TW200722214A - Addition of D2 TO H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment - Google Patents

Addition of D2 TO H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment

Info

Publication number
TW200722214A
TW200722214A TW095145054A TW95145054A TW200722214A TW 200722214 A TW200722214 A TW 200722214A TW 095145054 A TW095145054 A TW 095145054A TW 95145054 A TW95145054 A TW 95145054A TW 200722214 A TW200722214 A TW 200722214A
Authority
TW
Taiwan
Prior art keywords
reducing gas
providing
target assembly
deuterium
calibrate
Prior art date
Application number
TW095145054A
Other languages
English (en)
Inventor
Chun Christine Dong
Eugene Joseph Karwacki
Richard E Patrick
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of TW200722214A publication Critical patent/TW200722214A/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/20Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/20Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • B23K1/206Cleaning
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3489Composition of fluxes; Methods of application thereof; Other methods of activating the contact surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
TW095145054A 2005-12-09 2006-12-04 Addition of D2 TO H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment TW200722214A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/298,262 US7434719B2 (en) 2005-12-09 2005-12-09 Addition of D2 to H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment

Publications (1)

Publication Number Publication Date
TW200722214A true TW200722214A (en) 2007-06-16

Family

ID=37885346

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095145054A TW200722214A (en) 2005-12-09 2006-12-04 Addition of D2 TO H2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment

Country Status (7)

Country Link
US (2) US7434719B2 (zh)
EP (1) EP1795291A1 (zh)
JP (1) JP2007181879A (zh)
KR (1) KR100824889B1 (zh)
CN (1) CN1990150A (zh)
SG (1) SG133505A1 (zh)
TW (1) TW200722214A (zh)

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US8361340B2 (en) 2003-04-28 2013-01-29 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment
US7897029B2 (en) 2008-03-04 2011-03-01 Air Products And Chemicals, Inc. Removal of surface oxides by electron attachment
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US9006975B2 (en) * 2011-02-09 2015-04-14 Air Products And Chemicals, Inc. Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment
CN102931202B (zh) * 2012-02-21 2016-06-29 华中师范大学 自由电荷像素探测器
EP3053691A1 (en) * 2015-02-04 2016-08-10 Illinois Tool Works Inc. Reflow soldering oven with enhanced gas purification system
KR102045186B1 (ko) * 2016-11-22 2019-11-14 센주긴조쿠고교 가부시키가이샤 납땜 방법
TWI611537B (zh) * 2017-04-12 2018-01-11 力成科技股份有限公司 植球製程
KR102136129B1 (ko) * 2019-03-15 2020-07-23 세메스 주식회사 본딩 장치 및 본딩 방법
US20240282734A1 (en) * 2023-02-17 2024-08-22 Air Products And Chemicals, Inc. Apparatus and Method for Wafer Oxide Removal and Reflow Treatment

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Also Published As

Publication number Publication date
JP2007181879A (ja) 2007-07-19
SG133505A1 (en) 2007-07-30
US20070131736A1 (en) 2007-06-14
CN1990150A (zh) 2007-07-04
US7434719B2 (en) 2008-10-14
KR100824889B1 (ko) 2008-04-23
EP1795291A1 (en) 2007-06-13
KR20070061465A (ko) 2007-06-13
US20090008426A1 (en) 2009-01-08

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