TW201216797A - High resolution, solvent resistant, thin elastomeric printing plates - Google Patents

High resolution, solvent resistant, thin elastomeric printing plates Download PDF

Info

Publication number
TW201216797A
TW201216797A TW100130867A TW100130867A TW201216797A TW 201216797 A TW201216797 A TW 201216797A TW 100130867 A TW100130867 A TW 100130867A TW 100130867 A TW100130867 A TW 100130867A TW 201216797 A TW201216797 A TW 201216797A
Authority
TW
Taiwan
Prior art keywords
polymer layer
polymer
styrene
layer
group
Prior art date
Application number
TW100130867A
Other languages
English (en)
Chinese (zh)
Inventor
Gary Delmar Jaycox
Graciela Beatriz Blanchet
Nancy G Tassi
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Publication of TW201216797A publication Critical patent/TW201216797A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0015—Production of aperture devices, microporous systems or stamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Polymerisation Methods In General (AREA)
  • Graft Or Block Polymers (AREA)
  • Laminated Bodies (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
TW100130867A 2010-09-01 2011-08-29 High resolution, solvent resistant, thin elastomeric printing plates TW201216797A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/873,584 US8541162B2 (en) 2010-09-01 2010-09-01 High resolution, solvent resistant, thin elastomeric printing plates

Publications (1)

Publication Number Publication Date
TW201216797A true TW201216797A (en) 2012-04-16

Family

ID=44674878

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100130867A TW201216797A (en) 2010-09-01 2011-08-29 High resolution, solvent resistant, thin elastomeric printing plates

Country Status (7)

Country Link
US (2) US8541162B2 (enExample)
EP (1) EP2612202B1 (enExample)
JP (1) JP5902689B2 (enExample)
KR (1) KR20130102063A (enExample)
CN (1) CN103180783B (enExample)
TW (1) TW201216797A (enExample)
WO (1) WO2012031058A2 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8715906B2 (en) * 2008-12-12 2014-05-06 E I Du Pont De Nemours And Company High resolution, solvent resistant, thin elastomeric printing plates
US8563220B2 (en) 2010-09-01 2013-10-22 E I Du Pont De Nemours And Company High resolution, solvent resistant, thin elastomeric printing plates
US20130152808A1 (en) * 2010-12-29 2013-06-20 Robert D. Kross Printing plate for monotype prints having viscoelastic gels and method for its use
WO2014133507A1 (en) * 2013-02-27 2014-09-04 Poly-Gel Llc Printing plate for monotype prints having viscoelastic gels and method for its use
CN106459326B (zh) 2013-12-06 2019-08-13 株式会社Lg化学 嵌段共聚物
WO2015084132A1 (ko) 2013-12-06 2015-06-11 주식회사 엘지화학 블록 공중합체
WO2015084122A1 (ko) * 2013-12-06 2015-06-11 주식회사 엘지화학 블록 공중합체
WO2015084130A1 (ko) 2013-12-06 2015-06-11 주식회사 엘지화학 블록 공중합체
EP3078688B1 (en) 2013-12-06 2020-03-04 LG Chem, Ltd. Block copolymer
WO2015084127A1 (ko) 2013-12-06 2015-06-11 주식회사 엘지화학 블록 공중합체
JP6347356B2 (ja) 2013-12-06 2018-06-27 エルジー・ケム・リミテッド ブロック共重合体
JP6432847B2 (ja) 2013-12-06 2018-12-05 エルジー・ケム・リミテッド ブロック共重合体
CN105980342B (zh) 2013-12-06 2019-02-15 株式会社Lg化学 单体和嵌段共聚物
EP3078684B1 (en) 2013-12-06 2019-07-31 LG Chem, Ltd. Block copolymer
WO2015084131A1 (ko) 2013-12-06 2015-06-11 주식회사 엘지화학 블록 공중합체
EP3078692B1 (en) 2013-12-06 2021-01-27 LG Chem, Ltd. Block copolymer
JP6432846B2 (ja) 2013-12-06 2018-12-05 エルジー・ケム・リミテッド ブロック共重合体
CN105899559B (zh) 2013-12-06 2018-05-25 株式会社Lg化学 嵌段共聚物
JP6451966B2 (ja) 2014-09-30 2019-01-16 エルジー・ケム・リミテッド ブロック共重合体
US10281820B2 (en) 2014-09-30 2019-05-07 Lg Chem, Ltd. Block copolymer
EP3202799B1 (en) 2014-09-30 2021-08-25 LG Chem, Ltd. Block copolymer
WO2016053001A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
US10377894B2 (en) 2014-09-30 2019-08-13 Lg Chem, Ltd. Block copolymer
US10287430B2 (en) 2014-09-30 2019-05-14 Lg Chem, Ltd. Method of manufacturing patterned substrate
WO2016053007A1 (ko) 2014-09-30 2016-04-07 주식회사 엘지화학 패턴화 기판의 제조 방법
JP6538159B2 (ja) 2014-09-30 2019-07-03 エルジー・ケム・リミテッド ブロック共重合体
EP3202802B1 (en) 2014-09-30 2022-11-23 LG Chem, Ltd. Block copolymer
JP6505212B2 (ja) 2014-09-30 2019-04-24 エルジー・ケム・リミテッド ブロック共重合体
KR102412137B1 (ko) * 2016-09-23 2022-06-23 에스케이이노베이션 주식회사 블록 공중합체를 이용한 미세 패턴의 형성 방법
US20240111213A1 (en) * 2021-02-10 2024-04-04 Asahi Kasei Kabushiki Kaisha Flexographic printing raw plate, flexographic printing plate, and manufacturing method of flexographic printing plate

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4264705A (en) 1979-12-26 1981-04-28 Uniroyal, Inc. Multilayered elastomeric printing plate
JPH0232355A (ja) * 1988-07-20 1990-02-02 Konica Corp 湿し水不要平版印刷版材料
JP2643475B2 (ja) 1989-09-27 1997-08-20 三菱マテリアル株式会社 撥水、撥油性を有する光硬化樹脂
US5804353A (en) * 1992-05-11 1998-09-08 E. I. Dupont De Nemours And Company Lasers engravable multilayer flexographic printing element
EP0665469A3 (en) 1994-01-28 1996-02-21 Minnesota Mining & Mfg Flexographic plate with several layers.
GB9516723D0 (en) * 1995-08-15 1995-10-18 Horsell Plc Water-less lithographic plates
WO1998013730A1 (en) 1996-09-27 1998-04-02 Minnesota Mining And Manufacturing Company Multilayer flexographic printing plate
JPH1195431A (ja) * 1997-09-18 1999-04-09 Hitachi Chem Co Ltd 感光性樹脂組成物、それを用いた樹脂膜の製造法及び物品
EP1767990B8 (en) * 2004-06-11 2014-11-19 Asahi Kasei Chemicals Corporation Photosensitive resin for flexographic printing plate
EP1782886A1 (en) 2005-11-02 2007-05-09 Sony Deutschland GmbH A method of patterning molecules on a substrate using a micro-contact printing process
JP4203911B2 (ja) * 2006-02-21 2009-01-07 株式会社村田製作所 圧電発音体
US20080000373A1 (en) * 2006-06-30 2008-01-03 Maria Petrucci-Samija Printing form precursor and process for preparing a stamp from the precursor
US8715906B2 (en) 2008-12-12 2014-05-06 E I Du Pont De Nemours And Company High resolution, solvent resistant, thin elastomeric printing plates

Also Published As

Publication number Publication date
WO2012031058A2 (en) 2012-03-08
EP2612202A2 (en) 2013-07-10
KR20130102063A (ko) 2013-09-16
US20120052446A1 (en) 2012-03-01
US20140011137A1 (en) 2014-01-09
EP2612202B1 (en) 2019-05-15
CN103180783A (zh) 2013-06-26
CN103180783B (zh) 2016-06-22
US8877428B2 (en) 2014-11-04
US8541162B2 (en) 2013-09-24
WO2012031058A3 (en) 2012-06-28
JP2013538147A (ja) 2013-10-10
JP5902689B2 (ja) 2016-04-13

Similar Documents

Publication Publication Date Title
CN103180783B (zh) 制备高分辨率、耐溶剂、弹性体薄印刷板的方法
TWI333960B (en) Polymer, resist protective coating material, and patterning process
TWI334421B (enExample)
JP5046236B2 (ja) 改善された性能を有する液浸トップコート材料
JP2010191447A (ja) 液浸リソグラフィーに用いるレジスト積層体
TW200831543A (en) Polymer, resist protective coating material, and patterning process
KR100852840B1 (ko) 레지스트 적층체의 형성 방법
TW200837096A (en) Polymer having antireflective properties, hardmask composition including the same, and process for forming a patterned material layer
TW201500859A (zh) 包含聚合熱酸產生劑之組合物及其方法
JP4507891B2 (ja) 液浸リソグラフィーに用いるレジスト積層体
TW201224681A (en) Pattern forming method, resist underlayer film, and composition for forming resist underlayer film
TW201142517A (en) Upper layer-forming composition and resist patterning method
TW201140241A (en) Negative resist composition and patterning process
TWI377215B (enExample)
CN115097694A (zh) 一种树脂组合物以及使用其的光刻胶图形化的方法
US9248686B2 (en) High resolution, solvent resistant, thin elastomeric printing plates
TWI325518B (enExample)
WO2010001779A1 (ja) 感光性絶縁樹脂組成物及びそれを用いたパターン形成方法
TW200903172A (en) Resin for formation of upper antireflective film, composition for formation of upper antireflective film, and resist pattern formation method
JP2010066497A (ja) 液浸露光フォトレジスト膜の保護層用塗布組成物、及びそれを用いたパターン形成方法
KR20040060398A (ko) 포토레지스트 현상액 조성물 및 이를 이용한 반도체소자의 패턴 형성 방법