TW201230168A - Apparatus for attaching and detaching support of thin substrate and detaching method using the same - Google Patents

Apparatus for attaching and detaching support of thin substrate and detaching method using the same Download PDF

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Publication number
TW201230168A
TW201230168A TW100124105A TW100124105A TW201230168A TW 201230168 A TW201230168 A TW 201230168A TW 100124105 A TW100124105 A TW 100124105A TW 100124105 A TW100124105 A TW 100124105A TW 201230168 A TW201230168 A TW 201230168A
Authority
TW
Taiwan
Prior art keywords
thin substrate
vacuum
chuck
vacuum chuck
substrate
Prior art date
Application number
TW100124105A
Other languages
English (en)
Chinese (zh)
Inventor
Yoon-Su Kim
Doo-Sung Jung
Young-Do Kweon
Jin-Gu Kim
Original Assignee
Samsung Electro Mech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mech filed Critical Samsung Electro Mech
Publication of TW201230168A publication Critical patent/TW201230168A/zh

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
TW100124105A 2010-12-29 2011-07-07 Apparatus for attaching and detaching support of thin substrate and detaching method using the same TW201230168A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020100137732A KR101175918B1 (ko) 2010-12-29 2010-12-29 박형 기판용 지지체 탈부착 설비 및 그에 의한 탈착 방법

Publications (1)

Publication Number Publication Date
TW201230168A true TW201230168A (en) 2012-07-16

Family

ID=46678484

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100124105A TW201230168A (en) 2010-12-29 2011-07-07 Apparatus for attaching and detaching support of thin substrate and detaching method using the same

Country Status (3)

Country Link
JP (1) JP2012142549A (ko)
KR (1) KR101175918B1 (ko)
TW (1) TW201230168A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230017084A1 (en) * 2019-12-17 2023-01-19 Kulicke & Soffa Netherlands B.V. Adhesive tapes for receiving discrete components

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2690862B2 (ja) * 1994-07-29 1997-12-17 シーケーディ株式会社 真空チャック装置からのワークの取り外し方法及びワークの取り外し装置
KR100674033B1 (ko) * 2004-01-30 2007-01-26 엘지전자 주식회사 증착 장치
JP4797027B2 (ja) * 2008-01-18 2011-10-19 信越ポリマー株式会社 基板体の貼着装置及び基板体の取り扱い方法

Also Published As

Publication number Publication date
JP2012142549A (ja) 2012-07-26
KR101175918B1 (ko) 2012-08-22
KR20120075851A (ko) 2012-07-09

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