TWI344190B - Apparatus of transferring semiconductor package - Google Patents

Description

1344190 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a semiconductor package package structure in which money is placed, wherein the guide lifting device and the 捡 ϋ 魏 魏 (4) 捡 捡 _ _ _ _ The ejection and rotation of the conductor package structure; is the Γ body' to simultaneously perform half-rotation of various limbs.捡 “The operation of the straw-motor” [Prior Art]

The fabrication of the m-conductor package is basically made up of a wafer fabrication (FAB) process (hereinafter, round table processing, rAQ & (the lower % is from 8 processes) and an assembly process). In the FAB, the dragon circuit is

, ^^(JeadfJ;}^^J = body wafer, in order to make the rotating body W and the lead frame conductive, it will be bonded, or bond to form a solder ball, then use the image, milk resin To perform the molding operation (m〇lding 〇perati〇n) to obtain a semiconductor strip. ’

/ / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / / (packing process). One disadvantage of the semiconductor package structure is that the wire _ solder balls can be easily deformed or damaged even in the outer county of Longwei, and the electronic charge is not good when it is assembled on the substrate. For this, in the middle, it is necessary to place the semi-conductive display structure in the 'tray' with the shape and size of the container suitable for placing the wire. Constructed in a box 6 container like a tray, and as in a semiconductor package structure, the semiconductor package structure is stored in a tray order,

夕于ϋ ϋ ^To pick up and transport the semiconductor package structure of the carrier (h an d 1 er) "', she has been disclosed in the Korean registered patent (4) · 6 named the same as the same. Axial rotatable pneumatic extractor, use of the extractor module of the extractor and semiconductor instrument delivery method (PIVOTALLY-ROTATABLE PNEUMATIC PICKER FOR IN LINE TRANSFER 〇F SEMICONDUCTOR DEVICE, PICKER MODULE USING THE PICKER, AND The first picture of the SEMICONDUCTOR DEVICE TRANSFER METHOD) is not a perspective view of an extractor module having an axially rotatable pneumatic extractor as one of Korean registered patent No. 0580816. The second figure shows a perspective view of the axially rotatable pneumatic extractor of the first figure, and the third figure shows a section along the line A_A of the second figure. Reference to the chart 'The conventional extractor module includes a plurality of cylinder blocks 10 each having a pivot shaft 20 for guiding the vertical movement of the individual cylinder blocks 10 (cy丨)丨nderguide) 3〇, a module body 4〇, and a servo motor 50. The front surface of the module body 4 has a plurality of horizontally movable bars 42 that can be moved 1344190. The distance between each of the cylinder guides 30 coupled to the corresponding vertical rods 42 and the adjacent vertical rods 42 can be adjusted by the servo motor 5〇. Similarly, the axially rotatable pneumatic extractor comprises a cylinder block 10, the pivot 20' liters> first and second drawn pneumatic cymbals 12 formed in the cylinder block 1 , Compressed air is introduced to provide a rotational driving force for the boring shaft 20, a first guiding shaft 31 vertically penetrates the cylinder block and contains a first pneumatic passage 32, and a second guiding shaft 33 vertically penetrates the cylinder The body 10 includes a second pneumatic Φ channel material. The cylinder guide groove 30 is coupled to the first guide shaft 31 and the second guide shaft 33 to guide the vertical movement of the 忒A cylinder 10. An axially rotatable pneumatic extractor having the configuration configuration described above is driven by compressed air carried by the first and second passages 32, 34 of the first and second guide shafts 31, 33 Move vertically. The pivot 20 shown in the third figure is located in a ball positioner 丨3. The ball positioner 13 has a sealing portion 13a for partitioning the first and second suctioning air, the chambers 11a, 12a, and a ball supporting hole 3b for accommodating the ball 丨4. The sphere • positioner 3 is surrounded by a ball rectilinear guide 15. The spherical linear guide groove 5 has a linear guide groove 15a formed at a position where the spherical straight guide groove 15 corresponds to the spherical branch hole I% of the individual ball positioner 13. The first and second axial pneumatic chambers Ua, 12a are respectively connected to the first and second axial pneumatics 皋U, 丨2' so that the test air can be fed through the first and second axial pneumatic 埠, 12 And a second axial pneumatic chamber Ua, 丨 2a. The lower end of the trailing shaft has a suction pad (suddng (four) 22 for sucking the semiconductor seal 9 1344190 structure 60. The surface of the pivot 20 has an axial guiding groove (not shown). It is accommodated in the ball positioner 13 The ball 14 of the ball strut hole 13b is vertically movable according to the guidance of the linear guide groove 15a. In the above configuration configuration, if compressed air is poured into the cylinder block, it is accommodated in the ball positioner 13 The ball 14 of the spherical support hole 13b, the crucible moves vertically along the guide of the linear guide groove 丨5a, and the vertical of the sphere 14

The movement causes the pivot 20 to rotate in place as it travels through the linear guide groove 5a. The problem with the above premise is that the first and second guide shafts 31, 33 having the first and second pneumatic passages 32, 34 must substantially be located in the cylinder bore so as to [reducing the gas 4 into the cylinder block (1) 'When the cylinder block is moved vertically, there is no way for the cylinder block 1 to become slim. The test question is that her % of the test is arranged by the ball in the positioning::: = body branch = 舆 ball - between the presets _

Set the configuration configuration. In addition, the inventor of the present invention has a complicated relationship, and the present inventors have sensed that the above-mentioned missing factor is reasonable and that the upper frequency of the material is from the L's shame-species. The invention aims to provide a semiconductor. The package structure conveying device, wherein a & mountain σσ. is integrated with a cylinder rod by a pkker system, and moves vertically by the upward and downward movement of the i-rod, and by means of - The rotation of the motor and (4) 'News' 11 can be set at various angles by controlling the operation of the motor, and the other purpose is to provide a semiconductor package structure transport device. The rotation and vertical motion of the detector are closely utilized. The stroke linear bushing (str〇ke丨inear bush) around the P Shaft) is used to introduce the pneumatic pressure guiding gap in the previous case, so that the device of the ladder 2 can be reached. The 11-rotating movement of the money can be performed at the same time, so that the extractor can operate at high speed. The above and other objects can be accomplished by providing a semiconductor device that includes: a plurality of device modules for a body seal structure for transporting the semiconductor package structure, wherein each - Attached to the vertical bracket - lower m Μ 03 [1 pallet, σ cylinder, one penetrates the cylinder and has a: ==, drought, by the upward and upward direction of the cylinder rod The lower movement is not integrated with the cylinder rod seat, and the extractor is connected to the top end of the cylinder according to the vertical movement of the rainbow rod seat. The operation of the motor to rotate the detector may include: a detector shaft 'having a perforation formed therein __, for example, for introducing and discharging air; and a set In the =

a rotating joint of an upper portion of the two shafts, wherein the rotating device package 3' is a motor shaft that serves as a drive shaft of the motor; - is configured to surround a rotating shaft of the s-motor sleeve And a set of vehicles disposed on a motor base is surrounded by the bearing to rotate together while the motor shaft rotates; a first timing pulley (timing puUey) is mounted on the rotating shaft so that the rotating shaft = at the same time - the rotation -, is installed around the second (4) second timing $;, and - the timing of the connection with the first - timing and fresh two timing pulley Rotating the second timing slip while rotating the timing pulley may include: - being placed on the cylinder rod seat and configured to surround the first rotating bearing (__ beaHng) of the exit shaft, thereby guiding the crying ^ 纹转,- is placed into the motor seat and configured to surround the first-rotating bearing of the i-field* to guide the rotation of the diverter shaft; a ligand = around the dipper shaft And is placed into the red upwards and through the lower end of her body: T guides the axis of the extractor Rotation with

The second stroke linear axis of the body is guided so that the /X output shaft rotates simultaneously and upwards and downwards. Moving the vertical bracket may include a sensor for sensing the pop-up - up and down: step by step to understand the features and technical contents of the present invention, please refer to the sleeve, and (4) the sleeve side and the drawing. However, the disclosure is only for reference and is not intended to limit the invention. 12 1344190 [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings of the Appendix. The description of the difficult embodiments will be presented in detail, and it will be apparent to those skilled in the art. The fourth figure shows a perspective view of a portion of the semiconductor device according to the present invention, and the fifth ride is shown as a perspective view of the body of the extractor module of the root dream structure transport device. 々丰¥ body package

The semiconductor package technology transport device comprises: a H module body 100, a semiconductor structure, and a semiconductor package structure. Then, 彳;|Several ψ @ / q machine in 柃4^ plural check out green group 200 series with the same interval group = 捡 减 减 减 主体 。 。 。 In the circle, it can be clearly seen that the module body _ step-by-step includes the interval between the two modules 200. (4) Engraving The sixth figure shows a perspective view of the extractor module in the fifth figure, the sixth figure is a pure figure ' and the eighth figure is an exploded perspective view of the sixth figure. (V) Referring to the sixth and seventh figures, each of the inspections according to the present invention includes an ical bracket 21 〇. Similarly, the group includes - the cylinder wins - the cylinder rod holder 230, and the rainbow rod 24 (the ^ j extractor 250 is set on each of the vertical brackets 2). The vertical bracket 2丨0 is located. The surface of the body of the dipper module (10), and the cylinder 220 is attached to the lower surface of the vertical frame 21A. The cylinder rod holder 230 is connected to the lower end of the cylinder block 22 = the cylinder rod 240 and The ejector 250 is integrally formed. The pressure cylinder 230 and the cylinder rod 240 penetrate the cylinder 220 and have a lower end inserted therein and fixed to the cymbal 222. In order to move the cylinder rod 240 up and down, the cylinder block 22 has a The cylinder body 22 has a first pneumatic 埠 (pneumat 丨 〇 〇 )) 22i and a second pneumatic plucking device 250 integrally connected with the cylinder rod holder 23 〇 and the cylinder rod 24 , The up and down movement moves vertically. Therefore, the extractor module trace according to the present invention requires a secret device to sew a straight axis device - and can have a slim configuration setting. In order to extract the semiconductor package by suction Structure 3GG, the extractor 250 includes a dipper shaft 251 having a through hole (through, such as re) formed therein for introducing and discharging air, The rotary joint 252 to the upper portion of the detector shaft 251, and the lower end of the output shaft 251, and the suction nozzle 253 are extracted by the vacuum suction force and the semiconductor listening structure 3 (8). The output shaft 251 moves vertically within the cylinder 220 according to the up and down movement of the cylinder rod 24〇. The rotary joint 252 is used to connect an air tube (not shown) for injecting air into the outlet H. The perforation of the shaft 251, or the extraction of air from the dipper shaft 251. To reduce the problem of distortion of the air tube (not shown), the rotary joint 252 has a fixed upper portion and a rotatable lower portion. In the case of the characteristic type, the rotation of the extractor 250 is rotated by the operation of the motor 26〇, and is integrally assembled on the top end of the cylinder block 22. 1344190. Although it is shown in In the drawings, but preferably, the motor 260 houses an encoder for sensing the number of revolutions per minute of the motor 260. The rotating device 270 includes a motor shaft 27, a rotating shaft 272, a first timing pulley 273, and a Second timing pulley 274 and a timing belt 275. The motor shaft 271 is a rotating shaft 272 of the motor 26A and has a slender shape. The rotating shaft 272 is used to surround the slender motor shaft 271 for providing sufficient rotational force to the motor shaft 271. The rotating shaft 272 is surrounded by a bearing 276 assembled on a motor base 261. That is, the rotating shaft 272 is used to reinforce the rotational force of the motor 26 。. The first timing pulley 273 is configured. The second timing pulley 274 is configured to surround the diverter shaft 25 and the second timing pulley 274 is coupled to the first timing belt 275 by the timing belt 275. The timing pulley 273 is coupled and rotates simultaneously with the first timing pulley 273. In the above configuration configuration, if the motor shaft 271 is rotated by the operation of the motor 26, the rotary shaft 272 is simultaneously rotated. _ If this, the first timing pulley π around the rotating shaft milk will rotate simultaneously with the rotating shaft 272, and the second timing pulley 274 connected to the first timing pulley by the timing belt 2 will be the first positive When the pulley milk rotates at the same time. Therefore, the dipper shaft 252 surrounded by the second timing pulley 274 will follow. a In the present invention, since the rotating device 270 utilizes the operation of the motor 26'' to sway the diverter shaft 251', the dipper 25' can have various rotation angles. As described earlier in the prior art section, the conventional dipper shafting is limited in its angle of rotation by aerodynamic 'outdegrees'. In addition, 'there is no precision: tooth 2 = turn' is controlled by the operation of t in the position of the rotary position, and the extractor - can be rotated at various angles - step includes - first - rotary bearing 2 Μ, 255 :=f sex._ and - the second stroke bearing 255 is placed into the cylinder rod holder 230' and the second rotating shaft surrounds the dipper (four) to guide the crucible;: the diceper shaft 251 With the second timing pulley 274 belt = 5; the bearing 254 and the second rotating bearing 255 will support the weight i' of the yoke shaft 251 to guide the ejector shaft 251 to rotate. = The 1st linear axis condition and the second stroke linear bushing 257 are used for the 捡 (4) axis 25 丨, and the 丨 (4) axis 251 is used for the rotation of the upper and lower shafts 251. The lower end of the first stroke linear shaft bushing 220 is placed in the cylinder 220, and the second stroke linear bushing 257 is also inserted into the rainbow body 22 through the upper end of the cylinder 220. By using the first-stroke linear bushing and the second stroke linear axis to guide the linear motion and rotation of the dipper shaft 251, the dipper can achieve a larger contact area, and the rotation accuracy is also more Upgrade. In addition, the 减 减 251 can be rotated while moving vertically, so that the 344 1344190 ejector shaft 25 丨 can operate at high speed. In addition, the above-described conventional pneumatic screw is introduced into the gap, resulting in low rotational accuracy == the shaft needs to be pneumatically operated according to the present invention, and the size of the device is known around the extractor wheel (5). On the contrary, the roots are used to guide the upper and lower movements of the extractor (4), and the φ, 257 and 257 bushings are also slim and lighter than those of the prior art. The ejector made by the caliper At the same time, the vertical bracket 2 〇 Φ the upward movement of the ejector 250. The sensor 211 for sensing will then briefly describe the operation according to the present invention. The body package structure transports the money '(4) to record (4) the half object, use the type of the extractor mold, the group body (10), and move to - half her cell structure 2 = ^ domain (10) will be leveled next, control compressed air In order to pour in the first fish, let the compressed air move into the cylinder rod 24; the milk bee 221 moves downward. So, the rainbow rod holder 230 is moved downward by the closeness of the crucible shaft 25丨, and the height of the crucible is 25丨^==230. After the contact is reached, the air is sucked into the ejector shaft 251 as it moves downward, allowing the ejector 250 to pull out the semiconductor package structure. y At the same time, if it is necessary to change the square 1344190 direction of the semiconductor package structure 3 (8) to be removed, the angle of the motor 260 can be controlled. f sells transport operations 6 is a well-known technology, shame detailed description. The present invention discloses a semiconductor package structure according to the present invention. According to the present invention, the ejector 25G is vertically moved integrally with the cylinder rod 而 according to the up and down movement of the cylinder rod 24G, while borrowing

^ Da Shi's operation and rotation. Thus, controlling the operation of motor 260, the extractor 250 can be rotated at various angles. Secondly, in accordance with the present invention, the stroke of the scooping shaft 25 is closely spaced 1 to 256, 257 is used to guide the rotation and vertical movement of the diverter 250 without the need to provide pneumatic pressure as in the conventional manner. . This can make the splitting more delicate than the previous one. In addition, 纟 simultaneous rotation and vertical movement, so the ejector 25 〇 can achieve high speed operation.

The operation 'controls the third rotation of the dipper shaft 251' when the vertical motion and rotation of the detector 25 引导 is guided by the two-stroke linear bushings 256, 257, since the dipper shaft 251 and the two-stroke linear axis are 256 The near contact area between 257 and 257 increases, so that the rotation accuracy of the ^ 25 25 可以 can be improved. While the invention has been described by the preferred embodiments of the present invention, it is understood that the invention may be practiced otherwise without departing from the spirit and scope of the invention as defined by the appended claims. Limbs, new or deleted. [Simple description of the map]: The second picture is the three-part series of the patent of the 5th book of the country, and the right one, the perspective view of the extractor module of the movable type extractor. = Stereo view of the rotating pneumatic extractor. (10) ~ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The figure is a perspective view of the structure transfer device of the swivel county of the present invention. The sixth figure is the 捡(four) mode_stereograph of the fifth figure. The seventh figure is the front view of the sixth figure. The eighth figure is the exploded perspective view of the sixth figure. [Main component symbol description] [Practical] Cylinder block 11 - Axial pneumatic 埠 1 ^ a First axial pneumatic cavity 12 Second axial pneumatic 埠 12a Second axial pneumatic cavity 13 Sphere locator 13a Sealing part 13b Sphere support hole ball 14 1344190 15 Sphere linear guide groove 15a Linear guide groove 20 Polar axis 22 Suction pad 30 Cylinder guide groove 31 First guide shaft 32 First pneumatic passage 33 Second guide shaft 34 Second pneumatic passage 40 Mode Group body 42 vertical rod 50 servo motor 60 semiconductor package junction [Invention] 100 ejector module body 110 interval adjusting device 200 ejector module 210 vertical bracket 211 sensor 220 cylinder 221 first pneumatic 埠 222 second pneumatic 埠 230 cylinder rod holder 20 240 250 Cylinder stem 251 ejector shaft 252 rotary joint 253 suction nozzle 254 first rotary bearing 255 second rotary bearing 256 first stroke linear bushing 257 second stroke linear bushing motor 261 motor seat rotating device 271 motor Axis 272 Rotary shaft 273 First timing pulley 274 Second timing pulley 275 Timing belt 276 Bearing 1344190 260 270 300 Semiconductor package structure

Claims (1)

1344190 X. Patent Application Range: A semiconductor package structure conveying device comprising: a plurality of extractor modules for extracting and inverting the semiconductor package to transport the semiconductor package structure; Each of the modules includes: a vertical bracket; a cylinder attached to the lower end of the vertical bracket; - penetrating the cylinder and having an upward and downward movement of the lower end to move the rod vertically Cylinder stem; wrong with the cylinder ▲ H-class body and the & pole-body shaft connected to the vertical movement of the cylinder rod seat. According to the 褒 structure; the movement (4) straight cranes (4) 鳞 鳞 该 该 该 该 该 该 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体And the mess is made up of a horse, which is thin and torn, and the material is mixed. The air shaft is formed by a perforation formed in the order to introduce it with the 梆 苴 苴 and 5 捡 器a rotary joint of the upper portion of the shaft, and the rotary device of the eighth portion includes: a motor shaft as a drive shaft of the motor; a rotary shaft for the motor shaft 31 on the seat, and is assembled to a bearing of the motor Surrounded so as to rotate together while the motor shaft rotates; at the same time as 22 丄 呼 旋转 ^ ^ = = = 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 蝴 从而 从而 从而 从而 从而 从而 从而 从而 从而a pulley; and a timing belt that is coupled to the second timing pulley and the second timing pulley, rotates the second timing pulley from 3 turns. Among them, such as ΐίΓqing 2 items Chen _ _ 灵 轮, _=; == ^ _ _ _ _ _ _ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ Guided to thereby guide the rotation of the diverter shaft; - 疋 placed; = linearly lining the first stroke of the cylinder with the output shaft and the lower end of the body, thereby guiding the tumbling and upward and upward And the same day (10) is configured to be placed around the extractor shaft and through the upper end of the cylinder to be placed into the second stroke linear bushing of the cylinder, thereby guiding the extractor shaft Turn; move up and down. 4. The semiconductor package structure wheel of claim 2, wherein the vertical bracket includes a sensor for sensing the "f" motion of the output. . Above 23