TW201339741A - Dustproof film frame, photo mask, and assembling method thereof - Google Patents

Abstract

A dustproof film frame, a photo mask, and assembling method thereof are provided. The dustproof film frame is utilized for assembling a dustproof film of a photo mask. The dustproof film frame includes a first frame and a second frame. The first frame includes a first coupling portion. The second frame is utilized foe being coupled to a substrate of the photo mask. The second frame includes a second coupling portion. The first frame and the second frame are detachably sealed and coupled to each other via the first coupling portion and the second coupling portion.

Description

Dust-proof film frame, reticle and mounting method thereof

The present invention relates to the field of manufacturing flat panel display panels, and more particularly to a dustproof film frame and a method of mounting the photomask and the photomask dustproof film having the pellicle frame.

In the prior art, a large-size photo mask is required in the yellow light process of the display industry. In order to reduce the influence of dust on the process, it is necessary to install a Pellicle Membrane on the pattern surface of the reticle. At present, all the mask manufacturers use the paste method to attach the dust-proof film to the pattern surface of the mask. After the paste, it cannot be separated without damage, so the dust-proof film of the current installation method is disposable.

The schematic diagram of the manufacturing process of the mask is shown in Figure 1. It has to go through the steps of film formation, photoresist coating, description, development, etching, photoresist peeling, inspection, repair, cleaning, dust film installation, inspection and delivery.

For the dust-proof film mounting step, as shown in FIG. 3, the conventional dust-proof film is installed by first fixing the dust-proof film 4 to the film frame 2 by sticking, and then attaching and fixing the film frame 2 with the dust-proof film 4. a pattern with a pattern 3 to a substrate of a reticle (eg quartz glass) 1 Case side. A photomask as shown in FIG. 2 is formed.

However, each time you change any of the product's panel size, picture element, line width, etc., the entire mask of a product needs to be updated. The replaced mask has lost its use value, and the dust-proof film 4 which has reusable value can only be discarded along with the main body because it cannot be separated by being attached to the film frame 2 of the mask. In addition, once some defects or damage on the photomask are found after the pellicle film 4 is pasted, and the back cover needs to be repaired, the pellicle film 4 must be destroyed, and a new pellicle film 4 is attached after the repair is completed. These actions will increase the cost of the mask. Moreover, the dust-proof film 4 is expensive to manufacture, and the cost of the dust-proof film 4 accounts for 30-40% of the total cost of the mask. Therefore, in the prior art photomask, the dustproof film cannot be reused, resulting in great waste.

SUMMARY OF THE INVENTION An object of the present invention is to provide a pellicle frame for a photomask to solve the technical problem that the pellicle frame of the prior art cannot reuse the expensive pellicle film in the photomask.

Another object of the present invention is to provide a photomask having the pellicle frame of the present invention to solve the technical problem that the expensive pellicle film of the prior art photomask cannot be reused.

It is still another object of the present invention to provide a method of mounting a photomask dustproof film.

An embodiment of the present invention provides a dustproof film frame for mounting a dustproof film of a photomask, the dustproof film frame including a first frame and a first Two frameworks. The first frame is for fixed connection with the dustproof film, and the first frame has a first connecting portion. The second frame is for fixed connection with the substrate of the reticle, and the second frame has a second connecting portion, and the second connecting portion and the first connecting portion are used for sealing and fixed connection of the first frame and the second frame to facilitate separation.

Another aspect of the invention is a reticle having the aforementioned pellicle frame.

According to still another aspect of the present invention, in a method of installing a mask dustproof film, the method of mounting a mask dustproof film includes providing the foregoing dustproof film frame, and then connecting the dustproof film to the first frame, and connecting the substrate to the second frame. And through the second connecting portion and the first connecting portion, the first frame and the second frame can be sealed and fixedly connected to facilitate separation.

The pellicle frame of the present invention, the reticle having the pellicle frame, and the method for mounting the visor pellicle are divided into a first frame and a second frame, and the first frame and the second frame are divided into two parts: the first frame and the second frame. The easy-to-separate mounting method can remove the dust-proof film on the mask without commercial value and install it on the reticle to be installed, thereby realizing the reuse of the dust-proof film, thereby achieving cost reduction and avoiding waste of resources.

1‧‧‧Substrate

2‧‧‧Film frame

3‧‧‧ pattern

4‧‧‧Dust film

5‧‧‧ second framework

50‧‧‧ card slot

51‧‧‧ Groove

6‧‧‧ first frame

60‧‧‧ buckle

61‧‧‧ bumps

FIG. 1 is a schematic view showing a manufacturing process of a conventional photomask.

2 is a schematic cross-sectional view of a reticle mounted by a prior art dustproof film mounting method.

FIG. 3 is a schematic view showing the installation process of the prior art dustproof film mounting method Figure.

Fig. 4 is a schematic cross-sectional view showing a first frame of the pellicle frame of the first embodiment of the present invention in which a pellicle is attached.

Fig. 5 is a schematic plan view showing a first frame of the pellicle frame of the first embodiment of the present invention in which a pellicle is attached.

Fig. 6 is a schematic cross-sectional view showing a photomask substrate on which a second frame of the pellicle frame of the first embodiment of the present invention is mounted.

Fig. 7 is a schematic cross-sectional view showing a photomask according to a first embodiment of the present invention.

Figure 8 is a cross-sectional view showing the first frame of the pellicle frame of the second embodiment of the present invention.

Figure 9 is a cross-sectional view showing the second frame of the pellicle frame of the second embodiment of the present invention.

FIG. 10 is a schematic flow chart of a method for installing a photomask dustproof film according to an embodiment of the present invention.

The spirit and scope of the present invention will be apparent from the following description of the preferred embodiments of the invention. The spirit and scope of the invention are not departed.

A method for mounting a reticle of a reticle according to an embodiment of the present invention is achieved by using a pellicle frame according to an embodiment of the present invention; a reticle according to an embodiment of the present invention has a pellicle frame according to an embodiment of the present invention; The reticle is used for the pellicle film by the mounting method of one embodiment of the present invention. installation.

The pellicle frame, the pellicle, and the mounting method thereof according to the first to fourth embodiments of the present invention will be specifically described below. However, the invention is not limited to the four embodiments.

First embodiment:

As shown in FIG. 4 to FIG. 6, the pellicle frame of the first embodiment of the present invention divides the film frame into two parts, that is, includes a first frame 6 and a second frame 5, wherein the first frame 6 is used for the pellicle film. 4 fixedly connected, the first frame 6 has a buckle 60 thereon. The second frame 5 is used for fixed connection with the substrate 1 of the reticle, and the second frame 5 has a card slot 50. After the first frame 6 and the second frame 5 are connected by the card slot 50 and the buckle 60, The card slot 50 and the buckle 60 are detachable connections, so that it is convenient to separate the first frame 6 from the second frame 5 when it is required to remove the pellicle film 4 from a mask of no commercial value.

The buckle 60 and the card slot 50 mentioned herein may be a lunch box, a box (box) cover used for the storage box, and a buckle and a card slot that are connected to each other, or a cup cover and a cup body used for the buckle cup. Buckle and card slot. Moreover, the buckle 60 and the card slot 50 may be provided with the buckle 60 disposed on the second frame 5, and the card slot 50 is disposed on the first frame 6.

In this embodiment, the first frame 6 and the second frame 5 are rectangular in size, and the sizes of the two frames should be equal. The size of the pellicle film 4 must match the dimensions of the first frame 6 and the second frame 5. The specifications of the first frame 6 and the second frame 5 are, for example, an inner dimension of 456×768 mm, an outer dimension of 474×782 mm, an inner dimension of 736×888 mm, and an outer dimension of 754×902 mm, respectively. Corresponding to a 520×800 mm or 800×920 mm reticle, the reticle size described herein is equivalent to the size of the glass substrate 1.

The size of the reticle has the following specifications (in mm): 330*400, 330*450, 390*610, 500*750, 520*800, 800*920, 850*1200, 1220*1400, 1800*2000, currently More used is more than 500 * 750 size.

As shown in FIG. 5, the buckle 60 and the card slot 50 are provided on the rectangular shape of the first frame 6 and the second frame 5, two on each long side, and one on each short side. On the short side, the midpoint of the short side can be set, and on the long side, it can be evenly distributed in one third and two thirds. Depending on the size of the reticle, the snaps 60 and the card slots 50 can be added and evenly distributed over the rectangles of the first frame 6 and the second frame 5. The first frame 6 and the second frame 5 are preferably made of an aluminum alloy.

The pellicle frame of the present embodiment may be disposed on the first frame 6 or on the second frame 5, preferably adjacent to the position of the first frame 6 adjacent to the pellicle film 4, and may be provided in plurality (generally 4) a circular vent hole (not shown) with a diameter of 1.5 mm to prevent the pellicle film 4 from being subjected to excessive pressure. There is an air screening program on the vent hole. The diameter of the screening program is smaller than the diameter to be prevented. The particle size of the dust, for example, a screening program that limits the passage of particles above 0.3 micron.

In order to reinforce the seal between the first frame 6 and the second frame 5, the pellicle frame of the embodiment of the present invention is provided with a gasket between the first frame 6 and the second frame 5. For example, a gasket is interposed between the bottom surface of the first frame 6 and the top surface of the second frame 5.

As shown in FIG. 7, the photomask of the first embodiment of the present invention includes quartz glass 1, a second frame 5, a first frame 6, and a pellicle 4, and the positional relationship and connection relationship thereof have been described in the foregoing discussion. No longer.

Among them, the quartz glass 1 has a pattern 3, and the quartz glass 1 is a substrate of the photomask of the embodiment of the present invention, but the material of the substrate is not limited to quartz glass.

Next, a method of mounting a photomask dustproof film according to an embodiment of the present invention will be described, which is directed to the pellicle frame of the first embodiment of the present invention. As shown in FIG. 10, the method for mounting a reticle of the reticle according to the first embodiment of the present invention includes the steps of: firstly providing the pellicle frame of the first embodiment of the present invention; and then affixing the pellicle 4 to the first frame 6. The top frame 5 is attached to the quartz glass 1; finally, the first frame 6 and the second frame 5 are fixedly connected by the buckle 60 and the card slot 50.

Before the first frame 6 and the second frame 5 are fixedly connected by the buckle 60 and the card slot 50, a gasket may be padded between the bottom surface of the first frame 6 and the top surface of the second frame 5 to enhance the first The tightness of the connection between the frame 6 and the second frame 5.

In the manufacturing process of the reticle of the embodiment of the present invention, except for the step of removing the pellicle film 4, the remaining steps may be the same as those of the prior art reticle, as shown in FIG.

Second embodiment:

As shown in FIG. 8 and FIG. 9, the dustproof film of the second embodiment of the present invention The frame is also divided into two parts, that is, the first frame 6 and the second frame 5, wherein the first frame 6 is used for fixed connection with the pellicle film 4. Unlike the first embodiment, the embodiment is different from the first embodiment. The first frame 6 has a projection 61 on its bottom surface instead of a snap. The second frame 5 is used for fixed connection with the quartz glass 1 of the reticle. Unlike the first embodiment, in the present embodiment, the second frame 5 has a recess 51 on the top surface.

The connection mode of this embodiment can be referred to as a plug-in type connection, and the first frame 6 and the second frame 5 are fixedly connected by the cooperation of the protrusion 61 and the groove 51. Since the entrance of the groove 51 has elasticity, At the time of insertion, the projection 61 expands the entrance of the recess 51. After the projection 61 is fully inserted, the entrance of the recess 51 is recovered due to the elasticity, and the two sides of the projection 61 are pressed against the projection 61 when pulled out. After the entrance of the groove 51 is opened, the entrance of the groove 51 is restored by elasticity after the protrusion 61 is completely pulled out, so the protrusion 51 and the groove 61 are also detachably connected, so that the dustproof film 4 needs to be removed from It is also convenient to separate the first frame 6 and the second frame 5 from each other when the mask having no commercial value is removed.

In this embodiment, since the inlet of the groove 51 after the connection is attached to both sides of the projection 61 due to the elastic recovery, it has a good sealing property, and it is not necessary to provide other sealing members.

In this embodiment, the protrusion 61 may be disposed on the first frame 6, and the groove 51 may be disposed on the second frame 5. The groove may be disposed on the first frame 6, and the protrusion may be disposed on the second frame 5. Start.

In other respects, this embodiment may be the same as the first embodiment, and details are not described herein again.

Third embodiment:

The pellicle frame of the third embodiment of the present invention is different from the first embodiment in that a screw (or a screw) is disposed on the first frame 6, and a nut is disposed on the second frame 5, and the screw nut is fitted. A detachable fixed connection of the first frame 6 and the second frame 5 is achieved.

In this embodiment, the nut may be fixed to the outer surface of the second frame 5, that is, the position where the card slot 50 is provided in FIG. 4, and the screw is inserted into the connecting hole having the internal thread on the outer surface of the first frame 6.

In the present embodiment, a screw may be provided on the first frame 6, and a nut may be disposed on the second frame 5. A nut may be disposed on the first frame 6, and a screw may be disposed on the second frame 5.

In this embodiment, the screw and the nut are both disposed on the outer side surfaces of the first frame 6 and the second frame 5, and the screw does not pass through the bodies of the first frame 6 and the second frame 5, but the present invention is not limited thereto, There is a fourth embodiment below.

Fourth embodiment:

In this embodiment, two connecting holes having internal threads and centering are respectively formed on the first frame 6 and the second frame 5, one of which is a through hole and the other of which is a non-through hole. In order to maintain the inner seal of the reticle, the screws connecting the two connection holes do not penetrate the inside of the reticle. The two connecting holes of the pair may be parallel to the quartz glass or perpendicular to the quartz glass.

If the bottom surface of the first frame 6 and the top surface of the second frame 5 are in a concave-convex fit, the connection holes may be opened in a direction parallel to the quartz glass 1. The concave-convex fit may be a stepped fit, for example, the bottom surface of the first frame 6 has The inner high and the outer low step, and the top surface of the second frame 5 has a matching inner high and low outer step, and the two connecting holes of the center can be opened on the step, and the direction is parallel to the quartz glass 1.

The pellicle frame of the present embodiment further includes a screw that connects the connection holes of the two pairs to each other to detachably fix the first frame 6 and the second frame 5.

In combination with the first to fourth embodiments described above, the pellicle frame of the present invention, regardless of the card-type connection manner of the buckle 60 and the card slot 50, the projection 61 and the recess 51, and the connection manner of the screw nut, Or the connection method of connecting the connection holes of the two pairs by screws, belonging to the connection portions (the buckles, the card slots, the protrusions/grooves) respectively disposed on the first frame 6 and the second frame 5 , screw \ nut, two connecting holes) to seal the first frame 6 and the second frame 5 for easy separation, including a detachable seal fixed connection. However, the present invention is not limited thereto, and any seal-fixed connection between the first frame 6 and the second frame 5 that is easy to separate may be used.

The dust-proof film frame of the embodiment of the present invention and the photomask of the embodiment of the present invention and the method for installing the photo-shield dust-proof film of the embodiment of the present invention divide the pellicle frame into two parts, a first frame 6 and a second frame 5, The film frame adhered to the quartz glass 1 is defined as a second frame 5, and the film frame to which the pellicle film 4 is fixed is defined as the first frame 6. A connecting portion is disposed on the first frame 6, and the second frame 5 is provided with another connecting portion matched thereto, and the first frame 6 and the second frame 5 are fixedly connected by the two connecting portions, thereby completing the mounting. And the installation manner of the first frame 6 and the second frame 5 to facilitate separation can remove the dustproof film 4 on the mask without commercial value, and install The re-use of the pellicle film 4 is realized on the reticle to be mounted, thereby achieving cost reduction and avoiding waste of resources.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and retouched without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.

1‧‧‧Substrate

3‧‧‧ pattern

4‧‧‧Dust film

5‧‧‧ second framework

6‧‧‧ first frame

60‧‧‧ buckle

Claims (21)

A dustproof film frame for mounting a dustproof film of a photomask, the dustproof film frame comprising: a first frame for fixed connection with the dustproof film, the first frame having a first connecting portion; and a second a frame for fixedly connecting with the substrate of the reticle, the second frame having a second connecting portion, the first connecting portion and the first connecting portion are respectively sealed to facilitate separation of the first frame and the second frame Fixed connection. The pellicle frame of claim 1, wherein the second connecting portion and the first connecting portion are connected to each other to detachably seal the first frame and the second frame. The pellicle frame of claim 1, wherein the first frame and the second frame are rectangular in size, and the first connecting portion and the second connecting portion are disposed on each long side of the rectangle. At least two are provided on each of the short sides of the rectangle. The pellicle frame of claim 2, wherein the first connecting portion is a buckle, the second connecting portion is a card slot; or the first connecting portion is a card slot, and the second connecting portion is a buckle. The pellicle frame of claim 2, wherein the first connecting portion is a protrusion disposed on the first frame, the second connecting portion is a groove disposed in the second frame; or the first connecting portion The second connecting portion is a protrusion provided on the second frame. The pellicle frame of claim 2, wherein the first connecting portion is a screw, the second connecting portion is a nut; or the first connecting portion is a nut, The second connecting portion is a screw. The pellicle frame of claim 1, wherein the first frame and the second frame are made of an aluminum alloy. The pellicle frame of claim 1, wherein the first frame is provided with at least one vent hole that restricts passage of particles having a particle diameter of 0.3 μm or more. The pellicle frame according to claim 8, wherein the vent hole has a diameter of 1.5 mm, and an air screening program for restricting passage of particles having a particle diameter of 0.3 μm or more is provided in the vent hole. The pellicle frame of claim 1, wherein a bottom surface of the first frame and a top surface of the second frame are concave-convex. The pellicle frame of claim 10, wherein the pellicle frame further comprises a first connection connecting the first connecting portion and the second connecting portion to detachably connect the first frame and the second frame. Connector. The pellicle frame of claim 11, wherein the first connecting portion is a first connecting hole provided with an internal thread of the first frame, and the second connecting portion is disposed within the second frame. a second connecting hole of the pair of threads and the first connecting hole, the connecting member being a screw. The pellicle frame of claim 11, wherein the number of the at least one vent hole is four. A reticle, wherein the reticle has the pellicle frame of any one of claims 1-13. The reticle of claim 14, wherein the reticle has a gauge of 800 x 920 mm or 520 x 800 mm. The reticle of claim 14 wherein there is a seal between the first frame and the second frame. The reticle of claim 16, wherein a gasket is disposed between the bottom surface of the first frame and the top surface of the second frame. The reticle of claim 14, wherein the substrate is quartz glass. A method of installing a reticle of a reticle, the reticle comprising the following steps: Step S1: providing the pellicle frame according to any one of claims 1 to 13; and step S2: connecting the pellicle to the first frame, Connecting the substrate to the second frame; and step S3: sealing and fixing the first frame and the second frame to be separated by the second connecting portion and the first connecting portion. The method of installing a reticle according to claim 19, wherein after step S2 and before step S3, further comprising the step of laying a gasket between the bottom surface of the first frame and the top surface of the second frame. The method of mounting a reticle according to claim 19, wherein in step S2, the dustproof film is attached to a top surface of the first frame.