TW200728639A - Dovetail groove sealing material and vacuum gate valve mounted therewith - Google Patents

Dovetail groove sealing material and vacuum gate valve mounted therewith

Info

Publication number
TW200728639A
TW200728639A TW096103286A TW96103286A TW200728639A TW 200728639 A TW200728639 A TW 200728639A TW 096103286 A TW096103286 A TW 096103286A TW 96103286 A TW96103286 A TW 96103286A TW 200728639 A TW200728639 A TW 200728639A
Authority
TW
Taiwan
Prior art keywords
dovetail groove
sealing material
protruding
bottom face
sealing
Prior art date
Application number
TW096103286A
Other languages
English (en)
Other versions
TWI365262B (zh
Inventor
Kazuaki Tsuji
Original Assignee
Nihon Valqua Kogyo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Valqua Kogyo Kk filed Critical Nihon Valqua Kogyo Kk
Publication of TW200728639A publication Critical patent/TW200728639A/zh
Application granted granted Critical
Publication of TWI365262B publication Critical patent/TWI365262B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
TW096103286A 2006-01-31 2007-01-30 Dovetail groove sealing material and vacuum gate valve mounted therewith TW200728639A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006022235A JP4663538B2 (ja) 2006-01-31 2006-01-31 あり溝用シール材およびあり溝用シール材が装着された真空用ゲート弁

Publications (2)

Publication Number Publication Date
TW200728639A true TW200728639A (en) 2007-08-01
TWI365262B TWI365262B (zh) 2012-06-01

Family

ID=38327381

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096103286A TW200728639A (en) 2006-01-31 2007-01-30 Dovetail groove sealing material and vacuum gate valve mounted therewith

Country Status (6)

Country Link
US (1) US8181972B2 (zh)
JP (1) JP4663538B2 (zh)
KR (1) KR100950408B1 (zh)
CN (1) CN101375090B (zh)
TW (1) TW200728639A (zh)
WO (1) WO2007088806A1 (zh)

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JP5245709B2 (ja) * 2008-10-16 2013-07-24 トヨタ紡織株式会社 締結構造及びこれを備える流体フィルタ
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JP5551947B2 (ja) * 2010-03-10 2014-07-16 東京エレクトロン株式会社 溝用シール材
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JP5780730B2 (ja) * 2010-09-29 2015-09-16 日本バルカー工業株式会社 環状シール材
JP2012072863A (ja) * 2010-09-29 2012-04-12 Nippon Valqua Ind Ltd 環状シール材
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CN102705257A (zh) * 2011-03-28 2012-10-03 乐金电子(天津)电器有限公司 空调器室外机的风扇
US8608173B2 (en) * 2011-08-25 2013-12-17 Hamilton Sundstrand Corporation Method and apparatus to provide sealing contact between first and second fueldraulic components
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KR102043007B1 (ko) * 2012-10-09 2019-11-11 주식회사 발카 복합 시일
KR101422409B1 (ko) * 2013-06-05 2014-07-22 주식회사 엠앤이 도브테일 홈에 설치되는 씨일 링
JP2015073012A (ja) * 2013-10-03 2015-04-16 富士電機株式会社 半導体装置
JP6315941B2 (ja) * 2013-10-29 2018-04-25 日本バルカー工業株式会社 シール材
JP6160926B2 (ja) * 2014-06-05 2017-07-12 Smc株式会社 ゲートバルブ
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US10539238B2 (en) * 2014-09-18 2020-01-21 Cnh Industrial America Llc Sealing element for a hydraulic fitting
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JP6664298B2 (ja) * 2016-09-09 2020-03-13 株式会社バルカー シール材
US10453727B2 (en) * 2016-11-10 2019-10-22 Applied Materials, Inc. Electronic device manufacturing load port apparatus, systems, and methods
US20180193676A1 (en) * 2016-11-17 2018-07-12 Rainmaker Solutions, Inc. Hydration and air cooling system
EP3348885B1 (de) * 2017-01-16 2019-12-11 VAT Holding AG Dichtung eines vakuumventils und diesbezügliches herstellungsverfahren
US11143305B1 (en) 2017-08-22 2021-10-12 Garlock Sealing Technologies, Llc Hydraulic components and methods of manufacturing
USD893684S1 (en) * 2017-08-22 2020-08-18 Garlock Sealing Technologies, Llc Header ring for a reciprocating stem or piston rod
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USD898170S1 (en) * 2017-12-01 2020-10-06 Valqua, Ltd. Composite seal member for semiconductor production apparatus
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US11470904B2 (en) * 2018-01-19 2022-10-18 Rainmaker Solutions, Inc. Hydration system and components thereof
CN108443504A (zh) * 2018-04-23 2018-08-24 苏州优力克流体控制科技有限公司 井口装置压力检测用bx型密封件
JP7456993B2 (ja) * 2018-07-19 2024-03-27 アプライド マテリアルズ インコーポレイテッド シールを行うためのマルチノード複数回使用ｏリングおよび方法
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Also Published As

Publication number Publication date
JP4663538B2 (ja) 2011-04-06
TWI365262B (zh) 2012-06-01
CN101375090B (zh) 2011-01-12
US8181972B2 (en) 2012-05-22
WO2007088806A1 (ja) 2007-08-09
CN101375090A (zh) 2009-02-25
JP2007205384A (ja) 2007-08-16
KR20080085059A (ko) 2008-09-22
US20090026717A1 (en) 2009-01-29
KR100950408B1 (ko) 2010-03-29

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