TW200643671A - Apparatus and method for beam drift compensation - Google Patents

Apparatus and method for beam drift compensation

Info

Publication number
TW200643671A
TW200643671A TW095100763A TW95100763A TW200643671A TW 200643671 A TW200643671 A TW 200643671A TW 095100763 A TW095100763 A TW 095100763A TW 95100763 A TW95100763 A TW 95100763A TW 200643671 A TW200643671 A TW 200643671A
Authority
TW
Taiwan
Prior art keywords
optical elements
passive optical
movement
responsive
thermal conditions
Prior art date
Application number
TW095100763A
Other languages
English (en)
Inventor
Todd E Lizotte
Orest P Ohar
Original Assignee
Hitachi Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Publication of TW200643671A publication Critical patent/TW200643671A/zh

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B7/00—Special arrangements or measures in connection with doors or windows
    • E06B7/26—Rain or draught deflectors, e.g. under sliding wings also protection against light for doors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/047—Detection, control or error compensation of scanning velocity or position
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B3/00—Window sashes, door leaves, or like elements for closing wall or like openings; Layout of fixed or moving closures, e.g. windows in wall or like openings; Features of rigidly-mounted outer frames relating to the mounting of wing frames
    • E06B3/32—Arrangements of wings characterised by the manner of movement; Arrangements of movable wings in openings; Features of wings or frames relating solely to the manner of movement of the wing
    • E06B3/34—Arrangements of wings characterised by the manner of movement; Arrangements of movable wings in openings; Features of wings or frames relating solely to the manner of movement of the wing with only one kind of movement
    • E06B3/42—Sliding wings; Details of frames with respect to guiding
    • E06B3/46—Horizontally-sliding wings
    • E06B3/4609—Horizontally-sliding wings for windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S5/00—Position-fixing by co-ordinating two or more direction or position line determinations; Position-fixing by co-ordinating two or more distance determinations
    • G01S5/16—Position-fixing by co-ordinating two or more direction or position line determinations; Position-fixing by co-ordinating two or more distance determinations using electromagnetic waves other than radio waves

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lasers (AREA)
  • Laser Beam Processing (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
TW095100763A 2005-03-10 2006-01-09 Apparatus and method for beam drift compensation TW200643671A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/077,023 US7321114B2 (en) 2005-03-10 2005-03-10 Apparatus and method for beam drift compensation

Publications (1)

Publication Number Publication Date
TW200643671A true TW200643671A (en) 2006-12-16

Family

ID=36969847

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095100763A TW200643671A (en) 2005-03-10 2006-01-09 Apparatus and method for beam drift compensation

Country Status (5)

Country Link
US (1) US7321114B2 (zh)
JP (1) JP2006253671A (zh)
KR (1) KR20060097668A (zh)
CN (1) CN100568074C (zh)
TW (1) TW200643671A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403049B (zh) * 2010-05-11 2013-07-21 Ind Tech Res Inst 雷射光源產生裝置
TWI728104B (zh) * 2016-05-02 2021-05-21 美商克萊譚克公司 用於照明光束未對準之補償之系統及方法
US11536979B2 (en) 2018-06-22 2022-12-27 Trumpf Laser- Und Systemtechnik Gmbh Optical arrangement and laser system

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7555333B2 (en) 2000-06-19 2009-06-30 University Of Washington Integrated optical scanning image acquisition and display
US7616986B2 (en) * 2001-05-07 2009-11-10 University Of Washington Optical fiber scanner for performing multimodal optical imaging
EP1691666B1 (en) 2003-12-12 2012-05-30 University of Washington Catheterscope 3d guidance and interface system
US7885311B2 (en) 2007-03-27 2011-02-08 Imra America, Inc. Beam stabilized fiber laser
US7530948B2 (en) 2005-02-28 2009-05-12 University Of Washington Tethered capsule endoscope for Barrett's Esophagus screening
US8537203B2 (en) 2005-11-23 2013-09-17 University Of Washington Scanning beam with variable sequential framing using interrupted scanning resonance
US20070213618A1 (en) * 2006-01-17 2007-09-13 University Of Washington Scanning fiber-optic nonlinear optical imaging and spectroscopy endoscope
US9561078B2 (en) 2006-03-03 2017-02-07 University Of Washington Multi-cladding optical fiber scanner
US20070216908A1 (en) * 2006-03-17 2007-09-20 University Of Washington Clutter rejection filters for optical doppler tomography
JP2008105054A (ja) * 2006-10-25 2008-05-08 Sumitomo Heavy Ind Ltd レーザ加工装置
DE102007035715A1 (de) * 2006-12-27 2008-07-03 Robert Bosch Gmbh Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage
WO2008111970A1 (en) * 2007-03-09 2008-09-18 University Of Washington Side viewing optical fiber endoscope
ATE414585T1 (de) 2007-03-30 2008-12-15 Innolas Gmbh System und zugehöriges verfahren zum korrigieren einer laserstrahlablenkeinheit
US8840566B2 (en) 2007-04-02 2014-09-23 University Of Washington Catheter with imaging capability acts as guidewire for cannula tools
US7952718B2 (en) 2007-05-03 2011-05-31 University Of Washington High resolution optical coherence tomography based imaging for intraluminal and interstitial use implemented with a reduced form factor
KR100939043B1 (ko) * 2007-11-19 2010-01-27 에이피시스템 주식회사 레이저 가공장치
DE112008003796B4 (de) * 2008-04-04 2014-11-27 Hewlett-Packard Development Company, L.P. Strahlteiler mit Versatzkompensation
US20090314751A1 (en) * 2008-04-11 2009-12-24 Applied Materials, Inc. Laser scribe inspection methods and systems
JP5416492B2 (ja) * 2009-06-30 2014-02-12 三星ダイヤモンド工業株式会社 レーザ光によるガラス基板加工装置
JP5466528B2 (ja) * 2010-02-16 2014-04-09 エイチアールディー株式会社 ビームローテータ
CN102368589B (zh) * 2011-11-01 2013-01-02 中国科学院光电技术研究所 一种稳定脉冲激光束随机漂移的方法
CN102566048B (zh) * 2012-01-17 2013-07-24 浙江大学 一种基于象散的样品轴向漂移补偿方法和装置
CN102879108B (zh) * 2012-08-14 2014-08-27 中国科学院光电技术研究所 一种带分光四棱锥的四象限跟踪传感器
US9723386B1 (en) 2014-05-05 2017-08-01 Google Inc. Communication device
US10569357B1 (en) * 2014-08-01 2020-02-25 Nlight, Inc. Scanner drift compensation for laser material processing
CN104568753B (zh) * 2014-12-24 2017-08-22 天津大学 基于数字全息的样品漂移主动补偿方法及装置
WO2016187330A1 (en) 2015-05-18 2016-11-24 Lasermotive, Inc. Diffusion safety system
JP2017113788A (ja) * 2015-12-24 2017-06-29 株式会社リコー 光加工装置
DE102016001355B4 (de) * 2016-02-08 2022-03-24 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Verfahren und Vorrichtung zur Analyse von Laserstrahlen in Anlagen für generative Fertigung
US10089738B2 (en) 2016-08-30 2018-10-02 Microsoft Technology Licensing, Llc Temperature compensation for structured light depth imaging system
US10591923B2 (en) * 2017-06-27 2020-03-17 GM Global Technology Operations LLC Method and apparatus for parallel illumination by a VCSEL array
DE102017215973A1 (de) * 2017-09-11 2019-03-14 Robert Bosch Gmbh Vorrichtung und Verfahren zur Bestimmung der Strahllage eines Laserstrahls
US10365211B2 (en) * 2017-09-26 2019-07-30 Kla-Tencor Corporation Systems and methods for metrology beam stabilization
WO2019105664A1 (en) * 2017-11-29 2019-06-06 Asml Netherlands B.V. Laser beam monitoring system
CN112020662A (zh) * 2018-04-28 2020-12-01 深圳市大疆创新科技有限公司 具有光学器件和固态探测器的光探测和测距传感器以及相关联的系统和方法
KR102569941B1 (ko) 2018-09-28 2023-08-23 코닝 인코포레이티드 투명 기판을 수정하기 위한 시스템 및 방법
FR3095605A1 (fr) * 2019-04-30 2020-11-06 Saint-Gobain Glass France Systeme d’alignement d’un dispositif de traitement thermique et son fonctionnement
CN110695521A (zh) * 2019-06-04 2020-01-17 西安中科微精光子制造科技有限公司 激光微孔加工的光束扫描系统
JP7535687B2 (ja) * 2020-01-15 2024-08-19 パナソニックＩｐマネジメント株式会社 レーザ装置及びそれを用いたレーザ加工装置
CN112192021A (zh) * 2020-10-16 2021-01-08 西安中科微精光子制造科技有限公司 激光扫描装置
CN112264721B (zh) * 2020-10-16 2023-05-23 西安中科微精光子科技股份有限公司 激光微孔加工装置
CN112596252B (zh) * 2020-12-30 2023-02-24 南开大学 一种无机械结构的光束漂移补偿装置及其实现方法
DE102021101598A1 (de) * 2021-01-26 2022-07-28 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zum Laserbearbeiten eines Werkstücks
CN112859361B (zh) * 2021-02-22 2023-04-07 广州立景创新科技有限公司 成像校正单元以及成像模块
CN112859282B (zh) * 2021-02-26 2022-11-11 上海航天控制技术研究所 一种光学系统双光楔装置及其零位装调方法
DE102022104530A1 (de) * 2022-02-25 2023-08-31 Trumpf Laser Gmbh Verfahren zum Stabilisieren der Strahllage und Lasersystem mit Strahllagebestimmung
WO2024167702A1 (en) * 2023-02-06 2024-08-15 Electro Scientific Industries, Incorporated Method and apparatus for compensating for thermally-induced beam pointing errors in a laser-processing system
CN118336499B (zh) * 2024-06-12 2024-10-18 长春理工大学 一种自稳定激光装置及输出方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62234383A (ja) * 1986-04-04 1987-10-14 Mitsubishi Electric Corp レ−ザ装置
JPS62234384A (ja) * 1986-04-04 1987-10-14 Mitsubishi Electric Corp レ−ザ装置
JPH0658979B2 (ja) * 1988-02-15 1994-08-03 三菱電機株式会社 レーザビーム位置検出装置
US5489986A (en) * 1989-02-28 1996-02-06 Nikon Corporation Position detecting apparatus
JP3162458B2 (ja) * 1992-02-17 2001-04-25 レーザー濃縮技術研究組合 自動アライメント調整装置
US5315111A (en) * 1992-10-15 1994-05-24 Lasa Industries, Inc. Method and apparatus for laser beam drift compensation
US5923418A (en) * 1995-02-21 1999-07-13 Clark-Mxr, Inc. Apparatus for controlling the position and direction of a laser beam
JPH08293461A (ja) * 1995-04-21 1996-11-05 Nikon Corp 照明装置および該装置を備えた投影露光装置
US6669803B1 (en) * 1997-10-03 2003-12-30 Digital Optics Corp. Simultaneous provision of controlled height bonding material at a wafer level and associated structures
US6002706A (en) * 1997-12-30 1999-12-14 General Electric Company Method and apparatus for controlling the size of a laser beam
US6014206A (en) * 1998-09-28 2000-01-11 Lambda Physik Gmbh Stabilization of angular and lateral laser beam position
US6504629B1 (en) * 1999-03-23 2003-01-07 Digilens, Inc. Method and apparatus for illuminating a display
JP4616983B2 (ja) * 2000-11-22 2011-01-19 キヤノン株式会社 位置検出装置、該検出装置を用いた投影露光装置及びデバイス製造方法
JP4698035B2 (ja) * 2001-02-05 2011-06-08 大日本印刷株式会社 光軸調節装置
JP2002280650A (ja) * 2001-03-21 2002-09-27 Olympus Optical Co Ltd レーザ照射装置
JP2003322799A (ja) * 2002-04-30 2003-11-14 Olympus Optical Co Ltd レーザ顕微鏡システム
JP4177058B2 (ja) * 2002-08-11 2008-11-05 大日本印刷株式会社 光軸調節装置および光軸調節方法
JP4490165B2 (ja) * 2004-05-18 2010-06-23 大日本印刷株式会社 露光装置
US7307711B2 (en) * 2004-10-29 2007-12-11 Hitachi Via Mechanics (Usa), Inc. Fluorescence based laser alignment and testing of complex beam delivery systems and lenses

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403049B (zh) * 2010-05-11 2013-07-21 Ind Tech Res Inst 雷射光源產生裝置
TWI728104B (zh) * 2016-05-02 2021-05-21 美商克萊譚克公司 用於照明光束未對準之補償之系統及方法
US11536979B2 (en) 2018-06-22 2022-12-27 Trumpf Laser- Und Systemtechnik Gmbh Optical arrangement and laser system

Also Published As

Publication number Publication date
US20060202115A1 (en) 2006-09-14
US7321114B2 (en) 2008-01-22
KR20060097668A (ko) 2006-09-14
CN1841172A (zh) 2006-10-04
JP2006253671A (ja) 2006-09-21
CN100568074C (zh) 2009-12-09

Similar Documents

Publication Publication Date Title
TW200643671A (en) Apparatus and method for beam drift compensation
DE602005014502D1 (en) N platform
WO2005069838A3 (en) Optical switching system for catheter-based analysis and treatment
SG152090A1 (en) Scan head calibration system and method
EP1721695A4 (en) LASER PROCESSING FACILITY
ATE324567T1 (de) Bandmass mit laser
MY159728A (en) A system, device and method for detecting seismic acceleration
WO2010030575A3 (en) Adaptive optic beamshaping in laser processing systems
WO2013093633A3 (en) Enhancements to integrated optical assembly
DE60138052D1 (de) Optisches System mit elektronischer Punktgrössensteuerung und Fokussierungskontrolle
WO2006075298A3 (en) Spotlight unit comprising means for adjusting the light beam direction
WO2008073454A3 (en) Multiple-degree of freedom interferometer with compensation for gas effects
DE502007003765D1 (de) Elektrooptischer entfernungsmesser
WO2009055102A3 (en) A system and method for viewing an area using an optical system positioned inside of a dewar
PL2176465T3 (pl) Sposób pomiaru toru kolejowego
ATE525245T1 (de) Optisches system mit einer einrichtung zur kompensation thermischer einflüsse
TW200632897A (en) Methods and apparatus to compensate for power output variations over time
MX2012003189A (es) Dispositivo para cirugia laser oftalmologica.
DE502004011338D1 (de) Radiometer, visiereinrichtung für ein ir-gerät sowie verfahren
ITBO20030536A1 (it) Metodo e sistema per controllare la posizione di una parte meccanica
WO2009154827A3 (en) Floating sheet measurement apparatus and method
WO2008018909A3 (en) Laser energy calibration based on optical measurement
WO2006023418A3 (en) Optical turret and method of use
WO2009135447A3 (en) Interferometric system with compensation of the refractive index fluctuation of the environment
TW200739560A (en) Method and apparatus for measuring a surface structure a near-field object