TW201018636A - An apparatus for correcting position of a user tray and a test handler - Google Patents

Abstract

The present invention relates to an apparatus for correcting position of a user tray including at least one first position member and at least one second position member that determine position of a user tray, a plate where the user tray is received, a first correcting unit that moves the user tray in a direction where the first position member is installed, a second correcting unit that moves the user tray in a direction where the second position member is installed, and an operating unit that operates the first correcting unit and the second correcting unit, which has a simple configuration, and moves a user tray to the accurate position, thereby reducing manufacturing costs and maintenance costs.

Description

201018636 IX. Description of the invention: [Technical field to which the invention pertains] The aircraft is used to classify the wafers. The present invention relates to a test handler which is supplied to a test machine and which is tested by grading the package after testing [Prior Art]. The test handler can be used to perform electrical test sealing on the package wafer at the end of the packaging process. (1) Field input, 峨 process, and loading of the capacitors. Included package test handlers package the package from the user test . This process is called a tray to carry out the process. Viewing the transporter through the use of a plurality of 2 = er 嘱 术 术 术 喷嘴 ^ φ φ = = 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟 辟This is the positioning board. The bit tester consists of a high precision wafer with a plurality of sockets for electrical testing. _The wafer can be placed in contact with the socket to be packaged in a low temperature, ^^. The chamber is electrically tested to allow the package to be electrically tested in extreme environments. The transfer to the user support 201018636 process is called, the process of packaging 'packaged wafers will be divided according to the fruit and fruit = and the handling opportunity will transfer the classified seals to the corresponding user shop based on the graded level. The job is to carry out the unloading process. Wei picker system Unloading process ===r_Smoke in the material path and ❹ Factory first! The figure shows a stacker in a test handler that stores a plurality of pallets. And "The second ® * - the state after the back. 帛 2 map" does not indicate the position of the user tray passes the school C, and the ~ person = map" 7' stacker (10) can store the plural_house pallet and the L3 load stacker 1 (n, unloading and transmission unit 104. 卩 且 且 机 机 ' ' ' ' 103 103 103 103 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 粤 r r r r r r r r r r r r r r ^. and the loading stack (four) contains her stack of component ships and loading caregiver (four), the Qing loading board engages G12 health replenishment general branch office #起肖户减, and the loading board 1012 is able to rise and fall on the trench The main frame of the test handler is installed. ¥ 7 201018636 The main frame of the test handler can also be installed with a plurality of unloading stackers 1〇2, so that the plurality of user trays of the packaged wafer after the test can be The loading and unloading stacker 1G2 includes the unloading stacking element 1021 and the unloading board 1022 according to the test result. The unloading stacking component is deleted and can store a plurality of copper trays C, the user trays c The packaged wafer after the test is accommodated. ❿, the domain board 1022 is The unloading process is controlled by the user tray c, and the unloading plate 1022 is installed in the main frame of the test handler in a manner that can be raised and lowered. A plurality of empty user trays C can be stored in the buffer stacker 103. The transport unit 1〇4 can hold the user tray C, and the transport unit 1〇4 is movably mounted to the carrier machine frame.

It is mounted in the main age of the carrier in such a manner as to move in the X-axis and γ-axis directions. And the fresh A1G4 also _ rises and falls. In the stacker 100, the user tray c is transported as follows. Hundreds of first, the transmission unit 1〇4 will accommodate the test to be tested c from the loading stack component to the loading 1G12. User tray 8 201018636 is enough to pick up the packaged wafer to be tested in the user's tender. Then, when the user tray c becomes empty due to the completion of the loading process, the transfer unit 104 transfers the user tray c from the loading plate 1G12 to the buffer stacker to remove or unload the plate 1022. Then the transmission single 104 is empty. The user tray C is transferred from the buffer stacker 103 or the loading plate 1012 to the unloading plate 1022. Then the 'unloading plate 1〇22' raises the user tray C that has been transported from the buffer stack 胄1〇3 or the loading plate to the position 1〇2a, where the picker system (not shown) can be tested. The job wafer is placed in the home tray C. Next, when the tray C accommodates the tested wafer wafer due to the unloading (four) filament, the transport unit 104 transfers the user tray C containing the tested package wafer from the unloading panel 1022 to the unloading stacking component. The test handler can quickly sort the packaged wafers by grading by performing the above steps quickly. Please refer to "Figure 1" and "Figure 2". The stacker (10) will initially load the loading plate (4) and the unloading view_house_c so that the picker system (not shown) can Stable surface loading and unloading processes are performed stably. ° Therefore, the stacker needs to include an item that is finer than the position of the correcting user tray (not shown in the figure). This correcting device can move the home tray c to the exact position in the unloading plate 1022. 9 201018636 This user tray The position correction device can move the user domain in the material direction and the y-axis direction, and the lending tray c contacts the first positioning component money second positioning 70 pieces B, and the user tray (: is positioned to the exact position. However, the 'practical_house pallet position correction device system respectively includes the first-order unit of the user-side axis shift _ household minus C and the second-hand element of the user tray C moving in the W direction, thereby making the structure Moreover, the manufacturing process is increased and the above problems become more apparent due to the installation of a plurality of fine tray position correcting devices. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a user tray position correcting device and a simple structure and The test handler capable of moving the user tray to an accurate position. The present invention is not limited to the above technical purpose. Those skilled in the art can The following detailed description clearly understands other objects of the present invention that are not described herein. One embodiment of the present invention provides a user tray position correction apparatus including: at least one first positioning component and At least one second positioning element for determining a position of the user tray; a bottom plate for receiving the user tray; and a first correcting unit for moving the user tray along the first positioning element by the 201018636+ mounting direction; a second correcting unit is configured to move the user tray along a second direction, where the pieces are mounted; and to operate the first correcting unit and the second correcting unit. The example also provides a test drive, the test handler, the load stacker, has a plurality of user trays, the user supports the packaged wafers to be tested, and the units are commensurate with the test. Wafer placement

Test the tray towel, the chamber Wei 'in the chamber secret _ package "contact with the high-precision positioning plate ^ unloading unit, according to the results of the classification through the grading test tray valley, picking the packaged wafers for sorting; unloading stacking machine The utility model stores a plurality of user trays, the user tray towel accommodates the packaged wafer after the test, and the user tray position and the money preparation, the age-old stacking machine and the unloading stacker. [Embodiment] The following will be combined The preferred embodiment of the user tray position correcting device of the present invention will be described in detail. [3] is a perspective view of the user's touch correction device and the user tray of the present invention. Figure 4 is a perspective view of the underside of Figure 3. Referring to Figures 3 and 4, the user tray position correction setting 1 13帛2, 2nd positioning element 3, bottom plate 4, first calibration unit 5, second correction unit 6 and Work unit 7. The first positioning member 2 is positioned closer to the user tray c and can be mounted on the base plate 4 of the 11 201018636 or the main frame (not shown) of the test handler. The piece 2 protrudes from the upper side of the bottom plate 4 by a predetermined length so that the first turn 2 can cut the first side α of the user tray c. When the first side surface C1 of the user tray C is supported by the first positioning member 2, the direction of the second positioning member 3 (4) is determined along the direction in which the first positioning member 2 is mounted. Position and bottom plate 4 or test the main frame of the handler. The second positioning member 3 protrudes from the upper side of the bottom plate 4 by a certain length so that the second positioning member 3 can cut the second side c2 of the user minus c. When the user plane C2# is corrected by the position of the second positioning tree user tray C, the childcare __ / f direction). The younger brother reads the direction of the 3 silks to the axis of the axis - read the 3 scales - the granular element 2 can be installed with the money to obtain the second position W 3 and the "^ position turn 2 can support the mutually perpendicular first side α With the second side C2. Therefore, the 'user tray position device' paradox is moved to the exact position by the location tray c and the first positioning element 3 and the first positioning element 2 gamma mode tray C. Moving the user tray to the exact position means moving the user tray 至 to the system (not shown) to stably perform the loading process and unloading 12

201018636 The location of the process. The user tray position correcting device 丨 may include a plurality of second positioning members 3 and a plurality of sister position members 2. Thus, the user tray c can be moved to a more accurate position. The user tray C can be received in the bottom plate 4, and the first positioning member 2 and the first positioning member 7G can also be mounted in the bottom plate 4. The bottom plate 4 can be shaped into a square plate shape.

The first correcting unit 5 operates to move the user tray C along the direction in which the first positioning member 2 is wound by the wire (X financial direction). The first correcting unit 5 includes a first moving member 51 and a first elastic member 52. First, the moving member 51 is coupled to the bottom plate 4 and is rotatable on the bottom plate 4. The first correcting unit 5 includes at least one first moving member 51. The first transfer member 51 is connectable to the opposite side of the upper side of the bottom plate of the bottom plate 4 in which the user's city c is housed, i.e., in the lower side of the bottom plate 4. Therefore, the guard area of the pickup system (not shown) does not overlap with the first shifting member 51. Thus, the pickup system (not shown) can stably perform the loading process and the unloading. Process. The first moving member 51 includes a first moving frame and a rotating member 513. 511. First contact element 512 13 201018636 The first moving frame 511 is connected to the bottom plate 4. And the first moving frame 5 ι can be rotated around the first axis 511a. This first moving frame 511 can be integrally formed into a shape and can be connected to the lower side of the bottom plate 4. • The first contact element 512 is coupled to one end 511b′ of the first moving frame 511 and can move the user tray according to the rotation of the first moving frame 511. The first contact element 512 can contact the third side C3 of the user tray c. Above, the ❹-Μ tray c can be moved in the direction in which the first positioning member 2 is mounted (the x-axis direction) through the third side c3 of the pusher (four) c. The first contact member 512 may be formed to protrude from the first moving frame 5, so that the contact member 512 is not in contact with the third side C3 of the fine tray 4 on the wire 4. The first moving member 512 is rotatably connected to the first contact member 512 by one end portion 511b of the 511.

=, when the shift tray_C is moved, the first contact member 512 can be moved around the second portion to prevent the first contact member 512 from coming into contact with the user tray C, and the damage is caused by friction. The other end portion 511c of the rotating member 513. It is rotatably connected to the first moving frame 5ΐ14 14 201018636 Therefore, when the first-moving frame & three rotations, thereby preventing the rotation, the rotating element 5 〗 3 can be damaged around the first part due to friction . 13 The first elastic member 52_ in contact with the working unit 7 is connected to the first elastic branch. Seesaw • The same amount. The number of the jaws 52 is the same as the number of the first moving elements. The one end of the first elastic member 52 can be connected to the disk, and the other end of the first elastic member 52 can be connected to the bottom plate 4 Connected. Thereby, the first elastic member 52 to the bottom plate 4 moves the user tray cr in the direction of the end portion (10) of the first moving member; _511 (the material direction), and the first right unit 6 is installed. The direction in which the user tray C is moved along the _ ❹ axis direction is installed (γ ^_61 and the direction ΓΓ61 can be beer second tree 3 years thin direction (μ direction) shifting ^ touch: coffee 3 财 财 γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ Working unit 7. 15 201018636 The second moving element 61 comprises a second moving frame 6 Π and a second contact element _. The second moving turn 611 is movable in the axis 41 of the choke, and the = moving frame 611 can be The second elastic member (5) is elastically supported. The second moving frame 611 is integrally formed into a square plate shape. The member 612 is formed to protrude from the second moving frame milk, and the first contact 7L member 612 is capable of moving the user tray c ❹ Less than one or more second contact elements 612. The younger-moving turn 61 can include to the touch element 612 With the fourth side of the user tray, the predetermined ===r仏 is thin and can be planar toward the second second contact tree 612, and the second interface 612 can be moved through the hole (4). User domain C on The fourth series C4 is in contact. /, Valley on the upper side of the bottom plate 4 - the first component 62__ material, the sexual element "can push the second mobile element == thus, can be made along the second positioning element 3 The first moving element 61 C. The direction of the female (Y-axis direction) moves the second miscellaneous element 62 of the user tray to the end of the second moving frame 611. _, and the other end can support the second correcting unit 6 At least one or more second elastic members 62 16 201018636 may be included. If the second correction unit 6 includes a plurality of second elastic cultivators 62, the second elastic member 62 may transmit a strange force to the second moving frame 611. The second moving element 61 is moved by the same length as a whole. 1 The first element 62 and the first elastic element 52 may be springs having a predetermined elastic force. • The first correcting unit 5 and the second correcting unit 6 may be in mutual In the vertical direction - do not move _ household _ C. That is, the first - correction sheet The element 5 and the second correcting unit 6 can respectively push the mutually perpendicular third side 〇 and the fourth side μ of the user slit C. The working unit 7 can operate the first correcting unit 5 and the second correcting unit 6. Therefore, the first correction The unit 5 and the second correcting unit 6 can move the user tray c to the exact position. Thus, the user can cancel the position correcting device! The first correcting unit 5 and the second correcting unit 6 can be operated through one working unit 7, because * The calibration device is made of a simple structure and is capable of moving the user tray c to an accurate position. Further, the user tray position correction device i can move the user tray C to the position of the material using only one power source' thus reducing manufacturing costs and maintenance cost. The worksheet 70 7 is attached to the bottom plate 4 and is movable on the bottom plate 4. When the work unit 7 moves on the bottom plate 4, the first correction unit 5 and the second correction unit 6 can be operated. The work order το 7 can be connected to the lower side of the bottom plate 4. This work unit 7 may contain one of the 201018636 guide blocks and the guide rails, while the bottom plate 4 may contain the other of the guide blocks and the guides. The work sheet 7 can be connected to the cylinder 8; the dry body is, and the working unit 7 can move on the bottom plate 4 in accordance with the movement of the rod 8a of the steam red 8. This cylinder 8 can be a pneumatic steam red or hydraulic cylinder. The work unit 7 may include a first work unit 71 and a second work unit 72. The I material 71 can be attached to the bottom plate 4 and can be moved on the bottom plate 4, and the first working unit 71 can be used to operate the first correcting unit 5. The first working unit 71 can operate the first correcting unit 5 such that the second working unit 72 can operate the second correcting unit 6. The first-working unit 7i can be connected to the lower side of the bottom plate 4. This first work unit 71 contains one of the guide blocks and the guide, and the bottom plate 4 may contain the other of the guide block and the guide. The first operation 71 includes at least one or more protruding members 711 for rotating. The first moving member 51. The make-: touch 711 is largely out of the work board 71a of the first work unit 71. This large 7U can protrude in the direction in which the first moving member 51 is positioned. When the field rotates several pieces 513 by the protruding element 711, the first moving element can rotate with the first contact element 512 away from the bottom plate 4. The piece 513 is out of the dog 70 pieces 711 is not formed in the operation When the portion 18 of the plate 71a is supported by 201018636, the first shifting, the ox 1 can be rotated in the direction in which the first contact member 512 contacts the third side C3 of the user tray c. The movement 4 51 can transmit the first elastic member 52 is elastically coupled to the bottom plate 4. The cow 52 is supported by the rotating member 513 when the rotating member 513 is engaged on the protruding member 711. The protruding member 711 is not formed on the working plate.

When the upper portion is a part, the first elastic member 52 is compressed. Thereby, the first moving member 51 can be rotated. Therefore, the first moving member 51 can move the user tray C such that the first side α of the user tray is cut on the first positioning member 2 by the elastic force of the first elastic tree %, thereby preventing the application to the user support The red stress is too large and the user tray C is damaged. 4 ' and can move on the bottom plate 4. The first interlocking operation second correction unit The second working unit 72 is connected to the bottom plate. The second working unit 72 is connectable to the first working unit 71. The second working unit 72 can be thinned under the contact wire 4. The second working unit 72 can include one of the guide block and the guide rail, and the bottom plate includes the first work in the guide block and the guide rail. The first work in the first line of the 72-fish is divided into 71 tc _ w φ The early 7G 71 moves the second moving element 61 interlocked with each other. ~ The second working unit 72 can move the element 6ι along the direction away from the second positioning element 3 (the opposite direction of the γ axis 19 201018636) & scale. - the positioning element 3 is exhausted by the object (10): two: = (1: pushes the second moving element - to remove the thrust applied to the second moving element 61 along the second side) The second moving element 61 of the shaft can be applied to the second moving element 61 by the second elastic element (4). The elastic element 62 is attached to the second generation of the teeth 79. Field_' and when this stress is removed, the 'second elastic element _ is stretched underneath. Thus, the second_element 61 can be sensed.

- Therefore, the second moving member 61 can move the user tray C such that the second side C2 of the user tray C is supported on the second positioning member 3 by the elastic force of the second elastic member 62, thereby preventing application to the user The stress on the tray c is too large to cause damage to the user tray C. "The first work unit 71 and the second work unit 72 may be integrally formed such that when the first work unit 71 moves with the movement of the rod 8a of the cylinder 8, the second work unit 72 can also move together However, the user tray C can be received on the bottom plate 4 at a corresponding distance from the second positioning member 3 and the first positioning member 2, respectively. 20 201018636 Here, in order to more effectively move the user tray c to When the first working unit 71 and the second working unit 72 move on the bottom plate 4, the first working unit 71 and the second working unit 72 can be separated from each other. When the first working unit 71 is on the bottom plate 4 The second working unit can operate the second correcting unit 6 when moving up. • The first working unit 71 can move the second working unit 72 by applying stress to the second working unit 72 when moving on the bottom plate 4, or The second working unit 72 is moved by removing the above stress. In particular, when the first working unit 71 moves in the direction in which the second working unit 72 is positioned, the first fresh unit 71 can push the second working unit 72. Move. When - when the work unit moves in the opposite direction in which the second work unit 72 is positioned, the second work material 72 can be moved by the second elastic member 62. When the second side C2 of the user tray C is supported by the second position Above the element 3, the movement of the second working unit 72 is stopped. The first working unit 71 will continue to move until the first side C1 of the user tray c is supported on the first positioning element 2, and therefore, the first The working unit 71 can continue to move after it is separated from the second working unit 72. That is to say, the 'the first working unit 71 can move the different distances. Therefore, the first moving element 51 and the first The two moving elements 6ι can move the user tray c by different distances, thereby efficiently moving the user tray c to an accurate position. 21 201018636 Therefore, although the good tray c is spaced apart from the first positioning element 2 and the second positioning element 3 by a different distance 'But when the user domain c is received on the bottom plate 4, the user tray position correcting device 1 can move the home tray c to the exact position. Further, although the size of the good tray c can follow the package wafer _ The change is in the ------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- - The description of the process flow in the case where the work unit 71 and the second work unit 72 are connected to the bottom plate 4 and can be separated from each other when moving on the bottom plate 4. 0 "5" is the user's reduced position correction device of the present invention. A state plan prior to correcting the position of the user tray. "Picture 6" shows the lower side of "Picture 5". Fig. 7 is a plan view showing the state after the user's position correction device of the present invention corrects the position of the user. "Figure 8" shows the side below "Figure 7." — μ(4) “5th®” and “6th” are shown as “when the first-working unit edge cutter is the second machine element 72 slave machine, $: when the rotation element is selected to the first-job sheet - The prominent outline is:: Element 512 is far away from the square called the tree, the first - elastic element - the working unit 7U_ two is the fresh element 72 along the second side of the thin side: - direction; 22 201018636 moving the second Moving element 61. At this time, the second elastic member 62 is compressed. In this state, the user tray c can be accommodated on the bottom plate 4 without being disturbed by the first moving member 51 and the second moving member 61. β refers to "Fig. 7" and "Fig. 8", in the opposite direction of the first working unit 72 when the user tray C is accommodated in the bottom state. When moving, the rotating member 513 is supported on a portion of the protruding member 711 that is not formed in the first working unit. Thereby, the first moving member 5i is rotated in the direction in which the first contact member 512 comes into contact with the third side surface ο of the user tray c. The scale, the first-to-hybrid element 52 is compressed under the side of the elastic force to return to its original form. Therefore, the user tray c is moved in the direction in which the first positioning member 2 is mounted by the pushing mechanism of the first contact member 512. When the cooperating tray c is supported on the first positioning member 2, the movement of the user tray c is stopped. The second working unit 72 removes the stress that has been applied to the second moving member 61 as the stress applied to the first working unit 71 is removed. The piece 61 is moved along the direction in which the second positioning element 3 is mounted, and the second contact element 612 will be pushed through the push_C4 to cause the user to slap the side of the face. Move in direction. This state. The first-missing 62 is forced to its initial shape. 23 201018636 When the user tray c is pushed over the positioning member 3 through the second contact member 6i2, the shifting of the user tray c is stopped. *First When the user tray C is supported on the second positioning unit, the movement of the second member 61 and the second working unit 72 will stop. Moreover, the first-working unit 71 will continue to move until the liver C is above the first positioning element 2, such that the first working unit 71 can be separated from each other. The first side surface C1, the second side surface C2, the third side surface C3, and the fourth side surface C4 of the user tray C are respectively threatened by the first payment piece 2, the second grain tree 3, and the first set to the first side. The position of the tray C can be corrected to be on the moving component 51 and the second moving component 61 of the picking and squatting system, so that the liver tray c is below the position A preferred embodiment of the test handler of the present invention including the above-described user tray position correcting device will be described in detail. Fig. 9 is a block diagram showing the structure of the test handler of the present invention. Referring to "i" to "figure 9", the test handler 10 of the present invention includes a chamber system η, a load stacker 12, a domain stacker 13, a loading unit 14, an unloading unit 15, and a buffer unit. 16. The chamber system 11 includes a first chamber m, a second chamber 112, and a third chamber 113. In the first chamber 111, the package wafer to be tested accommodated in the test tray τ will be cooled to the operating temperature, and the demand for the temperature will be compared. As heating or cooling occurs, the field τ will move forward within the first chamber ill by a fixed distance. After the package wafer is heated or cooled to the test temperature, the test tray Τ will be transferred from the first chamber to the second chamber 112. • In the second chamber 112, the package W in the test tray τ will be in contact with the socket on the high precision fixed plate 以 to accept the electric job. The high-precision fixed money system is connected to the second chamber 112. After all of the packaged wafers have been tested by the tester, the test/test tray τ will be transferred from the second chamber 112 to the third chamber (1). In the third chamber 113, the tested package wafer contained in the test tray 将 will be cooled or heated to normal temperature. As heating or cooling occurs, the test tray Τ will turn at the first 113 _ shift (four). After the __ = as usual, the occupational reduction τ will be transferred from the third chamber 113 to the light-unloading unit, the first chamber, the second chamber, and the third chamber, please be in the horizontal direction. . In the upper towel, the plurality of second chambers may be arranged in a vertical line. In other words, the second chambers 112 may be located above the other second! The first chamber m, the second chamber 112, and the third chamber 113 may also be sequentially arranged in a vertical direction - a wales ' wherein the second chamber 112 is located in the middle. Load the stacker 12 and secretly bribe the user tray c of the packaged wafer of Nashu. The user tray position correction device i is mounted in the stacking machine 12 of 25 201018636. ,,ΓΓΓΓ13 User tray. The user pallet position correction is also installed in the unloading stacker. The cushioning surface of her is _ (4) 移动 moves along the χ axis and the γ axis. And load the picker to install the crystal heart drop. This loading picker (4) contains a plurality of secret seals 2:::r:r_,_c ❹:=::, a - chamber 妓 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The seal of 151 〇 ^ depends on... 'The test results are sorted by grading on the test trays; This unloading element 15 contains an unloading picker 26 201018636 The unloading picker m is movable along the x-axis and the gamma-wise direction. And the unloading picker 151 can also be raised and lowered. The unloading picker (5) & includes a plurality of nozzles capable of picking up the packaged wafer. • The picker 151 can separate the tested packaged wafer from the test tray positioned in the unloading position • 15a and place the separated packaged wafer into the user tray c positioned in the unloading stacker 13 This is the so-called uninstall process. ❹ 35-load pickup 11 151 The package wafer after the classification (4) test can be placed in the user tray C positioned at different positions according to the test results. The test handler 10 can include a plurality of unloading pickers 151 such that the time spent in the unloading process can be reduced. The test tray that has been emptied due to the completion of the unloading process will be transferred from the unloading position ^ to the loading position 14a. • The buffer unit 16 can temporarily accommodate the packaged wafer. • The buffer unit 16 can be installed and the lining at least one of the training and unloading processes. If the buffer unit 16 is recorded by the silk register, the load pickup device can pick up the test from the positioning miscellaneous stack _2 _ household tray c The wafers of the wafers can be placed by the buffer unit 16 into the test trays positioned in the loading position. 27 201018636 If the buffer unit 16 is installed and the ship is unloaded, the unloading picker 1 曰 51 can separate the sealed wafer from the fixed recording area 15a and can be separated by the buffer unit 16 The tested packaged wafer is placed into a user tray C positioned in the unloading stacker 13. • The following 'will be described in detail in conjunction with another embodiment of the invention of the present invention. The test handler of the other embodiment of the present invention has a structure similar to that of the above-described test handler, and therefore, only the differences in the structure will be described below. Fig. 10 is a plan view showing a test handler according to another embodiment of the present invention. As shown in FIG. 9 and FIG. 1 , a test carrier ίο according to another embodiment of the present invention is provided with a solution element 17, which is not included in FIG. The test handler is in the middle. 〇 This switching unit 17 is used to test the package containing the packaged wafer to be tested.

The disk τ and the test tray T containing the tested package wafer are exchanged with the chamber system H*. If the test tray τ of the packaged wafer to be measured is transferred from the exchange unit η to the chamber system 11, the packaged crystalline test tray ' will be transferred from the chamber system η to the exchange Unit 17. In the parent change order π, the step of placing the packaged wafer to be tested into the test tray and the step of separating the tested wafer wafer from the job tray τ are performed. 28 201018636 Here will be 峨 ^ 峨 四 (four) τ points - part, secret test shun _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The switching unit / device can be installed in the position - 14 - unloading bit 0 m to install the remaining 14a and the unloading position 15a. This exchange unit 17 can also include a rotating unit 171. Rotating the early 7C 171 with a test tray containing the flip-flop package ❹ = one horizontal position is rotated to a vertical position. This test tray T is stored in an upright position during the period from the chamber to the system 11 feeding. The rotating unit m shoots the test minus T in the upright position of the ____ into the horizontal position. The test tray T was separated from the packaged day and day wafer after the test and the subsequent green wafer was placed in the needle. The present invention has been disclosed in the foregoing preferred embodiments, and the present invention is not intended to limit the invention, and the invention may be modified and shaded without departing from the spirit and scope of the invention. The scope of patent protection shall be in accordance with the provisions of this manual (4) _ define the scales. [Simplified description of the diagram] The front view of the machine is the stacking diagram of the test carrier to store a plurality of user trays; The position of the user's storage position is correct. 29 201018636 The third figure is the perspective view of the user's age setting correction and the user tray; the fourth picture is the perspective view of the lower side of the third figure; The user of the present invention asks her to set the state plan of the calibration equipment before the position of the school's Qiu household tray; Fig. 6 shows the lower side of the fifth figure; the seventh @ is the sub-subtraction correction of the positive liver tray position State plan view; Fig. 8 shows the lower side of Fig. 7; Fig. 9 shows the structure of the test handler of the present invention; and Fig. 10 is a plan view of the test handler of another embodiment of the present invention. Main component No. Description] User tray position correction device First positioning element Second positioning element Base plate First correction unit Second correction unit Working unit Cylinder 30 8 201018636 8a Rod 10 Test carrier 11 Chamber system 12 Loading stacker • 13 Unloading stack Machine • 14 Loading unit 15 Unloading unit 〇 16 Buffer unit 17 Exchange unit 41 Hole 42 Hole 51 First moving element 52 First elastic element 61 Second moving element β 62 Second elastic element. 71 First working unit. 72 Second Work unit 14a Loading position 15a Unloading position 71a Working plate 100 Stacking machine 31 101 201018636 102 103 104 111 • 112 瓤 113 〇 141 151 171 511 512 513 611 ® 612 711 • 101a 102a 511a 511b 511c Loading stacker unloading stacker buffer stack Machine transport unit first chamber second chamber third chamber loading picker unloading picker rotating unit first moving frame first contact element rotating element second moving frame second contact element protruding element position position first shaft end End 32 201018636

512a second shaft 513a third shaft 1011 loading stacking element 1012 loading plate 1021 unloading stacking element 1022 unloading plate A first positioning element B second positioning element C user tray H high precision positioning plate T test tray Cl first side C2 second Side C3 third side C4 fourth side 33

Claims (1)

201018636 X. Patent application scope: 1. A user tray position correction device, comprising: at least one first positioning component and at least one second positioning component, used to determine the position of a user tray; Receiving the user tray; the first correcting unit is configured to move the user tray along a direction in which the first positioning component is mounted; a first-right unit, the side is to be along the second positioning component The direction of movement of the device is moved; and a work unit is operated to operate the first correction unit and the second correction unit. The user tray position correcting device of claim 1, wherein the working unit is a first-working unit connected to the bottom plate, and a towel unit for operating the first correcting unit; and an "H-unit" connected to the bottom plate, and the second job single reading 'and the The first-job unit is operated by the second correction unit. 3. The user tray position correction device according to claim 2, wherein the first job ticket job sheet is separated from each other when moving on the bottom plate, and wherein 1 The y job unit operates the second correction-correction single-month long item 2 user tray position correction device while moving along the first-work unit, wherein the 34th 201018636 elementary system includes: at least one first-moving element, Attached to the bottom plate 'and at least one of the first moving elements can be rotated on the bottom plate: and the elastic member 7L of the plate, the first moving element is elastically coupled to the user tray position correcting device of the bottom member 4 , wherein the first mobile element is connected to the bottom plate 'and wherein the first moving contact element is connected to the end of the first moving frame, and: - moving the frame to move the user's disk, and depending on the rotating element, is attached to the other end of the first moving frame, and the == member can be on the other end of the first moving frame Rotating and contacting the first piece of the user tray position correcting device, wherein the first contact element is at the end of the moving frame, and wherein the first contact element is at the end of the first moving frame Rotate. The 7-element contains at least one protrusion ^ π and the middle-job sheet δ. If the first moving element is requested to be rotated. 'L user tray position correction device, wherein the second calibration sheet 35 201018636 contains Moving, and knowing - reading the direction of the direction of the fun installation" is moving along the second positioning direction _ household tray; and at least a second component of the mechanical women's clothing, used to elastically support the first a second mobile unit position correction device, wherein the second mobile unit includes: and - the second moving frame 'is elastically supported by the second elastic element; and at least one second contact element, system Projecting in the second moving frame, and wherein the at least one second contact element is for moving the user tray. 10. The user tray position correcting apparatus according to claim 8, wherein the second job ticket is interlocked with the first working unit__the second moving element. ® η. As requested! The user tray position correcting device, wherein the first correction unit reads the second correction unit in a mutually perpendicular direction to the machine tray. 12. The user tray position correcting device of item 1, wherein the working unit is coupled to the bottom plate, and wherein the working unit is movable on the bottom plate; and wherein the material corrects single reading the second correction Single listening operates according to the movement of the working unit. 13·—Testing the carrying machine, including: 36 201018636 The stacking machine “has a package containing Wei”, the user tray, which is in the user tray. Loading military unit to place the packaged wafer to be tested into a test tray Ο Ο : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : The test tray is arranged to carry the packaged wafer after the processing; the unloading stack is subjected to grading, and the packaged wafer having the test in the Wei-Hung household domain is included; and the user tray user tray position correction device is divided into points. The unloading stack surface t, if installed in the money stacker and the user domain position correcting device, includes: at least one first positioning component and at least one second determining The position of the user tray; the afternoon is used for a bottom plate for receiving the user tray; the first positive is used to move the user tray along the direction in which the first piece is mounted; 疋 position 7L -第- The correction unit is configured to move the user tray in a direction in which the second piece is mounted, and a position 7L a work unit is configured to operate the first correction unit and the second correction sheet 37 18. The picking machine of claim 14, wherein the working unit comprises: a working unit connected to the bottom plate, and wherein the first working unit is configured to operate the first a correction unit; and a first operation unit connected to the bottom plate, and wherein the second job is read early, and the scale-dancing element is referred to as the second correction unit. The test transporter of item 14, wherein the first working unit and the second one are separated from each other on the axis of the miscellaneous board, and the second operation of the second operation is performed by the second The working unit axis domain is the Na 2 correction unit. 6. The test handler of claim 13, wherein the first correcting unit comprises: at least one first moving element, a connecting surface bottom plate, and wherein at least one of the first moving elements is rotatable on the bottom plate And the ballistic member k is configured to elastically connect the first moving member to the bottom of the test carrier as described in Item 4, wherein the second correcting monofilament comprises: Household tray; "The second component of the fine green is installed." At least ~ a second elastic element, _ «elastic branch # the second mobile element 17 said to leave the job, shoot the second for the fresh line and the 38th 201018636 'F罘 early 卩颂立卩颂% move The second shifting one 19. The test transporter according to claim 13, wherein the correcting unit moves in the direction of the mutual butterfly, and the second unit is used as the second unit. The material board, and its + miscellaneous (four) financial butterfly (four) H - child private 4 彳 A positive unit no two correction unit miscellaneous according to the movement of the operation sheet 兀 *. 39