CN110246776A - Chemical hydraulic control valve and substrate board treatment - Google Patents
Chemical hydraulic control valve and substrate board treatment Download PDFInfo
- Publication number
- CN110246776A CN110246776A CN201910117565.0A CN201910117565A CN110246776A CN 110246776 A CN110246776 A CN 110246776A CN 201910117565 A CN201910117565 A CN 201910117565A CN 110246776 A CN110246776 A CN 110246776A
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- flow path
- wall
- opening
- valve chamber
- closing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Valve Housings (AREA)
- Lift Valve (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Multiple-Way Valves (AREA)
Abstract
The present invention provides the chemical hydraulic control valve and substrate board treatment of a kind of displacement characteristic that can be improved chemical liquids.Flow path block (21) has the 1st outer wall (21a) and the 2nd outer wall (21b) as the face rectangular with the 1st outer wall (21a).The flow adjustment of configuration pin (41) is formed in a manner of the 1st outer wall (21a) of flow path block (21) recess with valve chamber (27).On the other hand, the opening and closing for configuring diaphragm (51) is formed in a manner of the 2nd outer wall (21b) recess with valve chamber (29).Flow adjustment is connect with valve chamber (27) with opening and closing with valve chamber (29) by intermediate flow passage (31), and intermediate flow passage (31) is extended at right angles relative to either one or two of the 1st outer wall (21a) and the 2nd outer wall (21b).By such composition, intermediate flow passage (31) can be formed as linear.Therefore, it can be improved the displacement characteristic of the chemical liquids for the worry for causing chemical liquids to deteriorate because of V word flow path etc..
Description
Technical field
The present invention relates to a kind of chemical hydraulic control valve and the substrate board treatment for having it, which is used to control
System is to semiconductor substrate, liquid crystal display device or organic EL (electroluminescence, electroluminescent) display device etc.
FPD (Flat Panel Display, flat-panel monitor) is with substrate, photomask glass substrate, light base-board for plate, disk base
The chemical liquids of the substrates such as plate, ceramic substrate, substrate for solar cell supply.
Background technique
As shown in fig. 7, previous chemical hydraulic control valve 201 has flow rate regulating valve 202 and open and close valve (ON/OFF valve) 203
(referring for example to patent document 1,2).The flow of 202 pairs of chemical liquids supplied of flow rate regulating valve is adjusted.On the other hand, it opens
Valve closing 203 supplies chemical liquids, in addition, stopping the supply of chemical liquids.Between flow rate regulating valve 202 and open and close valve 203
It is connected using arc-shaped flow path documented by V word flow path 205 or patent document 2 (hereinafter referred to as " V word flow path 205 etc. ").Therefore,
The chemical liquids conveyed from flow rate regulating valve 202 are transported to open and close valve 203 by V word flow path 205 etc..
[background technology document]
[patent document]
[patent document 1]
Japanese Patent Laid-Open 2001-263507 bulletin
[patent document 2]
Japanese Patent Laid-Open 2017-207121 bulletin
Summary of the invention
[problems to be solved by the invention]
There are the following problems for such previous chemical hydraulic control valve 201.As described above, conveyed from flow rate regulating valve 202
Chemical liquids are transported to open and close valve 203 by V word flow path 205 etc..If making chemical liquids by V word flow path 205 etc., have from
The worry that the displacement characteristic of the entrance of chemical hydraulic control valve 201 to the chemical liquids exported is deteriorated.If the displacement characteristic of chemical liquids
Difference, then there is the worry for leading to generate dirt in liquid because of the pervious chemical liquids of delay.It is therefore preferable that improving chemical hydraulic control
The displacement characteristic of chemical liquids in valve 201 processed.
The present invention is to complete in view of this situation, and its purpose is to provide a kind of displacement that can be improved chemical liquids is special
The chemical hydraulic control valve of property and the substrate board treatment for having it.
[technical means to solve problem]
In order to reach such purpose, the present invention is constituted using following.That is, the spy of chemical hydraulic control valve of the invention
Sign is have: single flow path block has the 1st outer wall and the 2nd outer wall as the face rectangular with the 1st outer wall；Stream
Adjustment valve chamber is measured, is formed in a manner of the 1st outer wall depression；Opening and closing valve chamber, the shape in a manner of the 2nd outer wall depression
At；Intermediate flow passage is formed in the inside of the flow path block, linearly, and makes the flow adjustment valve chamber and the opening and closing
It is connected between valve chamber, is extended at right angles relative to either one or two of the 1st outer wall and described 2nd outer wall；1st flow path is formed
In the inside of the flow path block, it is connect with the flow adjustment with valve chamber；2nd flow path is formed in the inside of the flow path block, with
The opening and closing is connected with valve chamber；Needle mobile mechanism has configuration in the indoor needle of flow adjustment valve, blocks the flow
Adjustment valve chamber, and keep the needle mobile to adjust the flow of chemical liquids；And opening and closing valve body mobile mechanism, have
Configuration blocks the opening and closing valve chamber, and in the indoor opening and closing valve body of the opening and closing valve in order to carry out the confession of chemical liquids
The stopping giving and its supply and keep the opening and closing valve body mobile.
Chemistry hydraulic control valve according to the present invention, flow path block have the 1st outer wall and as the faces rectangular with the 1st outer wall
2nd outer wall.The flow adjustment of configuration pin is formed in a manner of the 1st outer wall depression of flow path block with valve chamber.On the other hand, configuration is opened
It closes and is formed in a manner of the 2nd outer wall depression with the opening and closing of valve body with valve chamber.Intermediate flow passage uses flow adjustment valve chamber and opening and closing
Valve chamber connection, intermediate flow passage are extended at right angles relative to either one or two of the 1st outer wall and the 2nd outer wall.By such composition, can incite somebody to action
Intermediate flow passage is formed as linear.Therefore, the chemical liquids for the worry for causing chemical liquids to deteriorate because of V word flow path etc. be can be improved
Displacement characteristic.
In addition, chemical hydraulic control valve of the invention is characterized in that having: single flow path block has the 1st outer wall and work
For 2nd outer wall opposite and with the face of the 1st outside wall parallel with the 1st outer wall；Flow adjustment valve chamber, with described the
The mode of 1 outer wall depression is formed；Opening and closing valve chamber, is formed in a manner of the 2nd outer wall depression；Intermediate flow passage is formed in institute
The inside of flow path block is stated, linearly, and connects the flow adjustment valve chamber and the opening and closing between valve chamber, relative to
1st outer wall and the 2nd outer wall extend at right angles；1st flow path is formed in the inside of the flow path block, with the flow
Adjustment is connected with valve chamber；2nd flow path is formed in the inside of the flow path block, connect with the opening and closing with valve chamber；Needle moving machine
Structure has configuration in the indoor needle of flow adjustment valve, blocks the flow adjustment valve chamber, and in order to adjust chemistry
The flow of liquid and keep the needle mobile；And opening and closing valve body mobile mechanism, there is configuration to open the opening and closing valve is indoor
It closes with valve body, blocks the opening and closing valve chamber, and make described open to carry out the stopping of the supply of chemical liquids and its supply
It closes mobile with valve body.
Chemistry hydraulic control valve according to the present invention, flow path block have the 1st outer wall and as it is opposite with the 1st outer wall and with
2nd outer wall in the face of the 1st outside wall parallel.The flow adjustment valve chamber of configuration pin is with the side of the 1st outer wall depression of flow path block
Formula is formed.On the other hand, the opening and closing for configuring opening and closing valve body is formed in a manner of the 2nd outer wall depression with valve chamber.Intermediate flow passage will
Flow adjustment valve chamber and opening and closing are connected with valve chamber, and intermediate flow passage is extended at right angles relative to the 1st outer wall and the 2nd outer wall.Pass through
Intermediate flow passage can be formed as linear by such composition.Therefore, can be improved causes chemical liquids bad because of V word flow path etc.
The displacement characteristic of the chemical liquids of the worry of change.
In addition, preferably described 1st flow path and the 2nd flow path are respectively linear in the chemical hydraulic control valve, and
It is extended at right angles relative to the intermediate flow passage.It, can will be for shape when being flowed into material in mold and forming flow path block
The 1st pin member that is inserted at intermediate flow passage in mold, be inserted into mold to form the 1st flow path and the 2nd flow path
The 2nd pin member and the 3rd pin member each at right angles configure.Therefore, compared to the 1st pin member and the 2nd pin member and the 3rd pin portion
Part each obliquely configures the case where (and on-right angle), is able to easily form intermediate flow passage, the 1st flow path and the 2nd flow path.
In addition, preferably described 1st flow path is parallel with the 2nd flow path in the chemical hydraulic control valve, the 1st stream
Lu Zhongyu connect the flow adjustment valve chamber part be opposite side the 1st connector, towards in the 2nd flow path and even
The part for connecing opening and closing valve chamber is the identical direction opening of the 2nd connector of opposite side.It is flowed into material in mold
And when forming flow path block, it can make to be inserted into the 2nd pin member in mold and the 3rd pin to form the 1st flow path and the 2nd flow path
Component moves in the same direction.Therefore, the direction of the direction and the 3rd pin member in mold is inserted into compared to the 2nd pin member
Different situations is able to easily form the 1st flow path and the 2nd flow path.
In addition, the preferably described flow path block is by PFA in the chemical hydraulic control valve
(perfluoroalkoxyalkane, perfluoroalkoxyalkanes) is formed.If flow path block is formed by PFA, the table of flow path block
It face can be by the Surface mulch as hard layer (film) more internal than it.If chemical liquids penetrate into the inside of flow path block, result
There is the worry that dirt is drawn from the inside of flow path block.But because surface layer can prevent the infiltration of chemical liquids, being able to suppress
Learn the worry that the degree of purity of liquid is deteriorated.
In addition, substrate board treatment of the invention is characterized in that having: keeping rotating part, keep substrate, and make to be protected
The substrate rotation held；Nozzle sprays chemical liquids to the substrate for keeping rotating part is maintained at；Chemical liquids piping, is connected to institute
State nozzle；And chemical hydraulic control valve, the flow of the chemical liquids sprayed from the nozzle is adjusted, and spray chemical liquids from the nozzle
Out, chemical liquids are sprayed to stop；It is described chemistry hydraulic control valve have: single flow path block, have the 1st outer wall and as with it is described
2nd outer wall in the rectangular face of the 1st outer wall；Flow adjustment valve chamber, is formed in a manner of the 1st outer wall depression；Opening and closing is used
Valve chamber is formed in a manner of the 2nd outer wall depression；Intermediate flow passage is formed in the inside of the flow path block, linearly, and
Connect the flow adjustment valve chamber and the opening and closing between valve chamber, relative to the 1st outer wall and the 2nd outer wall
Any one is extended at right angles；1st flow path is formed in the inside of the flow path block, connect with the flow adjustment with valve chamber；2nd
Flow path is formed in the inside of the flow path block, and connect with the opening and closing with valve chamber, and is piped and connects via the chemical liquids
In the nozzle；Needle mobile mechanism has configuration in the indoor needle of flow adjustment valve, blocks the flow adjustment valve
Room, and keep the needle mobile to adjust the flow of chemical liquids；And opening and closing valve body mobile mechanism, have configuration in institute
The indoor opening and closing valve body of opening and closing valve is stated, blocks the opening and closing valve chamber, and in order to carry out the supply of chemical liquids and its confession
The stopping given and keep the opening and closing valve body mobile.
Substrate board treatment according to the present invention has chemical hydraulic control valve.In chemical hydraulic control valve, flow path block has
1st outer wall and the 2nd outer wall as the face rectangular with the 1st outer wall.The flow adjustment valve chamber of configuration pin is with the 1st of flow path block the
The mode of outer wall depression is formed.On the other hand, the opening and closing valve chamber of configuration opening and closing valve body shape in a manner of the 2nd outer wall depression
At.Intermediate flow passage connects flow adjustment valve chamber and opening and closing with valve chamber, and intermediate flow passage is relative to the 1st outer wall and the 2nd outer wall
Any one is extended at right angles.By such composition, intermediate flow passage can be formed as linear.Therefore, it can be improved because of V word
Flow path etc. and cause chemical liquids deteriorate worry chemical liquids displacement characteristic.
In addition, substrate board treatment of the invention is characterized in that having: keeping rotating part, keep substrate, and make to be protected
The substrate rotation held；Nozzle sprays chemical liquids to the substrate for keeping rotating part is maintained at；Chemical liquids piping, is connected to institute
State nozzle；And chemical hydraulic control valve, the flow of the chemical liquids sprayed from the nozzle is adjusted, and spray chemical liquids from the nozzle
Out, chemical liquids are sprayed to stop；It is described chemistry hydraulic control valve have: single flow path block, have the 1st outer wall and as with it is described
1st outer wall opposite direction and the 2nd outer wall with the face of the 1st outside wall parallel；Flow adjustment valve chamber, it is recessed with the 1st outer wall
Sunken mode is formed；Opening and closing valve chamber, is formed in a manner of the 2nd outer wall depression；Intermediate flow passage is formed in the flow path block
Inside, linearly, and connect the flow adjustment valve chamber and the opening and closing between valve chamber, relative to the described 1st
Outer wall and the 2nd outer wall extend at right angles；1st flow path is formed in the inside of the flow path block, with the flow adjustment valve
Room connection；2nd flow path is formed in the inside of the flow path block, and connect with the opening and closing with valve chamber, and via the chemistry
Liquid piping is connected to the nozzle；Needle mobile mechanism has configuration in the indoor needle of flow adjustment valve, blocks the stream
Adjustment valve chamber is measured, and keeps the needle mobile to adjust the flow of chemical liquids；And opening and closing valve body mobile mechanism, tool
There is configuration in the indoor opening and closing valve body of the opening and closing valve, blocks the opening and closing valve chamber, and in order to carry out chemical liquids
The stopping of supply and its supply and keep the opening and closing valve body mobile.
Substrate board treatment according to the present invention has chemical hydraulic control valve.In chemical hydraulic control valve, flow path block has
1st outer wall and as 2nd outer wall opposite and with the face of the 1st outside wall parallel with the 1st outer wall.The flow tune of configuration pin
It is whole to be formed in a manner of the 1st outer wall depression of flow path block with valve chamber.On the other hand, configure opening and closing valve body opening and closing valve chamber with
The mode of 2nd outer wall depression is formed.Intermediate flow passage connects flow adjustment valve chamber and opening and closing with valve chamber, intermediate flow passage relative to
1st outer wall and the 2nd outer wall extend at right angles.By such composition, intermediate flow passage can be formed as linear.Therefore, can
Improve the displacement characteristic for there are the chemical liquids for the worry for causing chemical liquids to deteriorate because of V word flow path etc..
In addition, this specification also discloses the invention of the manufacturing method of following chemical hydraulic control valve.
(1) manufacturing method of chemical hydraulic control valve of the invention is characterized in that including the following steps: to prepare a pair of of mold,
The pair of mold in inner space has the 1st inner wall and as the 2nd inner wall in the face rectangular with the 1st inner wall, and has
Have: the 1st inner wall is arranged in order to form flow adjustment valve chamber in the 1st protruding portion；2nd protruding portion, in order to form opening and closing
2nd inner wall is set with valve chamber；And the 1st linear pin member, make the 1st protruding portion and the 2nd protruding portion
Connection, and along the direction insertion extended at right angles relative to either one or two of the 1st inner wall and the 2nd inner wall；With with the described 1st
The 2nd linear pin member is inserted into the inner space by the mode of protruding portion connection；With what is connect with the 2nd protruding portion
The 3rd linear pin member is inserted into the inner space by mode；It is inserted by the 2nd pin member and the 3rd pin member
Enter to after the inner space, resin that is heated and melting is made to be flowed into the inner space；And it is described that will be flowed into
After the resin cooling and solidifying of inner space, the resin for becoming single flow path block is unloaded from a pair of of mold.
The manufacturing method of chemistry hydraulic control valve according to the present invention, a pair of of mold have the 1st inner wall and work in inner space
For the 2nd inner wall in the face rectangular with the 1st inner wall.A pair of of mold includes the 1st protruding portion, in order to form flow adjustment valve chamber
And it is arranged in the 1st inner wall；The 2nd inner wall is arranged in order to form opening and closing valve chamber in 2nd protruding portion；And the 1st linear pin portion
Part connect the 1st protruding portion with the 2nd protruding portion, and along rectangular relative to either one or two of the 1st inner wall and the 2nd inner wall
The direction of extension is inserted into.By forming flow path block with such construction, intermediate flow passage can be formed as linear.Therefore, can
Improve the displacement characteristic for there are the chemical liquids for the worry for causing chemical liquids to deteriorate because of V word flow path etc..In addition, in previous chemical liquids
In control valve, V word flow path is by being cut in the two directions from flow adjustment valve chamber and opening and closing with valve chamber after its formation
To be formed.According to the present invention, linear intermediate flow passage 31 can just be formed without cutting.
[The effect of invention]
Chemistry hydraulic control valve according to the present invention and the substrate board treatment for having it, the displacement that can be improved chemical liquids are special
Property.
Detailed description of the invention
Fig. 1 is the schematic configuration diagram of the substrate board treatment of embodiment.
Fig. 2 is the schematic configuration diagram of the chemical hydraulic control valve of embodiment.
Fig. 3 (a) is the cross-sectional view of a pair of of mold on the direction XY, is (b) longitudinal section of a pair of of mold on the direction XZ
Figure.
Fig. 4 is the schematic configuration diagram of the chemical hydraulic control valve of change case.
Fig. 5 (a), (b) are the schematic configuration diagrams of the chemical hydraulic control valve of change case.
Fig. 6 (a), (b) are the schematic configuration diagrams of the chemical hydraulic control valve of change case.
Fig. 7 is the schematic configuration diagram of previous chemical hydraulic control valve.
Specific embodiment
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.Fig. 1 is the outline of the substrate board treatment of embodiment
Constitute figure.Fig. 2 is the schematic configuration diagram of the chemical hydraulic control valve of embodiment.
The composition > of < substrate board treatment 1
Referring to Fig.1.Substrate board treatment 1 has nozzle 2 and keeps rotating part 3.Nozzle 2 is protected to by holding rotating part 3
The substrate W held sprays chemical liquids.Chemical liquids are, for example, anti-corrosion liquid, anti-reflective film formation coating fluid, diluent equal solvent, pure water
(DIW) flushing liquors, developer solution or the etching solution such as.
It keeps rotating part 3 to keep substrate W and rotates kept substrate W.Keep rotating part 3 have rotary chuck 4 with
Rotary driving part 5.Rotary chuck 4 is configured to rotate around rotary shaft AX.Rotary chuck 4 for example passes through vacuum suction substrate W
The back side and with approximate horizontal posture keep substrate W.On the other hand, rotary driving part 5 carries out making rotary chuck 4 around rotary shaft AX
The driving of rotation.Rotary driving part 5 is including electric motor etc..
In addition, substrate board treatment 1 has chemical liquids supply source 7, chemical liquids piping 8a, 8b, pump P and chemical hydraulic control valve
9.Slot or bottle of the chemical liquids supply source 7 for example including storage chemical liquids.One end of chemical liquids piping 8a, 8b are connected to chemical liquids confession
To source 7, the other end is connected to nozzle 2.
Chemical liquids piping 8a between chemical liquids supply source 7 and nozzle 2 is equipped with pump P.Change between pump P and nozzle 2
It learns liquid piping 8a, 8b and is equipped with chemical hydraulic control valve 9.Pump P is the mechanism for conveying chemical liquids.Chemical hydraulic control valve 9 is adjusted from nozzle 2
The flow of the chemical liquids of ejection, and spray chemical liquids from nozzle 2, it sprays chemical liquids and stops.Chemical hydraulic control valve 9 it is detailed
Situation be explained below.In addition it is also possible in chemical liquids piping 8a, 8b setting such as foreign matter removal filter and for preventing
Liquid drippage suck back valve at least any one.
Substrate board treatment 1 has 1 or 2 or more control unit 11 and operation portion 13.Control unit 11 has center fortune
It calculates processing unit (CPU).Control unit 11 controls each composition of substrate board treatment 1 and chemical hydraulic control valve 9.Operation portion
13 have input unit, display unit and storage unit.Storage unit includes ROM (Read-only Memory, read-only memory), RAM
(Random Access Memory, random access memory) and hard disk etc..Store each of such as processing substrate in storage unit
Kind condition.
The composition > of < chemistry hydraulic control valve 9
Referring to Fig. 2.It is mobile that chemical hydraulic control valve 9 has single flow path block 21, needle mobile mechanism 23 and opening and closing valve body
Mechanism 25.
Flow path block 21 is formed such as resins such as fluororesin by PFA with thermoplasticity and melt fluidity.Flow path block
21 can also be formed by fluororesin such as PTFE (polytetrafluoroethylene, polytetrafluoroethylene (PTFE)).
In addition, flow path block 21 is preferably formed by PFA.If forming flow path block 21, flow path by injection molding with PFA
It the surface of block 21 can be by the Surface mulch as hard layer (film) more internal than it.If chemical liquids penetrate into the interior of flow path block 21
Portion, then result has the worry for drawing dirt from the inside of flow path block 21.But since surface layer can prevent the infiltration of chemical liquids,
So the worry that the degree of purity for being able to suppress chemical liquids is deteriorated.
Flow path block 21 has the 1st outer wall (face) 21a and the 2nd outer wall (face) 21b.2nd outer wall 21b is to be in the 1st outer wall 21a
The face of approximate right angle.Flow adjustment valve chamber 27 is equipped in the 1st outer wall (outer surface) 21a of flow path block 21.In flow path block 21
2nd outer wall (outer surface) 21b is equipped with opening and closing valve chamber 29.Flow adjustment is with valve chamber 27 with a part recess of the 1st outer wall 21a
Mode is formed.That is, flow adjustment valve chamber 27 is concave to be formed in the 1st outer wall 21a.Opening and closing is with valve chamber 29 with outside the 2nd
The mode of a part recess of wall 21b is formed.It is formed in outside the 2nd of flow path block 21 that is, opening and closing valve chamber 29 is concave
Wall 21b.
Intermediate flow passage 31, the 1st flow path 33 and the 2nd flow path 35 are formed in the inside of flow path block 21.Intermediate flow passage the 31, the 1st
Flow path 33 and the 2nd flow path 35 are respectively formed as linearly.Intermediate flow passage 31 so that flow adjustment with valve chamber 27 and opening and closing valve chamber
The mode connected between 29 is formed.In addition, intermediate flow passage 31 is formed in a manner of extending with the 2nd outer wall 21b in approximate right angle.
One end of 1st flow path 33 adjusts with flow and is connect with valve chamber 27.The other end of 1st flow path 33 with as flow path block 21
Outside be equipped with pump P chemical liquids be piped 8a connection.One end of 2nd flow path 35 is connect with opening and closing with valve chamber 29.2nd flow path 35
The chemical liquids piping 8b equipped with nozzle 2 of the other end and the outside as flow path block 21 connect.That is, the 2nd flow path 35
Nozzle 2 is connected to via chemical liquids piping 8b.
1st flow path 33 and the 2nd flow path 35 are formed in a manner of extending at right angles relative to intermediate flow passage 31 respectively.In addition,
1st flow path 33 is parallel with the 2nd flow path 35.Moreover, in the 1st flow path 33 with to connect flow adjustment with the part of valve chamber 27 be opposite side
The 1st connector 37, towards in the 2nd flow path 35 with connect opening and closing with the 2nd connector 39 that the part of valve chamber 29 is opposite side
Identical direction opening.That is, with the chemical liquids for passing through the direction of the chemical liquids of the 1st flow path 33 with passing through the 2nd flow path 35
Direction become opposite direction mode form the 1st flow path 33 and the 2nd flow path 35.
Needle mobile mechanism 23 is mounted on flow path block 21.Needle mobile mechanism 23 has needle 41.Needle mobile mechanism 23 is to block stream
Adjustment valve chamber 27 is measured, and the mode for keeping needle 41 mobile to adjust the flow of chemical liquids is constituted.
In addition, flow adjustment valve chamber 27 has the 1st to extend flow path 40a in Fig. 2.1st, which extends flow path 40a setting, exists
Such as inner sidewall other than the bottom of flow adjustment valve chamber 27.By the way that intermediate flow passage 31 is connected to the 1st extension flow path 40a,
And intermediate flow passage 31 is connected to flow adjustment valve chamber 27.In addition, opening and closing valve chamber 29 has the 2nd to extend flow path 40b.2nd
Extend the bottom that opening and closing valve chamber 29 is arranged in flow path 40b.By by the 2nd flow path 35 be connected to the 2nd extension flow path 40b, and incite somebody to action
2nd flow path 35 is connected to opening and closing valve chamber 29.
Needle mobile mechanism 23 is also equipped with cover 43, electric motor 45 and switching mechanism 47 in addition to having needle 41.Needle 41 is matched
It sets in flow adjustment valve chamber 27.In addition, needle 41 is with the side with 49 opposite direction of opening portion that flow adjustment valve chamber 27 is arranged in
Formula configuration.Opening portion 49 is formed as round.Opening portion 49 is connected to the 1st flow path 33.The front end 41a of needle 41 is formed as circular cone
Shape.The coniform front end 41a opening 49 of needle 41.That is, by making 41 transverse shifting of needle (X-direction is mobile)
To adjust the gap of coniform front end 41a and opening portion 49 (referring to Fig. 2).Adjustment flows through the chemical liquids in the gap as a result,
Flow.Cover 43 is constituted in a manner of through needle 41.Cover 43 blocks flow adjustment valve chamber 27.
Electric motor 45 drives needle 41.Electric motor 45 is for example including stepper motor or servo motor.In electric motor
In the case that 45 include servo motor, because being equipped with the sensors such as rotary encoder, the cross of needle 41 can be accurately obtained
To amount of movement or position.Switching mechanism 47 is arranged between electric motor 45 and needle 41, and the rotation that electric motor 45 is exported turns
It is changed to the linear movement of needle 41.Switching mechanism 47 is, for example, to constitute with helical axis and guide portion.
Opening and closing valve body mobile mechanism 25 is mounted on flow path block 21.Opening and closing has diaphragm 51 with valve body mobile mechanism 25.It opens
The side for closing with valve body mobile mechanism 25 to block opening and closing valve chamber 29, and keeping diaphragm 51 mobile to be opened and closed the 2nd flow path 35
Formula is constituted.Diaphragm 51 is equivalent to opening and closing valve body of the invention.
Opening and closing valve body mobile mechanism 25 is also equipped with cover 53, movable part 55, spaced walls in addition to having diaphragm 51
57, movable partition component 59, spring 61, air-breathing exhaust outlet 63 and adjustment screw 65.
Diaphragm 51 is such as including fluororesin PTFE or PFA.The peripheral part of diaphragm 51 is fixed on the interior of opening and closing valve chamber 29
Side wall.Diaphragm 51 by across diaphragm 51 move up and down direction in a manner of by the interval of following 75 sides of valve seat and 57 side of spaced walls
It opens.The thick wall portion 51a in the center of diaphragm 51 is fixed on movable part 55.Cover 53 blocks opening and closing valve chamber 29.
The inner sidewall of cover 53 is arranged in discoid spaced walls 57.Spaced walls 57 are by 59 side of movable partition component and diaphragm
51 sides separate.Movable part 55 is inserted into the central portion of spaced walls 57.Movable part 55 can be carried out relative to spaced walls 57
Sliding.Movable partition component 59 is fixed on the movable part 55 of the opposite side of diaphragm 51.Movable partition component 59 can be relative to
The inner sidewall of cover 53 is slided.Movable partition component 59 is spaced apart 61 side of spring and 57 side of spaced walls.Movable part
55 are sealed with the contact portion and movable partition component 59 and the contact portion of the inner sidewall of cover 53 of spaced walls 57.
Spring 61 configures between the roof 53a and movable partition component 59 of cover 53.Spring 61 is with always in downward direction
The mode of (direction existing for diaphragm 51) pressing is arranged.Air-breathing exhaust outlet 63 is the movable partition for being in and out of gas in cover 53
The opening in the space between component 59 and spaced walls 57.Gas pipe 67 makes the gas supply sources such as the piping in storage cylinder or factory
69 connect with air-breathing exhaust outlet 63.Such as three-way valve 71 is equipped in gas pipe 67.Three-way valve 71 is optionally switched from gas
Supply source 69 is discharged out of cover 53 to supply gas in cover 53 and by gas.
Adjusting screw 65 has male thread 65a.Male thread 65a and the mother being arranged near the roof 53a of cover 53
Screw thread 53b is constituted in a manner of engaging.Adjustment screw 65 is separated with movable partition component 59.Pass through the position of male thread 65a
It is mobile come the upper direction of the thick wall portion 51a that limits movable partition component 59, movable part 55 and diaphragm 51 etc..In addition, opening portion
73 are connected to the 2nd flow path 35.Valve seat 75 is arranged in around opening portion 73, accepts the thick wall portion 51a of diaphragm 51.
The manufacturing method > of < chemistry hydraulic control valve 9
Next, being illustrated to an example of the manufacturing method of chemical hydraulic control valve 9.Fig. 3 (a) is a pair on the direction XY
The cross-sectional view of mold.Fig. 3 (b) is the longitudinal section of a pair of of mold on the direction XZ.In addition, Fig. 3 (b) is in Fig. 3 (a)
1 protruding portion 87 and the longitudinal section of 90 part of the 2nd pin member.
[step S01] prepares the step of a pair of of mold 81,82
Prepare a pair of of mold 81,82.If a pair of of mold 81,82 is oppositely disposed, formed in a pair of of mold 81,82
Inner space 83.In Fig. 3 (a), Fig. 3 (b), using the hachure of the bottom right oblique line of thick time interval as inner space 83.It is internal empty
Between 83 be the space for filling up resin.A pair of of mold 81,82 has the 85 and the 2nd inner wall (face) of the 1st inner wall (face) in inner space 83
86.2nd inner wall 86 is the face with the 1st inner wall 85 in approximate right angle.
A pair of of mold 81,82 have for form flow adjustment valve chamber 27 the 1st protruding portion 87, for formed opening and closing use
2nd protruding portion 88 of valve chamber 29 and for forming the 1st linear pin member 89 of intermediate flow passage 31.The setting of 1st protruding portion 87
1st inner wall 85 of the inner space 83 in a pair of of mold 81,82.It is equipped in the 1st protruding portion 87 and extends 40a pairs of flow path with the 1st
The 1st Connection protrusion 87a answered.2nd protruding portion 88 is arranged in the 2nd inner wall 86.It is equipped in the 2nd protruding portion 88 and extends flow path with the 2nd
The corresponding 2nd Connection protrusion 88a of 40b.
1st pin member 89 is in a manner of making to connect between the 1st protruding portion 87 and the 2nd protruding portion 88 along relative to the 2nd inner wall
The 86 direction insertions extended in approximate right angle.1st protruding portion 87 being capable of transversely (X-direction) movement.1st protruding portion 87 is inserted into
The inner space 83 of a pair of of mold 81,82.In addition, as shown in Fig. 3 (a), the 2nd protruding portion 88 and the 1st pin member 89 integrally structure
At.The 2nd protruding portion 88 being integrally formed and the 1st pin member 89 can move in longitudinal direction (Y-direction), be inserted into a pair of of mold
81,82 inner space 83.The front end 89a of 1st pin member 89 is contacted with the 1st Connection protrusion 87a of the 1st protruding portion 87.
In addition, the 2nd protruding portion 88 and the 1st pin member 89 can also and it is non-integral, and constituted in a manner of individually moving.
[step S02] is inserted into the step of the 2nd pin member 90
The 2nd linear pin member 90 is inserted into inner space 83 in a manner of connecting with the 1st protruding portion 87.2nd pin
Component 90 being capable of transversely (X-direction) movement.The front end 90a of 2nd pin member 90 is contacted with the 1st protruding portion 87.2nd pin member
90 be for forming the 1st flow path 33.
[step S03] is inserted into the step of the 3rd pin member 91
The 3rd linear pin member 91 is inserted into inner space 83 in a manner of connecting with the 2nd protruding portion 88.3rd pin
Component 91 being capable of transversely (X-direction) movement.The front end 91a of 3rd pin member 91 and the 2nd Connection protrusion of the 2nd protruding portion 88
88a contact.3rd pin member 91 is for forming the 2nd flow path 35.
[step S04] flows into the step of resin
It is inserted by the 1st protruding portion 87, the 2nd protruding portion 88, the 1st pin member 89, the 2nd pin member 90 and the 3rd pin member 91
After to inner space 83 (namely after step S01~S03), resin (such as PFA) that is heated and melting is made to be flowed into inside
Space 83.The resin of the heating cylinder interior of emission forming machine (not shown) is melted and being heated.That is, flowing into
It is by the fluidized resin of heating to the resin in a pair of of mold 81,82.Moreover, being flowed into a pair of of mould by heating cylinder
The inner space 83 of tool 81,82.
[step S05] unloads the step of flow path block (formed products)
In the resin for being flowed into inner space 83 after cooling and solidifying, the 1st protruding portion is extracted out out of a pair of of mold 81,82
87, the 2nd protruding portion 88, the 1st pin member 89, the 2nd pin member 90 and the 3rd pin member 91.Later, it is unloaded from a pair of of mold 81,82
Resin is as single flow path block 21.It is by making a pair of of mold 81,82 in above-below direction in (Z-direction of Fig. 3 (b)) that this, which is unloaded,
It relatively moves to carry out.In addition, being flowed into the resin of inner space 83 in the inner wall (symbol 85,86 with a pair of of mold 81,82
Deng), the 1st protruding portion 87, the 2nd protruding portion 88, the 1st pin member 89, the 2nd pin member 90 and the 3rd pin member 91 contact part shape
At surface layer.
[step S06] installs the step of needle mobile mechanism and opening and closing are with valve body mobile mechanism
The flow path block 21 unloaded from a pair of of mold 81,82 is carried out for grinding opening portion 49 shown in Fig. 2 and valve seat 75
Surface etc. processing.Then, needle mobile mechanism 23 and opening and closing are installed to flow path block 21 with parts such as valve body mobile mechanisms 25.
In addition, a pair of of the 81,82, the 1st protruding portion the 87, the 2nd of mold is prominent according to the construction of the flow paths such as following change case block 21
Portion 88 etc. can also be constituted in the following way.For example, the 1st protruding portion 87 can not also be moved relative to mold 81 and is fixed on
1st inner wall 85 of mold 81.Similarly, the 2nd protruding portion 88 can not also move relative to mold 82 and be fixed on mold 82
2nd inner wall 86.In addition, corresponding to the composition of following Fig. 4, the 2nd inner wall 86 is also possible to the face opposite with the 1st inner wall 85.
In addition, V word flow path 205 shown in Fig. 7 is by after its formation from flow in previous chemical hydraulic control valve 9
Adjustment valve chamber and opening and closing are cut with the two directions of valve chamber to be formed.That is, being limited by mold, shown in Fig. 7
V word flow path 205 can not be formed as linear.In addition, for example in the case where flow path block 21 is formed by PFA, in V word flow path
205 parts can prune the surface layer of PFA, thus have chemical liquids penetrate into flow path block 21 (PFA) inside worry.According to this implementation
The manufacturing method of the chemical hydraulic control valve 9 of example just can form linear intermediate flow passage 31 without cutting.
The movement > of < substrate board treatment and chemical hydraulic control valve
Then, the movement of substrate board treatment 1 and chemical hydraulic control valve 9 is illustrated.
Referring to Fig.1.Substrate W is transported to and keeps on rotating part 3 by transport mechanism (not shown).Rotating part 3 is kept to pass through suction
The back side of attached substrate W keeps substrate W.Later, rotating part 3 is kept to rotate kept substrate W.Nozzle 2 passes through not shown
Mobile mechanism be moved to the top of substrate W.Control unit 11 sprays chemical liquids from nozzle 2 by operating chemical hydraulic control valve 9
Out on substrate W.
In chemical hydraulic control valve 9 shown in Fig. 2, opening and closing is illustrated with the movement of valve body mobile mechanism 25 first.
The thick wall portion 51a of diaphragm 51 is pressed against the opening that opening and closing valve chamber 29 is arranged in by the elastic force (recuperability) of spring 61
Valve seat 75 (the thick wall portion 51a referring to represented by the dotted line of Fig. 2) around portion 73.The state is not make chemical liquids from opening and closing valve
Room 29 is passed to the closed state of the 2nd flow path 35.When being in off state, chemical liquids are not sprayed from nozzle 2.
By operating three-way valve 71, via gas pipe 67 and air-breathing exhaust outlet 63, from gas supply source 69 to cover 53
Space between interior movable partition component 59 and spaced walls 57 conveys gas.Movable partition component 59 repels spring 61 as a result,
Elastic force and rise, therewith, the thick wall portion 51a of movable part 55 and diaphragm 51 rises the (thickness referring to represented by the solid line of Fig. 2
Wall portion 51a).The state is the opening state for making chemical liquids circulate.When being in an open state, chemical liquids are sprayed from nozzle 2.
Herein, the flowing of chemical liquids when becoming opening state is specifically described.Pump P shown in FIG. 1 is by chemical liquids
Chemically liquid supply source 7 is piped the 1st flow path 33 that 8a is transported to chemical hydraulic control valve 9 by chemical liquids.It is transported to shown in Fig. 2
The chemical liquids of 1st flow path 33 are transported to flow adjustment valve chamber by the front end 41a of needle 41 and the gap of opening portion 49
27.Later, chemical liquids are transported to opening and closing valve chamber 29 from flow adjustment valve chamber 27 by intermediate flow passage 31.In addition, because
Intermediate flow passage 31 is configured to linearly, so can more be smoothly transported chemistry compared with V word flow path 205 shown in Fig. 7 etc.
Liquid.
Later, chemical liquids are transported to chemistry from opening and closing valve chamber 29 by the opening portion 73 and the 2nd flow path 35 of valve seat 75
Liquid is piped 8b.The chemical liquids for being transported to chemical liquids piping 8b are transported to nozzle 2 and spray chemical liquids from nozzle 2.
In addition, being illustrated to the movement of needle mobile mechanism 23.Needle mobile mechanism 23 is by adjusting the front end of needle 41
The gap of 41a and opening portion 49, to adjust the flow of the chemical liquids in the flow paths blocks 21 such as the 1st flow path 33.Needle 41 passes through electronic horse
Rotation driving up to 45 is moved.Switching mechanism 47 is by the linear movement for being converted to needle 41 of electric motor 45.41 edge of needle
Laterally (X-direction) is mobile.
After spraying chemical liquids, control unit 11 is stopped by operation three-way valve 71 from 69 supply gas of gas supply source, and
And the gas in cover 53 shown in Fig. 2 is passed through into the discharge such as air-breathing exhaust outlet 63.It as a result, will be every using the elastic force of spring 61
The thick wall portion 51a of film 51 is pushed, and thick wall portion 51a is pressed against valve seat 75 (closed state).When being in off state, not from spray
Mouth 2 sprays chemical liquids.
After ejection of the chemical liquids from nozzle 2, nozzle 2 is kept out of the way outside substrate above substrate W.Keep rotating part
3 make kept substrate W stop rotating, and release the holding of substrate W later.Transport mechanism (not shown) makes to keep on rotating part 3
Substrate W be moved to other devices, mounting portion or carrier etc..
According to the present embodiment, flow path block 21 has the 1st outer wall 21a and as the 2nd of the face rectangular with the 1st outer wall 21a
Outer wall 21b.The flow adjustment of configuration pin 41 is formed in a manner of the 1st outer wall 21a of flow path block 21 recess with valve chamber 27.Another party
Face, the opening and closing for configuring diaphragm 51 are formed in a manner of the 2nd outer wall 21b recess with valve chamber 29.Flow is adjusted and is used by intermediate flow passage 31
Valve chamber 27 is connect with opening and closing with valve chamber 29, and intermediate flow passage 31 is extended at right angles relative to the 2nd outer wall 21b.Pass through such composition, energy
It is enough that intermediate flow passage 31 is formed as linear.Therefore, it can be improved the worry for causing chemical liquids to deteriorate because of V word flow path etc.
The displacement characteristic of chemical liquids.In addition, displacement characteristic is so that new chemical liquids are flowed into the 1st connector 37, and squeeze out originally
Chemical liquids and being allowed to reach the characteristic indicated the time of the 2nd connector 39.
In addition, the 1st flow path 33 and the 2nd flow path 35 are respectively linear, and extended at right angles relative to intermediate flow passage 31.?
When resin being made to be flowed into a pair of of mold 81,82 and form flow path block 21, one can will be inserted into order to form intermediate flow passage 31
To in mold 81,82 the 1st pin member 89, be inserted into form the 1st flow path 33 and the 2nd flow path 35 a pair of of mold 81,
The 2nd pin member 90 and 91 each of the 3rd pin member in 82 at right angles configure.Therefore, compared to the 1st pin member 89 and the 2nd pin portion
The case where part 90 and 91 each of the 3rd pin member obliquely configure (and on-right angle) is able to easily form intermediate flow passage the 31, the 1st
Flow path 33 and the 2nd flow path 35.
In addition, the 1st flow path 33 is parallel with the 2nd flow path 35.In 1st flow path 33 with the part that connect flow adjustment valve chamber 27
For the 1st connector 37 of opposite side, towards in the 2nd flow path 35 with connect opening and closing with the 2nd that the part of valve chamber 29 is opposite side
The identical direction of connector 39 opening.When making resin be flowed into a pair of of mold 81,82 and forming flow path block 21, can make in order to
It forms the 1st flow path 33 and the 2nd flow path 35 and is inserted into the 2nd pin member 90 in a pair of of mold 81,82 and the 3rd pin member 91 towards phase
Same direction is mobile.Therefore, compared to the 2nd pin member 90 be inserted into mold direction from the 3rd pin member 91 direction it is different
The case where, it is able to easily form the 1st flow path 33 and the 2nd flow path 35.
The present invention is not limited to the embodiment, can implement to change as described below.
(1) in the described embodiment, the 2nd outer wall 21b equipped with opening and closing valve chamber 29 is and is equipped with flow adjustment valve chamber
27 the 1st outer wall 21a rectangular face.About this point, the 2nd outer wall 21b can also be illustrated in figure 4 and the 1st 21a pairs of outer wall
To and with the 1st outer wall 21a substantially parallel face.That is, the 2nd outer wall (face) 21b setting across flow path block 21 and with
1st outer wall (face) 21a opposite side.In addition, the 2nd outer wall 21b is substantially parallel relative to the 1st outer wall 21a.
Flow adjustment is formed in a manner of a part recess of the 1st outer wall 21a of flow path block 21 with valve chamber 27.Valve is used in opening and closing
Room 29 is formed in a manner of a part recess of the 2nd outer wall 21b of flow path block 21.As shown in figure 4, flow adjustment with valve chamber 27 with
It is configured with opening and closing with the opposite mode of valve chamber 29.
Linear intermediate flow passage 31 is formed in a manner of connecting opening and closing with flow adjustment valve chamber 27 with valve chamber 29.Separately
Outside, intermediate flow passage 31 is extended at right angles relative to the 1st outer wall 21a and the 2nd outer wall 21b.1st flow path 33 and the 2nd flow path 35 difference
It is extended at right angles relative to intermediate flow passage 31.1st flow path 33 is connected to flow adjustment valve chamber 27.On the other hand, the 2nd flow path 35
It is connected to opening and closing valve chamber 29.
Diaphragm 51 shown in Fig. 4 is mobile along longitudinal direction (Y-direction).Moreover, the needle 41 of this change case also moves longitudinally.Needle 41
Front end 41a pass through the opening portion 49 of the flow adjustment coupling part of valve chamber 27 and intermediate flow passage 31.
According to this change case, flow path block 21 have the 1st outer wall 21a and as it is opposite with the 1st outer wall 21a and with the 1st outside
The 2nd outer wall 21b in wall 21a parallel face.The flow adjustment of configuration pin 41 is recessed with the 1st outer wall 21a of flow path block 21 with valve chamber 27
Sunken mode is formed.On the other hand, the opening and closing for configuring diaphragm 51 is formed in a manner of the 2nd outer wall 21b recess with valve chamber 29.It is intermediate
Flow path 31 connects flow adjustment valve chamber 27 and opening and closing valve chamber 29, intermediate flow passage 31 relative to the 1st outer wall 21a and the 2nd outside
Wall 21b is extended at right angles.By such composition, intermediate flow passage 31 can be formed as linear.Therefore, it can be improved because of V
Word flow path etc. and cause chemical liquids deteriorate worry chemical liquids displacement characteristic.
(2) in the described embodiment, such as shown in Fig. 2, intermediate flow passage 31 with be equipped with opening and closing valve chamber 29 the 2nd outer wall
21b is formed in such a way that approximate right angle extends.About this point, intermediate flow passage 31 can also as shown in Fig. 5 (a) with be equipped with stream
The 1st outer wall 21a for measuring adjustment valve chamber 27 is formed in such a way that approximate right angle extends.
(3) in the embodiment and change case (1), as shown in Figures 2 and 4, the opening of the bottom of opening and closing valve chamber 29
Portion 73 is connected to the 2nd flow path 35.About this point, the opening portion 73 of the bottom of opening and closing valve chamber 29 can also be as shown in Fig. 5 (b)
It is connected between flow path 31.
(4) in the embodiment and each change case, as shown in Figures 2 and 4, in the bottom of flow adjustment valve chamber 27
Opening portion 49 is connected to the intermediate flow passage 31 extended along the moving direction of needle 41 or the 1st flow path 33.It, can also be with about this aspect
As shown in Fig. 5 (b), in the opening portion 49 of the flow adjustment bottom of valve chamber 27, extend flow path 40c connection edge and needle via the 3rd
The intermediate flow passage 31 (or the 1st flow path 33) that the orthogonal direction of 41 moving direction extends.3rd extension flow path 40c is from opening portion
49 extend to the moving direction of needle 41, connect with intermediate flow passage 31.
In addition, in Fig. 5 (a), Fig. 5 (b) and following Fig. 6 (a), Fig. 6 (b), by needle mobile mechanism 23 and opening and closing valve
Body mobile mechanism 25, which simplifies, to be indicated.
(5) in the embodiment and each change case, needle mobile mechanism 23 is configured to, and has electric motor 45 and interpreter
Structure 47, and the linear movement for being converted to needle 41 for being exported electric motor 45 by switching mechanism 47.But it is and unlimited
In this.Also it is configured to, the handle or handle that setting operating personnel rotates manually replace electric motor 45, by handle or handle
The linear movement for being converted to needle 41.
(6) in the embodiment and each change case, such as shown in Fig. 2 and Fig. 4, the 1st connection of one end of the 1st flow path 33
37 direction directions identical with the 2nd connector 39 of one end of the 2nd flow path 35 of mouth.That is, the 1st connector 37 and the 2nd connects
Interface 39 is open towards right in Fig. 2 and Fig. 4.About this point, the 1st connector 37 can also be such as Fig. 6 (a) and Fig. 6 (b)
The shown direction direction opening opposite with the 2nd connector 39.That is, in Fig. 6 (a) and Fig. 6 (b), 37 court of the 1st connector
It is open to the left, the 2nd connector 39 is open towards right.
In addition, in Fig. 6 (a) and Fig. 6 (b), the 1st connector 37 towards the direction opposite with the 2nd connector 39, that is,
It says, inverts 180 degree opening around intermediate flow passage 31 relative to the 2nd connector 39.About this point, the 1st connector 37 can also phase
2nd connector 39 is for example opened towards 90 ° of direction (direction namely in addition to 0 degree and 180 degree) around intermediate flow passage 31
Mouthful.
(7) in the embodiment and each change case, opening and closing passes through gas-powered diaphragm 51 with valve body mobile mechanism 25.It closes
In this point, opening and closing valve body mobile mechanism 25 can also be with needle mobile mechanism 23 likewise by electrical motor driven diaphragm
51.Linear movement is converted to by switching mechanism using the rotation that electric motor carries out.As a result, by the thick wall portion 51a of diaphragm 51
It is pressed against valve seat 75 or leaves thick wall portion 51a from valve seat 75.
[explanation of symbol]
1 substrate board treatment
2 nozzles
3 keep rotating part
The piping of 8a, 8b chemical liquids
9 chemical hydraulic control valves
11 control units
21 single flow path blocks
The 1st outer wall of 21a
The 2nd outer wall of 21b
23 needle mobile mechanisms
25 opening and closing valve body mobile mechanisms
Valve chamber is used in the adjustment of 27 flows
Valve chamber is used in 29 opening and closings
31 intermediate flow passages
33 the 1st flow paths
35 the 2nd flow paths
37 the 1st connectors
39 the 2nd connectors
41 needles
51 diaphragms
Claims (7)
1. a kind of chemistry hydraulic control valve, it is characterised in that have:
Single flow path block has the 1st outer wall and the 2nd outer wall as the face rectangular with the 1st outer wall；
Flow adjustment valve chamber, is formed in a manner of the 1st outer wall depression；
Opening and closing valve chamber, is formed in a manner of the 2nd outer wall depression；
Intermediate flow passage is formed in the inside of the flow path block, linearly, and makes the flow adjustment valve chamber and the opening and closing
It is connected between valve chamber, is extended at right angles relative to either one or two of the 1st outer wall and described 2nd outer wall；
1st flow path is formed in the inside of the flow path block, connect with the flow adjustment with valve chamber；
2nd flow path is formed in the inside of the flow path block, connect with the opening and closing with valve chamber；
Needle mobile mechanism has configuration in the indoor needle of flow adjustment valve, blocks the flow adjustment valve chamber, and
Make the needle mobile in order to adjust the flow of chemical liquids；And
Opening and closing valve body mobile mechanism has configuration in the indoor opening and closing valve body of the opening and closing valve, blocks the opening and closing and use
Valve chamber, and keep the opening and closing valve body mobile to carry out the stopping of the supply of chemical liquids and its supply.
2. a kind of chemistry hydraulic control valve, it is characterised in that have:
Single flow path block, with the 1st outer wall and as face opposite and with the 1st outside wall parallel with the 1st outer wall
The 2nd outer wall；
Flow adjustment valve chamber, is formed in a manner of the 1st outer wall depression；
Opening and closing valve chamber, is formed in a manner of the 2nd outer wall depression；
Intermediate flow passage is formed in the inside of the flow path block, linearly, and makes the flow adjustment valve chamber and the opening and closing
It is connected between valve chamber, is extended at right angles relative to the 1st outer wall and the 2nd outer wall；
1st flow path is formed in the inside of the flow path block, connect with the flow adjustment with valve chamber；
2nd flow path is formed in the inside of the flow path block, connect with the opening and closing with valve chamber；
Needle mobile mechanism has configuration in the indoor needle of flow adjustment valve, blocks the flow adjustment valve chamber, and
Make the needle mobile in order to adjust the flow of chemical liquids；And
Opening and closing valve body mobile mechanism has configuration in the indoor opening and closing valve body of the opening and closing valve, blocks the opening and closing and use
Valve chamber, and keep the opening and closing valve body mobile to carry out the stopping of the supply of chemical liquids and its supply.
3. chemistry hydraulic control valve according to claim 1 or 2, it is characterised in that:
1st flow path and the 2nd flow path are respectively linear, and extend at right angles relative to the intermediate flow passage.
4. chemistry hydraulic control valve according to claim 1 or 2, it is characterised in that:
1st flow path is parallel with the 2nd flow path,
Be the 1st connector of opposite side with the part for connecting the flow adjustment valve chamber in 1st flow path, towards with it is described
Direction opening identical with the 2nd connector that the part for connecting opening and closing valve chamber is opposite side in 2nd flow path.
5. chemistry hydraulic control valve according to claim 1 or 2, it is characterised in that:
The flow path block is formed by PFA.
6. a kind of substrate board treatment, it is characterised in that have:
Rotating part is kept, keeps substrate, and rotate kept substrate；
Nozzle sprays chemical liquids to the substrate for keeping rotating part is maintained at；
Chemical liquids piping, is connected to the nozzle；And
Chemical hydraulic control valve, adjusts the flow of the chemical liquids sprayed from the nozzle, and sprays chemical liquids from the nozzle, makes
Chemical liquids, which spray, to be stopped；
The chemistry hydraulic control valve has: single flow path block, with the 1st outer wall and as rectangular with the 1st outer wall
2nd outer wall in face；
Flow adjustment valve chamber, is formed in a manner of the 1st outer wall depression；
Opening and closing valve chamber, is formed in a manner of the 2nd outer wall depression；
Intermediate flow passage is formed in the inside of the flow path block, linearly, and makes the flow adjustment valve chamber and the opening and closing
It is connected between valve chamber, is extended at right angles relative to either one or two of the 1st outer wall and described 2nd outer wall；
1st flow path is formed in the inside of the flow path block, connect with the flow adjustment with valve chamber；
2nd flow path is formed in the inside of the flow path block, and connect with the opening and closing with valve chamber, and via the chemical liquids
Piping is connected to the nozzle；
Needle mobile mechanism has configuration in the indoor needle of flow adjustment valve, blocks the flow adjustment valve chamber, and
Make the needle mobile in order to adjust the flow of chemical liquids；And
Opening and closing valve body mobile mechanism has configuration in the indoor opening and closing valve body of the opening and closing valve, blocks the opening and closing and use
Valve chamber, and keep the opening and closing valve body mobile to carry out the stopping of the supply of chemical liquids and its supply.
7. a kind of substrate board treatment, it is characterised in that have:
Rotating part is kept, keeps substrate, and rotate kept substrate；
Nozzle sprays chemical liquids to the substrate for keeping rotating part is maintained at；
Chemical liquids piping, is connected to the nozzle；And
Chemical hydraulic control valve, adjusts the flow of the chemical liquids sprayed from the nozzle, and sprays chemical liquids from the nozzle, makes
Chemical liquids, which spray, to be stopped；
The chemistry hydraulic control valve has: single flow path block, there is the 1st outer wall and as opposite with the 1st outer wall and
With the 2nd outer wall in the face of the 1st outside wall parallel；
Flow adjustment valve chamber, is formed in a manner of the 1st outer wall depression；
Opening and closing valve chamber, is formed in a manner of the 2nd outer wall depression；
Intermediate flow passage is formed in the inside of the flow path block, linearly, and makes the flow adjustment valve chamber and the opening and closing
It is connected between valve chamber, is extended at right angles relative to the 1st outer wall and the 2nd outer wall；
1st flow path is formed in the inside of the flow path block, connect with the flow adjustment with valve chamber；
2nd flow path is formed in the inside of the flow path block, and connect with the opening and closing with valve chamber, and via the chemical liquids
Piping is connected to the nozzle；
Needle mobile mechanism has configuration in the indoor needle of flow adjustment valve, blocks the flow adjustment valve chamber, and
Make the needle mobile in order to adjust the flow of chemical liquids；And
Opening and closing valve body mobile mechanism has configuration in the indoor opening and closing valve body of the opening and closing valve, blocks the opening and closing and use
Valve chamber, and keep the opening and closing valve body mobile to carry out the stopping of the supply of chemical liquids and its supply.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-040760 | 2018-03-07 | ||
| JP2018040760A JP7029314B2 (en) | 2018-03-07 | 2018-03-07 | Chemical control valve and substrate processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110246776A true CN110246776A (en) | 2019-09-17 |
| CN110246776B CN110246776B (en) | 2023-02-17 |
Family
ID=67882955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910117565.0A Active CN110246776B (en) | 2018-03-07 | 2019-02-15 | Chemical liquid control valve and substrate processing apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7029314B2 (en) |
| KR (1) | KR102225758B1 (en) |
| CN (1) | CN110246776B (en) |
| TW (1) | TWI732178B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102326247B1 (en) * | 2020-02-21 | 2021-11-12 | 한국기술교육대학교 산학협력단 | Exhaust control apparatus |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI732178B (en) | 2021-07-01 |
| CN110246776B (en) | 2023-02-17 |
| JP7029314B2 (en) | 2022-03-03 |
| TW201938933A (en) | 2019-10-01 |
| JP2019157888A (en) | 2019-09-19 |
| KR102225758B1 (en) | 2021-03-09 |
| KR20190106707A (en) | 2019-09-18 |
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