JP7377641B2 - Coating nozzle and coating device - Google Patents

Description

The present invention relates to a coating nozzle and a coating device equipped with the same, and more particularly to a slit nozzle having a slit-shaped discharge port and a coating device equipped with the same.

A slit nozzle generally includes a nozzle body with a slit-shaped discharge port, a manifold part that expands laterally (in the direction in which the discharge port extends in the slit shape) within the nozzle body, and a manifold part that extends from the manifold part. It is equipped with a slit portion extending to the discharge port and a flow path for supplying the coating liquid to the manifold portion, and the flow path is directly connected to one location near the center of the manifold portion (for example, as disclosed in the patent (See Reference 1). In such a slit nozzle, the coating liquid flowing into the vicinity of the center of the manifold is sufficiently spread laterally within the manifold so that the amount of coating liquid discharged from the discharge port is uniform in the horizontal direction. It was necessary to suppress unevenness in the flow of water, and for this purpose, it was necessary to increase the volume of the manifold part.

Japanese Patent Application Publication No. 2016-182576

The inventor of the present invention found through analysis that when the coating liquid is applied using the slit nozzle, the coating liquid remains in a wide range within the manifold portion. The inventors also found that within the manifold portion, the more the distance from the point where the flow path is directly connected, the more the coating liquid stagnates.

In recent years, there has been a desire to form a thin film of slurry (a liquid in which solid particles are suspended) using a coating device equipped with the above-mentioned slit nozzle. However, the present inventor discovered that when a slurry is used as a coating liquid, the slurry stagnates in a wide range within the manifold, which causes the solid particles to aggregate in the stagnant slurry. I think there is a risk that the material may be ejected as is. Such aggregates can adversely affect the smoothness and properties of the coating film. Furthermore, when a solution (liquid in which the solute is dissolved in a solvent) is used as the coating liquid, even if the solution stagnates in the manifold, no aggregates are formed, so stagnation in the manifold does not become a problem. Ta.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a coating nozzle that does not easily generate aggregates even when slurry is used as a coating liquid, and a coating device equipped with the coating nozzle.

A coating nozzle according to the present invention includes a nozzle body having a slit-shaped discharge port, a slit portion, and a flow path. The slit portion is provided within the nozzle body and extends to the discharge port. The flow path is directly connected to at least one upstream end of the slit in the nozzle body, and supplies the coating liquid to the slit.

According to the coating nozzle, the coating liquid flows directly from the channel into the slit portion having a narrow gap width, so that the coating liquid flows toward the downstream side while spreading laterally within the slit portion without stagnation. Therefore, the coating liquid easily flows in the vertical direction at all locations in the slit portion in the horizontal direction.

The coating device according to the present invention includes the coating nozzle described above, and discharges a coating liquid from the coating nozzle to form a coating film on the surface of the object to be coated.

According to the present invention, even when a slurry is used as a coating liquid, aggregates are less likely to occur.

FIG. 2 is a conceptual diagram illustrating a coating device. It is an exploded perspective view of a coating nozzle. FIG. 3 is a plan view of the first main body component of the application nozzle, viewed from the inner side. FIG. 7 is a conceptual diagram showing an example of a coating nozzle according to a first modification. FIG. 7 is a conceptual diagram showing another example of the application nozzle according to the first modification. FIG. 7 is a conceptual diagram showing still another example of the coating nozzle according to the first modification. It is a conceptual diagram showing the application nozzle concerning the 2nd modification. It is a conceptual diagram showing the application nozzle concerning the 3rd modification. It is a conceptual diagram showing the application nozzle concerning the 4th modification.

[1] Configuration of Coating Apparatus FIG. 1 is a conceptual diagram illustrating an example of a coating apparatus. As shown in FIG. 1, the coating device includes a chuck section 1, a coating liquid supply section 2, and a control section 3.

<Chuck part 1>
The chuck section 1 includes a stage 11 and a stage drive section 12.

The stage 11 is installed with the mounting surface 11a facing upward, and by suctioning the coating target T (object on which a coating film is to be formed) placed on a predetermined position on the mounting surface 11a, the stage 11 Fix the coating target T so that it does not shift from a predetermined position. Note that the stage 11 is not limited to one that fixes the coating target T in a predetermined position using suction force, but can be changed to various stages capable of fixing the coating target T in a predetermined position, such as one that fixes the coating target T in a predetermined position using electrostatic force.

The stage drive unit 12 is a mechanism that allows the stage 11 to move in a predetermined direction D1, and controls the operation (moving direction, moving speed, etc.) of the stage 11 according to commands from the control unit 3.

<Coating liquid supply section 2>
The coating liquid supply section 2 includes a coating nozzle K, a nozzle drive section 21, and a liquid feeding pump 22.

The coating nozzle K is a slit nozzle having a slit-shaped discharge port 50a, and is installed with the discharge port 50a facing the mounting surface 11a of the stage 11. Further, the application nozzle K has a direction in which the ejection opening 50a extends in a slit shape (in FIG. and is arranged perpendicular to the predetermined direction D1 (the moving direction of the stage 11). Note that details of the coating nozzle K will be described later.

The nozzle drive unit 21 is a mechanism that allows the application nozzle K to move in the height direction, and adjusts the height position of the application nozzle K with respect to the application target T according to a command from the control unit 3.

The liquid feed pump 22 sends the coating liquid to the coating nozzle K. Specifically, the liquid feed pump 22 adjusts the amount of the coating liquid discharged from the coating nozzle K by adjusting the amount of the coating liquid supplied to the coating nozzle K according to a command from the control unit 3 .

<Control unit 3>
The control section 3 is composed of a processing device such as a CPU (Central Processing Unit) or a microcomputer, and controls various operating sections (including the chuck section 1 and the coating liquid supply section 2) included in the coating apparatus.

[2] Configuration of coating nozzle The coating nozzle K includes a nozzle main body 50, a slit portion 51, a flow path 52, and a manifold portion 53 (see FIG. 1).

FIG. 2 is an exploded perspective view of the coating nozzle K. As shown in FIG. 2, the nozzle body 50 includes a first body component 501, a second body component 502, and a shim 503 interposed between them.

The first main body constituent part 501 and the second main body constituent part 502 each have a plane 501a and a plane 502a that face each other. Furthermore, the shim portion 503 is a flat plate having a predetermined thickness, and is interposed between the flat surfaces 501a and 502a, thereby separating the flat surfaces 501a and 502a from each other by the thickness thereof. Thereby, a gap is provided between the planes 501a and 502a in the nozzle body 50, and the gap becomes the discharge port 50a and the slit portion 51 extending to the discharge port 50a. Further, the gap width W (not shown) between the discharge port 50a and the slit portion 51 is defined by the thickness of the shim portion 503 (flat plate).

Specifically, the shim portion 503 is provided with cutouts 503c corresponding to the shapes of the discharge port 50a and the slit portion 51 at locations thereof. The shim portion 503 is sandwiched between the first body structure portion 501 and the second body structure portion 502 with both surfaces of the shim portion 503 in close contact with the flat surfaces 501a and 502a, respectively. Note that in FIG. 2, a region that will become the slit portion 51 is indicated by a chain line on the plane 501a of the first main body component 501. As shown in FIG. Further, FIG. 3 is a plan view of the first main body component 501 viewed from the inner surface (plane 501a) side. In FIG. 3 as well, the area that will become the slit portion 51 is indicated by a chain line.

As shown in FIGS. 2 and 3, the nozzle body 50 is provided with a supply port 50b through which the coating liquid is supplied, and a flow path 52 that guides the coating liquid from the supply port 50b to the slit portion 51. There is. The flow path 52 is branched into a plurality of parts within the nozzle body 50, and the tip portions 52c of the flow path 52 after branching are each directly connected to a plurality of locations on the upstream end 51a of the slit portion 51 (see FIG. 3). ).

Specifically, the first main body component 501 is provided with a through hole 501b that penetrates from the outer surface to the plane 501a, and the entrance of the through hole 501b serves as the supply port 50b. Further, a groove 501c extending from the outlet of the through hole 501b is recessed in the flat surface 501a of the first main body component 501. The position of the portion that will become the tip end 52c of the flow path 52 is located at the location of the plane 501a that will become the upstream end 51a of the slit portion 51. Then, by closing the groove 501c with the shim portion 503 except for the tip portion 501d, a passage passing through the groove 501c and directly connected to the upstream end 51a of the slit portion 51 is formed in the nozzle body 50. A flow path 52 is configured by the through hole 501b and the through hole 501b.

Here, the flow of the coating liquid in the channel 52 slows down near the inner wall surface due to friction with the inner wall surface of the channel 52, and especially when the inner wall surface has a corner, the coating solution is applied near the corner. The liquid tends to stagnate. Therefore, the inner wall surface of the flow path 52 is preferably a smooth surface with few or no corners. Therefore, the groove 501c is formed so that its inner wall surface is U-shaped. Note that this shape is only an example, and the shape of the inner wall surface of the flow path 52 (that is, the cross-sectional shape of the flow path 52) may be changed as appropriate depending on the type of coating liquid and the like.

In FIG. 3, the flow path 52 is one flow path extending from the supply port 50b that is branched into four, and the tip portions 52c of the four flow paths 52 after branching are respectively connected to the upstream end of the slit portion 51. It is directly connected to the four locations of 51a. Specifically, the four flow paths 52 after branching are directly connected to the slit portion 51 at four locations in the horizontal direction D2. According to such a configuration, it becomes possible to supply the coating liquid to the slit portion 51 from a plurality of locations in the lateral direction D2. Further, in FIG. 3, the locations where the flow path 52 is directly connected to the slit portion 51 are arranged at equal intervals and evenly in the lateral direction D2. According to such a configuration, the coating liquid is evenly distributed in the lateral direction D2 by the branching of the flow path 52 and is supplied to the slit portion 51.

The coating liquid flows directly from the flow path 52 into the slit portion 51 having a gap width W narrower than that of the flow path 52, so that the coating liquid spreads laterally within the slit portion 51 without stagnation to the downstream side. Thereafter, it overlaps with the coating liquid that has flowed into the slit portion 51 from the adjacent channel 52. This suppresses uneven flow of the coating liquid in the slit portion 51.

Further, in FIG. 3, the upstream end 51a of the slit portion 51 has a shape that is obliquely inclined toward the discharge port 50a from each location (direct connection location) where the flow path 52 after branching is directly connected. Specifically, the upstream end 51a is inclined in an inverted V shape from each direct connection point to the left and right. Here, when air bubbles are mixed or generated in the coating liquid, the air bubbles move upstream due to the buoyancy generated within the slit portion 51. According to the shape of the upstream end 51a, the bubbles rise along the inclination of the upstream end 51a when moving upstream within the slit portion 51, thereby being efficiently guided to the point directly connected to the flow path 52. It will be destroyed.

Furthermore, the bubbles guided to the flow path 52 move upstream within the flow path 52 and are discharged to the outside of the coating nozzle K through a vent port (not shown) provided on the upstream side of the flow path 52. . At this time, in order to make it easier for the bubbles to move upstream in the flow path 52, in FIG. It is being

The manifold part 53 is a hollow part provided in the middle of the slit part 51 in the nozzle body 50, and the cross-sectional area (cross-sectional area in a plane parallel to the lateral direction D2 and perpendicular to the plane 501a) is the same as that of the slit part. Greater than 51. Specifically, a groove 501e that will become the manifold part 53 is formed in a region of the plane 501a of the first main body component 501 that will become the slit part 51 (a region that does not overlap with the shim part 503 and is exposed in the notch 503c). is recessed. The manifold portion 53 extends parallel to the discharge port 50a from one end of the slit portion 51 to the other in the lateral direction D2.

In other words, the slit portion 51 includes a first slit portion 51A on the upstream side directly connected to the flow path 52, and a second slit portion 51B on the downstream side extending to the discharge port 50a. It is provided between the first slit section 51A and the second slit section 51B. The inlet 53a from the first slit section 51A on the upstream side to the manifold section 53 extends from one end of the manifold section 53 in the lateral direction D2, and the inlet 53a from the first slit section 51A on the upstream side to the second slit section 51B on the downstream side extends from one end of the manifold section 53 to the other end. The outlet 53b from the manifold section 53 also extends from one end of the manifold section 53 in the lateral direction D2. Furthermore, the outlet 53b of the manifold portion 53 extends parallel to the discharge port 50a.

Therefore, the coating liquid flows into the manifold part 53 from the inlet 53a that widens from end to end in the lateral direction D2, with flow unevenness suppressed by the first slit part 51A. That is, the coating liquid from the first slit portion 51A flows into the manifold portion 53 from any location in the lateral direction D2. Further, since the coating liquid is evenly distributed in the lateral direction D2 by the branching of the flow path 52 and supplied to the slit portion 51, the inlet 53a of the manifold portion 53 is supplied with the coating liquid over the entire area in the lateral direction D2. The coating liquid flows easily and uniformly.

The coating liquid that has flowed into the manifold section 53 is temporarily stored within the manifold section 53, thereby further suppressing the unevenness of the flow. After that, the coating liquid in the manifold part 53 flows out to the second slit part 51B from the outlet 53b which widens from end to end in the lateral direction D2. Further, since the outlet 53b of the manifold part 53 extends parallel to the discharge port 50a, the flow of the coating liquid after flowing out to the second slit part 51B tends to be uniform over the entire area in the lateral direction D2. As a result, the coating liquid is easily discharged uniformly from the discharge port 50a over the entire area in the lateral direction D2. Therefore, when a coating film is formed on the surface of the coating target T using the coating nozzle K, the thickness of the coating film tends to be uniform.

The coating liquid from the first slit portion 51A flows into the manifold portion 53 over the entire area in the lateral direction D2, and the unevenness of the flow of the coating liquid is suppressed in the first slit portion 51A. Therefore, the manifold portion 53 only needs to be able to additionally suppress the unevenness of the flow of the incoming coating liquid by the necessary amount. Therefore, according to the coating nozzle K described above, the cross-sectional area of the manifold portion 53 is equal to the cross-sectional area of the manifold portion provided in a conventional slit nozzle (a conventional slit nozzle in which a flow path is directly connected to one location near the center of the manifold portion). It can be smaller than the area. By reducing the cross-sectional area of the manifold portion 53, it is possible to reduce the amount of coating liquid to fill the interior of the coating nozzle K in the preparation stage.

Furthermore, according to the coating nozzle K described above, the coating liquid flows in the vertical direction D3 ( It becomes easier to flow in the direction (parallel to the plane 501a and perpendicular to the lateral direction D2). Therefore, the coating liquid is less likely to stay in the coating nozzle K, and therefore, even when slurry is used as the coating liquid, aggregates are less likely to be formed.

Moreover, by flowing through the first slit portion 51A, the manifold portion 53, and the second slit portion 51B in order, the coating liquid passes through areas where the gap width W is small, large, and small in this order. Therefore, the coating liquid repeatedly contracts and expands until it reaches the discharge port 50a. According to such repetition of contraction and expansion, even if aggregates are formed in the slurry when a slurry is used as the coating liquid, the aggregates are likely to be broken up.

[3] Modifications [3-1] First Modification According to the coating nozzle K described above, since the coating liquid is uniformly discharged from the discharge port 50a, the thickness of the coating film tends to be uniform. On the other hand, when the coating film is dried, the thickness after drying may not be uniform depending on the type of coating liquid, drying conditions, etc. As an example, the shrinkage rate is larger at the edges (portions near the edges parallel to the predetermined direction D1) of the coating film than at the center, and as a result, the thickness after drying is smaller at the edges than at the center. Sometimes. Therefore, the coating nozzle K may be modified to be capable of discharging the coating liquid so that the thickness after drying is uniform. Three examples will be specifically explained below.

(1) Example of a modified flow path FIG. 4 is a conceptual diagram showing an example of a coating nozzle K according to a first modified example. As shown in FIG. 4, the flow path 52 is not limited to the one in which the points directly connected to the slit portion 51 are arranged at equal intervals and evenly in the lateral direction D2 (see FIG. 3), and the points directly connected to the slit portion 51 are arranged at may be densely arranged to correspond to a large portion. That is, the flow path 52 may be arranged such that the portions directly connected to the slit portion 51 are partially dense in the lateral direction D2. In FIG. 4, when the shrinkage rate is greater at the edges than at the center of the coating film, the locations where the flow paths 52 are directly connected to the slit portions 51 are arranged densely at both ends in the lateral direction D2. It is shown.

According to such a configuration, the amount of the coating liquid supplied from the flow path 52 to the slit portion 51 increases because the directly connected portions are densely connected in the portion corresponding to the portion where the shrinkage rate is large. As a result, the amount of coating liquid discharged to a portion with a large shrinkage rate increases, and the thickness of the coating film at that portion increases. Therefore, it is possible to partially change the thickness of the coating film in consideration of the shrinkage rate so that the entire thickness of the coating film after drying becomes uniform.

(2) Example of modified slit portion FIG. 5 is a conceptual diagram showing another example of the application nozzle K according to the first modified example. As shown in FIG. 5, the slit portion 51 is configured such that all heights of directly connected portions of the flow path 52 (height from the manifold portion 53 or the discharge port 50a in the vertical direction D3) are the same. The structure is not limited to the one shown in FIG. 3, but may be configured such that the height of the directly connected portion corresponding to the portion having a large shrinkage rate is reduced. That is, the slit portion 51 may be configured such that the height of the directly connected portion of the flow path 52 from the manifold portion 53 or the discharge port 50a is partially reduced. FIG. 5 shows a configuration in which the height of the directly connected portion of the flow path 52 is lowered at both ends in the lateral direction D2 when the shrinkage rate is greater at the edges than at the center of the coating film.

According to such a configuration, the height of the directly connected portion is lower at a portion corresponding to a portion having a large shrinkage rate, so that the flow is supplied from the flow path 52 to the manifold portion 53 and the discharge port 50a via the slit portion 51. The amount of coating liquid applied increases, and as a result, the amount of coating liquid discharged to a portion with a large shrinkage rate increases, and the thickness of the coating film at that portion increases. Therefore, it is possible to partially change the thickness of the coating film in consideration of the shrinkage rate so that the entire thickness of the coating film after drying becomes uniform.

(3) Example of modified manifold portion FIG. 6 is a conceptual diagram showing still another example of the application nozzle K according to the first modified example. As shown in FIG. 6, the manifold portion 53 is not limited to the one in which the outlet 53b extends parallel to the discharge port 50a (see FIG. 3), and the outlet 53b is located at a location corresponding to a portion having a large shrinkage rate. It may be partially inclined so that the coating liquid can collect therein. That is, the manifold portion 53 may have an outlet 53b that is partially inclined so that a location where the coating liquid easily collects is formed. FIG. 6 shows a configuration in which the outlet 53b of the manifold part 53 is inclined diagonally downward toward the outside at both ends in the lateral direction D2 when the shrinkage rate is larger at the edge than at the center of the coating film. has been done.

According to such a configuration, since the outlet 53b of the manifold part 53 is inclined and the coating liquid tends to collect at a location corresponding to a portion with a large shrinkage rate, the coating liquid flows out from the outlet 53b to the second slit part 51B. As a result, the amount of coating liquid ejected to a portion with a large shrinkage rate increases, and the thickness of the coating film in that portion increases. Therefore, it is possible to partially change the thickness of the coating film in consideration of the shrinkage rate so that the entire thickness of the coating film after drying becomes uniform.

[3-2] Second Modification Example FIG. 7 is a conceptual diagram showing a coating nozzle K according to a second modification example. As shown in FIG. 7, the coating nozzle K may have a configuration without the manifold portion 53. Also in this configuration, the coating liquid easily flows in the vertical direction D3 at all locations in the horizontal direction D2 within the slit portion 51. Therefore, the coating liquid is less likely to stay in the coating nozzle K, and therefore, even when slurry is used as the coating liquid, aggregates are less likely to be formed.

[3-3] Third Modification Example FIG. 8 is a conceptual diagram showing a coating nozzle K according to a third modification example. As shown in FIG. 8, in the coating nozzle K, a plurality of supply ports 50b are provided in the nozzle body 50, and a flow path 52 extending from the plurality of supply ports 50b is arranged upstream of the slit portion 51 without branching. They may be directly connected to a plurality of locations on the end 51a, respectively. In this case, external piping for supplying the coating liquid to the coating nozzle K is connected to the plurality of supply ports 50b as follows. That is, the external piping is branched into a plurality of pipes, and the tips of the branched pipes are each connected to the supply port 50b.

Even in such a configuration, the coating liquid is distributed in the lateral direction D2 by the branching of the external piping and is supplied to the slit portion 51. The coating liquid flows into the slit portion 51 having a narrower gap width W than the flow path 52, spreads laterally within the slit portion 51 and flows downstream, and then flows from the adjacent flow path 52 to the slit portion 51. It overlaps with the applied liquid that has flowed in. This suppresses uneven flow of the coating liquid in the slit portion 51.

[3-4] Fourth Modification FIG. 9 is a conceptual diagram showing a coating nozzle K according to a fourth modification. As shown in FIG. 9, the coating nozzle K may be configured such that the cross-sectional area of each channel 52 after branching is smaller than the cross-sectional area of the channel 52 before branching. For example, at the first branch point near the supply port 50b, the cross-sectional area can be changed to 1/2, and at the second branch point, the cross-sectional area can be further changed to 1/2. That is, the cross-sectional area of the flow path 52 can be changed such that the total cross-sectional area of the flow path 52 after branching is equal to the cross-sectional area of the flow path 52 before branching. Thereby, the flow rate of the coating liquid in the flow path 52 can be made constant from the upstream side to the downstream side. Therefore, the flow becomes slower toward the downstream side, and it is possible to prevent the stagnation area of the coating liquid from expanding. Moreover, since the volume of the entire flow path 52 is reduced, the amount of coating liquid to fill the inside of the coating nozzle K in the preparation stage can be further reduced.

The above description of the embodiments should be considered to be illustrative in all respects and not restrictive. The scope of the invention is indicated by the claims rather than the embodiments described above. Furthermore, the scope of the present invention is intended to include all changes within the meaning and range of equivalence of the claims.

In the present invention, the coating nozzle K may have a configuration in which the flow path 52 is directly connected to only one location on the upstream end 51a of the slit portion 51, or a configuration in which the upstream end 51a of the slit portion 51 or the flow path 52 has no inclination. It also includes configuration. The present invention also includes a configuration in which some of the above-described embodiments and first to fourth modifications are combined as appropriate.

1 Chuck section 2 Coating liquid supply section 3 Control section K Coating nozzle T Coating target W Gap width 11 Stage 11a Placement surface 12 Stage drive section 21 Nozzle drive section 22 Liquid pump 50 Nozzle body 50a Discharge port 50b Supply port 51 Slit section 51A First slit section 51B Second slit section 51a Upstream end 52 Flow path 52c Tip section 53 Manifold section 53a Inlet 53b Outlet D1 Predetermined direction D2 Lateral direction D3 Vertical direction 501 First main body component 501a Plane 501b Through hole 501c Groove 501d Tip Part 501e Groove 502 Second main body constituent part 502a Flat surface 503 Shim part 503c Notch

Claims (10)

A nozzle body with a slit-shaped discharge port,
a slit portion provided within the nozzle body and extending to the discharge port;
a channel for supplying a coating liquid to the slit portion within the nozzle body;
Equipped with
The flow path is branched into a plurality of parts within the nozzle body, and each of the branched flow paths is directly connected to a plurality of locations at the upstream end of the slit portion,
The slit portion is a coating nozzle configured such that a height from the discharge port of a directly connected portion of the flow path is partially reduced. A nozzle body with a slit-shaped discharge port,
a slit portion provided within the nozzle body and extending to the discharge port;
a channel for supplying a coating liquid to the slit portion within the nozzle body;
Equipped with
The flow path is branched into a plurality of parts within the nozzle body, and each of the branched flow paths is directly connected to a plurality of locations at the upstream end of the slit portion,
In the coating nozzle, the flow path is arranged such that points directly connected to the slit portion are partially dense in a lateral direction in which the discharge port extends in a slit shape. In order to increase the thickness of both edges of the coating film immediately after application so that the entire thickness of the coating film becomes uniform after drying, the point where the flow path is directly connected to the slit portion is located in the horizontal direction. 3. The application nozzle according to claim 2, wherein the application nozzle is arranged densely at both ends. The flow path is branched within the nozzle body, and the flow path after branching is further branched, and each of the flow paths that are branched multiple times is directly connected to the plurality of locations of the slit portion. The coating nozzle according to any one of claims 1 to 3, wherein: The coating nozzle according to any one of claims 1 to 4 , wherein each channel after branching has a smaller cross-sectional area than the channel before branching. further comprising a manifold part having a larger cross-sectional area than the slit part,
The slit portion includes a first slit portion on the upstream side that is directly connected to the flow path, and a second slit portion on the downstream side that extends to the discharge port,
6. The coating nozzle according to claim 1, wherein the manifold part is provided between the first slit part and the second slit part. 7. The coating nozzle according to claim 6 , wherein the manifold section has a partially inclined outlet to the second slit section so as to form a location where the coating liquid tends to collect. The coating nozzle according to any one of claims 1 to 7 , wherein the upstream end of the slit portion has a shape that is obliquely inclined toward the discharge port from a point where the flow path is directly connected. The coating nozzle according to any one of claims 1 to 8 , which is used for coating slurry. A coating device comprising the coating nozzle according to any one of claims 1 to 9 , which discharges a coating liquid from the coating nozzle to form a coating film on a surface of an object to be coated.

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