CN103801466B - The wet processing process nozzle of the uniform flow of a kind of low impulsive force - Google Patents
The wet processing process nozzle of the uniform flow of a kind of low impulsive force Download PDFInfo
- Publication number
- CN103801466B CN103801466B CN201210462363.8A CN201210462363A CN103801466B CN 103801466 B CN103801466 B CN 103801466B CN 201210462363 A CN201210462363 A CN 201210462363A CN 103801466 B CN103801466 B CN 103801466B
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- China
- Prior art keywords
- nozzle
- groove
- liquid
- body frame
- nozzle body
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
Abstract
The present invention relates to IC manufacturing monolithic wet processing apparatus, the specifically wet processing process nozzle of the uniform flow of a kind of low impulsive force, comprise liquid medicine box cover plate, line style nozzle template, liquid distributing pore plate, nozzle body frame, division board and temp. controlling box pressing plate, liquid distributing pore plate and division board are arranged on the both sides of nozzle body frame respectively, form spray liquid between division board and nozzle body frame and disperse the cavity that reduces pressure, between temp. controlling box pressing plate and nozzle body frame, form spray liquid temperature control cavity; Be respectively equipped with the spray liquid line style be connected between liquid distributing pore plate with nozzle template and in liquid distributing pore plate to distribute equal flow control amount cavity; Nozzle body frame is respectively equipped with feed pathway and grooved hole, the both sides in the grooved hole spray liquid line style be communicated with respectively in spray liquid dispersion decompression cavity and liquid distributing pore plate distributes equal flow control amount cavity.Spray liquid temperature of the present invention, uniform flow are consistent, and surge is low and even, realizes meticulous wet chemical process wafer object.
Description
Technical field
The present invention relates to IC manufacturing monolithic wet processing apparatus, specifically the wet processing process nozzle of the uniform flow of a kind of low impulsive force.
Background technology
At present, in IC manufacturing monolithic wet processing apparatus, the technique nozzle sprayed is varied, all wet method spraying functions are completed jointly by technique nozzle system, nozzle servicing unit system, slide glass rotary system, and wherein technique nozzle is the main factor affecting wet method spray processing.
The process feature of monolithic wet processing process module is that slide holder loaded with wafers rotates according to set program, and the technique nozzle of spray liquid sprays according to set program, and the working cavity surrounding of its processing operation is closed.For ensureing that pending wafer surface is subject to same wet processing chemical treatment everywhere, when particularly IC manufacturing enters and produces nanoscaled process product, wafer surface must receive the spraying liquid of same surge, same flow, same temperature simultaneously, could realize the chemical reaction result uniformity after wafer surface wet-treating everywhere.
Realize above-mentioned chemical reaction result, the technique nozzle profile selected in industry is rectangle, and spray liquid will be sprinkled upon wafer simultaneously, coordinates the spinning movement of scanning motion or the wafer sprayed, realizes uniform wet processing process.Different modular construction, different spray pattern constitute the technique nozzle of multiple pattern.
Summary of the invention
The object of the present invention is to provide the wet processing process nozzle of the uniform flow of a kind of low impulsive force.
The object of the invention is to be achieved through the following technical solutions:
The present invention includes liquid medicine box cover plate, line style nozzle template, liquid distributing pore plate, nozzle body frame, division board and temp. controlling box pressing plate, its herb liquid distributing pore plate and division board are arranged on the both sides of nozzle body frame respectively, form spray liquid between division board and nozzle body frame and disperse the cavity that reduces pressure, described division board outer cover temp. controlling box pressing plate, forms spray liquid temperature control cavity between this temp. controlling box pressing plate and nozzle body frame; The outside of described liquid distributing pore plate installs line style nozzle type plate and liquid medicine box cover plate successively, is respectively equipped with the spray liquid line style be connected and distributes equal flow control amount cavity between liquid distributing pore plate with nozzle template and in liquid distributing pore plate; Described nozzle body frame is respectively equipped with feed pathway and grooved hole, this feed pathway is arranged along the length direction of nozzle body frame, one end is connected with spray liquid source, the other end and the described spray liquid cavity that disperses to reduce pressure is communicated with, and the both sides spray liquid line style be communicated with respectively in spray liquid dispersion decompression cavity and liquid distributing pore plate in described grooved hole distributes equal flow control amount cavity.
Wherein: described nozzle body frame has steam vent, this steam vent is connected by the nozzle body frame exhaust passage offered, inside and the described spray liquid cavity that disperses to reduce pressure;
Described nozzle body frame side is along its length provided with the 3rd groove of accommodating division board, opposite side is provided with the 4th groove of accommodating liquid medicine box cover plate, line style nozzle template and liquid distributing pore plate, nozzle body frame between described 3rd groove and the 4th groove is evenly equipped with multiple grooved hole along its length, and each grooved hole is communicated in the 3rd groove and the 4th groove of its both sides respectively; The other end of described feed pathway to a lateral buckling of accommodating division board, and is connected with the described spray liquid cavity that disperses to reduce pressure;
The inner side of described temp. controlling box pressing plate is divided into the first groove setting up and down and the second groove by divider, wherein one end of the first groove and the second groove is connected with the import of cooling water and outlet respectively, and the other end of the first groove and the second groove is connected with each other logical; Described division board is triangle, is contained in triangle the 3rd groove offered nozzle body frame side;
The described liquid distributing pore plate side relative with line style nozzle template is provided with the 5th groove of indent, and the top of the 5th groove is evenly equipped with multiple dispensing orifice along liquid distributing pore plate length direction, and each dispensing orifice is all connected with described grooved hole; The top edge of described 5th groove is wavelike structure; Described line style nozzle template is identical with the shape size of liquid distributing pore plate opposite face; The side that described liquid medicine box cover plate is relative with line style nozzle template is provided with the 6th groove, described line style nozzle template and liquid distributing pore plate are all contained in the 6th groove, and are contained in together with liquid medicine box cover plate in the 4th groove that nozzle body frame opposite side offers.
Advantage of the present invention and good effect are:
1. the liquid of the present invention's sprinkling, can coat on wafer very equably, and surge is little, meets the meticulous wet processing process processing procedure of IC manufacturing, is applicable to the technologies such as nanoscale development, etching, cleaning.
2. the present invention is sprayed onto the uniformity of the every physical index of liquid on wafer, reaches the object of meticulous wet chemical process wafer.
Accompanying drawing explanation
Fig. 1 is one of stereochemical structure explosive view of the present invention;
Fig. 2 is stereochemical structure explosive view two of the present invention;
Fig. 3 is cross section structure schematic diagram of the present invention;
Fig. 4 is the structural front view of nozzle body frame of the present invention;
Fig. 5 is the rearview of Fig. 4;
Fig. 6 is the side view after nozzle body frame of the present invention, liquid distributing pore plate and line style nozzle template connect;
Fig. 7 is the A-A sectional view in Fig. 6;
Fig. 8 is the B-B sectional view in Fig. 6;
Wherein: 1 is liquid medicine box cover plate, 2 is line style nozzle template, 3 is liquid distributing pore plate, 4 is nozzle body frame, 5 is division board, 6 is temp. controlling box pressing plate, 7 is steam vent, 8 is divider, 9 is the first groove, 10 is the second groove, 11 is the 3rd groove, 12 is grooved hole, 13 is exhaust passage, 14 is feed pathway, 15 is the 4th groove, 16 is dispensing orifice, 17 is the 5th groove, 18 is cooling-water duct, 19 is the first through hole, 20 is the second through hole, A is that the first spray liquid line style distributes equal flow control amount cavity, B is that the second spray liquid line style distributes equal flow control amount cavity, C is spray liquid dispersion decompression cavity, D is the first spray liquid temperature control cavity, E is the second spray liquid temperature control cavity.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Fig. 1 ~ 8, the present invention includes the liquid medicine box cover plate 1 be fixed together successively by screw, line style nozzle template 2, liquid distributing pore plate 3, nozzle body frame 4, division board 5 and temp. controlling box pressing plate 6, wherein nozzle body frame 4 side is along its length provided with the 3rd groove 11 of accommodating division board 5, opposite side is provided with accommodating liquid medicine box cover plate 1, 4th groove 15 of line style nozzle template 2 and liquid distributing pore plate 3, division board 5 is triangle, be contained in triangle the 3rd groove 11 offered nozzle body frame 4 side, form spray liquid between division board 5 and nozzle body frame 4 and disperse the cavity C that reduces pressure, nozzle body frame 4 between described 3rd groove 11 and the 4th groove 15 is evenly equipped with multiple grooved hole 12 along its length, and each grooved hole 12 is communicated in the 3rd groove 11 and the 4th groove 15 of its both sides respectively, above each grooved hole 12, the length direction along nozzle body frame 4 is provided with feed pathway 14, and one end of this feed pathway 14 is connected with spray liquid source, and the other end to a lateral buckling of accommodating division board 5, and is connected with the described spray liquid cavity C that disperses to reduce pressure, described nozzle body frame 4 has steam vent 7, the exhaust passage 13 offered by nozzle body frame 4 inside of this steam vent 7 and the described spray liquid cavity C that disperses to reduce pressure is connected, exhaust passage 13 is positioned at the top of feed pathway 14, and the gas in spray liquid can be discharged by steam vent 7 through exhaust passage 13.
Division board 5 is covered with temp. controlling box pressing plate 6, the inner side of temp. controlling box pressing plate 6 is divided into the first groove 9 and the second groove 10 setting up and down by divider 8, wherein one end of the first groove 9 and the second groove 10 is connected with the import of cooling water and outlet respectively, and the other end of the first groove 9 and the second groove 10 is connected with each other logical; Define the first spray liquid temperature control cavity D and the second spray liquid temperature control cavity E between this first groove 9 and the second groove 10 and nozzle body frame 4 and division board 5, these two spray liquid temperature control cavitys are a case type structures.
The side that liquid medicine box cover plate 1 is relative with line style nozzle template 2 is provided with the 6th groove, line style nozzle template 2 and liquid distributing pore plate 3 are all contained in the 6th groove, and are contained in the 4th groove 15 that nozzle body frame 4 opposite side offers together with liquid medicine box cover plate 1; Liquid distributing pore plate 3 side relative with line style nozzle template 2 is provided with the 5th groove 17 of indent, the top of the 5th groove 17 is evenly equipped with multiple dispensing orifice 16 along liquid distributing pore plate 3 length direction, each dispensing orifice 16 is all connected with described grooved hole 12, the top edge of described 5th groove 17 is wavelike structure, the physical dimension of liquid distributing pore plate 3, determines the impulsive force of spray liquid and the uniformity of flow; Line style nozzle template 2 is identical with the shape size of liquid distributing pore plate 3 opposite face, form the first spray liquid line style between liquid distributing pore plate 3 and nozzle template 2 to distribute equal flow control amount cavity A, in liquid distributing pore plate 3, each dispensing orifice 16 then to distribute equal flow control amount cavity B as the second spray liquid line style, these two spray liquid line styles equal flow control amount cavity that distributes is another case type structures, and is interconnected.
Operation principle of the present invention is:
The present invention is two case type structures assemblies, constitute spray liquid line style to distribute equal flow control amount cavity, spray liquid dispersion decompression cavity and spray liquid temperature control cavity three process cavities, spray liquid is distributed after equal flow control amount cavity and spray liquid dispersion decompression cavity two process cavities by the passage of multiple bending, spray liquid line style and sprays in line style, and the spray liquid uniform flow along line style direction is consistent, surge is low and uniformity; After external control temperature-controllable cooling water enters temperature control process cavity, have adjusted the temperature of nozzle body and spray liquid, make the homogeneous temperature of liquid to be sprayed consistent.Be specially:
External control temperature-controllable cooling water on the downside of nozzle body frame 4 termination through cooling-water duct 18, enter the second spray liquid temperature control cavity E by the first through hole 19, flow through the first spray liquid temperature control cavity D, flowed out by the second through hole 20 on the upside of nozzle body frame 4 termination, the temperature control water flowed through have adjusted the temperature of nozzle body and spray liquid, makes spray liquid homogeneous temperature consistent; Spray liquid flows into from feed pathway 14, at the bending of nozzle body frame 4 central upper, the drift angle place being sprayed on leg-of-mutton division board 5, after the scattering process of division board 5, spray liquid disperses in spray liquid dispersion decompression cavity C, the decompression in each grooved hole 12 on nozzle body frame 4 again, the spray liquid pressure that each dispensing orifice 16 flows out liquid distributing pore plate 3 is decay again, and the pressure of spray liquid is linear homogeneous distribution, makes spray liquid impulsive force low and uniformity; The spray liquid flowed out from liquid distributing pore plate 3 is sprayed on line style nozzle template 2 through the second spray liquid line style equal flow control amount cavity B that distributes, after the wave-shaped trench restriction of backwash liquid by the 5th groove 17 top edge processing in liquid distributing pore plate 3, medicinal liquid flow is linearly uniformly distributed, and makes to distribute the medicinal liquid flow uniformity that equal flow control amount cavity A sprays downwards along the first spray liquid line style; The realization of above three functions, makes the uniformity of the every physical index of liquid be sprayed onto on wafer, reaches the object of meticulous wet chemical process wafer.
Claims (10)
1. the wet processing process nozzle of the uniform flow of low impulsive force, it is characterized in that: comprise liquid medicine box cover plate (1), line style nozzle template (2), liquid distributing pore plate (3), nozzle body frame (4), division board (5) and temp. controlling box pressing plate (6), its herb liquid distributing pore plate (3) and division board (5) are arranged on the both sides of nozzle body frame (4) respectively, form spray liquid between division board (5) and nozzle body frame (4) and disperse the cavity (C) that reduces pressure, described division board (5) outer cover temp. controlling box pressing plate (6), spray liquid temperature control cavity is formed between this temp. controlling box pressing plate (6) and nozzle body frame (4) and division board (5), the outside of described liquid distributing pore plate (3) installs line style nozzle type plate (2) and liquid medicine box cover plate (1) successively, is respectively equipped with the spray liquid line style be connected and distributes equal flow control amount cavity between liquid distributing pore plate (3) with nozzle template (2) and in liquid distributing pore plate (3), described nozzle body frame (4) is respectively equipped with feed pathway (14) and grooved hole (12), this feed pathway (14) is arranged along the length direction of nozzle body frame (4), one end is connected with spray liquid source, the other end and the described spray liquid cavity (C) that disperses to reduce pressure is communicated with, and the both sides spray liquid line style be communicated with respectively in spray liquid dispersion decompression cavity (C) and liquid distributing pore plate (3) of described grooved hole (12) distributes equal flow control amount cavity.
2. by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1, it is characterized in that: described nozzle body frame (4) has steam vent (7), the exhaust passage (13) offered by nozzle body frame (4) inside of this steam vent (7) and the described spray liquid cavity (C) that disperses to reduce pressure is connected.
3. by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1 or 2, it is characterized in that: described nozzle body frame (4) side is along its length provided with the 3rd groove (11) of accommodating division board (5), opposite side is provided with accommodating liquid medicine box cover plate (1), 4th groove (15) of line style nozzle template (2) and liquid distributing pore plate (3), nozzle body frame (4) between described 3rd groove (11) and the 4th groove (15) is evenly equipped with multiple grooved hole (12) along its length, each grooved hole (12) is communicated in the 3rd groove (11) and the 4th groove (15) of its both sides respectively.
4. by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1 or 2, it is characterized in that: the other end of described feed pathway (14) to a lateral buckling of accommodating division board (5), and is connected with the described spray liquid cavity (C) that disperses to reduce pressure.
5. by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1 or 2, it is characterized in that: the inner side of described temp. controlling box pressing plate (6) is divided into the first groove (9) setting up and down and the second groove (10) by divider (8), wherein one end of the first groove (9) and the second groove (10) is connected with the import of cooling water and outlet respectively, and the other end of the first groove (9) and the second groove (10) is connected with each other logical.
6. by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1 or 2, it is characterized in that: described division board (5) is triangle, be contained in the triangle the 3rd groove (11) offered nozzle body frame (4) side.
7. by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1 or 2, it is characterized in that: described liquid distributing pore plate (3) side relative with line style nozzle template (2) is provided with the 5th groove (17) of indent, the top of the 5th groove (17) is evenly equipped with multiple dispensing orifice (16) along liquid distributing pore plate (3) length direction, and each dispensing orifice (16) is all connected with described grooved hole (12).
8., by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 7, it is characterized in that: the top edge of described 5th groove (17) is wavelike structure.
9., by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1 or 2, it is characterized in that: described line style nozzle template (2) is identical with the shape size of liquid distributing pore plate (3) opposite face.
10. by the wet processing process nozzle of the uniform flow of low impulsive force described in claim 1 or 2, it is characterized in that: described liquid medicine box cover plate (1) side relative with line style nozzle template (2) is provided with the 6th groove, described line style nozzle template (2) and liquid distributing pore plate (3) are all contained in the 6th groove, and are contained in together with liquid medicine box cover plate (1) in the 4th groove (15) that nozzle body frame (4) opposite side offers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210462363.8A CN103801466B (en) | 2012-11-15 | 2012-11-15 | The wet processing process nozzle of the uniform flow of a kind of low impulsive force |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210462363.8A CN103801466B (en) | 2012-11-15 | 2012-11-15 | The wet processing process nozzle of the uniform flow of a kind of low impulsive force |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103801466A CN103801466A (en) | 2014-05-21 |
| CN103801466B true CN103801466B (en) | 2015-11-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210462363.8A Active CN103801466B (en) | 2012-11-15 | 2012-11-15 | The wet processing process nozzle of the uniform flow of a kind of low impulsive force |
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| CN (1) | CN103801466B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105692530B (en) * | 2016-03-17 | 2018-08-14 | 江苏中远制药设备有限公司 | A kind of filling high bit divider |
| US11049741B2 (en) | 2017-12-01 | 2021-06-29 | Elemental Scientific, Inc. | Systems for integrated decomposition and scanning of a semiconducting wafer |
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|---|---|---|---|---|
| JP2002148777A (en) * | 2000-11-13 | 2002-05-22 | Mitsubishi Paper Mills Ltd | Slot die and processor for photosensitive material using the same |
| CN1611304A (en) * | 2003-10-27 | 2005-05-04 | 东京応化工业株式会社 | Slit nozzle |
| JP2006015235A (en) * | 2004-07-01 | 2006-01-19 | Nordson Corp | Slot die, method of charging liquid into porous material, method of treating fringe of porous wooden board, chipboard and particle board |
| CN101088624A (en) * | 2006-06-15 | 2007-12-19 | 株式会社细美事 | Narrow slit nozzle and liquid medicine coating apparatus with same |
| CN101199961A (en) * | 2006-12-12 | 2008-06-18 | 东京应化工业株式会社 | Slit nozzle |
| CN101396685A (en) * | 2007-07-19 | 2009-04-01 | 诺信公司 | Slot nozzle assembly, slot coating gun, shim plate, and method of extruding a foamable melted material in a wide band |
-
2012
- 2012-11-15 CN CN201210462363.8A patent/CN103801466B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002148777A (en) * | 2000-11-13 | 2002-05-22 | Mitsubishi Paper Mills Ltd | Slot die and processor for photosensitive material using the same |
| CN1611304A (en) * | 2003-10-27 | 2005-05-04 | 东京応化工业株式会社 | Slit nozzle |
| JP2006015235A (en) * | 2004-07-01 | 2006-01-19 | Nordson Corp | Slot die, method of charging liquid into porous material, method of treating fringe of porous wooden board, chipboard and particle board |
| CN101088624A (en) * | 2006-06-15 | 2007-12-19 | 株式会社细美事 | Narrow slit nozzle and liquid medicine coating apparatus with same |
| CN101199961A (en) * | 2006-12-12 | 2008-06-18 | 东京应化工业株式会社 | Slit nozzle |
| CN101396685A (en) * | 2007-07-19 | 2009-04-01 | 诺信公司 | Slot nozzle assembly, slot coating gun, shim plate, and method of extruding a foamable melted material in a wide band |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103801466A (en) | 2014-05-21 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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