200529929 (1) 九、發明說明 【發明所屬之技術領域】 本發明，是關於在玻璃基板或半導體晶圓等被處理 物的表面上，以預定寬度塗佈例如光阻劑液體或作爲彩 色濾光片之塗佈液的狹縫噴嘴。 【先前技術】 第4圖是顯示以往之狹縫噴嘴的要部圖，以往技術 下之狹縫噴嘴位於左右半體1 1、1 2之相合面是夾合塡隙 片1 3以螺栓來接合。此情形下，狹縫狀吐出口 1 4的寬 幅尺寸 W是由塡隙片13的厚度所決定。然而，由於要 將塡隙片1 3正確地加工由於有其限度，因此要正確地設 定吐出口 14的寬幅尺寸是有其困難。 對於此，雖被思及不使用塡隙片之狹縫噴嘴，但由 於塡隙片是防止了來自於側面的漏液，所以爲了防止該 液體漏出，必須將側板設置在噴嘴的兩側端。如此之構 造揭示在專利文獻1〜6中。 其中對於專利文獻1〜3所顯示的狹縫噴嘴，是在噴 嘴本體的側面直接安裝有側板。又，對於專利文獻4、5 所顯示的狹縫噴嘴，是在側板及噴嘴本體側面之間夾合 密封板或是密封墊。 又，在專利文獻6，是揭示在噴嘴本體之集流腔呈開 口的側面嵌入槽穴栓塞，並將側板設置於其外側，再者 ’噴嘴的開口寬度是利用氟樹脂製墊片（塡隙片〉來調 -4 - 200529929 (2) 整。 【專利文獻1】日本專利第3 1 0 5 1 6 1號公報 【專利文獻2】日本特開2 0 0 0 - 3 3 3 1 2號公報 【專利文獻3】日本特開2 0 0 0 - 7 0 8 1 7號公報 【專利文獻4】日本特開2002- 8 604 5號公報 【專利文獻5】日本專利第2 9 8 1 8 7 3號公報 【專利文獻6〕日本特開2002-3 6 1 1 5 0號公報 【發明內容】 【發明所要解決之問題】 在先行技術1〜5所揭示之狹縫噴嘴，由於在鄰接於 設置在側板或是側板內側的密封板（密封墊）的部分會 使塗佈液體流速降低，所以從狹縫狀吐出口所吐出的塗 佈液體量會有沿著噴嘴的長度方向不均一而容易使兩端 部呈現不足。 又，在先行技術6中’由於墊片是由撥水性的氟素 樹脂所製成，所以在與該墊片相鄰接的部分，雖然可以 抑制塗佈液體之流速的降低’不過比此更上流側之集流 腔端部與狹縫端部是由不同的構件所封塞，因此在變更 噴嘴的長度方向時，就必須得花費時間調節各別之構件 〇 並且，會產生吐出於基板之塗佈液體的吐出分布受 到側板厚度影響而有所不同的現象。 (3) (3)200529929 【發明解決問題之技術手段】 解決上述課題之本發明之狹縫噴嘴，是由左、右半 體接合而成’左、右半體中之至少一方之半體的相合面 形成有決定狹縫狀吐出口之寬幅尺寸的凹部，並且在狹 縫噴嘴的兩端，安裝有將由於上述凹部所形成的側面開 口予以封閉之側板，且該側板不是由撥水性材料所製成 就是以撥水性材料覆蓋在側板之至少面臨上述側面開口 之部分來作爲其構成。 將位於靠近閉塞住狹縫狀吐出口之側板吐出側之側 板厚度加工到在吐出分布上不會有什麼差異的程度。 【發明效果】 依據本發明’是藉由將狹縫狀吐出流路的兩端部製 作爲撥水性，因此可以抑制在流路兩端部之塗佈液體流 速的降低，故可以獲得均一的塗佈以及均等厚度的塗膜 【實施方式】 【第1種實施形態】 以下依添付圖面說明本發明的實施形態。第1圖是 應用本發明之狹縫噴嘴之塗佈裝置的側面圖；第2圖是 該狹縫噴嘴的立體圖；第3圖是該狹縫噴嘴的分解立體 圖。狹縫噴嘴1是受能夠水平運動以及昇降運動的機框 架2 0所支持，在該機框架2 0的一端側上面設置有液體 -6 - 200529929 (4) 輸送泵浦2 1，於該液體輸送泵浦2〗是經由來自於塗佈液 體槽之供fe管2 2來供給塗佈液體，而於狹縫噴嘴丨是經 由來自於液體輸送泵浦2 1之供給管2 3來供給塗佈液體 之方式而成。又，在狹縫噴嘴】的側面設置有間隙感測 器2 4。 狹縫噴嘴1是由左右半體2、3所組成，其中一方之 半體2的相合面爲製成平面，而同時另一方之半體3貝y 在中間位置形成有延伸於長度方向之集流腔4，並將比該 · 集流腔4還要上方部分5製成與半體2的接合面，將比 集流腔4還要下方部分6予以削磨爲比上方部分5更多 削磨量使之較上方部分後退，而與半體2之相合面之間 形成縫隙，使該縫隙成爲狹縫噴嘴吐出口 7的寬幅尺寸 W。 又，在接合左右半體2、3之狀態下，由於在左右側 面，集流腔4與吐出口 7的側端部是呈開口，故以側板8 、9將該開口密閉成液體密封狀態。 g 在本發明中，側板8、9是由樹脂等撥水性材料所構 成，或是在與半體2、3接合之側板8、9的內側面施以 撥水塗層、該側板8、9在靠近狹縫噴嘴吐出口 7的厚度 爲加工成 0. 1〜1 .Omm (較佳爲 0.5mm以下，更理想爲 0 · 1 〜0 · 3 m m ) 〇 如此地，藉由將朝向狹縫噴嘴吐出口 7側面之開口 以撥水性構件予以封塞，在兩端部之塗佈液體的流速由 於不會有較大的下降，故可均等地進行塗佈。具體而言 -7- 200529929 (5) ’將黏度5 c p之光阻劑，在溫度2 3艽以塗佈量〗〇 〇 〇 # Ι/sec形成1 . 5 // m厚的塗膜。此時兩側膜厚之落差， 可由使用以往狹縫噴嘴時之〇 · 3 V m，改善到使用本發明 之狹縫噴嘴時之0 . 1 // m。 藉由將側板8、9之厚度加工爲〇. 1〜1 . 0ηι1Ώ (較佳爲 0.5 m m以下，更理想爲0 · 1〜〇 . 3 m m )，可以使基板端部 之吐出分布較佳。若將側板之整體厚度加工成〇. i〜 1 .Omm (較佳爲0.5mm以下，更理想爲〇· 1〜〇.3mm )是 無法保持強度，但是若藉由只將吐出口附近加工成〇 . 1〜 1 .Omm (較佳爲〇.5mni以下，更理想爲〇. 1〜〇.3mm〉之 方式’則可以保持作爲側板所需之強度，同時吐出分布 也如第7圖所示有良好效果。 【產業上之可利用能性】 本發明之狹縫噴嘴，可以應用在以預定寬度將光阻 劑液體、S 0 G液體、或是彩色濾光片用之塗佈液體塗佈 在玻璃基板或半導體晶圓表面之裝置。 【圖式簡單說明】 第1圖是應用第1發明之狹縫噴嘴之塗佈裝置的側 面圖。 第2圖是該狹縫噴嘴的立體圖。 第3圖是該狹縫噴嘴的分解立體圖。 第4圖是以往狹縫噴嘴之要部放大圖。 (6) 200529929 第5圖是第2發明之狹縫噴嘴的側面圖。 第6圖是第5圖所示之狹縫噴嘴其側板的要部放大 圖。 第7圖是使用本發明之側板時之狹縫噴嘴的吐出分 布，以及使用以往之側板時狹縫噴嘴之吐出分布之圖。 【主要元件符號說明】 1 : 狹縫噴嘴 2： 左半體 3： 右半體 4· 集流腔 5 : 上方部分 6： 下方部分 7 · 狹縫噴嘴吐出口 8： 側板 9: 側板 1 I :左半體 ]2:右半體 1 3 :塡隙片 1 4 :狹縫狀吐出口 2 〇 :機框架 2 1 :液體輸送泵浦 2 3 :供給管 2 4 :間隙感測器 - 9- 200529929 (7) W: 狹縫噴嘴吐出口的寬幅尺寸200529929 (1) IX. Description of the invention [Technical field to which the invention belongs] The present invention relates to coating a surface of a to-be-processed object such as a glass substrate or a semiconductor wafer with, for example, a photoresist liquid or a color filter with a predetermined width. Slot nozzle for coating liquid of sheet. [Prior art] Fig. 4 is a diagram showing the main part of a conventional slit nozzle. The slit nozzles in the conventional art are located on the left and right halves 11 and 12. The joint surfaces are sandwiched by the crevice pieces 13 and bolted together. . In this case, the width W of the slit-shaped ejection opening 14 is determined by the thickness of the slit sheet 13. However, since there is a limit to correctly processing the crevice sheet 13, it is difficult to correctly set the wide size of the discharge port 14. In this regard, although the slit nozzle which does not use a crevice sheet has been considered, since the crevice sheet prevents liquid leakage from the side, in order to prevent the liquid from leaking out, side plates must be provided at both ends of the nozzle. Such a structure is disclosed in Patent Documents 1 to 6. Among the slit nozzles shown in Patent Documents 1 to 3, a side plate is directly attached to the side of the nozzle body. In the slit nozzles disclosed in Patent Documents 4 and 5, a sealing plate or a gasket is sandwiched between the side plate and the side surface of the nozzle body. In Patent Document 6, it is disclosed that a cavity plug is inserted into the side of the nozzle body where the manifold is opened, and a side plate is provided on the outside thereof. Furthermore, the opening width of the nozzle is made of a fluororesin gasket (crevice).片> 来 调 -4-200529929 (2). [Patent Document 1] Japanese Patent No. 3 1 0 5 1 6 1 [Patent Document 2] Japanese Patent Laid-Open No. 2 0 0 0-3 3 3 1 2 [Patent Document 3] Japanese Patent Laid-Open No. 2 0 0 0-7 0 8 1 7 [Patent Document 4] Japanese Patent Laid-Open No. 2002- 8 604 5 [Patent Document 5] Japanese Patent No. 2 9 8 1 8 7 3 [Patent Document 6] Japanese Patent Laid-Open Publication No. 2002-3 6 1 1 50 [Summary of the Invention] [Problems to be Solved by the Invention] The slit nozzles disclosed in the prior arts 1 to 5 are disposed adjacent to The side plate or the part of the sealing plate (seal) inside the side plate will reduce the flow rate of the coating liquid, so the amount of coating liquid discharged from the slit-shaped discharge port will be uneven along the length of the nozzle, and it is easy to make two The end portion is insufficient. Also, in the prior art 6, 'because the gasket is made of water repellent. Made of fluororesin, although the decrease in the flow rate of the coating liquid can be suppressed in the part adjacent to the gasket, but the end of the current collecting chamber and the end of the slit on the upstream side are different. Therefore, when changing the length direction of the nozzle, it is necessary to take time to adjust the individual components. Furthermore, the distribution of the coating liquid discharged from the substrate may vary depending on the thickness of the side plate. (3) (3) 200529929 [Technical means for solving problems of the invention] The slit nozzle of the present invention that solves the above-mentioned problem is formed by joining left and right halves to at least one of the left and right halves. A recessed portion that determines the width of the slit-shaped discharge port is formed on the mating surface of the joint. Side plates that close the side opening formed by the recessed portion are installed at both ends of the slit nozzle, and the side plate is not made of water-repellent. The material is made of a water-repellent material that covers at least the part of the side plate that faces the side opening. It will be located on the side of the side plate that is close to the slit-shaped outlet. The thickness of the side plate is processed to such an extent that there is no difference in the discharge distribution. [Effects of the Invention] According to the present invention, the ends of the slit-shaped discharge flow path are made water-repellent, so that the two sides of the flow path can be suppressed. The flow rate of the coating liquid at the end is reduced, so that a uniform coating and a coating film of uniform thickness can be obtained. [Embodiment] [First Embodiment] The following describes the embodiment of the present invention with reference to the drawings. The first figure is A side view of a coating device to which the slit nozzle of the present invention is applied; FIG. 2 is a perspective view of the slit nozzle; and FIG. 3 is an exploded perspective view of the slit nozzle. The slit nozzle 1 is subject to horizontal movement and lifting movement. Supported by the machine frame 20, a liquid-6 is provided on one end side of the machine frame 20-200529929 (4) The conveying pump 21 is provided by the coating liquid tank The supply pipe 22 supplies the coating liquid, and the slit nozzle 丨 is formed by supplying the coating liquid through the supply pipe 23 from the liquid transfer pump 21. A gap sensor 24 is provided on the side of the slit nozzle. The slit nozzle 1 is composed of left and right halves 2 and 3, and the joining surface of one of the half halves 2 is made into a plane, while the other half halve 3 y is formed at the middle position with a set extending in the length direction. Flow cavity 4, and the upper part 5 more than the current collecting cavity 4 is made into a joint surface with the half body 2, and the lower part 6 than the current collecting cavity 4 is ground to be more sharpened than the upper part 5. The amount of grinding makes it backward from the upper part, and a gap is formed between the mating surface with the half body 2 so that the gap becomes the wide dimension W of the slit nozzle discharge port 7. When the left and right halves 2 and 3 are joined, since the side ends of the collecting chamber 4 and the discharge port 7 are opened on the left and right sides, the openings are sealed in a liquid-tight state by the side plates 8 and 9. g In the present invention, the side plates 8, 9 are made of a water-repellent material such as resin, or a water-repellent coating is applied to the inner side of the side plates 8, 9 joined to the halves 2, 3, and the side plates 8, 9 The thickness of the nozzle outlet 7 near the slit is processed to 0.1 to 1.0 mm (preferably 0.5 mm or less, and more preferably 0 · 1 to 0 · 3 mm) 〇 In this way, by facing the slit The openings on the side of the nozzle discharge port 7 are blocked by a water-repellent member. Since the flow rate of the coating liquid at both ends does not decrease significantly, the coating can be performed uniformly. Specifically, -7- 200529929 (5) ′ A coating film with a viscosity of 5 c p is formed at a temperature of 23 ° C. at a coating amount of 〖〇 〇 〇 # Ι / sec to form a coating film with a thickness of 1.5 m. At this time, the difference in film thickness on both sides can be improved from 0.3 V m when the conventional slit nozzle is used to 0.1 1 m when the slit nozzle of the present invention is used. By processing the thickness of the side plates 8 and 9 to 0.1 to 1.0 nm (preferably 0.5 m m or less, and more preferably 0 to 1 to 0.3 m m), the ejection distribution at the end of the substrate can be made better. If the entire thickness of the side plate is processed to 0.1 to 1.0 mm (preferably 0.5 mm or less, and more preferably 0.1 to 0.3 mm), the strength cannot be maintained. However, if only the vicinity of the discharge port is processed into 〇. 1 ~ 1.0mm (preferably less than 0.5mni, more preferably 0.1 ~ 0.3mm) The method 'can maintain the strength required as a side plate, and the discharge distribution is also shown in Figure 7 Good effect. [Industrial availability] The slit nozzle of the present invention can be used to coat a photoresist liquid, S 0 G liquid, or a coating liquid for a color filter with a predetermined width. Device on the surface of a glass substrate or semiconductor wafer. [Brief description of the drawings] Figure 1 is a side view of a coating device using the slit nozzle of the first invention. Figure 2 is a perspective view of the slit nozzle. The figure is an exploded perspective view of the slit nozzle. Fig. 4 is an enlarged view of a main part of a conventional slit nozzle. (6) 200529929 Fig. 5 is a side view of the slit nozzle of the second invention. Fig. 6 is a view of Fig. 5 An enlarged view of the main part of the side plate of the slit nozzle shown in Fig. 7 is a side plate using the present invention Figure of the discharge distribution of the slit nozzle, and the figure of the discharge distribution of the slit nozzle when the conventional side plate is used. [Description of the main component symbols] 1: Slot nozzle 2: Left half 3: Right half 4 · Collecting cavity 5 : Upper part 6: lower part 7 · slit nozzle discharge port 8: side plate 9: side plate 1 I: left half] 2: right half 1 3: crevice 1 4: slit-shaped discharge port 2 〇: machine Frame 2 1: Liquid transfer pump 2 3: Supply pipe 2 4: Gap sensor-9- 200529929 (7) W: Wide size of slit nozzle discharge port