CN219842629U

CN219842629U - Pellicle capsule

Info

Publication number: CN219842629U
Application number: CN202320834993.7U
Authority: CN
Inventors: 熊启龙; 彭伟
Original assignee: Shenzhen Qingyi Precision Mask Making Co ltd
Current assignee: Shenzhen Qingyi Precision Mask Making Co ltd
Priority date: 2023-04-14
Filing date: 2023-04-14
Publication date: 2023-10-17
Anticipated expiration: 2033-04-14

Abstract

The utility model discloses a Pellicle membrane box, which comprises a plurality of support components circumferentially arranged at the bottom of the membrane box and fixing components arranged at four corners of the membrane box, wherein a membrane frame of the Pellicle membrane is supported by the support components and fixed by the fixing components, and the fixing components are fixedly spliced with the membrane frame of the Pellicle membrane; the support assembly comprises a cushion block and a bump arranged on the cushion block, wherein a stop block is arranged on the outer side edge of the cushion block, and the length of the stop block is matched with that of the cushion block. When the Pellicle membrane is placed in the membrane box, the supporting component plays a role in elevating the supporting position of the membrane box, so that the contact area between the membrane frame and the membrane box is reduced, the viscosity of the membrane frame and the membrane box is reduced, the Pellicle membrane is conveniently taken out of the membrane box, and the shipment efficiency is improved. In the process of taking out the Pellicle film from the film box, the condition that the film frame leans forward by 75 degrees exists, the film frame is limited by arranging the stop block, movement is avoided when the film frame is inclined, and the stability of film taking is improved.

Description

Pellicle capsule

Technical Field

The utility model relates to the technical field of masks, in particular to a Pellicle film box.

Background

The Mask plate (Mask) is used as a mother plate material of the semiconductor and flat panel display industry, generally quartz glass, metal chromium and photoresist, a designed circuit pattern is exposed on the photoresist through equipment, an exposed area can be developed, and the circuit pattern is formed on the metal chromium to form the photomask of the designed pattern. In the using process of the Mask, although the Mask is in a dust-free workshop with good cleanliness, because of a close exposure mode or fine dust caused by personnel and equipment activities in the environment, the Mask is at risk of being polluted, and in order to avoid the risk, a layer of Pellicle film (namely a surface film) of polyester material is stuck on the film surface of the Mask in the industry.

In recent years, the development of liquid crystal panels and novel display screens has been greatly advanced, so that the Mask is manufactured with larger size and the difficulty of sticking a Pellicle film is gradually increased; at present, film blowing equipment is generally adopted in the industry to separate and support a film from a film box, and as the Pellicle film frame is sticky and fixed on an adhesive tape at the bottom of the film box, the film frame has a large contact area with the film box, so that the time of the film blowing equipment for separating the film occupies at least 50% of the whole film pasting process, and the larger the film size is, the larger the separation time occupies, and the delivery time is influenced.

Disclosure of Invention

The utility model aims to provide a Pellicle membrane box, which reduces the contact between a Pellicle membrane frame and the bottom of the membrane box, further reduces the separation difficulty and the delivery time, and is used for solving the technical problems in the background technology.

The Pellicle film box comprises a plurality of supporting components and fixing components, wherein the supporting components are circumferentially arranged at the bottom of the film box, the fixing components are arranged at four corners of the film box, a film frame of the Pellicle film is supported by the supporting components and is fixed by the fixing components, and the fixing components are fixedly spliced with the film frame of the Pellicle film;

the support assembly comprises a cushion block and a bump arranged on the cushion block, wherein a stop block is arranged on the outer side edge of the cushion block, and the length of the stop block is matched with that of the cushion block.

In a preferred embodiment, the upper end surface of the cushion block is a downward inclined surface.

In a preferred embodiment, the cross-sectional area of the bump is smaller than the cross-sectional area of the pad, and the height of the bump is lower than the height of the stopper.

In a preferred embodiment, the fixing component comprises a fixing block, a bolt and a limiting seat, a through hole is transversely formed in the fixing block, the bolt is inserted into the through hole, a positioning hole is formed in the membrane frame corresponding to the through hole, one end of the bolt penetrates through the through hole to be inserted into the positioning hole in the membrane frame during fixing, and the bolt is limited through the limiting seat.

In a preferred embodiment, an arc-shaped groove is formed in the limiting seat, and the connecting rod on the plug pin is limited through the arc-shaped groove.

The technical scheme of the utility model has the beneficial effects that:

when the Pellicle film is placed in the film box, the film frame of the Pellicle film is supported by the supporting component, the supporting component plays a role in heightening the supporting part of the film box, and the contact area between the film frame and the film box is further reduced, so that the adhesiveness between the film frame and the film box is reduced, the Pellicle film is conveniently taken out from the film box, and the shipment efficiency is improved.

2. In the process of taking out the Pellicle film from the film box, the condition that the film frame leans forward by 75 degrees exists, the film frame is limited by arranging the stop block, movement is avoided when the film frame is inclined, and the stability of film taking is improved.

3. Through fixed subassembly, guarantee to fix the membrane frame better under the circumstances that reduces membrane frame contact bellows area, viscidity reduces.

Drawings

Figure 1 is a top view of the present utility model,

figure 2 is an enlarged view of figure 1 at a,

figure 3 is a side cross-sectional view of the present utility model,

figure 4 is a schematic view of the structure of the support assembly of the present utility model,

FIG. 5 is a schematic view of a fixing assembly according to the present utility model.

Reference numerals illustrate: the device comprises a membrane box 1, a supporting component 2, a cushion block 21, a convex block 22, a stop block 23, a fixing component 3, a fixing block 31, a plug pin 32, a connecting rod 33, a limiting seat 34 and an arc-shaped groove 35.

Detailed Description

The utility model will be described in further detail with reference to the drawings and the detailed description. The embodiments of the present utility model have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.

As shown in fig. 1-5, the Pellicle capsule according to the technical scheme of the utility model comprises a plurality of support assemblies 2 circumferentially arranged at the bottom of the capsule 1 and fixing assemblies 3 arranged at four corners of the capsule 1, wherein the membrane frames of the Pellicle membrane (i.e. the surface membrane) are supported by the support assemblies 2 and fixed by the fixing assemblies 3, and the fixing assemblies 3 are fixedly connected with the membrane frames of the Pellicle membrane in an inserting manner. When the Pellicle membrane is placed in the membrane box 1, the supporting component 2 plays a role in heightening the supporting part of the membrane box 1, so that the contact area between the membrane frame and the membrane box 1 is reduced, the viscosity of the membrane frame and the membrane box 1 is reduced, the Pellicle membrane is conveniently taken out from the membrane box 1, and the shipment efficiency is improved.

The support assembly 2 comprises a cushion block 21 and a bump 22 arranged on the cushion block 21, wherein a stop block 23 is arranged on the outer side edge of the cushion block 21, and the length of the stop block 23 is matched with that of the cushion block 21. The upper end surface of the pad 21 is a downward inclined surface, and the cross-sectional area of the bump 22 is smaller than the cross-sectional area of the pad 21. The arrangement of the protruding blocks 22 further reduces the contact area with the membrane frame, and further reduces the adhesion between the membrane frame and the membrane box 1 during separation.

The height of the bump 22 is lower than the height of the stopper 23. In the process of taking out the Pellicle film from the film box 1, the condition that the film frame leans forward by 75 degrees exists, so that the stop block 23 is arranged to limit the film frame, movement is avoided when the film frame is inclined, and the stability of film taking is improved.

In order to ensure that the membrane frame is better fixed under the condition of reduced area of the membrane frame contacting the membrane box 1 and reduced viscosity, a fixing component 3 is arranged. The fixing assembly 3 comprises a fixing block 31, a bolt 32 and a limiting seat 34, a through hole is transversely formed in the fixing block, the bolt 32 is inserted into the through hole, a positioning hole is formed in the membrane frame corresponding to the through hole, one end of the bolt 32 penetrates through the through hole to be inserted into the positioning hole in the membrane frame during fixing, and the bolt 32 is limited through the limiting seat 34. An arc-shaped groove 35 is formed in the limiting seat 34, and the connecting rod 33 on the bolt 32 is limited through the arc-shaped groove 35.

When the fixing is carried out, the bolt 32 is inserted into the positioning hole, the bolt 32 is rotated to clamp the connecting pipe in the arc-shaped groove 35, and the bolt 32 is limited through the arc-shaped groove 35. When the Pellicle film is taken out, the bolt 32 is pulled out of the limit hole, so that the use is convenient, and a good fixing effect can be achieved.

It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art and which are included in the embodiments of the present utility model without the inventive step, are intended to be within the scope of the present utility model. Structures, devices and methods of operation not specifically described and illustrated herein, unless otherwise indicated and limited, are implemented according to conventional means in the art.

Claims

1. A Pellicle capsule, characterized in that: the membrane frame of the Pellicle membrane is supported by the supporting components and is fixed by the fixing components, and the fixing components are fixedly spliced with the membrane frame of the Pellicle membrane;

the support assembly comprises a cushion block and a bump arranged on the cushion block, a stop block is arranged on the outer side edge of the cushion block, and the length of the stop block is matched with that of the cushion block;

the fixing assembly comprises a fixing block, a bolt and a limiting seat, wherein a through hole is transversely formed in the fixing block, the bolt is inserted into the through hole, a positioning hole is formed in the film frame corresponding to the through hole, one end of the bolt penetrates through the through hole to be inserted into the positioning hole in the film frame during fixing, and the bolt is limited through the limiting seat; the limiting seat is provided with an arc-shaped groove, and the connecting rod on the plug pin is limited through the arc-shaped groove.

2. A Pellicle capsule according to claim 1, wherein: the upper end face of the cushion block is a downward inclined plane.

3. A Pellicle capsule according to claim 1, wherein: the cross-sectional area of the lug is smaller than that of the cushion block, and the height of the lug is lower than that of the stop block.