TWI791270B - Correction apparatus, correction method, and handler using the same - Google Patents

Abstract

The present invention reveals a correction apparatus for correcting positions of plural operators, including a base, a first position corrector, and a second position corrector. The base is arranged fixedly with a detection area defined thereabove. The first position corrector is disposed on a first detection position of the base, picturing along a first direction toward the operator located on the detection area to determine the position of the operator under a second direction. The second position corrector is disposed on a second detection position of the base, picturing along the second direction toward the operator located on the detection area to determine the position of the operator under the first direction. Therefore, positions and deviations of the operators are obtained, and compensations for actual position fitting can be processed precisely.

Description

Calibration device, calibration method and operating machine for its application

The present invention relates to a calibration device and a calibration method for detecting the positions of a plurality of operating devices in multiple directions by means of imaging, which is beneficial for compensating and correcting the actual operating positions of the plurality of operating devices and improving the accuracy of the operation.

Nowadays, the operating machine uses an operating device (such as a material transfer device or a printer, etc.) of an operating mechanism (such as a material transfer mechanism or a printing mechanism, etc.) etc.) Execute preset operations on electronic components (such as pick-and-place operations or print operations, etc.). Take the operating mechanism of the material shifting mechanism as an example. The material moving mechanism has a plurality of material shifters, and moves to the preset operating position to perform the pick-and-place operation of a plurality of electronic components. Since the electronic components are becoming more and more sophisticated, therefore, For multiple material shifters to simultaneously move multiple electronic components into the multiple accommodating slots of the carrier, the accuracy of the operation position is quite high; however, the material transfer mechanism is used to replace a batch of multiple material shifters and multiple material shifters. Due to factors such as differences in pick-and-place accuracy or collision of the material shifter, the working position of the material shifter is likely to be abnormal; Insufficient assembly height leads to abnormal working position of pick-and-place materials; the above-mentioned abnormal conditions make the material shifter unable to accurately pick and place electronic components, and the industry must check and correct the accuracy of the working positions of multiple material shifters in the material shifting mechanism .

The first object of the present invention is to provide a calibration device for correcting the positions of a plurality of operating devices. The calibration device includes a support, a first position corrector and a second position corrector. The support is fixed and configured on the top. In the detection area, the first position corrector is installed at the first detection position of the support for lateral imaging of the operating device in the detection area in the first direction, and the detection of the operating device in the second direction Position, the second position corrector is assembled at the second detection position of the support, for taking lateral images of the operating device located in the detection area in the second direction, and detecting the position of the operating device in the first direction; In order to obtain the position deviation value of a plurality of operating devices, it is beneficial to compensate and correct the actual operating positions of a plurality of operating devices, thereby improving the operating accuracy.

The second object of the present invention is to provide a calibration device, which further includes at least one height calibrator. The height calibrator detects the position (working height position) of the operating device located in the detection area of the support in the third direction, so as to obtain the height position The deviation value is beneficial to compensate and correct the actual working height positions of multiple working devices, thereby improving the working accuracy.

The third object of the present invention is to provide a calibration device, which further includes a first adjuster and a second adjuster. The position corrector, the first adjuster and the second adjuster respectively adjust the assembly positions of the first position corrector and the second position corrector according to the operation requirements, thereby improving the accuracy of the calibration operation.

The fourth object of the present invention is to provide a calibration method for correcting the positions of a plurality of operators, including the first transfer operator program, the first detection program, the second detection program and the comparison program; the first transfer The operator program is to move a plurality of operators to the detection area above the bearing and move the preset distance value along the first direction; the first detection program uses the first position corrector to move toward the first detection position of the bearing The position of a plurality of operating devices in the second direction is detected by imaging in one direction; the second detection program uses the second position corrector to perform image detection in the second direction at the second detection position of the support multiple operators in the first The position in the direction; the comparison program uses the processor to receive the position data of multiple operators transmitted by the first detection program and the second detection program, so as to analyze the positions of multiple operators in the first direction and the second direction, To obtain the position deviation value of multiple operating devices, and compensate and correct the actual operating positions of multiple operating devices, thereby improving the operating accuracy.

The fifth object of the present invention is to provide a calibration method, which further includes a pre-program. The pre-program presets the center position of an operator located in the detection area as the calibration initial position, so that other operators can use the calibration initial position as a reference Shift preset spacing value.

The sixth object of the present invention is to provide a calibration method, which further includes a second transfer operation device program and a third detection program, the second transfer operation device program is used to transfer a plurality of operation devices along the detection area of the bearing The preset height value is displaced in three directions; the third detection program uses the height corrector to detect the position of multiple operators in the third direction; the comparison program uses the processor to receive the position data of multiple operators transmitted by the third detection program , so as to obtain the height position deviation value of a plurality of operators, and compensate and correct the actual height and working position of the operators, thereby improving the operation accuracy.

The seventh object of the present invention is to provide an operating machine, which includes a machine platform, at least one operating device, a calibration device of the present invention, and a central control device. Mechanism, at least one holder is used to support a plurality of electronic components, and the operating mechanism is provided with a plurality of operating devices for performing preset operations on a plurality of electronic components; The position of the operating device; the central control device controls and integrates the actions of each device to perform automated operations and achieve the practical benefit of improving operating efficiency.

10: machine

20: Operating device

21: Feeder

22: Receiver

23: The first material transfer mechanism

231: mobile arm

232: Variable pitch unit

2331: The first shifter

2332: Second shifter

2333: The third shifter

2334: The fourth shifter

2341: First Lifter

2342:Second lifter

2343: Third lifter

2344: Fourth lifter

24: Tester

25: The first platform

26: crimping device

27: The second platform

28: The second material transfer mechanism

29: Testing Room

30: Calibration device

31: bearing

311: through hole

32: First position corrector

321: The first light source

L1: the first detection axis

33: Second position corrector

331: second light source

L2: The second detection axis

341: first adjuster

342: second adjuster

35: Altitude corrector

36: The third adjuster

Fig. 1: Configuration diagram of the working machine of the present invention.

Figure 2: A schematic diagram of the material transfer mechanism of the present invention.

Figure 3: A top view of the calibration device of the present invention.

Figure 4: Side view of the calibration device of the present invention.

Fig. 5: Flowchart of the calibration method of the present invention.

Figure 6: Schematic diagram of the corrected initial position of the material shifter in the detection area.

Fig. 7: A schematic diagram of correcting the position of the material shifter in the first direction.

Fig. 8: A schematic diagram of correcting the position of the material shifter in the second direction.

Figure 9: Schematic diagram of correcting the position of the material shifter in the third direction.

In order to make your examiners have a better understanding of the present invention, hereby cite a preferred embodiment and cooperate with the drawings, and the details are as follows: Please refer to Figures 1 to 4, the operating machine of the present invention includes a machine platform 10 and at least one operating device 20. At least one calibration device 30 of the present invention and a central control device (not shown). At least one working device 20 is arranged on the machine platform 10, and is provided with at least one holder and at least one working mechanism, at least one holder is used to hold a plurality of electronic components, at least one working mechanism is provided with a plurality of working devices, It is used to perform preset operations on a plurality of electronic components; the calibration device 30 of the present invention is arranged on the machine platform 10, and is used to correct the positions of multiple operators of the operating mechanism in multiple directions; the central control device is used to control and integrate various devices Actions to execute automated jobs. According to the operation requirements, the holder of the operation device 20 can be a feeder, a receiver, a carrier, a tester or a pre-heating tray, etc., to hold a plurality of electronic components; the operation mechanism of the operation device 20 can be a material transfer Mechanism, crimping mechanism or printing mechanism, etc., the operating device can be a material transfer device, crimping device or printer, etc., and is not limited to this embodiment.

In order to clearly illustrate this case, the first direction or the second direction referred to in this case may be the X direction or the Y direction, the first direction described in the embodiment of this case is the X direction, the second direction is the Y direction, and the third direction is the Z direction ; The direction of the detection axis is the same as the moving direction of the operating device.

In this embodiment, the operating device 20 includes a feeder 21, a material receiver 22, an operating mechanism that is a first material transfer mechanism 23, a tester 24, a first carrier 25, a crimping device 26, and a second carrier 27 and the other are the operating mechanism of the second material transfer mechanism 28, a temperature control mechanism (not shown) and a test chamber 29. The feeder 21 is for containing a plurality of electronic components to be tested; the material receiver 22 is for containing a plurality of electronic components that have been tested; the design of the first material transfer mechanism 23 and the second material transfer mechanism 28 is the same. Take the material transfer mechanism 23 as an example. The first material transfer mechanism 23 is equipped with a moving arm 231, a distance-changing unit 232 and a plurality of operating devices that are material shifters. Displacement and displacement in the Z direction of the larger stroke, a plurality of shifters include the first shifter 2331, the second shifter 2332, the third shifter 2333 and the fourth shifter 2334, and the second shifter with a fixed configuration The second material shifter 2332 is used as the reference for distance change. The first material shifter 2331, the third material shifter 2333 and the fourth material shifter 2334 are connected to the distance change unit 232. According to the operation requirements, the distance change unit 232 drives the first material shifter. 2331, the third material shifter 2333 and the fourth material shifter 2334 are based on the second material shifter 2332 for the X-direction displacement preset spacing value to change the spacing; and the first material shifter 2331, the second material shifter 2332 , the third lifter 2333 and the fourth lifter 2334 are respectively connected to the first lifter 2341, the second lifter 2342, the third lifter 2343 and the fourth lifter 2344 for displacement in the Z direction to a preset height The electronic components are picked and placed at the operating position; therefore, the first material transfer mechanism 23 drives the first material transfer device 2331, the second material transfer device 2332, the third material transfer device 2333 and the fourth material transfer device 2334 with the moving arm 231 to supply The feeder 21 takes out a plurality of electronic components to be tested.

The tester 24 includes an electrically connected circuit board and a test socket with probes for testing electronic components. The first stage 25 is used for carrying the electronic components to be tested for at least one direction of displacement. The table 25 can carry the electronic components to be tested to the side of the tester 24. For example, the first carrier 25 can carry the electronic components to be tested to the bottom of the tester 24; in this embodiment, the first carrier 25 is used for the second The first material transfer device 2331, the second material transfer device 2332, the third material transfer device 2333 and the fourth material transfer device 2334 of a material transfer mechanism 23 move into a plurality of electronic components to be tested, and move the plurality of electronic components to be tested. Loaded to the side of the tester 24; the crimping device 26 takes out a plurality of electronic components to be tested on the first stage 25, and transfers and presses down a plurality of electronic components to be tested in the tester 24 to perform the test operation, the test room The 29 cover is placed outside the tester 24. During the cold test operation, the dry air is delivered to the test chamber 29 by a fluid delivery pipe (not shown), and the temperature control mechanism (not shown) is provided on the crimping device 26. The temperature control is used to control the temperature of the electronic components, so that the electronic components can perform the test operation under the simulated ambient temperature in the future; after the test is completed, the crimping device 26 transfers a plurality of tested electronic components from the tester 24 to the second Carrier 27; the second carrier 27 carries a plurality of electronic components that have been tested, and the second material transfer mechanism 28 takes out a plurality of electronic components that have been tested on the second carrier 27, and according to the test results, the plurality of tested electronic components The electronic components are transported to the receiver 22 and sorted and stored; the central control device (not shown in the figure) is used to control and integrate the actions of each device to perform automated operations, thereby improving operating efficiency.

However, the operating device 20 can only be equipped with the first material transfer mechanism 23 according to the operation requirements, and the electronic components to be tested and the electronic components to be tested can be transferred to the feeder 21 and the material receiver 22 with the first material transfer mechanism 23, and there is no No. The operation device 20 can only be equipped with the first carrier 25 according to the operation requirements, and it is also possible to use the first carrier 25 to carry the electronic components to be tested and the electronic components to be tested. The operating device 20 can be moved in one direction or multiple directions according to the operation requirements. For example, the crimping device 26 can be operated with a material transfer mechanism. The material transfer mechanism moves the electronic components to be tested into the tester 24, and the crimping device 26 It is also okay to perform a single-directional displacement and only perform a pressing action. The operating device 20 can be equipped with a blower in the test room 29 according to the operation requirements, so as to blow hot air to heat up the temperature of the test room 29 during the thermal measurement operation. The operating device 20 is equipped with a pre-heating tray according to the operating requirements for pre-heating the electronic components to be tested.

The calibration device 30 is used for calibrating the positions of a plurality of working tools of the operating mechanism in multiple directions; the calibration device 30 includes a bearing 31 , a first position corrector 32 and a second position corrector 33 .

The supporting device 31 is a fixed configuration, and constitutes a detection area above; further, the supporting device 31 can be a seat body, a board body or a machine platform; in this embodiment, the supporting device 31 is a board body, and its top surface is Plane, and form a detection area above; In addition, at least one through hole 311 is opened in the bearing 31, the through hole 311 runs through from the bottom surface of the bearing 31 to the top surface, and communicates with the detection area.

The first position corrector 32 is installed at the first detection position of the support 31 along the first detection axis L1, so as to take a lateral image of the operating device located in the detection area in the first direction, and the detection of the operating device is in the detection area. The position in the second direction; further, the first position corrector 32 is equipped with at least one first light source, and the first light source projects a light beam toward the working device. In this embodiment, the first position corrector 32 is a CCD, and is assembled at the first detection position on the first side of the support 31 along the first detection axis L1, and the center position of the first position corrector 32 is aligned with the support. The center position of 31; the first position corrector 32 is equipped with a first light source 321 at the image-taking end, and the first light source 321 is used for projecting light beams toward the first direction, and the first position corrector 32 performs lateral imaging operations toward the first direction device.

The second position corrector 33 is installed at the second detection position of the support 31 along the second detection axis L2, so as to take a lateral image of the operation device in the detection area in the second direction, and the detection operation device is in the detection area. The position in the first direction; further, the second position corrector 33 is equipped with at least one second light source, and the second light source projects a light beam toward the working device. In this embodiment, the second position corrector 33 is a CCD, and is installed at the second detection position on the second side of the bearing 31 along the second detection axis L2, the second side is adjacent to the first side, and the second position correction The center position of the device 33 is aligned with the center position of the bearing 31; the second position corrector 33 is equipped with a second light source 331 at the image-taking end, and the second light source 331 is used for projecting light beams in a second direction, and the second position corrector 33 is directed toward The second-direction imaging operator.

The correction device 30 further includes a first adjuster 341 and a second adjuster 342, the first adjuster 341 and the second adjuster 342 are assembled on the support 31, and respectively hold the first position corrector 32 and the second position corrector The device 33, the first adjuster 341 and the second adjuster 342 respectively adjust the assembly position (such as the assembly height position) of the first position corrector 32 and the second position corrector 33 according to the operation requirements, so as to improve the accuracy of the calibration operation. In this embodiment, the first adjuster 341 is assembled on the first side of the support 31 for mounting and adjusting the assembly position and height of the first position corrector 32; the second adjuster 342 is assembled on the second side of the support 31. The two sides are used for mounting and adjusting the assembly position and height of the second position corrector 33 .

The calibration device 30 further includes at least one height corrector 35, the height corrector 35 detects the position of the operator located in the detection area of the support 31 in the third direction; the height corrector 35 can be used for contact or non-contact detection The position of the operating device in the third direction, for example, the height corrector 35 is a reflective sensor, and it is installed under the through hole 311 of the support 31, so as to detect the position of the operating device in the third direction in a non-contact manner; for example The height corrector 35 is a conductive sensor, and is assembled on the top surface of the support 31, and is used as a contact type to detect the position of the operator in the third direction; in this embodiment, the height corrector 35 is a reflective sensor The device is arranged under the through hole 311 of the support 31. The height corrector 35 can project a light beam from bottom to top toward the detection area through the through hole 311 and receive the reflected light beam.

The calibration device 30 further includes at least one third adjuster 36 for mounting and adjusting the assembly position and height of the height corrector 35 .

In view of the above, the support 31 can be provided with a groove on the top surface, and the first position corrector 32 and the second position corrector 33 are respectively installed on the first side and the second side of the groove, and it is not impossible; further, A through hole 311 is provided on the bottom surface of the groove for the height corrector 35 to detect the position of the operating tool in the third direction (working height position).

Please refer to Figures 2, 5-9, the calibration method of the present invention includes a first transfer operator program, a first detection program, a second detection program and a comparison program. The first transfer operation program is to transfer a plurality of operation devices to the detection area above the carrier 31 and move the preset distance value along the first direction; the first detection program is to use the first position corrector 32 on the carrier 31 The first detection position faces the first direction to perform side-viewing detection of the position of the operator in the second direction; the second detection procedure uses the second position corrector 33 at the second detection position of the support 31 toward the The second direction is used to detect the position of the operator in the first direction by sideways imaging; the comparison program uses the processor to receive a plurality of operator position data transmitted by the first detection program and the second detection program to analyze The positions of the plurality of operating devices in the first direction and the second direction are obtained to obtain the position deviation values of the plurality of operating devices, and the actual operating positions of the plurality of operating devices are compensated.

The calibration method of the present invention further includes a second transfer operator program and a third detection program, the second transfer operator program is located before the comparison program, and transfers a plurality of operators to the detection area above the carrier 31 Displace the preset height value along the third direction; continue with the third detection program and use the height corrector 35 to detect the position of the operator in the third direction, and compare the process with the processor receiving the multiple operators transmitted by the third detection program Position data to obtain the height position deviation value of a plurality of operators, and compensate and correct the actual height and working position of the operators. However, according to the operation requirements and the type of the position corrector, the first transfer operator program further includes the first micro-movement means, and the first micro-motion means uses the operator to make a micro-motion displacement along the first direction for detection by the second detection program The position of the operator after inching and the position data after the inching are analyzed by the comparison program, and the position deviation value of the operator in the first direction can also be obtained; the second transfer operator program also includes the second inching means, the second The micro-movement method uses the operator to make a micro-displacement along the third direction for the third detection program to detect the position of the operator after the micro-motion, and for the comparison program to analyze the position data after the micro-motion, and can also obtain the operator in the third party. Upward height position deviation value.

The calibration method further includes a pre-program. The pre-program is located before the first transfer operator program, and the center position of an operator located in the detection area is preset as the calibration initial position for other operators to calibrate the initial position as The reference is displaced by the preset spacing value; for example, the fixed operator or the first operator is used as a preset operator, and the initial position of the correction can be the same as or different from the center position of the bearing 31; for example, a preset operator It is a fixed operating device, since the distance from the origin to the center of the support 31 is known, and the diameter of the operating device is known, the preset fixed operating device can be moved from the origin to the center of the support 31, so that the fixed The center position of the alignment support 31 of the center position of the type operation tool can be used as the initial position of the calibration for the center position of the fixed type operation tool (that is, the center of the support tool 31), so that other operators can use the center position of the fixed type operation tool (that is, the center of the bearing 31) is used as a reference to displace the preset distance value.

Please refer to Fig. 2, 6, in this embodiment, detect the actual operation position of the first material shifter 2331, the second material shifter 2332, the third material shifter 2333 and the fourth material shifter 2334; The distance between the center of the support 31 is known, and the diameter of each material shifter is known. The pre-program uses the fixed second material shifter 2332 as the default standard material shifter, and the second material shifter 2332 is moved by The origin moves to the center position of the support 31 and is located in the detection area, so that the center of the second material shifter 2332 is aligned with the center position of the support 31, and the processor analyzes and judges the center position of the second material shifter 2332 ( That is, the center position of the support 31) is used as the calibration initial position, and the first material shifter 2331, the third material shifter 2333 and the fourth material shifter 2334 are displaced by a preset distance based on the calibration initial position.

Please refer to Figures 2 and 7, taking the detection of the position of the first material shifter 2331 in the second direction (Y direction) as an example, the first transfer operator program uses the moving arm 231 to drive the first material shifter 2331 on the carrier The detection area above the tool 31 is displaced along the first direction (X direction) by a preset distance value. Since the first material shifter 2331 has been displaced downward in the Z direction, the first material shifter 2331 is located at the first position corrector 32 and the imaging range of the second position corrector 33, the first detection program uses the first position corrector 32 at the first detection position of the support 31 to The first direction to take the image of the first material shifter 2331, that is, the first position corrector 32 can take an image from the side of the first material shifter 2331, and obtain the first displacement with the distance between the two edges of the first material shifter 2331. Take the image data in the Y direction of the feeder, and transmit the image data in the Y direction of the first material shifter to the processor (not shown in the figure). Since the center position of the first position corrector 32 is located at the center position of the support 31, The processor of the comparison program receives the Y-direction imaging data of the first material shifter transmitted by the first detection program, and can compare the center position of the first position corrector 32 with the center position of the Y-direction imaging data of the first material shifter Perform comparative analysis to determine whether the Y-coordinate position of the first material shifter 2331 in the second direction (Y direction) is correct. If the processor analyzes that the Y-coordinate position of the first material shifter 2331 is abnormal, and it is an inclined configuration, The processor can obtain the Y-direction deviation value of the first material shifter 2331 through calculation, so as to compensate and correct the actual working position of the first material shifter 2331; therefore, the third material shifter 2333 and The position (Y coordinate value) of the fourth material shifter 2334 in the second direction (Y direction).

Please refer to FIGS. 2 and 8 , the detection of the position of the first material shifter 2331 in the first direction (X direction) is taken as an example, since the first material shifter 2331 is located at the first position corrector 32 and the second position corrector 33 In the second detection program, the second position corrector 33 is used to capture the image of the first material shifter 2331 at the second detection position of the carrier 31 in the second direction, that is, the second position corrector 33 can be controlled by the second position corrector 33 Take an image from the other side of a material shifter 2331, and obtain the X-direction imaging data of the first material shifter 2331 with the distance from the other two edges of the first material shifter 2331, and take the X-direction image of the first material shifter The data is transmitted to the processor (not shown in the figure). Since the center position of the second position corrector 33 is aligned with the center position of the holder 31, the processor of the comparison program receives the first material shifter transmitted by the second detection program. The X-direction imaging data can compare and analyze the center position of the second position corrector 33 and the center position of the X-direction imaging data of the first material shifter to determine whether the first material shifter 2331 is in the first direction (X Whether the X coordinate position on the direction) is correct, if the processor analyzes that the X coordinate position of the first material shifter 2331 is abnormal, and it is an inclined configuration, the processor can obtain the X direction of the first material shifter 2331 through calculation In order to compensate and correct the actual working position of the first material shifter 2331; therefore, with the above method, the third material shifter 2333 and the fourth material shifter 2334 can be sequentially obtained in the first direction (X direction) The upper position (X coordinate value).

Therefore, after obtaining the X-Y position deviation values of the first material shifter 2331, the third material shifter 2333, and the fourth material shifter 2334, and using the second material shifter 2332 as a benchmark, respectively adjust and compensate the first material shifter The actual working positions of the device 2331, the third material transfer device 2333 and the fourth material transfer device 2334.

Please refer to Fig. 9, to correct the position of the material shifter in the third direction (Z direction), take the actual height operation position of the first material shifter 2331 as an example, the second transfer operator program uses the moving arm 231 to drive the first A material shifter 2331 is displaced to the detection area of the support 31 and is located above the through hole 311, and the first lifter 2341 drives the first material shifter 2331 to move downwards along the third direction (Z direction) by a preset value. Height value; because the height corrector 35 is a reflective sensor, and is located below the through hole 311 of the bearing 31, and projects a light beam toward the through hole 311; 2331 is used as a non-contact projection beam, and receives the beam reflected by the first material shifter 2331, and transmits a signal to the processor; the comparison program uses the processor to analyze the reflection distance value of the beam received by the height corrector 35, and judge Whether the height position of the first material shifter 2331 in the third direction (Z direction) is correct, and obtain the height position deviation value of the first material shifter 2331 in the third direction to compensate and correct the actual situation of the first material shifter 2331 Height operation position; therefore, with the above method, the height position deviation value of the second material shifter 2332, the third material shifter 2333 and the fourth material shifter 2334 in the third direction (Z direction) can be obtained in sequence, and Compensation corrects the actual height of the operating position, thereby improving the accuracy of the operation.

231: mobile arm

2331: The first shifter

2332: Second shifter

31: bearing

32: First position corrector

33: Second position corrector

Claims (14)

A calibration device for calibrating the positions of a plurality of operating devices, the calibration device includes: a bearing: a fixed configuration, and forms a detection area on the top; a first position corrector: assembled on the first detection axis The first detection position of the support, the first position corrector is at the first detection position for lateral imaging in the first direction to detect the position of the operating tool in the detection area in the second direction ; Second position corrector: assembled at the second detection position of the bearing along the second detection axis, the second position corrector is at the second detection position for lateral imaging in the second direction Detecting the position of the operating device located in the detection area in the first direction. The calibrating device as described in claim 1 further includes at least one height calibrator for detecting the position of the working tool in the third direction. As the calibration device described in claim 2, the support is provided with at least one through hole, the through hole communicates with the detection area, and the height calibrator is disposed below the through hole. The calibration device as described in Claim 2 further includes at least one third adjuster for adjusting the assembly height and position of the height corrector. The correction device as described in Claim 1, wherein the first position corrector is a CCD, further comprising a first light source, the first light source projects a light beam towards the first direction, and the second position corrector is a CCD, further comprising a second position corrector Two light sources, the second light source projects light beams towards the second direction. The calibration device as described in any one of claims 1 to 5, further comprising a first adjuster and a second adjuster, the first adjuster is used for mounting and adjusting the first position corrector, and the second adjuster For mounting and adjusting the second position corrector. A calibration method for calibrating the positions of a plurality of operating devices in the first direction and the second direction, the calibration method comprising: the first procedure for transferring the operating devices: to transfer the plurality of operating devices above the carrier The detection area is displaced along the first direction by a preset distance value; the first detection procedure: use the first position corrector at the first detection position of the bearing to take a lateral image in the first direction and locate at the detection position The operating device in the area, and detect the position of the operating device in the second direction; the second detection procedure: use the second position corrector to face the second direction at the second detection position of the support Take an image of the operator located in the detection area, and detect the position of the operator in the first direction; comparison program: use the processor to receive the transmission of the first detection program and the second detection program The position data of the plurality of operating devices is used to analyze the positions of the plurality of operating devices in the first direction and the second direction, obtain the position deviation value of the plurality of operating devices, and compensate and correct the plurality of operating devices the actual working position. The correction method as described in claim 7 further includes a pre-program, which is located before the first transfer operator program, and a center position of the operator located in the detection area is preset as the initial calibration The position is used for the other workers to move the preset spacing value based on the corrected initial position. As in the correction method described in claim 8, the first transfer operator program further includes a first micro-movement means, and the first micro-motion means uses the operator to make a micro-motion displacement along the first direction for the second inspection The knowing program detects the position of the operating device after inching, and the comparison program analyzes the position data after inching to obtain the position deviation value of the operating device in the first direction. The correction method described in any one of claims 7 to 9 further includes a second transfer operator program and a third detection program, the second transfer operator program is located before the comparison program, the second The program of moving the operating device is used to transfer a plurality of the operating devices in the detection area of the carrier to the preset height value along the third direction, and the third detection program detects the position of the operating device in the first For the position in three directions, the comparison program uses the processor to receive the position data of the working device transmitted by the third detection program, so as to obtain the height position deviation value of the working device, and compensate and correct the actual working position of the working device. In the correction method described in claim 10, the second transfer operator program further includes a second micro-movement means, and the second micro-motion means uses the operator to make a micro-motion displacement along the third direction for the third The detection program detects the position of the operating device after inching, and provides the comparison program to analyze the position data after inching, so as to obtain the height position deviation value of the operating device in the third direction. An operating machine, comprising: a machine platform; at least one operating device: configured on the machine platform, and provided with at least one holder and at least one operating mechanism, the at least one holder is used to hold a plurality of electronic components, the At least one operating mechanism is provided with a plurality of operating devices for performing preset operations on the plurality of electronic components; at least one calibration device as described in claim 1: installed on the machine table for calibrating the plurality of operating devices Positions in the first direction and the second direction; central control device: to control and integrate the actions of various devices to perform automated operations. In the working machine as described in claim 12, the working device further includes a temperature control mechanism, and the temperature control mechanism is provided with at least one temperature control on the working machine. In the operating machine as described in claim 12, the operating device further includes a test chamber, and the test chamber cover is placed outside the tester.

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