JP6238798B2 - Flow regulating valve and fluid control apparatus including the same - Google Patents

Description

  The present invention relates to a flow control valve used in various industries such as a chemical factory, a semiconductor manufacturing field, a liquid crystal manufacturing field, and a food field, and a fluid control valve including the same.

  Conventionally, there has been a flow rate adjustment valve as shown in FIG. 5 as a flow rate adjustment valve used in various industries (for example, Patent Document 1). The flow rate adjusting valve is arranged at the upper part of the main body 101 to adjust the flow rate of the controlled fluid, and the pressure control valve unit 103 is arranged immediately below the flow rate adjusting valve unit 102 to suppress the pressure fluctuation of the controlled fluid. Is a combined regulating valve. The main body 101 includes an inflow channel 104, a valve chamber 105 of the flow rate adjusting valve unit 102 communicating with the inflow channel 104, an outflow channel 106, and a valve chamber of the pressure control valve unit 103 communicating with the outflow channel 106. 107, an internal flow path 108 that communicates the valve chamber 105 and the valve chamber 107 and hangs down from the valve chamber 105 is formed. The valve chamber 105 is provided with a diaphragm 109 that adjusts the opening degree of the opening of the inflow channel 104 in the valve chamber 105, and an electric drive unit that moves the diaphragm 109 forward and backward through the drive shaft 110 at the upper part of the main body 101. 111 is arranged. By incorporating the flow rate adjusting valve portion 102 and the pressure control valve portion 103 having different functions into one main body 101, the volume of the flow rate adjusting valve can be suppressed and the installation location can be reduced.

Utility Model Registration No. 3168588

  However, in the conventional flow rate adjustment valve, since the valve chamber 107 is formed immediately below the valve chamber 105, depending on the arrangement of the inflow channel 104, the internal channel 108, and the outflow channel 106, the channel 104, 106 and 108 may interfere with each other. Further, if the flow paths 104, 106, 108 are arranged so as not to interfere with each other, the flow regulating valve may be bulky. In addition, since the flow path axis of the opening of the inflow flow path 104 and the opening of the outflow flow path 106 do not exist on the same axis and are different, there is a risk that the construction of the piping before and after the flow rate adjustment valve becomes complicated. . It is possible to avoid the interference between the flow paths 104, 106, and 108, and the fact that the flow path axes of the openings of the inflow flow path 104 and the outflow flow path 106 do not coincide with each other by forming the flow paths 104, 106, and 108 obliquely. However, if the channels 104, 106, and 108 are formed obliquely, the arrangement of the channels 104, 106, and 108 tends to be complicated, and there is a possibility that the processing and forming method may be limited.

  The present invention has been made in view of the above-described problems of the prior art, and is provided with a part for adjusting the flow rate and a part for adjusting the pressure in one main body, and is compact and easy to form a flow path. An object is to provide a valve and a fluid control apparatus including the valve.

  Therefore, the present invention includes a first valve chamber formed on the upper surface, a second valve chamber formed on the lower surface and having a central axis parallel to the central axis of the first valve chamber, and a first opening having the first opening. A first flow path communicating with the valve chamber, a communication flow path communicating with the first valve chamber and the second valve chamber, a second flow path having a second opening and communicating with the second valve chamber, A main body in which channel axes of the first opening, the first flow path, the communication flow path, the second flow path, and the second opening are arranged on the same plane, and an upper part of the main body. A fixed bonnet, a driving means disposed in an internal space of the bonnet, and a valve body on a lower surface thereof, wherein the opening area of the communication flow path is changed by being moved up and down by the driving means; A first diaphragm that intersects the central axis of the chamber, covers the lower part of the second valve chamber, and intersects the central axis of the first valve chamber. A first diaphragm, a second diaphragm presser for clamping and fixing the second diaphragm to the main body, and a biasing means for biasing the second diaphragm toward the second valve chamber. Features.

  Further, the drive means is connected to the electric drive unit disposed in the internal space of the bonnet, the electric drive unit and the main body, and a mounting base having a through-hole through which the drive shaft passes. The drive shaft is disposed between the electric drive unit and the main body and moves up and down by the operation of the electric drive unit, and the drive shaft is fixed to the shaft portion of the electric drive unit A first shaft portion and a second drive shaft connected to the first shaft portion so as not to be rotatable and vertically movable, the second drive shaft has a flange portion and a shaft portion; The flange portion is a mechanical unit that restricts movement of the valve body out of a predetermined operation range by interfering with components other than the flange portion, and guide means for restricting the operation of the second drive shaft to be unrotatable. The limiting means and the movement of the valve body outside the predetermined operation range or within the predetermined operation range. Sensor type limiting means for limiting the position of the collar by detecting the position of the buttock in at least two locations, each of the sensor type limiting means can independently adjust the mounting position, and in the horizontal direction. Having at least two sensors arranged in parallel, a gap is formed between the shaft portion and the through hole of the mounting base, and is sandwiched and fixed between the first diaphragm and the second drive shaft, A third diaphragm that encloses the tip of the second drive shaft and squeezes into the main body side and separates the main body and the electric drive unit; and the first diaphragm and the third diaphragm, A second feature is that an annular space extending in the radial direction is formed between the upper surface of the first diaphragm and the lower surface of the third diaphragm as a ceiling surface.

  A third feature of the fluid control device comprising the flow rate adjusting valve according to claim 1, a flow meter, and a control unit that controls the flow rate adjusting valve in accordance with an output from the flow meter. And

  According to the present invention, the first valve chamber, which is a valve chamber for adjusting the flow rate, and the second valve chamber, which is a valve chamber for adjusting the pressure, are arranged such that their central axes are parallel to each other, and the first valve The chamber and the second valve chamber are arranged so that the central axes of the first valve chamber and the second valve chamber intersect the second diaphragm and the first diaphragm, respectively, so that two valve chambers are formed in one main body. In spite of this, the main body can be made compact. In addition, since the flow path axes of the first opening, the first flow path, the communication flow path, the second flow path, and the second opening are arranged on the same plane, various flow paths are formed with a simple layout. And the body can be easily formed.

It is a longitudinal cross-sectional view which shows schematic structure of the flow regulating valve which concerns on 1st embodiment of this invention. It is a longitudinal cross-sectional view which shows schematic structure of the flow regulating valve which concerns on 2nd embodiment of this invention. It is a perspective view which shows schematic structure of the state which removed the upper bonnet of the flow regulating valve which concerns on 2nd embodiment of this invention. It is a longitudinal cross-sectional view which shows schematic structure of the fluid control apparatus provided with the flow regulating valve of this invention. It is a longitudinal cross-sectional view which shows the conventional flow regulating valve.

  Hereinafter, embodiments of a flow rate adjusting valve according to the present invention will be described with reference to the drawings, but it goes without saying that the present invention is not limited to the embodiments. Initially, the whole structure of the flow regulating valve of 1st embodiment is demonstrated with reference to FIG.

  The main body 1 is made of polytetrafluoroethylene (hereinafter referred to as PTFE) and is formed in a substantially quadrangular prism shape. A first concave portion 10 that receives the convex portion 32 of the lower bonnet 3 is formed on the upper surface (upper side in FIG. 1) of the main body 1, and a cross-section L-shape of the first diaphragm 7 is formed on the outer peripheral edge of the bottom surface of the first concave portion 10. An annular groove 16 that receives the outer periphery of the shape is formed. A second recess 11 is formed at the center of the first recess 10, and a space formed by the inner peripheral surface of the second recess 11 and the lower surface of the first diaphragm 7 becomes the first valve chamber 12. A first flow path 14 communicating with the first opening 13 is formed at a position deviated in the radial direction from the center of the bottom surface of the first valve chamber 12. A communication channel 15 is formed to hang down from the center of the bottom surface of the first valve chamber 12, and the communication channel 15 communicates with a position that is radially offset from the center of the bottom surface (upper side in FIG. 1) of the second valve chamber 17. ing. In the first valve chamber 12, the needle portion 31 of the first diaphragm 7 is inserted into the communication channel 15, and the change in the position of the needle portion 31 changes the opening area of the communication channel 15, whereby the first valve chamber 12. The flow rate of fluid flowing through is adjusted.

  A third recess 18 that receives the second diaphragm retainer 9 is formed on the lower surface (lower side in FIG. 1) of the main body 1, and an L-shaped cross section of the second diaphragm 8 is formed on the outer periphery of the bottom surface of the third recess 18. An annular groove 19 is formed for receiving the outer peripheral edge. A fourth recess 20 is formed at the center of the third recess 18, and a space formed by the inner peripheral surface of the fourth recess 20 and the surface of the second diaphragm 8 on the side of the communication flow path 15 is the second valve chamber 17. It becomes. Between the second diaphragm 8 and the second diaphragm retainer 9, a spring 23, which is an urging means for urging the second diaphragm 8 toward the second valve chamber, is disposed. Here, the second valve chamber 17 is arranged so that the central axis of the second valve chamber 17 is parallel to the central axis of the first valve chamber 12. The first valve chamber 12 and the second valve chamber 17 are arranged so that the central axes of the first valve chamber 12 and the second valve chamber 17 intersect the second diaphragm 8 and the first diaphragm 7, respectively. A communication flow path 15 that connects the first valve chamber 12 and the second valve chamber 17 is connected to a position deviated from the center of the bottom surface of the second valve chamber 17 toward the first valve chamber 12 side. A second flow path 22 communicating with the second opening 21 is formed in the center of the bottom surface of the second valve chamber 17. In the second valve chamber 17, the pressure of the fluid flowing through the second valve chamber 17 is adjusted by the second diaphragm 8 and the spring 23 absorbing fluctuations in the fluid pressure.

  In the first embodiment, the first valve chamber 12 is formed on the upper surface of the main body 1 and the second valve chamber 17 is formed on the lower surface of the main body 1, but the first valve chamber 12 and the second valve chamber 17 are respectively The same effect can be obtained if it is formed on the opposing surface of the main body 1. Moreover, the fluid can be flowed from either the first opening 13 or the second opening 21. In the first embodiment, the communication channel 15 communicates from the center of the bottom surface of the first valve chamber 12 to a position that is radially offset from the center of the bottom surface of the second valve chamber 17. And the end point is not limited to this. For example, when the first flow path 14 communicates with the center of the bottom surface of the first valve chamber 12, the second valve chamber starts from a position where the communication flow path 15 is biased from the center of the bottom surface of the first valve chamber 12 toward the second valve chamber 17. It may be formed so as to communicate with a position biased toward the first valve chamber 12 from the center of the bottom surface of 17. In addition, in the first embodiment, the communication flow path 15 is formed in a straight line, but is not limited to a straight line except for a range in which the needle valve element 31 of the communication flow path 15 is inserted, It may be bent with. For example, when the first flow path 14 communicates with the center of the bottom surface of the first valve chamber 12, the needle valve body 31 is not inserted into the communication flow path 15, and thus the communication flow path 15 may be formed obliquely. .

  The electric drive unit 5 is fixed to the upper part of the mounting base 4 with bolts and nuts (not shown). A stepping motor is provided inside the electric drive unit 5, and a motor shaft portion 24 is provided below the stepping motor. A first drive shaft 25 of the shaft portion 6 is fixed to the motor shaft portion 24 of the electric drive portion 5 so as not to rotate but to move up and down.

  The shaft portion 6 includes a first drive shaft 25 and a second drive shaft 26. The first drive shaft 25 is made of stainless steel (hereinafter referred to as SUS) and has a substantially cylindrical shape. A through hole for being fitted into the motor shaft portion 24 is formed inside the first drive shaft 25, and a male screw portion for screwing with the second drive shaft 26 is formed at the lower portion.

  The second drive shaft 26 is made of SUS and has a substantially cylindrical shape. A female screw portion for screwing with the first drive shaft 25 is formed on the upper portion of the second drive shaft 26. In addition, on the upper portion of the second drive shaft 26, a flange portion 27 having a rectangular shape in plan view is formed. A through-hole through which a guide 28 that is attached to the mounting base 4 and restricts the rotation of the second drive shaft 26 is inserted is formed at a corner of the flange portion 27. A female thread portion for screwing with the first diaphragm 7 is formed at the lower portion of the second drive shaft 26. The second drive shaft 26 is screwed to the first drive shaft 25 so as not to rotate and to move up and down, and moves up and down by driving the electric drive unit 5.

  The first diaphragm 7 is made of PTFE. A central portion of the first diaphragm 7 is a valve body portion 29. A male thread portion for connecting to the second drive shaft 26 is formed at the upper portion of the valve body portion 29, and a truncated cone shaped needle portion 31 that protrudes downward and swells in the direction of the main body 1 is formed at the lower portion. . A film portion 30 extends in the radial direction from the middle portion of the valve body portion 29. The central part of the film part 30 is a mortar-shaped film part formed in a mortar-like shape, and a curved film part curved in a convex shape in the direction of the electric drive unit 5 is extended on the outer peripheral edge of the mortar-shaped film part. . A flat plate film portion extends on the outer peripheral edge of the curved film portion 30, and a cylindrical film portion having an L-shaped cross section extends on the outer peripheral edge of the flat film portion. An O-ring is mounted on the upper surface of the cylindrical membrane portion. The first diaphragm 7 is sandwiched and fixed in a watertight state by the lower bonnet 3 and the main body 1 at the outer periphery of the curved membrane portion. The first diaphragm 7 is connected to the electric drive unit 5 via the second drive shaft 26 and the first drive shaft 25, and the needle unit 31 is moved up and down by the electric drive unit 5.

  The bonnet is made of polyvinyl chloride (hereinafter referred to as PVC), is formed in a substantially rectangular tube shape, and includes an upper bonnet 2 and a lower bonnet 3. The lower bonnet 3 is fixed to the upper surface of the main body 1 with bolts and nuts (not shown). A step-like convex portion 32 protruding downward is formed on the lower surface of the lower bonnet 3, and the lower bonnet 3 and the second drive shaft 26 are inserted into the central portion of the convex portion 32 with a sufficient gap without sliding contact. A through-hole 33 is formed. A part of the convex part 32 is fitted into the first concave part 10 formed on the upper surface of the main body 1, and a part of the convex part 32 is in contact with the upper surface of the main body 1. The upper bonnet 2 covers the electric drive unit 5 and is fixed to the upper surface of the lower bonnet 3 in a watertight state. A wiring hole for connecting a conductive wire (not shown) is formed on the side surface of the upper bonnet 2.

  The mounting base 4 is made of PVC and is formed in a substantially square tube shape. The mounting base 4 is fixed to the main body 1 and connects the electric drive unit 5 and the main body 1. Two opposing side surfaces of the mounting base 4 are opened. A through hole is formed in the center of the upper surface of the mounting base 4 and the motor shaft portion 24 of the electric drive unit 5 passes therethrough. A through hole 39 is formed at the center of the lower surface of the mounting base 4, and the second drive shaft 26 of the shaft portion 6 penetrates with a gap 38. A guide 28 serving as guide means for restricting the rotation of the second drive shaft 26 is disposed inside the mounting base 4.

  The second diaphragm 8 is made of PTFE. A valve body 34 is formed in the second central portion. A film part 35 extends in the radial direction from the middle part of the valve body part 34. A mortar-shaped film part that swells in the direction of the main body 1 is formed at the center of the film part 35. A curved membrane portion that curves in a convex shape in the direction of the second diaphragm retainer 9 extends from the outer peripheral edge of the mortar-like membrane portion. A flat plate film portion extends on the outer peripheral edge of the curved film portion, and a cylindrical film portion having an L-shaped cross section extends on the outer peripheral edge of the flat film portion. An O-ring is mounted on the upper surface of the cylindrical membrane portion. The second diaphragm 8 is sandwiched and fixed in a watertight state by a second diaphragm retainer 9 and the main body 1 at a portion on the outer peripheral side from the curved membrane portion.

  The second diaphragm retainer 9 is made of PTFE. The second diaphragm retainer 9 has a substantially disc shape, and a recess 36 is formed on the upper surface. A space 37 is formed by the surface of the second diaphragm 8 on the second diaphragm retainer 9 side and the inner peripheral surface of the recess 36. Has been. A breathing hole communicating with the space 37 is formed on the lower surface of the second diaphragm holder 9. In the space 37, a spring 23 is disposed as a biasing means for biasing the second diaphragm 8 in the direction of the main body 1, and the spring 23 is sandwiched and fixed between the second diaphragm 8 and the second diaphragm retainer 9.

  Next, main actions of the flow rate adjusting valve according to the first embodiment will be described. As shown in FIG. 1, the fluid flowing in from the first opening 13 of the flow rate adjusting valve flows into the first valve chamber 12 through the first flow path 14. In the first valve chamber 12, the flow rate can be adjusted by changing the opening area of the communication flow path 15 due to the vertical movement of the needle valve element 31. Here, when the stepping motor of the electric drive unit 5 is operated and the motor shaft unit 24 and the first drive shaft 25 are driven (forward rotation), the second drive shaft 26 descends along the guide 28 and the second drive shaft is driven. In accordance with 26, the needle portion 31 of the first diaphragm 7 descends. At this time, since the opening area of the communication flow path 15 becomes small, the flow rate of the fluid flowing through the first valve chamber 12 decreases. When the motor shaft portion 24 and the second drive shaft 26 are driven (reversed), the second drive shaft 26 is raised, and the needle portion 31 of the first diaphragm 7 is raised along with the second drive shaft 26. At this time, since the opening area of the communication flow path 15 is increased, the flow rate of the fluid flowing through the first valve chamber 12 is increased. Here, a gap 38 is formed between the second drive shaft 26 and the mounting base 4, and the inner surface of the outer peripheral surface of the second drive shaft 26, the through hole 39 of the mounting base 4, and the through hole 33 of the lower bonnet 2. Since the peripheral surface is not slidably contacted, the frictional resistance accompanying the raising and lowering of the second drive shaft 26 can be suppressed, and the output of the electric drive unit 5 can be reduced. When the output of the electric drive unit 5 is reduced, the amount of heat generated by the electric drive unit 5 can be suppressed, so that the dimensional change of the resin part can be suppressed and the influence of the dimensional change on the flow rate control can be suppressed. In the first embodiment, the fully closed state is not assumed. However, when the fully closed state is required, the peripheral portion of the communication flow path 15 is used as a valve seat, and the valve seat 29 and the valve body portion 29 of the first diaphragm 7 are used. You may make it contact | abut with a bottom face.

  The fluid whose flow rate is adjusted from the first valve chamber 12 and flowing into the communication flow path 15 flows into the second valve chamber 17, further flows through the second flow path 22, and flows out from the second opening 21. At this time, pressure fluctuation may occur downstream of the first valve chamber 12. In the second valve chamber 17, the fluid pressure fluctuation received by the surface of the second diaphragm 8 on the second valve chamber 17 side can be absorbed by the urging force of the spring 23 received by the space 37 side surface of the second diaphragm 8. The pressure can be kept constant. Therefore, for example, pressure fluctuations such as pulsation generated on the downstream side of the first valve chamber 12 can be prevented from being transmitted to the first diaphragm 7. Thus, by providing the second valve chamber 17 having the function of adjusting the pressure on the downstream side of the first valve chamber 12 having the function of adjusting the flow rate, the influence of the pressure fluctuation on the flow rate adjustment is reduced. The flow rate can be adjusted accurately and stably.

  Here, since the first valve chamber 12 and the second valve chamber 17 are arranged so that their central axes are parallel to each other, two valve chambers 12 and 17 are formed in one main body 1. Nevertheless, the main body 1 can be compactly formed in the vertical direction. Further, the first valve chamber 12 and the second valve chamber 17 are arranged so that the central axes of the first valve chamber 12 and the second valve chamber 17 intersect the second diaphragm 8 and the first diaphragm 7, respectively. Although the two valve chambers 12 and 17 are formed in one main body 1, the main body 1 can be formed compact in the horizontal direction. In addition, when the communication flow path 15 is formed to hang down from the first valve chamber 12 toward the second valve chamber 17, the first valve chamber 12 and the second valve chamber 17 can be arranged closer to each other. In addition, since the flow path axes of the first opening 13, the first flow path 14, the communication flow path 15, the second flow path 22 and the second opening 21 are arranged on the same plane, The flow paths 14, 15, and 22 can be formed in a compact and simple arrangement, and the main body 1 can be formed in a compact and simple manner.

  Next, the overall configuration of the flow rate adjusting valve of the second embodiment will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the location similar to 1st embodiment, and the difference with 1st embodiment is mainly demonstrated below.

  The second drive shaft 26 is formed in a truncated cone shape whose tip end is narrowed toward the main body 1. Further, an upper limit detection unit 52a and a lower limit detection unit 52b corresponding to the transmission type photosensors serving as the upper limit position sensor 51a and the lower limit position sensor 51b are formed on the side surface of the flange portion 27 of the second drive shaft 26 so as to protrude. . The upper limit position sensor 51a and the lower limit position sensor 51b are provided on the second drive shaft so that the needle portion 31 of the first diaphragm 7 does not move too much in the main body 1 direction or the electric drive portion 5 direction than the preset operation range. 26 is a sensor type restricting means for restricting the movement of 26. Further, a rod-like stopper 53 is fixed in the vicinity of the center portion of the collar portion 27. The stopper 53 causes the end portion to collide with the ceiling surface or the bottom surface of the mounting base 4, and the needle portion 31 of the first diaphragm 7 moves too much in the main body 1 direction or the electric drive unit 5 direction from the preset operation range. This is a mechanical limiting means for restricting the movement of the second drive shaft 26 so as not to occur. In the second embodiment, the mechanical restriction means is arranged to function when the sensor-type restriction means does not function. Two limiting means for restricting the movement of the second drive shaft 26 are provided mainly to prevent the needle portion 31 from colliding with the main body 1. By providing a plurality of limiting means of sensor type limiting means and mechanical type limiting means, it is possible to reliably prevent the needle valve body 31 from colliding with the main body 1. Further, by forming the flange portion 27 on the second drive shaft 26 and providing a plurality of restricting means on the flange portion 27, the flow rate adjusting valve can be made compact.

  The third diaphragm 54 is made of PTFE. A through hole is formed in the center of the third diaphragm 54. The central part of the third diaphragm 54 is a mortar-shaped film part formed in a mortar shape, and the mortar-shaped film part is disposed so as to include the tip of the second drive shaft 26, so that the flow rate adjustment valve is moved up and down. It can be formed compact in the direction. A plate-like film part is extended on the outer periphery of the mortar-like film part, and a cylindrical film part having an L-shaped cross section is extended on the outer periphery of the plate-like film part. The third diaphragm 54 is sandwiched and fixed in a watertight manner by the mounting base 4 and the lower bonnet 3 at the outer periphery of the mortar-shaped film portion. The third diaphragm 54 is fixed in a watertight manner by the second drive shaft 26 and the first diaphragm 7 at the periphery of the through hole of the mortar-shaped film portion. By arranging the first diaphragm 7 and the third diaphragm 54 side by side in the up-down direction, the third diaphragm 54 can prevent the fluid that has passed through the first diaphragm 7 from entering the electric drive unit 5 side. The electric drive unit 5 side and the first valve chamber 12 can be effectively isolated. Between the third diaphragm 54 and the first diaphragm 7, the upper surface of the first diaphragm 7 is a bottom surface, the lower surface of the third diaphragm 54 is a ceiling surface, and there is another between the first diaphragm 7 and the third diaphragm 54. An annular space 37 extending in the radial direction is formed without any member. Since the annular space 56 is formed, the first diaphragm 7 and the third diaphragm 54 can be arranged close to each other, so that the height of the flow regulating valve can be suppressed.

  A stepped recess 55 is formed on the upper surface of the protrusion 32 of the lower bonnet 3, and the stepped protrusion 32 of the mounting base 4 is received in the recess 55. Further, a through hole (not shown) is formed on the side surface of the lower bonnet 3 so that the annular space 56 formed between the first diaphragm 7 and the third diaphragm 54 communicates with the outside of the flow rate adjusting valve. Yes.

  A step-like convex portion 59 is formed on the lower surface of the mounting base 4, and the convex portion 59 is received in the concave portion 55 of the lower bonnet 3. Further, the upper base position sensor 51a and the lower limit position sensor 51b are fixed to the mounting base 4. A support member 57 for attaching the upper limit position sensor 51a and the lower limit position sensor 51b is fixed to the guide 28 disposed inside the mount 4. Support plates 58a and 58b to which the upper limit position sensor 51a and the lower limit position sensor 51b are respectively attached are fixed to the support 57 in parallel to the horizontal direction. That is, the upper limit position sensor 51a and the lower limit position sensor 51b can adjust the position independently and are arranged in parallel in the horizontal direction. Thus, by finely adjusting the position sensor 51 by fixing the position sensor 51 to the support plate 58 so that the position sensors 51 can adjust the position independently, respectively. In addition, since the upper limit position sensor 51a and the lower limit position sensor 51b are arranged in parallel in the horizontal direction, a plurality of position sensors 51 can be attached even in a narrow space.

  In the second embodiment, a transmissive photosensor is used as the sensor-type limiting means. However, the sensor may be a limit switch or a magnet sensor, and in particular as long as it can detect the position of the second drive shaft 26. It is not limited. Further, in the second embodiment, the position sensors 51 are provided at the upper limit position and the lower limit position of the second drive shaft 26. However, for example, a position within a preset operation range, for example, a reference position of the second drive shaft 26 A position sensor may be provided at the origin position. In the second embodiment, the upper limit position sensor 51a and the lower limit position sensor 51b are attached to different support plates 58a and 58b. However, when the position sensor 51 is further added, two position sensors 51 are provided on one support plate 58. It may be attached. Since the other structure of 2nd Embodiment is the same as that of 1st Embodiment, description is abbreviate | omitted.

  Next, the operation of the flow regulating valve according to the second embodiment of the present invention will be described with reference to FIGS.

  In the flow rate adjusting valve shown in FIG. 2, when the stepping motor of the electric drive unit 5 is operated and the motor shaft unit 24 and the second drive shaft 26 are driven (forward rotation), the second drive shaft 26 is lowered and the second drive unit is driven. Along with the shaft 26, the needle portion 31 of the first diaphragm 7 descends. At this time, when the lower limit detection unit 52b provided on the second drive shaft 26 is detected by the lower limit position sensor 51b, the second drive shaft 26 stops at the lower limit position. If the lower limit position sensor 51b does not function, the second drive shaft 26 is further lowered, but the second drive shaft 26 is mechanically stopped when the stopper 53 collides with the bottom surface of the mounting base 4. . When the motor shaft portion 24 and the second drive shaft 26 are driven (reversed), the second drive shaft 26 is raised, and the needle portion 31 of the first diaphragm 7 is raised along with the second drive shaft 26. At this time, when the upper limit detector 52a provided on the second drive shaft 26 is detected by the upper limit position sensor 52a, the second drive shaft 26 stops at the upper limit position. If the upper limit position sensor 52a does not function, the second drive shaft 26 is further raised, but the second drive shaft 26 is mechanically stopped by the stopper 53 colliding with the ceiling surface of the mounting base 4. To do. Thus, by providing a plurality of restricting means for detecting the position of the second drive shaft 26 and restricting the movement of the second drive shaft 26, the second drive shaft 26 can move the main body 1 beyond the preset operating range. It is possible to reliably prevent movement in the direction or the direction of the electric drive unit 5. Since other operations of the second embodiment are the same as those of the first embodiment, the description thereof is omitted.

  Next, the fluid control apparatus using the flow rate adjusting valve of the first embodiment will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the location same as 1st embodiment.

  FIG. 4 is a diagram showing an example of a fluid control device using the flow rate adjusting valve 71 according to the present invention. In the figure, the fluid control device includes a flow rate adjustment valve 71 of the first embodiment, a flow meter 72 that measures the flow rate flowing through the flow rate adjustment valve 71, converts the measurement value into an electrical signal, and outputs the electrical signal. And a control unit 73 that feedback-controls the opening degree of the flow rate adjustment valve 71 based on the electrical signal from the control unit 73. In FIG. 4, the flow rate adjusting valve 71, the flow meter 72, and the control unit 73 are housed in one casing.

  Next, the operation of the fluid control apparatus using the flow rate adjusting valve 71 according to the present invention will be described with reference to FIG. As shown in FIG. 4, the fluid that has flowed into the fluid control device flows into the flow meter 72, and the fluid that has passed through the flow meter 72 flows into the flow rate adjustment valve 71. The flow meter 72 measures the flow rate of the fluid. The measured flow rate is converted into an electric signal and output to the calculation unit in the control unit 73. The flow rate calculated by the calculation unit is converted into an electric signal and output to the control unit in the control unit 73. The control unit in the control unit 73 calculates a deviation between an arbitrary set flow rate and the actual flow rate measured by the measuring device 72, and outputs a control signal corresponding to the deviation to the electric drive unit 5 of the flow rate adjustment valve 71. The opening degree of the flow rate adjusting valve 71 is controlled (feedback control). At this time, since the flow rate adjusting valve 71 includes the first valve chamber 12 that adjusts the flow rate and the second valve chamber 17 that adjusts the pressure, the influence of pressure fluctuation on the downstream side of the first valve chamber 12 is reduced. be able to. Further, by incorporating the flow rate adjusting valve 71 according to the present invention in the fluid control device, the fluid control device having the two functions of flow rate adjustment and pressure adjustment can be made compact.

  The material of the parts such as the main body 1, the upper bonnet 2, the lower bonnet 3, the mounting base 4, the shaft portion 6, and the second diaphragm retainer 9 of the flow control valve according to the present invention is PVC, PTFE, polypropylene, polyvinylidene fluoride. , Polyethylene, tetrafluoro-perfluoroalkyl vinyl ether copolymer resin, etc., metals or alloys such as SUS, iron, aluminum, glass, etc. Not. Further, the material of each part such as the first diaphragm 7, the second diaphragm 8, and the third diaphragm 54 of the flow regulating valve according to the present invention is PVC, PTFE, polypropylene, polyvinylidene fluoride, polyethylene, tetrafluoro perfluoro. There are no particular limitations as long as it has physical properties required for each component, such as resins such as alkyl vinyl ether copolymer resins, elastomers such as fluoro rubber, silicon rubber, nitrile rubber, and ethylene propylene diene rubber.

  In addition, you may comprise a flow regulating valve combining arbitrarily said 1st embodiment and 2nd embodiment, and you may comprise a fluid control apparatus using the flow regulating valve. That is, as long as the features and functions of the present invention can be realized, the present invention is not limited to the flow regulating valve and the fluid control device of the embodiment.

DESCRIPTION OF SYMBOLS 1 Main body 3 Lower bonnet 4 Mounting stand 5 Electric drive part 7 1st diaphragm 8 2nd diaphragm 12 1st valve chamber 15 Communication flow path 17 2nd valve chamber 26 2nd drive part 28 Guide 31 Needle part 51 Position sensor 52 Detection 53 Stopper 54 Third diaphragm 56 Annular space 71 Flow rate adjustment valve 72 Flow meter 73 Control unit

Claims (3)

  A first valve chamber formed on the upper surface; a second valve chamber formed on the lower surface and having a central axis parallel to the central axis of the first valve chamber; and a first valve chamber having a first opening and communicating with the first valve chamber. A first flow path, a communication flow path that communicates the first valve chamber and the second valve chamber, and a second flow path that has a second opening and communicates with the second valve chamber. A main body in which flow path axes of the opening, the first flow path, the communication flow path, the second flow path, and the second opening are arranged on the same plane, and a bonnet fixed to an upper portion of the main body, A driving means disposed in the internal space of the bonnet, and a valve body on the lower surface thereof are moved up and down by the driving means to change the opening area of the communication flow path and intersect the central axis of the second valve chamber. A first diaphragm that covers the lower side of the second valve chamber and intersects the central axis of the first valve chamber A flow rate regulating valve comprising: a diaphragm; a second diaphragm presser for clamping and fixing the second diaphragm to the main body; and a biasing means for biasing the second diaphragm toward the second valve chamber. .   The drive means connects the electric drive unit disposed in the internal space of the bonnet, the electric drive unit and the main body, and has a mounting base having a through-hole through which the drive shaft passes, and the electric And a drive shaft that is disposed between the electric drive unit and the main body and moves up and down by the operation of the electric drive unit. The first drive shaft is fixed to the shaft part of the electric drive unit. A shaft portion and a second drive shaft that is non-rotatable and vertically movable with respect to the first shaft portion, the second drive shaft having a flange portion and a shaft portion, The part includes a guide means for restricting the operation of the second drive shaft to be unrotatable, and a mechanical restriction means for restricting movement of the valve body outside a predetermined operation range by interfering with parts other than the flange part. And the movement of the valve body outside the predetermined operating range or before moving within the predetermined operating range. Sensor type limiting means for limiting by detecting the position of the buttocks in at least two places, each of the sensor type limiting means can independently adjust the mounting position and is parallel to the horizontal direction At least two sensors arranged, a gap is formed between the shaft portion and the through hole of the mounting base, and is sandwiched and fixed between the first diaphragm and the second drive shaft, A third diaphragm that encloses the tip of the drive shaft and squeezes into the main body, and separates the main body from the electric drive unit; and between the first diaphragm and the third diaphragm 2, wherein an annular space extending in the radial direction is formed with the upper surface of the first diaphragm as a bottom surface and the lower surface of the third diaphragm as a ceiling surface. The flow control valve.   A fluid control apparatus comprising: the flow rate adjustment valve according to claim 1; a flow meter; and a control unit that controls the flow rate adjustment valve in accordance with an output from the flow meter.

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