200806124 ' 九、發明說明： 【發明所屬之技術領域】 s 本發明係關於用以剝離設在印刷配線基板（pr inted _ circuit board)等之乾膜光阻劑（dry fi im photo resist) 等的表面的聚酯覆膜等薄膜的薄膜剝離裝置。 【先前技術】 於基板等形成電路時，近幾年來已採甩使用於ic製造 技術中的光被景乂法（ph〇t〇l i让〇graphiC meth〇d)。在此之 IV、作為塗布於基板上的光阻劑（photo resist)，已使用 乾膜光阻釗。此外，在該光阻劑上一般多黏著有聚酯製之 保遵用之覆膜。 在完成於光阻劑上燒製電路圖案之曝光工程後，該澤 膜必須予以剝除，一直以來，業界均嘗試開發可自動且肩 效地剝離該種薄膜的裝置。 其中之一已為所知者係揭示於本發明之申請人所提出 •:日本::g 2GG2-21 1836號的裝置。根據該項發明之構 j ’係猎由表面設有凹凸之滾紋滾筒(knuriing r〇Uer) =膜端部局部性地形成剝離部，再由該處—面利用移 、康同私达基板’一面利用黏著滾筒進行剝離。 [專利文獻日本特開2002-21 1836號公報 【發明内容】 (發明所欲解決之課題） #著：5的=年來印刷配線基板的厚度趨於減少，加上 'r者力不平均’因此在薄膜剝離中會發生基板 318918 5 200806124 ，端部彎曲，或捲入裝置内等意外的問題。 本發明係以解決上述先前技術的問題為目的。 (解決課題之手段） . “為達成上述目的，本發明係一種用以將至少一面黏著 乂在該薄膜黏著面之至少-端部具有未黏著薄膜 之路出邛的對象物的該薄膜予以剝離的薄膜剝離裝置，並 '，徵係，備有：夹住前述露出部的夹緊機構；黏著前述薄 •ΐϋΐ著體丄以及使前述夾緊機構移動，由對象物剝除黏 者於鈿述黏著體的薄膜的移動裝置。 々由於係藉由夾緊機構拉住對象物，故可防止對象物彎 曲等，而可有穩定的薄膜剝離。 此外，中請專鄉圍第2項之發明，係用以將至少一 =著有薄膜，且在該薄膜黏著面之至少一端部具有未黏 耆溥膜之露出部的板狀體的該薄膜予以剝離的薄膜剝離襄 置，其特徵係具備有：移送前述板狀體的移送裝置；黏著 鲁於由該移送.裝置所移送之板狀體的前述薄膜的可旋轉之题 著滾筒；夾住由該移送裝置所移送之板狀體的前述露出部 的夾緊機構；以及使前述夾緊機構朝前述移送方向移動的 移動裝置；而藉由利用前述移動裝置移動失緊機構，可隨 著前述黏著滾筒的旋轉，由對象物剝離黏著在該黏著滾筒 的薄膜。 與上述構成的情況相同，由於係藉由夹緊機構拉住板 狀體丄故可防止板狀體彎曲等，而可有穩定的薄膜剝離。 W述對象物以及板狀體，最典型者可列舉印刷配線基 318918 6 200806124 m 板〇 此外 離，口lit前述夹㈣構之移動進行前述薄膜之制 夹緊機構來剝離。 都利用 (發明之效果） 效果本發明之薄膜剝離裝置’具有可防止對象物彎曲等的 【實施方式】 以:根據圖式說明本發明之實施形態。 在第1圖及第2圖中，印席丨| 送帶50搬入穿置主許Α , _、、、土板9〇係利用搬入傳 用搬出ml 進行薄膜93的剝離，再利 出傳心搬出，傳送至下-個步驟。 二搬入輸送帶50與搬出傳送帶”具備有固 續〜驅動移运滾筒55,藉此移送載置盆 的印刷配線基板90之方式來構成。 、，、方 在裝置主體A之搬入輪详黑一 4 ,在薄膜端部主 0侧設有辅助剝離裝置 ^ 、又面則利用滾紋滾筒等形成凹凸纹， 形成谷易剝離的剝離開始部。 、、 始田α I n 巧稀助剝每隹裝置4例如可 才木用日本特開2002_2118 韶 彳如了 構成。 報所揭不之滾紋滾筒等的 裝置主體Α具備有黏著滾箇 你、n, 筒2使薄膜93剝離的方 :奢：:用該黏者滾 線基板⑽之表背面相對向之二二者詈衰^ 著於印刷配線基板9〇表背 =^ 剝離黏 、/專膜9 3。剝離的薄膜9 3可 318918 7 200806124 广由平輸送帶裝置3排出。 如弟2圖所示，點著、、梦w 度方向配設4個，㈣在㈣配縣板肩的寬 —而在表面與背面共計配設8個。 • ^裝置3具有與黏著滾筒2同轴設置之平輪逆 乖滑輪31，在該半於、、，册、w 丁勒]运 平輸送帶讲m1與配設於其上方的另— …: 之間繞掛有平輸送帶33。此外，點著宁 =的搬出傳送帶51側設有平輸送帶滑輪％，其企= 並平輪送帶滑輪32之間繞掛有平輸送帶34二 離之薄膜93予以排出:在Λ 爽住黏著滾筒2所剝 33與平輸送帶34。^在見度方向設置有複數條平輪送帶 美板構/之平輪送帶裝置3，剌祕設在印刷配線 暴扳90的表面與背面。 =著滾筒2的㈣傳送帶51側’設有夾緊裝置工。 文承I置1係安裝於裝罢士触 而 &才、衣置主體A，具有可對裝置主體人上 ⑩下方向進料降的基台12。此外 2 # 二平刷配線基板90之移送方向的滑動部 1 1的岫端設有夾緊部J 〇。 =第3圖所示’基台12係在寬度方向的兩端設置有一 線基板= 多=方係設成可朝印刷配 =有複數個夹緊部10(在本實施例中為5個)，可與滑 動邛11同時滑動。 黏著滾同2與夾緊部10的寬度方向位置係配置在彼此 318918 8 200806124 •互不干擾的位置，4個黏著滾筒2係位於5個央緊部ι〇 間。 〈 … 如第4圖乃至第7圖所示，夾緊部」〇之設置位置， v位於黏著滾筒2的搬出傳送帶51侧，得以執持印刷配線太 板90前端的露出部91。用以進行夾緊部10之夾執動作二 機構，可以是各種型態的機構，但在本實施例中係利用甜 子形狀的一對轉動片19由表背面夾住並執持該露出部91。 • 如第4圖所示，於印刷配線基板90係覆蓋有光阻劑 92，且其上方黏著有薄膜93，印刷配線基板的前端部 =成有無光阻劑92與薄膜93的露出部91。由於夾緊部1〇 會夾執該露出部9卜因此不會發生對印刷配線基板9〇造 成損傷等的危險。 利用夾緊部10夹執露出部91後，使滑動部u朝移送 方向滑動以拉住印刷配線基板90而使其移動。藉此，如第 7圖所示，薄膜93即可黏著於黏著滾筒2並由印刷配線基 ⑩板9 0剝離。 此外’由於印刷配線基板9〇係利用夾緊部1〇拉住， 因此，即使印刷配線基板9〇厚度較薄，且黏著滾筒2的黏 著力不平均，也不會在薄膜剝離過程中產生印刷配線基板 90端部彎曲的情形.，而可防止印刷配線基板9〇被捲入裝 置内的意外發生。 爽緊裝置1的滑動長度以15〇匪左右的長度或更長的 長度為佳。即使厚度未達〇· 〇5mm之薄型印刷配線基板9〇， 只要可拉到大約150至18〇匪左右的程度，之後只要藉由 9 318918 200806124 移送滾筒55的傳送即可進行穩定的剝離。 夾緊部1〇與滑動部U滑動預定後由a 12的上升而退避於上方。 μ交T精由基台 配咖93,可經由平輪送帶裝置3排出。印刷 93 2 5 二利’平輸运甲33、34移送至上方的薄膜收納槽6ι，再 你用运風裝Ϊ(無圖示）的送風而移動於薄膜收 回 收至薄膜收納櫃6〇中。 h円而回 93^_方^’印刷配線基板9〇的背面側(下側）的薄膜 係利时輸送帶裝置3移至薄膜㈣櫃6()後再行回收。 5〇 51 55 =者滾同2係利用驅動裝置（無圖示）來驅動，其圓周速 =同此外，夾緊裝置！的滑動速度亦調整為與該 速度相同。 壯此外’在上述實施形態中，係在寬度方向設置5個夾 置1 ’但其構成上，可配合印刷配線基板9〇的寬度而 :減所使用之夾緊裝置1的數量’但亦可適度地增減夹緊 裝置的設置數量。此外，亦可加大夾緊裝置4的寬度，從 防止印刷配線基板90彎曲的觀點來考量，夾緊裝置i的寬 度最好與印刷配線基板90同寬。在上述實施例中，為避免 與黏著滾筒2之間產生干擾，而進行分割配設5個。 接著說明動作。 利用搬入傳送帶50搬運印刷配線基板9〇，於第1圖 所示之辅助剝離裝置4暫時停止，實行辅助的剝離。該動 318918 10 200806124 作的詳細内容如曰本特開2002-21 1836號公報所示。 .完成、辅助剝離後’如第5圖所示，再次利用搬入傳 W彳、达印刷配線基板90,並在露出部91接近夾緊邻 ^前端時’停止印刷配線基板90的傳送，再利用夹 y η朝移送方向滑動⑽至副左右的程度，同‘ 艇的刖端部分。 得 動預疋距離後’鬆開夹緊部10，解除對露出部91 SI口 :12上升，並使夾緊㈣退避。接^ 叙入傳运[50與搬出傳送帶51的移送滾筒&並轉 驅動黏著滾筒2,繼續進行薄膜93的剝離。 咎 在印刷配線基板9〇通過黏著滾 膜93的剝離，印刷配 〇 ^即疋成缚 而傳送至下—步驟韻板9G直接猎由移送滾筒55移送 =離之薄膜93則利用平輸送帶裝置3予以排出。 【圖式間皁說明】 ί1圖為顯示本發明之-實施形態之正面圖。 ^2圖為顯示本發明之—實施形態之右侧面圖。 f3圖為顯示本發明之—實施形態之平面圖。 =圖為本發明之—實施形態之弓形裝置1的放大圖。 圖為本發g月之__實施形態之動作說明圖。 =圖為本發明之一實施形態之動作說明圖。 圖為本發明之—實施形態之動作說明圖。 318918 11 200806124200806124 ' 九 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明A film peeling device for a film such as a polyester film on the surface. [Prior Art] When a circuit is formed on a substrate or the like, the light used in the ic manufacturing technique has been adopted in recent years by the method of ph〇t〇l i let 〇graphiC meth〇d. Here, IV, as a photo resist applied to a substrate, dry film photoresist has been used. Further, a film made of polyester is generally adhered to the photoresist. After the exposure process of firing the circuit pattern on the photoresist, the film must be stripped, and the industry has been attempting to develop a device that can automatically and shoulder-peel the film. One of them has been disclosed by the applicant of the present invention by the applicant of the present invention: Japanese:: g 2GG2-21 1836. According to the invention, the knucking roller (knuriing r〇Uer) is formed on the surface of the invention; the peeling portion is partially formed at the end of the film, and the substrate is moved from the surface to the surface. 'Use one side to peel off with an adhesive roller. [Patent Document] JP-A-2002-21 1836 (Summary of the Invention) (Problems to be Solved by the Invention) #: The thickness of the printed wiring board tends to decrease in the year of 5, and the 'r force is not averaged' Unexpected problems such as substrate 318918 5 200806124, end bending, or entrapment in the device may occur during film peeling. The present invention is directed to solving the problems of the prior art described above. (Means for Solving the Problem) "In order to achieve the above object, the present invention is a film for peeling off at least one side of an object having a non-adhesive film at least at the end of the film adhesive surface. a film peeling device, and a mechanism for clamping a clamping mechanism that sandwiches the exposed portion; attaching the thin body to the body and moving the clamping mechanism to remove the adhesive from the object The moving device of the film of the adhesive body. 拉Because the object is pulled by the clamping mechanism, it is possible to prevent the object from being bent, etc., and it is possible to have a stable film peeling. a film peeling device for peeling off at least one film having a film and having a plate-shaped body having an exposed portion of an unadhesive film at at least one end portion of the film adhesive surface, the feature is provided a transfer device for transferring the plate-like body; a rotatable cover roller adhered to the film of the plate-like body transferred by the transfer device; and the aforementioned exposure of the plate-shaped body transferred by the transfer device unit a clamping mechanism; and a moving device for moving the clamping mechanism toward the transporting direction; and by moving the unscrewing mechanism by the moving device, the object can be peeled and adhered to the adhesive roller according to the rotation of the adhesive roller In the same manner as in the above-described configuration, since the plate-like body is pulled by the clamp mechanism, the plate-like body can be prevented from being bent or the like, and stable film peeling can be prevented. The object and the plate-shaped body are the most Typical examples include a printed wiring board 318918 6 200806124 m. The sheet is folded, and the slit (4) structure is moved to perform the peeling mechanism of the film. The effect of the invention is the effect of the invention. [Embodiment] The present invention is described with reference to the drawings. In the first and second figures, the printing pad| In the case of the slabs, the slabs are removed by the loading and unloading, and the film 93 is peeled off, and the eccentricity is carried out, and the conveyance is carried out to the next step. Continued ~ transport driving roller 55 move, whereby the transfer mode of the bowl is placed the printed wiring board 90 is constituted. And, in the apparatus main body A, the loading wheel is black 4, the auxiliary peeling device is provided on the main 0 side of the film end, and the embossing is formed by the knurling roller or the like on the other side, and the peeling start portion of the valley peeling is formed. . ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, The main body of the apparatus, such as a knurling roller, which is not disclosed by the newspaper, is provided with a roll that binds you, n, and the tube 2 to peel the film 93: luxury: the opposite side of the front and back of the squeegee roll substrate (10)詈 ^ ^ On the printed wiring board 9 〇 surface back = ^ peel adhesion, / film 9 3 . The peeled film 9 3 can be discharged from the flat conveyor device 3 by 318918 7 200806124. As shown in Figure 2, there are 4 points in the direction of the dream and the degree of the dream, and (4) in the width of the board shoulder of the (4)--and a total of 8 on the surface and the back. • The device 3 has a flat-wheel reverse pulley 31 disposed coaxially with the adhesive roller 2, and the m1 and the other disposed above it are disposed on the semi-contained, wrap, wincher conveyor belt. A flat conveyor belt 33 is wound between them. In addition, on the side of the carry-out conveyor 51 on the side of Ning=, there is a flat conveyor belt pulley, and the flat belt 93 is wound between the flat belt and the flat belt pulley 32. The adhesive roller 2 is stripped 33 and the flat conveyor belt 34. ^In the direction of visibility, there are a plurality of flat wheel feeding belts. The flat plate feeding device 3 of the US board structure is set on the surface and the back surface of the printed wiring. = On the side of the (four) conveyor belt 51 of the drum 2, a clamping device is provided. The Wencheng I set 1 system is installed on the striker and the main body A of the garment, and has a base 12 that can feed the device in the downward direction. Further, a clamping portion J 〇 is provided at the end of the sliding portion 1 1 of the transfer direction of the 2 #二平刷线线90. = Fig. 3 shows that the base 12 is provided with a line substrate at both ends in the width direction. = more = squares are arranged to be printed. = a plurality of clamping portions 10 (in this embodiment, five) , can slide at the same time as the sliding cymbal 11. The positions of the adhesive roller 2 and the width direction of the clamp portion 10 are disposed at positions 318918 8 200806124. The four adhesive rollers 2 are located between the five central portions ι. As shown in Fig. 4 to Fig. 7, the position of the clamp portion 〇 is placed on the side of the carry-out belt 51 of the adhesive drum 2, and the exposed portion 91 at the front end of the printed wiring board 90 is held. The two mechanisms for performing the clamping operation of the clamp portion 10 may be various types of mechanisms. However, in the present embodiment, the pair of rotating pieces 19 in the shape of a sweetener are used to sandwich and hold the exposed portion from the front and back sides. 91. As shown in Fig. 4, the printed wiring board 90 is covered with a photoresist 92, and a film 93 is adhered thereto, and the front end portion of the printed wiring board is formed with or without the photoresist 92 and the exposed portion 91 of the film 93. Since the nip portion 1 夹 holds the exposed portion 9 , there is no risk of damage to the printed wiring board 9 等 or the like. After the exposed portion 91 is sandwiched by the clamp portion 10, the slide portion u is slid in the transfer direction to pull the printed wiring board 90 and move it. Thereby, as shown in Fig. 7, the film 93 can be adhered to the adhesive roller 2 and peeled off by the printed wiring substrate 10 plate 90. Further, since the printed wiring board 9 is pulled by the clamp portion 1, even if the thickness of the printed wiring substrate 9 is thin and the adhesion of the adhesive roller 2 is not uniform, printing does not occur during the film peeling process. When the end portion of the wiring substrate 90 is bent, it is possible to prevent the printed wiring board 9 from being caught in the device. The sliding length of the refreshing device 1 is preferably about 15 inches or longer. Even if the thickness of the thin printed wiring board 9 is less than 〇·〇5 mm, as long as it can be pulled to about 150 to 18 ,, stable peeling can be performed by the transfer of the transfer roller 55 by 9 318918 200806124. The clamp portion 1A and the slide portion U are slid by a predetermined amount, and are then retracted from the upper side by the rise of a12. The μ-T fine is supplied from the base station to the coffee maker 93 and can be discharged via the flat belt feeding device 3. Printing 93 2 5 The two-way 'transporting armor 33, 34 is transferred to the upper film storage slot 6ι, and then you move it to the film storage cabinet 6 by the air supply (not shown). . h円回回93^_方^' The film on the back side (lower side) of the printed wiring board 9〇 is moved to the film (four) cabinet 6 () and then recovered. 5〇 51 55 = The same as the 2 series is driven by the drive unit (not shown), its peripheral speed = the same as the other, the clamping device! The sliding speed is also adjusted to be the same as this speed. In addition, in the above embodiment, five clips 1' are provided in the width direction. However, the width of the printed wiring board 9〇 can be matched with the width of the printed wiring board 9 减: Moderately increase or decrease the number of sets of clamping devices. Further, the width of the clamp device 4 can be increased, and the width of the clamp device i is preferably the same as that of the printed wiring substrate 90 from the viewpoint of preventing the printed wiring board 90 from being bent. In the above embodiment, in order to avoid interference with the adhesive roller 2, five divisions are arranged. Next, the operation will be described. The printed wiring board 9 is transported by the carry-in conveyor 50, and the auxiliary peeling device 4 shown in Fig. 1 is temporarily stopped, and the auxiliary peeling is performed. The details of this motion 318918 10 200806124 are shown in Japanese Patent Laid-Open Publication No. 2002-21 1836. After completion and auxiliary detachment, as shown in Fig. 5, the printed wiring board 90 is again transported, and the printed wiring board 90 is stopped. When the exposed portion 91 approaches the front end of the clip, the transfer of the printed wiring board 90 is stopped and reused. The clip y η slides (10) in the direction of the transfer to the left and right sides, the same as the end portion of the boat. After the pre-twisting distance is obtained, the clamp portion 10 is released, and the SI port of the exposed portion 91 is lifted by 12 and the clamp (4) is retracted. The transport roller 50 is transported to the transfer roller & and the adhesive roller 2 is driven to continue the peeling of the film 93.咎The peeling of the printed wiring board 9〇 by the adhesive roll film 93, the printing 〇 疋 疋 疋 而 而 传送 传送 传送 — — — 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 3 to discharge. [Description of soap between the drawings] FIG. 1 is a front view showing an embodiment of the present invention. Fig. 2 is a right side view showing the embodiment of the present invention. Figure f3 is a plan view showing an embodiment of the present invention. = Figure is an enlarged view of the bow device 1 of the embodiment of the present invention. The figure is an explanatory diagram of the operation of the embodiment of the present invention. = Figure is an operation explanatory diagram of an embodiment of the present invention. The figure is an explanatory view of the operation of the embodiment of the present invention. 318918 11 200806124
[ 主要元件符號說明】 1 夾緊裝置 2 3 平輸送帶裝置 4 9 控制裝置 10 11 滑動部 12 19 轉動片 31 32 平輸送帶滑輪 33 34 平輸送帶 50 51 搬出傳送帶 55 60 薄膜收納櫃 61 90 印刷配線基板（S) 91 92 光阻劑 93 94 薄膜端部 A 黏著滾筒 輔助剝離裝置 夾緊部 基台 平輸送帶滑輪 平輸送帶 搬入傳送帶 移送滾筒 薄膜收納槽 露出部 薄膜 裝置主體 12 318918[ Description of main component symbols] 1 Clamping device 2 3 Flat conveyor device 4 9 Control device 10 11 Sliding portion 12 19 Rotating piece 31 32 Flat belt pulley 33 34 Flat belt 50 51 Carrying out conveyor belt 55 60 Film storage cabinet 61 90 Printed wiring board (S) 91 92 Photoresist 93 94 Film end A Adhesive roller Auxiliary peeling device Clamping part Base flat belt Pulley Flat conveyor belt Carrying conveyor belt Transfer roller Film storage groove Exposed section Film device main body 12 318918