲酮系紫外線吸收劑,故能調製出具有高吸收性之熱硬化性樹脂組成物。 According to the preparation of the thermosetting resin composition D, even if the epoxy resin does not absorb light at the irradiation wavelength of the ultraviolet laser, since the benzophenone-based ultraviolet absorber is contained, heat having high absorption can be prepared. A curable resin composition.

<比較例1> <Comparative Example 1>

除了熱硬化性樹脂組成物之調製如下述般變更以外,與上述實施例1遵照同樣方法,製作出形成電路圖樣的試驗片。 A test piece for forming a circuit pattern was produced in the same manner as in Example 1 except that the preparation of the thermosetting resin composition was changed as described below.

從實施例4之組成中除去二苯甲酮系紫外線吸收劑(EAB.保土谷化學工業公司製),調製成熱硬化性樹脂組成物E。 A benzophenone-based ultraviolet absorber (EAB. manufactured by Hodogaya Chemical Co., Ltd.) was removed from the composition of Example 4 to prepare a thermosetting resin composition E.

藉由上述熱硬化性樹脂組成物E之調製,調製出對紫 外線雷射的照射波長不具有吸收性之熱硬化性樹脂組成物。 By the modulation of the above thermosetting resin composition E, a purple violet is prepared. The thermo-curable resin composition in which the irradiation wavelength of the external laser beam does not have absorption.

<比較例2> <Comparative Example 2>

除了溝槽形成工程及通孔形成工程如下述般變更以外,與上述實施例1遵照同樣方法,製作出形成電路圖樣的試驗片。(溝槽形成工程) A test piece for forming a circuit pattern was produced in the same manner as in the above-described Example 1, except that the groove forming process and the through hole forming process were changed as described below. (groove forming engineering)

對於上述絕緣樹脂層上呈垂直般地照射紫外線雷射(YVO4雷射的第三諧波,波長:355nm、脈衝寛度:20微微秒(pico-second)),除去絕緣樹脂層的一部分,以形成配線用溝槽(溝)。(通孔形成工程) The ultraviolet ray is irradiated perpendicularly to the insulating resin layer (the third harmonic of the YVO 4 laser, the wavelength: 355 nm, the pulse twist: 20 pico-second), and a part of the insulating resin layer is removed, A trench (groove) for wiring is formed. (through hole forming engineering)

對於上述絕緣樹脂層上呈垂直般地照射紫外線雷射(YVO4雷射的第三諧波,波長:355nm、脈衝寛度:20微微秒),除去絕緣樹脂層的全部,使銅箔層積板的金屬層露出,以形成連接電路用之導通孔。 The ultraviolet ray laser (the third harmonic of the YVO 4 laser, wavelength: 355 nm, pulse twist: 20 picoseconds) is vertically irradiated on the insulating resin layer, and all of the insulating resin layer is removed to laminate the copper foil. The metal layer of the board is exposed to form via holes for the connection circuit.

(試驗片之性能評估) (Performance evaluation of test piece) (雷射加工性) (laser processing)

形成通孔時之紫外線雷射照射次數,依以下基準評估。 The number of ultraviolet laser irradiations at the time of forming the through holes was evaluated based on the following criteria.

基準:絕緣樹脂層表面的通孔直徑D與銅箔層積板表面(通孔底面)的通孔徑d之比率〔式(d/D)×100〔%〕〕超過70%所需之照射次數。但,將照射部分的絕緣樹脂層全部除去,而不損傷銅箔層積板。此外,通孔直 徑係利用雷射顯微鏡測量長度。 Benchmark: the ratio of the diameter D of the through-hole diameter of the surface of the insulating resin layer to the through-hole diameter d of the surface of the copper foil laminated board (the bottom surface of the through-hole) (formula (d/D) × 100 [%]) required to exceed 70% . However, all of the insulating resin layers of the irradiated portion are removed without damaging the copper foil laminate. In addition, through hole straight The diameter system measures the length using a laser microscope.

◎:照射次數30次以下 ◎: The number of irradiations is less than 30 times

○:照射次數超過30次且在40次以下 ○: The number of irradiations exceeds 30 times and is less than 40 times

△:照射次數超過40次且在100次以下 △: The number of irradiations exceeds 40 times and is less than 100 times

×:照射次數超過100次而仍未達基準 ×: The number of irradiations exceeded 100 times and the reference was still not reached.

結果如下表1所示。另,照射次數40次以下形成之絕緣樹脂層表面,其通孔直徑D為30μm。 The results are shown in Table 1 below. Further, the surface of the insulating resin layer formed by the number of irradiations of 40 or less had a through-hole diameter D of 30 μm.

(密合性試驗) (adhesion test)

遵照JIS H 8504(鍍覆之密合性試驗方法、剝離試驗方法),在試驗片的配線膜、及銅箔層積板上的連接電路膜貼附賽璐玢膠帶(商標名),再將其剝除以進行所謂起毬試驗(pilling test)後,以光學顯微鏡觀察配線膜及連接電路膜的剝離狀態,並依以下基準評估。 In accordance with JIS H 8504 (coating adhesion test method, peel test method), a celluloid tape (trade name) is attached to the wiring film of the test piece and the connection circuit film on the copper foil laminate board, and then After the peeling test was carried out to perform a so-called pilling test, the peeling state of the wiring film and the connection circuit film was observed with an optical microscope, and evaluated according to the following criteria.

○:無剝離 ○: no peeling

△:配線膜及連接電路膜的一部分剝離 △: Part of the wiring film and the connection circuit film are peeled off

×:配線膜及連接電路膜的大部分剝離 ×: Most of the wiring film and the connection circuit film are peeled off

結果如下表1所示。 The results are shown in Table 1 below.

表由表1所示結果可知,比較例1中,絕緣樹脂層的雷射加工性差。這是因為上述絕緣樹脂層對紫外線雷射的照射波長不具有吸收性,故即使照射紫外線雷射,也無法加工除去。 As is clear from the results shown in Table 1, in Comparative Example 1, the insulating resin layer was inferior in laser workability. This is because the insulating resin layer does not have an absorption wavelength to the ultraviolet laser irradiation wavelength, and therefore cannot be processed and removed even if it is irradiated with an ultraviolet laser.

接著,比較例2中,絕緣樹脂層與配線膜、及絕緣樹脂層與連接電路膜之間的密合性差。可以認為,這是因為藉由照射脈衝寛度為微微秒的紫外線雷射,所形成之溝槽及通孔內部的平滑性優良(內部表面具有極微細之凹陷、突起,且不具有親水性),導致物理性效果(固著效應)之密合性低。 Next, in Comparative Example 2, the adhesion between the insulating resin layer and the wiring film, and the insulating resin layer and the connection circuit film was inferior. It is considered that this is because the ultraviolet ray having a pulse width of picoseconds is excellent in the smoothness of the inside of the formed groove and the through hole (the inner surface has extremely fine depressions, protrusions, and no hydrophilicity). The adhesion to the physical effect (fixation effect) is low.

相較於此,實施例1~4中,絕緣樹脂層的雷射加工性,絕緣樹脂層與配線膜、及絕緣樹脂層與連接電路膜之間的密合性優良。可以認為,這是因為上述絕緣樹脂層對紫外線雷射的照射波長具有高吸收性,故藉由照射紫外線雷射,絕緣樹脂層會被加工除去,使配線膜或連接電路膜露出;又,藉由照射脈衝寛度為奈秒之紫外線雷射,所形成之溝槽及通孔內部的平滑性較差(內部表面相較於比較例2具有較大的凹陷、突起,且具有高親水性),使得固著效應之密合性高。又,實施例1~4中,在形成電路時,由於使用了含有金屬奈米粒子之分散液,故如圖2般省略鍍覆前處理工程,仍能形成微細電路。此外,由於配線膜及連接電路膜係形成於溝槽及通孔內部的全區域,故不需經過如圖3般之研磨工程,仍可形成微細電路。 In contrast, in the first to fourth embodiments, the laser processing property of the insulating resin layer is excellent in adhesion between the insulating resin layer and the wiring film, and between the insulating resin layer and the connection circuit film. It is considered that this is because the insulating resin layer has high absorption of the ultraviolet laser irradiation wavelength, so that the ultraviolet ray is irradiated, the insulating resin layer is processed and removed, and the wiring film or the connection circuit film is exposed; The ultraviolet light of the groove and the through hole formed by the ultraviolet pulse having the irradiation pulse intensity of nanosecond is poor (the inner surface has larger depressions, protrusions, and high hydrophilicity compared with the comparative example 2). The adhesion of the fixation effect is high. Further, in Examples 1 to 4, since the dispersion containing the metal nanoparticles was used in the formation of the circuit, the pre-plating treatment was omitted as shown in Fig. 2, and a fine circuit could be formed. Further, since the wiring film and the connection circuit film are formed in the entire region inside the trench and the via hole, it is possible to form a fine circuit without going through the polishing process as shown in FIG.

如上述般,本發明之印刷配線板之電路形成 方法,不需要經過對環境造成大幅負擔之鍍覆前處理工程,及對於多餘形成的鍍覆膜或導電性塗膜等金屬膜之研磨工程等繁雜工程,即可形成微細電路。又,印刷配線板之電路形成時,可使雷射照射對於絕緣樹脂層的加工性、以及絕緣樹脂層與配線膜或連接電路膜的密合性良好。 As described above, the circuit formation of the printed wiring board of the present invention In this way, a micro-circuit can be formed without a complicated pre-plating process that imposes a large burden on the environment, and a complicated process such as a polishing process of a metal film such as a plating film or a conductive coating film which is formed excessively. Moreover, when the circuit of the printed wiring board is formed, the processability of the laser irradiation with respect to the insulating resin layer and the adhesion of the insulating resin layer to the wiring film or the connection circuit film can be improved.

1‧‧‧金屬箔層積板 1‧‧‧metal foil laminate

1A‧‧‧絕緣樹脂層 1A‧‧‧Insulating resin layer

1B‧‧‧金屬層 1B‧‧‧ metal layer

2A‧‧‧溝槽 2A‧‧‧ trench

2B‧‧‧通孔 2B‧‧‧through hole

3‧‧‧含有金屬奈米粒子之分散液 3‧‧‧Dispersion containing metal nanoparticles

4A‧‧‧配線膜 4A‧‧‧ wiring film

4B‧‧‧連接電路膜 4B‧‧‧Connected circuit film

5‧‧‧吐出噴頭 5‧‧‧ spout nozzle

6‧‧‧紫外線雷射 6‧‧‧UV laser

7‧‧‧剖面線 7‧‧‧ hatching

11‧‧‧無電解鍍覆 11‧‧‧ Electroless plating

Claims (7)

一種印刷配線板之電路形成方法,其特徵為,具備:凹部構造形成工程,係針對金屬箔層積板上具有紫外線吸收性之絕緣樹脂層,以脈衝寛度為奈秒級之紫外線雷射予以照射,藉此除去絕緣樹脂層以形成凹部構造;及分散液塗布工程,在以前述凹部構造形成工程形成之凹部構造內部,藉由噴墨法塗布含有金屬奈米粒子之分散液。 A circuit for forming a printed wiring board, comprising: a structure for forming a concave portion, which is an ultraviolet resin having an ultraviolet absorbing property on a metal foil laminated plate, and an ultraviolet laser having a pulse width of nanoseconds. The insulating resin layer is removed by irradiation to form a concave portion structure, and the dispersion coating process is performed, and a dispersion liquid containing metal nanoparticles is applied by an inkjet method inside a concave portion structure formed by the concave portion structure forming process. 如申請專利範圍第1項之印刷配線板之電路形成方法,其中,前述凹部構造,係為溝槽及通孔的其中一種以上。 The circuit forming method of the printed wiring board according to the first aspect of the invention, wherein the concave portion structure is one or more of a groove and a through hole. 如申請專利範圍第1或2項之印刷配線板之電路形成方法,其中,前述分散液塗布工程中,將前述分散液填充於前述凹部構造內部全體。 The circuit forming method of the printed wiring board according to the first or second aspect of the invention, wherein the dispersion liquid is filled in the entire interior of the recess structure. 如申請專利範圍第1或2項之印刷配線板之電路形成方法,其中,於前述分散液塗布工程之後,具有無電解鍍覆工程。 The circuit forming method of the printed wiring board according to the first or second aspect of the invention, which has an electroless plating process after the dispersion coating process. 一種印刷配線板,其特徵為:具備由申請專利範圍第1至4項任一項之印刷配線板之電路形成方法所得到之電路。 A printed wiring board comprising the circuit obtained by the circuit forming method of the printed wiring board according to any one of claims 1 to 4. 一種熱硬化性樹脂組成物,屬於用來形成申請專利範圍第1至4項任一項之印刷配線板之電路形成方法中的絕緣樹脂層之熱硬化性樹脂組成物,其特徵為: 含有下述的其中一種以上:(A)具有線狀構造之聚醯亞胺樹脂、(B)具有多環芳香族烴環之環氧樹脂、及(C)紫外線吸收劑。 A thermosetting resin composition which is a thermosetting resin composition for forming an insulating resin layer in a circuit for forming a printed wiring board according to any one of claims 1 to 4, which is characterized in that: One or more of the following: (A) a polyimine resin having a linear structure, (B) an epoxy resin having a polycyclic aromatic hydrocarbon ring, and (C) an ultraviolet absorber. 如申請專利範圍第6項之熱硬化性樹脂組成物,其中,前述(B)具有多環芳香族烴環之環氧樹脂,係為萘系(Naphthalene)環氧樹脂及蒽系(Anthracene)環氧樹脂的其中一種以上。 The thermosetting resin composition of claim 6, wherein the (B) epoxy resin having a polycyclic aromatic hydrocarbon ring is a naphthalene epoxy resin and an anthracene ring. One or more of oxygen resins.
TW102121557A 2012-06-19 2013-06-18 Circuit formation method of printed circuit board, thermalsetting resin composition and printed circuit board TW201401951A (en)

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CN105376939A (en) * 2014-08-12 2016-03-02 旭德科技股份有限公司 Substrate structure and manufacturing method thereof
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