TW200739710A - Substrate processing method and substrate processing apparatus - Google Patents

Substrate processing method and substrate processing apparatus

Info

Publication number
TW200739710A
TW200739710A TW096104743A TW96104743A TW200739710A TW 200739710 A TW200739710 A TW 200739710A TW 096104743 A TW096104743 A TW 096104743A TW 96104743 A TW96104743 A TW 96104743A TW 200739710 A TW200739710 A TW 200739710A
Authority
TW
Taiwan
Prior art keywords
substrate
substrate processing
liquid film
freezing
substrates
Prior art date
Application number
TW096104743A
Other languages
English (en)
Other versions
TWI362067B (zh
Inventor
Naozumi Fujiwara
Katsuhiko Miya
Akira Izumi
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006108801A external-priority patent/JP4884057B2/ja
Priority claimed from JP2006248181A external-priority patent/JP4767138B2/ja
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200739710A publication Critical patent/TW200739710A/zh
Application granted granted Critical
Publication of TWI362067B publication Critical patent/TWI362067B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW096104743A 2006-04-11 2007-02-09 Substrate processing method and substrate processing apparatus TW200739710A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006108801A JP4884057B2 (ja) 2006-04-11 2006-04-11 基板処理方法および基板処理装置
JP2006248181A JP4767138B2 (ja) 2006-09-13 2006-09-13 基板処理装置、液膜凍結方法および基板処理方法

Publications (2)

Publication Number Publication Date
TW200739710A true TW200739710A (en) 2007-10-16
TWI362067B TWI362067B (zh) 2012-04-11

Family

ID=38573854

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104743A TW200739710A (en) 2006-04-11 2007-02-09 Substrate processing method and substrate processing apparatus

Country Status (3)

Country Link
US (1) US20070235062A1 (zh)
KR (1) KR100835776B1 (zh)
TW (1) TW200739710A (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI421927B (zh) * 2010-03-09 2014-01-01 Dainippon Screen Mfg 基板清洗方法及基板清洗裝置
TWI584364B (zh) * 2013-06-21 2017-05-21 Tokyo Electron Ltd Substrate liquid processing device and substrate liquid treatment method

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* Cited by examiner, † Cited by third party
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JP4514700B2 (ja) * 2005-12-13 2010-07-28 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4889331B2 (ja) * 2006-03-22 2012-03-07 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
US20070281106A1 (en) * 2006-05-30 2007-12-06 Applied Materials, Inc. Process chamber for dielectric gapfill
US20090120368A1 (en) * 2007-11-08 2009-05-14 Applied Materials, Inc. Rotating temperature controlled substrate pedestal for film uniformity
US7964040B2 (en) * 2007-11-08 2011-06-21 Applied Materials, Inc. Multi-port pumping system for substrate processing chambers
JP5243165B2 (ja) * 2008-09-25 2013-07-24 大日本スクリーン製造株式会社 基板洗浄方法および基板洗浄装置
TWI480937B (zh) 2011-01-06 2015-04-11 Screen Holdings Co Ltd 基板處理方法及基板處理裝置
US20120180954A1 (en) 2011-01-18 2012-07-19 Applied Materials, Inc. Semiconductor processing system and methods using capacitively coupled plasma
JP5715831B2 (ja) * 2011-01-20 2015-05-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
JP6090837B2 (ja) 2012-06-13 2017-03-08 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
US8889566B2 (en) 2012-09-11 2014-11-18 Applied Materials, Inc. Low cost flowable dielectric films
US8691022B1 (en) * 2012-12-18 2014-04-08 Lam Research Ag Method and apparatus for processing wafer-shaped articles
US9018108B2 (en) 2013-01-25 2015-04-28 Applied Materials, Inc. Low shrinkage dielectric films
US10994311B2 (en) * 2013-05-31 2021-05-04 Michel Bourdat Specific device for cleaning electronic components and/or circuits
SG10201407598VA (en) 2013-11-19 2015-06-29 Ebara Corp Substrate cleaning apparatus and substrate processing apparatus
US9412581B2 (en) 2014-07-16 2016-08-09 Applied Materials, Inc. Low-K dielectric gapfill by flowable deposition
US20160225652A1 (en) 2015-02-03 2016-08-04 Applied Materials, Inc. Low temperature chuck for plasma processing systems
JP6464808B2 (ja) * 2015-02-23 2019-02-06 セイコーエプソン株式会社 液体噴射装置
JP6467260B2 (ja) 2015-03-24 2019-02-06 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
CN105487302B (zh) * 2016-01-19 2017-11-24 京东方科技集团股份有限公司 一种液晶涂覆装置及方法
JP6653228B2 (ja) * 2016-08-09 2020-02-26 キオクシア株式会社 基板の洗浄方法および基板処理装置
JP6738235B2 (ja) 2016-08-09 2020-08-12 芝浦メカトロニクス株式会社 基板処理装置、および基板処理方法
WO2020091001A1 (ja) * 2018-10-31 2020-05-07 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
TWI789842B (zh) * 2020-09-11 2023-01-11 日商芝浦機械電子裝置股份有限公司 基板處理裝置
CN116190302A (zh) * 2021-11-29 2023-05-30 盛美半导体设备(上海)股份有限公司 晶圆清洗装置

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US4817652A (en) * 1987-03-26 1989-04-04 Regents Of The University Of Minnesota System for surface and fluid cleaning
US4962776A (en) * 1987-03-26 1990-10-16 Regents Of The University Of Minnesota Process for surface and fluid cleaning
JPH03116832A (ja) * 1989-09-29 1991-05-17 Mitsubishi Electric Corp 固体表面の洗浄方法
JP3380021B2 (ja) * 1993-12-28 2003-02-24 株式会社エフティーエル 洗浄方法
JP3504023B2 (ja) * 1995-05-26 2004-03-08 株式会社ルネサステクノロジ 洗浄装置および洗浄方法
JP3343013B2 (ja) * 1995-12-28 2002-11-11 大日本スクリーン製造株式会社 基板洗浄方法及びその装置
US5997653A (en) * 1996-10-07 1999-12-07 Tokyo Electron Limited Method for washing and drying substrates
DE19916345A1 (de) * 1999-04-12 2000-10-26 Steag Electronic Systems Gmbh Verfahren und Vorrichtung zum Reinigen von Substraten
US6705331B2 (en) * 2000-11-20 2004-03-16 Dainippon Screen Mfg., Co., Ltd. Substrate cleaning apparatus
US6444582B1 (en) * 2001-02-05 2002-09-03 United Microelectronics Corp. Methods for removing silicon-oxy-nitride layer and wafer surface cleaning
KR100421038B1 (ko) * 2001-03-28 2004-03-03 삼성전자주식회사 표면으로부터 오염물을 제거하는 세정 장비 및 이를이용한 세정 방법
US6783599B2 (en) * 2001-07-19 2004-08-31 International Business Machines Corporation Method of cleaning contaminants from the surface of a substrate
JP4349606B2 (ja) * 2002-03-25 2009-10-21 大日本スクリーン製造株式会社 基板洗浄方法
JP3993048B2 (ja) * 2002-08-30 2007-10-17 大日本スクリーン製造株式会社 基板処理装置
KR20040049548A (ko) * 2002-12-06 2004-06-12 주식회사 하이닉스반도체 웨이퍼 세정방법
US6864458B2 (en) * 2003-01-21 2005-03-08 Applied Materials, Inc. Iced film substrate cleaning
JP4494840B2 (ja) * 2003-06-27 2010-06-30 大日本スクリーン製造株式会社 異物除去装置、基板処理装置および基板処理方法
JP4651924B2 (ja) * 2003-09-18 2011-03-16 シャープ株式会社 薄膜半導体装置および薄膜半導体装置の製造方法
JP2006332396A (ja) * 2005-05-27 2006-12-07 Dainippon Screen Mfg Co Ltd 基板処理方法および基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI421927B (zh) * 2010-03-09 2014-01-01 Dainippon Screen Mfg 基板清洗方法及基板清洗裝置
TWI584364B (zh) * 2013-06-21 2017-05-21 Tokyo Electron Ltd Substrate liquid processing device and substrate liquid treatment method

Also Published As

Publication number Publication date
KR20070101124A (ko) 2007-10-16
US20070235062A1 (en) 2007-10-11
TWI362067B (zh) 2012-04-11
KR100835776B1 (ko) 2008-06-05

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