KR101394264B1 - Apparatus for jetting fluid - Google Patents

Abstract

The present invention relates to a fluid ejecting apparatus capable of increasing cleaning efficiency when a substrate is cleaned by ejecting a mixed fluid in which a liquid and a gas are mixed in a substrate processing apparatus.
To this end, the present invention relates to an internal plate for forming a gas outlet passage through which gas flows; An outer plate forming a first liquid outlet flow path through which the first liquid flows and a second liquid outlet flow path through which the second liquid flows while at least a portion of the inner plate is arranged to face the inner plate; And a mixed fluid injecting portion for injecting a mixed fluid in which the gas, the first liquid, and the second liquid are mixed, wherein the first liquid outlet passage and the second liquid outlet passage are provided with respect to the gas outlet passage And the fluid injection device is formed so as to face each other.

Description

[0001] Apparatus for jetting fluid [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a fluid ejection apparatus, and more particularly, to a fluid ejection apparatus capable of increasing cleaning efficiency for a substrate when cleaning a substrate while ejecting a mixed fluid containing a liquid and a gas.

Generally, a fluid ejection device can be used to eject fluid to the substrate to clean the substrate. The fluid ejection device is installed in a posture that crosses the section through which the substrate is conveyed for cleaning the substrate.

In the fluid ejection apparatus, two plates are fastened by fastening members, one plate is formed with a liquid chamber filled with DI water, and the other is formed with a gas chamber (CDA) Respectively.

When the gas of the gas chamber is injected onto the upper surface of the substrate, the liquid in the liquid chamber is injected together with the upper surface of the substrate to clean the substrate surface.

However, the conventional fluid ejecting apparatus has a problem in that the impact force against the substrate is small as compared with a high-pressure ejecting apparatus that ejects liquid at a high pressure, resulting in low cleaning efficiency for removing impurities from the substrate.

Korean Patent Registration No. 10-0901380 (entitled: Fluid Injection Apparatus)

Disclosure of Invention Technical Problem [8] The present invention provides a fluid ejecting apparatus capable of increasing the cleaning efficiency of a substrate by increasing an impact force of a mixed fluid hitting a surface of a substrate to be cleaned.

Another object of the present invention is to provide a fluid ejection device in which a mixed fluid can be evenly injected over an entire injection section in which a mixed fluid is injected.

In order to solve the above-described problems, the present invention provides an internal combustion engine comprising: an inner plate forming a gas outlet passage through which gas flows; An outer plate forming a first liquid outlet flow path through which the first liquid flows and a second liquid outlet flow path through which the second liquid flows while at least a portion of the inner plate is arranged to face the inner plate; And a mixed fluid injecting portion for injecting a mixed fluid in which the gas, the first liquid, and the second liquid are mixed, wherein the first liquid outlet passage and the second liquid outlet passage are provided with respect to the gas outlet passage And the fluid injection device is formed so as to face each other.

The inner plate may include a first inner plate and a second inner plate which is disposed to be opposed to the first inner plate to form the gas outlet passage.

Wherein the outer plate has a first outer plate disposed on an outer surface of the first inner plate and at least a portion of which is disposed to face the lower surface of the first inner plate to form the first liquid outlet flow passage, And a second outer plate disposed on the outer surface of the plate and forming at least a portion of the second liquid outlet flow path while being disposed to abut against the lower surface of the second inner plate.

The mixed fluid injecting unit may include a lower body of the first outer plate and a lower body of the second outer plate disposed opposite to each other to form a mixed fluid injection path through which the mixed fluid flows.

The fluid ejection apparatus may further include an upper plate disposed on the first inner plate and the second inner plate and having a gas supply portion communicating with the gas outlet passage.

The first outer plate may be provided with a first liquid supply portion communicating with the first liquid outlet flow path, and the second outer plate may be provided with a second liquid supply portion communicating with the second liquid outlet flow path.

Sectional area of the first liquid supply portion becomes smaller toward the first liquid outlet flow path, and the cross-sectional area of the second liquid supply portion becomes smaller toward the second liquid outlet flow path.

The fluid ejection apparatus further includes a first inner engaging member for engaging the first inner plate and the first outer plate and a second inner engaging member for engaging the second inner plate and the second outer plate can do.

The fluid ejection apparatus further includes a first upper engaging member for engaging the upper plate and the first outer plate, a second upper engaging member for engaging the upper plate and the second outer plate, And a second sealing member disposed between the upper plate and the first outer plate to prevent leakage of the base body and a second sealing member disposed between the upper plate and the second outer plate to prevent leakage of the base body can do.

Wherein the first inner plate and the second inner plate each have a first inner engaging portion and a second inner engaging portion protruding from the first inner engaging portion and the second inner engaging portion, An inner space is formed between the first inner plate and the second inner plate, and the inner space can be at least a part of the gas outlet passage.

The side surfaces of the first inner coupling portion and the second inner coupling portion may be formed in a streamline shape so that the gas is gently moved downward.

The first inner coupling portion includes a first upper inner joint portion formed in an upper region of the first inner plate and a first lower inner joint portion formed in a lower region of the first inner plate, The upper region inner joining portion and the first lower region inner joining portion may be staggered along the longitudinal direction.

The lower body of the first inner plate and the lower body of the second inner plate are arranged to face each other so as to form a terminal region of the gas outlet passage and the protruding lengths of the first inner engaging portion and the second inner engaging portion It can be projected shorter.

According to another embodiment of the present invention, the fluid ejection apparatus is configured so that the first liquid and the second liquid in the mixed region where the gas, the first liquid, and the second liquid are mixed are smoothly A first flow guide and a second flow guide may be respectively formed on the lower end of the first inner plate and the lower end of the second inner plate to allow the flow guide to flow.

According to still another aspect of the present invention, in order to increase the impact force of the mixed fluid on the substrate disposed on the surface perpendicular to the mixed fluid injection path, the first liquid outlet flow path and the second liquid outlet flow path And may be formed at an acute angle with the gas outlet passage.

The effect of the fluid ejection apparatus according to the present invention will be described below.

First, the first liquid outlet flow path and the second liquid outlet flow path are arranged so as to be opposed to each other with respect to the gas outlet flow path so that the non-uniform opposite velocity components of the first liquid and the second liquid in the mixing region where the gas and the liquid are mixed And the mixed fluid is uniformly sprayed over the entire spraying section.

Second, even when the first liquid and the second liquid are pressurized with the same pressure as compared with the conventional fluid ejection apparatus, the cross-sectional area of the first liquid supply portion and the second liquid supply portion is small, so that the impact force of the mixed fluid hitting the substrate is increased , Thereby improving the cleaning efficiency. In addition, there is an advantage that the operation cost of the substrate cleaning equipment can be reduced by reducing the amount of gas and liquid consumed for cleaning the substrate.

Third, the gas outlet flow path is formed between the first inner plate and the second inner plate while the first inner coupling portion and the second inner coupling portion are coupled to each other, and the side surfaces of the first inner coupling portion and the second inner coupling portion And the flow resistance against gas movement can be reduced by being formed in a streamlined shape.

1 is a perspective view showing a first embodiment of a state in which a fluid ejection apparatus according to the present invention is used.
Fig. 2 is an exploded perspective view of the essential part of the fluid injection device of Fig. 1;
3 is a sectional view taken along the line II 'in FIG.
4 is a sectional view taken along line II-II 'of FIG.
5 is a sectional view taken along line III-III 'of FIG.
6 is an enlarged view of the area A in Fig.
7 is a cross-sectional view illustrating flow paths of a mixed region formed in a second embodiment of the fluid ejection apparatus according to the present invention.
8 is a cross-sectional view illustrating flow paths of a mixed region formed in a fluid injecting apparatus according to a third embodiment of the present invention.
9 is a cross-sectional view illustrating flow paths of a mixed region formed in a fluid injecting apparatus according to a fourth embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention in which the above-mentioned problems to be solved can be specifically realized will be described with reference to the accompanying drawings. In describing the embodiments, the same names and the same symbols are used for the same configurations, and additional description therefor will be omitted below.

1 to 6, a first embodiment of a fluid ejection apparatus according to the present invention will be described.

The fluid ejection apparatus according to the present embodiment includes an inner plate, an outer plate, and a mixed fluid ejection portion.

The inner plate forms a gas outlet passage (P1) through which gas flows. Specifically, the inner plate includes a first inner plate 400 and a second inner plate 500 which is arranged to face the first inner plate 400 and form the gas outlet passage P1.

The outer plate has a first liquid outlet passage (P3) through which the first liquid flows and at least a second liquid outlet passage (P2) through which the second liquid flows while at least a portion of the outer plate is disposed to abut against the inner plate.

Specifically, the outer plate is disposed on the outer surface of the first inner plate 400, and at least a portion of the outer plate is disposed to face the lower surface of the first inner plate 400 while the first liquid outlet passage P3 The second inner plate 500 and the second inner plate 500. The first outer plate 200 and the second inner plate 500 are disposed on the outer surface of the second inner plate 500, And a second outer plate (300) forming a second plate (P2).

Here, the first liquid outlet passage (P3) and the second liquid outlet passage (P2) are formed so as to face each other with reference to the gas outlet passage (P1). Specifically, the first liquid outlet passage (P3) and the second liquid outlet passage (P2) are formed such that the first liquid and the second liquid flow in opposite directions to each other while being directed toward the gas outlet passage (P1) do.

The mixed fluid injecting unit injects a mixed fluid in which the gas, the first liquid, and the second liquid are mixed.

Specifically, the mixed fluid jetting unit may include a lower body 220 of the first outer plate and a lower body 220 of the second outer plate, which are disposed to face each other to form a mixed fluid injection path P4 through which the mixed fluid flows, 320).

That is, the mixed fluid injection unit is implemented by the lower body 220 of the first outer plate and the lower body 320 of the second outer plate.

The present invention is not limited to this, and the mixed fluid jetting part may be formed as a part separate from the outer plate and the inner plate and may be combined with the inner plate or the outer plate.

The fluid ejection apparatus includes a first inner plate 400 and an upper plate 500 disposed on the second inner plate 500 and having a gas supply unit 130 communicating with the gas outlet passage P1, (100).

The fluid ejection apparatus further includes a first inner coupling member 50 for coupling the first inner plate 400 and the first outer plate 200 and a second inner coupling member 50 for coupling the second inner plate 500 and the second outer plate 200 to each other. And a second inner engaging member (60) for engaging the outer plate (300).

The fluid ejection apparatus includes a first upper coupling member 10 for coupling the upper plate 100 and the first outer plate 200 and a second upper coupling member 10 for coupling the upper plate 100 and the second outer plate 300 And a second upper joining member 20 for joining the first joining member 20 and the second joining member 20.

The fluid ejection apparatus further includes a first fastening member for fastening the first outer plate 200, the first inner plate 400, the second inner plate 500, and the second outer plate 300 together Member 30, and a second fastening member 40. As shown in Fig.

The fluid ejection apparatus further includes a first sealing member (not shown) disposed between the upper plate 100 and the first outer plate 200 and a second sealing member A third sealing member (not shown) disposed between the first outer plate 200 and the first inner plate 400, and a second sealing member (not shown) And a fourth sealing member (not shown) disposed between the plate 300 and the second inner plate 500.

Specifically, the upper plate 100 is disposed on top of the first inner plate 400, the second inner plate 500, the first outer plate 200, and the second outer plate 300 .

The upper plate 100 includes an upper plate body 110 and a gas supply part 130 through which the gas is supplied is recessed inside the lower part of the upper plate body 110. Clean air (CDA), which is clean dry air, is used as the gas.

The gas supply unit 130 communicates with the gas outlet passage P1 formed between the first inner plate 400 and the second inner plate 500. [

A first upper through hole 111 and a second upper through hole 113 through which the first upper coupling member 10 and the second upper coupling member 20 pass are formed on both sides of the upper plate body 110 Respectively.

The first outer plate 200 includes a first outer plate upper body 210 and a first outer plate upper body 210 that are stepped from the first outer plate upper body 210 and protrude toward the first inner plate 400 And a first outer plate lower body 220.

The first outer plate upper body 210 has a first outer upper engagement groove 211 formed on an upper surface thereof to which the first upper engagement member 10 is coupled and fixed.

A first sealing member insertion groove 217 is formed on the upper surface of the first outer plate upper body 210 to receive the first sealing member (not shown).

The first outer plate upper body 210 is formed with an inner surface thereof with a first liquid supply portion 230 through which the first liquid is supplied. The first liquid supply portion 230 communicates with the first liquid outlet passage P3. DI water is used as the first liquid.

Here, the cross-sectional area of the first liquid supply portion 230 becomes smaller as it gets closer to the first liquid outlet flow path P3. Specifically, when the cross-sectional area of the first liquid supply unit 230 becomes smaller toward the first section 231, the second section 233, and the third section 235, when the different conditions are the same, The pressure loss becomes smaller than when the sectional area of the liquid supply part 230 is formed only in the first section 231 and the third section 235. [

As a result, even when the first liquid is pressurized with the same pressure as in the conventional fluid ejection apparatus, the cross-sectional area of the first liquid supply unit 230 is gradually reduced to increase the impact force of the mixed fluid hitting the substrate G .

In addition, since the volume of the first liquid supply unit 230 is smaller than that of the conventional liquid supply unit 230, the discharge rate of the same liquid is higher than that of the conventional liquid discharge unit 230, .

A first outer upper fixing groove 213 to which the first inner fitting member 50 is fixed is formed in an upper area of the inner surface of the first outer plate upper body 210.

In addition, a first outer upper coupling groove 218 is formed in the upper region of the inner surface of the first outer plate upper body 210 to fasten the first coupling member 30. Here, the first outer upper fixing groove 213 and the first outer upper coupling groove 218 are alternately formed.

A first outer lower coupling part 240 is formed on an inner lower side of the first outer plate upper body 210 and the second coupling lower part 240 is coupled to the second coupling part 40 The first outer lower engagement groove 215 is formed.

Meanwhile, the first inner plate 400 is disposed to abut against the second inner plate 500 on the inner side, and is disposed to abut against the first outer plate 200 on the outer side. The first inner plate 400 is disposed to face the second inner plate 500 to form a gas outlet passage P1 through which the gas flows.

The first inner plate 400 includes a first inner plate upper body 410 and a first inner plate upper body 410 and a second inner plate upper body 410. The first inner plate 400 includes a first inner plate upper body 410, And an inner plate lower body 450.

The first inner plate upper body 410 is formed with a first inner engaging portion protruding from the first inner plate upper body 410 for engaging with the second inner plate 500.

The first inner coupling portion includes a first upper region inner coupling portion 420 formed at an upper region of the first inner plate upper body 410 and a second upper inner coupling portion 420 formed at a lower region of the first inner plate upper body 410 And a first lower region inner engaging portion 440.

The side surfaces of the first upper inner joint part 420 and the first lower inner joint part 440 are formed in a streamlined shape so as to smoothly move the base downward.

Here, the first inner coupling part is coupled to the second inner coupling part of the second inner plate 500, and the first inner coupling part is interposed between the first inner plate 400 and the second inner plate 500, And the inner space becomes a part of the gas outlet passage P1.

The first upper inner joining portion 420 is formed with a first inner upper joining hole 411 through which the first joining member 30 passes, A first inner lower fastening hole 415 through which the second fastening member 40 passes is formed.

Here, the first upper inner joint part 420 and the first lower inner joint part 440 are staggered along the longitudinal direction of the first inner plate 400.

A first inner upper fixing hole 413 through which the first inner joining member 50 passes is formed on an inner surface of the first inner plate upper body 410.

A third sealing member insertion groove 417 is formed in a surface of the first inner plate upper body 410 facing the first outer plate 200 to receive the third sealing member (not shown) have.

The lower surface of the first inner plate 400, i.e., the lower surface of the first inner plate lower body 450, is disposed to face the upper surface of the lower body 220 of the first outer plate, 1 liquid outlet flow path P3.

A first protrusion 451 is formed at a predetermined interval on the lower surface of the first inner plate lower body 450. The lower surface of the first protrusion 451 is connected to the upper surface of the first outer plate lower body 220, A region where the first protrusion 451 is not formed on the lower surface of the first inner plate lower body 450 forms the first liquid outlet flow path P3.

Meanwhile, the second inner plate 500 is arranged to abut against the first inner plate 400 on the inner side, and is disposed to abut against the second outer plate 300 on the outer side.

Since the second inner plate 500 is substantially the same as the first inner plate 400, a detailed description of the second inner plate 500 will be omitted.

Specifically, the second inner plate upper body 510, the second inner plate lower body 550, the second upper inner joining portion 520, and the second lower inner joining portion (not shown) provided on the second inner plate 540, a second inner upper fixing hole 511, a second inner lower fixing hole 515, a second inner upper fixing hole 513, a fourth sealing member insertion groove 517, a second protrusion 551, The second liquid outlet flow path P2 is characterized in that each of the first inner plate upper body 410, the first inner plate lower body 450, and the first inner upper plate 450, which are provided in the first inner plate 400, The first inner lower fixing hole 415 and the first inner upper fixing hole 413 may be formed in the same manner as the first inner lower fixing hole 420, the first lower inner joint portion 440, the first inner upper coupling hole 411, the first inner lower coupling hole 415, The insertion groove 417, the first projecting portion 451, and the first liquid outlet passage P3.

Similarly, since the second outer plate 300 is similar to the first outer plate 200, the description of the same features will be omitted.

Specifically, the second outer plate upper body 310, the second outer plate lower body 320, the second outer upper engagement groove 311, and the second sealing member insertion groove 311 provided in the second outer plate 300, The second outer lower fixing part 317 and the second outer upper fixing part 313 of the first outer plate 200 may have the same shape as that of the first outer plate 200, The first outer plate upper engaging groove 211 and the first sealing member inserting recess 217 serve as a first liquid supply portion 230 and a first outer upper fixing groove 220. The upper body 210, the first outer plate lower body 220, The first outer lower coupling portion 213, and the first outer lower coupling portion 240.

Here, DI water is used as the second liquid. Of course, the present invention is not limited to the above-described embodiment, and a liquid different from the first liquid may be used as the second liquid.

The cross sectional area of the second liquid supply part 330 becomes smaller toward the first section 331, the second section 333 and the third section 335, so that when all other conditions are the same, The pressure loss becomes smaller than in the case where the cross-sectional area of the supply part 330 is formed only by the first section 331 and the third section 335.

The first outer upper coupling groove 218 and the first outer lower coupling groove 215 provided in the first outer plate 200 are provided in the form of grooves. However, in the second outer plate 300, One outer upper fastening hole 318 and a second outer lower fastening hole 315 are provided in the form of holes.

The first inner fitting member 50 is fixed to the first outer upper fixing groove 213 while passing through the first inner upper fixing hole 413 so that the first outer plate 200 and the first The inner plate 400 is primarily engaged.

Similarly, the second inner fitting member 60 is fixed to the second outer upper fixing groove 313 while passing through the second inner upper fixing hole 513, so that the second outer plate 300 and the second The inner plate 500 is primarily fixed.

At the same time, the first fastening member 30 passes through the second outer upper fastening hole 318, the second inside upper fastening hole 511, and the first inside upper fastening hole 411, The second inner plate 500, the first inner plate 400 and the upper region of the first outer plate 200 are coupled together by being fastened to the upper coupling groove 218. [ do.

In addition, while the second fastening member 40 passes through the second outer lower coupling hole 315, the second inner lower coupling hole 515, and the first inner lower coupling hole 415, The second inner plate 500, the first inner plate 400, and the lower region of the first outer plate 200 are coupled together by being fastened to the lower coupling groove 215. [ do.

Accordingly, the first inner plate lower body 450, the second inner plate lower body 550, the first outer plate lower body 220, and the second outer plate lower body 320 are disposed adjacent to each other A mixed region (A) where the gas, the first liquid and the second liquid meet is formed in the region.

The first outer plate lower body 220 and the second outer plate lower body 320 are disposed so as to be opposed to each other and a mixed fluid in which the gas, the first liquid, and the second liquid are mixed flows The injection path P4 is formed.

The first inner plate lower body 450 and the second inner plate lower body 550 are disposed opposite to each other to form a terminal region of the gas outlet passage P1, And the protruding length of the second inner engaging portion is shorter than the protruding length of the second inner engaging portion.

As a result, when the gas flows downward at a predetermined speed along the gas outlet passage P1, the first liquid and the second liquid, which are relatively lower in speed than the gas, are discharged from the mixed fluid injection path P4 ).

The first liquid outlet passage P3 and the second liquid outlet passage P2 are formed symmetrically with respect to each other with reference to the gas outlet passage P1 so that the first liquid The non-uniform opposite velocity components of the second liquids cancel each other out, and the mixed fluid is uniformly sprayed over the entire spray interval.

Referring to Fig. 7, a second embodiment of the fluid ejection apparatus according to the present invention will be described.

Detailed descriptions of the same components as those of the first embodiment of the above-described fluid ejection apparatus among the constituent elements of the fluid ejection apparatus according to the present embodiment will be omitted.

The fluid injecting apparatus according to the present embodiment is different from the first embodiment in that the first liquid and the second liquid are mixed in the mixed fluid jetting passage P4 in the mixed region where the gas, the first liquid and the second liquid are mixed, The first flow guide 1451 and the second flow guide 1551 for allowing the fluid to flow smoothly.

Specifically, the first flow guide 1451 protrudes from the lower end of the first inner plate lower body 1450, and has a curved shape in order to gently guide the flow of the first liquid.

The second flow guide 1551 protrudes from the lower end of the second inner plate lower body 1550 and has a curved shape to gently guide the flow of the second liquid.

Meanwhile, in order to gently guide the flow of the first liquid in the mixed region, the upper edge portion 12221 of the first outer plate lower body 1220 is rounded.

Similarly, the upper edge portion 1321 of the second outer plate lower body 1320 is rounded to gently guide the flow of the second liquid in the mixing region.

A third embodiment of the fluid ejection apparatus according to the present invention will be described with reference to Fig.

Detailed descriptions of the same components as those of the first embodiment of the above-described fluid ejection apparatus among the constituent elements of the fluid ejection apparatus according to the present embodiment will be omitted.

The fluid ejection apparatus according to the present embodiment differs from the above embodiments in that the first liquid outlet passage P3 and the second liquid outlet passage P4 are provided to increase the impact force of the mixed fluid on the substrate disposed on the plane perpendicular to the mixed fluid ejection passage P4, The second liquid outlet flow path P2 is formed symmetrically with the gas outlet flow path P1 at an acute angle?.

Specifically, the lower end edge of the first inner plate lower body 2450 and the lower end edge of the second inner plate lower body 2550 form sharp acute angles, and the upper end edge of the first outer plate lower body 2220 and the lower end edge of the second The upper end edge of the outer plate lower body 2320 forms an obtuse angle.

As a result, the velocity components in the lower direction of the first liquid and the second liquid, which are discharged from the first liquid outlet passage (P3) and the second liquid outlet passage (P2), are added to the velocity component in the lower direction of the gas, The impact force of the fluid on the substrate is increased, thereby increasing the cleaning efficiency of the substrate.

Referring to Fig. 9, a fourth embodiment of the fluid ejection apparatus according to the present invention will be described.

Detailed descriptions of the same components as those of the first embodiment of the above-described fluid ejection apparatus among the constituent elements of the fluid ejection apparatus according to the present embodiment will be omitted.

The fluid injection device according to the present embodiment is different from the above embodiments in that the sectional area of the gas outlet passage P1 and the sectional area of the mixed fluid injection passage P4 are variable in the mixing region.

The cross-sectional area of the gas outlet passage P1 is reduced while approaching the mixed region, and the cross-sectional area of the mixed fluid injection passage P4 is increased while being away from the mixed region.

The lower end edge 3451 of the first inner plate lower body 3450 is gently protruded in the direction of the second inner plate and the lower end edge 3551 of the second inner plate lower body 3550 is protruded from the first inner plate 3550. [ And the cross-sectional area of the gas outlet passage P1 gradually decreases as the gas flows into the mixed region.

The upper end edge 3221 of the first outer plate lower body 3220 gently protrudes toward the second outer plate and the upper end edge 3321 of the second outer plate lower body 3320 protrudes toward the first outer plate direction So that the cross-sectional area of the mixed fluid injection path becomes larger as the distance from the mixing region increases.

As described above, the present invention is not limited to the above-described specific preferred embodiments, and various changes and modifications may be made by those skilled in the art without departing from the scope of the present invention as claimed in the claims. And such variations are within the scope of the present invention.

10: first upper engaging member 20: second upper engaging member
30: first fastening member 40: second fastening member
50: first inner engaging member 60: second inner engaging member
100: upper plate 110: upper plate body
130: gas supply part 200: first outer plate
210: first outer plate upper body 220: first outer plate lower body
230: first liquid supply part 240: first outer lower coupling part
300: second outer plate 310: second outer plate upper body
320: second outer plate lower body 330: second liquid supply part
340: second outer lower coupling part 400: first inner plate
410: first inner plate upper body 420: first upper region inner engaging portion
440: first lower region inner engaging portion 450: first inner plate lower body
500: second inner plate 510: second inner plate upper body
520: second upper area inner engaging part 540: second lower area inner engaging part
550: second inner plate lower body

Claims (15)

An inner plate forming a gas outlet passage through which gas flows;
An outer plate forming a first liquid outlet flow path through which the first liquid flows and a second liquid outlet flow path through which the second liquid flows while at least a portion of the inner plate is arranged to face the inner plate; And,
And a mixed fluid injecting portion for injecting a mixed fluid in which the gas, the first liquid, and the second liquid are mixed,
Wherein the inner plate includes a first inner plate and a second inner plate disposed to face the first inner plate and form the gas outlet passage,
Wherein the outer plate includes a first outer plate disposed on an outer surface of the first inner plate and at least a portion of which is disposed to abut the lower surface of the first inner plate to form the first liquid outlet flow passage, And a second outer plate which is disposed on an outer surface of the first inner plate and at least a part of which is disposed to face the lower surface of the second inner plate to form the second liquid outlet passage,
Wherein the mixed fluid injecting portion includes a lower body of the first outer plate and a lower body of the second outer plate disposed to face each other to form a mixed fluid injection path through which the mixed fluid flows,
The first liquid and the second liquid in an area in which the lower body of the first inner plate, the lower body of the second inner plate, the lower body of the first outer plate, and the lower body of the second outer plate are disposed adjacent to each other, Wherein the first liquid outlet flow path and the second liquid outlet flow path are symmetrically formed while facing each other with reference to the gas outlet flow path so that the first liquid outlet flow path and the second liquid outlet flow path are formed symmetrically with each other, Wherein the mixed fluid is injected into the mixed fluid jetting passage while the velocity component in the opposite direction to the liquid and the second liquid are canceled each other. delete delete delete The method according to claim 1,
Further comprising: an upper plate disposed above the first inner plate and the second inner plate and having a gas supply portion communicating with the gas outlet passage. The method according to claim 1,
Wherein the first outer plate is provided with a first liquid supply portion which is in communication with the first liquid outlet flow path and a second liquid supply portion which is communicated with the second liquid outlet flow path is formed on the second outer plate Fluid ejection device. The method according to claim 6,
Wherein a sectional area of the first liquid supply portion becomes smaller as the first liquid supply path is closer to the first liquid outlet flow path and a cross sectional area of the second liquid supply portion becomes smaller as the second liquid supply path is closer to the second liquid outlet flow path. The method according to claim 1,
A first inner joining member for joining the first inner plate and the first outer plate and a second inner joining member for joining the second inner plate and the second outer plate; Fluid ejection device. 6. The method of claim 5,
A first upper joining member for joining the upper plate and the first outer plate, a second upper joining member for joining the upper plate and the second outer plate, and a second upper joining member for joining the upper plate and the second outer plate, And a second sealing member disposed between the upper plate and the second outer plate for preventing the leakage of the base body, Device. 10. The method according to any one of claims 1 to 9,
Wherein the first inner plate and the second inner plate each have a first inner engaging portion and a second inner engaging portion protruding from the first inner engaging portion and the second inner engaging portion, Wherein an inner space is formed between the first inner plate and the second inner plate, and the inner space becomes at least a part of the gas outlet passage. 11. The method of claim 10,
Wherein the side surfaces of the first inner coupling portion and the second inner coupling portion are formed in a streamlined shape so that the gas is gently moved downward. 11. The method of claim 10,
The first inner coupling portion includes a first upper inner joint portion formed in an upper region of the first inner plate and a first lower inner joint portion formed in a lower region of the first inner plate, Wherein the upper region inner engaging portion and the first lower region inner engaging portion are staggered along the longitudinal direction. 11. The method of claim 10,
The lower body of the first inner plate and the lower body of the second inner plate are arranged to face each other so as to form a terminal region of the gas outlet passage and the protruding lengths of the first inner engaging portion and the second inner engaging portion Wherein the fluid ejecting apparatus further comprises: The method according to claim 1,
The first liquid and the second liquid are mixed with each other so that the first liquid and the second liquid flow smoothly into the mixed fluid jet flow path, And a first flow guide and a second flow guide are extended from the lower end of the second inner plate, respectively. The method according to claim 1,
The first liquid outlet flow path and the second liquid outlet flow path are each formed to have an acute angle with the gas outlet flow path so as to increase the impact force of the mixed fluid on the substrate disposed on the plane perpendicular to the mixed fluid jet flow path The fluid injection device comprising:

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