TW200827034A - Nozzle for jetting fluid - Google Patents

Abstract

The present invention relates to a nozzle for jetting fluid, which includes a nozzle body formed by a pair of plates and an jetting hole for jetting fluid to a substrate; and a flowing path formed in the nozzle body for guiding the fluid from the jetting hole, wherein the jetting area of the jetting hole is larger than the cross sectional area of the flowing path. This structure reduces the flowing speed of the fluid passing through the flowing path and then jets out the fluid. The nozzle for jetting fluid has the advantage of being able to increase the adhesive force between the fluid and the inner surface of the flowing path due to the narrower width of the flowing path formed inside the nozzle, so that the remained fluid may stop flowing when the valve is closed, thereby preventing unnecessary fluid jetting and thus saving fluid.

Description

200827034 IX. Description of the invention: [Technical field to which the meal belongs] The present invention relates to a fluid nozzle, and more particularly to a fluid nozzle capable of uniformly spraying a chemical solution by improving its structure. [Prior Art] Generally, a fluid nozzle is a device that ejects a fluid such as a chemical liquid onto a surface of a substrate. The fluid nozzle can be applied to various fields depending on its use. In other words, the fluid nozzle can be applied to a coating device that applies a chemical solution on a substrate to form a coating layer, a developing device that develops a substrate by using a chemical solution, and a cleaning device that removes foreign matter on the substrate by spraying a cleaning liquid. . 1 and 2 illustrate schematic views of a fluid nozzle used on a developing device. As shown in FIG. 1, the nozzle body 2 of the fluid nozzle i is disposed on the substrate G. Further, a chemical liquid supply pipe 6 for supplying a liquid medicine is connected to the nozzle body 2. Thereby, the chemical liquid W supplied from the chemical solution supply pipe 6 is ejected onto the upper surface of the substrate G through the discharge port N of the nozzle body 2. In this way, the nozzle body 2 is composed of the first plate body 4 and the second plate body 3, and the first plate body 4 and the second plate body 3 are disposed at a predetermined distance so as to be between the two plates. A flow path is formed, and a discharge port N is formed at the end of the flow path. The liquid W is ejected outward through the discharge port N. However, in the prior art fluid nozzle, when the chemical liquid is ejected through the nozzle, the chemical liquid is ejected at a high speed along a linear path and then comes into contact with the substrate. At this time, since the chemical liquid ejected at a high speed is in contact with the substrate, the surface formed by the ejected liquid on the substrate is uneven and corrugated, which causes an obstacle in the production process of 200827034. In order to overcome the above problems, the liquid medicine, the speed, the mouth outlet inside the table = the mouth of the drug solution, the cross section to make: the force between the molecules of Chengle liquid is relatively large, and the attached force is weakened' - 'Cause the liquid to be sprayed in an uneven state. ❿ ❿ 乐 相互 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 【 a nozzle body, which is provided by - (four); a fluid nozzle comprising: a discharge port; and a flow path formed in the nozzle body to guide the fluid in the direction of the outlet of the fluid ejected from the substrate. 'and for the nozzle to the cross-sectional surface of the flow path: the discharge surface area of the end of the mouth is substantially decelerated and then ejected. The fluid nozzle provided by the flow through the flow path can be made The first advantage is that since the flow path formed inside the nozzle is relatively narrow, the fluid stops the residual fluid when it adheres to the inner surface of the flow path. Therefore, the valve can be closed to reduce the amount of fluid used. Therefore, unnecessary fluid is prevented from being ejected, and secondly, since the discharge area of the discharge port is larger than the cross-sectional area of the flow path, the large fluid can be ejected at a low speed. First, since a curvature Φ is formed on the discharge port, The fluid can be ejected along the curved surface, because ilt can cause a large amount of fluid to be ejected to the substrate at a low speed. The fourth 'the structure of the chamber on the flow path allows the fluid flowing through the flow path 200827034 to temporarily stay in the chamber. Therefore, such a structure allows the fluid to flow uniformly on the flow path. [Embodiment] Hereinafter, a fluid nozzle structure of a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. The fluid nozzle can be applied to a developing device, coating The device and the cleaning device, but only the application to the developing device will be described below.

Figure 3 is a simplified perspective view of a fluid nozzle of a preferred embodiment of the present invention, and Figure 4 is a front elevational view of the fluid nozzle of Figure 3.

It can be disposed above the substrate G conveyed by the fluid nozzle i 本 of the present invention by the roller R as shown. The fluid nozzle 1 has a discharge port N for injecting a fluid W (hereinafter referred to as a liquid) to the substrate, and includes a fluid supply for supplying the liquid to the nozzle 10. The tube 18 (hereinafter referred to as a chemical solution supply tube. The fluid nozzle 10 after the installation has an angle with the substrate ^. Therefore, by the fluid spray, ':

Spray in the opposite direction of advancement. As shown in FIG. 4 to FIG. 6 , the liquid liquid W of the embodiment is composed of a nozzle body 12 which is composed of a spray-on-plate body in which the liquid nozzle μ plate G of the specific embodiment is sprayed with the liquid medicine, and It has a flow guide for the inside of the basic body 12, and is used for forming a sulphur at the nozzle, and an outlet Ν constituting the nozzle body 丨2 σ I. a pair of slabs, including two slabs, 14 of which, the first - a scorpion, a plate and a

The body 16 is adjacent to the first plate 14 and the first plate μ substrate G, and the second slave body 16 is disposed in a relative manner, and by 7 200827034 other connecting members (not shown) and the first — The shape of the body is cuboid. The plates 16 are connected. The plate is disposed in which the first plate body 16 and the first portion are disposed, and the two are separated by a predetermined distance to form a flow path 2 〇. As described above, the flow path 20 can form the first plate body by the connection of the two members of the second plate body 14 and the inside of the mountain. Can also be on a board

In addition, the plurality of chemical liquid supply tubes

Preferably, the plurality of chemical liquids are supplied between the rectangular parallelepiped nozzles (4) and the nozzle body U supply tubes 18. The spacing of the pre-twisting is to provide a width t of 2 〇 to the flow path. For example, the width t is narrower than that of the existing device, and the flow path is formed within a predetermined range with a twist range of 〇.lmm to l9 mm. The current flow path width is 2.0 mm. In this way, when the width t of the flow path 20 is narrow, the flow rate per unit area is reduced, and the adhesion between the inner surface of the flow path 20 and the chemical solution w is increased by 0, that is, the chemical liquid W and the flow are applied. The adhesion between the inner surfaces of the road 20 will overcome the attraction between the liquid chemicals. Therefore, the chemical liquid w that has flowed out through the flow path 20 tends to flow down along the inner surface of the flat flow path 20 as compared with the tendency of the chemical liquid w to flow out. Therefore, the chemical solution W can be uniformly ejected through the inner surface of the flat flow path 20. Further, the chemical supply pipe 1 for supplying the chemical liquid W to the flow path 20 can efficiently eject the fluid by the switching function of 8 200827034. That is, if the flow path to the nozzle 12 is blocked, since the liquid medicine w does not continue, the gravity of the singularity is less than the convection path; ,: Table Therefore, the liquid medicine w remaining in the flow path 2〇 stays at a certain position. The effect of the attachment force is that the switching function of the nozzle 12 can prevent unnecessary defects and save about 50% of the liquid medicine. In addition, a cavity c is formed on the flow path 20, and the M W is guided to cause the liquid medicine to be ejected more uniformly. That is, the chamber C is a groove having a half-shaped cross section formed at a predetermined depth on the surface of the first-plate 16 . The chamber C is formed in a lateral direction on the surface of the first plate body 16. Therefore, the chemical liquid w flowing down through the flow path 20 is stored in the chamber C, and then mixed with each other in the chamber c. Further, if a predetermined amount of the chemical liquid W is stored inside the chamber c, it overflows, so that the chemical liquid w flows down the flow path 2〇. In this way, during the passage of the chemical liquid W through the chamber C, when flowing through the upper region of the flow path 20, that is, through the upper portion of the chamber C, since the chemical liquid w is in contact with the inner surface of the flow path 20, the liquid medicine w The fluidity increases and thus flows down in an uneven state. Therefore, by providing the chamber C, the inflowing chemical liquid w can be temporarily stored and mixed in the chamber C, and then flowed downward through the lower region of the flow path 20. By this process, the chemical liquids W can be mixed with each other, and can be ejected in a state in which the average sentence is 200827034. In the above description, the cross-sectional shape of the chamber c is semicircular, but the present invention. The shape is limited to the above, and the third is that the liquid medicine can be stored, as long as the other side of the present invention is as shown in FIG. 6 'the outlet of the invention N: the second brother: the end portion 25 of the plate body 16 and the second plate body The width U of the end portion 22 of the end portion 22 is larger than the width t of the flow path 20. Since the discharge surface area of the discharge port portion is larger than the cross-sectional area of the flow path, the chemical liquid w passing through the flow path 2 can be decelerated and ejected. Further, in the embodiment of the present invention, the end portion 25 of the first plate body 16 is more convex toward the substrate G than the end portion of the second plate body 14. The cymbal of the vehicle is formed with a curved surface 24 at the end portion 25 of the discharge port N of the first plate body 16. Specifically, the reason why the end portion 25 of the first plate body 16 is protruded more toward the substrate G than the end portion 22 of the second plate 14 is to make the end portion 25 of the first plate body 16 and the first portion The end portions 22 of the second plate body I* have a predetermined degree difference t2 between them so that the chemical liquid W is ejected along the first plate body 16 disposed adjacent to the substrate G. A curved surface 24 is formed on the end portion 25 of the first plate body 16, so that the chemical liquid can be ejected from the curved surface 24 and ejected between the bottom surface of the first plate body 16 and the upper surface of the substrate G. At this time, the bottom surface of the first plate body 16 can be in contact with the upper layer of the chemical liquid sprayed on the substrate g. Therefore, a large amount of the chemical liquid W can be sprayed along the lower end of the body 16 of the first plate 10 200827034 at a low speed state, and then is in line contact with the surface of the substrate g, thereby being uniformly distributed on the substrate G b. The (four) liquid W is more uniformly distributed on the substrate from the bottom surface of the first plate body 16 and the chemical liquid. The operation of the k-body nozzle of a preferred embodiment of the present invention will be further described in detail with reference to the accompanying drawings. As shown in Figs. 3 to 6, the liquid medicine supply pipe 18 is in the flow path 20 of Γ, 12 . At this time, if the flow path is seen as: t is narrower, the flow per unit area can be reduced, and the adhesion between the inner surface and the chemical liquid W can be reduced. 1 Θ k over ° Hai flowway 20 out of the liquid medicine w, compared with the tendency of mutual political water, where the British giant Asia dominate. Therefore, the Hua:: The tendency of the inner surface of the road to flow down at 2° is sprinkled. ^ W can be made by the inner surface of the flat flow path 20. The liquid medicine w that has passed through the flow path 20 can pass through the chamber c uniformly, that is, flow through the flow path 2 α α u, ^ . Area %, due to the increase in fluidity, may be infiltrated by + Θ刁 向下The table liquid w is temporarily stored in the chamber C and flows out in the 2° section of the flow path. Therefore, the rate and night W can flow out in a state where the mixed u liquid is more uniform.

Thus, the chemical solution w can be stained with A and ejected through the discharge port N. The state of the :: is via the flow path 2 〇 inside. In addition, the liquid liquid can be efficiently ejected from the general dying by the switching function, that is, if the liquid medicine supplied to the nozzle 2 and the flow path 2 of the corner 12 is blocked w From 200827034, the liquid medicine w cannot be continuously supplied, so the gravity of the liquid medicine w will be smaller than the adhesion to the inner surface of the flow path 20. Therefore, the liquid remaining in the inside of the flow path 20 will stop flowing and stay at a certain position under the action of the adhesion. By the above-described switching function of the nozzle 12, w can be prevented from being ejected, thereby saving about 50% of the chemical liquid w. The desired liquid so that the chemical solution w flowing through the flow path 20 can be ejected on the surface of the substrate G through the discharge port N. At this time, the visibility 11 of the discharge port N, 肷ο η / λ is greater than the flow

The visibility of road 20 is t. That is, the discharge port N has a larger surface area than the cross-sectional area of the flow path 20, so that the crucible is ejected. The first plate body 16 is further reduced in the direction of the substrate G from the end portion 25 of the end portion 22 of the second plate body 14 in comparison with the deceleration of the chemical solution passing through the flow path 2〇. More convex, a curved surface 24 is formed on the end portion 25 of the discharge port N

With this configuration, the medicine ejected by the ejection of the crucible n can be discharged from one side of the first plate body 16. At the second step, the discharged chemical solution is ejected along the curved surface 24, #μ formed on the end portion 25 of the first plate body 16. The bottom surface of the plate body 16 and the bottom surface of the upper surface of the substrate can be in contact with the surface of the substrate, which is in contact with the upper layer of the first plate. Therefore, the female Dan ΑΑ #, 里 乐 乐 W W is in the low-speed state along the lower end of the first plate 16 and is in line contact with the surface of the substrate G, thereby being uniformly distributed on the substrate G. The upper or lower contact of the bottom surface of the first plate body 16 with the upper layer of the chemical solution 12, 200827034 causes the chemical solution w to be more evenly distributed on the substrate. Through the above process, the drug solution w can be distributed on the substrate in a uniform state. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view of a conventional fluid nozzle structure. Figure 2 is a front elevational view of the prior art fluid nozzle structure of Figure 1. 3A is a perspective view of a fluid nozzle according to a specific embodiment of the present invention. Fig. 4 is a front view of the fluid nozzle shown in Fig. 3. Fig. 5 is a side elevational view of the fluid nozzle shown in Fig. 3. Fig. 6 is a partial enlarged view of the discharge port of the fluid nozzle shown in Fig. 5. [Description of main components] Fluid nozzle 2 3 4 6 10 12 14 16 18 20 24 Nozzle body second plate body first plate body chemical liquid supply pipe nozzle nozzle body one plate body second plate body fluid supply pipe (medicine supply pipe) flow path surface 13 200827034 22,25 End C chamber G Substrate N Outlet R Roller t > tl Width t2 South degree difference W Liquid

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Claims (1)

200827034 X. Patent application group: 1 · A fluid nozzle, including: 俨:! The body ' is composed of a pair of plates and has a rent outlet for discharging a fluid to the substrate; a path formed inside the nozzle body and for guiding the fluid toward the discharge port, 'where the end of the discharge port The discharge surface area is larger than the cross-sectional area % of the flow path so that the fluid passing through the flow path is decelerated and ejected. 2. The fluid nozzle according to claim 2, wherein the 兮 nozzle body comprises: μ a first plate body disposed at a position adjacent to the substrate, and a second plate body disposed at the first The upper side of the plate body is connected to the first plate body, and the end portion of the first plate body is more convex toward the substrate direction than the end portion of the first plate body. 3. The fluid nozzle of claim 2, wherein: the end of the first plate of the first plate body is a curved surface. 4. The fluid nozzle of claim </ RTI> wherein: the hai sluice has a flow between the fluid and the inner surface of the flow path to stop fluid flow when the flow of the fluid is blocked. The width. 5. The fluid nozzle of any one of clauses 4 to 4, wherein the step further comprises a chamber formed on the flow path and having a predetermined volume, The fluid flowing through the flow path can be stored (4), and then the fluid can be flowed down. The fluid nozzle of claim 3, wherein: the flow system ejected by the ejection port is ejected along a curved surface and is in line contact with the substrate, and the lower end of the first plate is The fluid on the substrate is in contact such that the fluid is evenly applied to the substrate. XI. Schema: As the next page. 16