TW201636104A - Slit nozzle, coating method and coating device - Google Patents

Abstract

This invention aims to provide a slit nozzle that is able to shorten a length of a film thickness detective part existing at two terminal parts along a width direction of a coating film and to enlarge a product area with uniform film thickness. The slit nozzle 10 of this invention includes: a supply port 16 that supplies a coating solution; a manifold 13 that disperses the coating solution supplied via the supply port along a longitudinal direction; a channel part 14 that is connected to the manifold and guides the coating solution to a discharge port 17. The slit nozzle 10 further includes a discharge port surface 20 that is approximately coplanar with the discharge port; and a pair of cut-off surfaces 21L and 21R, respectively connected to edge parts of two terminals of the discharge port surface along the longitudinal direction and extending towards the manifold. When a longitudinal length of a section of the channel part that is connected to the manifold is set as We, and a longitudinal length of the discharge port is set as Wd, We is greater than Wd.

Description

Slot nozzle, coating method, and coating device

The present invention relates to a slit nozzle for ejecting a coating liquid from a spun-shaped discharge port to form a coating film on a member to be coated, a coating method for forming a coating film on the member to be coated using the slit nozzle, and A coating device that forms a coating film on the member to be coated using the slit nozzle.

As an applicator that applies a coating liquid to a member to be coated such as a glass substrate or a film to form a coating film, a slit nozzle that ejects a coating liquid from a slit-shaped discharge port is known. The slit nozzle includes a supply port that supplies a coating liquid, a manifold that fluidly communicates with the supply port to widen the coating liquid in the longitudinal direction of the slit nozzle, and a slit (flow path portion) that is connected to the manifold The coating liquid passes through the tube; and the discharge port ejects the coating liquid at the outlet of the discharge slit. The coating liquid that has flowed into the manifold from the supply port is widened in the longitudinal direction by the manifold, and after being filled in the manifold, the slit is ejected from the discharge port to a predetermined interval (gap). On the coated member. At this time, when the slit nozzle is relatively moved with respect to the member to be coated, the coating liquid is discharged in the same manner throughout the longitudinal direction of the discharge port, so that a coating film having a uniform film thickness can be formed on the member to be coated. Patent Document 1 discloses a slit nozzle which optimizes the cross-sectional shape of the manifold or the slit width of the discharge slit, and forms a uniform coating in the longitudinal direction of the slit nozzle, that is, in the width direction of the coating film. membrane.

However, depending on the characteristics of the coating liquid (viscosity or wettability, etc.) or coating conditions (coating speed, gap, discharge pressure, etc.), as shown in Fig. 6(a), the length from the length direction Wd The coating liquid discharged from the discharge port 17 to the member to be coated W spreads from both ends of the discharge port 17 toward both sides in the longitudinal direction, and the length Wc larger than the length Wd becomes the coating width, and a coating film is formed on the member to be coated W. As shown in FIG. 6(b), the film thickness of the coating film formed in this manner is uniform and uniform in the film thickness t0 at the center portion, but is partially expanded at the both end portions in the width direction of the coating film. The effect becomes smaller than the film thickness t0. As a result, in the both end portions in the width direction of the coating film, a film thickness defect portion in which the film thickness does not converge within a certain reference is generated over a considerable length range, and the uniform film thickness region which can be used as a product is remarkably reduced.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-5616

The partial expansion of the coating liquid which is the root cause of the above problem cannot be completely suppressed by the mechanism for optimizing the cross-sectional shape of the manifold or the slit width of the discharge slit as shown in Patent Document 1, and integrally discharging the coating liquid uniformly. Therefore, the film thickness at both end portions in the width direction of the coating film cannot be eliminated.

The present invention has been made in view of the above-mentioned problems, and it is a main object of the present invention to provide a film thickness defect portion which is reduced in a specific film thickness at both end portions in the width direction of a coating film even in a coating liquid or coating condition having an arbitrary characteristic. In the region, a slit nozzle having a specific film thickness and a uniform product region, and a coating method and a coating device capable of forming a coating film having uniform film thickness and uniformity throughout the entire region can be formed.

The slit nozzle of the present invention is characterized in that it is a liquid sprayed from a spout-like discharge port, and includes a supply port for supplying a coating liquid, and a manifold for supplying a coating liquid supplied from the supply port in a longitudinal direction. Dispersing; and a flow channel portion connected to the manifold to introduce the coating liquid Leading to the discharge port; further comprising: a discharge port surface which is substantially flush with the discharge port; and a pair of cut-off surfaces respectively connected to the edges of the longitudinal ends of the discharge port face, and facing the manifold side When the length in the longitudinal direction of the connection position of the flow path portion with the manifold is We and the length in the longitudinal direction of the discharge port is Wd, We> Wd.

In the coating method of the present invention, the coating nozzle is sprayed with a coating liquid from the discharge port while the slit nozzle is relatively moved relative to the member to be coated, and a coating liquid is applied onto the surface of the member to be coated to form a coating film.

The coating apparatus of the present invention is characterized by comprising: the slit nozzle; a supply mechanism that supplies a coating liquid to the slit nozzle; a support mechanism that supports the member to be coated; and a moving mechanism that causes the slit nozzle to be opposed to the support mechanism The supported coated members are relatively moved.

According to the slit nozzle of the present invention, even if a partial spread of the coating liquid occurs at both end portions in the longitudinal direction of the discharge port, the coating is applied at a coating width longer than the length of the discharge port, and is also formed at both ends in the longitudinal direction of the discharge port. Since the coating liquid is partially ejected in accordance with the expansion of the coating liquid, the film thickness at both end portions in the width direction of the coating film can be greatly reduced. As a result, it is possible to extremely narrow the region of the film thickness defect portion which is smaller than the specific film thickness at both end portions in the width direction of the coating film, so that the product region having a specific film thickness and uniformity can be remarkably enlarged.

According to the coating method and the coating apparatus of the present invention, since the coating liquid is applied to the member to be coated by using the above-described excellent slit nozzle, a coating film having a uniform thickness and high quality can be formed over almost the entire area of the coating film.

1‧‧‧ Coating device

2‧‧‧Substage (support organization)

3‧‧‧Mobile agencies

4‧‧‧Pipe

5‧‧‧ pump (supply mechanism)

6‧‧‧storage tank

10‧‧‧Split nozzle

11‧‧‧1st block

12‧‧‧ Block 2

13‧‧‧Management

14‧‧‧Running Department (spraying slits)

15‧‧‧shims

15aL‧‧‧1st inner wall

15aR‧‧‧1st inner wall

15bL‧‧‧2nd inner wall

15bR‧‧‧2nd inner wall

15L‧‧‧ shimming

15R‧‧‧ shimming

16‧‧‧ supply port

17‧‧‧Spray outlet

20‧‧‧Outlet surface

21L‧‧‧ cut-off

21R‧‧‧ cut-off

31‧‧‧ inner surface

31A‧‧‧ inner surface

31B‧‧‧ inner surface

32‧‧‧ inner surface

33L‧‧‧Edge

33R‧‧‧Edge

C-C‧‧‧ connection location

G‧‧‧ interval (gap)

L‧‧‧ tilt length

Lp‧‧‧Split interval

LP‧‧‧Split interval

M‧‧·coated film

Q‧‧‧Flow

Q0‧‧‧unit flow

Q1‧‧‧ unit flow

T0‧‧‧ film thickness

W‧‧‧coated components

W0‧‧‧ length

W1‧‧‧ length

Wc‧‧‧ length

Wd‧‧‧ length

We‧‧‧ length

Wf‧‧‧ length

Wg‧‧‧ length

Wm‧‧‧ length

Wp‧‧‧ length

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

Fig. 1 is a side cross-sectional view schematically showing the configuration of a slit nozzle according to an embodiment of the present invention.

Fig. 2 is a perspective view schematically showing a configuration of a coating apparatus including a slit nozzle according to an embodiment of the present invention.

Fig. 3 is an exploded perspective view showing a slit nozzle according to an embodiment of the present invention.

Fig. 4 is a front cross-sectional view showing the slit nozzle of the embodiment of the present invention along the longitudinal direction.

Fig. 5(a) is a front cross-sectional view showing the application state of the slit nozzle, and Fig. 5(b) is a film thickness distribution diagram of the coating film along the longitudinal direction of the slit nozzle.

Fig. 6(a) is a front cross-sectional view showing the application state of the prior slit nozzle, and Fig. 6(b) is a film thickness distribution diagram of the coating film along the longitudinal direction of the slit nozzle.

Fig. 7 is a view showing a film thickness distribution of a coating film along the longitudinal direction, which is an example of the application of the slit nozzle of the present invention.

Fig. 8 (a) is a front cross-sectional view of the slit nozzle according to another embodiment of the present invention along the longitudinal direction, and (b) is a side cross-sectional view of the same slit nozzle.

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. Further, the present invention is not limited to the following embodiments. Further, it can be appropriately changed without departing from the scope of the effects of the invention.

Fig. 1 is a side cross-sectional view showing a configuration of a slit nozzle 10 according to an embodiment of the present invention, and Fig. 2 is a perspective view schematically showing a configuration of a coating device 1 including the slit nozzle 10 of the present embodiment.

As shown in Fig. 1, the slit nozzle 10 of the present embodiment includes a supply port 16 for supplying a coating liquid, and a manifold 13 for dispersing the coating liquid supplied from the supply port 16 in the longitudinal direction and a flow path portion (discharging) The slit 14 is connected to the manifold 13 to guide the coating liquid to the discharge port 17. The supply port 16 and the manifold 13 are disposed in the first block 11. Further, the inner surface 31 of the first block 11 and the inner surface 32 of the second block 12 sandwich the shims 15 therebetween, and the first block 11 and the second block 12 are integrally joined to each other. Thereby, the interval between the inner surface 31 and the inner surface 32 of the flow path portion 14 in the X direction becomes the slit interval Lp. Therefore, the thickness of the shims 15 is equal to the slit interval Lp. Further, the first block 11 and the second block which are substantially flush with the discharge port 17 The lowermost end surface of the block 12 serves as the discharge port surface 20. The discharge port surface 20 extends in a longitudinal direction (Y direction) perpendicular to the paper surface.

When the coating is performed by the slit nozzle 10, the gap between the discharge port 17 which is the outlet of the flow path portion 14 and the member W to be coated is maintained at a constant interval (gap) G, and the slit nozzle 10 is moved in the X direction. The coating liquid is ejected from the spout 17 of the slit shape. Thereby, the coating liquid spreads from the discharge port 17 in the X direction along the discharge port surface 20 and reaches the to-be-coated member W, and the coating film M is formed on the to-be-coated member W.

As shown in Fig. 2, the coating apparatus 1 of the present embodiment includes a stage (supporting mechanism) 2 that supports an object to be coated W such as a glass substrate, and a slit nozzle 10 on which the member W to be coated is placed. a coating liquid; a storage tank 6 for storing a coating liquid; a pump (supply mechanism) 5 for supplying the coating liquid in the storage tank 6 to the slit nozzle 10; and a moving mechanism 3 for making the slit nozzle 10 relative to the stage The two coated members W supported by the two are relatively moved in the X direction. The coating liquid in the sump 6 is supplied to the slit nozzle 10 through the pipe 4 by the pump 5. Moreover, the coating apparatus 1 also includes a Z-direction moving mechanism (not shown) that freely moves the slit nozzle 10 in the vertical direction, that is, in the Z direction. Thereby, the discharge port 17 of the slit nozzle 10 and the member to be coated W can be set to a constant interval (gap) G in the Z direction.

In the slit nozzle 10, as shown in FIG. 3, the first block 11, the second block 12, the manifold 13, and the discharge port surface 20 extend in the Y direction in the longitudinal direction. The discharge port surface 20 is formed at the center portion in the longitudinal direction at the lowermost end surface of the first block 11 and the second block 12 in the up-down direction (Z direction), but the shim sheets 15 are further added to both end portions in the longitudinal direction. It is composed of the lowermost end surface. In any case, the discharge port surface 20 is formed in a substantially flush plane with the discharge port 17.

Further, in Fig. 3, the edge portions 33L and 33R which are the both ends in the longitudinal direction of the discharge port surface 20 are shown, and the edges from the edge portions opposite to the discharge port surface 20 are obliquely extended in the longitudinal direction from the edge portions 33L and 33R. Cut-off faces 21L, 21R. Similarly to the discharge port surface 20, the edge portions 33L and 33R and the cutoff surfaces 21L and 21R are formed by bonding the corresponding portions of the first block 11, the second block 12, and the shim piece 15. That is, the edge portions 33L and 33R are the first block 11, the second block 12, and the interstitial The corresponding line segments of the sheet 15 are formed in a substantially linear shape. On the other hand, the cut surfaces 21L and 21R are configured such that the respective inclined surfaces of the first block 11, the second block 12, and the shim 15 are substantially flush.

Next, FIG. 4 is a front cross-sectional view of the slit nozzle 10 in the longitudinal direction, and the slit nozzle 10 includes a discharge port surface 20 which is substantially flush with the discharge port 17 and a pair of cut-off faces 21L and 21R. The edge portions 33L and 33R are connected to both ends in the longitudinal direction of the discharge port surface 20, and extend toward the manifold 13 side. As described above, the cut-off surfaces 21L and 21R are formed of inclined surfaces at the respective positions of the first block 11, the second block 12, and the shim sheet 15, similarly to the discharge port surface 20. In FIG. 4, the length in the longitudinal direction between the edge portions 33L and 33R at both ends in the longitudinal direction of the discharge port surface 20 is Wp.

Further, as shown in FIG. 4, the slit nozzle 10 is provided inside to form an area occupied by the flow path portion 14 ( The shims 15 of the concave portion of the shape. Here, in order to form the flow path portion 14, the first inner walls 15aL and 15aR are formed at both ends in the longitudinal direction of the manifold 13 side of the shim sheet 15 so as to have a constant length in the longitudinal direction, and vice versa. Both ends in the longitudinal direction of the discharge port 17 side are provided with the second inner walls 15bL and 15bR so as to be inclined toward the center side toward the discharge port 17 over the range of the inclined length L in the discharge direction. In addition, the discharge direction is the Z direction. Thereby, the flow path portion 14 is formed from the manifold 13 side toward the discharge port 17 side in the path from the manifold 13 to the discharge port 17, and the length in the longitudinal direction is decreased over the range of the inclined length L in the discharge direction. As a result, when the length in the longitudinal direction of the connection position CC of the flow path portion 14 and the manifold 13 is We, and the length in the longitudinal direction of the discharge port 17 is Wd, the method becomes We>Wd. form.

Next, the action of supplying the coating liquid to the slit nozzle 10 having the configuration shown in Fig. 4 and forming a coating film on the member to be coated W will be described with reference to Fig. 5 . Fig. 5(a) is a front cross-sectional view showing the application state of the slit nozzle 10, and Fig. 5(b) is a film thickness distribution diagram of the coating film along the longitudinal direction.

First, if we look at Figure 5 (a), it shows the structure shown in Figure 4 as a front cross-sectional view. The slit nozzle 10 is supplied with a coating liquid, and is applied to the member W to be coated with a length Wc in the longitudinal direction. When the coating liquid is supplied from the pump 5 to the supply port 16 of the slit nozzle 10 at the flow rate Q, the coating liquid is filled in the flow path portion 14 at the connection position C-C after the manifold 13 is filled. The length of the coating liquid in the longitudinal direction from the connection position CC toward the discharge port 17 is constant (the area defined by the first inner walls 15aL and 15aR), and the coating liquid spreads over the entire length We are in the longitudinal direction, with an average unit length. The flow rate, that is, the unit flow rate q0, passes in the same manner. In addition, q0 × We = Q. The length in the longitudinal direction of the region in which the length in the longitudinal direction is constant is reduced from We to Wd (the region defined by the second inner walls 15bL and 15bR), and flows through both ends in the longitudinal direction of the flow path portion 14. The coating liquid in the vicinity is guided by the second inner walls 15bL and 15bR, and is concentrated toward the length W1 in the longitudinal direction toward both end portions in the longitudinal direction of the discharge port 17 on the center side. As a result, the coating liquid discharged from the discharge port 17 is discharged at a unit flow rate q0 over the length W0 in the longitudinal direction of the center portion, and is in a range from the both end portions in the longitudinal direction of the discharge port 17 to the length W1. The unit flow rate q1 of the amount by which the coating liquid is turned is discharged from the vicinity of both end portions in the longitudinal direction of the flow path portion 14 in increments. In addition, q0 × W0 + 2 × q1 × W1 = Q. Therefore, even if the coating liquid discharged from the discharge port 17 of the length Wd in the longitudinal direction spreads from both ends in the longitudinal direction of the discharge port 17, it is applied to the member to be coated W by the length Wc larger than the length Wd, from the unit flow rate q0 to q1. The amount of the increment may also be added to the amount by which the film thickness is decreased from the expansion of the coating liquid at both ends in the longitudinal direction of the discharge port 17. As a result, as shown in FIG. 5(b), the film thickness t0 at the center portion can be made uniform over the range of the length Wf in the longitudinal direction of the length Wd of the discharge port 17. Further, when the moving speed of the slit nozzle 10 in the X direction is V0, t0 = q0 / V0.

Further, in FIG. 5(a), the length Wc in the longitudinal direction of the coating width of the coating film is slightly larger than the length Wp in the longitudinal direction between the edge portions 33L and 33R at both ends in the longitudinal direction of the discharge port surface 20. This is because the pair of cut surfaces 21L and 21R are formed by connecting the edge portions 33L and 33R in the longitudinal direction. Therefore, the application liquid from the both end portions of the discharge port 17 is extended by the pair of cut surfaces that pass over the edge portions 33L and 33R. Limited by 21L and 21R.

According to the action described above, when the coating film is formed by using the slit nozzle 10 of the present embodiment, the coating liquid is partially sprayed from both ends in the longitudinal direction of the discharge port 17, and the expansion of the coating liquid after the discharge is restricted. Since the coating width (length Wc) of the coating film is restricted, it is possible to prevent the film thickness in the longitudinal direction of the slit nozzle 10, that is, in the both end portions in the width direction of the coating film, from being substantially the same as the thickness of the central portion. . Thereby, the length of the film thickness defect portion at both end portions in the width direction of the coating film can be reduced, and the product region having a uniform film thickness can be enlarged.

In the case where the amount of expansion of the coating liquid from both ends in the longitudinal direction of the discharge port 17 is large, and the coating width, that is, the length Wc, is Wc ≧ Wp which is equal to or longer than the length Wp between the edge portions 33L and 33R, In this case, the slit nozzle 10 is configured to be We>Wd and more preferably We WeW. In addition, when the amount of the coating liquid from the both ends of the discharge port 17 is small and Wc < Wp, if We> Wd, the film thickness in the both ends in the longitudinal direction can be prevented from being small. It is roughly the same as the film thickness at the center.

Further, as a comparative example, the case where the slit nozzle 10 is formed under the condition that We, Wd, and Wp are not preferable, that is, the film thickness distribution in the case of coating with the previous slit nozzle is shown. Fig. 6(a) is a front cross-sectional view corresponding to Fig. 5(a) showing the application state of the slit nozzle 10 which is formed under the conditions of poor We, Wd, and Wp, and Fig. 6(b) is along the thin line at this time. The film thickness distribution pattern of the coating film in the longitudinal direction of the slit nozzle 10.

When FIG. 6(a) is observed, the slit nozzle 10 is configured to have Wp>We=Wd=Wm, and a coating film is formed on the member to be coated with a length Wc larger than the length Wp as a coating width. Further, the length Wm is the length of the longitudinal direction of the manifold 13.

First, when the coating liquid is supplied from the supply port 16 at the flow rate Q, the coating liquid is extruded from the manifold 13 at the connection position CC in the range of the length We in the same manner as the unit flow rate q0, and the coating liquid is pushed out to the flow path portion 14 in the same manner. The unit flow rate q0 is discharged from the discharge port 17 in the same manner over the range of the length Wd. Thereafter, the coating liquid is spread to the length Wc and applied to the member to be coated. If the film thickness distribution in the longitudinal direction of the coating film formed in this manner is observed in FIG. 6(b), Then, since the length Wd of the coating liquid from the longitudinal direction of the discharge port 17 is extended to the coating width of the coating film, that is, the length Wc, with respect to the film thickness t0 of the center portion, the film thickness is smaller than the film thickness toward both end portions of the coating film. T0. In addition, when the coating liquid is expanded in the longitudinal direction (the width direction of the coating film) from both ends in the longitudinal direction of the discharge port 17, the coating liquid is carried out from the vicinity of both ends in the longitudinal direction of the discharge port 17 of the length Wd, so that the film is formed. The length in the longitudinal direction of the region of the thickness t0 is smaller than the length Wf of the length Wd of the discharge port 17.

As described above, in order to increase the film thickness to the specific value t0 and the uniform product region to the length Wd or more of the discharge port 17, and to approach the coating width of the coating film, that is, the length Wc, it is necessary to use the above-described preferable condition, that is, We>Wd. Further, a better condition, that is, We>Wp constitutes the slit nozzle 10.

In the present embodiment, the decreasing rate (We-Wd)/L of the length of the flow path portion 14 in the longitudinal direction is based on the characteristics (viscosity or wettability, etc.) of the coating liquid, or the coating conditions (coating speed, discharge pressure, etc.). ) You can decide as appropriate. Further, it is also possible to determine the degree of reduction in film thickness at both end portions in the width direction of the coating film. However, the inclination length L relating to the decreasing rate is preferably set to 20 mm or less. In this case, the discharge flow rate of the coating liquid at both end portions in the longitudinal direction of the discharge port 17 is locally increased, and the amount of the increase is not averaged over the entire length Wd of the discharge port 17.

In addition, in the present embodiment, the second inner walls 15bL and 15bR are formed by inclined surfaces on the straight line in order to direct the coating liquid flowing through the longitudinal end portions of the flow path portion 14 toward the center side, but the present invention is not limited thereto. For example, it may be an arc-shaped or curved inclined surface.

Further, in the present embodiment, since the region in which the flow path portion 14 is formed is defined by the shim piece 15 disposed in the slit nozzle 10, the shim 15 provided in the slit nozzle 10 can be replaced with a different one. Further, the decreasing rate of the length of the flow path portion 14 in the longitudinal direction is adjusted.

In general, since the length Wd in the longitudinal direction of the discharge port 17 is determined according to the coating width of the formed coating film or the configuration of the slit nozzle 10, the adjustment of the decreasing rate of the length of the flow path portion 14 in the longitudinal direction is only required to adjust the flow. The connection position of the land portion 14 to the manifold 13 is C- The length We may be in the longitudinal direction of C, or the length L may be inclined.

Further, as shown in FIG. 4, the length Wm in the longitudinal direction of the manifold 13 is preferably set to be slightly larger in advance so as to always be Wm ≧ We. Therefore, even if the shim sheet 15 having a different length We is replaced, the length of the coating liquid from the joint position CC to the flow path portion 14 over the longitudinal direction We can always be the same as the unit flow rate q0 from the manifold 13 Press out.

Moreover, in the present embodiment shown in FIG. 4, the length from the both ends in the longitudinal direction of the discharge port 17 to the length direction of the edge portions 33L and 33R is shown by the length Wg. When the length Wg is small, the amount of expansion of the coating liquid from both ends of the discharge port 17 is small, so Wg is preferably 1 mm or less. Thereby, the length of the film thickness defect portion at both end portions in the width direction of the coating film can be easily reduced.

Next, the effect of improving the film thickness shape when the coating liquid having a high surface tension is applied by the slit nozzle 10 will be described with reference to Fig. 7 . Fig. 7 is a view showing a film thickness distribution of a coating film along the longitudinal direction, which is an example of the application of the slit nozzle 10 of the above embodiment. In the case of the conventional slit nozzle (for example, We=Wd<Wp), the coating liquid is sucked from the vicinity due to the surface tension at both end portions in the width direction of the coating film as shown by the broken line. The film thickness at both end portions is much larger than the film thickness t0 at the center portion. On the other hand, the film thickness near the both end portions of the coating film after the coating liquid is taken out by suction becomes a film at the center portion. Thick t0 is much smaller. In this case, when the slit nozzle 10 according to the embodiment of the present invention is used, since We≧Wp and We>Wd, the discharge flow rate of the coating liquid is locally increased only at the both end portions in the longitudinal direction of the discharge port 17, The amount of the increment is added to the vicinity of both end portions in the width direction of the coating film after the coating liquid is taken out by suction, so that it can be eliminated from the center portion even at the both end portions of the coating film as shown by the solid line. The film thickness t0 is reduced while maintaining the same film thickness t0. Thereby, a uniform film thickness t0 can be maintained over a range of length Wf greater than the length Wd of the discharge port 17. As a result, even when a coating liquid having a high surface tension is applied, the length of the film thickness defective portion can be reduced, and the product region having a uniform film thickness can be enlarged.

The present invention has been described above by way of a preferred embodiment, but such a description is not Various changes can be made for the limitation.

For example, in the above embodiment, the shim sheet 15 is formed by arranging the outer casing shape in conformity with the outer shape of the first block 11 and the second block 12. On the other hand, for example, it is also possible to adopt the form shown in FIG. Here, Fig. 8(a) is a front cross-sectional view along the longitudinal direction of the slit nozzle 10 of another embodiment, and Fig. 8(b) is a side cross-sectional view of the same slit nozzle 10. When FIG. 8(a) is observed, it is assumed that only one region of the flow path portion 14 is formed, and the pair of shims 15L and 15R are arranged. In this case, as shown in FIG. 8(b), the inner surface 31A of the first block 11 is pressed against the inner surface 32 of the second block 12 instead of the shim piece 15 on the inner surface 31A and the inner surface 31B. A step is formed between the step sizes, which becomes the slit interval Lp.

Further, in the above-described embodiment, the cut surfaces 21L and 21R are inclined surfaces that extend from the discharge port surface 20 toward the manifold 13 side. However, the present invention is not limited thereto, and may be, for example, an arc shape or Curved sloped surface. Further, the inclination angle of the cut surfaces 21L and 21R with respect to the discharge port surface 20 is not particularly limited, and is preferably set, for example, in the range of 1 to 75°.

Further, in the coating method of the present invention, the coating apparatus 1 is used to spray the coating liquid from the discharge port 17 while the slit nozzle 10 of the preferred embodiment described above is relatively moved in the X direction with respect to the member to be coated W. The coating liquid is applied onto the surface of the member to be coated W to form a coating film. Further, the shims 15 provided in the slit nozzle 10 may be replaced, and the coating liquid may be ejected by adjusting to a different length We. More specifically, it can be carried out in the following steps (1) to (3).

(1) In the coating device 1, after the slit nozzle 10 is moved to the application start position of the member to be coated W, the slit nozzle 10 is lowered by a Z-direction moving mechanism (not shown), and the discharge port 17 is made The interval (gap) G in the Z direction between the surfaces of the members W to be coated becomes a specific value.

(2) Next, the slit nozzle 10 starts moving at the speed V0 in the X direction, and the coating liquid is supplied from the pump 5 to the slit nozzle 10 at the flow rate Q. Thereby, the coating liquid is ejected from the ejection port 17 toward the member to be coated W that relatively moves in the X direction, and the coating liquid is applied to the member W to be coated. A coating film is formed on the surface.

(3) When the slit nozzle 10 is moved to the coating end position of the member to be coated, the supply of the coating liquid from the pump 5 is stopped, and the Z-direction moving mechanism (not shown) is driven to raise the slit nozzle 10, and the coating is finished. The coated member W on which the coating film is formed is moved to the next step such as drying.

Further, the film thickness distribution in the width direction of the formed coating film (the longitudinal direction of the slit nozzle 10) may be replaced with the shim sheet 15 having a different length We, and the above coating method may be carried out. Thereby, the film thickness distribution can be adjusted and improved, and the film thickness of the center portion can be enlarged and uniform.

10‧‧‧Split nozzle

11‧‧‧1st block

13‧‧‧Management

14‧‧‧Running Department (spraying slits)

15‧‧‧shims

15aL‧‧‧1st inner wall

15aR‧‧‧1st inner wall

15bL‧‧‧2nd inner wall

15bR‧‧‧2nd inner wall

16‧‧‧ supply port

17‧‧‧Spray outlet

20‧‧‧Outlet surface

21L‧‧‧ cut-off

21R‧‧‧ cut-off

33L‧‧‧Edge

33R‧‧‧Edge

C-C‧‧‧ connection location

L‧‧‧ tilt length

Wd‧‧‧ length

We‧‧‧ length

Wg‧‧‧ length

Wm‧‧‧ length

Wp‧‧‧ length

Y‧‧‧ direction

Z‧‧‧ direction

Claims (8)

A slit nozzle which ejects a coating liquid from a slit-shaped discharge port, and includes: a supply port for supplying a coating liquid; and a manifold for dispersing a coating liquid supplied from the supply port in a longitudinal direction; a flow path portion connected to the manifold to guide the coating liquid to the discharge port; further comprising: a discharge port surface that is substantially flush with the discharge port; and a pair of cut surfaces that are respectively connected to the discharge port An edge of both ends of the discharge port surface in the longitudinal direction and extending toward the manifold side; and a length in the longitudinal direction of the connection position of the flow path portion with the manifold is We, and a length direction of the discharge port When the length is set to Wd, We>Wd. In the slit nozzle of claim 1, wherein the length in the longitudinal direction between the edges of the both ends in the longitudinal direction of the discharge port surface is Wp, We ≧ Wp. The slit nozzle of claim 1 or 2, wherein Wm ≧ We when the length of the manifold in the longitudinal direction is Wm. The slit nozzle according to any one of claims 1 to 3, wherein a shim which forms a region occupied by the flow path portion is contained inside. The slit nozzle according to any one of claims 1 to 4, wherein the flow path portion is formed such that a length in a longitudinal direction thereof decreases from the manifold side toward the discharge port side. A coating method in which a coating liquid is sprayed from the discharge port and a coating liquid is applied to the surface of the member to be coated, while the slit nozzle according to any one of claims 1 to 5 is relatively moved with respect to the member to be coated. A coating film is formed. According to the coating method of claim 6, the sipe provided in the slit nozzle is further replaced, and the coating liquid is discharged to a different length (We). A coating device comprising: a slit nozzle according to any one of claims 1 to 5; a supply mechanism that supplies a coating liquid to the slit nozzle; a support mechanism that supports the member to be coated; and a moving mechanism that causes the slit nozzle to be opposed to The coated member supported by the support mechanism moves relative to each other.