TW201938933A - Chemical liquid control valve and substrate processing apparatus characterized by promoting replacement characteristic of a chemical liquid - Google Patents

Abstract

The present invention provides a chemical liquid control valve capable of promoting the replacement characteristic of chemical liquid and also provides a substrate processing apparatus. The flow path valve block 21 has a first outer wall 21a and a second outer wall 21b which is a surface perpendicular to the first outer wall 21a. The flow rate adjusting valve chamber 27 in which the needle 41 is disposed is formed by a manner of recessing the first outer wall 21a of the flow path valve block 21. On the other hand, the switchable valve chamber 29 in which the diaphragm 51 is disposed is formed by a manner of recessing the second outer wall 21b. The intermediate flow path 31 connects the flow rate adjusting valve chamber 27 and the switchable valve chamber 29. The intermediate flow path 31 extends at right angle with respect to either one of the first outer wall 21a and the second outer wall 21b. With such a configuration, the intermediate flow path 31 can be formed as a straight line. Therefore, the chemical liquid replacement characteristic having a worry of chemical liquid deterioration caused by V-shaped flow path, etc. can be improved.

Description

Chemical liquid control valve and substrate processing device

The present invention relates to a chemical liquid control valve and a substrate processing device including the same. The chemical liquid control valve is used to control a FPD (Flat Panel Display) such as a semiconductor substrate, a liquid crystal display device, or an organic EL (electroluminescence) display device. , Flat panel display), chemical substrates for glass substrates for photomasks, optical disk substrates, magnetic disk substrates, ceramic substrates, solar cell substrates and other substrates.

As shown in FIG. 7, the conventional chemical liquid control valve 201 includes a flow rate adjustment valve 202 and an on-off valve (ON / OFF valve) 203 (for example, refer to Patent Documents 1 and 2). The flow rate adjustment valve 202 adjusts the flow rate of the supplied chemical solution. On the other hand, the on-off valve 203 supplies the chemical solution and stops the supply of the chemical solution. The flow rate adjustment valve 202 and the on-off valve 203 are connected by a V-shaped flow path 205 or an arc-shaped flow path (hereinafter referred to as “V-shaped flow path 205 and the like”) described in Patent Document 2. Therefore, the chemical liquid sent from the flow rate adjustment valve 202 is sent to the on-off valve 203 through the V-shaped flow path 205 and the like.
[Background Literature]
[Patent Literature]

[Patent Document 1]
Japanese Patent Laid-Open No. 2001-263507
[Patent Document 2]
Japanese Patent Laid-Open No. 2017-207121

[Problems to be solved by the invention]

The conventional medical liquid control valve 201 has the following problems. As described above, the chemical liquid sent from the flow rate adjustment valve 202 is sent to the on-off valve 203 through the V-shaped flow path 205 and the like. If the medicinal solution is passed through the V-shaped flow path 205 or the like, there is a concern that the replacement characteristics of the medicinal solution from the entrance to the exit of the medicinal solution control valve 201 are deteriorated. If the replacement characteristics of the medicinal solution are poor, there is a concern that dirt may be generated in the liquid due to the previous medicinal solution remaining. Therefore, it is preferable to improve the replacement characteristics of the chemical liquid in the chemical liquid control valve 201.

The present invention has been made in view of such circumstances, and an object thereof is to provide a chemical liquid control valve capable of improving chemical liquid replacement characteristics and a substrate processing apparatus including the same.
[Technical means to solve the problem]

To achieve such an object, the present invention adopts the following configuration. That is, the medicinal solution control valve of the present invention is characterized by including a single flow path valve block having a first outer wall and a second outer wall as a surface at a right angle to the first outer wall, and a flow regulating valve chamber, which The first outer wall is formed in a recessed manner; the valve chamber for opening and closing is formed in a manner in which the second outer wall is recessed; the intermediate flow path is formed inside the flow path valve block in a linear shape, and is used for the above-mentioned flow adjustment. The valve chamber is connected to the valve chamber for opening and closing, and extends at a right angle to any of the first outer wall and the second outer wall. The first flow path is formed inside the flow path valve block and adjusts the flow rate. Connected by a valve chamber; a second flow path formed inside the flow path valve block and connected to the valve chamber for opening and closing; a needle moving mechanism having a needle arranged in the valve chamber for flow adjustment to block the flow An adjustment valve chamber that moves the needle in order to adjust the flow rate of the chemical solution; and an opening and closing valve body moving mechanism having an opening and closing valve body disposed in the opening and closing valve chamber to block the opening and closing valve chamber, and for The chemical liquid supplied and the supply of the stop with the opening and closing movement of the valve body.

According to the chemical liquid control valve of the present invention, the flow path valve block has a first outer wall and a second outer wall that is a surface at a right angle to the first outer wall. The valve chamber for adjusting the flow of the needle is formed so that the first outer wall of the flow path valve block is recessed. On the other hand, the opening-closing valve chamber in which the opening-closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the flow regulating valve chamber and the opening and closing valve chamber, and the intermediate flow path extends at a right angle to any of the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a straight line. Therefore, it is possible to improve the replacement characteristics of the chemical solution which may cause deterioration of the chemical solution due to the V-shaped flow path or the like.

The medicinal solution control valve of the present invention is characterized by comprising: a single flow path valve block having a first outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall; a flow rate; The valve chamber for adjustment is formed by the first outer wall being recessed; the valve chamber for opening and closing is formed by the second outer wall being recessed; the intermediate flow path is formed inside the flow path valve block and is linear And connecting the valve chamber for flow adjustment and the valve chamber for opening and closing and extending at a right angle to the first outer wall and the second outer wall; a first flow path formed inside the flow path valve block, The second flow path is formed inside the flow path valve block, and is connected to the opening and closing valve chamber. The needle moving mechanism includes a needle disposed in the flow adjustment valve chamber. Blocking the valve chamber for flow rate adjustment and moving the needle in order to adjust the flow rate of the medicinal solution; and an opening and closing valve body moving mechanism having an opening and closing valve body arranged in the opening and closing valve chamber to block the opening and closing valve The valve body is moved in order to supply and stop the supply of the medicinal solution.

According to the medicinal solution control valve of the present invention, the flow path valve block has a first outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall. The valve chamber for adjusting the flow of the needle is formed so that the first outer wall of the flow path valve block is recessed. On the other hand, the opening-closing valve chamber in which the opening-closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the valve chamber for flow adjustment and the opening and closing valve chamber, and the intermediate flow path extends at a right angle to the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a straight line. Therefore, it is possible to improve the replacement characteristics of the chemical solution which may cause deterioration of the chemical solution due to the V-shaped flow path or the like.

In the chemical liquid control valve, the first flow path and the second flow path are preferably linear and extend at a right angle to the intermediate flow path. When a flow path valve block is formed by injecting material into a mold, a first pin member inserted into the mold to form an intermediate flow path and a first flow path and a second flow path can be inserted into the mold. Each of the second pin member and the third pin member is arranged at a right angle. Therefore, compared with the case where the first pin member, the second pin member, and the third pin member are arranged obliquely (not at right angles), the intermediate flow path, the first flow path, and the second flow path can be easily formed.

In the chemical liquid control valve, it is preferable that the first flow path is parallel to the second flow path, and that the first connection port has a first connection port on an opposite side to a portion connected to the flow rate adjustment valve chamber. And opens in the same direction as the second connection port on the opposite side of the second flow path from the portion connecting the opening and closing valve chamber. When a material is flowed into the mold to form the flow path valve block, the second pin member and the third pin member inserted into the mold to form the first flow path and the second flow path can be moved in the same direction. Therefore, the first flow path and the second flow path can be easily formed compared to a case where the second pin member is inserted into the mold in a different direction from the third pin member.

Moreover, in the said chemical | medical solution control valve, it is preferable that the said flow path valve block is formed from PFA (perfluoroalkoxyalkane, perfluoroalkoxyalkane). If the flow-path valve block is formed of PFA, the surface of the flow-path valve block will be covered by a surface layer which is a harder layer (film) than the inside thereof. If the chemical solution penetrates into the inside of the flow path valve block, there is a concern that dirt may be drawn from the inside of the flow path valve block. However, since the surface layer prevents the penetration of the medicinal solution, the concern that the purity of the medicinal solution is deteriorated can be suppressed.

In addition, the substrate processing apparatus of the present invention includes a holding and rotating portion that holds the substrate and rotates the held substrate; a nozzle that ejects a chemical solution to the substrate held by the holding and rotating portion; and a chemical liquid pipe that Connected to the nozzle; and a chemical liquid control valve that adjusts the flow rate of the chemical liquid ejected from the nozzle, and causes the chemical liquid to be ejected from the nozzle to stop the ejection of the chemical liquid; the chemical liquid control valve includes: a single flow path valve A block having a first outer wall and a second outer wall that is a surface at a right angle to the first outer wall; a flow regulating valve chamber formed in a manner such that the first outer wall is recessed; an opening and closing valve chamber in accordance with the second The outer wall is formed in a recessed manner; the intermediate flow path is formed inside the flow path valve block in a linear shape, and connects the valve chamber for flow adjustment and the valve chamber for opening and closing, with respect to the first outer wall and Any one of the second outer walls extends at a right angle; the first flow path is formed inside the flow path valve block and is connected to the flow regulating valve chamber; the second flow path is formed on the flow path valve block Inside Is connected to the valve chamber for opening and closing, and is connected to the nozzle through the chemical liquid pipe; the needle moving mechanism has a needle arranged in the valve chamber for flow adjustment, and blocks the valve chamber for flow adjustment; A flow of a chemical solution to move the needle; and an opening and closing valve body moving mechanism having an opening and closing valve body disposed in the opening and closing valve chamber to block the opening and closing valve chamber, and for supplying the chemical solution and the When the supply is stopped, the valve body for opening and closing is moved.

A substrate processing apparatus according to the present invention includes a chemical liquid control valve. In the chemical liquid control valve, the flow path valve block has a first outer wall and a second outer wall that is a surface at a right angle to the first outer wall. The valve chamber for adjusting the flow of the needle is formed so that the first outer wall of the flow path valve block is recessed. On the other hand, the opening-closing valve chamber in which the opening-closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the flow regulating valve chamber and the opening and closing valve chamber, and the intermediate flow path extends at a right angle to any of the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a straight line. Therefore, it is possible to improve the replacement characteristics of the chemical solution which may cause deterioration of the chemical solution due to the V-shaped flow path or the like.

In addition, the substrate processing apparatus of the present invention includes a holding and rotating portion that holds the substrate and rotates the held substrate; a nozzle that ejects a chemical solution to the substrate held by the holding and rotating portion; and a chemical liquid pipe that Connected to the nozzle; and a chemical liquid control valve that adjusts the flow rate of the chemical liquid ejected from the nozzle, and causes the chemical liquid to be ejected from the nozzle to stop the ejection of the chemical liquid; the chemical liquid control valve includes: a single flow path valve A block having a first outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall; a flow adjustment valve chamber formed in a manner that the first outer wall is recessed; an opening and closing valve The chamber is formed by the second outer wall being recessed; the intermediate flow path is formed inside the flow path valve block in a linear shape and connects the valve chamber for flow adjustment and the valve chamber for opening and closing, It extends at a right angle to the first outer wall and the second outer wall. The first flow path is formed inside the flow path valve block and is connected to the valve chamber for flow adjustment. The second flow path is formed in the flow. The inside of the valve block is connected to the valve chamber for opening and closing, and is connected to the nozzle through the chemical liquid pipe; a needle moving mechanism having a needle arranged in the valve chamber for regulating the flow rate, and blocking the valve for regulating the flow rate A valve body moving mechanism for adjusting the flow rate of the medicinal solution; and an opening and closing valve body moving mechanism having an opening and closing valve body arranged in the opening and closing valve chamber to block the opening and closing valve chamber, and to perform medicine The supply of the liquid and the stop of the supply move the valve body for opening and closing.

A substrate processing apparatus according to the present invention includes a chemical liquid control valve. In the chemical liquid control valve, the flow path valve block has a first outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall. The valve chamber for adjusting the flow of the needle is formed so that the first outer wall of the flow path valve block is recessed. On the other hand, the opening-closing valve chamber in which the opening-closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the valve chamber for flow adjustment and the opening and closing valve chamber, and the intermediate flow path extends at a right angle to the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a straight line. Therefore, it is possible to improve the replacement characteristics of the chemical solution which may cause deterioration of the chemical solution due to the V-shaped flow path or the like.

Furthermore, the present specification also discloses the invention of a method for manufacturing a chemical liquid control valve as follows.

The method for manufacturing a medical fluid control valve according to the present invention is characterized in that it includes the steps of preparing a pair of molds, the pair of molds having a first inner wall in an internal space, and a second inner surface that is a right angle to the first inner wall. A wall having: a first protruding portion provided on the first inner wall to form a valve chamber for flow adjustment; a second protruding portion provided on the second inner wall to form a valve chamber for opening and closing; A first pin member having a shape that connects the first protruding portion and the second protruding portion, and is inserted in a direction extending at a right angle to any of the first inner wall and the second inner wall; 1 The linear second pin member is inserted into the above-mentioned internal space in a manner that the protruding portion is connected; the linear third pin member is inserted in the internal space so that it is connected to the second protruding portion; and the second pin is inserted in the internal space. After the component and the third pin component are inserted into the internal space, the resin melted by heating flows into the internal space; and after cooling and solidifying the resin flowing into the internal space, it becomes a single flow path valve block. Resin A pair of dies removed.

According to the method for manufacturing a medical fluid control valve according to the present invention, a pair of molds has a first inner wall in the internal space and a second inner wall that is a surface at a right angle to the first inner wall. The pair of molds includes a first protruding portion provided on the first inner wall to form a valve chamber for flow adjustment, a second protruding portion provided on the second inner wall to form a valve chamber for opening and closing, and a linear first portion. A pin member that connects the first protruding portion to the second protruding portion and is inserted in a direction extending at a right angle to any of the first inner wall and the second inner wall. By forming the flow path valve block with such a structure, the intermediate flow path can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the chemical solution which may cause deterioration of the chemical solution due to the V-shaped flow path or the like. Furthermore, in the conventional liquid medicine control valve, the V-shaped flow path is formed by cutting from two directions of the flow rate adjustment valve chamber and the opening and closing valve chamber after formation. According to the present invention, a linear intermediate flow path 31 can be formed without cutting.
[Effect of the invention]

According to the chemical liquid control valve of the present invention and a substrate processing apparatus including the same, it is possible to improve the replacement characteristics of the chemical liquid.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a substrate processing apparatus according to an embodiment. FIG. 2 is a schematic configuration diagram of a chemical liquid control valve according to the embodiment.

<Configuration of Substrate Processing Apparatus 1>
Refer to Figure 1. The substrate processing apparatus 1 includes a nozzle 2 and a holding and rotating unit 3. The nozzle 2 ejects a chemical solution to the substrate W held by the holding and rotating portion 3. The chemical liquid is, for example, a resist liquid, a coating liquid for forming an antireflection film, a solvent such as a diluent, a washing liquid such as pure water (DIW), a developing liquid, or an etching liquid.

The holding rotation part 3 holds the substrate W and rotates the held substrate W. The holding rotation unit 3 includes a rotation chuck 4 and a rotation driving unit 5. The rotary chuck 4 is configured to be rotatable about a rotation axis AX. The rotary chuck 4 holds the substrate W in a substantially horizontal posture by, for example, vacuum-absorbing the back surface of the substrate W. On the other hand, the rotation driving unit 5 drives the rotation chuck 4 to rotate about the rotation axis AX. The rotation driving section 5 includes an electric motor and the like.

The substrate processing apparatus 1 includes a chemical solution supply source 7, chemical solution pipes 8 a and 8 b, a pump P, and a chemical solution control valve 9. The medicinal solution supply source 7 includes, for example, a tank or a bottle storing a medicinal solution. One end of the chemical liquid pipes 8 a and 8 b is connected to the chemical liquid supply source 7, and the other end is connected to the nozzle 2.

A pump P is provided in the chemical liquid pipe 8 a between the chemical liquid supply source 7 and the nozzle 2. A chemical liquid piping 8a, 8b between the pump P and the nozzle 2 is provided with a chemical liquid control valve 9. The pump P is a mechanism for conveying a medicinal solution. The chemical liquid control valve 9 adjusts the flow rate of the chemical liquid ejected from the nozzle 2 and causes the chemical liquid to be ejected from the nozzle 2 to stop the ejection of the chemical liquid. The details of the chemical liquid control valve 9 will be described later. Furthermore, at least any one of a foreign matter removal filter and a suction valve for preventing liquid from dripping may be provided on the chemical liquid pipes 8a and 8b.

The substrate processing apparatus 1 includes one or two or more control units 11 and an operation unit 13. The control unit 11 includes a central processing unit (CPU). The control unit 11 controls each configuration of the substrate processing apparatus 1 and the chemical liquid control valve 9. The operation section 13 includes an input section, a display section, and a memory section. The memory unit includes a ROM (Read-only Memory), a RAM (Random-Access Memory), and a hard disk. The memory unit stores various conditions such as substrate processing.

〈Configuration of Chemical Liquid Control Valve 9〉
Refer to Figure 2. The chemical liquid control valve 9 includes a single flow path valve block 21, a needle moving mechanism 23, and an opening and closing valve body moving mechanism 25.

The flow path valve block 21 is formed of a resin such as a fluororesin having thermoplasticity and melt fluidity, such as PFA (perfluoroalkoxyalkane). The flow path valve block 21 may be formed of a fluororesin such as PTFE (polytetrafluoroethylene).

The flow path valve block 21 is preferably formed of PFA. If the flow path valve block 21 is formed by PFA by injection molding, the surface of the flow path valve block 21 will be covered with a surface layer which is a harder layer (film) than the inside thereof. If the medicinal solution penetrates into the inside of the flow path valve block 21, there is a concern that dirt may be drawn out from the inside of the flow path valve block 21. However, since the surface layer prevents the penetration of the medicinal solution, the concern that the purity of the medicinal solution is deteriorated can be suppressed.

The flow path valve block 21 includes a first outer wall (surface) 21a and a second outer wall (surface) 21b. The second outer wall 21b is a surface that is substantially at a right angle to the first outer wall 21a. A flow rate adjusting valve chamber 27 is provided on the first outer wall (outer surface) 21 a of the flow path valve block 21. An opening / closing valve chamber 29 is provided on the second outer wall (outer surface) 21 b of the flow path valve block 21. The flow rate adjustment valve chamber 27 is formed so that a part of the first outer wall 21a is recessed. That is, the flow rate adjustment valve chamber 27 is formed in a concave shape on the first outer wall 21a. The opening and closing valve chamber 29 is formed so that a part of the second outer wall 21b is recessed. That is, the opening and closing valve chamber 29 is formed in a concave shape on the second outer wall 21 b of the flow path valve block 21.

An intermediate flow path 31, a first flow path 33, and a second flow path 35 are formed inside the flow path valve block 21. The intermediate flow path 31, the first flow path 33, and the second flow path 35 are each formed in a linear shape. The intermediate flow path 31 is formed so as to connect the flow rate adjustment valve chamber 27 and the opening and closing valve chamber 29. The intermediate flow path 31 is formed so as to extend at a substantially right angle to the second outer wall 21b.

One end of the first flow path 33 is connected to the flow rate adjustment valve chamber 27. The other end of the first flow path 33 is connected to a medical liquid pipe 8 a provided with a pump P as an outside of the flow path valve block 21. One end of the second flow path 35 is connected to the valve chamber 29 for opening and closing. The other end of the second flow path 35 is connected to a medical liquid pipe 8 b provided with a nozzle 2 as an outside of the flow path valve block 21. That is, the second flow path 35 is connected to the nozzle 2 through the chemical liquid pipe 8b.

The first flow path 33 and the second flow path 35 are formed so as to extend at right angles to the intermediate flow path 31. The first flow path 33 is parallel to the second flow path 35. The first connection port 37 in the first flow path 33 opposite to the portion connected to the flow adjustment valve chamber 27 faces the first connection port 37 in the second flow path 35 opposite to the portion connected to the valve chamber 29 for opening and closing. The 2 connection port 39 opens in the same direction. In other words, the first flow path 33 and the second flow path 35 are formed so that the direction of the liquid medicine passing through the first flow path 33 and the direction of the liquid medicine passing through the second flow path 35 are opposite to each other.

The needle moving mechanism 23 is attached to the flow path valve block 21. The needle moving mechanism 23 includes a needle 41. The needle moving mechanism 23 is configured to block the flow rate adjustment valve chamber 27 and move the needle 41 to adjust the flow rate of the chemical solution.

In addition, in FIG. 2, the flow rate adjustment valve chamber 27 has a first extended flow path 40 a. The first extension flow path 40 a is provided on, for example, an inner wall other than the bottom of the flow rate adjustment valve chamber 27. By connecting the intermediate flow path 31 to the first extension flow path 40 a, the intermediate flow path 31 is connected to the flow rate adjustment valve chamber 27. The opening and closing valve chamber 29 has a second extended flow path 40b. The second extended flow path 40b is provided at the bottom of the valve chamber 29 for opening and closing. By connecting the second flow path 35 to the second extension flow path 40b, the second flow path 35 is connected to the opening and closing valve chamber 29.

The needle moving mechanism 23 includes a cover 43, an electric motor 45, and a switching mechanism 47 in addition to the needle 41. The needle 41 is arranged in the flow rate adjustment valve chamber 27. The needle 41 is disposed so as to face the opening 49 provided in the flow rate adjustment valve chamber 27. The opening portion 49 is formed in a circular shape. The opening portion 49 is connected to the first flow path 33. The front end portion 41a of the needle 41 is formed in a conical shape. The conical front end 41a of the needle 41 passes through the opening 49, that is, the clearance between the conical front end 41a and the opening 49 is adjusted by moving the needle 41 laterally (moving in the X direction) (see FIG. 2). Thereby, the flow rate of the medicinal solution flowing through the gap is adjusted. The cover 43 is configured such that the needle 41 passes through. The cover body 43 blocks the flow rate adjustment valve chamber 27.

The electric motor 45 drives the needle 41. The electric motor 45 includes, for example, a stepping motor or a servo motor. When the electric motor 45 includes a servo motor, since a sensor such as a rotary encoder is provided, the lateral movement amount or position of the needle 41 can be accurately obtained. The conversion mechanism 47 is provided between the electric motor 45 and the needle 41, and converts the rotation output by the electric motor 45 into a linear movement of the needle 41. The conversion mechanism 47 includes, for example, a screw shaft and a guide portion.

The opening and closing valve body moving mechanism 25 is attached to the flow path valve block 21. The opening and closing valve body moving mechanism 25 includes a diaphragm 51. The opening and closing valve body moving mechanism 25 is configured to block the opening and closing valve chamber 29 and move the diaphragm 51 to open and close the second flow path 35. The diaphragm 51 corresponds to the valve body for opening and closing of the present invention.

The opening / closing valve body moving mechanism 25 includes a cover body 53, a movable member 55, a partition wall 57, a movable partition member 59, a spring 61, an intake / exhaust port 63, and an adjustment screw portion 65 in addition to the diaphragm 51.

The separator 51 includes, for example, a fluororesin such as PTFE or PFA. The peripheral edge portion of the diaphragm 51 is fixed to the inner wall of the valve chamber 29 for opening and closing. The diaphragm 51 separates the below-described valve seat 75 side and the partition wall 57 side so as to straddle the upward and downward movement direction of the diaphragm 51. The thick portion 51 a in the center of the diaphragm 51 is fixed to the movable member 55. The cover body 53 blocks the valve chamber 29 for opening and closing.

A disc-shaped partition wall 57 is provided on the inner side wall of the cover body 53. The partition wall 57 separates the movable partition member 59 side from the diaphragm 51 side. A movable member 55 is inserted into a central portion of the partition wall 57. The movable member 55 can slide with respect to the partition wall 57. The movable partition member 59 is fixed to a movable member 55 on the opposite side of the diaphragm 51. The movable partition member 59 can slide relative to the inner wall of the cover 53. The movable partition member 59 partitions the spring 61 side and the partition wall 57 side. A contact portion between the movable member 55 and the partition wall 57 and a contact portion between the movable partition member 59 and the inner wall of the cover 53 are sealed.

The spring 61 is disposed between the top wall 53 a of the cover body 53 and the movable partition member 59. The spring 61 is provided so as to be always pressed in the downward direction (the direction in which the diaphragm 51 exists). The suction and exhaust port 63 is an opening through which gas enters and exits the space between the movable partition member 59 and the partition wall 57 in the cover 53. The gas piping 67 connects a gas supply source 69 such as a gas cylinder or a piping in a factory to the intake / exhaust port 63. The gas pipe 67 is provided with, for example, a three-way valve 71. The three-way valve 71 selectively switches the supply of gas into the cover 53 from the gas supply source 69 and the exhaust of the gas from the cover 53.

The adjustment screw portion 65 has a male screw 65a. The male screw 65a is configured to mesh with a female screw 53b provided near the top wall 53a of the cover 53. The adjustment screw portion 65 is separated from the movable partition member 59. The upward movement of the movable partition member 59, the movable member 55, and the thick portion 51a of the diaphragm 51 is restricted by the position of the male screw 65a. The opening 73 is connected to the second flow path 35. The valve seat 75 is provided around the opening portion 73 and receives the thick-walled portion 51 a of the diaphragm 51.

<Manufacturing method of chemical liquid control valve 9>
Next, an example of a method for manufacturing the chemical liquid control valve 9 will be described. Fig. 3 (a) is a cross-sectional view of a pair of molds in the XY direction. Fig. 3 (b) is a longitudinal sectional view of a pair of molds in the XZ direction. 3 (b) is a longitudinal sectional view of the first protruding portion 87 and the second pin member 90 in FIG. 3 (a).

[Step S01] Step of preparing a pair of molds 81, 82 A pair of molds 81, 82 is prepared. When the pair of molds 81 and 82 are arranged to face each other, an internal space 83 is formed in the pair of molds 81 and 82. In FIGS. 3 (a) and 3 (b), the hatching of the lower right diagonal line indicated by a thick interval is the internal space 83. The internal space 83 is a space filled with resin. The pair of molds 81 and 82 have a first inner wall (surface) 85 and a second inner wall (surface) 86 in the internal space 83. The second inner wall 86 is a surface that is at a substantially right angle to the first inner wall 85.

The pair of molds 81 and 82 includes a first protrusion 87 for forming the flow adjustment valve chamber 27, a second protrusion 88 for forming the opening and closing valve chamber 29, and a linear shape for forming the intermediate flow path 31. First pin member 89. The first protruding portion 87 is provided on the first inner wall 85 of the inner space 83 of the pair of molds 81 and 82. The first protruding portion 87 is provided with a first connection convex portion 87a corresponding to the first extended flow path 40a. The second protruding portion 88 is provided on the second inner wall 86. The second protruding portion 88 is provided with a second connection convex portion 88a corresponding to the second extended flow path 40b.

The first pin member 89 is inserted in a direction extending at a substantially right angle to the second inner wall 86 so as to connect the first protruding portion 87 and the second protruding portion 88. The first protruding portion 87 is movable in the lateral direction (X direction). The first protruding portion 87 is inserted into the inner space 83 of the pair of molds 81 and 82. As shown in FIG. 3 (a), the second protruding portion 88 is configured integrally with the first pin member 89. The integrated second protruding portion 88 and the first pin member 89 are movable in the longitudinal direction (Y direction) and are inserted into the inner space 83 of the pair of molds 81 and 82. The front end portion 89 a of the first pin member 89 is in contact with the first connection convex portion 87 a of the first protruding portion 87.

The second protruding portion 88 and the first pin member 89 may not be integrated, and may be configured to be moved individually.

[Step S02] The step of inserting the second pin member 90 inserts the linear second pin member 90 into the internal space 83 so as to be connected to the first protruding portion 87. The second pin member 90 is movable in the lateral direction (X direction). The front end portion 90 a of the second pin member 90 is in contact with the first protruding portion 87. The second pin member 90 is used to form the first flow path 33.

[Step S03] The step of inserting the third pin member 91 inserts the linear third pin member 91 into the internal space 83 so as to be connected to the second protruding portion 88. The third pin member 91 is movable in the lateral direction (X direction). The front end portion 91 a of the third pin member 91 is in contact with the second connection convex portion 88 a of the second protruding portion 88. The third pin member 91 is used to form the second flow path 35.

[Step S04] The step of flowing in the resin is after inserting the first protruding portion 87, the second protruding portion 88, the first pin member 89, the second pin member 90, and the third pin member 91 into the internal space 83 (also a step) After S01 to S03), the heated resin (for example, PFA) flows into the internal space 83. The resin inside the heating cylinder of an injection molding machine (not shown) is melted by heating. That is, the resin flowing into the pair of molds 81 and 82 is a resin that is fluidized by heating. Then, the heating cylinder flows into the inner space 83 of the pair of molds 81 and 82.

[Step S05] In the step of removing the flow path valve block (molded product), after the resin flowing into the internal space 83 is cooled and solidified, the first protrusion 87, the second protrusion 88, and The first pin member 89, the second pin member 90, and the third pin member 91. Thereafter, the resin is removed from the pair of molds 81 and 82 as a single flow path valve block 21. This unloading is performed by relatively moving the pair of molds 81 and 82 in the vertical direction (the Z direction in FIG. 3 (b)). The resin flowing into the inner space 83 is formed on the inner walls (symbols 85 and 86, etc.) of the pair of molds 81 and 82, the first protrusion 87, the second protrusion 88, the first pin member 89, and the second pin. A portion where the member 90 and the third pin member 91 are in contact with each other forms a surface layer.

[Step S06] The step of installing the needle moving mechanism and the valve body moving mechanism for opening and closing is performed on the flow path valve block 21 removed from the pair of molds 81 and 82 to polish the opening 49 and the valve seat 75 shown in FIG. Surface treatment. Then, components such as the needle moving mechanism 23 and the opening and closing valve body moving mechanism 25 are attached to the flow path valve block 21.

In addition, according to the structure of the flow path valve block 21 described below and the like, a pair of molds 81 and 82, a first protruding portion 87, a second protruding portion 88, and the like may be configured as follows. For example, the first protruding portion 87 may be fixed to the first inner wall 85 of the mold 81 without moving relative to the mold 81. Similarly, the second protruding portion 88 may be fixed to the second inner wall 86 of the mold 82 without moving relative to the mold 82. In addition, corresponding to the structure of FIG. 4 described below, the second inner wall 86 may be a surface facing the first inner wall 85.

Further, in the conventional chemical liquid control valve 9, the V-shaped flow path 205 shown in FIG. 7 is formed by cutting from two directions of the flow rate adjustment valve chamber and the opening and closing valve chamber after formation. That is, due to the limitation of the mold, the V-shaped flow path 205 shown in FIG. 7 cannot be formed linearly. In addition, for example, when the flow path valve block 21 is formed of PFA, the surface layer of the PFA is cut off in the V-shaped flow path 205 part, so there is a concern that the chemical liquid penetrates into the interior of the flow path valve block 21 (PFA). According to the manufacturing method of the chemical liquid control valve 9 of this embodiment, a straight intermediate flow path 31 can be formed without cutting.

＜ Operation of substrate processing device and chemical liquid control valve ＞
Next, operations of the substrate processing apparatus 1 and the chemical liquid control valve 9 will be described.

Refer to Figure 1. A transfer mechanism (not shown) transfers the substrate W to the holding rotation unit 3. The holding rotating part 3 holds the substrate W by sucking the back surface of the substrate W. Thereafter, the holding and rotating section 3 rotates the held substrate W. The nozzle 2 is moved above the substrate W by a moving mechanism (not shown). The control unit 11 ejects the chemical liquid from the nozzle 2 onto the substrate W by operating the chemical liquid control valve 9.

In the chemical liquid control valve 9 shown in FIG. 2, the operation of the valve body moving mechanism 25 for opening and closing will be described first. The thick portion 51 a of the diaphragm 51 is pressed against the valve seat 75 (refer to the thick wall shown by the dotted line in FIG. 2) provided around the opening 73 of the opening and closing valve chamber 29 by the elastic force (restoring force) of the spring 61. Section 51a). This state is a closed state in which the chemical solution is not allowed to flow from the opening and closing valve chamber 29 to the second flow path 35. In the closed state, the chemical liquid is not ejected from the nozzle 2.

By operating the three-way valve 71, the gas is supplied from the gas supply source 69 to the space between the movable partition member 59 and the partition wall 57 in the cover 53 through the gas piping 67 and the air intake and exhaust port 63. As a result, the movable partition member 59 rises against the elastic force of the spring 61, and accordingly, the thick portion 51a of the movable member 55 and the diaphragm 51 rises (see the thick portion 51a shown by the solid line in FIG. 2). This state is an opened state in which the liquid medicine is circulated. When it is in the open state, the chemical liquid is ejected from the nozzle 2.

Here, the flow of the chemical solution when it is in the open state will be specifically described. The pump P shown in FIG. 1 transports the medicinal solution from the medicinal solution supply source 7 through the medicinal solution pipe 8 a to the first flow path 33 of the medicinal solution control valve 9. The chemical solution conveyed to the first flow path 33 shown in FIG. 2 is conveyed to the flow rate adjustment valve chamber 27 through the gap between the front end portion 41 a of the needle 41 and the opening portion 49. Thereafter, the chemical solution is transferred from the flow rate adjustment valve chamber 27 to the opening and closing valve chamber 29 through the intermediate flow path 31. In addition, since the intermediate flow path 31 is formed in a linear shape, the medicinal solution can be transported more smoothly than the V-shaped flow path 205 or the like shown in FIG. 7.

Thereafter, the chemical solution is conveyed from the opening and closing valve chamber 29 to the chemical solution pipe 8 b through the opening 73 and the second flow path 35 of the valve seat 75. The medicinal solution sent to the medicinal solution pipe 8 b is sent to the nozzle 2 and the medicinal solution is ejected from the nozzle 2.

The operation of the needle moving mechanism 23 will be described. The needle moving mechanism 23 adjusts the gap between the front end portion 41 a of the needle 41 and the opening portion 49 to adjust the flow rate of the chemical solution in the flow path valve block 21 such as the first flow path 33. The needle 41 is moved by the rotational driving of the electric motor 45. The conversion mechanism 47 converts the rotation of the electric motor 45 into a linear movement of the needle 41. The needle 41 moves in the lateral direction (X direction).

After the chemical solution is ejected, the control unit 11 stops the supply of the gas from the gas supply source 69 by operating the three-way valve 71, and discharges the gas in the cover 53 shown in FIG. 2 through the intake and exhaust ports 63 and the like. Accordingly, the thick portion 51a of the diaphragm 51 is pressed down by the elastic force of the spring 61, and the thick portion 51a is pressed against the valve seat 75 (closed state). In the closed state, the chemical liquid is not ejected from the nozzle 2.

After the ejection of the chemical liquid from the nozzle 2 is completed, the nozzle 2 retracts from above the substrate W to the outside of the substrate. The holding and rotating portion 3 stops the rotation of the held substrate W, and thereafter releases the holding of the substrate W. A transfer mechanism (not shown) moves the substrate W on the holding and rotating portion 3 to another device, a mounting portion, a carrier, or the like.

According to this embodiment, the flow path valve block 21 has a first outer wall 21a and a second outer wall 21b which is a surface at a right angle to the first outer wall 21a. The valve chamber 27 for adjusting the flow rate of the arrangement needle 41 is formed so that the first outer wall 21 a of the flow path valve block 21 is recessed. On the other hand, the valve chamber 29 for opening and closing the diaphragm 51 is formed so that the second outer wall 21b is recessed. The intermediate flow path 31 connects the flow adjustment valve chamber 27 and the opening and closing valve chamber 29, and the intermediate flow path 31 extends at a right angle to the second outer wall 21b. With this configuration, the intermediate flow path 31 can be formed in a straight line. Therefore, it is possible to improve the replacement characteristics of the chemical solution which may cause deterioration of the chemical solution due to the V-shaped flow path or the like. In addition, the replacement characteristic is a characteristic indicated by the time taken for a new chemical solution to flow into the first connection port 37 and to squeeze out the original chemical solution and reach the second connection port 39.

The first flow path 33 and the second flow path 35 are each linear and extend at a right angle to the intermediate flow path 31. When the resin is flowed into the pair of molds 81 and 82 to form the flow path valve block 21, the first pin member 89 inserted into the pair of molds 81 and 82 to form the intermediate flow path 31 and the first pin member 89 can be formed. Each of the second pin member 90 and the third pin member 91 of the flow path 33 and the second flow path 35 inserted into the pair of molds 81 and 82 is arranged at a right angle. Therefore, compared with the case where the first pin member 89, the second pin member 90, and the third pin member 91 are arranged obliquely (not at right angles), the intermediate flow path 31, the first flow path 33, and the second can be easily formed. Flow path 35.

The first flow path 33 is parallel to the second flow path 35. In the first flow path 33, the first connection port 37 on the opposite side to the portion connected to the flow adjustment valve chamber 27 is directed to the second flow path 35 to the second connection on the opposite side to the portion connected to the opening and closing valve chamber 29. The interface 39 opens in the same direction. When the resin flows into the pair of molds 81 and 82 to form the flow path valve block 21, the second pin member inserted into the pair of molds 81 and 82 to form the first flow path 33 and the second flow path 35 can be formed. 90 and the third pin member 91 move in the same direction. Therefore, the first flow path 33 and the second flow path 35 can be easily formed as compared with a case where the direction in which the second pin member 90 is inserted into the mold is different from the direction in which the third pin member 91 is oriented.

The present invention is not limited to the embodiments described above, and can be modified as described below.

(1) In the above-mentioned embodiment, the second outer wall 21b provided with the valve chamber 29 for opening and closing is a surface at right angles to the first outer wall 21a provided with the valve chamber 27 for flow rate adjustment. In this regard, as shown in FIG. 4, the second outer wall 21 b may face the first outer wall 21 a and be substantially parallel to the first outer wall 21 a. That is, the second outer wall (surface) 21b is provided on the side opposite to the first outer wall (surface) 21a via the flow path block 21. The second outer wall 21b is substantially parallel to the first outer wall 21a.

The flow rate adjustment valve chamber 27 is formed so that a part of the first outer wall 21 a of the flow path valve block 21 is recessed. The opening and closing valve chamber 29 is formed so that a part of the second outer wall 21 b of the flow path valve block 21 is recessed. As shown in FIG. 4, the flow rate adjusting valve chamber 27 is disposed to face the opening and closing valve chamber 29.

The linear intermediate flow path 31 is formed so as to connect the opening and closing valve chamber 29 and the flow rate adjusting valve chamber 27. The intermediate flow path 31 extends at a right angle to the first outer wall 21a and the second outer wall 21b. The first flow path 33 and the second flow path 35 each extend at a right angle to the intermediate flow path 31. The first flow path 33 is connected to the flow rate adjustment valve chamber 27. On the other hand, the second flow path 35 is connected to the valve chamber 29 for opening and closing.

The diaphragm 51 shown in FIG. 4 moves in the longitudinal direction (Y direction). In addition, the needle 41 of this modification is also moved in the longitudinal direction. The front end portion 41 a of the needle 41 penetrates the opening portion 49 of the connection portion between the flow rate adjustment valve chamber 27 and the intermediate flow path 31.

According to this modification, the flow path valve block 21 includes a first outer wall 21a and a second outer wall 21b that is a surface facing the first outer wall 21a and parallel to the first outer wall 21a. The valve chamber 27 for adjusting the flow rate of the arrangement needle 41 is formed so that the first outer wall 21 a of the flow path valve block 21 is recessed. On the other hand, the valve chamber 29 for opening and closing the diaphragm 51 is formed so that the second outer wall 21b is recessed. The intermediate flow path 31 connects the flow adjustment valve chamber 27 and the opening and closing valve chamber 29, and the intermediate flow path 31 extends at a right angle to the first outer wall 21a and the second outer wall 21b. With this configuration, the intermediate flow path 31 can be formed in a straight line. Therefore, it is possible to improve the replacement characteristics of the chemical solution which may cause deterioration of the chemical solution due to the V-shaped flow path or the like.

(2) In the above embodiment, for example, as shown in FIG. 2, the intermediate flow path 31 is formed so as to extend at a substantially right angle to the second outer wall 21 b provided with the valve chamber 29 for opening and closing. In this regard, as shown in FIG. 5 (a), the intermediate flow path 31 may be formed so as to extend at a substantially right angle to the first outer wall 21 a provided with the flow adjustment valve chamber 27.

(3) In the above embodiment and modification (1), as shown in FIGS. 2 and 4, the opening portion 73 at the bottom of the opening and closing valve chamber 29 is connected to the second flow path 35. In this regard, an opening portion 73 at the bottom of the opening and closing valve chamber 29 may be connected to the intermediate flow path 31 as shown in FIG. 5 (b).

(4) In the above embodiment and each modification, as shown in FIG. 2 and FIG. 4, the opening 49 at the bottom of the flow adjustment valve chamber 27 is connected to the intermediate flow path 31 extending in the moving direction of the needle 41 or第 流 流 33。 The first flow path 33. In this regard, as shown in FIG. 5 (b), the opening 49 at the bottom of the flow adjustment valve chamber 27 may be connected to extend through the third extension flow path 40c in a direction orthogonal to the moving direction of the needle 41. Middle flow path 31 (or first flow path 33). The third extension flow path 40 c extends from the opening 49 to the moving direction of the needle 41 and is connected to the intermediate flow path 31.

5 (a), 5 (b), and FIGS. 6 (a) and 6 (b) described below, the needle moving mechanism 23 and the opening / closing valve body moving mechanism 25 are simplified and shown.

(5) In the above embodiment and each modification, the needle moving mechanism 23 is configured to include an electric motor 45 and a conversion mechanism 47, and the rotation output from the electric motor 45 is converted into a linear movement of the needle 41 by the conversion mechanism 47. . However, it is not limited to this. Instead of the electric motor 45, a handle or a handle manually rotated by an operator may be provided to convert the rotation of the handle or the handle into a linear movement of the needle 41.

(6) In the above embodiment and each modification, for example, as shown in FIG. 2 and FIG. 4, the first connection port 37 at one end of the first flow path 33 faces the second connection port 39 at one end of the second flow path 35. Same direction. That is, both the first connection port 37 and the second connection port 39 open to the right in FIGS. 2 and 4. In this regard, the first connection port 37 may be opened in a direction opposite to the second connection port 39 as shown in FIGS. 6 (a) and 6 (b). That is, in FIGS. 6 (a) and 6 (b), the first connection port 37 opens to the left and the second connection port 39 opens to the right.

In addition, in FIGS. 6 (a) and 6 (b), the first connection port 37 faces in a direction opposite to the second connection port 39, that is, it reverses 180 around the intermediate flow path 31 relative to the second connection port 39 Degree opening. In this regard, the first connection port 37 may be opened toward the second connection port 39 around the intermediate flow path 31 in a direction of 90 ° (that is, a direction other than 0 degrees and 180 degrees).

(7) In the above embodiment and each modification, the opening and closing valve body moving mechanism 25 drives the diaphragm 51 with a gas. In this regard, similarly to the needle moving mechanism 23, the valve body moving mechanism 25 for opening and closing may drive the diaphragm 51 by an electric motor. The rotation by an electric motor is converted into a linear movement by a conversion mechanism. Thereby, the thick-walled portion 51 a of the diaphragm 51 is pressed against the valve seat 75, or the thick-walled portion 51 a is separated from the valve seat 75.

1‧‧‧ substrate processing device

2‧‧‧ Nozzle

3‧‧‧ keep rotating part

4‧‧‧ Rotating Chuck

5‧‧‧Rotary drive unit

7‧‧‧ Medicine liquid supply source

8a‧‧‧medicine piping

8b‧‧‧Pipeline

9‧‧‧ chemical liquid control valve

11‧‧‧Control Department

13‧‧‧Operation Department

21‧‧‧Single flow valve block

21a‧‧‧The first outer wall

21b‧‧‧ 2nd outer wall

23‧‧‧ Needle moving mechanism

25‧‧‧ Opening and closing valve body moving mechanism

27‧‧‧Valve chamber for flow adjustment

29‧‧‧ valve chamber for opening and closing

31‧‧‧ middle flow path

33‧‧‧The first flow path

35‧‧‧The second flow path

37‧‧‧The first connection port

39‧‧‧ 2nd connection port

40a‧‧‧The first extended flow path

40b‧‧‧ 2nd extended flow path

40c‧‧‧3rd extension flow path

41‧‧‧ needle

41a‧‧‧Front end

43‧‧‧ Cover

45‧‧‧ Electric motor

47‧‧‧ Conversion Agency

49‧‧‧ opening

51‧‧‧ diaphragm

51a‧‧‧thick wall

53‧‧‧Cover

53a‧‧‧Top wall

53b‧‧‧female thread

55‧‧‧moving parts

57‧‧‧ partition

59‧‧‧moving partition

61‧‧‧Spring

63‧‧‧ Suction and exhaust port

65‧‧‧adjusting screw

65a‧‧‧male thread

67‧‧‧Gas piping

69‧‧‧Gas supply source

71‧‧‧Three-way valve

73‧‧‧ opening

75‧‧‧Valve seat

81‧‧‧Mould

82‧‧‧Mould

83‧‧‧ Internal space

85‧‧‧ the first inner wall

86‧‧‧The second inner wall 86

87‧‧‧ 1st protrusion

87a‧‧‧The first connection protrusion

88‧‧‧ 2nd protrusion

88a‧‧‧ 2nd connecting protrusion

89‧‧‧1st pin part

89a‧‧‧ front end

90‧‧‧ 2nd pin component

90a‧‧‧ front end

91‧‧‧3rd pin part

91a‧‧‧ front end

201‧‧‧ Liquid Control Valve

202‧‧‧Flow regulating valve

203‧‧‧Open / close valve (ON / OFF valve)

205‧‧‧V-shaped flow path

AX‧‧‧Rotary axis

P‧‧‧Pump

W‧‧‧ substrate

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

FIG. 1 is a schematic configuration diagram of a substrate processing apparatus according to an embodiment.

FIG. 2 is a schematic configuration diagram of a chemical liquid control valve according to the embodiment.

Fig. 3 (a) is a cross-sectional view of a pair of molds in the XY direction, and (b) is a longitudinal cross-sectional view of a pair of molds in the XZ direction.

FIG. 4 is a schematic configuration diagram of a chemical liquid control valve according to a modification.

5 (a) and (b) are schematic configuration diagrams of a chemical liquid control valve according to a modified example.

6 (a) and (b) are schematic configuration diagrams of a chemical liquid control valve according to a modified example.

FIG. 7 is a schematic configuration diagram of a conventional chemical liquid control valve.

Claims (7)

A medicinal liquid control valve is characterized by: A single flow path valve block having a first outer wall and a second outer wall that is a surface at a right angle to the first outer wall; The flow regulating valve chamber is formed in a manner that the first outer wall is recessed; The valve chamber for opening and closing is formed in such a manner that the second outer wall is recessed; The intermediate flow path is formed in the inside of the flow path valve block in a linear shape, and connects the valve chamber for flow adjustment and the valve chamber for opening and closing. One extends at right angles; The first flow path is formed inside the flow path valve block and is connected to the valve chamber for flow rate adjustment; A second flow path formed inside the flow path valve block and connected to the valve chamber for opening and closing; A needle moving mechanism having a needle disposed in the flow rate adjustment valve chamber, blocking the flow rate adjustment valve chamber, and moving the needle to adjust the flow rate of the medicinal solution; and An opening / closing valve body moving mechanism includes an opening / closing valve body disposed in the opening / closing valve chamber, blocks the opening / closing valve chamber, and moves the opening / closing valve body to supply and stop the supply of a medicinal solution. . A medicinal liquid control valve is characterized by: A single flow path valve block having a first outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall; The flow regulating valve chamber is formed in a manner that the first outer wall is recessed; The valve chamber for opening and closing is formed in such a manner that the second outer wall is recessed; The intermediate flow path is formed inside the flow path valve block in a linear shape, and connects the flow rate adjustment valve chamber and the opening and closing valve chamber at a right angle to the first outer wall and the second outer wall. extend; The first flow path is formed inside the flow path valve block and is connected to the valve chamber for flow rate adjustment; A second flow path formed inside the flow path valve block and connected to the valve chamber for opening and closing; A needle moving mechanism having a needle disposed in the flow rate adjustment valve chamber, blocking the flow rate adjustment valve chamber, and moving the needle to adjust the flow rate of the medicinal solution; and An opening / closing valve body moving mechanism includes an opening / closing valve body disposed in the opening / closing valve chamber, blocks the opening / closing valve chamber, and moves the opening / closing valve body to supply and stop the supply of a medicinal solution. . If the liquid control valve of claim 1 or 2, The first flow path and the second flow path are each linear and extend at a right angle to the intermediate flow path. If the liquid control valve of claim 1 or 2, The first flow path is parallel to the second flow path, In the first flow path, the first connection port on the opposite side to the portion connected to the flow adjustment valve chamber is directed to the second connection port in the second flow path to the side connected to the opening and closing valve chamber. Open in the same direction. If the liquid control valve of claim 1 or 2, The flow path valve block is formed of PFA. A substrate processing apparatus, comprising: A holding rotating part which holds the substrate and rotates the held substrate; A nozzle for spraying a chemical solution on a substrate held by the holding rotating part; A chemical liquid pipe connected to the nozzle; and A chemical liquid control valve that adjusts the flow rate of the chemical liquid sprayed from the nozzle, and causes the chemical liquid to be sprayed from the nozzle to stop the spraying of the chemical liquid; The chemical liquid control valve includes a single flow path valve block having a first outer wall and a second outer wall that is a surface at a right angle to the first outer wall; The flow regulating valve chamber is formed in a manner that the first outer wall is recessed; The valve chamber for opening and closing is formed in such a manner that the second outer wall is recessed; The intermediate flow path is formed in the inside of the flow path valve block in a linear shape, and connects the flow rate adjustment valve chamber and the opening and closing valve chamber, and is opposite to any of the first outer wall and the second outer wall. One extends at right angles; The first flow path is formed inside the flow path valve block and is connected to the valve chamber for flow rate adjustment; A second flow path formed inside the flow path valve block, connected to the opening and closing valve chamber, and connected to the nozzle through the chemical liquid pipe; A needle moving mechanism having a needle disposed in the flow rate adjustment valve chamber, blocking the flow rate adjustment valve chamber, and moving the needle to adjust the flow rate of the medicinal solution; and An opening / closing valve body moving mechanism includes an opening / closing valve body disposed in the opening / closing valve chamber, blocks the opening / closing valve chamber, and moves the opening / closing valve body to supply and stop the supply of a medicinal solution. . A substrate processing apparatus, comprising: A holding rotating part which holds the substrate and rotates the held substrate; A nozzle for spraying a chemical solution on a substrate held by the holding rotating part; A chemical liquid pipe connected to the nozzle; and A chemical liquid control valve that adjusts the flow rate of the chemical liquid sprayed from the nozzle, and causes the chemical liquid to be sprayed from the nozzle to stop the spraying of the chemical liquid; The chemical liquid control valve includes a single flow path valve block having a first outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall; The flow regulating valve chamber is formed in a manner that the first outer wall is recessed; The valve chamber for opening and closing is formed in such a manner that the second outer wall is recessed; The intermediate flow path is formed inside the flow path valve block in a linear shape, and connects the flow rate adjustment valve chamber and the opening and closing valve chamber at a right angle to the first outer wall and the second outer wall. extend; The first flow path is formed inside the flow path valve block and is connected to the valve chamber for flow rate adjustment; A second flow path formed inside the flow path valve block, connected to the opening and closing valve chamber, and connected to the nozzle through the chemical liquid pipe; A needle moving mechanism having a needle disposed in the flow rate adjustment valve chamber, blocking the flow rate adjustment valve chamber, and moving the needle to adjust the flow rate of the medicinal solution; and An opening / closing valve body moving mechanism includes an opening / closing valve body disposed in the opening / closing valve chamber, blocks the opening / closing valve chamber, and moves the opening / closing valve body to supply and stop the supply of a medicinal solution. .