TW200635158A - Anisotropic conductive connector for inspecting wafer, manufacturing method thereof, waver inspection probe card, manufacturing method thereof, and wafer inspection device - Google Patents

Anisotropic conductive connector for inspecting wafer, manufacturing method thereof, waver inspection probe card, manufacturing method thereof, and wafer inspection device

Info

Publication number
TW200635158A
TW200635158A TW094136560A TW94136560A TW200635158A TW 200635158 A TW200635158 A TW 200635158A TW 094136560 A TW094136560 A TW 094136560A TW 94136560 A TW94136560 A TW 94136560A TW 200635158 A TW200635158 A TW 200635158A
Authority
TW
Taiwan
Prior art keywords
manufacturing
wafer
anisotropic conductive
material layer
conductive connector
Prior art date
Application number
TW094136560A
Other languages
English (en)
Inventor
Kiyoshi Kimura
Fujio Hara
Original Assignee
Jsr Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jsr Corp filed Critical Jsr Corp
Publication of TW200635158A publication Critical patent/TW200635158A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2414—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R2201/00—Connectors or connections adapted for particular applications
    • H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Non-Insulated Conductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW094136560A 2004-10-22 2005-10-19 Anisotropic conductive connector for inspecting wafer, manufacturing method thereof, waver inspection probe card, manufacturing method thereof, and wafer inspection device TW200635158A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004308963 2004-10-22
JP2005021477 2005-01-28

Publications (1)

Publication Number Publication Date
TW200635158A true TW200635158A (en) 2006-10-01

Family

ID=36203044

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094136560A TW200635158A (en) 2004-10-22 2005-10-19 Anisotropic conductive connector for inspecting wafer, manufacturing method thereof, waver inspection probe card, manufacturing method thereof, and wafer inspection device

Country Status (2)

Country Link
TW (1) TW200635158A (zh)
WO (1) WO2006043628A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102396113A (zh) * 2009-04-28 2012-03-28 日立化成工业株式会社 电路连接材料、使用该材料的膜状电路连接材料、电路部件的连接结构以及电路部件的连接方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112753135B (zh) * 2018-10-11 2024-05-10 积水保力马科技株式会社 电连接片及带端子的玻璃板构造

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5193393A (en) * 1975-02-12 1976-08-16 Erasuteitsuku kontakutoshiitonoseizohoho
JPS6032285B2 (ja) * 1977-05-31 1985-07-27 ジェイエスアール株式会社 加圧導電性エラストマ−の製造方法
JPS61250906A (ja) * 1985-04-26 1986-11-08 ジェイエスアール株式会社 導電性エラストマ−シ−ト
JPH1140224A (ja) * 1997-07-11 1999-02-12 Jsr Corp 異方導電性シート
JP2002280092A (ja) * 2001-03-19 2002-09-27 Jsr Corp 異方導電性シートおよびその応用製品
KR20050115297A (ko) * 2003-03-26 2005-12-07 제이에스알 가부시끼가이샤 전기 저항 측정용 커넥터, 전기 저항 측정용 커넥터 장치및 그 제조 방법 및 회로 기판의 전기 저항 측정 장치 및측정 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102396113A (zh) * 2009-04-28 2012-03-28 日立化成工业株式会社 电路连接材料、使用该材料的膜状电路连接材料、电路部件的连接结构以及电路部件的连接方法
CN102396113B (zh) * 2009-04-28 2014-09-24 日立化成株式会社 电路连接材料、使用该材料的膜状电路连接材料、电路部件的连接结构以及电路部件的连接方法

Also Published As

Publication number Publication date
WO2006043628A1 (ja) 2006-04-27

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