TW200929414A - Monitoring device, monitoring method, inspection device and inspection method - Google Patents

Monitoring device, monitoring method, inspection device and inspection method Download PDF

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Publication number
TW200929414A
TW200929414A TW097140766A TW97140766A TW200929414A TW 200929414 A TW200929414 A TW 200929414A TW 097140766 A TW097140766 A TW 097140766A TW 97140766 A TW97140766 A TW 97140766A TW 200929414 A TW200929414 A TW 200929414A
Authority
TW
Taiwan
Prior art keywords
image
unit
inspected
photographing
illumination
Prior art date
Application number
TW097140766A
Other languages
English (en)
Chinese (zh)
Inventor
Toru Yoshikawa
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of TW200929414A publication Critical patent/TW200929414A/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW097140766A 2007-10-25 2008-10-24 Monitoring device, monitoring method, inspection device and inspection method TW200929414A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007278100A JP2011009244A (ja) 2007-10-25 2007-10-25 観察装置および観察方法、並びに検査装置および検査方法

Publications (1)

Publication Number Publication Date
TW200929414A true TW200929414A (en) 2009-07-01

Family

ID=40579571

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097140766A TW200929414A (en) 2007-10-25 2008-10-24 Monitoring device, monitoring method, inspection device and inspection method

Country Status (3)

Country Link
JP (1) JP2011009244A (ja)
TW (1) TW200929414A (ja)
WO (1) WO2009054469A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5551404B2 (ja) * 2009-10-15 2014-07-16 オリンパス株式会社 半導体検査装置および半導体検査方法
CN102590211B (zh) * 2011-01-11 2014-10-22 郑州大学 利用光谱和图像特征进行烟叶分级的方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04279848A (ja) * 1991-03-08 1992-10-05 Kawasaki Steel Corp 熱間圧延における鋼板表面状態観察装置及び観察方法
JP3907797B2 (ja) * 1997-09-19 2007-04-18 オリンパス株式会社 基板検査装置
JP3333148B2 (ja) * 1999-05-31 2002-10-07 オリンパス光学工業株式会社 外観検査装置
JP2001289733A (ja) * 2000-04-10 2001-10-19 Toshiba Corp 欠陥検査システム
JP4526661B2 (ja) * 2000-06-28 2010-08-18 株式会社日立製作所 検査装置および検査方法
JP2006017668A (ja) * 2004-07-05 2006-01-19 Toyota Motor Corp 表面欠陥検出方法および表面欠陥検出装置
JP2006250783A (ja) * 2005-03-11 2006-09-21 Olympus Corp マクロ検査装置
JP2007155448A (ja) * 2005-12-02 2007-06-21 Olympus Corp 端面検査装置
JP2007327903A (ja) * 2006-06-09 2007-12-20 Olympus Corp 外観検査装置
JP2008070237A (ja) * 2006-09-14 2008-03-27 Olympus Corp 基板検査装置

Also Published As

Publication number Publication date
JP2011009244A (ja) 2011-01-13
WO2009054469A1 (ja) 2009-04-30

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