TW200737157A - Imprinting method and imprinting apparatus - Google Patents

Imprinting method and imprinting apparatus

Info

Publication number
TW200737157A
TW200737157A TW096108038A TW96108038A TW200737157A TW 200737157 A TW200737157 A TW 200737157A TW 096108038 A TW096108038 A TW 096108038A TW 96108038 A TW96108038 A TW 96108038A TW 200737157 A TW200737157 A TW 200737157A
Authority
TW
Taiwan
Prior art keywords
mold
imprinting
pressed
substrate
transfer layer
Prior art date
Application number
TW096108038A
Other languages
English (en)
Inventor
Tetsuya Imai
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Publication of TW200737157A publication Critical patent/TW200737157A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/005—Compensating volume or shape change during moulding, in general
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/743—Patterned record carriers, wherein the magnetic recording layer is patterned into magnetic isolated data islands, e.g. discrete tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/30—Mounting, exchanging or centering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/30—Mounting, exchanging or centering
    • B29C33/303—Mounting, exchanging or centering centering mould parts or halves, e.g. during mounting
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
TW096108038A 2006-03-10 2007-03-08 Imprinting method and imprinting apparatus TW200737157A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006066734 2006-03-10

Publications (1)

Publication Number Publication Date
TW200737157A true TW200737157A (en) 2007-10-01

Family

ID=38509310

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096108038A TW200737157A (en) 2006-03-10 2007-03-08 Imprinting method and imprinting apparatus

Country Status (4)

Country Link
US (1) US20090273119A1 (zh)
JP (1) JP4642897B2 (zh)
TW (1) TW200737157A (zh)
WO (1) WO2007105474A1 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI414418B (zh) * 2008-10-23 2013-11-11 Molecular Imprints Inc 壓印微影術系統及方法
CN111003929A (zh) * 2019-11-25 2020-04-14 Oppo广东移动通信有限公司 热弯模具、壳体、壳体组件、电子设备及壳体的制造方法
CN111034400A (zh) * 2019-12-23 2020-04-21 塔里木大学 一种圆盘钩齿耙式起膜装置

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EP1784876B1 (en) 2004-09-02 2018-01-24 LG Chem, Ltd. Organic/inorganic composite porous film and electrochemical device prepared thereby
CN102360162B (zh) * 2007-02-06 2015-08-26 佳能株式会社 刻印方法和刻印装置
JP5064078B2 (ja) * 2007-03-30 2012-10-31 株式会社日立産機システム 微細パターン転写用金型およびそれを用いた樹脂製転写物の製造方法
JP5092740B2 (ja) * 2007-12-28 2012-12-05 住友電気工業株式会社 半導体素子の製造方法
JP5326468B2 (ja) * 2008-02-15 2013-10-30 凸版印刷株式会社 インプリント法
US20110014499A1 (en) * 2008-03-07 2011-01-20 Showa Denko K.K. Uv nanoimprint method, resin replica mold and method for producing the same, magnetic recording medium and method for producing the same, and magnetic recording/reproducing apparatus
JP2010000637A (ja) * 2008-06-19 2010-01-07 Sony Corp 流路チップの製造方法および流路チップの製造装置
WO2010004006A2 (de) * 2008-07-10 2010-01-14 Singulus Technologies Ag Vorrichtung und verfahren zum prägen von strukturen in einem substrat, insbesondere in optischen datenträgern, halbleiterstrukturen und mikrostrukturen
JP5261165B2 (ja) 2008-12-25 2013-08-14 チェイル インダストリーズ インコーポレイテッド 微細パターンの形成方法
US8349617B2 (en) * 2009-05-29 2013-01-08 Vanderbilt University Optical sensor comprising diffraction gratings with functionalized pores and method of detecting analytes using the sensor
JP5328495B2 (ja) * 2009-06-04 2013-10-30 キヤノン株式会社 インプリント装置及び物品の製造方法
JP5469941B2 (ja) * 2009-07-13 2014-04-16 東芝機械株式会社 転写装置および転写方法
US8928876B2 (en) * 2010-01-20 2015-01-06 Nexcelom Bioscience Llc Cell counting and sample chamber and methods of fabrication
JP5593092B2 (ja) * 2010-02-26 2014-09-17 東芝機械株式会社 転写システムおよび転写方法
JP5603621B2 (ja) 2010-03-08 2014-10-08 東芝機械株式会社 シート状モールド位置検出装置、転写装置および転写方法
JP5574801B2 (ja) 2010-04-26 2014-08-20 キヤノン株式会社 インプリント装置及び物品の製造方法
WO2012019874A1 (en) * 2010-08-13 2012-02-16 Asml Netherlands B.V. Lithography method and apparatus
WO2012039764A1 (en) 2010-09-20 2012-03-29 Vanderbilt University Nanoscale porous gold film sers template
JP5994488B2 (ja) * 2012-08-29 2016-09-21 大日本印刷株式会社 インプリント方法およびそれを実施するためのインプリント装置
WO2014052777A1 (en) * 2012-09-27 2014-04-03 North Carolina State University Methods and systems for fast imprinting of nanometer scale features in a workpiece
US9889504B2 (en) 2012-12-11 2018-02-13 Vanderbilt University Porous nanomaterials having three-dimensional patterning
WO2018008326A1 (ja) * 2016-07-05 2018-01-11 パナソニックＩｐマネジメント株式会社 モールド、インプリント装置及びインプリント方法
JP7134725B2 (ja) * 2018-06-11 2022-09-12 キヤノン株式会社 型を用いて基板上の組成物を成形する成形装置、および物品の製造方法
GB2578476A (en) * 2018-10-29 2020-05-13 Jewellery Cards Ltd Embossing
JP7488261B2 (ja) * 2018-11-26 2024-05-21 エッジ・エンボッシング・インコーポレイテッド 熱可塑性成形ツール、そのアセンブリ、ならびにその作製方法および使用方法
EP4084044A4 (en) * 2019-12-25 2024-06-05 Scivax Corporation PRINTING DEVICE AND PRINTING METHOD
JP6972411B1 (ja) * 2021-03-30 2021-11-24 リンテック株式会社 マイクロニードルの製造方法およびマイクロニードルの製造装置
JP6972413B1 (ja) * 2021-03-30 2021-11-24 リンテック株式会社 マイクロニードルの製造方法およびマイクロニードルの製造装置
CN114683463A (zh) * 2022-03-28 2022-07-01 业成科技（成都）有限公司 光波导治具及光波导的制备方法
CN114905793B (zh) * 2022-05-09 2024-02-23 深圳技术大学 高温模压成型硅模具的方法

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JPS62103116A (ja) * 1985-10-30 1987-05-13 Kyowa Gas Chem Ind Co Ltd 光デイスク基板用プレス金型
JP2004013949A (ja) * 2002-06-04 2004-01-15 Hitachi Maxell Ltd 光記録媒体及びその製造方法
JP4340086B2 (ja) * 2003-03-20 2009-10-07 株式会社日立製作所 ナノプリント用スタンパ、及び微細構造転写方法
JP4401142B2 (ja) * 2003-10-28 2010-01-20 シャープ株式会社 パターン形成方法およびパターン形成装置
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JP2006018977A (ja) * 2004-07-05 2006-01-19 Kawamura Seisakusho:Kk 転写印刷版用実装金型及び転写印刷方法
US20070164476A1 (en) * 2004-09-01 2007-07-19 Wei Wu Contact lithography apparatus and method employing substrate deformation
JP4668745B2 (ja) * 2005-09-07 2011-04-13 ヤマハ発動機株式会社 船舶推進機用プロペラ緩衝装置
US7316554B2 (en) * 2005-09-21 2008-01-08 Molecular Imprints, Inc. System to control an atmosphere between a body and a substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI414418B (zh) * 2008-10-23 2013-11-11 Molecular Imprints Inc 壓印微影術系統及方法
CN111003929A (zh) * 2019-11-25 2020-04-14 Oppo广东移动通信有限公司 热弯模具、壳体、壳体组件、电子设备及壳体的制造方法
CN111003929B (zh) * 2019-11-25 2022-03-22 Oppo广东移动通信有限公司 热弯模具、壳体、壳体组件、电子设备及壳体的制造方法
CN111034400A (zh) * 2019-12-23 2020-04-21 塔里木大学 一种圆盘钩齿耙式起膜装置

Also Published As

Publication number Publication date
JP4642897B2 (ja) 2011-03-02
US20090273119A1 (en) 2009-11-05
JPWO2007105474A1 (ja) 2009-07-30
WO2007105474A1 (ja) 2007-09-20

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