CN117682161A - Film attaching method, device, terminal equipment and storage medium - Google Patents
Film attaching method, device, terminal equipment and storage medium Download PDFInfo
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- CN117682161A CN117682161A CN202410147739.9A CN202410147739A CN117682161A CN 117682161 A CN117682161 A CN 117682161A CN 202410147739 A CN202410147739 A CN 202410147739A CN 117682161 A CN117682161 A CN 117682161A
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- film
- film covering
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- assembly
- mask plate
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- 238000000034 method Methods 0.000 title claims abstract description 49
- 238000003860 storage Methods 0.000 title claims abstract description 13
- 230000005389 magnetism Effects 0.000 claims abstract description 9
- 210000002489 tectorial membrane Anatomy 0.000 claims abstract description 4
- 238000007689 inspection Methods 0.000 claims description 64
- 238000010030 laminating Methods 0.000 claims description 13
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 230000000873 masking effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 20
- 239000010408 film Substances 0.000 description 215
- 238000001514 detection method Methods 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- 239000000428 dust Substances 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 9
- 239000003292 glue Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The application discloses a pad pasting method, device, terminal equipment and storage medium, its pad pasting device is applied to mask pad pasting, includes: the base assembly is fixed above the mask plate and comprises a second magnetic attraction structure and bolt holes, the second magnetic attraction structure is arranged at the top of the base assembly along the circumferential direction, and the bolt holes are formed in the second magnetic attraction structure; the covering film component is arranged above the base component, a first magnetic attraction structure is arranged at the bottom of the covering film component along the circumferential direction, the first magnetic attraction structure is arranged relative to the second magnetic attraction structure, and a bolt is arranged on the first magnetic attraction structure relative to the bolt hole; the tectorial membrane subassembly with the base subassembly is through first magnetism is inhaled the structure with the structure is inhaled to the second magnetism, and through the bolt with the bolt hole can dismantle the connection. The scrapping risk and the production cost of the film and the mask plate in the film pasting process are reduced, and the production efficiency is improved.
Description
Technical Field
The present disclosure relates to the field of semiconductor manufacturing technologies, and in particular, to a film laminating method, a film laminating device, a terminal device, and a storage medium.
Background
In order to prevent the pollution to the pattern area of the mask, a thin film (Pellicle) with a protection function is arranged on the surface of the mask to protect the mask. In the production process of the mask, after the film is stuck on the surface of the mask through a high polymer adhesive, when the film is put into an automatic optical inspection device (AOI) for inspection, the condition that the surface of a pattern area protected by the film is polluted by dust particles is often found, and the dust particles on the surface of the mask can be cleaned only by removing the film fixed on the surface of the mask.
In the process of removing the film on the mask, the film may be damaged and scrapped, and if part of glue remains on the surface of the mask after the film is removed, the glue needs to be removed through manual operation, which may result in the mask being scratched and scrapped.
Therefore, it is necessary to propose a solution that can reduce the risk of rejection of the film and the reticle during the film lamination process.
Disclosure of Invention
The main aim of the application is to provide a film pasting method, a device, terminal equipment and a storage medium, which aim to reduce the scrapping risk and the production cost of a film and a mask plate in the film pasting process and improve the production efficiency.
To achieve the above object, the present application provides a film sticking device, which is applied to mask sticking, comprising:
the base assembly is fixed above the mask plate and comprises a second magnetic structure and bolt holes, the second magnetic structure is arranged at the top of the base assembly along the circumferential direction, and the bolt holes are formed in the second magnetic structure;
the covering film component is arranged above the base component, a first magnetic attraction structure is arranged at the bottom of the covering film component along the circumferential direction, the first magnetic attraction structure is arranged relative to the second magnetic attraction structure, and a bolt is arranged on the first magnetic attraction structure relative to the bolt hole;
the tectorial membrane subassembly with the base subassembly is through first magnetism is inhaled the structure with the structure is inhaled to the second magnetism, and through the bolt with the bolt hole can dismantle the connection.
Optionally, the number of the bolts is multiple, and the multiple bolts are distributed along the circumferential direction of the film covering assembly.
Optionally, the number of the latch holes is a plurality, and the plurality of the latch holes are distributed along the circumferential direction of the base assembly.
Optionally, the base assembly further comprises a film base, and the second magnetic attraction structure is arranged above the film base.
Optionally, the film covering assembly includes a film frame and a film body, the film body set up in the film frame, first magnetism is inhaled the structure and is followed the circumference setting of film frame.
Optionally, the base assembly is fixed above the reticle by an adhesive.
In addition, the application also provides a film pasting method, which adopts the film pasting device, and comprises the following steps:
attaching the reticle to the base assembly;
connecting the base assembly with the film covering assembly to obtain a film covering mask plate;
inspecting the film-covered mask plate to obtain a first inspection result;
and if the first inspection result is unqualified, removing the film covering assembly of the film covering mask plate, and sticking the film covering mask plate again until the inspection result of the film covering mask plate is qualified.
Optionally, if the inspection result is not qualified, removing the film covering component of the film covering mask, and sticking the film covering mask again until the inspection result of the film covering mask is qualified, including:
removing a film covering assembly of the film covering mask plate, and cleaning the base assembly;
connecting the cleaned base assembly with the film covering assembly to obtain the film covering mask;
inspecting the film-covered mask plate to obtain a second inspection result;
and if the second inspection result is not qualified, returning to execute the step and the subsequent steps of removing the film covering assembly of the film covering mask until the inspection result of the film covering mask is qualified.
The embodiment of the application also provides a terminal device, which comprises a memory, a processor and a film pasting program stored on the memory and capable of running on the processor, wherein the film pasting program realizes the steps of the film pasting method when being executed by the processor.
The embodiment of the application also provides a computer readable storage medium, wherein the computer readable storage medium stores a film pasting program, and the film pasting program realizes the steps of the film pasting method when being executed by a processor.
The film pasting method, the film pasting device, the terminal equipment and the storage medium are provided by the embodiment of the application, and the mask plate is connected with the base component; connecting the base assembly with the film covering assembly to obtain a film covering mask plate; inspecting the film-covered mask plate to obtain a first inspection result; and if the first inspection result is unqualified, removing the film covering assembly of the film covering mask plate, and sticking the film covering mask plate again until the inspection result of the film covering mask plate is qualified. By connecting the pellicle assembly and the base assembly, additional protection can be provided to the reticle from contaminants and damaging substances contacting the reticle surface. And (3) inspecting the coated mask, if the inspection result is unqualified, removing the coated module and sticking the film again until the qualified inspection result is achieved, and improving the quality of the coated mask. The film is assembled and disassembled through the film covering assembly, so that the film replacement operation is facilitated, the scrapping risk and the production cost of the film and the mask plate in the film covering process are reduced, and the production efficiency is improved.
Drawings
FIG. 1 is a schematic diagram of a reticle structure of a prior art attached film;
FIG. 2 is a schematic view of a first view of the film laminating apparatus of the present application;
FIG. 3 is a schematic view of a second view of the film laminating apparatus according to the present application;
FIG. 4 is a schematic view of a third view of the film laminating apparatus according to the present application;
FIG. 5 is a schematic flow chart of a first exemplary embodiment of a film laminating method of the present application;
fig. 6 is a schematic flow chart of a second exemplary embodiment of the film laminating method of the present application.
Reference numerals illustrate: 100. the device comprises a film covering assembly, 101, a film, 102, bolts, 103, a first magnetic structure, 200, a base assembly, 201, bolt holes, 202, a second magnetic structure, 203, a film base, 204, positioning holes, 301, an adhesive, 401 and a mask.
The realization, functional characteristics and advantages of the present application will be further described with reference to the embodiments, referring to the attached drawings.
Detailed Description
It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
The main solutions of the embodiments of the present application are: by attaching the reticle to the base assembly; connecting the base assembly with the film covering assembly to obtain a film covering mask plate; inspecting the film-covered mask plate to obtain a first inspection result; and if the first inspection result is unqualified, removing the film covering assembly of the film covering mask plate, and sticking the film covering mask plate again until the inspection result of the film covering mask plate is qualified. By connecting the pellicle assembly and the base assembly, additional protection can be provided to the reticle from contaminants and damaging substances contacting the reticle surface. And (3) inspecting the coated mask, if the inspection result is unqualified, removing the coated module and sticking the film again until the qualified inspection result is achieved, and improving the quality of the coated mask. The film is assembled and disassembled through the film covering assembly, so that the film replacement operation is facilitated, the scrapping risk and the production cost of the film and the mask plate in the film covering process are reduced, and the production efficiency is improved.
In the embodiment of the application, in the production process of the mask, after the mask is produced, an automatic optical inspection device (AOI) is placed for inspection, if defect-free and dust particles are found after inspection, a thin film (Pellicle) with a protection effect is stuck on the pattern surface of the mask, and a main pattern area is protected. After the film is pasted, the mask plate with the film is continuously detected in automatic optical detection equipment, and if the detection is passed, packaging and shipment are carried out; if the test is not passed, the film stuck to the surface of the reticle needs to be removed first. After the film is removed, if the surface of the mask plate has glue residues, the glue residues on the surface of the mask plate are needed to be manually removed, then the mask plate is cleaned through cleaning equipment, the mask plate is inspected by automatic optical inspection equipment again after the cleaning is finished, if no defects and dust particles are found after the inspection, the film is adhered on the pattern surface of the mask plate to protect a main pattern area, after the film is adhered, the mask plate with the film is continuously inspected in the automatic optical inspection equipment, and if the inspection is passed, the mask plate is packaged and delivered; if the detection is not passed, repeating the steps until the mask plate after the film pasting is defect-free.
Referring to fig. 1, in the prior art, when removing a film on a mask, the film needs to pass through a positioning hole 204 and is removed by using a specific instrument, and because the film is firmly adhered to the surface of the mask, the film is difficult to remove, which may result in damage and rejection of the film, and the mask is also easy to reject in the removal process, i.e. when removing residual glue on the surface of the mask by manual operation, the mask may be scratched and rejected.
Therefore, by connecting the membrane covering assembly and the base assembly, the embodiment of the application can provide additional protection for the mask plate and prevent pollutants and damaging substances from contacting the surface of the mask plate. And (3) inspecting the coated mask, if the inspection result is unqualified, removing the coated module and sticking the film again until the qualified inspection result is achieved, and improving the quality of the coated mask. The film is assembled and disassembled through the film covering assembly, so that the film replacement operation is facilitated, the scrapping risk and the production cost of the film and the mask plate in the film covering process are reduced, and the production efficiency is improved.
In an embodiment of the present invention, as shown in fig. 2 to 5, the present application provides a film sticking device, which is applied to mask sticking, including:
the base assembly is fixed above the mask plate and comprises a second magnetic structure and bolt holes, the second magnetic structure is arranged at the top of the base assembly along the circumferential direction, and the bolt holes are formed in the second magnetic structure;
the covering film component is arranged above the base component, a first magnetic attraction structure is arranged at the bottom of the covering film component along the circumferential direction, the first magnetic attraction structure is arranged relative to the second magnetic attraction structure, and a bolt is arranged on the first magnetic attraction structure relative to the bolt hole;
the tectorial membrane subassembly with the base subassembly is through first magnetism is inhaled the structure with the structure is inhaled to the second magnetism, and through the bolt with the bolt hole can dismantle the connection.
Specifically, the film covering assembly 100 includes a plug 102, a first magnetic attraction structure 103, and a film 101. The base assembly 200 includes a pin aperture 201, a second magnetic attraction structure 202, and a film base 203. The inserted connection of the film covering assembly 100 and the base assembly 200 can be realized through the bolt 102 and the bolt hole 201, the magnetic attraction connection of the film covering assembly 100 and the base assembly 200 can be realized through the first magnetic attraction structure 103 and the second magnetic attraction structure 202, the connection stability of the film covering assembly 100 and the base assembly 200 is ensured, and the film covering assembly 100 is convenient to detach for re-pasting when tiny dust particles or other impurities are found.
After the mask plate is assembled with the film covering component 100 and the base component 200, the mask plate is detected by an automatic optical detection device (AOI), if the pattern area of the mask plate is detected to have tiny dust particles or other impurities, the film covering component 100 is removed, and the particles or other impurities on the surface of the mask plate are removed by a cleaning device. After the cleaning is completed, the film covering assembly 100 is assembled again and detected, and if the pattern area of the mask still has dust particles or other impurities, the steps are repeated until the pattern area of the mask does not have dust particles or other impurities. The process difficulty and the operation risk of removing the film covering assembly 100 are reduced through the film covering assembly 100, the film covering assembly 100 is prevented from being scrapped, the mask is not scratched in the removing process, the production cost of the mask is reduced, and the production efficiency is improved.
In an embodiment, the number of the bolts is a plurality, and the bolts are distributed along the circumferential direction of the film covering assembly.
Specifically, the number of the bolts 102 is set to be plural, and the bolts 102 are disposed on the first magnetic attraction structure 103 and distributed along the circumferential direction of the film covering assembly 100 to improve the stability when the film covering assembly 100 and the base assembly 200 are assembled.
In an embodiment, the number of the bolt holes is a plurality, and the plurality of the bolt holes are distributed along the circumferential direction of the base assembly.
Specifically, the number of the bolt holes 201 is set to be plural, the bolt holes 201 are set on the second magnetic attraction structure 202, distributed along the circumferential direction of the base assembly 200, and the number of the bolt holes 201 is consistent with the number of the bolts 102 and set in one-to-one correspondence, so as to improve the stability when the film covering assembly 100 and the base assembly 200 are assembled.
In an embodiment, the base assembly further comprises a film base, and the second magnetic attraction structure is disposed above the film base.
Specifically, after the mask 401 is produced and inspected to be qualified, the base assembly 200 is assembled and fixed on the mask 401 through the corresponding positioning device according to the positioning holes 204, the film base 203 is used for being connected with the mask 401, the film base 203 is provided with the second magnetic structure 202, the second magnetic structure 202 is provided with the bolt holes 201, the detachable insertion connection and the magnetic connection with the film covering assembly 100 can be realized, the mask pasting process can be completed after the film covering assembly 100 and the base assembly 200 are assembled, and the film covering assembly 100 can be detached to be corrected correspondingly when foreign matters are detected.
In an embodiment, the film covering assembly includes a film frame and a film body, the film body is disposed on the film frame, and the first magnetic structure is disposed along a circumferential direction of the film frame.
Specifically, the film covering assembly 100 may be a film structure in the prior art, including a film frame and a film body, where the film body is disposed in the film frame, and the film body may be a film in the prior art. The first magnetic structure 103 is disposed in the circumferential direction of the film frame, and is used for performing magnetic connection with the second magnetic structure 202 of the base assembly 200. The first magnetic attraction structure 103 is provided with a bolt 102 for being inserted into and connected with a bolt hole 201 of the base assembly 200.
In one embodiment, the base assembly is secured over the reticle by an adhesive.
Specifically, the pellicle base 203 in the base assembly 200 may be secured over the reticle 401 by an adhesive 301. In addition, the base assembly 200 and the reticle 401 may be coupled by magnetic coupling, etc., depending on the reticle and base assembly design and application requirements.
Referring to fig. 5, fig. 5 is a schematic flow chart of a first exemplary embodiment of the film laminating method of the present application. The film pasting device is applied, and the film pasting method comprises the following steps:
step S100, connecting the mask plate to the base assembly;
step S200, connecting the base component with the film covering component to obtain a film covering mask plate;
step S300, inspecting the film-covered mask plate to obtain a first inspection result;
and step S400, if the first inspection result is unqualified, removing the film covering assembly of the film covering mask plate, and sticking the film covering mask plate again until the inspection result of the film covering mask plate is qualified.
Specifically, a mask material is subjected to steps of exposure, development etching, cleaning, measurement, detection and the like to obtain the mask plate with the pattern area. After the mask 401 with the pattern area is initially detected by a detecting instrument such as an automatic optical detecting device, the mask 401 is connected with the base assembly 200 by a corresponding positioning device according to the positioning hole 204, and the relative position of the mask 401 and the base assembly 200 is kept fixed. Then, the film covering assembly 100 and the base assembly 200 are inserted and connected with the bolts 102 through the bolt holes 201, and are sucked tightly under the magnetic force of the first magnetic suction structure 103 and the second magnetic suction structure 202, so that the film covering process is completed, and the film covering mask plate is obtained. The coated mask plate is subjected to inspection by detection instruments such as automatic optical detection equipment, and if the first detection result of the coated mask plate is qualified, the mask plate pasting process is completed; if the first detection result of the coated mask plate is failed, the coated mask plate 100 needs to be removed, the coated mask plate is re-coated, the coated mask plate after re-coating is inspected again, and if the re-inspection result is still failed, the steps are repeated until the inspection result of the coated mask plate is qualified.
In this embodiment, the mask plate is connected to the base assembly through the above scheme; connecting the base assembly with the film covering assembly to obtain a film covering mask plate; inspecting the film-covered mask plate to obtain a first inspection result; and if the first inspection result is unqualified, removing the film covering assembly of the film covering mask plate, and sticking the film covering mask plate again until the inspection result of the film covering mask plate is qualified. By connecting the pellicle assembly and the base assembly, additional protection can be provided to the reticle from contaminants and damaging substances contacting the reticle surface. And (3) inspecting the coated mask, if the inspection result is unqualified, removing the coated module and sticking the film again until the qualified inspection result is achieved, and improving the quality of the coated mask. The film is assembled and disassembled through the film covering assembly, so that the film replacement operation is facilitated, the scrapping risk and the production cost of the film and the mask plate in the film covering process are reduced, and the production efficiency is improved.
Further, referring to fig. 6, fig. 6 is a schematic flow chart of a second exemplary embodiment of the film laminating method of the present application. Based on the embodiment shown in fig. 5, if the inspection result is not qualified, removing the film covering component of the film covering mask, and pasting the film again on the mask until the inspection result of the film covering mask is qualified, including:
step S401, removing a film covering assembly of the film covering mask plate, and cleaning the base assembly;
step S402, connecting the cleaned base assembly to the film covering assembly to obtain the film covering mask;
step S403, inspecting the film-covered mask plate to obtain a second inspection result;
and step S404, if the second inspection result is unqualified, returning to execute the step of removing the film covering assembly of the film covering mask and the subsequent steps until the inspection result of the film covering mask is qualified.
Specifically, if the first detection result of the coated mask is not qualified, removing the coated module 100, cleaning the surface of the base module 200 by using corresponding cleaning equipment, connecting the base module 200 with the coated module 100 again, and performing inspection again after obtaining the coated mask to obtain a second inspection result. And if the second inspection result is still not qualified, repeating the step of removing the coated membrane assembly 100 and the subsequent steps until the inspection result of the coated membrane mask is qualified.
According to the technical scheme, the base assembly is cleaned after the film covering assembly is removed, so that tiny dust particles or impurities on the surface of the base assembly can be removed, and pattern distortion of a pattern area formed on a wafer is avoided when a mask is used for photoetching in the follow-up process. The cleaned base component is connected with the film covering component again, the repeated film pasting process is completed, the film removing difficulty and the damage and scrapping risk in the film disassembling process can be reduced, the mask plate surface residual glue is not required to be removed through manual operation, and the condition that the mask plate is scratched and scrapped is avoided. And the inspection and the corresponding inspection result treatment are carried out on the film-covered mask plate after film re-pasting, so that the number of unqualified products is reduced, and the production efficiency is improved.
The principle and implementation process of the film are realized in this embodiment, please refer to the above embodiments, and the description thereof is omitted here.
In addition, the embodiment of the application also provides a terminal device, which comprises a memory, a processor and a film pasting program stored on the memory and capable of running on the processor, wherein the film pasting program realizes the steps of the film pasting method when being executed by the processor.
Because the film sticking program is executed by the processor and adopts all the technical schemes of all the embodiments, the film sticking program has at least all the beneficial effects brought by all the technical schemes of all the embodiments and is not described in detail herein.
In addition, the embodiment of the application also provides a computer readable storage medium, wherein the computer readable storage medium stores a film pasting program, and the film pasting program realizes the steps of the film pasting method when being executed by a processor.
Because the film sticking program is executed by the processor and adopts all the technical schemes of all the embodiments, the film sticking program has at least all the beneficial effects brought by all the technical schemes of all the embodiments and is not described in detail herein.
Compared with the prior art, the film pasting method, the film pasting device, the terminal equipment and the storage medium are provided by the embodiment of the application, and the mask plate is connected with the base component; connecting the base assembly with the film covering assembly to obtain a film covering mask plate; inspecting the film-covered mask plate to obtain a first inspection result; and if the first inspection result is unqualified, removing the film covering assembly of the film covering mask plate, and sticking the film covering mask plate again until the inspection result of the film covering mask plate is qualified. By connecting the pellicle assembly and the base assembly, additional protection can be provided to the reticle from contaminants and damaging substances contacting the reticle surface. And (3) inspecting the coated mask, if the inspection result is unqualified, removing the coated module and sticking the film again until the qualified inspection result is achieved, and improving the quality of the coated mask. The film is assembled and disassembled through the film covering assembly, so that the film replacement operation is facilitated, the scrapping risk and the production cost of the film and the mask plate in the film covering process are reduced, and the production efficiency is improved.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or system. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or system that comprises the element.
The foregoing embodiment numbers of the present application are merely for describing, and do not represent advantages or disadvantages of the embodiments.
From the above description of the embodiments, it will be clear to those skilled in the art that the above-described embodiment method may be implemented by means of software plus a necessary general hardware platform, but of course may also be implemented by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art in the form of a software product stored in a storage medium (e.g. ROM/RAM, magnetic disk, optical disk) as above, including several instructions for causing a terminal device (which may be a mobile phone, a computer, a server, a controlled terminal, or a network device, etc.) to perform the method of each embodiment of the present application.
The foregoing description is only of the preferred embodiments of the present application, and is not intended to limit the scope of the claims, and all equivalent structures or equivalent processes using the descriptions and drawings of the present application, or direct or indirect application in other related technical fields are included in the scope of the claims of the present application.
Claims (10)
1. The utility model provides a pad pasting device, its characterized in that, pad pasting device is applied to mask pad pasting, includes:
the base assembly is fixed above the mask plate and comprises a second magnetic structure and bolt holes, the second magnetic structure is arranged at the top of the base assembly along the circumferential direction, and the bolt holes are formed in the second magnetic structure;
the covering film component is arranged above the base component, a first magnetic attraction structure is arranged at the bottom of the covering film component along the circumferential direction, the first magnetic attraction structure is arranged relative to the second magnetic attraction structure, and a bolt is arranged on the first magnetic attraction structure relative to the bolt hole;
the tectorial membrane subassembly with the base subassembly is through first magnetism is inhaled the structure with the structure is inhaled to the second magnetism, and through the bolt with the bolt hole can dismantle the connection.
2. The film laminating apparatus of claim 1, wherein the number of said pins is plural, and a plurality of said pins are distributed along a circumferential direction of said film-covering member.
3. The film laminating apparatus of claim 1, wherein the number of said pin holes is plural, and a plurality of said pin holes are distributed along a circumferential direction of said base member.
4. The film laminating apparatus of claim 1, wherein said base assembly further comprises a film base, said second magnetic structure being disposed above said film base.
5. The film laminating apparatus of claim 1, wherein the film covering assembly comprises a film frame and a film body, the film body is disposed on the film frame, and the first magnetic structure is disposed along a circumferential direction of the film frame.
6. The masking device of claim 1, wherein the base assembly is secured over the reticle by an adhesive.
7. A film-sticking method, characterized by applying the film-sticking apparatus according to any one of claims 1 to 6, comprising:
attaching the reticle to the base assembly;
connecting the base assembly with the film covering assembly to obtain a film covering mask plate;
inspecting the film-covered mask plate to obtain a first inspection result;
and if the first inspection result is unqualified, removing the film covering assembly of the film covering mask plate, and sticking the film covering mask plate again until the inspection result of the film covering mask plate is qualified.
8. The method according to claim 7, wherein if the inspection result is not acceptable, removing the film covering assembly of the film covering mask, and re-attaching the film covering mask until the inspection result of the film covering mask is acceptable, comprising:
removing a film covering assembly of the film covering mask plate, and cleaning the base assembly;
connecting the cleaned base assembly with the film covering assembly to obtain the film covering mask;
inspecting the film-covered mask plate to obtain a second inspection result;
and if the second inspection result is not qualified, returning to execute the step and the subsequent steps of removing the film covering assembly of the film covering mask until the inspection result of the film covering mask is qualified.
9. Terminal device, characterized in that it comprises a memory, a processor and a film-sticking program stored on the memory and executable on the processor, which film-sticking program, when executed by the processor, realizes the steps of the film-sticking method according to any one of claims 7-8.
10. A computer-readable storage medium, on which a film-sticking program is stored, which, when executed by a processor, implements the steps of the film-sticking method according to any one of claims 7 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410147739.9A CN117682161B (en) | 2024-02-02 | 2024-02-02 | Film attaching method, device, terminal equipment and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410147739.9A CN117682161B (en) | 2024-02-02 | 2024-02-02 | Film attaching method, device, terminal equipment and storage medium |
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| Publication Number | Publication Date |
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| CN117682161A true CN117682161A (en) | 2024-03-12 |
| CN117682161B CN117682161B (en) | 2024-04-19 |
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| CN202410147739.9A Active CN117682161B (en) | 2024-02-02 | 2024-02-02 | Film attaching method, device, terminal equipment and storage medium |
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101317206B1 (en) * | 2012-07-24 | 2013-10-10 | 민경준 | Auto pellicle mounter |
| CN208937905U (en) * | 2018-11-19 | 2019-06-04 | 广州仕元光电股份有限公司 | A kind of light shield protective film laminating apparatus |
| CN211165326U (en) * | 2019-09-25 | 2020-08-04 | 深圳市海能达通信有限公司 | Waterproof gum attaching device |
| CN112373792A (en) * | 2020-11-13 | 2021-02-19 | 宁波协华汽车配件制造有限公司 | Automatic film sticking machine for surface of instrument board decorative plate |
| CN112606377A (en) * | 2020-12-15 | 2021-04-06 | 广东华中科技大学工业技术研究院 | Laminating equipment for curved glass and laminating processing method thereof |
| CN114114854A (en) * | 2021-11-30 | 2022-03-01 | 中山市三美高新材料技术有限公司 | Shielding device |
| CN216154124U (en) * | 2021-09-10 | 2022-04-01 | 泉意光罩光电科技(济南)有限公司 | Pad pasting adsorption structure, mask version pad pasting structure and system |
| CN116560184A (en) * | 2022-01-28 | 2023-08-08 | 芯恩（青岛）集成电路有限公司 | Photomask protective film assembly dismantling system and method |
| CN219524379U (en) * | 2023-04-20 | 2023-08-15 | 东莞市摩哆哆科技有限公司 | General type pad pasting ware and pad pasting suit device |
| CN219842629U (en) * | 2023-04-14 | 2023-10-17 | 深圳清溢光电股份有限公司 | Pellicle capsule |
| CN117261271A (en) * | 2023-11-20 | 2023-12-22 | 深圳市龙图光罩股份有限公司 | Mask film pasting method, device and storage medium |
| CN220298955U (en) * | 2023-07-17 | 2024-01-05 | 深圳市闪魔数码科技有限公司 | Mobile phone film sticking device and mobile phone film |
-
2024
- 2024-02-02 CN CN202410147739.9A patent/CN117682161B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101317206B1 (en) * | 2012-07-24 | 2013-10-10 | 민경준 | Auto pellicle mounter |
| CN208937905U (en) * | 2018-11-19 | 2019-06-04 | 广州仕元光电股份有限公司 | A kind of light shield protective film laminating apparatus |
| CN211165326U (en) * | 2019-09-25 | 2020-08-04 | 深圳市海能达通信有限公司 | Waterproof gum attaching device |
| CN112373792A (en) * | 2020-11-13 | 2021-02-19 | 宁波协华汽车配件制造有限公司 | Automatic film sticking machine for surface of instrument board decorative plate |
| CN112606377A (en) * | 2020-12-15 | 2021-04-06 | 广东华中科技大学工业技术研究院 | Laminating equipment for curved glass and laminating processing method thereof |
| CN216154124U (en) * | 2021-09-10 | 2022-04-01 | 泉意光罩光电科技(济南)有限公司 | Pad pasting adsorption structure, mask version pad pasting structure and system |
| CN114114854A (en) * | 2021-11-30 | 2022-03-01 | 中山市三美高新材料技术有限公司 | Shielding device |
| CN116560184A (en) * | 2022-01-28 | 2023-08-08 | 芯恩（青岛）集成电路有限公司 | Photomask protective film assembly dismantling system and method |
| CN219842629U (en) * | 2023-04-14 | 2023-10-17 | 深圳清溢光电股份有限公司 | Pellicle capsule |
| CN219524379U (en) * | 2023-04-20 | 2023-08-15 | 东莞市摩哆哆科技有限公司 | General type pad pasting ware and pad pasting suit device |
| CN220298955U (en) * | 2023-07-17 | 2024-01-05 | 深圳市闪魔数码科技有限公司 | Mobile phone film sticking device and mobile phone film |
| CN117261271A (en) * | 2023-11-20 | 2023-12-22 | 深圳市龙图光罩股份有限公司 | Mask film pasting method, device and storage medium |
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