TW200719945A - Method of treating gas - Google Patents

Method of treating gas

Info

Publication number
TW200719945A
TW200719945A TW095137850A TW95137850A TW200719945A TW 200719945 A TW200719945 A TW 200719945A TW 095137850 A TW095137850 A TW 095137850A TW 95137850 A TW95137850 A TW 95137850A TW 200719945 A TW200719945 A TW 200719945A
Authority
TW
Taiwan
Prior art keywords
gas
exhaust gas
exhaust
conveyed
composition
Prior art date
Application number
TW095137850A
Other languages
English (en)
Chinese (zh)
Inventor
James Robert Smith
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Publication of TW200719945A publication Critical patent/TW200719945A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW095137850A 2005-10-27 2006-10-14 Method of treating gas TW200719945A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0521944.9A GB0521944D0 (en) 2005-10-27 2005-10-27 Method of treating gas

Publications (1)

Publication Number Publication Date
TW200719945A true TW200719945A (en) 2007-06-01

Family

ID=35515848

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137850A TW200719945A (en) 2005-10-27 2006-10-14 Method of treating gas

Country Status (8)

Country Link
US (1) US8480861B2 (enExample)
EP (1) EP1941073B1 (enExample)
JP (1) JP2009513330A (enExample)
KR (1) KR20080060254A (enExample)
CN (1) CN101297063B (enExample)
GB (1) GB0521944D0 (enExample)
TW (1) TW200719945A (enExample)
WO (1) WO2007048995A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614407B (zh) * 2013-03-28 2018-02-11 荏原製作所股份有限公司 排放氣體除害裝置及真空泵裝置

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080104372A (ko) * 2006-03-16 2008-12-02 어플라이드 머티어리얼스, 인코포레이티드 전자 장치 제조 시스템의 압력 제어 방법 및 장치
FR2932059A1 (fr) * 2008-05-28 2009-12-04 Air Liquide Systeme de traitement par plasma d'un fluide ou melange de fluides
KR20110028396A (ko) * 2008-07-11 2011-03-17 어플라이드 머티어리얼스, 인코포레이티드 전자 수단 제조 공정 배출물을 저감시키기 위한 방법 및 기구
JP2011163150A (ja) * 2010-02-05 2011-08-25 Toyota Industries Corp 水素ガスの排気方法及び真空ポンプ装置
JP5837351B2 (ja) * 2010-08-05 2015-12-24 株式会社荏原製作所 排気系システム
KR101230513B1 (ko) * 2010-12-27 2013-02-06 (주)엘오티베큠 배기 유체 처리 장치
JP5877702B2 (ja) * 2011-12-14 2016-03-08 株式会社ニューフレアテクノロジー 成膜装置および成膜方法
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
KR20140107758A (ko) 2013-02-28 2014-09-05 삼성전자주식회사 반응 부산물 처리기 및 반응 부산물의 처리방법과 반응 부산물 처리기를 구비하는 반도체 소자 제조설비
CN105209156B (zh) 2013-03-14 2017-05-10 Mks仪器股份有限公司 环形等离子体减少设备和方法
JP6151945B2 (ja) * 2013-03-28 2017-06-21 株式会社荏原製作所 除害機能付真空ポンプ
GB2513300B (en) * 2013-04-04 2017-10-11 Edwards Ltd Vacuum pumping and abatement system
JP6368458B2 (ja) * 2013-05-24 2018-08-01 株式会社荏原製作所 除害機能付真空ポンプ
JP6166102B2 (ja) * 2013-05-30 2017-07-19 株式会社荏原製作所 除害機能付真空ポンプ
GB2515017B (en) * 2013-06-10 2017-09-20 Edwards Ltd Process gas abatement
US20150211114A1 (en) * 2014-01-30 2015-07-30 Applied Materials, Inc. Bottom pump and purge and bottom ozone clean hardware to reduce fall-on particle defects
JP5808454B1 (ja) 2014-04-25 2015-11-10 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラムおよび記録媒体
KR20230051311A (ko) 2014-09-12 2023-04-17 어플라이드 머티어리얼스, 인코포레이티드 반도체 프로세싱 장비 유출물의 처리를 위한 제어기
CN104480468A (zh) * 2014-12-31 2015-04-01 深圳市华星光电技术有限公司 干式蚀刻机及用于捕集气体中磁性颗粒的捕集装置
GB2535703B (en) * 2015-02-23 2019-09-18 Edwards Ltd Gas supply apparatus
JP6749090B2 (ja) * 2015-11-12 2020-09-02 東京エレクトロン株式会社 ハロゲン系ガスを用いる処理装置における処理方法
US20190282948A1 (en) * 2016-01-27 2019-09-19 Imad Mahawili Semiconductor processing system
JP7472114B2 (ja) * 2018-09-28 2024-04-22 ラム リサーチ コーポレーション 堆積副生成物の蓄積からの真空ポンプの保護
WO2020172179A1 (en) * 2019-02-22 2020-08-27 Applied Materials, Inc. Reduction of br2 and cl2 in semiconductor processes
CN109821657B (zh) * 2019-03-12 2024-03-22 华南理工大学 燃煤电厂电除尘器绝缘子室的吹扫装置
US11786858B2 (en) 2019-06-06 2023-10-17 Edwards Vacuum Llc Liquid filter apparatus for gas/solid separation for semiconductor processes
WO2021053972A1 (ja) * 2019-09-19 2021-03-25 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法、プログラム、記録媒体および排ガス処理システム
GB2588906A (en) * 2019-11-13 2021-05-19 Edwards Ltd Gas purged valve
JP7361640B2 (ja) * 2020-03-09 2023-10-16 エドワーズ株式会社 真空ポンプ
US20210402351A1 (en) * 2020-06-26 2021-12-30 Zimmer, Inc. Vacuum generation process for deposition of biomedical implant materials
US11931682B2 (en) 2020-09-22 2024-03-19 Edwards Vacuum Llc Waste gas abatement technology for semiconductor processing

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5453125A (en) * 1994-02-17 1995-09-26 Krogh; Ole D. ECR plasma source for gas abatement
IE80909B1 (en) * 1996-06-14 1999-06-16 Air Liquide An improved process and system for separation and recovery of perfluorocompound gases
US6153260A (en) * 1997-04-11 2000-11-28 Applied Materials, Inc. Method for heating exhaust gas in a substrate reactor
JP3050195B2 (ja) * 1997-12-09 2000-06-12 日本電気株式会社 Ｃｖｄ装置の排気ガス処理方法及び装置
US6689252B1 (en) * 1999-07-28 2004-02-10 Applied Materials, Inc. Abatement of hazardous gases in effluent
US6468490B1 (en) * 2000-06-29 2002-10-22 Applied Materials, Inc. Abatement of fluorine gas from effluent
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
JP2001252527A (ja) 2000-03-13 2001-09-18 Seiko Epson Corp Ｐｆｃの処理方法および処理装置
US6592817B1 (en) * 2000-03-31 2003-07-15 Applied Materials, Inc. Monitoring an effluent from a chamber
US7378062B2 (en) 2000-05-29 2008-05-27 Three Tec Co., Ltd. Object processing apparatus and plasma facility comprising the same
US6514471B1 (en) 2000-10-31 2003-02-04 Air Products And Chemicals, Inc. Removing fluorine from semiconductor processing exhaust gas
US6955707B2 (en) 2002-06-10 2005-10-18 The Boc Group, Inc. Method of recycling fluorine using an adsorption purification process
JP2004223365A (ja) 2003-01-21 2004-08-12 Rohm Co Ltd ガス処理装置
GB0412623D0 (en) * 2004-06-07 2004-07-07 Boc Group Plc Method controlling operation of a semiconductor processing system
US7368000B2 (en) 2004-12-22 2008-05-06 The Boc Group Plc Treatment of effluent gases
GB0509163D0 (en) 2005-05-05 2005-06-15 Boc Group Plc Gas combustion apparatus
JP2006332339A (ja) * 2005-05-26 2006-12-07 Sharp Corp 真空装置及び除害システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614407B (zh) * 2013-03-28 2018-02-11 荏原製作所股份有限公司 排放氣體除害裝置及真空泵裝置

Also Published As

Publication number Publication date
GB0521944D0 (en) 2005-12-07
WO2007048995A1 (en) 2007-05-03
US20100071548A1 (en) 2010-03-25
CN101297063A (zh) 2008-10-29
JP2009513330A (ja) 2009-04-02
EP1941073A1 (en) 2008-07-09
EP1941073B1 (en) 2013-04-17
CN101297063B (zh) 2012-07-04
US8480861B2 (en) 2013-07-09
KR20080060254A (ko) 2008-07-01

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