TWI732178B - Chemical liquid control valve and substrate processing device - Google Patents

Abstract

The present invention provides a chemical liquid control valve and a substrate processing device capable of improving the replacement characteristics of the chemical liquid. The flow path valve block 21 has a first outer wall 21a and a second outer wall 21b that is a surface at a right angle to the first outer wall 21a. The valve chamber 27 for adjusting the flow rate in which the needle 41 is arranged is formed such that the first outer wall 21a of the flow path valve block 21 is recessed. On the other hand, the opening and closing valve chamber 29 in which the diaphragm 51 is arranged is formed so that the second outer wall 21b is recessed. The intermediate flow path 31 connects the flow rate adjustment valve chamber 27 and the opening/closing valve chamber 29, and the intermediate flow path 31 extends at a right angle with respect to any one of the first outer wall 21a and the second outer wall 21b. With this configuration, the intermediate flow path 31 can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like.

Description

Chemical liquid control valve and substrate processing device

The present invention relates to a chemical liquid control valve and a substrate processing device provided with the chemical liquid control valve. The chemical liquid control valve is used to control a FPD (Flat Panel Display) such as a semiconductor substrate, a liquid crystal display device, or an organic EL (electroluminescence) display device. , Flat panel display) substrates, glass substrates for photomasks, substrates for optical disks, substrates for magnetic disks, ceramic substrates, substrates for solar cells, and other substrates supplied with chemical solutions.

As shown in Fig. 7, the conventional chemical liquid control valve 201 includes a flow rate adjustment valve 202 and an on-off valve (ON/OFF valve) 203 (for example, refer to Patent Documents 1 and 2). The flow rate adjustment valve 202 adjusts the flow rate of the supplied liquid medicine. On the other hand, the on-off valve 203 supplies the liquid medicine and stops the supply of the liquid medicine. The flow control valve 202 and the on-off valve 203 are connected by a V-shaped flow path 205 or an arc-shaped flow path described in Patent Document 2 (hereinafter referred to as "V-shaped flow path 205, etc."). Therefore, the chemical liquid sent from the flow rate adjusting valve 202 is sent to the opening and closing valve 203 through the V-shaped flow path 205 and the like. [Background Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Publication No. 2001-263507 [Patent Document 2] Japanese Patent Laid-Open No. 2017-207121

[The problem to be solved by the invention]

The conventional liquid medicine control valve 201 has the following problems. As described above, the liquid medicine delivered from the flow rate adjusting valve 202 is delivered to the opening and closing valve 203 through the V-shaped flow path 205 and the like. If the liquid medicine passes through the V-shaped flow path 205 or the like, there is a concern that the replacement characteristics of the liquid medicine from the inlet to the outlet of the liquid medicine control valve 201 will deteriorate. If the replacement characteristics of the liquid medicine are poor, there is a concern that dirt will be generated in the liquid due to the retention of the previous liquid medicine. Therefore, it is preferable to improve the replacement characteristics of the liquid medicine in the liquid medicine control valve 201.

The present invention was completed in view of this situation, and its object is to provide a chemical liquid control valve capable of improving the replacement characteristics of the chemical liquid and a substrate processing apparatus having the same. [Technical means to solve the problem]

In order to achieve such an object, the present invention adopts the following configuration. That is, the chemical liquid control valve of the present invention is characterized by comprising: a single flow path valve block having a first outer wall and a second outer wall that is a surface at right angles to the first outer wall; The first outer wall is recessed; the valve chamber for opening and closing is formed by recessing the second outer wall; the intermediate flow path is formed inside the flow path valve block and is linear, and the flow rate adjustment The valve chamber is connected to the valve chamber for opening and closing, and extends at right angles to any one of the first outer wall and the second outer wall; the first flow path is formed inside the flow path valve block to adjust the flow rate Connected by a valve chamber; a second flow path formed inside the flow path valve block and connected to the opening and closing valve chamber; a needle moving mechanism having a needle arranged in the flow rate adjustment valve chamber to block the flow Adjusting the valve chamber and moving the needle in order to adjust the flow rate of the liquid medicine; and an opening and closing valve body moving mechanism having an opening and closing valve body arranged in the opening and closing valve chamber to block the opening and closing valve chamber, and The valve body for opening and closing is moved in order to supply and stop the supply of the liquid medicine.

According to the chemical liquid control valve of the present invention, the flow path valve block has a first outer wall and a second outer wall that is a plane at right angles to the first outer wall. The valve chamber for adjusting the flow rate of the needle is formed in such a way that the first outer wall of the flow path valve block is recessed. On the other hand, the opening and closing valve chamber in which the opening and closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the valve chamber for flow rate adjustment and the valve chamber for opening and closing, and the intermediate flow path extends at a right angle with respect to either the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like.

In addition, the liquid medicine control valve of the present invention is characterized by comprising: a single flow path valve block having a first outer wall and a second outer wall as a surface facing the first outer wall and parallel to the first outer wall; flow rate The valve chamber for adjustment is formed with the first outer wall recessed; the valve chamber for opening and closing is formed with the second outer wall recessed; the intermediate flow path is formed inside the flow path valve block and is linear , And connect the flow rate adjustment valve chamber and the opening and closing valve chamber to extend at right angles to the first outer wall and the second outer wall; the first flow path is formed inside the flow path valve block, Connected to the valve chamber for the flow rate adjustment; a second flow path formed inside the flow path valve block and connected to the valve chamber for opening and closing; a needle moving mechanism having a needle arranged in the valve chamber for the flow rate adjustment, The valve chamber for adjusting the flow rate is blocked, and the needle is moved to adjust the flow rate of the liquid medicine; and a valve body moving mechanism for opening and closing, which has an opening and closing valve body arranged in the valve chamber for opening and closing, and blocking the opening and closing In the valve chamber, the valve body for opening and closing is moved for the purpose of supplying and stopping the supply of the liquid medicine.

According to the medicinal solution control valve of the present invention, the flow path valve block has a first outer wall and a second outer wall as a surface facing the first outer wall and parallel to the first outer wall. The valve chamber for adjusting the flow rate of the needle is formed in such a way that the first outer wall of the flow path valve block is recessed. On the other hand, the opening and closing valve chamber in which the opening and closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the valve chamber for flow rate adjustment and the valve chamber for opening and closing, and the intermediate flow path extends at a right angle with respect to the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like.

In addition, in the chemical liquid control valve, it is preferable that the first flow path and the second flow path are linear and extend at right angles to the intermediate flow path. When the material is poured into the mold to form the flow path valve block, the first pin member inserted into the mold to form the intermediate flow path and the first pin member to form the first flow path and the second flow path can be inserted into the mold. The second pin part and the third pin part are arranged at right angles. Therefore, compared with the case where the first pin member, the second pin member, and the third pin member are arranged obliquely (not at a right angle), the intermediate flow path, the first flow path, and the second flow path can be easily formed.

Furthermore, in the chemical liquid control valve, it is preferable that the first flow path is parallel to the second flow path, and the portion of the first flow path that connects to the flow rate adjustment valve chamber is a first connection port on the opposite side It opens in the same direction as the second connection port on the opposite side of the part connecting the opening and closing valve chamber in the second flow path. When the material is poured into the mold to form the flow path valve block, the second pin member and the third pin member inserted into the mold to form the first flow path and the second flow path can be moved in the same direction. Therefore, compared with the case where the orientation of the second pin member inserted into the mold is different from the orientation of the third pin member, the first flow path and the second flow path can be easily formed.

In addition, in the chemical liquid control valve, it is preferable that the flow path valve block is formed of PFA (perfluoroalkoxyalkane, perfluoroalkoxyalkane). If the flow path valve block is formed of PFA, the surface of the flow path valve block will be covered with a surface layer (film) that is harder than the inside. If the liquid medicine penetrates into the inside of the flow path valve block, as a result, there is a concern that dirt will be drawn from the inside of the flow path valve block. However, because the surface layer prevents the penetration of the liquid medicine, it can suppress the fear of deterioration of the purity of the liquid medicine.

Furthermore, the substrate processing apparatus of the present invention is characterized by comprising: a holding and rotating part that holds a substrate and rotates the held substrate; a nozzle that ejects a chemical solution to the substrate held by the holding and rotating part; and a chemical solution piping, which Connected to the nozzle; and a liquid chemical control valve, which adjusts the flow rate of the liquid chemical sprayed from the nozzle and causes the liquid chemical to be sprayed from the nozzle to stop the spray of the chemical liquid; the liquid chemical control valve includes: a single flow path valve Block, which has a first outer wall and a second outer wall that is a surface at right angles to the first outer wall; a valve chamber for flow adjustment formed in such a way that the first outer wall is recessed; and a valve chamber for opening and closing is the same as the second The outer wall is recessed; the intermediate flow path is formed inside the flow path valve block, is linear, and connects the flow rate adjustment valve chamber and the opening and closing valve chamber relative to the first outer wall and Any one of the second outer walls extends at a right angle; the first flow path is formed inside the flow path valve block and is connected to the flow rate adjustment valve chamber; the second flow path is formed in the flow path valve block Inside, and connected to the valve chamber for opening and closing, and connected to the nozzle via the drug solution pipe; a needle moving mechanism having a needle arranged in the valve chamber for flow rate adjustment to block the valve chamber for flow rate adjustment, and Adjusting the flow rate of the liquid medicine to move the needle; and an opening and closing valve body moving mechanism having an opening and closing valve body arranged in the opening and closing valve chamber, blocking the opening and closing valve chamber, and for supplying the liquid medicine and The stop of the supply moves the valve body for opening and closing.

According to the substrate processing apparatus of the present invention, a chemical liquid control valve is provided. In the chemical liquid control valve, the flow path valve block has a first outer wall and a second outer wall that is a plane at right angles to the first outer wall. The valve chamber for adjusting the flow rate of the needle is formed in such a way that the first outer wall of the flow path valve block is recessed. On the other hand, the opening and closing valve chamber in which the opening and closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the valve chamber for flow rate adjustment and the valve chamber for opening and closing, and the intermediate flow path extends at a right angle with respect to either the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like.

Furthermore, the substrate processing apparatus of the present invention is characterized by comprising: a holding and rotating part that holds a substrate and rotates the held substrate; a nozzle that ejects a chemical solution to the substrate held by the holding and rotating part; and a chemical solution piping, which Connected to the nozzle; and a liquid chemical control valve, which adjusts the flow rate of the liquid chemical sprayed from the nozzle and causes the liquid chemical to be sprayed from the nozzle to stop the spray of the chemical liquid; the liquid chemical control valve includes: a single flow path valve A block having a first outer wall and a second outer wall as a surface facing the first outer wall and parallel to the first outer wall; a valve chamber for flow adjustment, which is formed in such a way that the first outer wall is recessed; and a valve for opening and closing A chamber formed in such a manner that the second outer wall is recessed; an intermediate flow path is formed inside the flow path valve block, is linear, and connects the flow rate adjustment valve chamber and the opening and closing valve chamber, Extends at right angles to the first outer wall and the second outer wall; the first flow path is formed inside the flow path valve block and is connected to the flow rate adjustment valve chamber; the second flow path is formed in the flow The inside of the valve block is connected to the valve chamber for opening and closing, and is connected to the nozzle via the chemical liquid pipe; a needle moving mechanism having a needle arranged in the valve chamber for flow adjustment to block the valve for flow adjustment And move the needle in order to adjust the flow rate of the liquid medicine; and an opening and closing valve body moving mechanism, which has an opening and closing valve body arranged in the opening and closing valve chamber, blocking the opening and closing valve chamber, and in order to perform the medicine The supply of the liquid and the stop of the supply move the valve body for opening and closing.

According to the substrate processing apparatus of the present invention, a chemical liquid control valve is provided. In the chemical liquid control valve, the flow path valve block has a first outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall. The valve chamber for adjusting the flow rate of the needle is formed in such a way that the first outer wall of the flow path valve block is recessed. On the other hand, the opening and closing valve chamber in which the opening and closing valve body is arranged is formed so that the second outer wall is recessed. The intermediate flow path connects the valve chamber for flow rate adjustment and the valve chamber for opening and closing, and the intermediate flow path extends at a right angle with respect to the first outer wall and the second outer wall. With this configuration, the intermediate flow path can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like.

Furthermore, this specification also discloses the invention of the following method of manufacturing the liquid medicine control valve.

The method for manufacturing a liquid medicine control valve of the present invention is characterized by including the steps of preparing a pair of molds, the pair of molds having a first inner wall in the inner space and a second inner wall that is a surface at right angles to the first inner wall. The wall has: a first protrusion that is provided on the first inner wall to form a valve chamber for flow rate adjustment; a second protrusion that is provided on the second inner wall to form a valve chamber for opening and closing; and a straight line A first pin member in a shape that connects the first protrusion with the second protrusion, and is inserted in a direction extending at right angles to any one of the first inner wall and the second inner wall; 1. Insert the linear second pin member into the internal space by connecting the protruding portion; insert the linear third pin member into the internal space so as to connect with the second protruding portion; then insert the second pin After the components and the third pin component are inserted into the internal space, the heated and melted resin flows into the internal space; and after the resin flowing into the internal space is cooled and solidified, it will become a single flow path valve block The resin is removed from a pair of molds.

According to the method of manufacturing a chemical liquid control valve of the present invention, a pair of molds has a first inner wall and a second inner wall that is a plane at right angles to the first inner wall in the inner space. A pair of molds have: a first protrusion provided on the first inner wall to form a valve chamber for flow adjustment; a second protrusion provided on the second inner wall to form a valve chamber for opening and closing; and a linear first A pin member that connects the first protrusion to the second protrusion, and is inserted in a direction extending at right angles to any one of the first inner wall and the second inner wall. By forming the flow path valve block with such a structure, the intermediate flow path can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like. Furthermore, in the conventional chemical liquid control valve, the V-shaped flow path is formed by cutting from the two directions of the valve chamber for flow rate adjustment and the valve chamber for opening and closing after formation. According to the present invention, the linear intermediate flow path 31 can be formed without cutting. [Effects of Invention]

According to the chemical liquid control valve and the substrate processing apparatus provided with the chemical liquid control valve of the present invention, the replacement characteristics of the chemical liquid can be improved.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a schematic configuration diagram of the substrate processing apparatus of the embodiment. Fig. 2 is a schematic configuration diagram of the liquid medicine control valve of the embodiment.

<Configuration of Substrate Processing Device 1> Refer to Figure 1. The substrate processing apparatus 1 includes a nozzle 2 and a holding and rotating part 3. The nozzle 2 ejects the chemical liquid to the substrate W held by the holding and rotating part 3. The chemical solution is, for example, a resist solution, a coating solution for forming an anti-reflection film, a solvent such as a diluent, a rinse solution such as pure water (DIW), a developer solution, or an etching solution.

The holding and rotating part 3 holds the substrate W and rotates the held substrate W. The holding and rotating part 3 includes a rotating chuck 4 and a rotating drive part 5. The rotating chuck 4 is configured to be rotatable about the rotation axis AX. The spin chuck 4 holds the substrate W in a substantially horizontal posture by vacuum suction of the back surface of the substrate W, for example. On the other hand, the rotation driving unit 5 drives the rotation chuck 4 to rotate around the rotation axis AX. The rotation driving unit 5 includes an electric motor and the like.

In addition, the substrate processing apparatus 1 includes a chemical liquid supply source 7, chemical liquid pipes 8 a and 8 b, a pump P, and a chemical liquid control valve 9. The liquid medicine supply source 7 includes, for example, a tank or bottle for storing liquid medicine. One end of the chemical liquid pipes 8 a and 8 b is connected to the chemical liquid supply source 7, and the other end is connected to the nozzle 2.

A pump P is provided in the chemical liquid pipe 8a between the chemical liquid supply source 7 and the nozzle 2. The chemical liquid piping 8a, 8b between the pump P and the nozzle 2 is provided with a chemical liquid control valve 9. The pump P is a mechanism for transporting liquid medicine. The chemical liquid control valve 9 adjusts the flow rate of the chemical liquid sprayed from the nozzle 2 and causes the chemical liquid to be sprayed from the nozzle 2 to stop the spraying of the chemical liquid. The details of the liquid medicine control valve 9 will be described below. Furthermore, it is also possible to provide at least any one of, for example, a foreign material removal filter and a suction valve for preventing liquid from dripping in the chemical liquid pipes 8a and 8b.

The substrate processing apparatus 1 includes one or more control units 11 and operation units 13. The control unit 11 has a central processing unit (CPU, central processing unit). The control unit 11 controls each configuration of the substrate processing apparatus 1 and the chemical liquid control valve 9. The operation unit 13 includes an input unit, a display unit, and a storage unit. The memory includes ROM (Read-only Memory), RAM (Random-Access Memory), and hard disk. The storage unit stores various conditions such as substrate processing.

＜Constitution of chemical liquid control valve 9＞ Refer to Figure 2. The medicinal solution control valve 9 includes a single flow path valve block 21, a needle moving mechanism 23, and a valve body moving mechanism 25 for opening and closing.

The flow path valve block 21 is formed of a resin such as a fluororesin having thermoplasticity and melt fluidity, such as PFA (perfluoroalkoxyalkane). The flow path valve block 21 may be formed of fluororesin such as PTFE (polytetrafluoroethylene).

Furthermore, the flow path valve block 21 is preferably formed of PFA. If the flow path valve block 21 is formed of PFA by injection molding, the surface of the flow path valve block 21 will be covered with a surface layer that is a harder layer (film) than the inside. If the liquid medicine penetrates into the inside of the flow path valve block 21, as a result, there is a concern that dirt will be drawn from the inside of the flow path valve block 21. However, since the surface layer prevents the penetration of the liquid medicine, it can suppress the fear of deterioration of the purity of the liquid medicine.

The flow path valve block 21 has a first outer wall (surface) 21a and a second outer wall (surface) 21b. The second outer wall 21b is a surface at a substantially right angle to the first outer wall 21a. A valve chamber 27 for flow rate adjustment is provided on the first outer wall (outer surface) 21 a of the flow path valve block 21. A valve chamber 29 for opening and closing is provided on the second outer wall (outer surface) 21 b of the flow path valve block 21. The valve chamber 27 for flow rate adjustment is formed in such a way that a part of the first outer wall 21a is recessed. That is, the valve chamber 27 for flow rate adjustment is formed in the first outer wall 21a in a concave shape. The valve chamber 29 for opening and closing is formed in such a manner that a part of the second outer wall 21b is recessed. That is, the valve chamber 29 for opening and closing is formed in a concave shape on the second outer wall 21 b of the flow path valve block 21.

An intermediate flow path 31, a first flow path 33 and a second flow path 35 are formed inside the flow path valve block 21. The intermediate flow path 31, the first flow path 33, and the second flow path 35 are each formed in a linear shape. The intermediate flow path 31 is formed so as to connect the valve chamber 27 for flow rate adjustment and the valve chamber 29 for opening and closing. In addition, the intermediate flow path 31 is formed so as to extend at a substantially right angle to the second outer wall 21b.

One end of the first flow path 33 is connected to the valve chamber 27 for flow rate adjustment. The other end of the first flow path 33 is connected to a chemical solution pipe 8a provided with a pump P as the outside of the flow path valve block 21. One end of the second flow path 35 is connected to the valve chamber 29 for opening and closing. The other end of the second flow path 35 is connected to the chemical liquid pipe 8b provided with the nozzle 2 as the outside of the flow path valve block 21. That is, the second flow path 35 is connected to the nozzle 2 via the chemical liquid pipe 8b.

The first flow path 33 and the second flow path 35 are each formed so as to extend at a right angle with respect to the intermediate flow path 31. In addition, the first flow path 33 and the second flow path 35 are parallel. In addition, the portion of the first flow path 33 connected to the valve chamber 27 for flow adjustment is the first connection port 37 on the opposite side, and the portion facing the second flow path 35 that is connected to the valve chamber 29 for opening and closing is the first connection port 37 on the opposite side. 2 The connection port 39 opens in the same direction. That is, the first flow path 33 and the second flow path 35 are formed so that the direction of the chemical liquid passing through the first flow path 33 and the direction of the chemical liquid passing through the second flow path 35 are opposite to each other.

The needle moving mechanism 23 is attached to the flow path valve block 21. The needle moving mechanism 23 has a needle 41. The needle moving mechanism 23 is configured to block the valve chamber 27 for flow rate adjustment and to move the needle 41 in order to adjust the flow rate of the liquid medicine.

In addition, in FIG. 2, the valve chamber 27 for flow rate adjustment has the 1st extension flow path 40a. The first extension flow path 40a is provided on, for example, an inner side wall other than the bottom of the valve chamber 27 for flow rate adjustment. By connecting the intermediate flow path 31 to the first extended flow path 40a, the intermediate flow path 31 is connected to the valve chamber 27 for flow rate adjustment. In addition, the valve chamber 29 for opening and closing has a second extension flow path 40b. The second extension flow path 40b is provided at the bottom of the valve chamber 29 for opening and closing. By connecting the second flow path 35 to the second extended flow path 40b, the second flow path 35 is connected to the valve chamber 29 for opening and closing.

The needle moving mechanism 23 includes a cover 43, an electric motor 45, and a conversion mechanism 47 in addition to the needle 41. The needle 41 is arranged in the valve chamber 27 for flow rate adjustment. In addition, the needle 41 is arranged so as to face the opening 49 provided in the valve chamber 27 for flow rate adjustment. The opening 49 is formed in a circular shape. The opening 49 is connected to the first flow path 33. The front end 41a of the needle 41 is formed in a conical shape. The conical front end 41a of the needle 41 penetrates the opening 49, that is, the gap between the conical front end 41a and the opening 49 is adjusted by moving the needle 41 laterally (moving in the X direction) (see FIG. 2). Thus, the flow rate of the liquid medicine flowing through the gap is adjusted. The cover 43 is configured by a needle 41 passing through it. The cover 43 blocks the valve chamber 27 for flow rate adjustment.

The electric motor 45 drives the needle 41. The electric motor 45 includes, for example, a stepping motor or a servo motor. When the electric motor 45 includes a servo motor, since sensors such as a rotary encoder are provided, the lateral movement amount or position of the needle 41 can be accurately obtained. The conversion mechanism 47 is provided between the electric motor 45 and the needle 41 and converts the rotation output by the electric motor 45 into the linear movement of the needle 41. The conversion mechanism 47 is configured to include, for example, a screw shaft and a guide portion.

The valve body moving mechanism 25 for opening and closing is attached to the flow path valve block 21. The valve body moving mechanism 25 for opening and closing has a diaphragm 51. The opening and closing valve body moving mechanism 25 is configured to block the opening and closing valve chamber 29 and to move the diaphragm 51 in order to open and close the second flow path 35. The diaphragm 51 corresponds to the valve body for opening and closing of the present invention.

In addition to the diaphragm 51, the valve body moving mechanism 25 for opening and closing includes a cover 53, a movable member 55, a partition wall 57, a movable partition member 59, a spring 61, an air intake and exhaust port 63, and an adjustment screw portion 65.

The diaphragm 51 contains, for example, a fluororesin such as PTFE or PFA. The peripheral edge of the diaphragm 51 is fixed to the inner wall of the valve chamber 29 for opening and closing. The diaphragm 51 separates the below-mentioned valve seat 75 side and the partition wall 57 side so as to straddle the upward and downward movement direction of the diaphragm 51. The thick part 51 a in the center of the diaphragm 51 is fixed to the movable member 55. The cover 53 blocks the valve chamber 29 for opening and closing.

The disc-shaped partition wall 57 is arranged on the inner side wall of the cover 53. The partition wall 57 partitions the movable partition member 59 side from the diaphragm 51 side. A movable member 55 is inserted in the center of the partition wall 57. The movable member 55 can slide with respect to the partition wall 57. The movable partition member 59 is fixed to the movable member 55 on the opposite side of the diaphragm 51. The movable partition member 59 can slide relative to the inner side wall of the cover 53. The movable partition member 59 partitions the spring 61 side and the partition wall 57 side. The contact portion between the movable member 55 and the partition wall 57 and the contact portion between the movable partition member 59 and the inner side wall of the cover 53 are sealed.

The spring 61 is arranged between the top wall 53 a of the cover 53 and the movable partition member 59. The spring 61 is arranged to always be pressed downward (the direction in which the diaphragm 51 exists). The suction and exhaust port 63 is an opening for gas to enter and exit the space between the movable partition 59 and the partition wall 57 in the cover 53. The gas piping 67 connects a gas supply source 69 such as a gas tank or a piping in a factory to the intake and exhaust port 63. The gas pipe 67 is provided with, for example, a three-way valve 71. The three-way valve 71 selectively switches between supplying gas from the gas supply source 69 to the inside of the cover 53 and discharging the gas from the inside of the cover 53.

The adjustment screw portion 65 has a male screw 65a. The male thread 65a and the female thread 53b arranged near the top wall 53a of the cover body 53 are formed in a meshing manner. The adjustment screw portion 65 is separated from the movable partition member 59. The position of the male screw 65a restricts the upward movement of the movable partition member 59, the movable member 55, and the thick portion 51a of the diaphragm 51. Furthermore, the opening 73 is connected to the second flow path 35. The valve seat 75 is provided around the opening 73 and receives the thick portion 51 a of the diaphragm 51.

＜Manufacturing method of chemical liquid control valve 9＞ Next, an example of a method of manufacturing the chemical liquid control valve 9 will be described. Figure 3(a) is a cross-sectional view of a pair of molds in the XY direction. Figure 3(b) is a longitudinal cross-sectional view of a pair of molds in the XZ direction. 3(b) is a longitudinal cross-sectional view of the first protrusion 87 and the second pin member 90 in FIG. 3(a).

[Step S01] Step of preparing a pair of molds 81 and 82 Prepare a pair of molds 81 and 82. If the pair of molds 81 and 82 are arranged to face each other, an internal space 83 is formed in the pair of molds 81 and 82. In Fig. 3(a) and Fig. 3(b), the inner space 83 is the hatched line of the lower right oblique line represented by thick intervals. The internal space 83 is a space filled with resin. The pair of molds 81 and 82 have a first inner wall (surface) 85 and a second inner wall (surface) 86 in the internal space 83. The second inner wall 86 and the first inner wall 85 are at a substantially right angle.

A pair of molds 81 and 82 are provided with a first protrusion 87 for forming the valve chamber 27 for flow adjustment, a second protrusion 88 for forming the valve chamber 29 for opening and closing, and a straight line for forming the intermediate flow path 31 The first pin member 89. The first protrusion 87 is provided on the first inner wall 85 of the inner space 83 in the pair of molds 81 and 82. The first protruding portion 87 is provided with a first connecting convex portion 87a corresponding to the first extended flow path 40a. The second protrusion 88 is provided on the second inner wall 86. The second protruding portion 88 is provided with a second connecting convex portion 88a corresponding to the second extended flow path 40b.

The first pin member 89 is inserted in a direction extending at a substantially right angle to the second inner wall 86 so as to connect the first protrusion 87 and the second protrusion 88. The first protrusion 87 can move in the lateral direction (X direction). The first protrusion 87 is inserted into the internal space 83 of the pair of molds 81 and 82. Moreover, as shown in FIG. 3(a), the second protrusion 88 and the first pin member 89 are integrally configured. The integrated second protrusion 88 and the first pin member 89 can move in the longitudinal direction (Y direction) and are inserted into the internal space 83 of the pair of molds 81 and 82. The front end 89a of the first pin member 89 is in contact with the first connecting convex portion 87a of the first protruding portion 87.

Furthermore, the second protrusion 88 and the first pin member 89 may not be integrated, but may be configured to move individually.

[Step S02] Step of inserting the second pin member 90 The linear second pin member 90 is inserted into the internal space 83 so as to be connected to the first protrusion 87. The second pin member 90 can move in the lateral direction (X direction). The front end 90a of the second pin member 90 is in contact with the first protrusion 87. The second pin member 90 is used to form the first flow path 33.

[Step S03] Step of inserting the third pin member 91 The linear third pin member 91 is inserted into the internal space 83 so as to be connected to the second protrusion 88. The third pin member 91 can move in the lateral direction (X direction). The front end 91a of the third pin member 91 is in contact with the second connecting convex portion 88a of the second protruding portion 88. The third pin member 91 is used to form the second flow path 35.

[Step S04] Step of pouring resin After inserting the first protrusion 87, the second protrusion 88, the first pin member 89, the second pin member 90, and the third pin member 91 into the internal space 83 (also after steps S01 to S03), the The heated and melted resin (for example, PFA) flows into the internal space 83. The resin inside the heating barrel of the injection molding machine not shown is melted by heating. That is, the resin flowing into the pair of molds 81 and 82 is a resin fluidized by heating. Then, the heating barrel flows into the inner space 83 of the pair of molds 81 and 82.

[Step S05] Step of removing the flow path valve block (molded product) After the resin flowing into the internal space 83 is cooled and solidified, the first protrusion 87, the second protrusion 88, the first pin member 89, the second pin member 90, and the third pin member are drawn out from the pair of molds 81 and 82 91. After that, the resin is removed from the pair of molds 81 and 82 as a single flow path valve block 21. This removal is performed by relatively moving the pair of molds 81 and 82 in the vertical direction (the Z direction in FIG. 3(b)). Furthermore, the resin that has flowed into the internal space 83 interacts with the inner walls (symbols 85, 86, etc.) of the pair of molds 81, 82, the first protrusion 87, the second protrusion 88, the first pin member 89, and the second pin. The part where the member 90 and the third pin member 91 contact each other forms a surface layer.

[Step S06] Step of installing the needle moving mechanism and the valve body moving mechanism for opening and closing The flow path valve block 21 removed from the pair of molds 81 and 82 is processed for polishing the surface of the opening 49 and the valve seat 75 shown in FIG. 2. Then, components such as the needle moving mechanism 23 and the valve body moving mechanism 25 for opening and closing are attached to the flow path valve block 21.

In addition, according to the structure of the flow path valve block 21 in the following modification examples, the pair of molds 81, 82, the first protrusion 87, the second protrusion 88, and the like can also be configured as follows. For example, the first protrusion 87 may be fixed to the first inner wall 85 of the mold 81 without moving relative to the mold 81. Similarly, the second protrusion 88 may be fixed to the second inner wall 86 of the mold 82 without moving relative to the mold 82. In addition, corresponding to the configuration of FIG. 4 described below, the second inner wall 86 may be a surface facing the first inner wall 85.

Furthermore, in the conventional chemical liquid control valve 9, the V-shaped flow path 205 shown in FIG. 7 is formed by cutting from the two directions of the valve chamber for flow rate adjustment and the valve chamber for opening and closing. That is, due to the limitation of the mold, the V-shaped flow path 205 shown in FIG. 7 cannot be formed in a linear shape. In addition, for example, when the flow path valve block 21 is formed of PFA, the surface layer of the PFA is shaved off in the V-shaped flow path 205, so there is a concern that the liquid medicine penetrates into the flow path valve block 21 (PFA). According to the method of manufacturing the chemical liquid control valve 9 of this embodiment, the linear intermediate flow path 31 can be formed without cutting.

＜Operation of substrate processing equipment and chemical liquid control valve＞ Next, the operations of the substrate processing apparatus 1 and the chemical liquid control valve 9 will be described.

Refer to Figure 1. A transport mechanism not shown transports the substrate W to the holding and rotating part 3. The holding and rotating part 3 holds the substrate W by sucking the back surface of the substrate W. After that, the holding and rotating part 3 rotates the held substrate W. The nozzle 2 is moved above the substrate W by a moving mechanism not shown. The control unit 11 operates the chemical liquid control valve 9 to eject the chemical liquid from the nozzle 2 onto the substrate W.

In the chemical liquid control valve 9 shown in FIG. 2, first, the operation of the valve body moving mechanism 25 for opening and closing will be described. The thick-walled portion 51a of the diaphragm 51 is pressed by the elastic force (restoring force) of the spring 61 against the valve seat 75 provided around the opening 73 of the valve chamber 29 for opening and closing (refer to the thick-walled portion shown by the dotted line in FIG. 2 Section 51a). This state is a closed state in which the chemical liquid is not allowed to flow from the valve chamber 29 for opening and closing to the second flow path 35. When it is in the closed state, the liquid chemical is not sprayed from the nozzle 2.

By operating the three-way valve 71, gas is delivered from the gas supply source 69 to the space between the movable partition member 59 and the partition wall 57 in the cover 53 through the gas pipe 67 and the air intake and exhaust port 63. As a result, the movable partition member 59 repels the elastic force of the spring 61 and rises, and accordingly, the movable member 55 and the thick portion 51a of the diaphragm 51 rise (refer to the thick portion 51a indicated by the solid line in FIG. 2). This state is an open state that allows the liquid medicine to circulate. When it is in the open state, the chemical liquid is sprayed from the nozzle 2.

Here, the flow of the liquid medicine when it is in the open state will be specifically described. The pump P shown in FIG. 1 transports the liquid medicine from the liquid medicine supply source 7 to the first flow path 33 of the liquid medicine control valve 9 through the liquid medicine pipe 8 a. The medical solution sent to the first flow path 33 shown in FIG. 2 passes through the gap between the front end 41 a of the needle 41 and the opening 49, and is sent to the valve chamber 27 for flow rate adjustment. After that, the medicinal solution is sent from the valve chamber 27 for flow adjustment to the valve chamber 29 for opening and closing through the intermediate flow path 31. Furthermore, since the intermediate flow path 31 is configured to be linear, it is possible to transport the liquid medicine more smoothly than the V-shaped flow path 205 and the like shown in FIG. 7.

After that, the medicinal solution passes through the opening 73 of the valve seat 75 and the second flow path 35 and is transported from the opening/closing valve chamber 29 to the medicinal solution piping 8b. The chemical liquid delivered to the chemical liquid pipe 8b is delivered to the nozzle 2 and the chemical liquid is ejected from the nozzle 2.

In addition, the operation of the needle moving mechanism 23 will be described. The needle moving mechanism 23 adjusts the flow rate of the liquid medicine in the flow path valve block 21 such as the first flow path 33 by adjusting the gap between the front end 41 a of the needle 41 and the opening 49. The needle 41 is moved by the rotation drive of the electric motor 45. The conversion mechanism 47 converts the rotation of the electric motor 45 into the linear movement of the needle 41. The needle 41 moves in the lateral direction (X direction).

After spraying the chemical liquid, the control unit 11 operates the three-way valve 71 to stop the gas supply from the gas supply source 69, and discharges the gas in the cover 53 shown in FIG. 2 through the suction and exhaust ports 63 and the like. As a result, the thick-walled portion 51a of the diaphragm 51 is pressed down by the elastic force of the spring 61, and the thick-walled portion 51a is pressed against the valve seat 75 (closed state). When it is in the closed state, the liquid chemical is not sprayed from the nozzle 2.

After the ejection of the chemical liquid from the nozzle 2 is completed, the nozzle 2 is retracted from above the substrate W to the outside of the substrate. The holding and rotating part 3 stops the rotation of the held substrate W, and then releases the holding of the substrate W. A transport mechanism not shown in the figure moves the substrate W on the holding and rotating part 3 to another device, a mounting part, a carrier, or the like.

According to this embodiment, the flow path valve block 21 has a first outer wall 21a and a second outer wall 21b that is a surface at a right angle to the first outer wall 21a. The valve chamber 27 for adjusting the flow rate in which the needle 41 is arranged is formed such that the first outer wall 21a of the flow path valve block 21 is recessed. On the other hand, the opening and closing valve chamber 29 in which the diaphragm 51 is arranged is formed so that the second outer wall 21b is recessed. The intermediate flow path 31 connects the flow rate adjustment valve chamber 27 and the opening and closing valve chamber 29, and the intermediate flow path 31 extends at a right angle with respect to the second outer wall 21b. With this configuration, the intermediate flow path 31 can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like. In addition, the replacement characteristic is a characteristic represented by the time required for the new liquid medicine to flow into the first connection port 37 and the original liquid medicine to be squeezed out to reach the second connection port 39.

In addition, the first flow path 33 and the second flow path 35 are linear and extend at right angles to the intermediate flow path 31. When the resin is poured into the pair of molds 81, 82 to form the flow path valve block 21, the first pin member 89 inserted into the pair of molds 81, 82 for forming the intermediate flow path 31 and the first pin member 89 for forming the first Each of the second pin member 90 and the third pin member 91 inserted into the pair of molds 81 and 82 with the flow path 33 and the second flow path 35 is arranged at a right angle. Therefore, compared with the case where the first pin member 89, the second pin member 90, and the third pin member 91 are arranged obliquely (not at a right angle), the intermediate flow path 31, the first flow path 33, and the second pin member can be easily formed. Flow Path 35.

In addition, the first flow path 33 and the second flow path 35 are parallel. The first connection port 37 of the first flow path 33 on the opposite side to the part connected to the valve chamber 27 for flow adjustment is directed toward the second connection on the opposite side to the part of the second flow path 35 connected to the valve chamber 29 for opening and closing. The interface 39 opens in the same direction. When the resin is poured into the pair of molds 81, 82 to form the flow path valve block 21, the second pin member inserted into the pair of molds 81, 82 in order to form the first flow path 33 and the second flow path 35 can be made 90 and the third pin member 91 move in the same direction. Therefore, the first flow path 33 and the second flow path 35 can be easily formed compared to the case where the direction in which the second pin member 90 is inserted into the mold is different from the direction in which the third pin member 91 is inserted.

The present invention is not limited to the above-mentioned embodiment, and can be modified as described below.

(1) In the above embodiment, the second outer wall 21b provided with the valve chamber 29 for opening and closing is a right-angled surface with the first outer wall 21a provided with the valve chamber 27 for flow adjustment. In this regard, the second outer wall 21b may also be a surface facing the first outer wall 21a and substantially parallel to the first outer wall 21a as shown in FIG. 4. That is, the second outer wall (surface) 21b is provided on the side opposite to the first outer wall (surface) 21a with the flow path valve block 21 interposed therebetween. In addition, the second outer wall 21b is substantially parallel to the first outer wall 21a.

The valve chamber 27 for flow rate adjustment is formed in such a way that a part of the first outer wall 21a of the flow path valve block 21 is recessed. The opening and closing valve chamber 29 is formed in such a manner that a part of the second outer wall 21b of the flow path valve block 21 is recessed. As shown in FIG. 4, the valve chamber 27 for flow rate adjustment is arrange|positioned so that it may oppose the valve chamber 29 for opening and closing.

The linear intermediate flow path 31 is formed so as to connect the valve chamber 29 for opening and closing and the valve chamber 27 for flow rate adjustment. In addition, the intermediate flow path 31 extends at a right angle with respect to the first outer wall 21a and the second outer wall 21b. The first flow path 33 and the second flow path 35 respectively extend at right angles to the intermediate flow path 31. The first flow path 33 is connected to the valve chamber 27 for flow rate adjustment. On the other hand, the second flow path 35 is connected to the valve chamber 29 for opening and closing.

The diaphragm 51 shown in FIG. 4 moves in the longitudinal direction (Y direction). Moreover, the needle 41 of this modification also moves in the longitudinal direction. The front end 41a of the needle 41 penetrates the opening 49 of the connection portion between the flow rate adjusting valve chamber 27 and the intermediate flow path 31.

According to this modification, the flow path valve block 21 has a first outer wall 21a and a second outer wall 21b which is a surface facing the first outer wall 21a and parallel to the first outer wall 21a. The valve chamber 27 for adjusting the flow rate in which the needle 41 is arranged is formed such that the first outer wall 21a of the flow path valve block 21 is recessed. On the other hand, the opening and closing valve chamber 29 in which the diaphragm 51 is arranged is formed so that the second outer wall 21b is recessed. The intermediate flow path 31 connects the flow rate adjustment valve chamber 27 and the opening and closing valve chamber 29, and the intermediate flow path 31 extends at a right angle to the first outer wall 21a and the second outer wall 21b. With this configuration, the intermediate flow path 31 can be formed in a linear shape. Therefore, it is possible to improve the replacement characteristics of the liquid medicine, which may cause deterioration of the liquid medicine due to the V-shaped flow path or the like.

(2) In the above embodiment, for example, as shown in FIG. 2, the intermediate flow path 31 is formed so as to extend substantially at right angles to the second outer wall 21b provided with the valve chamber 29 for opening and closing. In this regard, the intermediate flow path 31 may be formed so as to extend substantially at right angles to the first outer wall 21a provided with the valve chamber 27 for flow rate adjustment as shown in FIG. 5(a).

(3) In the above-mentioned embodiment and modification (1), as shown in FIGS. 2 and 4, the opening 73 at the bottom of the valve chamber 29 for opening and closing is connected to the second flow path 35. In this regard, the opening 73 at the bottom of the valve chamber 29 for opening and closing may be connected to the intermediate flow path 31 as shown in FIG. 5(b).

(4) In the above-mentioned embodiment and each modification example, as shown in Figures 2 and 4, the opening 49 at the bottom of the valve chamber 27 for flow adjustment is connected to the intermediate flow path 31 extending in the moving direction of the needle 41 or The first flow path 33. Regarding this aspect, as shown in FIG. 5(b), the opening 49 at the bottom of the flow rate adjusting valve chamber 27 may be connected via a third extension flow path 40c to extend in a direction orthogonal to the moving direction of the needle 41 The middle flow path 31 (or the first flow path 33). The third extension flow path 40 c extends from the opening 49 in the moving direction of the needle 41 and is connected to the intermediate flow path 31.

In addition, in FIGS. 5(a) and 5(b) and the following FIGS. 6(a) and 6(b), the needle moving mechanism 23 and the valve body moving mechanism 25 for opening and closing are simplified and shown.

(5) In the above embodiments and various modifications, the needle moving mechanism 23 is configured to include an electric motor 45 and a conversion mechanism 47, and the conversion mechanism 47 converts the rotation output by the electric motor 45 into linear movement of the needle 41 . However, it is not limited to this. It can also be configured that a handle or handle manually turned by the operator is provided instead of the electric motor 45, and the rotation of the handle or handle is converted into the linear movement of the needle 41.

(6) In the above embodiments and various modifications, for example, as shown in FIGS. 2 and 4, the first connection port 37 at one end of the first flow path 33 faces the second connection port 39 at one end of the second flow path 35 The same direction. That is, the first connection port 37 and the second connection port 39 both open to the right in FIGS. 2 and 4. In this regard, the first connection port 37 may be opened in a direction opposite to the second connection port 39 as shown in FIGS. 6(a) and 6(b). That is, in FIGS. 6(a) and 6(b), the first connection port 37 opens to the left, and the second connection port 39 opens to the right.

Furthermore, in FIGS. 6(a) and 6(b), the first connection port 37 faces the opposite direction to the second connection port 39, that is, it reverses 180 degrees around the intermediate flow path 31 with respect to the second connection port 39 Degree openings. In this regard, the first connection port 37 may also open in a direction of, for example, 90° (that is, a direction other than 0 degrees and 180 degrees) around the intermediate flow path 31 relative to the second connection port 39.

(7) In the above-mentioned embodiment and each modification example, the opening and closing valve body moving mechanism 25 drives the diaphragm 51 by gas. In this regard, the valve body moving mechanism 25 for opening and closing may drive the diaphragm 51 by an electric motor similarly to the needle moving mechanism 23. The rotation performed by the electric motor is converted into linear movement by the conversion mechanism. As a result, the thick portion 51 a of the diaphragm 51 is pressed against the valve seat 75 or the thick portion 51 a is separated from the valve seat 75.

1‧‧‧Substrate processing equipment 2‧‧‧Nozzle 3‧‧‧Keep rotating part 4‧‧‧Rotating Chuck 5‧‧‧Rotation drive unit 7‧‧‧Medicinal solution supply source 8a‧‧‧Liquid piping 8b‧‧‧Liquid piping 9‧‧‧Liquid control valve 11‧‧‧Control Department 13‧‧‧Operation Department 21‧‧‧Single flow path valve block 21a‧‧‧The first outer wall 21b‧‧‧The second outer wall 23‧‧‧Needle moving mechanism 25‧‧‧Valve body moving mechanism for opening and closing 27‧‧‧Valve chamber for flow adjustment 29‧‧‧Valve chamber for opening and closing 31‧‧‧Intermediate flow path 33‧‧‧First flow path 35‧‧‧Second flow path 37‧‧‧The first connection port 39‧‧‧The second connection port 40a‧‧‧The first extension flow path 40b‧‧‧Second extension flow path 40c‧‧‧The third extension flow path 41‧‧‧Needle 41a‧‧‧Front end 43‧‧‧Hood 45‧‧‧Electric Motor 47‧‧‧Transformation Organization 49‧‧‧Opening 51‧‧‧Diaphragm 51a‧‧‧Thick Wall 53‧‧‧Hood 53a‧‧‧Top wall 53b‧‧‧Female thread 55‧‧‧moving parts 57‧‧‧The next wall 59‧‧‧Activity divider 61‧‧‧Spring 63‧‧‧Suction and exhaust port 65‧‧‧Adjusting screw part 65a‧‧‧Male thread 67‧‧‧Gas piping 69‧‧‧Gas supply source 71‧‧‧Three-way valve 73‧‧‧Opening 75‧‧‧Valve seat 81‧‧‧Mould 82‧‧‧Mould 83‧‧‧Internal space 85‧‧‧The first inner wall 86‧‧‧Second inner wall 86 87‧‧‧The first protrusion 87a‧‧‧The first connecting convex part 88‧‧‧Second protrusion 88a‧‧‧Second connecting convex 89‧‧‧The first pin part 89a‧‧‧Front end 90‧‧‧Second pin part 90a‧‧‧Front end 91‧‧‧Pin 3 91a‧‧‧Front end 201‧‧‧Liquid Control Valve 202‧‧‧Flow control valve 203‧‧‧Open and close valve (ON/OFF valve) 205‧‧‧V-shaped flow path AX‧‧‧Rotation axis P‧‧‧Pump W‧‧‧Substrate X‧‧‧direction Y‧‧‧ direction Z‧‧‧ direction

Fig. 1 is a schematic configuration diagram of the substrate processing apparatus of the embodiment. Fig. 2 is a schematic configuration diagram of the liquid medicine control valve of the embodiment. Figure 3 (a) is a cross-sectional view of a pair of molds in the XY direction, and (b) is a longitudinal cross-sectional view of a pair of molds in the XZ direction. Fig. 4 is a schematic configuration diagram of a chemical liquid control valve of a modified example. Figures 5 (a) and (b) are schematic diagrams of the chemical liquid control valve of a modified example. Figure 6 (a) and (b) are schematic diagrams of the chemical liquid control valve of the modified example. Fig. 7 is a schematic configuration diagram of the conventional chemical liquid control valve.

8a‧‧‧Liquid piping

8b‧‧‧Liquid piping

9‧‧‧Liquid control valve

21‧‧‧Single flow path valve block

21a‧‧‧The first outer wall

21b‧‧‧The second outer wall

23‧‧‧Needle moving mechanism

25‧‧‧Valve body moving mechanism for opening and closing

27‧‧‧Valve chamber for flow adjustment

29‧‧‧Valve chamber for opening and closing

31‧‧‧Intermediate flow path

33‧‧‧First flow path

35‧‧‧Second flow path

37‧‧‧The first connection port

39‧‧‧The second connection port

40a‧‧‧The first extension flow path

40b‧‧‧Second extension flow path

41‧‧‧Needle

41a‧‧‧Front end

43‧‧‧Hood

45‧‧‧Electric Motor

47‧‧‧Transformation Organization

49‧‧‧Opening

51‧‧‧Diaphragm

51a‧‧‧Thick Wall

53‧‧‧Hood

53a‧‧‧Top wall

53b‧‧‧Female thread

55‧‧‧moving parts

57‧‧‧The next wall

59‧‧‧Activity divider

61‧‧‧Spring

63‧‧‧Suction and exhaust port

65‧‧‧Adjusting screw part

65a‧‧‧Male thread

67‧‧‧Gas piping

69‧‧‧Gas supply source

71‧‧‧Three-way valve

73‧‧‧Opening

75‧‧‧Valve seat

X‧‧‧direction

Y‧‧‧ direction

Claims (13)

A liquid medicine control valve, characterized by comprising: a single flow path valve block having a first outer wall and a second outer wall as a plane at right angles to the first outer wall; a valve chamber for flow adjustment, which is based on the first The outer wall is recessed; the valve chamber for opening and closing is formed with the second outer wall recessed; the intermediate flow path is formed inside the flow path valve block and is linear, and the flow rate adjustment valve chamber is aligned with The connection between the opening and closing valve chambers extends at right angles to any one of the first outer wall and the second outer wall; the first flow path is formed inside the flow path valve block and is connected to the flow rate adjustment valve chamber The second flow path, which is formed inside the flow path valve block, is connected to the opening and closing valve chamber; the needle moving mechanism has a needle arranged in the flow rate adjustment valve chamber to block the flow rate adjustment valve And move the needle in order to adjust the flow rate of the liquid medicine; and an opening and closing valve body moving mechanism, which has an opening and closing valve body arranged in the opening and closing valve chamber, blocking the opening and closing valve chamber, and in order to perform the medicine The supply of the liquid and the stop of the supply move the valve body for opening and closing. A chemical liquid control valve, characterized by comprising: a single flow path valve block having a first outer wall and a second outer wall as a surface facing the first outer wall and parallel to the first outer wall; a valve for flow adjustment A chamber, which is formed in a way that the first outer wall is recessed; The valve chamber for opening and closing is formed in such a manner that the second outer wall is recessed and is arranged above the valve chamber for flow adjustment; the intermediate flow path is formed inside the flow path valve block and has a linear shape, and the The flow rate adjustment valve chamber is connected to the opening and closing valve chamber and extends at right angles to the first outer wall and the second outer wall; the first flow path is formed inside the flow path valve block and is connected to the flow rate adjustment Connected by a valve chamber; a second flow path formed inside the flow path valve block and connected to the opening and closing valve chamber; a needle moving mechanism having a needle arranged in the flow rate adjustment valve chamber to block the flow Adjusting the valve chamber and moving the needle in order to adjust the flow rate of the liquid medicine; and an opening and closing valve body moving mechanism having an opening and closing valve body arranged in the opening and closing valve chamber to block the opening and closing valve chamber, and The opening and closing valve body is moved in order to perform the supply of the liquid medicine and the stop of the supply; and the liquid medicine is transported from the valve chamber for flow rate adjustment to the valve chamber for opening and closing through the intermediate flow path. The liquid medicine control valve of claim 1 or 2, wherein the first flow path and the second flow path are respectively linear and extend at right angles to the intermediate flow path. The chemical liquid control valve of claim 1 or 2, wherein the first flow path is parallel to the second flow path, and the portion of the first flow path that connects to the flow rate adjustment valve chamber is the first connection on the opposite side The port opens in the same direction as the second connection port on the opposite side of the part connecting the opening and closing valve chamber in the second flow path. The liquid medicine control valve of claim 1 or 2, wherein the flow path valve block is formed of PFA. The chemical liquid control valve of claim 1 or 2, wherein the first flow path extends linearly in the horizontal direction and is directly connected to the valve chamber for flow rate adjustment. The liquid chemical control valve of claim 1 or 2, wherein the valve chamber for flow rate adjustment is arranged on the upstream side of the intermediate flow path, the valve chamber for opening and closing is arranged on the downstream side of the intermediate flow path, and the valve chamber for opening and closing is arranged on the downstream side of the intermediate flow path. It is arranged above the valve chamber for flow adjustment. The liquid chemical control valve according to claim 2, wherein the valve chamber for flow rate adjustment is formed so that the first outer wall is recessed vertically upward, and the valve chamber for opening and closing is formed so that the second outer wall is recessed vertically downward. A substrate processing apparatus comprising: a holding and rotating part that holds a substrate and rotates the held substrate; a nozzle that ejects a chemical solution to the substrate held in the holding and rotating part; and a chemical solution piping connected to the above Nozzle; and The chemical liquid control valve adjusts the flow rate of the chemical liquid sprayed from the nozzle, and causes the chemical liquid to be sprayed from the nozzle to stop the chemical liquid ejection; the chemical liquid control valve includes: a single flow path valve block, which has a first An outer wall and a second outer wall that is a plane at right angles to the first outer wall; a valve chamber for flow adjustment, which is formed in such a way that the first outer wall is recessed; and a valve chamber for opening and closing, which is formed in a way that the second outer wall is recessed; The intermediate flow path is formed inside the flow path valve block, is linear, and connects the flow rate adjustment valve chamber and the opening and closing valve chamber, and is opposed to either the first outer wall or the second outer wall. One extends at a right angle; the first flow path is formed inside the flow path valve block and is connected to the flow rate adjustment valve chamber; the second flow path is formed inside the flow path valve block and is connected to the opening and closing Connected with a valve chamber, and connected to the nozzle via the chemical liquid pipe; a needle moving mechanism having a needle arranged in the valve chamber for flow rate adjustment to block the valve chamber for flow rate adjustment, and to adjust the flow rate of the chemical solution Moving the needle; and an opening and closing valve body moving mechanism having an opening and closing valve body arranged in the opening and closing valve chamber, blocking the opening and closing valve chamber, and for supplying and stopping the supply of the liquid medicine The valve body for opening and closing moves. A substrate processing apparatus comprising: a holding and rotating part that holds a substrate and rotates the held substrate; a nozzle that ejects a chemical solution to the substrate held in the holding and rotating part; and a chemical solution piping connected to the above Nozzle; and The chemical liquid control valve adjusts the flow rate of the chemical liquid sprayed from the nozzle, and causes the chemical liquid to be sprayed from the nozzle to stop the chemical liquid ejection; the chemical liquid control valve includes: a single flow path valve block, which has a first An outer wall and a second outer wall that is a surface facing the first outer wall and parallel to the first outer wall; a valve chamber for flow rate adjustment formed in such a way that the first outer wall is recessed; and a valve chamber for opening and closing is formed as the first outer wall 2 The outer wall is formed in a recessed manner and is arranged above the valve chamber for flow adjustment; the intermediate flow path is formed inside the flow path valve block and is linear, and the valve chamber for flow adjustment is connected to the opening and closing valve block. The connection between the valve chambers extends at right angles to the first outer wall and the second outer wall; the first flow path is formed inside the flow path valve block and is connected to the valve chamber for flow adjustment; the second flow path , Which is formed inside the flow path valve block, is connected to the opening and closing valve chamber, and is connected to the nozzle via the chemical liquid pipe; a needle moving mechanism having a needle arranged in the flow rate adjustment valve chamber, blocking Holding the valve chamber for adjusting the flow rate and moving the needle in order to adjust the flow rate of the chemical solution; and a valve body moving mechanism for opening and closing, which has a valve body for opening and closing arranged in the valve chamber for opening and closing, and blocking the valve for opening and closing The valve body for opening and closing is moved in order to perform the supply of the liquid medicine and the stop of the supply thereof; and the liquid medicine is transported from the valve chamber for flow rate adjustment to the valve chamber for opening and closing through the intermediate flow path. Such as the substrate processing apparatus of claim 9 or 10, wherein The first flow path extends linearly in the horizontal direction and is directly connected to the valve chamber for flow rate adjustment. The substrate processing apparatus of claim 9 or 10, wherein the valve chamber for flow rate adjustment is arranged on the upstream side of the intermediate flow path, the valve chamber for opening and closing is arranged on the downstream side of the intermediate flow path, and the valve chamber for opening and closing is arranged Above the valve chamber for flow adjustment. The substrate processing apparatus of claim 10, wherein the valve chamber for flow rate adjustment is formed so that the first outer wall is recessed vertically upward, and the valve chamber for opening and closing is formed so that the second outer wall is recessed vertically downward.

Images