TW200614372A - Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film and base material - Google Patents
Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film and base materialInfo
- Publication number
- TW200614372A TW200614372A TW094109411A TW94109411A TW200614372A TW 200614372 A TW200614372 A TW 200614372A TW 094109411 A TW094109411 A TW 094109411A TW 94109411 A TW94109411 A TW 94109411A TW 200614372 A TW200614372 A TW 200614372A
- Authority
- TW
- Taiwan
- Prior art keywords
- film
- nitride film
- oxynitride film
- nitriding
- oxynitride
- Prior art date
Links
- 150000004767 nitrides Chemical class 0.000 title abstract 4
- 238000005121 nitriding Methods 0.000 abstract 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 1
- 230000001419 dependent effect Effects 0.000 abstract 1
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/24—Nitriding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/28—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/0214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being a silicon oxynitride, e.g. SiON or SiON:H
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02247—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by nitridation, e.g. nitridation of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02249—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by combined oxidation and nitridation performed simultaneously
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/3143—Inorganic layers composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides, e.g. formation of oxinitride by oxidation of nitride layers
- H01L21/3145—Inorganic layers composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides, e.g. formation of oxinitride by oxidation of nitride layers formed by deposition from a gas or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/318—Inorganic layers composed of nitrides
- H01L21/3185—Inorganic layers composed of nitrides of siliconnitrides
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004093870 | 2004-03-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200614372A true TW200614372A (en) | 2006-05-01 |
TWI310966B TWI310966B (zh) | 2009-06-11 |
Family
ID=35056470
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094109411A TW200614372A (en) | 2004-03-26 | 2005-03-25 | Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film and base material |
Country Status (7)
Country | Link |
---|---|
US (2) | US7507678B2 (zh) |
EP (1) | EP1739732A1 (zh) |
JP (1) | JP4624991B2 (zh) |
KR (1) | KR20070004881A (zh) |
CN (1) | CN1938835B (zh) |
TW (1) | TW200614372A (zh) |
WO (1) | WO2005093810A1 (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007018121A1 (ja) * | 2005-08-05 | 2007-02-15 | National Institute For Materials Science | 窒化ガリウム等のiii族窒化物の成膜方法 |
JP4815990B2 (ja) * | 2005-10-17 | 2011-11-16 | コニカミノルタホールディングス株式会社 | プラズマ放電処理装置およびプラズマ放電処理方法 |
DE102005051819B3 (de) * | 2005-10-28 | 2007-06-14 | Infineon Technologies Ag | Herstellungsverfahren für Halbleiterstrukturen |
EP2200077B1 (en) * | 2008-12-22 | 2012-12-05 | Soitec | Method for bonding two substrates |
JP5457132B2 (ja) * | 2009-10-19 | 2014-04-02 | 日本碍子株式会社 | プラズマ処理装置 |
JP5781286B2 (ja) * | 2010-09-30 | 2015-09-16 | 芝浦メカトロニクス株式会社 | プラズマ処理方法及びプラズマ処理装置 |
JP2012089651A (ja) * | 2010-10-19 | 2012-05-10 | Showa Denko Kk | Iii族窒化物半導体素子、多波長発光iii族窒化物半導体層及び多波長発光iii族窒化物半導体層の形成方法 |
TWI549163B (zh) * | 2011-09-20 | 2016-09-11 | 應用材料股份有限公司 | 減少摻質擴散之表面穩定化製程 |
JP5848982B2 (ja) * | 2012-02-17 | 2016-01-27 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマのモニタリング方法 |
FR2993659B1 (fr) * | 2012-07-23 | 2014-08-08 | Adixen Vacuum Products | Procede et installation de detection pour le controle d'etancheite d'emballages de produits scelles |
JP6248574B2 (ja) * | 2013-11-22 | 2017-12-20 | 富士通株式会社 | 半導体装置及びその製造方法 |
RU2596554C1 (ru) * | 2015-07-22 | 2016-09-10 | Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Томский государственный университет" (ТГУ, НИ ТГУ) | Способ вакуумно-плазменного азотирования изделий из нержавеющей стали в дуговом несамостоятельном разряде низкого давления |
EP3372705A4 (en) * | 2015-11-04 | 2019-07-17 | National Institute Of Advanced Industrial Science | PROCESS AND PRODUCTION DEVICE FOR NITROGEN COMPOUND |
EP3377668A4 (en) * | 2015-11-22 | 2019-07-17 | Atmospheric Plasma Solutions, Inc. | METHOD AND DEVICE FOR ENHANCING THE ADHESION OF METALLIC SURFACES |
EP4137604A1 (en) * | 2021-08-20 | 2023-02-22 | Vito NV | Method for applying a protective layer to a metal or metal alloy surface, and article comprising such protective layer |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1985004466A1 (en) * | 1984-03-29 | 1985-10-10 | Daidousanso Co., Ltd. | Apparatus for producing high-purity nitrogen gas |
JPH0610356B2 (ja) * | 1988-02-18 | 1994-02-09 | 松下電器産業株式会社 | プラズマ処理装置およびプラズマ温度測定方法 |
JP3899597B2 (ja) * | 1997-01-30 | 2007-03-28 | セイコーエプソン株式会社 | 大気圧プラズマ生成方法および装置並びに表面処理方法 |
JP3799819B2 (ja) * | 1998-05-20 | 2006-07-19 | セイコーエプソン株式会社 | 表面処理方法及び装置 |
US6245616B1 (en) * | 1999-01-06 | 2001-06-12 | International Business Machines Corporation | Method of forming oxynitride gate dielectric |
EP1912253A3 (en) | 2000-03-13 | 2009-12-30 | OHMI, Tadahiro | Method of forming a dielectric film |
JP2002100578A (ja) | 2000-09-25 | 2002-04-05 | Crystage Co Ltd | 薄膜形成装置 |
JP2002155370A (ja) * | 2000-11-14 | 2002-05-31 | Sekisui Chem Co Ltd | 常圧プラズマ処理方法及びその装置 |
JP4420577B2 (ja) * | 2001-04-24 | 2010-02-24 | 積水化学工業株式会社 | シリコンウェハの窒化処理方法及び窒化処理装置 |
JP2003203800A (ja) | 2001-09-14 | 2003-07-18 | Sekisui Chem Co Ltd | 常圧プラズマ処理方法および装置 |
JP2003309117A (ja) * | 2002-04-12 | 2003-10-31 | Tadahiro Omi | 半導体装置及びその製造方法並びに薄膜トランジスタ |
JP2003306774A (ja) * | 2002-04-18 | 2003-10-31 | Konica Minolta Holdings Inc | プラズマ放電処理装置 |
JP4204912B2 (ja) | 2003-06-30 | 2009-01-07 | 株式会社半導体エネルギー研究所 | 窒化装置および半導体装置の作製方法 |
-
2005
- 2005-03-25 KR KR1020067021936A patent/KR20070004881A/ko active IP Right Grant
- 2005-03-25 EP EP05727499A patent/EP1739732A1/en not_active Withdrawn
- 2005-03-25 US US10/594,252 patent/US7507678B2/en not_active Expired - Fee Related
- 2005-03-25 CN CN2005800098314A patent/CN1938835B/zh not_active Expired - Fee Related
- 2005-03-25 TW TW094109411A patent/TW200614372A/zh unknown
- 2005-03-25 JP JP2006511597A patent/JP4624991B2/ja not_active Expired - Fee Related
- 2005-03-25 WO PCT/JP2005/006412 patent/WO2005093810A1/ja active Application Filing
-
2007
- 2007-12-19 US US11/960,558 patent/US20080113519A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2005093810A1 (ja) | 2005-10-06 |
KR20070004881A (ko) | 2007-01-09 |
CN1938835A (zh) | 2007-03-28 |
CN1938835B (zh) | 2011-01-26 |
US20080113519A1 (en) | 2008-05-15 |
EP1739732A1 (en) | 2007-01-03 |
JPWO2005093810A1 (ja) | 2008-02-14 |
JP4624991B2 (ja) | 2011-02-02 |
TWI310966B (zh) | 2009-06-11 |
US20070190801A1 (en) | 2007-08-16 |
US7507678B2 (en) | 2009-03-24 |
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