TWI363734B - An apparatus for correcting position of a user tray and a test handler - Google Patents

Description

1363734 IX. Description of the Invention: [Technical Field] The present invention relates to a test handler for supplying a sheet for a relocation machine to a test machine and for testing the sealed wafer by grading, and the village can attack [previous technique]分类Classification test The carrier can be used to electrically test, test, and unload the test package wafer at the end of the packaging process. The package handler uses the test tray to perform the loading process. The test destroys the complex Weirong unit Μ accommodating the package. The test Rim 峨 尔 ( 四 (4) axis borrowing = cry rm loading (four). The pick-up machine uses a plurality of pick-up packages ^. Take (four), · purely contains a plurality of nozzles for thinning as (4) to the test machine. The test process, the test machine comprises a high-precision with a plurality of sockets ===off-range _ _ _ _ _ in the package two:: the aircraft also contains a plurality of airtight chambers, so that the test machine can be, Or a low 4 extreme environment is a packaged wafer for electrical testing. The test handler transfers the tested package wafer from the test tray to the user tray 6 called 734. This process is called, unloading process ". The packaged wafers will be graded according to the test results, and the handling opportunity will route the graded packaged wafers from the test tray to the corresponding customer city based on the graded level. The measuring machine performs the unloading process by using a plurality of picker systems. ... : The position of the job transfer contains the Wei _ deposit and subtraction side of the general load process and the unloading system. - The stacking machine of the user tray in the process. Clothing "Different 1" shows a stacking machine for one tray. And "the state of the back. The number of stored in the test handler is stored in the second figure". The position of the user tray is indicated by the school and the monthly reference. Figure 1 "Do not stacker 1" can store the plural The user trays c include the load stacker, the unload stacker 1, the buffer stacker, and the transfer unit 104. The main frame of the relocation of the company can be installed with a plurality of loading machines 101' and loading the stacking machine 1〇1 & including the floating stacking component 1(10)-plate 1012. - 1 Read stack $7° piece 1011 towel ageable household size minus C, the user tray C contains the packaged wafer to be tested. The carrier board 1G12 supports the household tray at the execution of the loading process, and loads 12 fine (four) ascending and descending methods. The main frame 1363734 of the four-dimensional speeding machine and the main frame of the measuring and transporting machine can also be loaded with a plurality of The stacker (1) 2 is unloaded, and a plurality of user trays of the packaged wafers after the 谷K, 歧K can be stored in different locations according to the test results. Loading and unloading stacker ι〇2 contains shouting 4 component coffee and unloading board view. The unloading stack should read 1G21 towel to store a plurality of copper enamel trays C, and the user tray _. • (4) The plate 1G22 supports the liver tray C at the place where the unloading process is performed, and the unloading plate K) 22 is fine (4) in the main frame of the shovel. A plurality of empty user trays C can be stored in the buffer stacker 103. The transport unit 104 is capable of holding the user tray C, and the transport unit is movably mounted in the main frame of the test handler. The transfer is done in the meta-frame. And the transmission unit 104 can also rise and fall. : In the stacker (10), the user domain C is transmitted as follows. .='Transmission unit is the user tray of the _ piece tested. The load stacking component 1011 is transferred to the loading plate 1〇12. Then, the user tray C from the 10__revolutionary component is lifted to the position thank a 'in this position the picker system (not shown) can pick up the package to be tested in the user tray c 8 1363734 Wafer. - Next, when the user tray C becomes empty due to the completion of the loading process, the transfer wheel is full to transfer the user tray C from the loading plate 1G12 to the buffer stacker plate 1022. -] Next, the transport unit 104 transfers the empty user tray C from the buffer stacker 103 or the loading board 1012 to the unloading board 1022. Next, the unloading board will send the liver extinguishing C from the buffer transfer ιω or the loading plate to the recruitment record a. At this position, the picking system (not shown) can place the tested wafers on the user to the user. In the tray c. Next, when the user tray C accommodates the tested package wafer due to the completion of the unloading process, the transfer unit transfers the user tray C containing the tested package wafer from the unloading plate 1022 to the unloading stacking member 1〇21 . The test handler can quickly sort the packaged wafers by grading by performing the above steps quickly. Βθ Please refer to “i-figure” and “figure 2”. The stacking tilt (10) will always position the loading plate 1G12 and the unloading leg _ household tray c so that the pick-up system (shooting unprofitable) can The loading process and the unloading system are stably performed. Therefore, the stacking machine 100 needs to include a device (not shown) that corrects the position of the user tray, which is capable of moving the user tray C to the carrier board and unloading The exact position of the board 1022. 9 363734 This user's towed position correction device can move the user in the red axis direction and the y-axis direction, so that the user tray c and the first positioning element "and the second positioning element B are in contact with each other, and the user is The tray c is positioned to the exact position. However, the 'study_house reduction position correction device age includes the first-for-six element for moving along the direction of the direction_user C to move the user along the x-axis direction. The first-job sheet S of c, thereby 'making its structure complicated and increasing the manufacturing cost 0 ·' and the above problem becomes more apparent due to the installation of a plurality of user tray position correcting devices. [Invention] In view of the above problems, SUMMARY OF THE INVENTION It is an object of the present invention to provide a user position correction device and a test handler which is simple in structure and capable of moving a user tray to an accurate position. The present invention is not robust to the technical purpose of the company (4). The present invention, which is not described herein, can be clearly understood from the following detailed description. The present invention provides a user tray position correcting device. The user tray position correcting device comprises: at least one first positioning component and at least one second positioning component 'determined to determine the position of the user tray; the bottom plate of the receiving user tray · 'the first correction unit' is used to carry the user tray along The first positioning component is moved by the direction of the female garment; the second correcting unit, the simple user tray is moved along the second fixing member; and the fresh-keeping, operating the first-correction early and second Correction unit. The hair of the hairpin-example is for the _ _ _, this test handler loading stack 4 machine 'system with a number of smokers tray, the user tray t contains m Γ package 4, the assembly element, side to Put the test wafer into: = chamber system, package the wafer in the chamber system and high-precision positioning board. The six-load H' system is used to test the load in the test tray according to the test result. The plural = disk 'user tray contains the tested _ film; and the user Tosaki and the relay machine. Comparison:: r points one household and a paste perspective "3 == Γ: (four) side tray A perspective view of the lower side of the 3D. Please refer to "3rd picture" and "1st part contains the difference positioning element 2, the second positioning" D, the tray (4) right positive element 5, the second correction unit 6 object unit 7 Γ, the wire 4, the first calibration list The third reading is used to determine the position of the user tray c, and can be shocked on the bottom plate 4 of the J734 or the main frame of the test handler (not shown). The length protrudes from the upper side of the bottom plate 4 so that the - positioning 7L member 2 can support the first side C1 of the user tray c. When the first side C1 of the user tray C is supported by the first positioning member 2, the user tray C is set to correct the m-tree 2 by the money. The second positioning element 3 of the stomach determines the position of the user field c, which is mounted on the base frame 4 or the main frame of the test handler. The first member 3 protrudes from the upper side of the bottom plate 4 by a certain length so that the third member of the third position is enough to support the second side C2 of the user C. When the second side C2 of the user tray c is supported by the second positioning member, the position of the user tray C will be aligned along the second positioning member 3 to be mounted. The _ 弟 弟 德 德 3 and the first position element 2 can be mounted such that the second positioning member 3 and the first granule element 2 can support the mutually opposite first side α disk 笫 side C2. The user tray position correcting device 1 can be moved to the accurate bit 1 by the user tray C being supported by the second positioning cassette 3 and the first position element 2. The position of the shifting tray C is a position where the liver tray c-seven benefit system (not shown) can stably perform the loading and unloading process and the unloading process 12^63734. The user tray position correcting device 1 may include a plurality of second positioning members 3 and a plurality of first positioning members 2. Thus, the user tray c can be moved to a more accurate position. The user tray C can be received in the bottom plate 4, and the first positioning member 2 and the first positioning member 3 can also be mounted in the bottom plate 4. The bottom plate 4 can be shaped into a square plate shape. The first correcting unit 5 operates by moving the user tray C in the direction in which the first positioning member 2 is mounted (the axis direction). The first correcting unit 5 includes a first moving member 51 and a first elastic member 52. The first moving member 51 is coupled to the bottom plate 4 and is rotatable on the bottom plate 4. The first parent unit 5 includes at least one first moving element 51. The first moving member 51 is connectable to the opposite side of the upper side of the bottom plate in which the user tray c is housed, i.e., in the lower side of the bottom plate 4. - The work area of the pickup system (not shown) does not overlap with the first movement member 51, whereby the pickup system (not shown) can stably perform the loading and unloading Cutting process. The first moving member 51 includes a first moving frame 511, a first contact member 512, and a rotating member 513. 13 1363734 The first moving frame 511 is connected to the temple 4 n junction, a ± ^ cake bottom plate 4. And the brother-moving frame 511 can be rotated, and the brother 511a rotates. The first moving frame 四 (4) frame 511 may be integrally formed into a 9 shape and may be coupled to the lower side of the bottom plate 4.

The first contact member 512 is coupled to the end piece of the first moving frame 5 and can move the user tray c in accordance with the rotation of the first moving frame 511. . The first contact element 512 can be in contact with the third side C3 of the user tray C, and the third side c3 of the user tray can be moved toward the first positioning element 2 by the direction of the woman (X-axis direction) . The first contact member 512 may be formed to protrude from the first moving frame 5 ι so that the first interface # 512 may not be in contact with the third side C3 of the upper/upper tray C. The first contact member 512 is rotatably coupled to one end portion 511b of the first moving frame 511. Therefore, when the user tray c is moved, the first contact member M2 is rotatable around the second shaft 512a, thereby preventing the portion of the first contact member 512 from coming into contact with the user tray from being damaged by friction. The rotary member 513 is in contact with the health unit 7, and is capable of receiving the stress transmitted from the work unit 7 for rotating the first moving frame 511. The other end portion 511c. The rotating member 513 is rotatably coupled to the first moving frame, such as 14 1363734 - when the moving frame 511 is rotated, the rotating member 513 is rotatable around the second axis, thereby preventing the rotating member 513 from being partially caused by friction The first elastic member 52_ that is in contact with each other is elastically connected to the first arm member & to the bottom plate 4. The phase phase = (4) - the number of elements of the miscellaneous component 52. The number of the junctions can be connected to one end of the first moving frame 511 (10). The other end of the elastic element 52 can be connected to the bottom plate 4. The first elastic turn 52 pulls the first moving frame 5 to the bottom plate so that the first moving element 5 of the square tray cw 2 is tied by the axial unit 6 of the wire in the direction of the wire along the second positioning element 3 (γ 2:: The work is performed in the manner of the user tray C. The second school (first private series 61 and second job tree 62. Direction ==== positioning element 3 is moved by the direction of the wire (M direction), the user tray 3 is thinned (7) The member 61 which can be movably connected to the bottom plate 4 in a movable manner such as the X-axis can be connected to the work order Μ. Knowing the situation 15 such as /34 Second movement The element 61 comprises a second moving frame two contact element 6] 2. The second moving frame 611 is movable in a hole contact formed in the bottom plate 4. The moving frame 611 can be elastically supported by the second spring 62 The frame 611 is integrally formed into a square plate shape. The private second contact member 612 is formed to protrude from the second moving frame 611. And the jth contact wheel can be moved to the home tray ct, the movement member 61 can be included to v or a plurality of second contact elements 612. = contact elements 612 can be called with the fourth side of the _ disk = household tray C By pushing the fourth side C4 of the user tray C, the clamping element 3 is tilted by the direction axis of the money. The Zhuo-second element 612 can be formed on the front of the 4:::::;i:rr^iLs42^^ 4-- The fourth side of the corpse c is in contact with the fourth side. The first elastic member 62 _ elastically cuts the second crane element 61. Thus, the elastic-elastic 62 can push the second ore component to follow the second The positioning element 3 is mounted: the moving element "C. glaze direction" moves the user tray' and the other end can support the two elastic elements 62. The two ends of the two elastic elements 62 are supported on the bottom plate to support the second moving frame 611. The second correcting unit 6 may include at least one or more 16th 'th second elastic elements such that the second moving element, such as the second correcting unit 6, includes a plurality of two elastic elements, and the second moving unit can move farther than the second moving The frame 6U applies the strange pressure member 61 as a whole to move the same length. The second miscellaneous element 62 and the first-element 52 can be elastically shaped: the first correction unit 5 and the second correction unit 6 can be In the vertical direction, she divides the user's head, and the first correcting unit 5 and the second correcting unit 6 can be used by the user. The mutually perpendicular king side of the C is eliminated and the fourth side (3) #—the unit 7 can operate the first correction unit 5 and the second correction unit 6. Therefore, 2 k is early % 5 and the second correction unit 6 can The user tray c is moved to an accurate standing position, whereby the user tray position correcting device 操 can operate through a work unit 7 to control the front right 70 5 and the second correcting unit 6, and thus, the correcting device is The single structure is made and can move the user tray C to the exact position. In addition, the user tray position correction device 1 can move the user tray C to an accurate position using only one power source, thereby reducing manufacturing cost and maintenance. cost. The work unit 7 is connected to the bottom plate 4 and is movable on the bottom plate 4. When the job sheet 7 moves on the bottom plate 4, the first correcting unit 5 and the second correcting unit 6 can be operated. The work unit 7 can be connected to the lower side of the bottom plate 4. This work unit 7 may contain one of 17 guide blocks and guides, while the bottom plate 4 may contain another one of the guide blocks. The working unit 7 can be connected to the rod of the cylinder δ, for example, and the movement of the working unit 7 can be ==83 on the bottom plate 4. The cylinder 8 can be a pneumatic two-unit 7 which can include a first-order and a second working unit 72. .. 〃 S - The job 71 can be connected to the bottom plate 4 and can be moved on the bottom plate 4, and the repair-work unit 71 can be used to operate the first correction unit. The body unit 71 can operate the first correction unit 5 so that the second work unit 72 can operate the second correction unit 6. The gamma industry unit 71 can be connected to the lower side of the bottom plate 4. This first work unit 71 contains one of the guide blocks and the guide, and the bottom plate 4 may contain the other of the guide block and the guide. The first working unit 71 includes at least one or more protruding members 711 for rotating the first moving member 51. The projecting member 7U protrudes from the work panel of the first work unit. This large portion 711 can protrude in the direction in which the first moving member 51 is positioned. Therefore, when the rotating member 513 is supported by the protruding member 711, the first moving member 51 can be rotated in the direction in which the first contact member 512 is away from the bottom plate 4. The movable member 513 is not formed in the working portion of the working plate. The disk cIt #moving 511 is rotatable in a direction in which the first contact member 512 is in contact with the third side c" of the user's holder. 51 is elastically coupled to the bottom plate 4 through the first elastic butterfly 52. Stretching, and being supported by the protruding member (4) when the rotating member 513 is supported by the protruding member 513, the protruding member 711 is not formed on the working plate a, Above the portion, the first elastic member 52 is compressed. Thereby, the movable member 51 can be rotated. Therefore, the younger moving member 51 can move the user tray c such that the first side C1 of the user tray is used by坌—2« & _ , the elastic force of the miscellaneous member 52 is supported by the first positioning element, thereby preventing damage to the user tray C applied to the user tray C. The gossip etc. The connection to the bottom plate 72 may include one of the guide block and the guide. The t-th working unit 72 is coupled to the bottom plate 4 and is movable on the knitting. The second working material 72 may be subtracted from the first working element 71. The second school element 6. The lower side of the dry 4. This second working unit, while the bottom plate 4 can be packaged The second moving element 61 is movable along the guiding unit and the guiding member in the guide. The first working unit 72 can be moved along the first moving unit. The direction of the second positioning element 3 (the opposite direction of the γ axis 19 1363734) moves the second moving element 61. And the direction of the positioning element is the same as the direction of the γ axis (the γ axis direction can move along the second outer multi-moving brother one) The spear element 61. The moving element 72 can move the first y by pushing the direction of the second moving element twirling 3 (the opposite direction of the γ-axis). [The working unit 72 can be applied to the second moving element 70 61 by the removal. And when the second positioning member 3 is mounted with the thrust of the square to move the second moving element along the 61 〇D (Y-axis direction), the force is applied to the first: the moving element 61 is pulled. The elastic tree 62 will be stretched in the elastic force. Thus the 'second axis tree 61 can be moved. The second moving element 61 can be moved to allow the user to place the disk C piece by the second elastic element. The elastic force of 62 is the second positioning element user tray, which is caused by the excessive stress applied to the user tray C: The industrial unit 71 and the second working unit 72 may be integrally formed such that when the movement 71 moves with the movement of the rod 83 of the cylinder 8, the second working unit 72 can also move with it. The tray 0 can be received on the bottom plate 4 at a corresponding distance from the second positioning element 3 and the first positioning element. 20 ^63734 Here, in order to more effectively move the user tray c to an accurate position, When the first working unit 71 and the second working unit 72 move on the bottom plate 4, the first working unit 71 and the second working unit 72 may be spaced apart from each other. When the preparation-working unit 71 moves on the bottom plate 4, the second working unit can operate the second correction unit 6. The labor unit 71 can apply the stress second mechanical unit 72 to the second working unit #-72 while moving on the bottom plate 4, and can also move the second working unit 72 by the above-mentioned friction. In particular, when the first working unit 71 moves in the direction in which the second working unit 72 is positioned, the first working unit 71 can push the second working material π to move. When the Shida first operation 7L 71 moves in the opposite direction in which the second working unit 72 is positioned, the second f unit 72 can be moved by the second elastic member 62.

The second touch C2 of the user tray c is supported by the second positioning unit. Day: The movement of the second working unit 72 is stopped. The first-working unit 71 is supported on the first side surface α of the user wire C on the first positioning tree 2, so that the 'first-deficient 71' is fresh and the two are separated from each other and can continue. mobile. The distance ^ is said to be the same as the first: the health unit 72 can be moved as follows. The first moving element 51 and the second moving element 61 can move the user and the c. Off c to the exact position 21 1363734 Therefore, although the user tray c is spaced apart from the first positioning element 2 and the second positioning element 3 by a different distance, when the user tray c is received over the bottom plate 4, the user tray position correcting device i can move the user tray C to the exact position. In addition, although the change of the liver of the liver C varies with the range of the job, the good tray position correction device can still move the user tray C of the dimensional change to the exact position without repeating the operation. . In the following, the description will be made in connection with the connection of the first-to-one unit 71 72 to the money 4 and the shifting of the scale on the domain board 4 to each other. Fig. 5 is a plan view showing the state of the #托船置校正设备 of the present invention for correcting the user's melon. "Picture 6" shows the lower side of "Picture 5". Fig. 7 is a plan view showing the state of the user domain position correction after the correction of the present invention. "Picture 8" table, the lower side of the "Bamboo 7". Please refer to "Fig. 5" and "Fig. 6". When the first working unit 72 is moved in the direction in which it is positioned, the early U is supported by the rotating element 513 in the first object 71. One piece 51 is along the direction _ of the first contact element 512 away from the bottom plate 4. ‘c 52 is stretched. The second elastic operating unit 7 pushes the second working unit to move the second moving unit along the second contact element 612 away from the direction in which the working unit 72 reads the element 3 (the reverse direction) 22 1363734 61. At this time, the second elastic member 62 is compressed. In this state, the user tray c can be accommodated on the bottom plate 4 without being disturbed by the first moving member 51 and the second moving member 61. Please refer to "Figure 7" and "Figure 8". In the state where the user's red is contained on the bottom plate 4, #第为作#unit 7ι along the second palm unit

When the suture positioning is moved in the opposite direction, the rotating member 513 is selected to be a portion of the protruding member claw that is not formed in the first working unit 71. Thus, the first moving member will be along the first contact member 512 and the user &; the general direction of rotation from the + human disk c L face C3 contact direction. At this time, the first elastic element Feng Xie·Fan 52 is contracted by the elastic force to return to its original shape. The push-pull of the positioning-du-contact element 512 will move in the direction in which the first clamp read 2 is mounted. If the household tray is above 2, it will stop. The first operation unit 72 will remove the stress that has been applied to the second moving member 61 as applied to the first job ticket. When the stress is shifted toward the shifting system, the second tree 62 is moved by the wire. When the fourth side of the frame member 3 is mounted = C, the second tree 62 is moved by the wire. This state. (4) Stretched and restored to its original shape 23 ^63734 When the user tray c is supported by the second contact element. ^ Wo* 12 is supported on the second piece, the movement of the user tray C will stop. . When the user red is cut to the second positioning tree (4) and the movement of the second health unit 72 will stop. And, the first operation is continued until the user tray C is supported on the first positioning member 2, so that the work early 71 and the second working unit 72 can be separated from each other. The side surface C1, the second side surface c2, the third side surface ο and the second side surface C4 of the user tray c are respectively supported by the first positioning member 2, the second positioning unit, the second moving tree 51, and the first: Above 14, so, the position of the user tray C is stabilized by the board to the pick-up system to perform the loading process and the unloading process. The following 'County Union' is described in detail for the test of the Rizhao machine of the previous month, which contains the position correction device. Fig. 9 is a block diagram showing the structure of the test handler of the present invention. Referring to the "Fig. 1" to "Fig. 9", the test carrier of the present invention includes a chamber system 1 loading stacker 12, an unloading stacker 13, a loading unit 14, an unloading unit 15, and a buffer unit 16. . The cavity to system 11 includes a first chamber m, a second chamber 112, and a third chamber 113. / In the first chamber 111, the package crystal to be tested accommodated in the test tray τ:, is heated or cooled to a test temperature, which is predetermined according to the quality requirement of the user's product 24 1363734. As heating or cooling occurs, the stack of trays will move forward within the first chamber 111 by a fixed distance. After the packaged wafer is heated or cooled to the test temperature, the job 1 tray T will move from the first to the second chamber.

In the second chamber m, the 'package in the test tray τ' will be in contact with the plug-in on the high-precision positioning (4). The high-precision grain plate system is connected with the 12th phase. After the test machine is tested, the test tray τ will be transferred from the second chamber 112 to the third chamber (1). The test package crystal in the third chamber 113 of the third chamber 113 in the test tray will be Know or heat to normal temperature. As heating or cooling occurs, test tray Τ = three chambers (1) _ move, away. When the package wafer is cooled or add i w money 'test minus gambling third chamber 113 is hoisted Unloading unit i 5 〇 — 腔 腔 腔 腔 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二 第二The second chamber 112 may be located above the other second chamber 112. The second chamber to the U1, the second chamber 112, and the third chamber 113 may also be vertically traversed in a vertical direction, wherein the second chamber 112 The load stacker 12 is used to store a plurality of read Cs containing the packaged wafers to be tested. The household tray position correction device is installed on the load stacker 25 1363734. The unload stacker 13 is used to store a plurality of user trays containing the tested package wafers. The unload stacker 13 is also equipped with a user tray position correction device. The packaged wafer after the test is housed in the user tray C that is positioned at different positions through the classification. The assembly is in the test tray, and the loading unit 14 includes the loading and unloading. The pick-up device (4) is movable along the x-axis and the γ-axis direction, and the loading picker can be raised and lowered. The loading picker (4) includes a plurality of mouths capable of picking up the packaged day sheets. .

The middle load picker 141 can be positioned from the turn_U in the home tray C

The silo wafer in Ha' and the package wafer is placed in a position similar to her, and Wei is the so-called loading process. (10) The result of the test tray after the completion of the loading chamber _ loading position (4) is transferred to the first test, and the result of the package crystal is accommodated in the test tray 151 by the grading pair. The unloading unit 15 includes a # pick-up picker 26 1363734. The unloading picker 151 is movable in the X-axis and γ-axis directions, and the unloading picker 151 can also be raised and lowered. This unloading picker 151 includes a plurality of pick-up pickers 151 A nozzle that encapsulates a wafer.

The unloading picker 151 can separate the tested wafers from the test wipes positioned in the unloading position 15a and place the separated packages into the unloading stacker 13 in the home tray c, which is The so-called unloading process. The unloader (5) can place the tested package wafers into the user trays c positioned at different positions by grading according to the results of the test. 151 so that the time taken in the unloading test handler 1 can include a plurality of unloading pickers can be reduced. 15a

The buffer unit 16 buffer unit 16 can temporarily accommodate the package wafer. Can be silk and smoke less - M Yu Guan unloading process ^ fiber to make _ surgery towel, _ picker loaded wafer, and can dream two:: 2:: user tray C pick up the seal to be tested in the loading position = r:16 put the seal (four) to be smashed to the 3734 of the positioning 27 如果 If _ unit 16 is installed and make the secret unloading, ^ can be divided from the test tray positioned at the unloading position _ after the test = : piece 'silk enough The tested package wafer is placed by the buffer unit 16 into the user tray c in the track unloading stacker 13. In the following, another embodiment of the carrier of the present invention having the above configuration will be described in detail. Here, the test handler of the other embodiment of the present invention has a structure similar to that of the above-described test aircraft, and therefore, only the county fabric (four) will be described below. 1A is a plan view of a test handler according to another embodiment of the present invention. 2: FIG. 9 and FIG. 1 show that the measuring device 1G of another embodiment of the present invention includes an exchange unit 17, and the intersection element is not included in the "figure". In the test carrier 10. This switching element 17 exchanges the test tray τ containing the package wafer to be tested and the package wafer τ of the package wafer after the Kna with the chamber system 11. The packaged wafer trays will be transferred from the exchange unit port 1 to the red: chamber system 11' and the test trays containing the tested package wafers, i will be transferred from the chamber system 11 to the fresh-keeping Yuan 17. In the exchange unit, the step of placing the wafer to be tested into the test tray and the step of separating the test package wafer from the test tray are performed. 28 U03734 Here's the step of placing the packaged wafer to be tested into the test tray τ as part of the process, and the step of separating the tested packaged wafer from the test tray is the unloading process - miscellaneous. This fresh element π contains the mounting contact W and the unloading position 15a' and the loading position... and the unloading position can be realized in one position. -- This exchange unit Η can also include a rotation unit 171. • • The rotating unit 171 is used to rotate the test tray τ φ of the packaged wafer containing the test from a horizontal position to a vertical or upright position. This crucible tray remains in an upright position during its transfer within the chamber system 11. /, The rotating unit 171 shoots the test tray 处于 in the upright position of the county wafer that holds the post-employment, from a vertical position to a horizontal position. This test enables the scaly to be horizontally positioned when the packaged wafers are turned over and the subsequently packaged wafers are received in their towels. "

While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and the skilled in the art is in the spirit and scope of the invention. The scope of patent protection shall be subject to the definition of this manual. [Simple description of the diagram] γ Θ is 贞! I interesting machine hat stacking machine with multiple household trays. Figure 2 is the plane of the user tray after correction. 29 1363734 Figure 3 is the user's rest adjustment device and user tray of the present invention. Fig. 4 is a perspective view of the lower side of Fig. 3; Fig. 5 is a plan view showing the state of the good position correcting device of the present invention before the position of the school tray; Fig. 6 is a view of Fig. 5 side;

Figure 7 is a plan view of the state after the user has placed the money for correction in the present invention | Fig. 8 shows the lower side of Fig. 7; Fig. 9 shows the structure of the test handler of the present invention; Figure U) is a plan view of a test carrier of another embodiment of the present invention. L main component symbol description] user tray position correcting device first positioning member second positioning member bottom plate first correcting unit second correcting unit working unit cylinder 30 1363734 8a Rod 10 Test carrier 11 Chamber system 12 Loading stacker 13 Unloading stacker 14 Loading unit 15 Unloading unit 16 Buffer unit 17 Exchange unit 41 Hole 42 Hole 51 First moving element 52 First elastic element 61 Second movement Element 62 Second elastic element 71 First working unit 72 Second working unit 14a Loading position 15a Unloading position 71a Working plate 100 Stacking machine 31 1363734 101 Loading stacker 102 Unloading stacking machine 103 Buffering stacking machine 104 Transfer unit 111 First chamber 112 second chamber 113 third chamber 141 loading picker 151 unloading picker 171 rotating unit 511 first moving frame 512 first contact element 513 rotating element 611 second moving frame 612 second contact element 711 protruding element 101a position 102a position 511a first axis 511b end 511c end 32

Claims (1)

Replacement page on December 7 of the following year. Patent application scope: 1. User domain location correction equipment, including: 4i first-position component and at least one second determination-user tray position; domain-bottom a pole' is used to receive the user tray; a positioning element-right unit is configured to move the maker tray along a direction in which one is installed; a positioning unit 'a second correction sheet is used to The second piece is moved in the direction in which it is mounted; and the 兀 working unit is configured to operate the first correcting unit and the second correcting unit block: “the first sugar element is used to operate the furnace lock Γ ' The fly-second unit is a second correcting unit that is not locked by the first working unit, and the second working unit moves the second correcting unit along the writing unit. 2. If the position correction shop is annihilated in claim 1, the first work order 1 is attached to the bottom plate, and the second work unit is attached to the bottom plate. The user tray position correction amount as claimed in claim 2, wherein the first work unit and the second work unit are separable from each other when moving on the bottom plate. ^ - 2 to return the user tray position correction device, wherein the first calibration unit contains 34 at least the first moving element, is connected to the bottom plate, and wherein at least one t moving element can be Rotating on the bottom plate; and the elastic member is configured to elastically connect the first moving member to the bottom tray, and the first tray member is coupled to the user tray position correcting device. The wire, and wherein the first moving frame % element is connected to one end of the first moving frame, and the tray thereof; and the scale moves the user-rotating element 'connection according to the rotation of the first moving frame Face-moving frame.. =r-float-shift_(4) on the second and the second: &amp; the user's pallet position as described in claim 5, the correct device, = answer the "-", thank you in the brother Rotate on one end of the moving frame. 7. The user tray position correcting device of claim 4, wherein the first action comprises at least one protruding element for rotating the first moving element. The user tray position correcting device of claim 2, wherein the second school element system comprises: a flat '35 1363734 曰 a replacement page a second moving element, along the second movement, and The two miscellaneous components are moved along the direction of the second direction of loading _ household tray; (10) readable at least one second component of the mounted component, _ elastically cutting the second movement 7L · wherein the second movement: The user tray position correction device described in ::8, and the mobile gift, the second component of the system is elastically slid; the ST is connected to the second _, the _ bribe is in the second frame, and the ω is the main ^ / brother two contact elements are used to move the user tray. The user tray position described in the item 8 is moved to the second moving element by interlocking with the first chapter, the chapter 2, and the second job sheet u. The user tray position correction unit described in the employee 1 moves the user tray in a direction perpendicular to the second correcting unit m street/, the middle of the younger brother. And the correcting device' wherein the working unit is 丄 and wherein the working unit is movable on the bottom plate; and - '^ the first positive unit and the second correcting unit operate in accordance with the movement of the work unit. 〃 13. A test handler comprising: a load carrying machine having a plurality of trays, 36 1363734 in the household tray containing the packaged wafer to be tested; a replacement page in December 7th, 100; The fresh element is used to put the test package wafer to be tested into the test tray-chamber system, where the plate in the chamber system is in contact; &amp; wafer and a high precision fixed knee tray after the test in the valley The block wafer is sorted; Hai unloading _$ machine, Guxian Wei _ household city contains _ Jue County W,. Sing Chan a user to install the remaining correction equipment, the phase is installed in the unloading stacker, 35 &amp; and the user The tray position correction device comprises: 'at least one first positioning component and at least----Tianxin plus a younger brother to turn the position to confirm the position of a user tray; ..... a bottom plate, _ Used for receiving a pick-up tray; a first-correcting unit for moving the user tray in a direction in which the first piece is mounted; ^ a second correcting unit for arranging the user tray along the The workpiece is moved in the direction of installation; and ^ 兀, - the work unit is for operating the first correction unit and the second calibration sheet 37 丄 / replacement page - wherein the work unit comprises: a first work unit, For operating the first correction unit; and - the second work unit is interlocking with the first work unit to operate the second correction unit, wherein the second work unit is along the first health unit The second correction unit is operated at the time. - The test handler of claim I, wherein the first working unit is connected to the bottom plate, wherein the second working unit is connected to the bottom plate. 15. The handler according to claim u, wherein the first working unit and the second working unit are separated from each other on the bottom plate. 16. The test handler of claim 13 wherein the first calibration unit comprises: - at least one first moving element 'connected to the bottom plate, and wherein at least one first moving element is rotatable on the bottom plate And the first elastic member 'elastically connects the first moving element to the bottom plate. _ '17. The test transporter of claim 3, wherein the second correcting leather element comprises: 'a second moving element that is moved along the direction in which the second positioning element is mounted, and The disaccharide element moves the user tray in a direction in which the second positioning element is mounted; and the at least one second elastic member </ br> elastically supports the second moving element: ' a test transporter, wherein the second work unit is interlocked with the 38th work unit to move the test transporter of the first type: the = second correction unit moves the unit along a mutually perpendicular direction The test handler of the second 2arf=r, which is made to be fresh touched, connected to the bottom plate 'where the working unit is movable on the bottom plate; and -: the work order in which the first correction unit is The second correcting unit operates in accordance with the movement of the 'yuan'. 39