JP5989950B2 - On-off valve with detector - Google Patents

Description

  The present invention relates to an on-off valve with a detector having an on-off valve that opens and closes a flow path when a valve body abuts on or separates from a valve seat, and a detector that detects an open / close state. More particularly, the present invention relates to an on-off valve with a detector used in a production line using a corrosive or flammable fluid such as a semiconductor or a chemical product.

  2. Description of the Related Art Conventionally, an air operated valve for a chemical liquid that controls chemical liquids such as acid and alkali, and an on-off valve that opens and closes a flow path when a valve body contacts or separates from a valve seat, and an open / close state is detected. An on-off valve with a detector having a detector is used. For example, when the upper part of the indicator attached to the valve body of the on-off valve is exposed to the outside of the on-off valve when the valve is opened, and is stored in the on-off valve when the valve is closed, the exposed indicator is electrically It is detected by a sensor or the like. Such an on-off valve with a detector is also used in a semiconductor manufacturing process. See, for example, US Pat.

However, when a sensor such as an electric sensor is used, depending on the surrounding environment in which the on-off valve is installed in the semiconductor manufacturing factory, there is a concern about the explosion-proof property due to corrosion of the electrical component or current flow.
Therefore, as shown in FIG. 11, an on-off valve 100 with a detector that avoids the fear has been used. The valve body 101, the piston 102, and the spool valve 103 are connected, and the spool valve 103 is held so as to slide in the sleeve. Three O-rings 104, 105, and 106 are attached to the outer peripheral surface of the spool valve 103 as seal members. Depending on the position where the spool valve 103 has moved, the detection air supplied to the detection hole 109 flows through the flow paths 107 and 110 to the atmosphere. By detecting this air outflow, an open / closed state in which the valve body 101 contacts or separates from the valve seat 111 is detected.

JP 2001-153261 A

However, the invention described in FIG. 11 has the following problems.
That is, when the valve is closed, the air is sealed from the detection hole 109, and when the valve is opened, the air flows out from the detection hole 109. This switching of the air flow is realized by the movement of the three O-rings 104, 105, and 106. That is, when a long stroke is moved so that the two O-rings 105 and 106 are on the upper and lower sides of the detection hole 109 so that the two O-rings 104 and 105 are on the upper and lower sides of the detection hole 109, It can be detected that the valve is opened.
On the other hand, in recent semiconductor manufacturing processes, opening and closing in a low opening range, that is, a valve opening state in a short stroke range, can be detected as accurately as possible whether or not the on-off valve that controls the chemical solution is completely closed. However, there was a problem that it was not possible to cope with this.
Furthermore, in the method shown in FIG. 11, the O-rings 104, 105, and 106 slide on the detection hole 109, so that they are easily worn and have a problem of durability.

  The present invention has been made to solve the above-described problems, and can detect a valve opening state in a short stroke region accurately and with good responsiveness, and has a high durability, corrosion resistance, and explosion-proof detector. The object is to provide an on-off valve.

In order to achieve the above object, an on-off valve with a detector according to an aspect of the present invention has the following configuration.
(1) An on-off valve with a detector having an on-off valve that opens and closes a flow path when a valve body abuts on or separates from a valve seat, and a detector that detects the on-off state. Is provided with a sleeve in which a detector valve seat is formed, and a detector valve body that slides in the sleeve and abuts or separates in a direction perpendicular to the radial direction of the detector valve seat and the sleeve. And a fluid state detector that detects a fluid state that changes when the detector valve body part is separated from the detector valve seat, and the detector valve body part has a bowl shape. The elastic body is held on the lower surface side of the collar, and the collar shape includes a first collar part and a second collar part having a smaller diameter than the first collar part, and the elastic body includes the first collar part. It is characterized by being sandwiched between a collar part and the second collar part .
(2) An on- off valve with a detector having an on-off valve that opens and closes a flow path when a valve body comes into contact with or separates from a valve seat, and a detector that detects the on-off state. Is provided with a sleeve in which a detector valve seat is formed, and a detector valve body that slides in the sleeve and abuts or separates in a direction perpendicular to the radial direction of the detector valve seat and the sleeve. And a fluid state detector that detects a fluid state that changes when the detector valve body part is separated from the detector valve seat, and the detector valve body part has a bowl shape. Holding an elastic body on the lower surface side of the rod, and holding the elastic body between the lower surface of the rod and the detector valve seat when the on-off valve is closed. Features.
(3) The on-off valve with detector described in (1) or (2) is characterized in that an adjusting screw is held in the detector valve rod toward the valve body.
(4) In the on-off valve with detector described in (3), the adjusting screw can adjust a detection stroke for detecting movement of the valve body.

The on-off valve with detector according to the present invention has the following configuration and effects as follows.
(1) An on-off valve with a detector having an on-off valve that opens and closes a flow path when a valve body abuts on or separates from a valve seat, and a detector that detects the on-off state. (A) a sleeve in which a detector valve seat is formed; and (b) a detector valve that slides in the sleeve and abuts or separates in a direction perpendicular to the radial direction of the detector valve seat and the sleeve. A detector valve rod having a body part; and (c) a fluid state detector for detecting a fluid state that changes when the detector valve body part is separated from the detector valve seat. Therefore, since an electric sensor is not directly attached to the on-off valve, high corrosion resistance and explosion proof can be obtained, and if the detector valve body part is slightly separated from the detector valve seat, the detector valve body part is detected. The air flow required for detection by the fluid condition detector flows from the valve seat. Also in on-off valve of the low opening range, it is possible to detect the open state in accurate and responsive.

(2) In the on-off valve with detector described in (1), the detector valve body portion has a bowl shape, and holds an elastic body on the lower surface side of the bowl. Since the elastic body is slightly separated from the detector valve seat, air of a flow rate necessary for detection by the fluid state detector flows from the detector valve body and the detector valve seat. Also in the valve, the valve opening state can be detected accurately and with high responsiveness.

(3) In the on-off valve with detector described in (1) or (2), an adjustment screw is held in the detector valve rod toward the valve body side, and (4) ( In the on-off valve with a detector described in 3), the adjustment screw can adjust a detection stroke for detecting movement of the valve body. Therefore, when a large number of on-off valves are manufactured, component dimensions The detection stroke varies due to this variation, but by uniformly adjusting this variation with the adjusting screw, it is possible to set the detection stroke to be constant or aimed for all the on-off valves. Therefore, even if a part having a large tolerance is used, the quality can be stabilized because the adjustment screw can be used for adjustment.

It is sectional drawing of the valve closing state of the on-off valve with a detector which concerns on 1st Embodiment. It is sectional drawing of the on-off valve with a detector which concerns on 1st Embodiment in a valve opening state. It is an air circuit diagram of a fluid state detector and an on-off valve with a detector. It is sectional drawing of the on-off valve with a detector concerning 2nd Embodiment. It is the E section enlarged view of FIG. It is sectional drawing of the on-off valve with a detector concerning 3rd Embodiment. It is sectional drawing of the on-off valve with a detector concerning 4th Embodiment. It is sectional drawing of the on-off valve with a detector concerning a reference example. It is a figure which shows the effect | action of the on-off valve with a detector of this invention. It is a figure which shows the effect | action of the conventional on-off valve with a detector. It is sectional drawing of the conventional on-off valve with a detector.

An embodiment of the present invention will be described in detail below with reference to the drawings.
<First Embodiment>
(Configuration of on-off valve with detector)
FIG. 1 is a cross-sectional view of the detector on-off valve 1 according to the first embodiment, in which a detector 5 and an on-off valve 8 are integrally formed.
First, the detector 5 will be described. The detector 5 has a hollow detector body 14 having an opening on the upper surface. A detection air port 18 is formed on one surface of the detector body 14. A hollow cylindrical sleeve 14 b is formed on the inner peripheral surface of the detector body 14. A detector valve seat 14a is formed on the end surface of the sleeve 14b. Further, a detector valve rod 16 that slides in the sleeve 14b is held in the sleeve 14b. On the upper part of the detector valve rod 16, a hook-shaped rubber ring holding portion 16a is formed. A rubber ring 17a that is in contact with or separated from the detector valve seat 14a is held on the lower surface of the rubber ring holding portion 16a. The rubber ring 17a corresponds to the elastic body of the present invention. Moreover, the material of the rubber ring 17a of this embodiment is fluororubber (FKM). Here, the detector valve body 20a is constituted by the rubber ring 17a and the rubber ring holding portion 16a. Further, a concave portion is formed in the lower part of the detector valve rod 16, and an O-ring 23 having a sealing property is installed to prevent air from leaking.

  A cover 28 that covers the opening of the detector body 14 is attached to the upper surface of the detector body 14. The cover 28 is formed with an exhaust hole 28a for exhausting air. A detector chamber 33 is formed by the cover 28 and the detector valve rod 16, and a spring 22 as a compression spring is accommodated. One end of the spring 22 is in contact with the lower surface of the cover 28, and the other end of the spring 22 is in contact with the upper surface of the detector valve rod 16. The spring 22 urges the detector valve rod 16 downward. Here, when the detector valve body 20a is separated from the detector valve seat 14a, the detector chamber 33 communicates with the detection air port 18 via the detection flow path 18a provided in the sleeve 14b. As shown in FIG. 3, a fluid state detector 34 that detects a fluid state is connected to the detection air port 18. The fluid state detector 34 is connected to a detection air supply source 35.

Next, the configuration of the on-off valve 8 will be described. As shown in FIG. 1, the on-off valve 8 is configured integrally with an air drive unit 6 and a valve body 7.
The air driving unit 6 includes a cylinder 13 having an operation air port 19 formed on one surface. A hollow cylindrical cylinder hole 13a is formed in the upper part of the inner peripheral surface of the cylinder 13, and a guide hole 13b is formed in the lower part of the inner peripheral surface. A piston 27 that slides relative to the cylinder hole 13a is held in the cylinder hole 13a, and a piston shaft 27c that slides relative to the guide hole 13b is guided in the guide hole 13b. On the upper surface of the piston 27, a convex portion 27 b is formed that contacts or separates from the lower surface of the detector valve rod 16. Further, the piston 27 is formed with a bowl-shaped O-ring holding portion 27a. The O-ring holding portion 27a is formed in a concave shape and holds an O-ring 24 having a sealing property in order to prevent air from leaking. A recess is formed in the piston shaft 27c below the piston 27, and an O-ring 29 having a sealing property is held in the recess in order to prevent air from leaking. Further, a connecting portion 27d that is connected to the valve body 11 is formed below the piston shaft 27c.
A spring 21, which is a compression spring, is accommodated between the piston 27 and the detector body 14. One end of the spring 21 is in contact with the upper surface of the piston 27, and the other end of the spring 21 is in contact with the lower surface of the detector body 14. The spring 21 urges the piston 27 downward. A piston chamber 15 is formed by the lower surface side of the piston 27 and the cylinder 13. The piston chamber 15 communicates with the operation air port 19. As shown in FIG. 3, the operation air port 19 is connected to an operation air supply source 37 via an on-off valve 36.

  The valve body 7 has a body 12 in which a flow path is formed. A first port 26 is formed on one surface of the body 12. On the surface facing the first port 26, the second port 25 is formed in a step difference from the first port 26. A flow path connecting the first port 26 and the second port 25 is formed in the body 12, and a valve chamber 32 provided with the valve body 11 is formed therebetween. The body 12 is formed with a valve seat 12 a that contacts or separates from the valve body 11. When the valve body 11 comes into contact with the valve seat 12a, the first port 26 and the second port 25 are shut off, and when the valve body 11 is separated from the valve seat 12a, the first port 26 and the second port 25 communicate with each other. A concave portion is provided on the upper surface of the valve body 11, and a connecting portion 27d of the piston 27 is screwed therein. As a result, the valve body 11 and the piston 27 slide together in the on-off valve 8. The valve body 11 includes a fixed portion 11a fixed between the cylinder 13 and the body 12, and a diaphragm 11b.

(Operation / effect of on-off valve with detector)
Next, the operation and effect of the on-off valve 1 with detector will be described in detail. The detection action of the detector 5 will be described in detail. FIG. 1 shows the closed state of the on-off valve 1 with detector, and FIG. 2 shows the opened state. FIG. 3 is an air circuit diagram of the fluid state detector and the on-off valve with detector.
First, a closed state in which the valve body 11 is in contact with the valve seat 12a will be described with reference to FIG. When the valve is closed, the supply of operating air is stopped and the operating air does not flow into the piston chamber 15. Therefore, the piston 27 is pushed down by the biasing force of the spring 21. Further, the valve body 11 integrated with the piston 27 is in contact with the valve seat 12a and is in a closed state.
Here, when the on-off valve 8 is in a closed state, the detector valve rod 16 in the detector 5 has a large downward biasing force due to the upward force generated by the detected air pressure. It is pushed down by power. At this time, the rubber ring 17a of the detector valve body 20a is in contact with the detector valve seat 14a. For this reason, the detection air does not flow into the detector chamber 33. Therefore, since the fluid state detector 34 cannot detect the detected air, it is detected that the on-off valve 8 is closed.

Next, the valve opening state in which the valve body 11 is separated from the valve seat 12a will be described with reference to FIG. At this time, the operation air is supplied from the operation air supply source 37 via the on-off valve 36 and further flows into the piston chamber 15 via the operation air port 19. Thereby, since the force generated by the pressure of the operating air is larger than the biasing force of the spring 21, the spring 21 contracts and the piston 27 is pushed up. Along with this, the valve body 11 integrated with the piston 27 is also pushed up, and the valve body 11 is separated from the valve seat 12a and is opened.
Here, when the on-off valve 8 is in the open state, the piston 27 is pushed up, so that the convex portion 27 b of the piston 27 contacts the lower surface of the detector valve rod 16. At this time, since the force generated by the pressure of the operating air is larger than the urging force of the spring 22, the spring 22 contracts and the detector valve rod 16 is pushed up. Along with this, the rubber ring 17a of the detector valve body 20a is separated from the detector valve seat 14a. When the O-ring holding portion 27a of the piston 27 comes into contact with the lower surface of the detector body 14, it is not pushed up further.
Here, the detection air flows into the detector chamber 33 through the detection air port 18 and is discharged from the exhaust hole 28a. At this time, the fluid state detector 34 detects the flow of air, and it can be seen that the detected air is supplied. Thereby, the open state of the on-off valve 8 is detected.

Next, the operation of the opening / closing valve with detector 1 of the present invention and the conventional opening / closing valve with detector 100 will be described with reference to FIGS. 9 and 10. FIG. 9 is a diagram for explaining the operation of the on-off valve 1 with detector of the present invention, and FIG. 10 is a diagram for explaining the operation of the conventional on-off valve 100 with detector. 9 and FIG. 10A show the length of the stroke of the valve body, and are common to each other. B1 shows the air flow rate of the detected air in the on-off valve with detector 1 of the present invention, and B2 shows the air flow rate of detected air in the conventional on-off valve with detector 100. C indicates the threshold value of the fluid state detector 34.
In the conventional on-off valve 100 with a detector, as shown in FIG. 11, switching of the air flow is realized by movement of three O-rings 104, 105, and 106. Therefore, if the O-ring does not move to an appropriate position, the air flow is not switched, and as shown in FIG. 10, when the detection air B2 reaches the threshold value C of the fluid state detector and detects the valve opening state, The stroke length indicated by the stroke ST2 and the time indicated by the time T2 were required. Specifically, the stroke ST2 necessary for the valve body 101 to move away from the valve seat 111 is about 40% of the entire stroke ST0. Therefore, the open state of the on-off valve with detector 100 could not be detected until it was reached.
Here, in recent semiconductor manufacturing processes, the open / close state in the low opening range, that is, the open state in the short stroke range, is detected so that it can be detected as accurately as possible whether the open / close valve that controls the chemical solution is completely closed. There is a need for an on-off valve that can be detected. However, in the conventional on-off valve 100 with a detector, the stroke of the valve body 101 is long and time-consuming, so that it cannot be used for such use, causing a problem.

On the other hand, according to the on-off valve 1 with the detector of the present invention, the structure shown in FIG. 1 allows the detection air to be generated only when the detector valve body 20a is slightly separated from the detector valve seat 14a. It flows into the detector chamber 33 and reaches the threshold value C of the fluid state detector 34. Therefore, as shown in FIG. 9, the detected air B1 reaches the threshold value C of the fluid state detector and can detect the valve opening state only in the stroke length indicated by the stroke ST1 and the time indicated by the time T1. At this time, the stroke ST1 in which the valve body 11 is separated from the valve seat 12a can detect the valve opening state at about 20% of the entire stroke ST0. Therefore, it is possible to detect the valve opening state in the stroke ST1 which is half or less than the stroke ST2 of the conventional on-off valve with detector 100 and in a short time T1.
According to the on-off valve with detector 1 of the present invention, the piston 27 rises due to the pressure of the operating air and comes into contact with the detector valve rod 16, and at the same time, the detector valve body 20a slightly moves from the detector valve seat 14a. If separated, detection air having a flow rate necessary for detection by the fluid state detector 34 flows. Therefore, it is possible to provide an on-off valve that can detect the valve opening state accurately and with high responsiveness in the low opening range.

As described above, according to the on-off valve 1 with a detector of the present invention,
(1) An on-off valve 1 with a detector having an on-off valve 8 that opens and closes a flow path and a detector 5 that detects an on-off state when the valve body 11 contacts or separates from the valve seat 12a. The detector 5 includes (a) a sleeve 14b in which the detector valve seat 14a is formed, and (b) sliding in the sleeve 14b, and perpendicular to the radial direction of the detector valve seat 14a and the sleeve 14b. A detector valve rod 16 having a detector valve body 20a that contacts or separates from the sensor valve, and (c) a fluid state that detects a fluid state that changes when the detector valve body 20a is separated from the detector valve seat 14a. Since the electric sensor is not directly attached to the on-off valve, high explosion-proof property can be obtained, and the detector valve body 20a is slightly separated from the detector valve seat 14a. Detector valve body 20a and detector valve seat 1 Since flows flow air required to detect in a fluid state detector 34 from a, even in on-off valve of the low opening range, it is possible to detect the open state accurately and high responsiveness and durability.

(2) In the on-off valve with detector 1 described in (1), the detector valve rod 16 has a bowl shape, and is characterized by holding a rubber ring 17a on the lower surface side of the bowl. Since the rubber ring 17a is slightly separated from the detector valve seat 14a, air of a flow rate necessary for detection by the fluid state detector 34 flows from the detector valve body portion 20a and the detector valve seat 14a. Even in the opening / closing valve in the opening range, the valve opening state can be detected accurately and with high responsiveness.

Second Embodiment
The on-off valve with detector 2 according to the second embodiment has the same main configuration as the on-off valve with detector 1. Therefore, only different configurations will be described. In addition, description is omitted by describing the same structure with the same number. In FIG. 4, sectional drawing of the on-off valve 2 with a detector is shown. FIG. 5 shows an enlarged view of part E in FIG.
The difference between the on-off valve 2 with detector and the on-off valve 1 with detector is the shapes of the detector valve seat 14c and the detector valve body 20b. A tapered detector valve seat 14c provided on the end surface of the sleeve 14b is formed, and an upper portion of the detector valve rod 16 is formed with a bowl-shaped O-ring holding portion 16b in which a recess is formed. An O-ring 17b is held in the recess of the O-ring holding portion 16b. Here, the O-ring 17b and the O-ring holding portion 16b constitute a detector valve body portion 20b. Thereby, since the structure of the detector valve seat 14c and the detector valve body part 20b is simple, it is excellent in workability and assemblability, and stable quality can also be obtained.

As described above, according to the on-off valve with detector 2 of the present invention,
(1) An on-off valve 1 with a detector having an on-off valve 8 that opens and closes a flow path and a detector 5 that detects an on-off state when the valve body 11 contacts or separates from the valve seat 12a. The detector 5 includes (a) a sleeve 14b on which a detector valve seat 14c is formed, and (b) sliding in the sleeve 14b, and is perpendicular to the radial direction of the detector valve seat 14c and the sleeve 14b. A detector valve rod 16 having a detector valve body 20b that contacts or separates from the sensor valve, and (c) a fluid state for detecting a fluid state that changes when the detector valve body 20b is separated from the detector valve seat 14c. Since the electric sensor is not directly attached to the on-off valve, high explosion-proof property can be obtained, and the detector valve body 20b is slightly separated from the detector valve seat 14c. Detector valve body 20b and detector valve seat 1 Since flows flow air required to detect in a fluid state detector 34 from c, even in on-off valve of the low opening range, it is possible to detect the open state accurately and high responsiveness and durability.

(2) In the on-off valve with detector 1 described in (1), the detector valve rod 16 has a bowl shape, and holds an O-ring 17b on the lower surface side of the bowl. Since the O-ring 17b is slightly separated from the detector valve seat 14c, air of a flow rate necessary for detection by the fluid state detector 34 flows from the detector valve body portion 20b and the detector valve seat 14c. Even in the opening / closing valve in the opening range, the valve opening state can be detected accurately and with high responsiveness.

<Third Embodiment>
The on-off valve with detector 3 according to the third embodiment has the same main configuration as the on-off valve with detector 1. Therefore, only different configurations will be described. In addition, the thing which is the same structure is abbreviate | omitting description by describing with the same number. In addition, since the operation of the main configuration is the same, the description is omitted. In FIG. 6, sectional drawing of the on-off valve 3 with a detector is shown.
The difference between the on-off valve 3 with the detector and the on-off valve 1 with the detector is that an adjustment screw 30 is provided on the detector valve rod 16, and the gap between the detector valve rod 16 and the piston 27 is in contact. The distance can be adjusted. The adjusting screw 30 is screwed into the detector valve rod 16 toward the valve body 11 and is locked by a lock nut 30a. When the on-off valve 2 with detector is assembled, the adjusting screw 30 can be screwed deeply into the detector valve rod 16 at an arbitrary position or can be screwed shallowly.

  As described above, according to the on-off valve with detector 3 of the present invention, the adjusting screw 30 is held in the detector valve rod 16 toward the valve body 11 side, The adjustment screw 30 is characterized in that the detection stroke for detecting the movement of the valve body 11 can be adjusted. Therefore, when a large number of on-off valves are manufactured, the detection stroke varies due to variations in component dimensions. By uniformly adjusting with the screw 30, it is possible to set a constant or aimed detection stroke for all the on-off valves. Therefore, even if components with large tolerances are used, the quality can be stabilized because the adjustment screw 30 can be used for adjustment.

<Fourth embodiment>
The on-off valve with detector 4 according to the fourth embodiment has the same main configuration as the on-off valve with detector 3. Therefore, only different configurations will be described. In addition, the thing which is the same structure is abbreviate | omitting description by describing with the same number. In addition, since the operation of the main configuration is the same, the description is omitted. In FIG. 7, sectional drawing of the on-off valve 4 with a detector is shown.
The difference between the on-off valve 4 with the detector and the on-off valve 3 with the detector is that the detection flow path 18b is provided on the end face of the sleeve 14b, and the end face 17c of the rubber ring 17a is in contact with the opening of the detection flow path 18b. It is a point that touches or separates. As a result, when the detector valve body 20a is separated from the detector valve seat 14a, in the open / close valve 3 with detector, the detection air first flows into the outer periphery of the detector valve rod 16, whereas the open / close with detector In the valve 4, the end surface 17c of the rubber ring separates the detector valve seat 14a and the detection air flows. Therefore, the on-off valve 4 with a detector has high stability and can detect the valve opening state with higher responsiveness. In addition, although the adjusting screw 30 is hold | maintained in the detector valve rod 16 among the on-off valves 4 with a detector of this embodiment, the detector valve rod 16 of the on-off valve with a detector 1 of 1st Embodiment. Thus, the adjustment screw 30 may not be held.

<Reference example>
The adjusting screw 30 can also be applied when the sensor 31 is directly attached to the main body of the on-off valve 8. FIG. 8 is a cross-sectional view of the detector on / off valve 9 according to the reference example. Compared with the on-off valve 1 with detector, the difference is that the detector 5 is not provided on the on-off valve 8 and that the adjustment screw 30 is held on the piston 27.
In the on-off valve 9 with detector, a sensor 31 is directly attached to the upper surface of the air driving unit 6 instead of the detector 5. A cover 39 is attached instead of the detector body 14. When the on-off valve 9 with detector is assembled, the adjusting screw 30 can be screwed deeply into the piston 27 at an arbitrary position or can be screwed shallowly.
According to the on-off valve 4 with the detector, when the on-off valve 8 is closed, the adjustment screw 30 is in a position where it cannot be detected by the sensor 31, and thus it is not detected and the valve is closed. On the other hand, when the on-off valve 8 is opened, the upper part of the adjustment screw 30 is exposed to the outside of the on-off valve 8 by being pushed up by the piston 27. Therefore, the adjustment screw 30 is detected by the sensor 31, and the open state of the on-off valve 8 can be detected. The detection stroke for detecting the movement of the valve body 11 can be adjusted by screwing the adjusting screw 30 into the piston 27 deeply or shallowly.
As a result, when a large number of on-off valves are manufactured, the detection stroke varies due to variations in component dimensions. By adjusting this variation evenly with the adjusting screw 30, the detection stroke can be constant or aimed for all the on-off valves. Can be set to Therefore, even if components with large tolerances are used, the quality can be stabilized because the adjustment screw 30 can be used for adjustment.

In addition, this embodiment is only a mere illustration and does not limit this invention at all. Accordingly, the present invention can naturally be improved and modified in various ways without departing from the gist thereof.
For example, although the fluid state detector 34 is used in the present embodiment, a sensor that turns on when a constant flow rate may flow may be used even if the flow rate cannot be measured.
For example, although the fluid state detector 34 is used in the present embodiment, a pressure gauge may be used instead of the fluid state detector to detect a pressure drop when a constant flow rate flows.
For example, in this embodiment, the rubber ring 17a is attached to the detector valve body 20a and the detector valve seat 14a is formed on the detector body 14 side, but the rubber ring 17a is attached to the detector body 14, A detector valve seat may be formed on the detector valve body 20a side.
For example, in the present embodiment, detection in the case where the valve closing state is changed to the valve opening state has been described, but it can also be used to detect whether the valve closing state has been switched to the valve opening state.

1, 2, 3, 4 Open / close valve with detector 5 Detector 6 Air drive unit 7 Valve body 8 Open / close valve 11 Valve body 12a Valve seat 14 Detector body 14a Detector valve seat 14b Sleeve 16 Detector valve rod 16a Rubber ring Holding part 17a Rubber ring 20a Detector valve body part 30 Adjustment screw 34 Fluid state detector

Claims (4)

In an on-off valve with a detector having an on-off valve that opens and closes a flow path when the valve body abuts on or separates from a valve seat, and a detector that detects the open / close state,
The detector is
A sleeve formed with a detector valve seat;
A detector valve rod comprising a detector valve body that slides in the sleeve and abuts or separates from the detector valve seat in a direction perpendicular to the radial direction of the sleeve;
A fluid state detector that detects a fluid state that changes when the detector valve body is separated from the detector valve seat;
The detector valve body portion has a bowl shape, and holds an elastic body on the lower surface side of the bowl;
The collar shape includes a first collar part and a second collar part having a smaller diameter than the first collar part, and the elastic body is sandwiched between the first collar part and the second collar part,
An on-off valve with detector. In an on-off valve with a detector having an on-off valve that opens and closes a flow path when the valve body abuts on or separates from a valve seat, and a detector that detects the open / close state,
The detector is
A sleeve formed with a detector valve seat;
A detector valve rod comprising a detector valve body that slides in the sleeve and abuts or separates from the detector valve seat in a direction perpendicular to the radial direction of the sleeve;
A fluid state detector that detects a fluid state that changes when the detector valve body is separated from the detector valve seat;
The detector valve body portion has a bowl shape, and holds an elastic body on the lower surface side of the bowl;
When the on-off valve is closed, the elastic body is sandwiched between the lower surface of the flange and the detector valve seat;
An on-off valve with detector. In the on-off valve with a detector according to claim 1 or claim 2,
In the detector valve rod, holding an adjusting screw toward the valve body side,
An on-off valve with detector. In the on-off valve with detector according to claim 3,
The adjusting screw can adjust a detection stroke for detecting movement of the valve body;
An on-off valve with detector.

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