TW200702735A - Diffraction type beam homogenizer optical system using wedge - Google Patents

Diffraction type beam homogenizer optical system using wedge

Info

Publication number
TW200702735A
TW200702735A TW095115113A TW95115113A TW200702735A TW 200702735 A TW200702735 A TW 200702735A TW 095115113 A TW095115113 A TW 095115113A TW 95115113 A TW95115113 A TW 95115113A TW 200702735 A TW200702735 A TW 200702735A
Authority
TW
Taiwan
Prior art keywords
doe
zero
wedge
image plane
diffraction
Prior art date
Application number
TW095115113A
Other languages
English (en)
Other versions
TWI297083B (zh
Inventor
Takayuki Hirai
Original Assignee
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries filed Critical Sumitomo Electric Industries
Publication of TW200702735A publication Critical patent/TW200702735A/zh
Application granted granted Critical
Publication of TWI297083B publication Critical patent/TWI297083B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
TW095115113A 2005-06-07 2006-04-27 Diffraction type beam homogenizer optical system using wedge TW200702735A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005166337A JP4332855B2 (ja) 2005-06-07 2005-06-07 ウエッジを用いた回折型ビームホモジナイザ光学系

Publications (2)

Publication Number Publication Date
TW200702735A true TW200702735A (en) 2007-01-16
TWI297083B TWI297083B (zh) 2008-05-21

Family

ID=36972973

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095115113A TW200702735A (en) 2005-06-07 2006-04-27 Diffraction type beam homogenizer optical system using wedge

Country Status (5)

Country Link
US (1) US20060274418A1 (zh)
EP (1) EP1731255A3 (zh)
JP (1) JP4332855B2 (zh)
KR (2) KR100823082B1 (zh)
TW (1) TW200702735A (zh)

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GB2438458A (en) * 2006-05-11 2007-11-28 Univ Cambridge Tech Blocking zero-order light in phase shift hologram generation
US20090323739A1 (en) * 2006-12-22 2009-12-31 Uv Tech Systems Laser optical system
DE102007005791B4 (de) * 2007-02-06 2018-01-25 Carl Zeiss Smt Gmbh Diffraktiver Strahlteiler
JP4552956B2 (ja) * 2007-04-03 2010-09-29 セイコーエプソン株式会社 照明装置及びプロジェクタ
JP5202876B2 (ja) * 2007-06-06 2013-06-05 日東電工株式会社 レーザー加工方法及びレーザー加工品
JP5987375B2 (ja) * 2012-03-13 2016-09-07 セイコーエプソン株式会社 光パターン形成装置、電子機器及びレーザー加工機
CN103399406B (zh) * 2013-07-26 2015-07-29 北京润和微光科技有限公司 将高斯光束整形为平顶光束的衍射光学元件及制备方法
DE102014011954A1 (de) * 2013-08-28 2015-03-05 Jenoptik Optical Systems Gmbh Vorrichtung zur Messung einer Leistungsdichteverteilung einer Strahlungsquelle
DE102014007067A1 (de) * 2014-05-15 2015-11-19 Jenoptik Optical Systems Gmbh Vorrichtung zur Erzeugung einer Lichtintensitätsverteilung
US10732424B2 (en) * 2018-02-15 2020-08-04 Kla Corporation Inspection-beam shaping on a sample surface at an oblique angle of incidence
CN110361797A (zh) * 2018-03-28 2019-10-22 福州高意光学有限公司 一种改变激光光强分布膜片的制造方法
KR102636043B1 (ko) 2019-01-21 2024-02-14 삼성디스플레이 주식회사 레이저 에칭 장치와 그것을 이용한 레이저 에칭 방법
DE102019111638A1 (de) * 2019-05-06 2020-11-12 Jenoptik Optical Systems Gmbh Optikeinheit und Verfahren zum Betreiben einer Optikeinheit
CN113009705A (zh) * 2019-12-19 2021-06-22 苏州苏大维格科技集团股份有限公司 一种消除零级衍射影响的结构光组件
US10976415B1 (en) * 2020-11-09 2021-04-13 Aeva, Inc. Techniques for image conjugate pitch reduction
CN115113409B (zh) * 2022-08-26 2022-12-30 成都莱普科技股份有限公司 基于达曼光栅的线性平顶光斑的发生系统、方法及设备
WO2024189688A1 (ja) * 2023-03-10 2024-09-19 日本電信電話株式会社 回折素子の設計方法および回折素子の製造方法

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US3334956A (en) 1963-06-17 1967-08-08 Coleman Instr Corp Selective diffraction grating system
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US4410237A (en) * 1980-09-26 1983-10-18 Massachusetts Institute Of Technology Method and apparatus for shaping electromagnetic beams
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US4521075A (en) * 1983-03-07 1985-06-04 Obenschain Stephen P Controllable spatial incoherence echelon for laser
DE3843876A1 (de) * 1988-12-24 1990-07-12 Leitz Wild Gmbh Spektralmikroskop mit einem photometer
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US5367400A (en) 1992-12-14 1994-11-22 Xerox Corporation Optimal filling of a polygon facet by beam reprofiling
JP3476897B2 (ja) 1994-03-29 2003-12-10 オリンパス株式会社 焦点検出光学系
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JPH1020107A (ja) * 1996-07-09 1998-01-23 Canon Inc 回折光学素子、投影光学系、照明光学系、光学機器、露光装置及びデバイス製造方法
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Also Published As

Publication number Publication date
US20060274418A1 (en) 2006-12-07
JP2006343367A (ja) 2006-12-21
KR20060127744A (ko) 2006-12-13
EP1731255A9 (en) 2007-06-20
KR20080021090A (ko) 2008-03-06
KR101236586B1 (ko) 2013-02-22
EP1731255A3 (en) 2007-03-28
JP4332855B2 (ja) 2009-09-16
TWI297083B (zh) 2008-05-21
EP1731255A2 (en) 2006-12-13
KR100823082B1 (ko) 2008-04-18

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MM4A Annulment or lapse of patent due to non-payment of fees