TW200834791A - Apparatus of transferring semiconductor package - Google Patents

Abstract

Disclosed is an apparatus of transferring a semiconductor package in which includes a plurality of picker modules to pick up and invert the semiconductor package for the transfer of the semiconductor package. Each picker module includes a vertical bracket, a cylinder block attached to a lower end portion of the vertical bracket, a cylinder rod penetrated through the cylinder block and having a lower end inserted into a cylinder rod mount, to vertically move the cylinder rod mount by upward and downward movements thereof, and a picker penetrated through the cylinder block and integrally coupled with the cylinder rod mount, to be vertically moved according to the vertical movement of the cylinder rod mount, so as to pick up and rotate the semiconductor package. A rotating device is integrally mounted on the top of the cylinder block, to rotate the picker by operation of a motor.

Description

200834791 IX. Description of the Invention: [Technical Field] The present invention relates to a semiconductor package package gambling device, which is disposed of, in particular, a transfer + guide lifting device and a spinner rotating device. An output of the output module === can be operated by a motor [prior art]

I came to the 5 brothers' manufacturing of semiconductor package structure is basically made of a wafer manufacturing (=1C_n, intestine) and (10) called the coffee and assembly process: in the process of 'integrated circuit system tree Closed to form a semiconductor wafer. In the process of screaming the process towel 'lead frame & semiconductor wafer, in order to make the semiconductor day and day scalar frame can be electrically conductive, ί wire bonding or welding to form a welding ship, then use like epoxy Resin to mold operation (m〇lding 〇perati〇n), to obtain the semiconductor strip (semiconductor strip), the half & f body will be transported to the _ by the belt extractor The cutter, and the semiconductor tape is cut by the cutter into a plurality of semiconductor package structures independent of each other. The semiconductor package structure is classified by a number of turns and is subjected to a packing process. A disadvantage of the semiconductor package structure is that the lead frame solder balls are easily deformed or damaged even by a slight external impact, and are easily contacted in the subsequent electronic detection or when assembled to the substrate. 7 200834791 It is necessary to place the semi-package structure in a box like a tray. The tray has a container suitable for placing wires, and the shape and size of the semiconductor package structure. Once the semiconductor package structure is stored in the tray, it is then picked up and rotated by the handler for visual inspection, sorting the intact/defective product, and packaging the product. Regarding a handler for picking up and transporting a semiconductor package structure, the extractor module has been disclosed in Korean Registered Patent No. 0580810, which is called an axially rotatable pneumatic pick-up for transporting a semiconductor device in the same column. Device, method for using the detector of the detector and method for transporting semiconductor instruments

(PIVOTALLY-ROTATABLE PNEUMATIC PICKER FOR IN-LINE TRANSFER OF SEMICONDUCTOR DEVICE, PICKER MODULE USING THE PICKER, AND SEMICONDUCTOR DEVICE TRANSFER METHOD)". The first figure shows a perspective view of an extractor module having a 10 axially rotatable pneumatic extractor as described in Korean Registered Patent No. 58-816. The second figure shows a perspective view of the axially rotatable pneumatic extractor of the first figure, and the third figure shows a section along the line A_A of the second figure. Referring to the chart, the conventional ejector module includes a plurality of cylinder blocks 1 each having a pivot shaft 2〇, a cylinder guide groove for guiding the vertical movement of the individual vapor bodies 10 ( Cylinderguide) 3〇, a module body 4〇, and a servo motor 50. The front surface of the module body 4 has a plurality of vertical bars 42 that can move horizontally. Each steam rainbow rod 42. The adjacent vertical bars 42 are reduced to the corresponding vertical turns. The pneumatic detector of the first axis and the second axial piston 、U, 12, used to introduce the pressing gas to provide the rotational driving force for the tow shaft 2G, a first guiding pomelo 3i vertically penetrates the vapor red body 1〇 and contains a first pneumatic channel 32, 1 two guiding axis f vertical The cylinder body penetrates the vapor red body 1 〇 and contains a second pneumatic transmission 34 ′ and the cylinder guide groove 3G is coupled to the first guide shaft 31 and the second guide shaft % to guide the cylinder block 10 to move straight. An axially rotatable pneumatic extractor having the above-described domain configuration is driven by compressed air carried by the first and second passages 32, 34 formed by the first and second guide shafts Μ, 33 Move vertically. The pivot 20 shown in the third figure is located in a sphere locator 13. The ball positioner 13 has a - sealing portion 13a for partitioning the first and second axial air chambers 11a, 12a, and a ball supporting hole Bb for accommodating the ball 14. The ball positioner 13 is surrounded by a ball rectilinear guide 15. The spherical linear guide groove 15 has a linear guide groove i5a formed at a position where the spherical straight guide groove 15 corresponds to the spherical support hole i3b of the individual ball positioner 13. The first and second axial pneumatic chambers 11a, 12a are coupled to the first and second axial pneumatic jaws 11, 12, respectively, such that compressed air can be fed into the first and second axial pneumatic jaws 11, 12 The second axial pneumatic chambers 11a, 12a. The lower end of the pivot 2 has a suctioning pad 22 for drawing the semiconductor package 9 200834791 structure 60. The surface of the boring shaft 20 has an axial guiding groove (Fig. - which is not included in the ball supporting hole 13b of the ball locator 13). It is vertically moved by the guidance of the linear guide groove 15a. _ , according to the configuration configuration described above, if the compressed air is accommodated in the sphere support hole i3b of the sphere locator 13 , the red body 10, the linear guide groove 15a is guided to move vertically, and the ball 2 14' can move along the pivot axis 20 in a straight line guiding the groove: the vertical direction of the force 4. The problem of & i5a蚪' in the appropriate first=previous case is that the first and second pneumatic passages 32, 34/the younger guide shafts 31, 33 must be substantially in position. In the body of the ω towel, the steam red body 10 is moved vertically by such a 4 μ, and there is no way to become slim. The turning angle of the device is determined by the position of the ball positioning. The predetermined angle between the various spheres 14 is used to support the hole 7 and the frame. , °, and 'therefore, the upper brain case has a fine air-filled gas. The inventor felt that the above-mentioned deficiency can be improved. Therefore, it is proposed that the present species is reasonable and effective in improving the above-mentioned defects - [Summary of the Invention] The purpose of the month is to provide a semiconductor package structure for the delivery of 200834791. The "plucker" system is integrated with a cylinder rod (cyiinderr〇d), by the upward and downward movement of the cylinder rod. The mine is rotated by the operation of the motor, whereby the extractor can be rotated at various angles by controlling the operation of the motor. Another object of the present invention is to provide a semiconductor package structure transport device in which a twisted vertical Wei system of the n is pulled around a stroke linear bushing of the picker shaft (str〇ke linear bush) ) cited

It is not necessary to use the pneumatic pressure guiding gap in the previous case, so that it can achieve a lighter recording than the financial case, and (4) (10) the rotating surface can be simultaneously executed, so that the extractor can operate at high speed. The above and other objects can be accomplished by providing a semiconductor device comprising: a plurality of ejector modules for splicing the structure of the body I for carrying the half The guiding module comprises: a vertical bracket, a mountain, a red body, a red body of the τ portion, a red rod that penetrates the cylinder and has a red pole, and the red rod Up and down movement to privately move the cylinder rod seat; and - penetrate the cylinder body and integral with the cylinder rod seat Γ == ' to vertically shift the body package according to the vertical movement of the cylinder rod holder The structure, wherein the rotating device is a set of cakes at the top end of the cylinder, and the motor is rotated to rotate the inspection hole by ~^°. The package can be packaged in a shaft 11 (which has a through hole formed therein (thin ♦ (four)' is used for 丨 _ _ gas; and - is set in 镰

200834791 The upper rotary joint of the man-made shaft __ buckle (four), wherein the rotating device package 3. A motor shaft as a drive shaft of the motor is configured to surround the motor shaft and is - The bearing set on the -motor seat is surrounded by 'and thus the _-transfer of the horse's miscellaneous rotation; - is ampouled to = the (fourth) axis of the first - timing pulley _ ^ wild sulfur force, from * in the rotation The shaft, the = is rotated together with the 0; a second timing 3 is mounted around the diverter shaft and - the timing of the connection to the second timing pulley and the second timing pulley Qiandi-doing the rotation while spinning the second timing slide 4 out can include: - is placed on the cylinder rod seat and is configured to surround the key rotation bearing (rotating bearing) to guide the 捡^疋辂, one is placed into the motor seat and is configured to surround the rotation of the shaft = the second rotation bearing, thereby guiding the rotation of the shaft of the dice; a ligand ^ = the dice axis And through the lower end of the rice body, the first stroke linear bushing of the cylinder f is placed, and the disc is rotated from the (four) guide shaft while rotating == And - is formulated turned about the shaft and fish out through the second end is opposite the linear stroke of the cylinder bushing person to lead the reader _ * recorder while rotating the upward and downward movement. The vertical bracket can include a sense of motion for making (4) movements. In order to enable further development of the features and techniques of the present invention, please refer to the detailed description and the description of the present invention, which is only for reference and use, and is not intended to limit the invention. . 12, 田17儿 The preferred embodiment of the invention. It’s easy to make it easy for those skilled in the art.

The cylinder rod holder 230 is coupled to the lower end of the cylinder block 220, and the cylinder rod holder 23 is integrally coupled to the cylinder rod 240 and the dipper 250. A cylinder rod 240 penetrates the cylinder block 220 and has a lower end inserted therein and is fixed to the 200834791. [Embodiment] The present invention will be described and hereinafter fully described with reference to the accompanying drawings. - Part of the semiconductor package structure of the present invention. The structure of the wheeled lion and duck material conductor package body = structure. Then, the plurality of extractor modules are forked to the body of the extractor module 100, and the module body further includes an interval: an interval between the extractor modules 200. ^ The dressing is set to 110 for adjusting the 捡 弟 弟 图 图 图 图 弟 弟 弟 弟 弟 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 2a and 7th, each of the diceper modules 21 (vertieral braeket) 21G according to the present invention. The squatter, the ejector die, and 200 includes a cylinder block 22, a cylinder rod holder 23, a cylinder rod 2, and a stacker 250 disposed on each of the vertical brackets 21A. The vertical bracket 210 is located on the surface of the body of the pick-up module 1 , and the cylinder 220 is attached to the lower end of the surface of the vertical bracket 21 . 13 200834791 ίΪί 23G. The cylinder rod moves in the rainbow body 220 by the action of pneumatic pressure to vertically move the rainbow rod holder 230. ^ Let the turn move up and down, the cylinder (10) has formed in the red body 22〇 222". One of the brothers and one oxygen matic matic port) 221 and - the second aerodynamics The extractor 250 and the cylinder rod holder 23 〇 and the cylinder rod 24 〇 = the rod chest moves up and down and moves vertically. Therefore, according to the two-two heart-exit group, the lifting device does not need to be recorded as a straight-moving device, and can have a slender configuration setting. In order to extract the semiconductor package structure by suction, the 哭 哭 25 25 251 捡 捡 # 其 其 其 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成The ribs 252' of the upper portion of the ejector (5) and the ribs of the shaft 251 of the 捡 (4) shaft are vented by vacuum suction and placed on the semiconductor package structure 3 (10) - a suction nozzle (253). The dipper shaft 251 moves vertically within the body 220 in accordance with the movement of the cylinder rod. The swivel joint 252 is used to connect an air tube (not shown in the perforation for injecting air into the diverter shaft 251, or to extract air from the detected crying shaft 251. To reduce the air tube (not shown in In the figure, the problem: the rotary joint 252 has a fixed upper portion and a rotatable lower portion. In the present invention, the rotation of the extractor 250 is performed by the motor 26〇. The device 27〇 is integrally assembled at the top of the =. Difficulty 220 14 200834791 Although not shown in the figure, the green motor, the motor accommodates the coder, to sense the number of rotations of the motor 260 per minute. The motor 270 includes a motor shaft 27, a rotating shaft 272, a first timing pulley 273, a second timing pulley 274, and a timing belt 275. The motor shaft 271 is a rotating shaft 272 of the motor 26A. It has a slender shape. The rotating shaft 272 is used to surround the slender motor shaft to provide sufficient rotational force to the motor shaft 271. The rotating shaft 272 is a bearing set on the motor base. Surrounded, that is, the 272 is used to reinforce the motor 26〇 Rotational force. The first timing pulley of the system 273 is configured to surround the rotating shaft 272,

Rotate simultaneously with the rotating shaft 272. W The second timing pulley 274 is configured to surround the dipper shaft 251. The second timing pulley 274 is coupled to the first positive: 273 by the timing belt 2 and rotates simultaneously with the first timing pulley 273. In the above configuration configuration, if the motor shaft 271 is rotated by the operation of the motor, the rotary shaft 272 is simultaneously rotated. Thereby, the first timing pulley 273 around the rotating shaft 272 rotates simultaneously with the rotating shaft 272, and the second timing pulley 274 connected to the first timing pulley by the timing belt 275 and the first timing The pulley 273 rotates at the same time. Therefore, the "swinger 252 around the timing pulley 274 will follow the rotation". In the present invention, since the rotating device 27 捡 rotates the ejector shaft 251 by the motor 26 ,, the 捡 捡The device 25 can have various rotation angles. As described in the earlier prior art section, the conventional pick-up wheel train is 1

The first stroke linear bushing 256 and the second stroke linear bushing are configured to guide the up and down movement of the dipper shaft 251 and the rotation of the dipper shaft 251 about the scooping II shaft 25 and the ribs. The first stroke linear bushing 256 is inserted into the cylinder 220 through the lower end of the cylinder 220, and the second stroke linear bushing (5) is also inserted into the cylinder 22 through the upper end of the cylinder 220. By using the first-stroke linear bushing 256 and the second-stroke linear axis 257 to simultaneously guide the linear motion and rotation of the dipper shaft, the dipper shaft 251 can achieve a larger contact area, allowing the rotation accuracy to also More improved °. ° In addition, the 捡 yield shaft 251 can be rotated while moving vertically, so that the angle of rotation of the 捡200834791 is limited in the angle of rotation. Further, by the rotation of the less conventional gear mechanism, the rotation of the rotary position is controlled by the motor 26^66 and the outer portion of the detector 250 according to the present invention. The operation, the control 25G can be used for various angles of the rotator 25 - can be rotated at various angles under the fine operation of the motor, and the 255, - - The second rotary bearing stroke linear bushing W and - the second_linear axis. Bearing 25=: the rotary bearing 254 is placed in the red rod seat 230, and the second rotating shaft _ is broken into the motor seat 26, the first rotating bearing 254 and the second rotating shaft are respectively arranged around the extractor shaft (5) Then, the guide shaft 251 = ❻ detects the 11 axis 251 by the second timing pulley 274 with the S (four) 'the first rotary bearing 254 and the second rotary bearing 255 will support the weight of the male 251 to guide The extractor shaft 251 is rotated. 16 200834791 The output shaft 251 can operate at high speed. In addition, Ji said that the conventional pneumatic rotary cutter shaft requires a pneumatic waste force introduction gap, resulting in low rotation accuracy and a large equipment size. On the contrary, according to the present invention, the paste is linearly 256, 257 around the stroke axis of the dipper shaft 251 to guide the up and down movement and rotation of the diceper shaft 251, which is also slim and lighter than the prior art dilator. The vertical bracket 21 can include a sensor 2n for sensing the upward movement of the dipper 250. According to the present invention, the type of the semiconductor package structure 3 to be picked up is adjusted according to the type of the semiconductor package structure 3 to be extracted, and the interval adjustment on the body of the extractor module 100 is utilized. The device 110 adjusts the spacing between the ejector modules 200, and then the sputum port and the splicer know that the splicing unit body 100 will be horizontally moved to a squirting position of a +-conductor package structure. Next, the compressed air is controlled to fill the first 222, allowing the compressed air to move downwardly and downwardly. The cylinder cup moves downwardly, thereby causing the cylinder rod holder 230 == to move downward around the outer μ of the detector shaft 251, and the discharge 251 will be turned down to the height. Then, until the contact is required, then the air is sucked into the diceper shaft 251. The perforation = the formed result needs to change the side of the semiconductor-structure that is being ejected, and the rotation of the diverter shaft 251 is controlled.

In 200834791, the angle of rotation of the motor 260 can be controlled. Subsequent round-trip operations are already known and will not be described in detail. It can be seen from the ex-gravity pick that the transfer package structure disclosed by the present issue has the following effects. According to the present invention, the extractor 250 is integrally formed with a red bar 24' so as to be vertically aligned according to the up and down movement of the cylinder rod 240 while being rotated by the operation of the motor 260. Therefore, controlling the operation of the motor allows the extractor 250 to rotate at various angles. Secondly, according to the present invention, the strokes of the linear bushings 256, 257 are closely wound around the side of the stroke shaft 251 of the gripper shaft 251 to rotate and vertically move the yarn, and the need to turn the money to provide a gas secret. This makes the device slim and lighter than the prior art. In addition, since the 捡 is simultaneously rotated and moved vertically, the ejector 25() can achieve high speed. Third, when the vertical motion and rotation of the diverter 25A are guided by the two-stroke linear bushings 256, 257, the near contact area between the dipper shaft 251 and the two-stroke linear bushings 256, 257 is increased, The rotation accuracy of the ejector 25 可以 can be improved. While the invention has been described by the preferred embodiments of the present invention, it will be understood by those skilled in the <RTIgt; , add or delete.曰一 18 200834791 [Simple description of the drawing] The first picture is a perspective view of an extractor module having an axially rotatable pneumatic extractor, which is one of the Korean registered patent No. 0580816. The second figure is a perspective view of the axially rotatable pneumatic extractor of the first figure. The third figure is a cross-sectional view taken along line A-A' of the second figure. The fourth figure is a perspective view of a portion of a semiconductor package structure transport device of the present invention.

Fig. 5 is a perspective view showing the main body of the extractor module of the semiconductor package structure transport device of the present invention. The sixth figure is a perspective view of the extractor module in the fifth figure. The seventh figure is a front view of the sixth figure. The eighth figure is an exploded perspective view of the sixth figure. [Main component symbol description] [Practical] 10 Cylinder block 11 First axial pneumatic 埠 11a First axial pneumatic cavity 12 Second axial pneumatic 埠 12a Second axial pneumatic cavity 13 Sphere locator 13a Sealing portion 13b Ball support hole 14 Ball 19 200834791 15 Ball linear guide 15a Linear guide groove 20 Pivot 22 Suction pad 30 Cylinder guide groove 31 First guide shaft 32 First pneumatic passage 33 Second guide shaft 34 Second pneumatic passage 40 Mode Group main body 42 vertical rod 50 servo motor 60 semiconductor package structure [present invention] 100 extractor module body 110 spacing adjustment device • 200 extractor module 210 vertical bracket 211 sensor 220 cylinder 221 first pneumatic 埠222 second pneumatic 埠 230 cylinder rod holder 20 200834791 240 250 260 270 cylinder rod extractor 251 ejector shaft 252 rotary joint 253 suction nozzle 254 first rotary bearing 255 second rotary bearing 256 first stroke linear bushing 257 Second stroke linear bushing motor 261 Motor base rotating device 271 Motor shaft 272 Rotary shaft 273 First timing pulley 274 Second timing pulley 275 Timing belt 2 76 Bearing 300 Semiconductor package structure 21

Claims (1)

200834791 X. Patent application scope: 1. A semiconductor package structure conveying device, comprising: a plurality of semiconductor package structures for picking up and inverting the semiconductor sealing structure to transmit the semiconductor package structure; The diceper modules each include a vertical bracket; a red body attached to a lower end of the vertical bracket; an upward and downward movement through the cylinder and having a lower end inserted into a cylinder rod Vertically moving the red rod = 2 rods 'by the cylinder - penetrating the cylinder body and with the cylinder rod seat _ body wheel == seat _ straight Wei _ straight crane, material out and rotate the semiconductor seal The semiconductor package structure of the first embodiment of the present invention, wherein the extractor comprises a core-shaped shaft a perforation for introducing and discharging air; and a joint formed on the upper portion of the shaft of the test (four), and wherein the rotating device includes a motor shaft as a drive shaft of the motor; The job is miscellaneous, and is set up in the 〆 motor The bearing on the seat is surrounded by 'and thus rotates together while the motor is male; 22 200834791 A simultaneous rotation of the first rotation around the axis of rotation; a μ wheel* and a second timing pulley around the axis of the axis of the rotation axis; and ^: turn-section The pulley and the timing belt of the second timing connection are slid from the same timing of the rotation of the "division-time wheel" to the second timing. Where 3: = m around the second half of the item - a broken person green pole seat and is associated with the rotation of the bearing, thereby guiding the rotation of the shaft of the extractor; The motor seat and the secret rib (4) the bearing, thereby guiding the rotation of the shaft; the first one is configured to be placed around the shaft and through the lower end of the cylinder a first-stroke linear bushing to guide the same-rotating and upward-and downward movement of the pick-up; and a cylinder configured to be placed around the pick-up shaft and through the upper end of the cylinder The second stroke linear bushing of the body, thereby guiding the simultaneous rotation of the dipper shaft and the upward and downward movement. 4. The semiconductor package name of claim 2, wherein the vertical bracket includes a sensor for sensing: the movement of the extractor. ^ 23